Gas mass flow controller nozzle super mirror tool and processing method

Abstract

The application relates to the technical field of precision machining, in particular to a gas mass flow controller nozzle super-mirror tool and a machining method, the tool comprises a grinding and polishing disc, a grinding and polishing baffle and a pre-tightening nut, wherein: a nozzle hole and a magnet hole are arranged on the surface of the grinding and polishing disc; the nozzle hole is used for placing a nozzle to be machined and the pre-tightening nut, and the magnet hole is used for placing a magnet column; the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc through the magnet column; and a through hole corresponding to the nozzle hole is arranged on the grinding and polishing baffle. The application adopts the unique porous nozzle super-mirror tool to perform mirror machining on the nozzle of the gas mass flow controller, controls the edge of the nozzle, the grinding pressure and the perpendicularity of the nozzle, and can solve the problem of air leakage of the valve port caused by the collapse or beveling of the nozzle edge when the nozzle mirror machining is performed by the traditional mechanical grinding and polishing equipment.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of precision machining, in particular to a gas mass flow controller pressure nozzle super mirror tool and a machining method. BACKGROUND

[0002] The gas mass flow controller is widely applied to the fields of aerospace, semiconductors, instruments, material preparation, biological medicine and the like, and is an important gas mass flow measuring and controlling instrument. In special fields such as semiconductors, high-end full-metal dynamic sealing type flow controllers are used in large quantities, and the pressure nozzle is an important component of the high-end full-metal dynamic sealing gas mass flow controller. The metal dynamic sealing type electromagnetic proportional valve adjusts the flow by the opening distance between the nozzle and the pressure nozzle, and the greater the distance between the nozzle and the pressure nozzle, the greater the flow through the gas mass flow controller. When the driving signal is zero, the pressure nozzle is tightly attached to the nozzle by the downward elastic force of the flat spring, and at this time, theoretically, the flow through the flow regulating valve is zero.

[0003] However, in the actual production of the gas mass flow controller product, the pressure nozzle needs to be machined into a super mirror surface with a surface roughness of about Ra0.008, and the flatness of the pressure nozzle mirror and the perpendicularity between the pressure nozzle and the armature column need to be ensured. The traditional mechanical grinding and polishing method is difficult to machine the pressure nozzle and the nozzle to meet the metal sealing requirements, that is, when the mirror surface of the pressure nozzle has a collapse or an inclined surface, it will cause the flow through the gas mass flow controller to be not zero when the gas mass flow controller is closed, that is, there is "valve port leakage". SUMMARY

[0004] The application provides a gas mass flow controller pressure nozzle super mirror tool and a machining method, which solves the problem that the traditional mirror surface machining easily causes the edge of the mirror surface to be machined into a collapse or an inclined surface, resulting in "valve port leakage".

[0005] In order to achieve the above-mentioned purpose, the application provides a gas mass flow controller pressure nozzle super mirror tool, which comprises a grinding and polishing disc, a grinding and polishing baffle and a pre-tightening nut, wherein: the grinding and polishing disc is provided with a pressure nozzle hole and a magnet hole on the surface; the pressure nozzle hole is used for placing a pressure nozzle to be machined and a pre-tightening nut, and the magnet hole is used for placing a magnet column; the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc through the magnet column; and the grinding and polishing baffle is provided with a through hole corresponding to the pressure nozzle hole.

[0006] Further, the pressure nozzle hole is a through hole perpendicular to the bottom surface of the grinding and polishing disc, and the magnet hole is a blind hole perpendicular to the bottom surface of the grinding and polishing disc.

[0007] Further, the diameter of the pressure nozzle hole is greater than the diameter of the pressure nozzle to be machined.

[0008] Further, the material of the grinding and polishing baffle is a magnetic conductive material, and the thickness is less than the height of the nozzle to be processed.

[0009] Furthermore, the application also provides a processing method of the nozzle super mirror tooling by using the gas mass flow controller, comprising the following steps: step 1: paste the grinding and polishing baffle on the bottom surface of the grinding and polishing disc, and put the magnet column into the magnet hole on the surface of the grinding and polishing disc, so that the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc; step 2: put the nozzle to be processed into the nozzle hole on the surface of the grinding and polishing disc; step 3: put the pre-tightening nut into the nozzle hole on the surface of the grinding and polishing disc, so that the pre-tightening nut is in contact with the nozzle to be processed, adjust the pre-tightening nut, extrude the nozzle to be processed from the nozzle hole into the through hole on the grinding and polishing baffle, so that the nozzle to be processed is in the same plane with the grinding and polishing baffle; step 4: put the tooling as a whole on the grinding device to grind the nozzle to be processed, and after 3-5 minutes, observe the surface of the nozzle to be processed, when there is no visible scratch on the surface of the nozzle to be processed, the grinding is qualified, and then wash with water; step 5: put the tooling as a whole on the polishing device to polish the nozzle to be processed, and after polishing for 5 minutes, observe the surface of the nozzle to be processed, when there is no scratch on the surface of the nozzle to be processed and the surface is a mirror surface, the polishing is finished; step 6: take out the magnet column, take down the grinding and polishing baffle, continue to tighten the pre-tightening nut, extrude the processed nozzle completely, take down the nozzle, clean with alcohol and then wipe with a dust-free cloth; and step 7: image and measure the upper surface of the processed nozzle by using a three-dimensional profile instrument, and evaluate whether the nozzle is qualified.

[0010] Further, in step 7, the following steps are adopted to judge whether the nozzle is qualified: step 7.1: if the imaging cross section displayed by the three-dimensional profile instrument is a plane, and the surface roughness is less than or equal to Ra0.009, the nozzle is qualified; if the imaging cross section displayed by the three-dimensional profile instrument is a curved surface or the surface roughness is greater than Ra0.009, the nozzle is unqualified; step 7.2: when the nozzle is unqualified, measure the height of the nozzle; step 7.3: if the height of the nozzle is within the tolerance range, repeat steps 1-6 to re-process; if the height of the nozzle is not within the tolerance range, directly perform scrap processing.

[0011] The gas mass flow controller nozzle super mirror tooling and the processing method provided by the application have the following beneficial effects:

[0012] The application adopts the unique porous nozzle super mirror tooling to process the mirror surface of the gas mass flow controller nozzle, controls the edge of the nozzle, the grinding pressure and the perpendicularity of the nozzle, and can solve the problem of air leakage of the valve port caused by the collapse or grinding into an inclined surface of the nozzle edge when the nozzle mirror surface is processed by the traditional mechanical grinding and polishing equipment. BRIEF DESCRIPTION OF DRAWINGS

[0013] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application and are incorporated in and constitute a part of this application. The illustrations, together with the description, serve to explain the application, but not to limit the application. In the drawings:

[0014] Fig. 1 is a structural schematic diagram of a gas mass flow controller nozzle super mirror tool provided according to an embodiment of the application;

[0015] Fig. 2 is an assembly schematic diagram of a gas mass flow controller nozzle super mirror tool provided according to an embodiment of the application;

[0016] In the figure: 1-grinding and polishing disc, 2-grinding and polishing baffle, 3-pre-tightening nut, 4-nozzle hole, 5-magnet hole, 6-nozzle to be processed. DETAILED DESCRIPTION

[0017] In order to enable persons skilled in the art to better understand the application scheme, the technical solutions in the embodiments of the application will be clearly and completely described below in conjunction with the drawings in the embodiments of the application. Obviously, the described embodiments are only a part of the embodiments of the application, not all the embodiments. Based on the embodiments in the application, all other embodiments obtained by persons skilled in the art without creative labor should be within the scope of protection of the application.

[0018] It should be noted that the terms "first", "second", and the like in the specification and claims of the application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily indicate a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the application described herein can be implemented. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion, for example, a process, method, system, product or device including a series of steps or units does not necessarily limit to those steps or units clearly listed, but can include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0019] In the present application, the terms "up", "down", "left", "right", "front", "back", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe the application and its embodiments, and are not intended to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0020] And, the above-mentioned partial terms can be used to represent other meanings in addition to the orientation or positional relationship, for example, the term "upper" can also be used to represent a certain dependent relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to the specific circumstances.

[0021] In addition, the meaning of the term "a plurality of" should be two and more than two.

[0022] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0023] As Figs. 1-2 shown, the present application provides a gas mass flow controller pressure nozzle super mirror tool, which comprises a grinding and polishing disc 1, a grinding and polishing baffle 2 and a pre-tightening nut 3, wherein: the grinding and polishing disc 1 is provided with a pressure nozzle hole 4 and a magnet hole 5 on the surface; the pressure nozzle hole 4 is used for placing a to-be-processed pressure nozzle 6 and a pre-tightening nut 3, and the magnet hole 5 is used for placing a magnet column; the grinding and polishing baffle 2 is adsorbed on the bottom surface of the grinding and polishing disc 1 through the magnet column; the grinding and polishing baffle 2 is provided with a through hole corresponding to the pressure nozzle hole 4.

[0024] Specifically, the gas mass flow controller pressure nozzle super mirror tool provided by the embodiment of the present application is mainly used for fixing and placing the gas mass flow controller pressure nozzle, so that the grinding and polishing of the gas mass flow controller pressure nozzle is more uniform during the super mirror processing, and the edge of the pressure nozzle is prevented from collapsing or forming an inclined surface. In the embodiment of the present application, the diameter of the grinding and polishing disc 1 is preferably 200 mm, the thickness is preferably 50 mm, the material is preferably 316L, the surface is preferably processed 16 pressure nozzle holes 4 and 24 magnet holes 5, the pressure nozzle hole 4 is used for placing a to-be-processed pressure nozzle 6 and a pre-tightening nut 3, the number of pre-tightening nuts 3 is the same as the number of to-be-processed pressure nozzles 6 placed (not all pre-tightening nuts 3 are marked), the magnet hole 5 is used for placing a magnet column, the grinding and polishing baffle 2 is adsorbed on the bottom surface of the grinding and polishing disc 1 through the magnet column, and the grinding and polishing baffle 2 is mainly used for protecting the edge of the pressure nozzle from being ground and collapsed. During processing, the grinding and polishing baffle 2 will also be ground and polished, which is equivalent to a kind of consumable, which can be replaced at any time according to the actual processing situation. Fig. 2

[0025] ​More specifically, before processing, the to-be-processed pressure nozzle 6 is placed in the pressure nozzle hole 4, and then the same number of pre-tightening nuts 3 are placed in the pressure nozzle hole 4, that is, one to-be-processed pressure nozzle 6 and one pre-tightening nut 3 are placed in each pressure nozzle hole 4. During processing, the to-be-processed pressure nozzle 6 in the pressure nozzle hole 4 is extruded by adjusting the pre-tightening nut 3, so that it enters the corresponding through hole of the lower grinding and polishing baffle 2. Then, the whole tool is placed on the grinding and polishing device for processing, so that the grinding and polishing baffle 2 and the to-be-processed pressure nozzle 6 rotate together, ensuring that the upper surface of the to-be-processed pressure nozzle 6 is protected by the grinding and polishing baffle 2 during the whole processing process, so as to prevent the edge from collapsing and realize the grinding and polishing of the whole pressure nozzle.

[0026] Further, the pressure nozzle hole 4 is a through hole perpendicular to the bottom surface of the grinding and polishing disc 1, and the magnet hole 5 is a blind hole perpendicular to the bottom surface of the grinding and polishing disc 1. The pressure nozzle hole 4 is a through hole corresponding to the through hole of the lower grinding and polishing baffle 2, and is used for placing the to-be-processed pressure nozzle 6. The magnet hole 5 is a blind hole, and the inside is used for placing a magnet column, so that the grinding and polishing baffle 2 can be adsorbed on the bottom surface of the grinding and polishing disc 1.

[0027] Further, the diameter of the pressure nozzle hole 4 is greater than the diameter of the to-be-processed pressure nozzle 6. In the embodiment of the present application, the diameter of the pressure nozzle hole 4 is slightly larger than the diameter of the to-be-processed pressure nozzle 6, preferably greater than 0.1 mm, so that the to-be-processed pressure nozzle 6 can be tightly fixed in the pressure nozzle hole 4 during processing, and the verticality of processing is ensured.

[0028] Further, the material of the grinding and polishing baffle 2 is a magnetically conductive material, and the thickness is less than the height of the to-be-processed pressure nozzle 6. The grinding and polishing baffle 2 is made of a magnetically conductive material, in order to be adsorbed on the grinding and polishing disc 1 by the magnet column, and further fasten the to-be-processed pressure nozzle 6. In the embodiment of the present application, the height of the to-be-processed pressure nozzle 6 is preferably 0.55 mm, and the thickness of the grinding and polishing baffle 2 is 0.5 mm, so that the pressure nozzle head can protrude in the through hole, so that 0.05 mm is ground off during the grinding and polishing process.

[0029] In addition, the embodiment of the present application also provides a processing method of a pressure nozzle super-mirror tool using a gas mass flow controller, comprising the following steps:

[0030] Step 1: paste the grinding and polishing baffle 2 on the bottom surface of the grinding and polishing disc 1, and place the magnet column in the magnet hole 5 on the surface of the grinding and polishing disc 1, so that the grinding and polishing baffle 2 is adsorbed on the bottom surface of the grinding and polishing disc 1;

[0031] Step 2: place the to-be-processed pressure nozzle 6 in the pressure nozzle hole 4 on the surface of the grinding and polishing disc 1;

[0032] Step 3: Place the pre-tightening nut 3 into the nozzle hole 4 on the surface of the grinding and polishing disc 1, so that the pre-tightening nut 3 contacts the nozzle 6 to be processed. Adjust the pre-tightening nut 3 to push the nozzle 6 to be processed out of the nozzle hole 4 and into the through hole on the grinding and polishing baffle 2, so that the nozzle 6 to be processed and the grinding and polishing baffle 2 are on the same plane. The pre-tightening nut 3 is used to apply a certain pressure to the nozzle 6 to be processed, so that the nozzle 6 to be processed moves downward in the nozzle hole 4 and enters the through hole of the grinding and polishing baffle 2, and tightly presses the upper surface of the nozzle 6 to be processed against the grinding and polishing baffle 2, so as to prevent the grinding surfaces from not being on the same plane during the grinding process, and thus prevent the nozzle from being processed into a bevel.

[0033] Step 4: Place the entire tooling on the grinding device and grind the nozzle 6 to be processed. After 3-5 minutes, observe the surface of the nozzle 6 to be processed. When there are no visible scratches on the surface of the nozzle 6 to be processed, the grinding is qualified. Rinse with water.

[0034] Step 5: Place the entire fixture on the polishing device and polish the nozzle 6 to be processed for 5 minutes. When the surface of the nozzle 6 to be processed is free of scratches and has a mirror finish, the polishing is complete.

[0035] Step 6: Remove the magnet post, remove the grinding and polishing baffle 2, continue to tighten the pre-tightening nut 3, completely squeeze out the processed nozzle, remove the nozzle, clean it with alcohol, and wipe it clean with a lint-free cloth.

[0036] Step 7.1: Use a 3D profilometer to image and measure the upper surface of the machined nozzle, and evaluate whether the nozzle is qualified. If the imaging section displayed by the 3D profilometer is a plane and the surface roughness is ≤Ra0.009, the machined nozzle is qualified; if the imaging section displayed by the 3D profilometer is a curved surface or the surface roughness is >Ra0.009, the machined nozzle is unqualified.

[0037] Step 7.2: If the nozzle is not up to standard after processing, measure the height of the nozzle;

[0038] Step 7.3: If the height of the nozzle is within the tolerance range, repeat steps 1-6 and reprocess; if the height of the nozzle is outside the tolerance range, scrap it directly.

[0039] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A gas mass flow controller pressure nozzle super-mirror tooling, characterized in that, The grinding and polishing disc, the grinding and polishing baffle and the pre-tightening nut, wherein: The grinding and polishing disc is provided with a pressing nozzle hole and a magnet hole on the surface thereof; The pressing nozzle hole is used for placing the pressing nozzle to be processed and the pre-tightening nut, and the magnet hole is used for placing the magnet column; The grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc through the magnet column; The grinding and polishing baffle is provided with a through hole corresponding to the pressing nozzle hole; The pressing nozzle hole is a through hole perpendicular to the bottom surface of the grinding and polishing disc, and the magnet hole is a blind hole perpendicular to the bottom surface of the grinding and polishing disc; The diameter of the pressing nozzle hole is greater than the diameter of the pressing nozzle to be processed; Before processing, the pressing nozzle to be processed is placed in the pressing nozzle hole, and then the same number of pre-tightening nuts are placed in the pressing nozzle hole, that is, one pressing nozzle to be processed and one pre-tightening nut are placed in each pressing nozzle hole. During processing, the pressing nozzle to be processed in the pressing nozzle hole is extruded by adjusting the pre-tightening nut, so that it enters the through hole corresponding to the grinding and polishing baffle below, and then the whole tooling is placed on the grinding and polishing device for processing, so that the grinding and polishing baffle and the pressing nozzle to be processed rotate together to realize the grinding and polishing of the whole pressing nozzle.

2. The gas mass flow controller nozzle super-mirror tooling of claim 1, wherein, The material of the grinding and polishing baffle is a magnetically conductive material, and the thickness is less than the height of the pressing nozzle to be processed.

3. A processing method using the processing tool of the gas mass flow controller nozzle super mirror surface of any one of claims 1-2, characterized in that, The method comprises the following steps: Step 1: The grinding and polishing baffle is attached to the bottom surface of the grinding and polishing disc, and the magnet column is placed in the magnet hole on the surface of the grinding and polishing disc, so that the grinding and polishing baffle is adsorbed on the bottom surface of the grinding and polishing disc; Step 2: The pressing nozzle to be processed is placed in the pressing nozzle hole on the surface of the grinding and polishing disc; Step 3: The pre-tightening nut is placed in the pressing nozzle hole on the surface of the grinding and polishing disc, so that the pre-tightening nut is in contact with the pressing nozzle to be processed. The pre-tightening nut is adjusted to extrude the pressing nozzle to be processed out of the pressing nozzle hole and into the through hole on the grinding and polishing baffle, so that the pressing nozzle to be processed is in the same plane as the grinding and polishing baffle; Step 4: The whole tooling is placed on the grinding device to grind the pressing nozzle to be processed. After 3-5 minutes, the surface condition of the pressing nozzle to be processed is observed. When there is no visible scratch on the surface of the pressing nozzle to be processed, the grinding is qualified, and the pressing nozzle to be processed is washed with water; Step 5: The whole tooling is placed on the polishing device to polish the pressing nozzle to be processed. After polishing for 5 minutes, the surface of the pressing nozzle to be processed is observed to be free of scratches and a mirror surface, and the polishing is completed; Step 6: The magnet column is removed, the grinding and polishing baffle is removed, the pre-tightening nut is continued to be tightened, the finished pressing nozzle is completely extruded, and after the pressing nozzle is removed, it is cleaned with alcohol and a dust-free cloth; Step 7: The upper surface of the finished pressing nozzle is imaged and measured by a three-dimensional profilometer to evaluate whether the pressing nozzle is qualified.

4. The processing method using the gas mass flow controller pressure nozzle super mirror tooling according to claim 3, characterized in that, In step 7, the following steps are used to determine whether the pressing nozzle is qualified: Step 7.1: If the imaging cross-section displayed by the three-dimensional profilometer is a plane and the surface roughness is ≤Ra0.009, the pressing nozzle is qualified; if the imaging cross-section displayed by the three-dimensional profilometer is a curved surface or the surface roughness is >Ra0.009, the pressing nozzle is unqualified; Step 7.2: When the pressing nozzle is unqualified, the height of the pressing nozzle is measured; Step 7.3: If the height of the presser is within the tolerance range, repeat steps 1-6 to reprocess; if the height of the presser is not within the tolerance range, directly proceed to scrap processing.

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