A soft X-ray spectrometer

Abstract

The present invention discloses a soft X-ray energy spectrometer, which relates to the field of X-ray detection technology and includes a shell, a detection component, and at least two spectroscopic components. The shell has a detection cavity, and one end of the shell has an opening that can communicate with the detection cavity. The opening is used to pass at least two soft X-rays, and the opening can be connected to a vacuum device for evacuating the detection cavity. The detection component and each spectroscopic component are arranged in the detection cavity, and the detection component is located behind the spectroscopic component along the soft X-ray transmission direction. Each spectroscopic component is used to receive and decompose one path of soft X-rays to reflect soft X-rays of a specific wavelength to the detection component. The detection component is used to perform energy spectrum detection on the received soft X-rays, and the soft X-rays reflected by each spectroscopic component have different wavelengths. The soft X-ray energy spectrometer provided by the present invention can reduce the attenuation of soft X-rays during transmission and can realize the detection of soft X-rays of different wavelengths.

Description

Technical Field

[0001] The present invention relates to the technical field of X-ray detection, and in particular to a soft X-ray spectrometer. Background Art

[0002] Soft X-ray energy spectrum detection is a crucial component of ICF experiments. By analyzing the energy spectrum of incident soft X-rays, information about the material generating the soft X-rays can be obtained, including total X-ray flux, radiation temperature, and conversion efficiency. A soft X-ray detector typically consists of an incident aperture, a spectroscopic system, and detection components. Patent CN109164120A, for example, discloses a high-time-resolution soft X-ray energy spectrometer. However, the soft X-rays from this spectrometer may be blocked by the air during transmission, resulting in attenuation of the soft X-rays and affecting the accuracy of the detection results. Summary of the Invention

[0003] The purpose of the present invention is to provide a soft X-ray spectrometer to solve the problems existing in the above-mentioned prior art, reduce the attenuation of soft X-rays during transmission, and enable the detection of soft X-rays of different wavelengths.

[0004] To achieve the above object, the present invention provides the following solutions:

[0005] The present invention provides a soft X-ray energy spectrometer, comprising a shell, a detection component and at least two spectroscopic components, wherein the shell has a detection cavity, and one end of the shell has an opening capable of communicating with the detection cavity, the opening being used to allow at least two paths of soft X-rays to pass through, and the opening being capable of being connected to a vacuum device for evacuating the detection cavity; the detection component and each of the spectroscopic components are arranged in the detection cavity, and the detection component is located behind the spectroscopic component along the transmission direction of the soft X-rays, each of the spectroscopic components is respectively used to receive and decompose one path of the soft X-rays to reflect the soft X-rays of a specific wavelength to the detection component, the detection component is used to perform energy spectrum detection on the received soft X-rays, and the soft X-rays reflected by each of the spectroscopic components have different wavelengths.

[0006] Preferably, each of the spectroscopic components is rotatably connected to the inner wall of the detection cavity through a rotating component, and the spectroscopic component can adjust the angle relative to the inner wall of the detection cavity through the rotating component to adjust the incident angle and reflection angle of the soft X-ray, and the relative position of the rotating component and the detection cavity can be fixed.

[0007] Preferably, it further includes a filter component, which is arranged in the detection cavity and located between the spectroscopic component and the detection component, and is used to filter stray light of the soft X-rays between each spectroscopic component and the detection component.

[0008] Preferably, the filter assembly includes a light-shielding plate, which is fixedly connected to the inner wall of the detection cavity and has a plurality of light-through holes of different sizes. Different light-through holes are used to allow the soft X-rays reflected by different spectroscopic components to pass through, and the soft X-rays after passing through the light-through holes can all be irradiated onto the detection component.

[0009] Preferably, a filter is detachably connected to each of the light through holes, and each of the filters is used to filter stray light in the soft X-rays.

[0010] Preferably, the filter assembly further includes a filter, which is located between the light shielding plate and the detection component and is fixedly connected to the inner wall of the detection cavity; the filter is used to filter stray light of the soft X-rays between the light shielding plate and the detection component.

[0011] Preferably, the shell includes a conical cylinder and a cylindrical cylinder that are connected and communicated in sequence along the soft X-ray transmission direction, the small diameter end of the conical cylinder is the opening, each of the light-splitting components is distributed along the circumference of the shell, and a flange is provided at the opening, and the flange is used to connect the vacuum equipment.

[0012] Preferably, each of the spectroscopic components is configured as a crystal monochromator or a multilayer film monochromator; the detection component adopts a Si photodiode, and the detection component is arranged at the end of the shell away from the opening, and the detection component is communicated with the processing component through a cable connector fixed and extending from the end face of the shell.

[0013] Preferably, the housing is provided with a valve capable of communicating with the detection chamber.

[0014] Preferably, the axial dimension of the shell does not exceed 400 mm, the diameter dimension does not exceed 60 mm, and the shell is made of light-shielding material.

[0015] Compared with the prior art, the present invention has achieved the following technical effects:

[0016] The soft X-ray energy spectrometer provided by the present invention evacuates the detection chamber through a vacuum device to reduce the attenuation of the soft X-rays emitted into the detection chamber during the transmission process; when the spectroscopic component receives the soft X-rays, it decomposes the soft X-rays to reflect the soft X-rays of a specific wavelength to the detection component to perform energy spectrum detection on the soft X-rays of the specific wavelength. Since at least two spectroscopic components are provided, and the soft X-rays decomposed and reflected by different spectroscopic components have different wavelengths, energy spectrum detection of soft X-rays of at least two wavelengths can be performed simultaneously. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic structural diagram of the soft X-ray spectrometer provided in Example 1;

[0019] Figure 2 Schematic diagram of soft X-ray transmission in the soft X-ray spectrometer provided in Example 1.

[0020] Icon: 1-soft X-ray spectrometer; 10-housing; 11-detection cavity; 12-opening; 13-conical cylinder; 14-cylindrical cylinder; 15-flange; 20-detection component; 21-cable connector; 30-spectrometric component; 40-rotating component; 50-filter assembly; 51-light shield; 511-light hole; 52-filter; 2-soft X-ray. DETAILED DESCRIPTION

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] The purpose of the present invention is to provide a soft X-ray spectrometer to solve the problems existing in the above-mentioned prior art, reduce the attenuation of soft X-rays during transmission, and enable the detection of soft X-rays of different wavelengths.

[0023] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] Example 1

[0025] This embodiment provides a soft X-ray spectrometer 1, see Figure 1 and Figure 2, including a shell 10, a detection component 20 and at least two spectroscopic components 30, the shell 10 has a detection cavity 11, and one end of the shell 10 has an opening 12 that can be connected to the detection cavity 11, the opening 12 is used to pass at least two soft X-rays 2, and the opening 12 can be connected to a vacuum device for evacuating the detection cavity 11; the detection component 20 and each spectroscopic component 30 are arranged in the detection cavity 11, and the detection component 20 is located behind the spectroscopic component 30 along the transmission direction of the soft X-ray 2, each spectroscopic component 30 is used to receive and decompose one path of soft X-ray 2 to reflect soft X-ray 2 of a specific wavelength to the detection component 20, the detection component 20 is used to perform energy spectrum detection on the received soft X-ray 2, and the soft X-ray 2 reflected by each spectroscopic component 30 has a different wavelength.

[0026] The detection cavity 11 is evacuated by a vacuum device to reduce the attenuation of the soft X-rays 2 injected into the detection cavity 11 during the transmission process; when the spectroscopic component 30 receives the soft X-rays 2, the soft X-rays 2 are decomposed to reflect the soft X-rays 2 of a specific wavelength to the detection component 20 to perform energy spectrum detection on the soft X-rays 2 of the specific wavelength. Since at least two spectroscopic components 30 are provided, and the soft X-rays 2 decomposed and reflected by different spectroscopic components 30 have different wavelengths, energy spectrum detection of at least two wavelengths of soft X-rays 2 can be performed simultaneously.

[0027] Specifically, the ultimate vacuum degree of the detection chamber 11 can be made better than 1E-3Pa, and the time to quickly reach the working vacuum is less than 5 minutes, thereby improving efficiency; and the light source component for emitting soft X-rays 2 can be arranged at the opening 12, or in the vacuum pipe of the vacuum equipment, so as to realize the emission of soft X-rays 2 into the detection chamber 11.

[0028] More preferably, the spectroscopic component 30 can be set as a monochromator, such as a crystal monochromator or a multilayer monochromator, which can decompose the soft X-rays 2 emitted by the light source into monochromatic light and reflect the soft X-rays 2 of a specific wavelength, wherein the wavelength of the reflected soft X-rays 2 is related to the parameters of the crystal monochromator or the multilayer monochromator. By selecting crystal monochromators or multilayer monochromators with different parameters, the soft X-rays 2 reflected by different spectroscopic components 30 can have different wavelengths; if a multilayer monochromator is selected, the peak reflection efficiency should be greater than 20% (greater than 1.5Kev), the uniformity should be better than 1.5%, and the angle uncertainty should be better than 1.5%. The materials include but are not limited to B4C / W, Cr / Ti, Cr / C, B4C / Mo, B4C / Si, B4C / MoSi2 and other material combinations.

[0029] More preferably, the detection component 20 can adopt a Si photodiode with sensitive detection, and the detection component 20 is arranged at the end of the shell 10 away from the outlet 12. The detection component 20 is connected to the processing component through a cable connector 21 fixed and extending from the end face of the shell 10; specifically, a square Si photodiode is selected with a response range of 100ev-1.8Kev, and the cable connector 21 uses a standard BNC connector. The processing component includes a computer and other terminal equipment; the Si photodiode is connected to the back-end signal amplification circuit through a gold lead, and the amplified signal is led out through a standard BNC connector. Then, the signal can be read by a weak ammeter, and the read signal is input into the computer and drawn into a corresponding chart to complete the detection work.

[0030] In the optional scheme of this embodiment, it is more preferred that each spectroscopic component 30 is rotatably connected to the inner wall of the detection cavity 11 through a rotating component 40, and the spectroscopic component 30 can adjust the angle relative to the inner wall of the detection cavity 11 through the rotating component 40 to adjust the incident angle and reflection angle with the soft X-ray 2, and the relative position of the rotating component 40 and the detection cavity 11 can be fixed; by setting the rotating component 40, the reflection angle of the soft X-ray 2 can be adjusted so that the soft X-ray 2 can accurately enter the detection receiving range of the detection component 20.

[0031] Specifically, the rotating component 40 can be set as a damping shaft, and the angle of the splitting component 30 can be manually adjusted and the position of the splitting component 30 can be fixed; in addition, the rotating component 40 is set as a motor, and the splitting component 30 is driven by the motor to rotate, so as to realize electric adjustment of the angle of the splitting component 30 and fix the position of the splitting component 30; it should be noted that the structure of the rotating component 40 is not limited to the above two types, as long as the rotation and fixation of the splitting component 30 can be realized.

[0032] Among the optional schemes of this embodiment, it is more preferred that the soft X-ray energy spectrometer 1 provided in this embodiment also includes a filter component 50, which is arranged in the detection cavity 11, and the filter component 50 is located between the spectroscopic component 30 and the detection component 20. The filter component 50 is used to filter the stray light of the soft X-rays 2 between each spectroscopic component 30 and the detection component 20, and further filter the soft X-rays 2 reflected by the spectroscopic component 30 to avoid the interference of stray light on the soft X-rays 2 and improve the detection accuracy.

[0033] In the optional scheme of this embodiment, it is more preferred that the filter component 50 includes a light-shielding plate 51, which is fixedly connected to the inner wall of the detection cavity 11, and has multiple light-through holes 511 of different sizes on the light-shielding plate 51. The different light-through holes 511 are used to allow the soft X-rays 2 reflected by different spectroscopic components 30 to pass through, and the soft X-rays 2 after passing through the light-through holes 511 can all be irradiated onto the detection component 20; specifically, the light-shielding plate 51 is made of metal, and only the light-through holes 511 can pass through the soft X-rays 2, which plays a role in controlling the transmission diameter of the soft X-rays 2 and filtering stray light, and the multiple light-through holes 511 of different sizes can adapt to the adjustment of the angle of the spectroscopic component 30, and the soft X-rays 2 can still enter the detection range of the detection component 20 through the light-through holes 511.

[0034] Specifically, the light shielding plate 51 is detachably embedded in the inner wall of the detection cavity 11 , or is connected to the inner wall of the detection cavity 11 via a detachable bracket, so as to facilitate installation and replacement.

[0035] In the optional scheme of this embodiment, it is more preferred that each light hole 511 is used to be detachably connected to a filter for easy installation and replacement, and each filter is used to filter stray light in the soft X-ray 2, wherein the material of the filter is determined according to the wavelength of the soft X-ray 2 that needs to pass through, and the material includes but is not limited to Al, Fe, Ni or C, etc. The thickness of the filter is determined according to actual needs.

[0036] In the optional scheme of this embodiment, it is more preferred that the filter component 50 also includes a filter 52, which is located between the shading plate 51 and the detection component 20, and the filter 52 is fixedly connected to the inner wall of the detection cavity 11; the filter 52 is used to filter stray light of the soft X-rays 2 between the shading plate 51 and the detection component 20, so as to further improve the energy spectrum detection accuracy of the soft X-rays 2.

[0037] Specifically, the filter 52 is detachably embedded in the inner wall of the detection cavity 11 , or is connected to the inner wall of the detection cavity 11 via a detachable bracket, so as to facilitate installation and replacement.

[0038] In the optional scheme of this embodiment, it is more preferred that the shell 10 includes a conical cylinder 13 and a cylindrical cylinder 14 that are connected and communicated in sequence along the transmission direction of the soft X-ray 2. The front section is set as the conical cylinder 13 to save overall space and mass. The small diameter end of the conical cylinder 13 is an opening 12. The various splitting components 30 are distributed along the circumference of the shell 10, and a flange 15 is provided at the opening 12. The flange 15 is convenient for connecting to vacuum equipment.

[0039] More preferably, the axial dimension of the shell 10 does not exceed 400 mm, and the diameter dimension does not exceed 60 mm, which reduces the overall size and weight and is easy to carry. The specific size is determined according to actual needs; and the shell 10 is made of light-shielding material such as metal to avoid stray light affecting detection.

[0040] In an optional solution of this embodiment, it is more preferred that a valve capable of communicating with the detection chamber 11 is provided on the housing 10 to facilitate control of the gas environment in the detection chamber 11 .

[0041] Among the optional solutions of this embodiment, more preferably, the soft X-ray spectrometer 1 provided in this embodiment has a measurement energy range of 0.05-1.8 Kev and an energy resolution better than 20, thereby improving the adaptability and sensitivity of detection.

[0042] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only intended to help understand the method and core concept of the present invention. At the same time, those skilled in the art will find that the specific implementation methods and application scopes may vary based on the concept of the present invention. In summary, the contents of this specification should not be construed as limiting the present invention.

Claims

1. A soft X-ray spectrometer, characterized in that: The invention comprises a housing (10), a detection component (20), a filter assembly (50) and at least two spectroscopic components (30), wherein the housing (10) has a detection cavity (11), and one end of the housing (10) has an opening (12) capable of communicating with the detection cavity (11), the opening (12) is used to allow at least two soft X-rays (2) to pass through, and the opening (12) can be connected to a vacuum device for evacuating the detection cavity (11); the detection component (20), the filter assembly (50) and each of the spectroscopic components (30) are connected to the detection cavity (11). 0) is arranged in the detection cavity (11), and the detection component (20) is located behind the light splitting component (30) along the transmission direction of the soft X-ray (2), each of the light splitting components (30) is used to receive and decompose the soft X-ray (2) along one path, so as to reflect the soft X-ray (2) of a specific wavelength to the detection component (20), and the detection component (20) is used to perform energy spectrum detection on the received soft X-ray (2), and the soft X-ray (2) reflected by each of the light splitting components (30) has a different wavelength; Each of the light splitting components (30) is rotatably connected to the inner wall of the detection cavity (11) via a rotating component (40), and the light splitting component (30) can adjust an angle relative to the inner wall of the detection cavity (11) via the rotating component (40) to adjust an incident angle and a reflection angle with the soft X-ray (2); The filter assembly (50) is located between the light-splitting component (30) and the detection component (20). The filter assembly (50) includes a light shielding plate (51). The light shielding plate (51) has a plurality of light-through holes (511) of different sizes. Different light-through holes (511) are used to allow the soft X-rays (2) reflected by different light-splitting components (30) to pass through. The soft X-rays (2) passing through the light-through holes (511) can all be irradiated onto the detection component (20). The filter assembly (50) is used to filter stray light of the soft X-rays (2) between each light-splitting component (30) and the detection component (20).

2. The soft X-ray spectrometer according to claim 1, characterized in that: The relative positions of the rotating component (40) and the detection chamber (11) can be fixed.

3. The soft X-ray spectrometer according to claim 1, characterized in that: The light shielding plate (51) is fixedly connected to the inner wall of the detection cavity (11).

4. The soft X-ray spectrometer according to claim 3, characterized in that: Each of the light through holes (511) is detachably connected to a filter, and each of the filters is used to filter stray light in the soft X-rays (2).

5. The soft X-ray spectrometer according to claim 3, characterized in that: The filter assembly (50) further comprises a filter (52), the filter (52) being located between the light shielding plate (51) and the detection component (20), and the filter (52) being fixedly connected to the inner wall of the detection cavity (11); the filter (52) being used for filtering stray light of the soft X-rays (2) between the light shielding plate (51) and the detection component (20).

6. The soft X-ray spectrometer according to claim 1, characterized in that: The housing (10) includes a conical cylinder (13) and a cylindrical cylinder (14) that are sequentially connected and communicated along the transmission direction of the soft X-rays (2); the small-diameter end of the conical cylinder (13) is the opening (12); the light-splitting components (30) are distributed along the circumference of the housing (10); and a flange (15) is provided at the opening (12); the flange (15) is used to connect to the vacuum equipment.

7. The soft X-ray spectrometer according to claim 1, characterized in that: Each of the light-splitting components (30) is configured as a crystal monochromator or a multilayer film monochromator; the detection component (20) uses a Si photodiode, and the detection component (20) is arranged at an end of the housing (10) away from the opening (12); the detection component (20) is connected to the processing component for communication via a cable connector (21) fixed and extending from the end surface of the housing (10).

8. The soft X-ray spectrometer according to claim 1, characterized in that: The housing (10) is provided with a valve capable of communicating with the detection chamber (11).

9. The soft X-ray spectrometer according to claim 6, characterized in that: The axial dimension of the housing (10) does not exceed 400 mm, the diameter dimension does not exceed 60 mm, and the housing (10) is made of a light-shielding material.

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