Methods, systems, and comb structures for fabricating microelectromechanical system comb structures

Abstract

Embodiments of the present disclosure provide a method, system and comb structure for manufacturing a micro-electro-mechanical system comb structure. The method comprises forming a fixed member blank plate and a movable member blank plate of the comb structure respectively, wherein the fixed member blank plate comprises a fixed member substrate and fixed member combs; and the movable member blank plate comprises a movable member riveting portion and movable member combs; inserting the movable member blank plate on the fixed member blank plate in a direction perpendicular to the fixed member blank plate, so that the fixed member combs and the movable member combs are arranged in intervals; and fixing the movable member riveting portion to the fixed member substrate to form the comb structure. According to the method of the embodiments of the present disclosure, the depth-width ratio of the comb structure can be higher than that of the comb structure manufactured by the traditional manufacturing method, and the consistency of the gap between the combs is ensured, thereby improving the performance of the comb structure.

Description

TECHNICAL FIELD

[0001] Embodiments of the present disclosure mainly relate to the field of micro-electro-mechanical system. More particularly, embodiments of the present disclosure relate to a method, system and comb structure for manufacturing a micro-electro-mechanical system comb structure. BACKGROUND

[0002] Micro-electro-mechanical system (MEMS) is a kind of micro system usually prepared on a silicon wafer by IC process. The preparation process of micro-mechanical system includes photolithography, ion beam etching, chemical etching, wafer bonding, etc., and an electrode is prepared on the mechanical structure so as to be controlled by electronic technology.

[0003] As a kind of micro-electro-mechanical system electronic device, micro-electro-mechanical system comb structure, also known as comb motor, includes fixed comb and movable comb which is movable relative to the fixed comb. After positive and negative electricity are respectively applied to the fixed comb and the movable comb, the movable comb will be subjected to electrostatic force and will be displaced under the action of the electrostatic force, thereby realizing the motor function of the comb structure. In addition, the micro-electro-mechanical comb structure can also be used as an inertial sensor. When used as an inertial sensor, the movable comb is usually connected with a spring structure. When the micro-electro-mechanical comb structure has an inertial motion, the movable comb can be displaced under the action of the inertial force, thereby causing the capacitance between the fixed comb and the movable comb to change. By measuring the capacitance change between the movable comb and the fixed comb, the displacement amount of the movable comb can be determined, and the acceleration value of the movement can be determined, thereby realizing the function of the inertial sensor. SUMMARY

[0004] In order to improve the driving ability or sensing performance of the manufactured micro-electro-mechanical system comb structure, embodiments of the present disclosure provide a method and system for manufacturing a micro-electro-mechanical system comb structure.

[0005] In a first aspect of the present disclosure, a method for manufacturing a micro-electro-mechanical system comb structure is provided. The method includes: forming a fixed blank and a movable blank of the comb structure respectively, wherein the fixed blank includes a fixed substrate and a fixed comb; and the movable blank includes a movable riveting part and a movable comb; inserting the movable blank on the fixed blank in an insertion direction perpendicular to the fixed blank, so as to arrange the fixed comb and the movable comb in a spaced manner; and fixing the movable riveting part to the fixed substrate to form the comb structure.

[0006] According to the method of the embodiments of the present disclosure, by forming the fixed member blank and the movable member blank respectively and inserting them together vertically, a comb tooth structure with a higher depth-width ratio than that manufactured by a conventional manufacturing method can be obtained, and the consistency of the gap between the comb teeth can be ensured, thereby improving the driving performance of the comb tooth structure as a comb tooth motor and the sensor performance as an inertial sensor.

[0007] In an implementation manner, the method further comprises adjusting the position of the movable member blank relative to the fixed member blank so as to make the spacing between the fixed member comb teeth and the movable member comb teeth consistent. In this way, the consistency of the spacing between the comb teeth can be further ensured, thereby improving the performance of the comb tooth structure.

[0008] In an implementation manner, the method further comprises inserting the movable member blank on the fixed member blank by means of positioning members formed on the fixed member blank and the movable member blank. This way facilitates the accurate positioning of the movable member blank on the fixed member blank.

[0009] In an implementation manner, the inserting step further comprises moving the movable member blank so that a first predetermined positioning member and a second predetermined positioning member of the positioning members are aligned in the inserting direction, wherein the first predetermined positioning member is formed on the movable member blank and the second predetermined positioning member is formed on the fixed member blank; and further moving the movable member blank in the inserting direction so that the first predetermined positioning member and the second predetermined positioning member are engaged to insert the movable member blank on the fixed member blank. This method can realize the pre-positioning of the movable member blank and the fixed member blank in the inserting process in a simple way.

[0010] In an implementation manner, the adjusting the position of the movable member blank relative to the fixed member blank comprises using an image acquisition unit to acquire an image of interference fringes generated after light passes through a grating mark assembly of the positioning members; and moving at least one of the movable member blank and the fixed member blank in an adjusting direction perpendicular to the inserting direction so that the interference fringes in the image satisfy a predetermined rule. This method can realize the accurate adjustment of the position of the movable member blank in at least one direction at a lower cost.

[0011] In one implementation, adjusting the position of the movable member blank relative to the fixed member blank includes electrically connecting one of a positive electrode and a negative electrode of a power supply having a predetermined voltage to the movable member blank, and electrically connecting the other of the positive electrode and the negative electrode to the fixed member blank; acquiring an electrostatic force between a movable member comb tooth on the movable member blank and a fixed member comb tooth on the fixed member blank; and moving the movable member blank in a direction in which the movable member comb teeth or the fixed member comb teeth are arranged to adjust the electrostatic force to within a predetermined threshold range. In this way, the spacing between the movable member comb teeth and the fixed member comb teeth can be made uniform with a simple structure and components.

[0012] In one implementation, adjusting the position of the movable member blank relative to the fixed member blank includes moving the movable member blank in a first adjustment direction in which the movable member comb teeth or the fixed member comb teeth are arranged by a first predetermined distance until the movable member comb teeth and the fixed member comb teeth contact, and determining a first movement distance of the movable member blank at which the contact force is first generated; moving the movable member blank in a second adjustment direction opposite to the first adjustment direction until the movable member comb teeth and the fixed member comb teeth contact, and determining a second movement distance of the movable member blank at which the contact force is first generated; determining a third movement distance of the movable member blank in the first adjustment direction based on the first predetermined distance, the first movement distance, and the second movement distance; and moving the movable member blank in the first adjustment direction by the third movement distance to make the spacing of the comb tooth structure uniform. In this way, the spacing between the movable member comb teeth and the fixed member comb teeth can be made uniform with a simple structure and components.

[0013] In one implementation, determining the first movement distance includes acquiring at least two different contact forces during movement of the movable member blank in the first adjustment direction; acquiring a relationship between the contact forces and the movement distance of the movable member blank; and determining the first movement distance based on the relationship.

[0014] In one implementation, determining the second movement distance includes acquiring at least two different contact forces during movement of the movable member blank in the second adjustment direction; acquiring a relationship between the contact forces and the movement distance of the movable member blank; and determining the second movement distance based on the relationship.

[0015] In one implementation, the method further includes fixing the movable member rivet portion to the fixed member substrate by an adhesive. In this way, the movable member can be fixed to the fixed member without deformation of the comb teeth, thereby improving the reliability of the manufactured comb tooth structure.

[0016] According to a second aspect of this disclosure, a system for manufacturing a comb structure for a microelectromechanical system (MEMS) is provided. The system includes an etching apparatus configured to form a fixed component blank and a movable component blank for the comb structure, wherein the fixed component blank includes a fixed component substrate and fixed component comb teeth; and the movable component blank includes a movable component riveting portion and movable component comb teeth; and a moving device configured to couple to the movable component blank to insert the movable component blank into the fixed component blank in an insertion direction perpendicular to the fixed component blank. Using this system, a comb tooth aspect ratio higher than that of comb structures manufactured by conventional methods can be obtained, and the consistency of the gaps between the comb teeth can be ensured, thereby improving the driving performance of the comb structure as a comb motor and its sensor performance as an inertial sensor.

[0017] In some embodiments, the system further includes a positioning member configured to guide and / or position the movable blank to facilitate consistent tooth spacing in the formed comb structure. The positioning member enables precise insertion of the movable blank onto the fixed blank, thereby improving the performance and reliability of the manufactured comb structure.

[0018] In some embodiments, the positioning member includes a first prepositioning member formed on the movable part blank; and a second prepositioning member formed on the fixed part blank and configured to engage with the first prepositioning member to guide movement of the movable part blank along the insertion direction.

[0019] In some embodiments, the positioning member further includes a grating mark assembly adapted to interfere light passing through the grating mark assembly, comprising: a first grating mark formed on the movable part blank; and a second grating mark formed on the fixed part blank and configured to be offset from the second grating mark in an adjustment direction perpendicular to the insertion direction when the first prepositioning member and the second prepositioning member are engaged.

[0020] In some embodiments, the positioning member further includes an alignment plate adapted to be disposed on the side of the fixed member blank opposite to the movable member blank, and the grating mark assembly further includes a plurality of alignment plate grating marks formed on the alignment plate, the alignment plate grating marks being arranged to be aligned with the first grating mark and the second grating mark in the insertion direction.

[0021] In some embodiments, the positioning member further includes a light source disposed on the side of the alignment plate opposite to the fixing blank in the insertion direction, and configured to emit light toward the alignment plate in the insertion direction; and an image acquisition unit disposed on the side of the movable blank opposite to the alignment plate in the insertion direction, and configured to acquire an image of interference fringes generated after the light passes through the grating marking assembly.

[0022] In some embodiments, the movable part blank and the fixed part blank are rectangular, and the first grating mark and the second grating mark are arranged on at least one side of the rectangle.

[0023] In some embodiments, the positioning member further includes a force sensor configured to acquire at least one of an electrostatic force and a contact force between the movable comb teeth on the movable blank and the fixed comb teeth on the fixed blank.

[0024] According to a third aspect of this disclosure, a microelectromechanical system (MEMS) comb structure manufactured in accordance with the manner described in the first aspect above is provided. The comb structure includes a fixing member comprising a fixing base plate and fixing comb teeth; and a movable member comprising a movable member rivet portion, movable comb teeth, and a connecting block connecting the movable member rivet portion and the movable comb teeth, wherein the movable member rivet portion is bonded to the fixing base plate by an adhesive to fix the movable member to the fixing member.

[0025] In some embodiments, the aspect ratio between the moving comb teeth and the fixed comb teeth of the microelectromechanical system comb structure is greater than 50:1. Attached Figure Description

[0026] The above and other features, advantages, and aspects of the embodiments of this disclosure will become more apparent from the accompanying drawings and the following detailed description. In the drawings, the same or similar reference numerals denote the same or similar elements, wherein:

[0027] Figure 1 A three-dimensional schematic diagram of the MEMS comb structure is shown;

[0028] Figure 2 A top view schematic diagram of the MEMS comb structure is shown;

[0029] Figure 3 A three-dimensional schematic diagram of the core structural component in the MEMS comb structure is shown.

[0030] Figure 4 A simplified schematic diagram of the electrostatic force between a pair of teeth in a MEMS comb structure when it is used as a MEMS motor is shown.

[0031] Figure 5 A simplified schematic diagram is shown illustrating the effect of the movement between the comb teeth on the capacitance change when the MEMS comb structure is used as a MEMS motor.

[0032] Figure 6 A simplified cross-sectional side view of the comb structure is shown, corresponding to each step of a conventional method for manufacturing a MEMS comb structure.

[0033] Figure 7 A schematic diagram is shown showing that a portion of the ion beam radiates onto the sidewalls of the comb teeth during the etching process;

[0034] Figure 8 A schematic diagram is shown showing the spacing between comb teeth corresponding to a manufacturing method according to some embodiments of the present disclosure;

[0035] Figure 9 A flowchart illustrating a method for manufacturing a MEMS comb structure according to some embodiments of the present disclosure is shown;

[0036] Figure 10 A simplified cross-sectional side view of the fixture blank corresponding to each step in the method for manufacturing a MEMS comb structure according to an embodiment of the present disclosure is shown.

[0037] Figure 11 A simplified cross-sectional side view of the movable part blank corresponding to each step in the method for manufacturing a MEMS comb structure according to an embodiment of the present disclosure is shown.

[0038] Figure 12 A simplified cross-sectional side view is shown for each step in the method of manufacturing a MEMS comb structure according to an embodiment of the present disclosure, which involves inserting a movable blank into a fixed blank.

[0039] Figure 13 A simplified perspective view of a moving part blank plate is shown using a system for manufacturing a MEMS comb structure according to an embodiment of the present disclosure;

[0040] Figure 14 A simplified perspective view of a system for manufacturing a MEMS comb structure according to an embodiment of the present disclosure is shown.

[0041] Figure 15 A perspective view of a moving part blank is shown according to some embodiments of the present disclosure;

[0042] Figure 16 A perspective view of a fastener blank according to some embodiments of the present disclosure is shown;

[0043] Figure 17A perspective view is shown of a movable blank plate being fixed to a fixed blank plate according to some embodiments of the present disclosure;

[0044] Figure 18 A perspective view of a moving part blank and a fixing part blank according to some embodiments of the present disclosure is shown;

[0045] Figure 19 A perspective view is shown of a movable blank plate being inserted into a fixed blank plate according to some embodiments of the present disclosure;

[0046] Figure 20 A perspective view showing the relationship between the movable comb teeth and the fixed comb teeth according to some embodiments of the present disclosure is shown;

[0047] Figure 21 A perspective view is shown illustrating the electrostatic adjustment of the position of a movable blank plate according to some embodiments of the present disclosure;

[0048] Figure 22 A perspective view is shown illustrating the adjustment of the position of a movable blank plate by contact force according to some embodiments of the present disclosure; and

[0049] Figure 23 A coordinate graph showing the relationship between the force and the travel distance for adjusting the movable blank in a contact force manner according to some embodiments of the present disclosure. Detailed Implementation

[0050] Embodiments of this disclosure will now be described in more detail with reference to the accompanying drawings. While some embodiments of this disclosure are shown in the drawings, it should be understood that this disclosure can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of this disclosure. It should be understood that the accompanying drawings and embodiments of this disclosure are for illustrative purposes only and are not intended to limit the scope of protection of this disclosure.

[0051] In the description of embodiments of this disclosure, the term "comprising" and similar terms should be understood as open-ended inclusion, i.e., "including but not limited to". The term "based on" should be understood as "at least partially based on". The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first", "second", etc., may refer to different or the same objects. Other explicit and implicit definitions may also be included below.

[0052] Micro-Electromechanical Systems (MEMS) are generally considered to be miniature systems composed of micro-sensors, micro-actuators, and microelectronic circuits. MEMS research and development primarily focuses on micro-sensors and actuators. MEMS devices and microfabrication technology are characterized by three features: miniaturization, microelectronic integration, and high-precision mass production. With the upgrading of consumer spending in human society, MEMS technology has experienced explosive growth, and various types of MEMS sensors are widely used in aerospace, petrochemical, marine, automotive, home, and healthcare fields.

[0053] Figures 1 to 3 A schematic diagram of a common MEMS device (i.e., MEMS comb structure 100) is shown. Figure 1 This shows a perspective view of the MEMS comb structure 100 as viewed from one angle. Figure 2 A top view of the MEMS comb structure 100 is shown, and Figure 3 A perspective view of the core structural component 103 of the comb structure 100 is shown. (See attached image.) Figures 1 to 3 As shown, the MEMS comb structure 100 typically includes a fixing member 101 and a moving member 102. The fixing member 101 includes fixing comb teeth 1012, a fixing base plate 1011, and a fixing riveting portion 1013 for fixing the fixing comb teeth 1012 to the fixing base plate 1011. The moving member 102 includes moving comb teeth 1022, moving element 1025, moving element riveting portion 1021, moving element connecting portion 1023 disposed between the moving comb teeth 1022 and the moving element riveting portion 1021, and moving element spring arm 1024 providing spring performance.

[0054] From a manufacturing perspective, the MEMS comb structure 100 can be further divided into a core structural component 103 and the aforementioned fixing substrate 1011. The core structural component 103 includes a fixing core structural component 1031 and a moving core structural component 1032. The fixing core structural component 1031 includes all components of the aforementioned fixing component 101 except for the fixing substrate 1011, such as the fixing comb teeth 1012 and the fixing riveting portion 1013. All components of the aforementioned moving component 102 are also referred to as the moving core structural component 1032.

[0055] After the core structural component 103 is bonded to the fixed component substrate 1011, the movable component 102 is fixed to a suitable position on the fixed component substrate 1011 by means of the movable component riveting portion 1021, so that the fixed component comb teeth 1012 and the movable component comb teeth 1022 are arranged at intervals. By means of the movable component connecting portion 1023 and the movable component spring arm 1024, the movable component comb teeth 1022 can be displaced relative to the fixed component comb teeth 1012, thereby realizing a predetermined function. Specifically, the MEMS comb structure 100 can be used as a power electronic device, i.e., a MEMS comb motor, or as an inertial sensor. When used as a MEMS comb motor, a predetermined voltage V is applied to the movable component comb teeth 1022 and the fixed component comb teeth 1012 to control the relative movement of the movable component comb teeth 1022 and the fixed component comb teeth 1012. That is, the MEMS comb motor is driven by applying a voltage V between the fixed component comb teeth 1012 and the movable component comb teeth 1022. In the MEMS comb structure 100, capacitance is changed by altering the area rather than the electrode spacing. Here, area refers to the overlapping area of ​​the moving comb teeth 1022 and the fixed comb teeth 1012 in the comb tooth alignment direction. Since capacitance and area are linearly related, the displacement of the moving comb teeth 1022 will be proportional to the square of the applied voltage.

[0056] Specifically, the magnitude F of the electrostatic force between a pair of moving comb teeth 1022 and fixed comb teeth 1012 can be calculated by the following formula (1):

[0057]

[0058] Where e represents the dielectric constant of the medium between the fixed comb teeth 1012 and the movable comb teeth 1022, V is the voltage applied between the movable comb teeth 1022 and the fixed comb teeth 1012, h is the height of the fixed comb teeth 1012 and the movable comb teeth 1022 (in the thickness direction of the fixed substrate 1011), and g is the spacing between a pair of fixed comb teeth 1012 and movable comb teeth 1022, as shown below. Figure 4 As shown in the above formula (1), it can be seen that the magnitude F of the electrostatic force between the moving comb tooth 1022 and the fixed comb tooth 1012 is proportional not only to the dielectric constant and voltage value, but also to the depth-to-width ratio (h / g) between the fixed comb tooth 1012 and the moving comb tooth 1022. In this paper, the depth-to-width ratio refers to the ratio of the height h of the fixed comb tooth 1012 or the moving comb tooth 1022 to the distance g between a pair of fixed comb teeth 1012 and moving comb teeth 1022. Under the condition that other factors remain unchanged, the larger the depth-to-width ratio, the greater the electrostatic force and the better the driving performance.

[0059] As mentioned earlier, the MEMS comb structure 100 can also be used as an inertial sensor. An inertial sensor is a device that responds to physical motion, such as linear displacement or angular rotation, and converts this response into an electrical signal, which is then amplified and processed by electronic circuitry. Accelerometers and gyroscopes are the two most common types of MEMS inertial sensors. An accelerometer is a sensor that senses axial acceleration and converts it into a usable output signal; a gyroscope is a sensor that senses the angular velocity of a moving body relative to inertial space. Three MEMS accelerometers and three MEMS gyroscopes combined form a Micro Inertial Measurement Unit (MIMU) capable of sensing linear acceleration and angular acceleration in three directions of a carrier.

[0060] When the MEMS comb structure 100 is used as a MEMS inertial sensor, since the movable comb teeth 1022 are fixed to the fixed substrate 1011 by spring arms, the MEMS inertial sensor will also move inertially when the carrier of the MEMS inertial sensor has inertial motion. The movable comb teeth 1022 can be displaced under the action of inertial force, causing a change in the capacitance between the movable comb teeth 1022 and the fixed comb teeth 1012. By detecting this change in capacitance, the displacement of the comb teeth can be determined, and thus the magnitude of the inertial force acting on the comb teeth can be determined. In this way, the MEMS comb structure 100 can realize the function of an inertial sensor.

[0061] The capacitance C between a pair of fixed comb teeth 1012 and movable comb teeth 1022 can be determined by the following formula (2).

[0062]

[0063] Among them, such as Figure 5 As shown, L represents the length of the fixed comb teeth 1012 and the movable comb teeth 1022, x represents the displacement of the movable comb teeth 1022, h is the height of the fixed comb teeth 1012 and the movable comb teeth 1022 (in the thickness direction of the fixed substrate 1011), and g is the distance between a pair of fixed comb teeth 1012 and movable comb teeth 1022. From the above formula (2), it can be seen that the capacitance C between a pair of fixed comb teeth 1012 and movable comb teeth 1022 is directly proportional to the aspect ratio (h / g) between the fixed comb teeth 1012 and movable comb teeth 1022. That is, under the condition that other factors remain unchanged, the larger the aspect ratio, the larger the capacitance, i.e., the higher the capacitance sensitivity per unit displacement, and the better the performance of the inertial sensor.

[0064] The aspect ratio between the fixed comb teeth 1012 and the movable comb teeth 1022 is affected by the manufacturing process of the comb tooth structure 100. The following will refer to the attached... Figure 6and Figure 7 Let me introduce the manufacturing process of the traditional MEMS comb structure 100 and its problems. Figure 6 The diagram shows a schematic cross-sectional view of the manufacturing process of the MEMS comb structure 100 from top to bottom. In the conventional manufacturing process, the core structure 103, including the fixed core structure 1031 and the movable core structure 1032 mentioned above, is first formed through an etching process. The etched core structure 103 is then bonded to the fixed substrate 1011 to form the MEMS comb structure 100. In the conventional manufacturing process, the fixed core structure 1031 and the movable core structure 1032 are completed in the same etching process.

[0065] Specifically, such as Figure 2 and Figure 6 As shown, in the conventional manufacturing process, photoresist 201 is first applied to the locations where the fixed part riveting portion 1013 and the movable part riveting portion 1021 will be formed, followed by exposure and development, as shown in step 1. It should be understood that... Figure 6 The location of the photoresist 201 shown is only illustrative; the specific location of the photoresist 201 can be found in the reference diagram. Figure 2 The positions of the fixing riveting portion 1013 and the moving part riveting portion 1021 are shown. Then, in step 2, etching is performed, followed by cleaning of the photoresist 201. Subsequently, in step 3, the formed core structure 103 blank is flipped over, and the fixing riveting portion 1013 and the moving part riveting portion 1021 of the core structure 103 are fixed to the fixing substrate 1011. Currently, bonding is a commonly used fixing method. Subsequently, in step 4, photoresist 201 is applied to the locations where the moving part comb teeth 1022, the fixing part comb teeth 1012, the moving part mover 1025, the moving part connecting portion 1023, and the moving part spring arm 1024 are to be formed, and then exposed and developed. Finally, in step 5, the core structure 103 blank is etched to form the above structure, and the photoresist 201 is cleaned, thereby forming the MEMS comb structure 100.

[0066] In the etching process of step 5, ideally, the ion beam should irradiate between the fixed comb teeth 1012 and the movable comb teeth 1022 in a completely vertical direction. However, in actual manufacturing, because the fixed comb teeth 1012 and the movable comb teeth 1022 are formed together and the distance between them is small, even with higher costs to improve the orientation of the ion beam, the ion beam cannot be made completely perpendicular to the core structural component 103 due to process limitations. Specifically, as... Figure 7As shown, the larger the aspect ratio between the fixed comb teeth 1012 and the movable comb teeth 1022, the less likely the ion beam will reach the bottom that needs to be irradiated, and the more likely it will irradiate the sides of the fixed comb teeth 1012 or the movable comb teeth 1022. This results in fewer ion beams reaching the bottom between the fixed comb teeth 1012 and the movable comb teeth 1022, ultimately making it difficult for the etching process to continue. Therefore, under the current manufacturing process limitations, the aspect ratio between the movable comb teeth 1022 and the fixed comb teeth 1012 of the MEMS comb structure 100 that can be stably mass-produced can only reach a maximum of 30:1 to 50:1. This significantly limits the driving performance of the MEMS structure when used as a motor and the sensor performance when used as an inertial sensor.

[0067] According to embodiments of this disclosure, a system and method for manufacturing a MEMS comb structure 100 are provided, which can solve or at least partially solve the aforementioned problems or other potential problems existing in conventional manufacturing methods, and can obtain a MEMS comb structure 100 with a high aspect ratio. The following will be combined with... Figures 8 to 23 To describe a system and method for manufacturing a MEMS comb structure 100 according to embodiments of the present disclosure.

[0068] The method for manufacturing a MEMS comb structure 100 according to an embodiment of the present disclosure involves fixing a member 101 and a movable member 102, respectively, and inserting the movable member 102 onto the fixing member 101. For distinction, the fixing member 101 and the movable member 102 during the manufacturing process will be referred to as the fixing member blank 302 and the movable member blank 301, respectively. The movable member blank 301, in addition to other components such as the movable member mover 1025, the movable member connecting portion 1023, and the movable member spring arm 1024 mentioned above, mainly includes a movable member riveting portion 1021 and movable member comb teeth 1022. The fixing member blank 302, in addition to other components such as the fixing member riveting portion 1013 mentioned above, mainly includes a fixing member base plate 1011 and fixing member comb teeth 1012. In addition, in some embodiments, the fixing member blank 302 and the movable member blank 301 may also include components for providing guidance and / or positioning for the insertion process, which will be further described below.

[0069] In the method for manufacturing a MEMS comb structure 100 according to an embodiment of the present disclosure, a fixed blank plate 302 and a movable blank plate 301 are formed separately. Then, the movable blank plate 301 is inserted onto the fixed blank plate 302 in an insertion direction perpendicular to the fixed blank plate 302, such that the fixed comb teeth 1012 on the fixed blank plate 302 and the movable comb teeth 1022 on the movable blank plate 301 are arranged at intervals, thereby forming the MEMS comb structure 100. Compared to conventional methods where the fixed comb teeth 1012 and the movable comb teeth 1022 are formed in the same etching process, in the method according to the embodiment of the present disclosure, the smaller spacing g between the movable comb teeth 1022 and the fixed comb teeth 1012 is changed to a larger spacing b+2g between two fixed comb teeth 1012 or two movable comb teeth 1022. Figure 8 As shown, b is the width of a single fixed comb tooth 1012 or movable comb tooth 1022 (in the arrangement direction of the fixed comb tooth 1012), and g is the spacing between the fixed comb tooth 1012 and the movable comb tooth 1022 of the MEMS comb structure 100 to be formed. During the etching process, the aspect ratio between two comb teeth in the fixed blank 302 or movable blank 301 is h / (b+2g). After the subsequent insertion process, the aspect ratio between the fixed comb tooth 1012 and the movable comb tooth 1022 of the finally formed MEMS comb structure 100 can reach h / g.

[0070] To more intuitively illustrate the improved aspect ratio, consider a MEMS comb structure with h = 200 μm, b = 4 μm, and g = 2 μm as an example. Since the fixed component 101 or the movable component 102 is formed by separate etching, during the etching process, the aspect ratio between the two comb teeth in the fixed component blank 302 or the movable component blank 301 is h / (b+2g) = 25:1. For this aspect ratio, the etching apparatus can stably manufacture high-quality fixed component blank 302 or movable component blank 301, and the comb tooth spacing and quality of the manufactured fixed component blank 302 or movable component blank 301 can reach a high quality level. Subsequently, the movable component blank 301 is vertically inserted onto the fixed component blank 302 to form the MEMS comb structure 100. Then, through insertion, the final MEMS comb structure 100 has a depth-to-width ratio (h / g) between the fixed comb teeth 1012 and the movable comb teeth 1022, achieving an h / g ratio of 100:1. Therefore, compared to the conventional manufacturing process where the h / g ratio of MEMS comb structures is typically 30:1 and at most 50:1, the depth-to-width ratio between the movable comb teeth 1022 and the fixed comb teeth 1012 of the MEMS comb structure 100 manufactured according to the method of this disclosure is significantly improved, thereby enhancing the driving performance of MEMS motors or the sensing performance of MEMS relationship sensors.

[0071] Figure 9 A flowchart illustrating a method for manufacturing a MEMS comb structure 100 according to an embodiment of this disclosure is shown. Figure 9 As shown, at 510, the fixed part blank 302 and the movable part blank 301 are formed respectively. Figure 10 A simplified cross-sectional view of the fastener blank 302 is shown during the process of forming the fastener blank 302 using an etching apparatus. Figure 11 A simplified cross-sectional view of the movable part blank 301 during its formation is shown. (See attached image.) Figure 10 As shown, in the process of forming the fixture blank 301, in steps 1 and 2, the fixture core structure 1031 is first formed by etching. Then, in step 3, the fixture core structure 1031 is flipped and fixed to the fixture substrate 1011, for example, by bonding. Next, in steps 4 and 5, the fixture comb teeth 1012 and other necessary structures are formed by etching, thereby finally forming the fixture blank 302 to be inserted into by the movable part blank 301. As mentioned above, the large spacing between the comb teeth during the etching process allows for stable and accurate formation of the fixture blank 302.

[0072] like Figure 11 As shown, in the process of forming the movable part blank 301, similar to the process of forming the fixed part blank 302, in steps 1 and 2, components such as the movable part riveting part 1021 are first etched from the first side. Then, in the subsequent steps 3 and 4, the movable part core structural component 1032 is flipped over to etch the movable part comb teeth 1022 and other necessary structures on the opposite second side to finally form the movable part blank 301. Because the spacing between the comb teeth is relatively large during the etching process, the movable part blank 301 can be formed stably and accurately.

[0073] The processes of forming the fixing blank 302 and the moving blank 301 described above can be performed sequentially or simultaneously using different etching devices, thereby further improving efficiency. After the fixing blank 302 and the moving blank 301 are formed, the subsequent insertion step will be performed, i.e., as follows: Figure 9 As shown in block 520, the movable part blank 301 is inserted into the fixed part blank 302 in the insertion direction, so that the fixed part comb teeth 1012 and the movable part comb teeth 1022 are arranged at intervals. The insertion direction refers to the direction perpendicular to the fixed part blank 302. Figure 12A simplified side view of the movable part blank 301 and the fixed part blank 302 during the insertion process is shown. After the movable part blank 301 is inserted into the appropriate position of the fixed part blank 302, at 530, the movable part riveting portion 1021 is fixed to the fixed part base plate 1011 to form the comb tooth structure 100. The movable part riveting portion 1021 can be fixed to the fixed part base plate 1011 by adhesive bonding. This prevents deformation of the movable part comb teeth 1022 during the fixing process.

[0074] In some embodiments, in order to make the spacing between the fixed comb teeth 1012 and the movable comb teeth 1022 of the formed MEMS comb structure 100 consistent, after inserting the movable blank plate 301 onto the fixed blank plate 302, the method may further include the step of adjusting the position of the movable blank plate 301 relative to the fixed blank plate 302 so that the spacing between the fixed comb teeth 1012 and the movable comb teeth 1022 is consistent, thereby further improving the performance of the MEMS comb structure 100.

[0075] The above method can be implemented using a system for manufacturing the MEMS comb structure 100. The system includes an etching apparatus (not shown) and a moving device 303. The etching apparatus is used to form the movable part blank 301 and the fixed part blank 302 respectively according to the above process. The moving device 303 can be used to insert the movable part blank 301 onto the fixed part blank 302 and adjust the position of the movable part comb teeth 1022. Figure 13 and Figure 14 A simplified schematic diagram of a moving device 303 according to an embodiment of the present disclosure is shown, illustrating a movable blank 301 moved by the moving device 303 and a fixed blank 302 to be inserted. Although Figure 13 and Figure 14 The illustration only shows the moving device 303 transporting the movable blank plate 301 to be formed into a MEMS comb structure 100; however, it should be understood that this is merely illustrative. In actual transport, the moving device 303 can transport multiple rows and / or columns of movable blank plates 301 to be formed into multiple MEMS comb structures 100. Correspondingly, the fixing blank plates 302 to be inserted with them also have multiple rows and / or columns of fixing blank plates 302. In this way, insertion efficiency can be improved, and ultimately the cost of the MEMS comb structure 100 can be reduced. Of course, in some embodiments, the moving device 303 can also be used only to move a single movable blank plate 301 to be formed into a comb structure 100, such as... Figure 13 As shown. The following text will mainly focus on Figure 13 and Figure 14 The inventive concept of this disclosure is described in the case shown. The case of transporting multiple moving blanks 301 is similar and will not be described in detail below.

[0076] also, Figure 13 and Figure 14 The illustration shows the insertion of the movable blank 301 by means of mechanical grippers holding the movable blank 301. It should be understood that this is illustrative and not intended to limit the scope of this disclosure. Other suitable methods of movement or gripping are also possible. For example, in some alternative embodiments, the movable blank 301 can be moved by means of vacuum adsorption, van der Waals force bonding, or electrostatic adsorption. Vacuum adsorption is a method of gripping an article by creating a pressure difference using a vacuum device. Van der Waals force bonding is a method of gripping an article using non-directional, unsaturated, and weak interactions between molecules and atoms, such as adhesives. Electrostatic adsorption is a method of gripping an article using electrostatic forces. The following will primarily focus on... Figure 13 and Figure 14 The inventive concept of this disclosure is described in the manner shown. Other ways of moving the movable blank 301 are similar and will not be described in detail below.

[0077] As mentioned above, in some embodiments, the retaining blank 302 and the movable blank 301 may also include components for providing guidance and / or positioning for the insertion process; these components will be referred to as positioning components. With the aid of positioning components, the movable blank 301 can be inserted more reliably onto the retaining blank 302. In some embodiments, positioning components may be formed on the retaining blank 302 and the movable blank 301, such as... Figure 15 and Figure 16 As shown. That is, in the manufacturing method according to some embodiments, in addition to the core structural components mentioned above, the fixing blank 302 and the moving blank 301 also include positioning components. The positioning components can be formed together with the fixing blank 302 and the moving blank 301 through the process described above for forming the fixing blank 302 and the moving blank 301 respectively. In this case, after the moving blank 301 is inserted into the fixing blank 302 and the spacing between the fixing comb teeth 1012 and the moving comb teeth 1022 is adjusted to be consistent, the positioning components can be cut off from the moving blank 301 and the fixing blank 302 along the cutting line L, thereby achieving the MEMS comb structure 100, as shown. Figure 17 As shown.

[0078] The following will combine Figures 13 to 17This section describes the specific structure of a positioning member according to some embodiments of the present disclosure and the process of inserting and adjusting the movable blank 301 using the positioning member. Specifically, in some embodiments, the positioning member may include pre-positioning members formed on the movable blank 301 and the fixed blank 302, respectively. For ease of description below, the pre-positioning member formed on the movable blank 301 is referred to as a first pre-positioning member 3011, and the pre-positioning member formed on the fixed blank 302 is referred to as a second pre-positioning member 3021, as follows. Figures 13 to 16 As shown. The first prepositioning member 3011 and the second prepositioning member 3021 can provide prepositioning and guidance for the insertion of the movable part blank 301.

[0079] For example, during the process of inserting the movable part blank 301, such as Figure 13 As shown, the movable blank plate 301 is first moved to a position such that the first prepositioning member 3011 and the second prepositioning member 3021 are aligned in the insertion direction. Figure 13 The position aligned in the Z direction (as shown in the image). Then, as... Figure 14 As shown, the movable blank plate 301 is moved along the insertion direction, thereby inserting the movable blank plate 301 onto the fixed blank plate 302. During this process, the first pre-positioning member 3011 and the second pre-positioning member 3021 engage to guide the movement of the movable blank plate 301. Here, "engagement" can mean... Figure 13 and Figure 14 The diagram shows that the second prepositioning member 3021 can be inserted into the first prepositioning member 3011. In addition, "engagement" can also refer to any other suitable method that, after engagement, restricts the movement of the movable blank 301 in the direction perpendicular to the insertion direction (e.g., the X or Y direction in the figure) beyond a predetermined threshold, such as interlocking or snap-fitting. The restriction of movement beyond the predetermined threshold mentioned here can be achieved through the gap between the first prepositioning member 3011 and the second prepositioning member 3021 after engagement. In this way, even though the first prepositioning member 3011 and the second prepositioning member 3021 have engaged, the gap between them allows for a smaller amplitude (i.e., not exceeding the predetermined threshold) of movement of the movable blank 301 in the direction perpendicular to the insertion direction (e.g., the X or Y direction in the figure), thereby facilitating the adjustment of the movable blank 301 to match the spacing between the movable comb teeth 1022 and the fixed comb teeth 1012.

[0080] The shape and position of the first prepositioning member 3011 and the second prepositioning member 3021 that can realize the above process can be varied. Figures 13 to 16The first pre-positioning member 3011 is shown to be a cross-shaped through-hole extending in the insertion direction. This cross-shaped through-hole can be formed at the corner of the rectangular edge of the movable member blank 301. The second pre-positioning member 3021, which can engage with it, correspondingly adopts a cross-shaped protrusion, also formed at the corner of the rectangular edge of the fixed member blank 302. Furthermore, the positions of the through-hole and the protrusion are interchangeable. That is, in some embodiments, with... Figures 13 to 16 Conversely, a cross-shaped protrusion can be formed on the movable part blank 301, and a corresponding cross-shaped through hole can be formed on the fixed part blank 302. Furthermore, the shapes of the through holes and protrusions can be varied beyond the cross shape shown in the figure. For example, the shape of the protrusion can include, but is not limited to, cylindrical pins, rectangular pins, diamond pins, or tapered pins. Correspondingly, the cross-sectional shape of the through hole can include, but is not limited to, circular, rectangular, or diamond shapes. The through hole also adopts the method of a tapered blind hole. The following description will primarily use the cross-shaped through hole and cross-shaped protrusion of the first pre-positioning member 3011 and the second pre-positioning member 3021 as shown in the figure to describe the concept of this disclosure. It should be understood that other shapes or arrangements are also possible, and will not be elaborated upon further below.

[0081] In addition to including a cross-shaped through hole and a cross-shaped protrusion, the first pre-positioning member 3011 and the second pre-positioning member 3021 may also include a further pin 3013 and a corresponding hole 3023, such as... Figure 13 , Figure 15 and Figure 16 As shown. Pin 3013 can be formed on the edge of the cross-shaped through hole and extend toward one side of the fixing blank 302. Hole 3023 is formed around the cross-shaped protrusion of the fixing blank 302 to accommodate the insertion of pin 3013. In this way, during the insertion of the moving blank, pin 3013 can engage with the cross-shaped protrusion of the second prepositioning member 3021 to achieve prepositioning of the moving blank 301 and coarsely restrict the movement of the moving blank 301 in the adjustment direction perpendicular to the insertion direction (e.g., the X or Y direction in the figure), thereby facilitating the precise insertion of the moving blank 301.

[0082] In some embodiments, to achieve precise positioning of the movable component blank 301 and ensure consistent spacing between the movable component comb teeth 1022 and the fixed component comb teeth 1012, the positioning member may further include a grating mark assembly. The grating mark assembly enables light passing through it to interfere, thereby generating interference fringes. According to the principle of light interference, when the movable component comb teeth 1022 move a certain distance, the interference fringes generated by the grating mark assembly will change significantly. When the spacing between the movable component comb teeth 1022 and the fixed component comb teeth 1012 is consistent, the interference fringes generated by the light passing through the grating mark assembly will exhibit a predetermined pattern. If the spacing between the movable component comb teeth 1022 and the fixed component comb teeth 1012 is inconsistent, the interference fringes will differ from the predetermined pattern. Therefore, adjusting the movable component comb teeth 1022 becomes a process of making the interference fringes conform to the predetermined pattern. Thus, compared to direct visual alignment, using a grating mark assembly can further improve positioning accuracy. In some embodiments, to obtain a better interference effect, the light can be single-wavelength light, such as a laser with a predetermined wavelength.

[0083] For example, in some embodiments, the positioning member may also include a light source 305 for providing light and an image acquisition unit 306 for acquiring an interference image of the light. The light source 305 may be a single-wavelength light source 305, used to provide single-wavelength light to improve the interference effect and thus improve the adjustment accuracy. It may be arranged on the side of the alignment plate 304 opposite to the fixing blank 302 along the insertion direction and is capable of emitting single-wavelength light along the insertion direction. To obtain a better interference effect, the angle between the emitted light and the insertion direction should be as small as possible, for example, preferably less than a predetermined threshold. In some embodiments, if one light source 305 cannot achieve an angle between the light and the insertion direction smaller than the predetermined threshold, multiple light sources 305 may be used.

[0084] Image acquisition unit 306 is arranged on the side of movable blank 301 opposite to alignment plate 304, such as Figure 14 As shown. The image acquisition unit 306 can be used to acquire an image of the interference fringes produced after the light emitted by the light source 305 passes through the grating marker assembly. Of course, it should be understood that... Figure 14 The positions of the image acquisition unit 306 and the light source 305 shown are illustrative and not intended to limit the scope of this disclosure. Other suitable arrangements are also possible. For example, in some embodiments, the positions of the light source 305 and the image acquisition unit 306 may be interchanged.

[0085] In some embodiments, the grating marking assembly may include a first grating mark 3012 formed on the movable part blank 301 and a second grating mark 3022 formed on the fixed part blank 302. The first grating mark 3012 may be formed on at least one edge of the rectangular movable part blank 301. Figure 13 , Figure 15 and Figure 16 The diagram shows that a first grating mark 3012 is formed on the four edges of the movable part blank 301, allowing for precise adjustment of the position of the movable part blank 301 in multiple adjustment directions, such as the X and Y directions. Of course, in some embodiments, the first grating mark 3012 may also be formed on only one edge of the movable part blank 301 to further reduce costs. The first grating mark 3012 includes a plurality of through slots for light to pass through, the dimensions of which allow light diffraction. The first grating mark 3012 may be formed in a first segment of the edge of the movable part blank 301, while a second segment of the edge may be formed as a void or a through slot.

[0086] Similar to the first grating mark 3012, the second grating mark 3022 can be formed on at least one side of the rectangular fixing blank 302. Corresponding to the first grating mark 3012, the second grating mark 3022 can also be formed on all four sides of the fixing blank 302, thereby allowing precise adjustment of the position of the movable blank 301 in multiple adjustment directions. Of course, in some embodiments, the second grating mark 3022 can also be formed on only one side of the fixing blank 302 to further reduce costs. The second grating mark 3022 includes gaps between a plurality of protrusions, which allow light to pass through and the size of the gaps allows light to diffract. After the first prepositioning member 3011 and the second prepositioning member 3021 are engaged, the first grating mark 3012 and the second grating mark 3022 are offset from each other in the adjustment direction, thereby facilitating the occurrence of subsequent interference phenomena. The first grating mark 3012 and the second grating mark 3022 are offset from each other, meaning they are located at different positions on the same frame (e.g., in the first and second sections of the same frame, respectively), and they do not overlap in the insertion direction. For example, the second grating mark 3022 can be formed on the frame of the fixed blank 302 in a section corresponding to the second section of the movable blank 301, so that multiple protrusions can pass through the gaps or slots in the second section of the movable blank 301. In this way, after the first prepositioning member 3011 and the second prepositioning member 3021 are engaged, that is, after the movable blank 301 is initially inserted into the fixed blank 302, the first grating mark 3012 and the second grating mark 3022 are arranged along the same frame without overlapping, and there is a gap between them.

[0087] To facilitate the generation of interference phenomena, the positioning component also includes an alignment plate 304, and the grating mark assembly may further include a plurality of alignment plate grating marks 3041 formed at predetermined positions on the alignment plate 304. Figure 14 As shown, an alignment plate 304 is arranged on the side of the fixed component blank 302 opposite to the movable component blank 301. A plurality of alignment plate grating marks 3041 are aligned with a first grating mark 3012 and a second grating mark 3022, thereby allowing light to pass through the alignment plate grating marks 3041, the first grating mark 3012, and the second grating mark 3022 and interfere. To facilitate interference, the period of the alignment plate grating marks 3041 differs from the periods of the first grating mark 3012 and the second grating mark 3022. For the first grating mark 3012, the period of the first grating mark 3012 is the sum of the size of a single slot and the size of a single interval between slots.

[0088] The step of adjusting the position of the movable blank 301 relative to the fixed blank 302 using the grating mark assembly may include first using the image acquisition unit 306 to acquire an image of the interference fringes generated after light passes through the grating mark assembly, thereby accurately determining the positional deviation between the first grating mark 3012 and the second grating mark 3022 by determining the positional error between the first grating mark 3012 and the alignment plate grating mark 3041 and the second grating mark 3022 and the alignment plate grating mark 3041, which will be further explained below. Since the first grating mark 3012 and the second grating mark 3022 are formed on the movable blank 301 and the fixed blank 302 respectively, the positional deviation between the first grating mark 3012 and the second grating mark 3022 can also reflect the positional deviation between the movable blank 301 and the fixed blank 302. In this case, at least one of the movable blank plate 301 and the fixed blank plate 302 is moved along an adjustment direction, such as the X and / or Y directions, so that the resulting interference fringes conform to a predetermined pattern. This predetermined pattern of interference fringes indicates that the positional deviation between the first grating mark 3012 and the second grating mark 3022 is less than a predetermined threshold. In this way, compared to direct visual alignment, the spacing between the fixed comb teeth 1012 and the movable comb teeth 1022 can be maintained with high accuracy at a lower cost.

[0089] The step of adjusting the position of the movable blank 301 relative to the fixed blank 302, as mentioned above, to align the movable blank 301 and the fixed blank 302, can be performed in various ways. The following will refer to... Figure 14Several exemplary methods of achieving precise adjustment using grating marks are described by describing how the distance between the movable comb teeth 1022 and the fixed comb teeth 1012 is adjusted by moving the movable blank plate 301 along the Y direction. It should be understood that these exemplary methods are not exhaustive. Furthermore, in the following exemplary description, the dimensions of the through slot of the first grating mark 3012 through which light passes, the dimensions of the gap of the second grating mark 3022, and the dimensions of the gap between the first grating mark 3012 and the second grating mark 3022 all refer to grating marks arranged on a border along the Y direction.

[0090] In some embodiments, after the insertion step is completed, the first grating mark 3012 can be aligned with the alignment plate grating mark 3041 of the alignment plate 304 by moving the movable blank plate 301 (e.g., so that the resulting interference fringes meet a predetermined pattern). Then, the second grating mark 3022 can be aligned with the alignment plate grating mark 3041 by moving the fixed blank plate 302 (e.g., so that the interference fringes meet a predetermined pattern). In some embodiments, the alignment plate 304 can also be moved first to align the alignment plate grating mark 3041 of the alignment plate 304 with the first grating mark 3012 (e.g., so that the interference fringes meet a predetermined pattern), and then the second grating mark 3022 can be aligned with the alignment plate grating mark 3041 by moving the fixed blank plate 302.

[0091] By obtaining an image where the interference fringes follow a predetermined pattern, the deviation value between the first grating mark 3012 or the second grating mark 3022 and the alignment plate grating mark 3041 can be calculated using an algorithm. The previously mentioned alignment of the first grating mark 3012 or the second grating mark 3022 with the alignment plate grating mark 3041 can refer to the case where the calculated deviation value is 0. Of course, in actual adjustment, the calculated deviation value of the interference fringes obtained from the first grating mark 3012 or the second grating mark 3022 and the alignment plate grating mark 3041 can also be made non-zero. For example, in some embodiments, the movable blank plate 301 can be moved first so that the deviation value calculated from the interference fringes obtained after light passes through the first grating mark 3012 and the alignment plate grating mark 3041 is non-zero, A. Then, the fixed blank plate 302 can be moved so that the deviation value calculated from the interference fringes obtained after light passes through the second grating mark 3022 and the alignment plate grating mark 3041 is also A. This indicates that the movable blank plate 301 and the fixed blank plate 302 are aligned, that is, the spacing between the movable comb teeth 1022 and the fixed comb teeth 1012 is consistent.

[0092] The aforementioned calculated deviation value of 0 or a non-zero value of A is typically used when the gap size between the first grating mark 3012 and the second grating mark 3022 is an integer multiple of the period of the first grating mark 3012 or the second grating mark 3022. In some embodiments, considering factors such as process errors, the gap size between the first grating mark 3012 and the second grating mark 3022 may not be an integer multiple of the period of the first grating mark 3012 or the second grating mark 3022, but rather, for example, an integer multiple + a. In this case, when adjusting the comb tooth spacing, the movable blank plate 301 can be moved first so that the deviation value calculated from the interference fringes obtained after light passes through the first grating mark 3012 and the alignment plate grating mark 3041 is A (which can be 0 or non-zero), and then the fixed blank plate 302 can be moved so that the deviation value calculated from the interference fringes obtained after light passes through the second grating mark 3022 and the alignment plate grating mark 3041 is A+a.

[0093] Furthermore, since the grating mark components can be distributed on at least two intersecting borders of the rectangular frame, the method of adjusting the movable comb teeth 1022 using the grating mark components allows for adjustment not only along one adjustment direction (e.g., ...) Figure 14 Adjust the position of the movable comb teeth 1022 in the Y direction to make the spacing between the movable comb teeth 1022 and the fixed comb teeth 1012 consistent. It can also be adjusted in another direction (e.g., Figure 14 The position of the movable comb teeth 1022 (in the X direction) is adjusted to adjust the area of ​​the overlapping region between the movable comb teeth 1022 and the fixed comb teeth 1012, so that it meets the design requirements of the MEMS comb structure 100. The method of adjusting the position of the moving blank plate 301 in the X direction is similar to the method of adjusting the distance between the movable comb teeth 1022 and the fixed comb teeth 1012 in the Y direction mentioned above, and will not be described in detail below.

[0094] As can be seen from the above description, the grating marking assembly allows for more precise adjustment of the position of the movable part blank 301. As mentioned earlier, the adjustment precision using the grating marking assembly is higher than that of direct visual adjustment. Generally, the precision limit of direct visual adjustment is at the nanometer level, even with high-standard equipment, resulting in higher costs. By using the grating marking assembly, the resulting light interference fringes amplify the positional error between the first grating mark 3012 and the second grating mark 3022 (i.e., the movable part blank 301 and the fixed part blank 302), thereby facilitating more precise adjustment of the position of the movable part blank 301.

[0095] Furthermore, the positioning member in the embodiments described above is integrally formed on the movable part blank 301 and the fixed part blank 302 during the formation of the movable part blank 301 and the fixed part blank 302. In this way, the distance and positional relationship between the positioning member and the fixed part comb teeth 1012 and the movable part comb teeth 1022 remain constant, thereby facilitating the adjustment of the spacing between the fixed part comb teeth 1012 and the movable part comb teeth 1022. After the spacing between the movable part comb teeth 1022 and the fixed part comb teeth 1012 is adjusted to be consistent, the movable part riveting part 1021 can be fixed to a predetermined position on the fixed part substrate 1011 by adhesive bonding. After completing this fixing step, the movable part blank 301 is securely fixed to the fixed part blank 302. Subsequently, the MEMS comb tooth structure 100 can be finally obtained by removing the positioning member from the fixed part blank 302 and the movable part blank 301 along the cutting line L, as shown below. Figure 17 As shown.

[0096] Of course, it should be understood that this arrangement of the positioning members is merely illustrative and is not intended to limit the scope of protection of this disclosure. Other suitable arrangements are also possible. For example, in some embodiments, the positioning members may be independent of the fixed blank 302 or the movable blank 301. For example, in some embodiments, a portion of the positioning member may be fixed to the moving device 303. After the movable blank 301 is clamped by the moving device 303, the position of the portion of the positioning member arranged on the moving device 303 relative to the movable comb teeth 1022 can remain unchanged, thereby meeting the requirements for precise position adjustment. Similarly, the portion of the positioning member that mates with the fixed blank 302 may also be separated from the fixed blank 302. This arrangement simplifies the formation steps of the movable blank 301 or the fixed blank 302, thereby reducing costs.

[0097] The foregoing described a method for precisely adjusting the position of the movable blank 301 using a positioning component including a grating marking assembly. It should be understood that this adjustment method is merely illustrative and not intended to limit the scope of this disclosure. Other suitable adjustment methods are also possible. For example, in some alternative embodiments, the positioning component may not include the aforementioned pre-positioning component and grating marking assembly, and other positioning adjustment methods may be used. In this case, the movable blank 301 and the fixed blank 302 do not have other components (such as the aforementioned pre-positioning component and grating marking assembly) that ultimately need to be removed to form the MEMS comb structure 100, such as... Figure 18 As shown. Of course, it should be understood that in some cases, to facilitate clamping, corresponding clamping structures or devices can be formed on the moving part blank 301 and the fixed part blank 302. The following will combine... Figures 19 to 22Other possible positioning adjustment methods are described exemplarily.

[0098] In some embodiments, the positioning member may include a force sensor 307. The force sensor 307 may be disposed on the moving device 303 and configured to acquire the electrostatic force between the moving comb teeth 1022 and the fixed comb teeth 1012, such as... Figure 19 As shown. Electrostatic force refers to the interaction force between stationary charged bodies. After a predetermined voltage is applied to the moving part blank 301 and the fixed part blank 302, positive and negative charges will accumulate on the moving part comb teeth 1022 and the fixed part comb teeth 1012, respectively. If the spacing between the moving part comb teeth 1022 and the fixed part comb teeth 1012 is consistent, the electrostatic forces will cancel each other out, and the electrostatic force measured by the force sensor 307 will be equal to zero or less than a predetermined threshold, such as... Figure 20 As shown in C. If the spacing between the moving comb teeth 1022 and the fixed comb teeth 1012 is inconsistent, the obtained electrostatic force may be greater than zero or less than zero, and its absolute value may also be greater than a certain predetermined threshold, such as... Figure 20 As shown in A and B in the diagram.

[0099] Utilizing this principle, precise adjustment of the movable blank 301 can be achieved without the aforementioned pre-positioning components and grating marker assemblies, requiring only the force sensor 307 arranged on the moving device 303. In this case, the moving device 303 can directly grasp the movable blank 301, which will form the movable part 102 (without other positioning components), and insert the movable blank 301 onto the fixed blank 302, such as... Figure 19 As shown. After the movable part blank 301 is inserted into the fixed part blank 302, if no adjustment is made, the movable part comb teeth 1022 and the fixed part comb teeth 1012 may be in a state of... Figure 20 State A and State B. In this state, if a predetermined voltage is applied between the moving part blank 301 and the fixed part blank 302, the absolute value of the electrostatic force between all the fixed part comb teeth 1012 and the moving part comb teeth 1022 sensed by the force sensor 307 will be greater than a predetermined threshold. At this time, it is only necessary to move the moving part blank 301 along the arrangement direction of the comb teeth (e.g., the Y direction in the figure) until the electrostatic force is equal to zero or within the predetermined threshold range, which indicates that the spacing between the fixed part comb teeth 1012 and the moving part comb teeth 1022 remains consistent.

[0100] Therefore, adjusting the position of the movable blank plate 301 relative to the fixed blank plate 302 by using the force sensor 307 to obtain the electrostatic force between the fixed comb teeth 1012 and the movable comb teeth 1022 may include the following steps: connecting one of the positive and negative terminals of a power supply with a predetermined voltage to the movable blank plate 301 and the other to the fixed blank plate 302, so that opposite charges are formed on the movable comb teeth 1022 and the fixed comb teeth 1012 respectively. Then, the force sensor 307 is used to obtain the electrostatic force between the movable comb teeth 1022 and the fixed comb teeth 1012. Since the force sensor 307 is arranged on the moving device 303, the obtained electrostatic force is the resultant force of the electrostatic forces between all the movable comb teeth 1022 and the fixed comb teeth 1012. If the absolute value of this electrostatic force is greater than a predetermined threshold or the electrostatic force is outside the predetermined threshold range, the spacing between the fixed comb teeth 1012 and the movable comb teeth 1022 is not consistent. At this point, the movable blank plate 301 can be moved along the arrangement direction of the comb teeth according to the applied charge, its direction, and magnitude. Figure 21 As shown, the electrostatic force is maintained until it is zero or within a predetermined threshold range. After this, the movable part riveting portion 1021 can be bonded to a predetermined position on the fixed part substrate 1011 using adhesive, thereby completing the fixation between the movable part blank 301 and the fixed part blank 302. Since no positioning components such as pre-positioning components and grating mark assemblies are used, there is no need to remove the positioning components afterwards. Using this method, precise positioning between the movable part blank 301 and the fixed part blank 302 can be achieved with fewer parts and at a lower cost.

[0101] In some embodiments, the force sensor 307 can also be a force sensor used to measure the contact force between the fixed comb teeth 1012 and the movable comb teeth 1022. The contact force refers to the force generated when the fixed comb teeth 1012 and the movable comb teeth 1022 come into contact. In this case, it is not necessary to apply voltage to the movable blank plate 301 and the fixed blank plate 302; instead, it is sufficient to apply voltage directly along the direction of the comb teeth arrangement after the movable blank plate 301 is inserted into the fixed blank plate 302 (i.e., ...). Figure 22 The movable part blank 301 (shown in the Y direction) moves.

[0102] When the force sensor 307 is a contact force sensor 307, the method for adjusting the position of the movable blank plate 301 relative to the fixed blank plate 302 after the movable blank plate 301 is installed may include first moving the movable blank plate 301 along a first adjustment direction of the comb teeth arrangement, such as the negative direction of the Y-axis, a first predetermined distance D1 until the movable comb teeth 1022 contact the fixed comb teeth 1012. During this process, multiple contact force values ​​can be measured, such as... Figure 23 The three contact forces are shown in a triangle.Figure 23 The horizontal axis in the figure represents the distance the movable blank 301 moves, where zero represents the initial position of the movable blank 301 after insertion, and the negative axis represents the movement of the movable blank 301 along the first horizontal axis (i.e., ...). Figure 22 The Y-axis moves in the negative direction, while the positive direction indicates that the moving blank 301 moves in the second direction opposite to the first adjustment direction (i.e., the Y-axis moves in the negative direction). Figure 22 It moves in the positive Y direction. Figure 23 The vertical axis in the figure represents the measured contact force.

[0103] By moving the movable blank 301 along the first adjustment direction as mentioned above, multiple contact force values, as shown by the triangle, can be obtained. Figure 23 (Three are shown in the figure). Using these contact force values, a force-distance line F1 can be fitted between the movable comb teeth 1022 and the fixed comb teeth 1012 during the contact process. Using this force-distance line F1, the first movement distance L1 of the movable blank plate 301 when it moves along the first adjustment direction until the contact force just begins to be generated can be determined. Here, the point at which the contact force just begins to be generated represents the point at which the movable comb teeth 1022 and the fixed comb teeth 1012 just begin to make contact.

[0104] After moving a first predetermined distance D1 along the first adjustment direction, the movable blank plate 301 is then moved a second predetermined distance D2 along the opposite second predetermined direction until the movable comb teeth 1022 and the fixed comb teeth 1012 contact each other again. Figure 23 As shown. In this case, multiple contact force values ​​are obtained again ( Figure 23 The diagram shows three contact forces (circled in the image). Using these multiple contact force values, a force-distance line F2 can be fitted to represent the contact process between the movable comb teeth 1022 and the fixed comb teeth 1012 as they move along the second predetermined direction. Using this force-distance line F2, the second moving distance L2 of the movable blank plate 301 when it moves along the second adjustment direction until contact force is just beginning to be generated can be determined. Figure 23 It can be seen that the actual distance D between the fixed comb teeth 1012 can be determined by the following formula (3) using the first predetermined distance D1, the first moving distance L1 and the second moving distance L2.

[0105] D = L2 - D1 + L1 (3)

[0106] By positioning the movable comb teeth 1022 at the midpoint Y of the actual distance D, the spacing between the movable comb teeth 1022 and the fixed comb teeth 1012 can be made consistent. Next, based on the determined actual distance D between the fixed comb teeth 1012, a third moving distance L3 can be determined to move the movable blank plate 301 to a position where the spacing between the movable comb teeth 1022 and the fixed comb teeth 1012 is consistent. Figure 23 Based on the above formula (3), the third moving distance L3 can be determined using formula (4).

[0107] L3 = D2 - L2 + D / 2 (4)

[0108] After determining the third moving distance L3, it is only necessary to move the movable blank plate 301 along the first moving direction by the third moving distance L3 to move the movable blank plate 301 to a position where the spacing between the movable comb teeth 1022 and the fixed comb teeth 1012 is consistent (i.e., Figure 23 (Position Y in the middle). In this way, precise positioning of the moving part blank 301 can be achieved using only the force sensor 307. Of course, the above-mentioned distance-based method can also be achieved by determining coordinate values.

[0109] Specifically, after bringing the movable comb teeth 1022 and the fixed comb teeth 1012 into contact along the first moving direction and obtaining multiple contact forces, a force-distance line F1 can be fitted using these contact forces. Using this force-distance F1, the S-axis coordinate Y1 when the movable comb teeth 1022 just begins to contact the fixed comb teeth 1012 can be obtained. Similarly, a force-distance line F2 can be obtained when the movable blank plate 301 moves along the second moving direction. Using this force-distance line F2, the coordinate Y2 when the movable comb teeth 1022 just begins to contact the fixed comb teeth 1012 when the movable blank plate 301 moves along the second moving direction can be obtained. Using Y1 and Y2, the coordinate Y of the movable blank plate 301 when the spacing between the movable comb teeth 1022 and the fixed comb teeth 1012 is consistent can be determined using the following formula (5).

[0110] Y = (Y2 + Y1) / 2 (5)

[0111] Next, simply move the movable part blank 301 to this coordinate value. In this way, the spacing between the fixed part comb teeth 1012 and the movable part comb teeth 1022 is kept consistent using a simpler method.

[0112] The above description, in conjunction with the accompanying drawings, describes various embodiments of inserting the movable blank 301 into the fixed blank 302 and adjusting the movable blank 301. It should be understood that the above embodiments regarding adjusting the position of the movable blank 301 relative to the fixed blank 302 are not exhaustive, and any other suitable adjustment method is possible. By etching the movable blank 301 and the fixed blank 302 separately, a high aspect ratio between the teeth of the formed MEMS comb structure 100 can be achieved in a simple manner and at a low cost, thereby significantly improving the driving performance of the MEMS comb structure 100 as a MEMS motor and its sensor performance as a MEMS inertial sensor.

[0113] According to another aspect of the embodiments of this disclosure, a MEMS comb structure 100 manufactured by the method mentioned above is also provided. The MEMS comb structure 100 includes the aforementioned fixing member 101 and moving member 102. In the MEMS comb structure 100 manufactured using conventional manufacturing processes, the moving member 102 and the fixing member 101 are typically fixed together by bonding. As mentioned above, the MEMS comb structure 100 manufactured according to the method of the embodiments of this disclosure can easily achieve a depth-to-width ratio greater than 50:1, for example, 100:1, between the fixing member comb teeth 1012 and the moving member comb teeth 1022, thereby significantly improving the driving capability or sensing performance of the MEMS comb structure 100. Furthermore, the moving member riveting portion 1021 is bonded to the fixing member substrate 1011 with an adhesive. In this way, deformation between the moving member comb teeth 1022 and the fixing member comb teeth 1012 during the bonding process can be mitigated, thereby further improving the reliability of the MEMS comb structure 100.

[0114] Although the subject matter has been described using language specific to structural features and / or methodological logic, it should be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or actions described above. Rather, the specific features and actions described above are merely illustrative examples of implementing the claims.

Claims

1. A method for manufacturing a comb structure for a microelectromechanical system, comprising: The fixing blank plate (302) and the movable blank plate (301) are respectively formed to form the comb tooth structure (100), wherein the fixing blank plate (302) includes a fixing base plate (1011) and a fixing comb tooth (1012); and the movable blank plate (301) includes a movable riveting part (1021) and a movable comb tooth (1022); The movable component blank (301) is inserted into the fixed component blank (302) in an insertion direction perpendicular to the fixed component blank (302), so that the fixed component comb teeth (1012) and the movable component comb teeth (1022) are arranged at intervals; and The movable part riveting part (1021) is fixed to the fixed part base plate (1011) to form the comb tooth structure (100).

2. The method according to claim 1, further comprising: Adjust the position of the movable blank plate (301) relative to the fixed blank plate (302) so that the spacing between the fixed comb teeth (1012) and the movable comb teeth (1022) is consistent.

3. The method according to claim 2, wherein the insertion step comprises: The movable blank (301) is inserted into the fixed blank (302) by means of a positioning member, wherein the positioning member is formed on the fixed blank (302) and the movable blank (301).

4. The method of claim 3, wherein the insertion step further comprises: Move the movable blank plate (301) so that the first prepositioning member (3011) and the second prepositioning member (3021) of the positioning member are aligned in the insertion direction, wherein the first prepositioning member (3011) is formed on the movable blank plate (301) and the second prepositioning member (3021) is formed on the fixed blank plate (302). as well as The movable blank plate (301) is further moved along the insertion direction so that the first prepositioning member (3011) and the second prepositioning member (3021) engage to insert the movable blank plate (301) onto the fixed blank plate (302).

5. The method according to any one of claims 2-4, wherein adjusting the position of the movable blank (301) relative to the fixed blank (302) comprises: The image acquisition unit (306) acquires an image of the interference fringes generated after light passes through the grating mark assembly of the positioning member; as well as At least one of the movable blank plate (301) and the fixed blank plate (302) is moved along an adjustment direction perpendicular to the insertion direction so that the interference fringes in the image satisfy a predetermined pattern.

6. The method according to claim 2, wherein adjusting the position of the movable blank (301) relative to the fixed blank (302) comprises: One of the positive and negative terminals of a power source with a predetermined voltage is electrically connected to the movable blank plate (301), and the other of the positive and negative terminals is electrically connected to the fixed blank plate (302). The electrostatic force between the movable comb teeth (1022) on the movable part blank plate (301) and the fixed comb teeth (1012) on the fixed part blank plate (302) is obtained; and The movable blank plate (301) is moved along the arrangement direction of the movable comb teeth (1022) or the fixed comb teeth (1012) to adjust the electrostatic force to a predetermined threshold range.

7. The method according to claim 2, wherein adjusting the position of the movable blank (301) relative to the fixed blank (302) comprises: The movable blank plate (301) is moved a first predetermined distance along the first adjustment direction of the arrangement of the movable comb teeth (1022) or the fixed comb teeth (1012) until the movable comb teeth (1022) and the fixed comb teeth (1012) come into contact, and the first moving distance of the movable blank plate (301) when the contact force is just generated is determined. Move the movable blank plate (301) along a second adjustment direction opposite to the first adjustment direction until the movable comb teeth (1022) and the fixed comb teeth (1012) come into contact, and determine the second moving distance of the movable blank plate (301) when the contact force is just generated; A third moving distance is determined based on the first predetermined distance, the first moving distance, and the second moving distance to move the movable blank (301) along the first adjustment direction; and The movable blank (301) is moved by the third moving distance along the first adjustment direction so that the spacing of the formed comb structure (100) is consistent.

8. The method of claim 7, wherein determining the first travel distance comprises: During the movement of the movable blank plate (301) along the first adjustment direction, at least two different contact forces are acquired; Obtain the relationship between the contact force and the moving distance of the movable blank (301); as well as The first movement distance is determined based on the relationship.

9. The method of claim 7, wherein determining the second travel distance comprises: During the movement of the movable blank plate (301) along the second adjustment direction, at least two different contact forces are acquired; Obtain the relationship between the contact force and the moving distance of the movable blank (301); The second movement distance is determined based on the relationship.

10. The method according to any one of claims 1-9, further comprising: The movable part riveting part (1021) is fixed to the fixed part base plate (1011) by means of adhesive.

11. A system for manufacturing a comb structure for a microelectromechanical system, comprising: An etching apparatus is configured to form a fixing blank (302) and a movable blank (301) of the comb tooth structure (100), respectively, wherein the fixing blank (302) includes a fixing base plate (1011) and fixing comb teeth (1012); and the movable blank (301) includes a movable riveting portion (1021) and movable comb teeth (1022); and A moving device (303) is configured to couple to the movable blank (301) to insert the movable blank (301) onto the fixed blank (302) in an insertion direction perpendicular to the fixed blank (302).

12. The system according to claim 11, further comprising: A positioning member is configured to provide guidance and / or positioning for the movable blank (301) to facilitate consistent tooth spacing in the formed comb structure (100).

13. The system of claim 12, wherein the positioning member comprises: A first prepositioning element (3011) is formed on the movable element blank (301); as well as A second prepositioning member (3021) is formed on the fixing blank (302) and configured to engage with the first prepositioning member (3011) to provide guidance for movement of the moving blank (301) along the insertion direction.

14. The system of claim 13, wherein the positioning member further comprises: A grating marker assembly, adapted to interfere light passing through the grating marker assembly, comprising: A first grating mark (3012) is formed on the movable part blank (301); A second grating mark (3022) is formed on the fastener blank (302) and is configured to be offset from the second grating mark (3022) in an adjustment direction perpendicular to the insertion direction when the first prepositioning member (3011) and the second prepositioning member (3021) are engaged.

15. The system of claim 14, wherein the positioning member further comprises: Alignment plate (304) is adapted to be arranged on the side of the fixed member blank plate (302) opposite to the movable member blank plate (301), and The grating mark assembly also includes a plurality of alignment plate grating marks (3041) formed on the alignment plate (304), the alignment plate grating marks (3041) being arranged to be aligned with the first grating mark (3012) and the second grating mark (3022) in the insertion direction.

16. The system of claim 15, wherein the positioning member further comprises: A light source (305) is arranged on the side of the alignment plate (304) facing away from the fastener blank (302) along the insertion direction, and is configured to emit light toward the alignment plate (304) along the insertion direction; as well as An image acquisition unit (306) is arranged on the side of the movable blank (301) opposite to the alignment plate (304) in the insertion direction, and is configured to acquire an image of the interference fringes generated after the light passes through the grating marking assembly.

17. The system according to claim 16, wherein the movable movable blank (301) and the fixed blank (302) are rectangular, and the first grating mark (3012) and the second grating mark (3022) are arranged on at least one side of the rectangle.

18. The system of claim 12, wherein the positioning member further comprises: A force sensor (307) is configured to acquire at least one of an electrostatic force and a contact force between the movable comb teeth (1022) on the movable blank (301) and the fixed comb teeth (1012) on the fixed blank (302).

19. A comb structure for a microelectromechanical system, comprising: The fastener (101) includes a fastener base plate (1011) and fastener comb teeth (1012); and The movable part (102) includes a movable part riveting part (1021), a movable part comb tooth (1022), and a connecting block (1023) connecting the movable part riveting part (1021) and the movable part comb tooth (1022), wherein the movable part riveting part (1021) is bonded to the fixing base plate (1011) by an adhesive to fix the movable part (102) to the fixing part (101).

20. The microelectromechanical system comb structure according to claim 19, wherein the aspect ratio between the movable comb teeth (1022) and the fixed comb teeth (1012) of the microelectromechanical system comb structure is greater than 50:1.

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