A micro-part detection device

Abstract

The application discloses a micro-part detection device, which comprises a microscopic vision device for observing micro-parts and two or more micro-needle assemblies; any micro-needle assembly is provided with a three-axis moving table I; any micro-needle assembly has micro-needles for absorbing micro-parts by electrostatic force and / or van der Waals force; the motion tracks of the micro-needles of at least two micro-needle assemblies partially or completely coincide to clamp the micro-parts. The micro-part detection device is a detection device integrating micro-part pickup, detection and release, etc., which clamps micro-parts by one or more micro-needle assemblies and observes the micro-parts by the microscopic vision device, so that multi-directional observation of the structure and appearance of the micro-parts can be realized, and meanwhile, the cooperative operation of the multiple micro-needle assemblies can realize contact detection of the surface of the micro-parts and the like. It can be seen that the micro-part detection device is suitable for operation of micro-parts with small sizes and complex shapes and can meet various detection work of the micro-parts.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micro-assembly, and particularly to a micro-component detection device. BACKGROUND

[0002] With the development of micro-assembly technology, the size of micro-components gradually shrinks to microns, and the structure of micro-components is increasingly complex. Meanwhile, the requirements for the structural quality of micro-components are also increasing, which brings more challenges to the detection of micro-components.

[0003] The existing detection method of micro-components mainly uses multiple microscopic vision devices to observe micro-components from several fixed angles. For example, more than three microscopic vision devices are arranged around the micro-component, which surround the micro-component and are aligned with different parts of the micro-component, and can be used to observe the surface quality of the micro-component at different parts.

[0004] The detectable direction of the above-mentioned detection method mainly depends on the number of microscopic vision devices. Since the size of the micro-component itself is extremely small, it is difficult to increase the number of microscopic vision devices to increase the detectable direction of the micro-component.

[0005] In addition, for micro-components with complex shapes, the placement angle of the micro-component between multiple microscopic vision devices is limited by its shape structure, resulting in that part of the local surface of the micro-component is always in the detection blind area of all microscopic vision devices. In short, this detection method is difficult to adapt to micro-components with complex shapes and structures. SUMMARY

[0006] The purpose of the present application is to provide a micro-component detection device which can realize multi-directional observation of the structure and morphology of micro-components and meet the needs of different detection tasks of micro-components.

[0007] To achieve the above-mentioned purpose, the present application provides a micro-component detection device, which comprises a microscopic vision device for observing micro-components and two or more microneedle assemblies; any microneedle assembly is provided with a three-axis moving table I; any microneedle assembly has microneedles for picking up micro-components by electrostatic force and / or van der Waals force; the motion trajectories of the microneedles of at least two microneedle assemblies partially or completely overlap to realize clamping of the micro-component.

[0008] In some embodiments, the microscopic vision device comprises a microscopic vision device I which can move along the observation direction.

[0009] In some embodiments, the microscopic vision device further comprises a microscopic vision device II; the microscopic vision device II is arranged on a three-axis moving table II; the observation direction of the microscope lens I of the microscopic vision device I intersects the observation direction of the microscope lens of the microscopic vision device II.

[0010] In some embodiments, the microscopic vision device I comprises a microscope lens I and a vertical moving table; the three-axis moving table I of the two microneedle assemblies is arranged on the vertical moving table; and the two microneedle assemblies are symmetrically distributed along the moving track of the microscope lens I.

[0011] In some embodiments, the number of microneedle assemblies is three, and the orientations of the microneedles of the three microneedle assemblies are different.

[0012] In some embodiments, the micro part detection device further comprises a part transfer table for placing the micro parts; the placing table of the part transfer table is rotatable and / or movable in at least one direction.

[0013] In some embodiments, all the microneedle assemblies comprise a first microneedle assembly, a second microneedle assembly and a third microneedle assembly; the three-axis moving table I of the first microneedle assembly and the second microneedle assembly is arranged on the vertical moving table, and the three-axis moving table I of the third microneedle assembly, the vertical moving table and the microscopic vision device II are arranged in three of the four directions of front, back, left and right of the part transfer table, respectively.

[0014] In some embodiments, the microneedle assembly further comprises a mounting plate I and a mounting plate II, and the microneedles are arranged on the mounting plate I or the mounting plate II; the mounting plate I is provided with a connecting hole I and an arc groove, and the center of the arc groove coincides with the connecting hole I; the mounting plate II is provided with a connecting hole II and a connecting hole III; the connecting hole I and the connecting hole II are hingedly connected, and the connecting hole III overlaps the rotating track of the arc groove around the connecting hole I.

[0015] In some embodiments, the microneedle card is embedded in the microneedle clamping groove of the mounting plate I.

[0016] In some embodiments, the needle of the microneedle is bent.

[0017] With respect to the above background, the micro part detection device provided by the present application comprises a microscopic vision device for observing the micro parts and two or more microneedle assemblies; any one of the microneedle assemblies is provided with a three-axis moving table I, and any one of the microneedle assemblies has microneedles for absorbing the micro parts by electrostatic force and / or van der Waals force; at the same time, in the micro part detection device, the moving tracks of the microneedles of at least two microneedle assemblies partially overlap or completely overlap to clamp the micro parts.

[0018] The micro part detection device provided by the present application uses the microneedle assemblies to position the micro parts and uses the microscopic vision device to observe the micro parts. When the microneedle assemblies are used to position the micro parts, the microneedles of a single microneedle assembly can absorb the micro parts by electrostatic force and / or van der Waals force, and the microneedles of multiple microneedle assemblies can jointly clamp and release the micro parts, so that the micro part detection device can adapt to micro parts of various shapes, sizes and weights, and ensure the positioning reliability of the micro parts in the detection operation.

[0019] It can be seen that the micro part detection device provided by the application is a detection device integrating micro part picking, detection, and release, which can be used for detecting micro parts with small size and complex structure. The micro part detection device can realize multi-directional observation of the structure and morphology of the micro part by independently and cooperatively controlling the three micro needle assemblies, increase the detectable directions of the micro part, and provide the flexibility of the micro part in the detection operation, thereby meeting the needs of different detection tasks and having a wide application prospect in the field of micro part detection and assembly. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only embodiments of the present application, and other drawings can be obtained by the provided drawings without creative labor for those skilled in the art.

[0021] Figure 1 The structural schematic diagram of the micro part detection device provided by the embodiments of the present application is shown in the figure.

[0022] Figure 2 The structural schematic diagram of the micro needle assembly provided by the embodiments of the present application is shown in the figure.

[0023] Figure 3 The structural schematic diagram of the microscopic vision equipment I provided by the embodiments of the present application is shown in the figure.

[0024] Figure 4 The structural schematic diagram of the microscopic vision equipment II provided by the embodiments of the present application is shown in the figure.

[0025] Figure 5 The structural schematic diagram of the part conversion table provided by the embodiments of the present application is shown in the figure.

[0026] Among them, 1-microscopic vision equipment, 11-microscopic vision equipment I, 111-microscope lens I, 112-vertical moving table, 12-microscopic vision equipment II, 121-microscope lens II, 122-three-axis moving table II, 2-micro needle assembly, 21-micro needle, 211-needle head, 22-mounting plate I, 221-connection hole I, 222-arc groove, 223-micro needle clamping groove, 23-mounting plate II, 231-connection hole III, 24-three-axis moving table I, 3-part conversion table, 31-placing table, 4-operation platform. DETAILED DESCRIPTION

[0027] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments of the present application, all the other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0028] In order for those skilled in the art in the technical field to better understand the technical solutions of the present application, the present application will be further described in detail below with reference to the drawings and specific embodiments.

[0029] Please refer to Figures 1 to 5 , Figure 1 The structural schematic diagram of the micro part detection device provided by the embodiments of the present application is shown in the figure. Figure 2 The structural schematic diagram of the microneedle assembly provided by the embodiments of the present application is shown in the figure. Figure 3 The structural schematic diagram of the microscopic vision equipment I provided by the embodiments of the present application is shown in the figure. Figure 4 The structural schematic diagram of the microscopic vision equipment II provided by the embodiments of the present application is shown in the figure. Figure 5 The structural schematic diagram of the part conversion table provided by the embodiments of the present application is shown in the figure.

[0030] Please refer to Figure 1 and Figure 2 The present application provides a micro part detection device, which comprises microscopic vision equipment 1 and two or more microneedle assemblies 2. In the micro part detection device, any one of the microneedle assemblies 2 is provided with a three-axis moving table I 24, and of course is also provided with a microneedle 21. For any one of the microneedle assemblies 2, the microneedle 21 is used to attract a micro part by at least one of electrostatic force and van der Waals force. For two or more microneedle assemblies 2, the motion trajectories of the microneedles 21 of at least two of the microneedle assemblies 2 partially or completely coincide. Therefore, the microneedles 21 of these microneedle assemblies 2 can not only attract a micro part by electrostatic force and / or van der Waals force, but also can clamp the micro part.

[0031] When the micro-component detection device is used, the operator can use the micro-needle assembly 2 to pick up the micro-component and use the microscopic vision equipment 1 to observe the micro-component. The micro-needle assembly 2 is provided with a three-axis moving table I24, and thus adjusting the three-axis moving table I24 can change the position of the micro-needle assembly 2 and further change the positioning state of the micro-needle assembly 2 and the micro-needle 21 thereof to the micro-component, for example, adjusting the three-axis moving table I24 can change the relative position of the micro-component to the microscopic vision equipment 1, so as to move the micro-component into and out of the observation field of view of the microscopic vision equipment 1, and for another example, adjusting the three-axis moving table I24 can change the orientation of the micro-component to meet the observation operation requirement of the microscopic vision equipment 1 to different parts of the micro-component. In short, the micro-needle assembly 2 can adjust the posture of the micro-needle 21 through the three-axis moving table I24, so that the micro-needle 21 works in a suitable pose.

[0032] When the micro-component detection device is used, the operator can also use two or more micro-needle assemblies 2 to clamp the micro-component and use the microscopic vision equipment 1 to observe the micro-component. When the micro-component is clamped by the multiple micro-needle assemblies 2, any one of the micro-needle assemblies 2 can move relative to the microscopic vision equipment 1 under the action of the three-axis moving table I24 connected thereto, and thus the position and the orientation of the micro-component relative to the microscopic vision equipment 1 can also be adjusted when the micro-component is clamped by the multiple micro-needle assemblies 2. In addition, when the micro-component is clamped by the multiple micro-needle assemblies 2, the positioning strength of the micro-needle 21 to the micro-component is large, which is suitable for micro-components with large size and weight and is also suitable for performing complex and long-time actions to the micro-component in subsequent detection operations of the micro-component.

[0033] In summary, the micro-component detection device provided by the present application can not only increase the detectable orientation of the micro-component and improve the action flexibility of the micro-component in the detection operation, but also can adapt to micro-components with different shapes, sizes and weights, and ensure the positioning reliability of the micro-component in the detection operation.

[0034] The micro-component detection device provided by the present application will be further described below in combination with the drawings and embodiments.

[0035] Please refer to Figures 1 to 3 In some embodiments, the microscopic vision equipment 1 includes a microscopic vision equipment I11 which can move along an observation direction; for example, the operator usually observes from top to bottom, and thus the observation direction and the moving direction of the microscopic vision equipment I11 can both be vertical direction, that is, the microscopic vision equipment includes a microscopic vision equipment I11 which can move along the vertical direction, and the microscope lens I111 of the microscopic vision equipment I11 is parallel to the vertical direction.

[0036] When the microneedle assembly 2 is used to observe the micro part positioned by the microneedle assembly 2, the microneedle assembly 2 uses the three-axis moving table 124 to adjust the position and angle of the micro part, so that the micro part enters the field of view of the microscopic vision equipment I11 and the region to be observed of the micro part faces the microscope lens I111 of the microscopic vision equipment I11; at the same time, the microscopic vision equipment I11 is moved along the observation direction of the microscopic vision equipment I11, and of course the focal length of the microscope lens I111 of the microscopic vision equipment I11 can also be adjusted, so that the micro part in the field of view of the microscopic vision equipment I11 is magnified to a reasonable multiple and the clear pattern of the micro part is maintained.

[0037] Please refer to Figure 1 , Figure 3 and Figure 4 , on the basis of the above embodiment, the microscopic vision equipment further comprises a microscopic vision equipment II12; the microscopic vision equipment II12 is arranged on the three-axis moving table II122, and the observation direction of the microscopic lens II121 of the microscopic vision equipment II12 intersects the observation direction of the microscopic lens I111 of the microscopic vision equipment I11, for example, the observation direction of the microscopic lens I111 of the microscopic vision equipment I11 is vertical, and the observation direction of the microscopic lens II121 of the microscopic vision equipment II12 is horizontal.

[0038] The microscopic vision equipment II12 is connected with the three-axis moving table II122, so that by adjusting the three-axis moving table II122, the position of the microscopic vision equipment II12 can be changed, so that the microscopic lens II121 of the microscopic vision equipment II12 is aligned with different positions of the micro part, and the operability of the micro part detection device is enriched. For example, when the microscopic lens I111 of the microscopic vision equipment I11 is aligned with the upper center of the micro part, under the driving of the three-axis moving table II122, the microscopic lens II121 of the microscopic vision equipment II12 can be aligned with different parts of the side of the micro part, which is beneficial to the operator to systematically understand the overall morphological characteristics of the micro part in the observation operation.

[0039] Please refer to Figures 1 to 3 , the above-mentioned microscopic vision equipment I11 can specifically include a microscope lens I111 and a vertical moving table 112; the microscope lens I111 and the two microneedle assemblies 2 are arranged on the vertical moving table 112. Of course, the above-mentioned two microneedle assemblies 2 arranged on the vertical moving table 112 means that the three-axis moving table 124 of any one microneedle assembly 2 is arranged on the vertical moving table 112, so that the above-mentioned two microneedle assemblies 2 can be synchronously moved up and down under the driving of the vertical moving table 112, or can be independently moved under the driving of the respective three-axis moving table 124. For the microscopic lens I111 of the microscopic vision equipment I11, the vertical moving table 112 can control the microscopic lens I111 to move up and down to adapt to different magnification.

[0040] In the above embodiment, the two microneedle assemblies 2 can be symmetrically distributed about the moving track of the microscope lens I111, for example, the two microneedle assemblies 2 are symmetrically distributed on the left and right sides of the moving track of the microscope lens I111.

[0041] Generally, one micropart detection device can be provided with three microneedle assemblies 2, the orientations of the microneedles 21 of the three microneedle assemblies 2 are different from each other, for example, the microneedles 21 of the two microneedle assemblies 2 connected with the vertical moving table 112 are oppositely distributed, the microneedles 21 of the third microneedle assembly 2 extend from the front side to the back side. Figure 1

[0042] The three microneedle assemblies 2 of the micropart detection device can complete multiple types of detection tasks.

[0043] The microneedles 21 of a single microneedle assembly 2 can pick up micro components by electrostatic force or van der Waals force, which is suitable for simple detection tasks of micro-sized micro components.

[0044] The microneedles 21 of two microneedle assemblies 2 can cooperatively clamp micro parts of micron to sub-millimeter size, and of course can also release the aforementioned micro parts, and the motion states of the three-axis moving tables I24 of the two microneedle assemblies 2 are different, which can also realize the pose adjustment of the aforementioned micro parts, so as to detect the aforementioned micro parts from more angles. In addition, one of the microneedles 21 of the microneedle assembly 2 can pick up a micro component, and the other microneedle 21 of the microneedle assembly 2 can be used as a test needle, so that the test needle can realize surface detection on the micro part.

[0045] When the three microneedle assemblies 2 work cooperatively, the posture of the micro part can be more accurately adjusted through the different step motions of the three microneedle assemblies 2, which is helpful for omnidirectional detection of the surface quality of the micro part; and two microneedles 21 can clamp the part, and the third microneedle 21 can be used as a test needle, so that the test needle can realize surface detection on the micro part, thereby increasing the operation type of part detection.

[0046] As can be seen, the three microneedle assemblies 2 of the micropart detection device can cooperatively complete the operations of adsorption, clamping, pose adjustment, and release of the micro part, thereby meeting the multiple operation requirements of the micro part assembly and testing tasks.

[0047] Please refer to Figure 1 and Figure 5 ​In some embodiments, the micro-component detection device provided by the present application further comprises a component transfer table 3 for placing the micro-components, the component transfer table 3 having a placement table 31 which is rotatable and / or movable in at least one direction. When the micro-component detection device is operated, the micro-components to be observed are placed on the component transfer table 3, and the plurality of microneedle assemblies 2 and the microscopic vision equipment are arranged around the component transfer table 3. If the placement table 31 of the component transfer table 3 is rotatable, the operator can quickly adjust the angle of the micro-components by rotating the placement table 31, thereby changing the relative positional relationship between the microneedle assemblies 2 and the microscopic vision equipment and the aforementioned micro-components, respectively. If the placement table 31 of the component transfer table 3 is movable in at least one direction, the operator can also quickly adjust the relative positional relationship between the micro-components and the microneedle assemblies 2, the microscopic vision equipment by moving the placement table 31. When the moving direction of the placement table 31 is perpendicular to the microscope lens of the microscopic vision equipment, moving the placement table 31 can quickly move the micro-components into and out of the field of view of the aforementioned microscopic vision equipment.

[0048] Please refer to Figure 1 , Figure 4 and Figure 5 , the aforementioned component transfer table 3 can specifically include a stage, a rotating motion platform, a linearly moving platform and a component table base; wherein the base of the linearly moving platform is fixed on the operation platform 4, the working direction of the linearly moving platform is horizontal and perpendicular to the axis of the microscopic vision equipment II 12, the rotating platform is installed on the linearly moving platform, and the placement table 31 is arranged on the rotating platform.

[0049] As shown in Figure 2 , on the basis of the aforementioned embodiments, the microneedle assembly 2 of the micro-component detection device specifically includes a first microneedle assembly 2, a second microneedle assembly 2 and a third microneedle assembly 2; wherein the three-axis moving table I 24 of any one of the first microneedle assembly 2 and the second microneedle assembly 2 is arranged on the vertical moving table 112, and the three-axis moving table I 24 of the third microneedle assembly 2, the vertical moving table 112 and the microscopic vision equipment II 12 are respectively arranged in three of the four directions of front, back, left and right of the component transfer table 3. Please refer to Figure 1 , the vertical moving table 112 is arranged on the back side of Figure 1 , and the microscopic vision equipment II 12 and the three-axis moving table I 24 of the third microneedle assembly 2 are respectively arranged on the left and right sides of Figure 1 . Since the two microneedle assemblies 2 are symmetrically installed on the vertical moving table 112, the two microneedle assemblies 2 can be regarded as being installed on the same side of the component transfer table 3 together with the vertical moving table 112.

[0050] Among them, the three-axis moving table I 24 of the third microneedle assembly 2, the vertical moving table 112 and the microscopic vision equipment II 12 can all be installed on the operation platform 4, and similarly, the component transfer table 3 is also installed on the operation platform 4.

[0051] Still referring to Figure 2 In some embodiments, the microneedle assembly 2 of the micro-component detection device not only includes the microneedle 21 and the three-axis moving table I24, but also includes a mounting plate I22 and a mounting plate II23. The microneedle 21 is arranged on the mounting plate I22 or the mounting plate II23; the mounting plate I22 is provided with a connecting hole I221 and an arc groove 222, the center of the arc groove 222 coincides with the connecting hole I221; the mounting plate II23 is provided with a connecting hole II and a connecting hole III 231; for the microneedle assembly 2, the connecting hole I221 and the connecting hole II are hingedly connected, and the connecting hole III 231 overlaps the rotation track of the arc groove 222 around the connecting hole I221. Of course, there are often locking members between the connecting hole III 231 and the arc groove 222. In this embodiment, the mounting plate I22 and the mounting plate II23 can be regarded as a microneedle support, and the microneedle 21 is connected to the three-axis moving table I24 through the microneedle support. The microneedle support can be used to adjust the attitude of the microneedle 21, so that the microneedle 21 works in a suitable pose.

[0052] For the micro-component detection device provided with three microneedle assemblies 2, two of the microneedle assemblies 2 can be arranged on the vertical moving table 112 and symmetrically distributed relative to the vertical moving table 112, and the third microneedle assembly 2 can be fixed to the operation platform 4 through the base, and the vertical end surface of the microneedle support of the third microneedle assembly 2 can be perpendicular to the axis of the microscope lens II121 of the microscopic vision equipment II12.

[0053] When operating the microneedle assembly 2, the operator can not only adjust the position of the microneedle assembly 2 and its microneedle through the three-axis moving table I24, but also adjust the angle of the microneedle 21 through the mounting plate I22 and the mounting plate II23.

[0054] In addition, the mounting plate I22 can be provided with a microneedle clamping groove 223; the microneedle 21 is clamped in the microneedle clamping groove 223 to realize the detachable connection of the microneedle 21 and the mounting plate I22. When the microneedle 21 is clamped by the microneedle clamping groove 223, the position of the microneedle 21 can be adjusted by adjusting the clamping amount of the microneedle 21 in the microneedle clamping groove 223, and different models of microneedles 21 can be flexibly adjusted on the mounting plate I22 according to specific operation requirements.

[0055] In the various embodiments provided above, the microneedle assembly 2 has a bent microneedle 21, for example, the microneedle 21 of the microneedle assembly 2 is generally in the shape of an elongated rod, the needle head 211 of the microneedle 21 slightly deviates from the axis of the microneedle 21, or in other words, the needle head 211 of the microneedle 21 is deflected and bent towards the radial side of the microneedle 21.

[0056] When the microneedle 21 is slightly bent, the microneedle 21 can be used to scrape the surface of the micro part for cleaning the micro part or collecting the substance on the surface of the micro part. It can be seen that, compared with the straight microneedle 21, the operation form of the microneedle 21 slightly bent by the needle 211 is more complex and diverse, and can better adapt to the operation requirements of various detection operations of the micro part.

[0057] In various embodiments provided in the present application, whether it is the three-axis moving table I24 or the three-axis moving table II 122, it can include an X-direction moving platform, a Y-direction moving platform and a Z-direction moving platform; the X-direction moving platform, the Y-direction moving platform and the Z-direction moving platform of the same three-axis moving table are installed in sequence, for example, the base of the Y-direction moving platform is installed on the moving block of the X-direction moving platform, and the base of the Z-direction moving platform is installed on the moving block of the Y-direction moving platform.

[0058] In various embodiments provided in the present application, whether it is the microscopic vision equipment I11 or the microscopic vision equipment II 12, it can include industrial cameras, microscope lenses, camera supports, operation device supports and device bases and other components, of course, the microscopic vision equipment I11 is also provided with a vertical moving table 112, and the microscopic vision equipment II 12 is also provided with a three-axis moving table II 122.

[0059] For the microscopic vision equipment I11, the base of the vertical moving table 112 can be installed on the operation platform 4 through the device base; the operation device support is installed on the moving block of the vertical moving table 112, a pair of microneedle assemblies 2 are symmetrically installed on both sides of the operation device support, the camera support is installed on the axis of the operation device support, and the vision detection device composed of the industrial camera and the microscopic lens I111 is installed on the aforementioned camera support.

[0060] For the microscopic vision equipment II 12, the base of the Y-direction moving platform is directly installed on the operation platform 4, the base of the X-direction moving platform is installed on the moving block of the Y-direction moving platform, the microscopic vision equipment II 12 is connected with the moving block of the X-direction moving platform through the camera support, and the axis of the microscopic lens II 121 of the microscopic vision equipment II 12 is horizontal. During work, the X-direction moving platform can be adjusted for focusing to adapt to the magnification of the microscopic lens II 121, and the Y-direction moving platform can be adjusted to move the micro part to the center of the field of view of the microscopic vision equipment II 12.

[0061] The micro part detection device provided by the application is used for placing the micro part on the placement table, adjusting the orientation of the placement table to move the micro part to the field of view of the microscopic vision equipment, and zooming the microscope lens of the microscopic vision equipment to reasonably select the magnification of the microscope lens according to the size of the micro part. At the same time, the micro part is adjusted in the field of view of the microscopic vision equipment by vertically moving the table 112 or the three-axis moving table II 122 to make the pattern clear. In addition, the single microneedle assembly 2 is independently operated or the multiple microneedle assemblies 2 are cooperatively operated, so that the micro part can be placed in different attitudes in the field of view of the microscopic vision equipment, and the micro part can be conveniently detected in all directions.

[0062] In summary, the micro part detection device provided by the application is a detection device integrating micro part picking, detection, release and the like, which can be used for detecting the micro part with small size and complex structure. The micro part detection device can realize multi-directional observation of the structure and morphology of the micro part by independently and cooperatively controlling the three microneedle assemblies 2, so that the micro part detection device has high flexibility and strong adaptability, and can meet the needs of different detection tasks, and has wide application prospects in the fields of micro part detection and assembly.

[0063] The micro part detection device provided by the application is described in detail above. The principles and implementation modes of the application are described by applying specific examples in this paper, and the above description of the examples is only used to help understand the method of the application and its core idea. It should be pointed out that, for ordinary skilled persons in the technical field, some improvements and modifications can be made to the application without departing from the principles of the application, and these improvements and modifications also fall within the protection scope of the claims of the application.

Claims

1. A micro-part inspection apparatus characterized by comprising: The application relates to a microscopic vision device (1) and two or more microneedle assemblies (2) for observing micro parts; any of the microneedle assemblies (2) is provided with a three-axis moving table I (24); any of the microneedle assemblies (2) is provided with microneedles (21) for sucking the micro parts by electrostatic force and / or van der Waals force; the motion trajectories of the microneedles (21) of at least two of the microneedle assemblies (2) partially or completely coincide to clamp the micro parts; the number of the microneedle assemblies (2) is three; the directions of the microneedles (21) of the three microneedle assemblies (2) are different; the three microneedle assemblies (2) work cooperatively to complete the operations of adsorbing, clamping, adjusting the posture and releasing the micro parts, and meet the operation requirements of the micro part assembling and testing tasks; the microneedle assembly (2) further comprises a mounting plate I (22) and a mounting plate II (23); the microneedles (21) are arranged on the mounting plate I (22) or the mounting plate II (23); the mounting plate I (22) is provided with a connecting hole I (221) and an arc groove (222); the center of the arc groove (222) coincides with the connecting hole I (221); the mounting plate II (23) is provided with a connecting hole II and a connecting hole III (231); the connecting hole I (221) and the connecting hole II are hingedly connected; the connecting hole III (231) overlaps the rotation track of the arc groove (222) around the connecting hole I (221).

2. The micro-part inspection apparatus according to claim 1, wherein The microscopic vision device (1) comprises a microscopic vision device I (11) which can move along an observation direction.

3. The micro-part inspection apparatus according to claim 2, wherein The microscopic vision device (1) further comprises a microscopic vision device II (12); the microscopic vision device II (12) is arranged on a three-axis moving table II (122); the observation direction of a microscope lens I (111) of the microscopic vision device I (11) intersects the observation direction of a microscope lens (121) of the microscopic vision device II (12).

4. The micro-part inspection apparatus according to claim 3, wherein The microscopic vision device I (11) comprises the microscope lens I (111) and a vertical moving table (112); the three-axis moving table I (24) of two of the microneedle assemblies (2) and the microscope lens I (111) are arranged on the vertical moving table (112); the two microneedle assemblies (2) are symmetrically distributed along the motion track of the microscope lens I (111).

5. The micro-part inspection apparatus according to claim 4, wherein The application further comprises a part conversion table (3) for placing the micro parts; the placing table (31) of the part conversion table (3) can rotate and / or move along at least one direction.

6. The micro-part inspection apparatus according to claim 5, wherein All the microneedle assemblies (2) comprise a first microneedle assembly, a second microneedle assembly and a third microneedle assembly; the three-axis moving table I (24) of the first microneedle assembly and the second microneedle assembly is arranged on the vertical moving table (112); the three-axis moving table I (24) of the third microneedle assembly, the vertical moving table (112) and the microscopic vision device II (12) are respectively arranged in three of the four directions of front, back, left and right of the part conversion table (3).

7. The micro-part inspection apparatus according to any one of claims 1 to 6, characterized by The microneedles (21) are clamped in microneedle clamping grooves (223) of the mounting plate I (22).

8. The micro-part inspection apparatus according to any one of claims 1 to 6, characterized by The needle (211) of the microneedle (21) is bent.

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