Device with slits with improved control precision by wedge motion

Abstract

The present application relates to a kind of devices with the control precision of slit by wedge motion improvement, for forming micro hole.Flange disc surface is defined as xy plane, the thickness direction of flange disc is defined as z direction, there are four through holes on the disc wall of flange disc, which extend in parallel on xy plane and are uniformly distributed at 90 degree intervals, and the four through holes have different depths in z direction.Four transmission shafts respectively pass through the four through holes provided on the disc wall of flange disc, and the included angle between the projections of the adjacent two transmission shafts in the four transmission shafts in xy plane is 90 degrees.Four slit blades are moved under the push of the four transmission shafts respectively, the thickness of each slit blade of the four slit blades extends along z direction, and each slit blade of the four slit blades forms a right triangle parallel to xy plane in the width direction.The present application can not only obtain better micro hole size control precision, but also realize the adjustable center position of micro hole, which has positive promoting effect on improving micro beam performance and reducing design cost.

Description

Technical Field

[0001] This invention relates to the fields of precision aperture control for ion beams and ion microbeams, and particularly to slits that improve control precision through wedge motion. Background Technology

[0002] A microbeam is a device capable of outputting a beam with a radial dimension on the order of micrometers or submicrometers. Microbeams can inject a specific radiation dose at a predetermined location with micrometer-level spatial resolution, reaching irradiation levels as low as a single ion. They are a powerful tool for radiation biology research and are of great significance for research on human cancer prevention and astronaut health protection. Meanwhile, non-destructive mapping and analysis techniques developed based on microbeams, such as proton-induced X-ray analysis (PIXE), Rutherford backscattering analysis (RBS), nuclear reaction analysis (NRA), and particle scanning microscopy (STIM), have wide applications in materials research, environmental science, archaeology, and life sciences.

[0003] The slit is one of the core components of a microbeam. First-generation microbeams used multiple sets of slit elements to construct the beam, which was sufficient to confine the accelerator beam to the micrometer scale. Modern microbeam devices mostly use a combination of multiple slits and electromagnetic field focusing to achieve smaller beam sizes and greater current intensity. Currently, four-blade slits and wedge slits are the most classic slit designs in the microbeam field, but both types have shortcomings. Four-blade slits use a blade design at a 90-degree angle to the direction of motion, and the control precision of the slit micro-orifice is the same as the motion precision of the drive shaft, making it difficult to improve. Wedge slits consist of a pair of modules with a 90-degree installation angle, each with a trapezoidal hollowed-out area. The module's motion direction is at a 90-degree angle to the parallel side of the trapezoidal hollowed-out area. This design can greatly improve the control precision of the micro-orifice, but the slit center cannot be adjusted. Based on this, the present invention proposes a slit design method that combines four-axis motion with a wedge-shaped blade. This method can improve the control accuracy of the four-blade slit and adjust the center of the wedge-shaped slit. It can effectively eliminate the shortcomings of the two classic slit schemes and contribute to the development of high-performance microbeam devices. Summary of the Invention

[0004] To address the issues of insufficient control precision or inability to adjust the micro-orifice center in classic slit designs, the present invention aims to provide a design method for a four-axis wedge motion slit. During linear motion drive, the wedge sweep angle direction can be converted to achieve high-precision slit size control that is less than the linear motion distance, thereby eliminating the shortcomings of the two classic slit designs and obtaining higher micro-orifice control precision.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A device with a slit that improves control precision through wedge motion, the device being used to form a micropore, the device comprising:

[0007] A flange, the flange face is defined as the xy plane, the flange thickness direction is defined as the z direction, and the flange wall has four through holes that extend parallel to each other on the xy plane and are evenly distributed at 90-degree intervals. The four through holes have different depths in the z direction.

[0008] Four drive shafts, each passing through one of the four through holes in the flange wall, with the angle between the projections of any two adjacent drive shafts in the xy plane being 90 degrees; and

[0009] Four slit blades are moved by four drive shafts. The thickness of each slit blade extends along the z-direction. Each slit blade forms a right-angled triangle parallel to the xy-plane in the widening direction. Each slit blade includes a blade back extending perpendicular to its respective drive shaft, a blade ridge extending parallel to its respective drive shaft, and a blade edge serving as the hypotenuse of the right-angled triangle. The projection of each blade edge onto the xy-plane is a straight line. The four blade edges form a micro-hole.

[0010] The slit blade is made of a thin sheet of material in three-dimensional space.

[0011] Only one slit blade is installed on each of the four drive shafts.

[0012] The projection of the slit blade edge and the direction of motion of the drive shaft onto the xy plane is not a right angle.

[0013] The angle between the lines projected onto the xy plane of two slit blades mounted on two drive shafts with a projection angle of 90 degrees is also 90 degrees.

[0014] In the projection of the four drive shafts into the xy plane, the included angle between adjacent drive shafts is 90 degrees.

[0015] It also includes a drive motor for driving the displacement of the transmission shaft.

[0016] It also includes a micrometer screw gauge, used to calibrate the position of the drive shaft.

[0017] It also includes a vacuum bellows, used to isolate the drive shaft from the atmosphere to ensure that a vacuum is drawn when the flange is installed in the beam.

[0018] The angle α between the slit blade tip and the drive shaft is designed to be 0-90 degrees. When α is a sweep angle, the drive shaft moves 1 micrometer, and the microhole changes sinα micrometers on one side. The center position of the microhole is controlled by controlling the length of the drive shaft extending into the flange.

[0019] The present invention has the following advantages due to the adoption of the above technical solutions:

[0020] The control precision of the slit determines the performance of the microbeam device. Existing designs using four-axis slits have low control precision, and performance improvements would significantly increase production costs. While wedge-shaped slits, balancing control precision and design cost, can effectively improve the control precision of the slit micro-orifice, they still suffer from the inability to adjust the center of the micro-orifice. This solution inherits the advantages of classic solutions while eliminating their shortcomings, thus achieving superior control precision and an adjustable micro-orifice center. Using this solution positively contributes to improving microbeam performance and reducing design costs. Attached Figure Description

[0021] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the invention. Throughout the drawings, the same reference numerals denote the same parts. In the drawings:

[0022] Figure 1 This is a schematic diagram of the combined structure of the first single drive shaft and the slit blade in the four-axis wedge slit structure model.

[0023] Figure 2 This is a schematic diagram of the combined structure of the second single drive shaft and the slit blade in the four-axis wedge slit structure model.

[0024] Figure 3 This is a schematic diagram of the combined structure of the third single drive shaft and the slit blade in the four-axis wedge slit structure model.

[0025] Figure 4 This is a schematic diagram of the combined structure of the fourth single drive shaft and the slit blade in the four-axis wedge slit structure model.

[0026] Figure 5 This is a schematic diagram of the four-axis combined structure in the four-axis wedge slit structure model; and

[0027] Figure 6 It is the reference coordinate system of the structural model in the four-axis wedge slit structure model, where the xy plane is parallel to the paper and the z axis is perpendicular to the paper.

[0028] The markings in the attached diagram are as follows:

[0029] 1. First drive shaft; 2. Second drive shaft; 3. Third drive shaft; 4. Fourth drive shaft; 5. First slit blade; 6. Second slit blade; 7. Third slit blade; 8. Fourth slit blade; α, Angle between blade edge and drive shaft; 51. Back of first slit blade; 52. Edge of first slit blade; 53. Ridge of first slit blade; 61. Back of second slit blade; 62. Edge of second slit blade; 63. Ridge of second slit blade; 71. Back of third slit blade; 72. Edge of third slit blade; 73. Ridge of third slit blade; 81. Back of fourth slit blade; 82. Edge of fourth slit blade; 83. Ridge of fourth slit blade. Detailed Implementation

[0030] Exemplary embodiments of the invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the invention are shown in the drawings, it should be understood that the invention can be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the invention and to fully convey the scope of the invention to those skilled in the art.

[0031] According to some embodiments of this application, a four-axis wedge motion slit is designed, which not only utilizes the non-right angle design between the drive shaft and the blade to obtain higher micro-hole control accuracy, but also realizes the adjustment of the micro-hole center position through the four-axis independent motion design.

[0032] Specifically, as follows (for ease of description, a three-dimensional Cartesian coordinate system is defined, with the three axes named x, y, and z):

[0033] Four-axis motion design

[0034] The four axes are four linear axes in three-dimensional space that are parallel to and separate from each other and are parallel to the xy plane.

[0035] The four lines projected onto the xy plane by the four axes have an angle of 90 degrees between any two adjacent lines.

[0036] Each axis of the four-axis system can move back and forth along the direction of the axis.

[0037] The four axes have different heights in the z-direction, and adjacent axes in the z-direction have a specified spacing.

[0038] Slit blade design

[0039] The slit blade is a thin sheet material in three-dimensional space;

[0040] The thickness of the slit blade extends along the z-direction, and its widening direction is parallel to the xy-plane;

[0041] The projection of the slit blade's cutting edge onto the xy plane is a straight line.

[0042] Slit assembly

[0043] All structural units of the slit are installed according to the same Cartesian (xyz) coordinate system;

[0044] Only one slit blade is installed on each drive shaft;

[0045] The projection of the blade edge and the direction of motion of the drive shaft onto the xy plane is a non-right angle α.

[0046] For two drive shafts whose projection angle in the xy plane is 90 degrees, the blade edges mounted on them also have a straight line angle of 90 degrees when projected onto the xy plane.

[0047] like Figure 1 As shown, the first drive shaft 1 pushes the first slit blade 5, which includes the first slit blade back 51, the first slit blade edge 52, and the first slit blade spine 53.

[0048] like Figure 2 As shown, the second drive shaft 2 drives the second slit blade 6, which includes a second slit blade back 61, a second slit blade edge 62, and a second slit blade spine 63.

[0049] like Figure 3 As shown, the third drive shaft 3 pushes the third slit blade 7, which includes the third slit blade back 71, the third slit blade edge 72, and the third slit blade spine 73.

[0050] like Figure 4 As shown, the second fourth drive shaft 3 drives the fourth slit blade 8, which includes the fourth slit blade back 81, the fourth slit blade edge 82, and the fourth slit blade spine 83.

[0051] According to some embodiments of this application, a four-axis wedge-shaped motion slit is designed, wherein:

[0052] The flange face with an opening of FC115 is defined as the xy face, the flange thickness is 8cm, and the flange thickness direction is defined as the z direction;

[0053] Four through holes are drilled at different depths in the z-direction to install the drive shaft of the slit. The angle between adjacent drive shafts when projected in the xy plane is 90 degrees.

[0054] Slit monoaxial structure

[0055] A single drive shaft includes components such as a drive motor, a micrometer screw gauge, a vacuum bellows, a transmission shaft, and a slit blade;

[0056] The drive motor is used to drive the displacement of the drive shaft, the micrometer is used to calibrate the current position of the drive shaft, and the vacuum bellows is used to isolate the drive shaft from the atmosphere to ensure that the pipeline can be evacuated when the flange is installed in the beam.

[0057] Slit performance

[0058] The angle α between the blade edge and the drive shaft is designed to be 0-90 degrees. When α is a sweep angle, the drive shaft moves 1 micrometer, and the micro-hole changes sinα micrometers on one side. Under the same displacement of the drive shaft, this scheme improves the control accuracy by 1 / sinα times compared with the classic four-axis slit. At the same time, the center position of the micro-hole is adjustable. In specific operation, it can be controlled by controlling the length of the drive shaft extending into the flange.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A device having a slit with improved control precision through wedge motion, the device being used to form a micropore, characterized in that, The device includes: A flange, wherein the flange surface is defined as the xy plane, the flange thickness direction is defined as the z direction, and the flange wall has four through holes that extend parallel to each other on the xy plane and are evenly distributed at 90-degree intervals, the four through holes having different depths in the z direction. Four drive shafts, each passing through one of the four through holes provided on the wall of the flange, wherein the included angle between the projections of any two adjacent drive shafts in the xy plane is 90 degrees; and Four slit blades are provided, each moving under the drive of four drive shafts. The thickness of each slit blade extends along the z-direction. Each slit blade forms a right-angled triangle parallel to the xy-plane in the widening direction. Each slit blade includes a blade back extending perpendicular to its respective drive shaft, a blade ridge extending parallel to its respective drive shaft, and a blade edge serving as the hypotenuse of the right-angled triangle. The projection of each blade edge onto the xy-plane is a straight line, and the four blade edges form a micro-hole.

2. The device with a slit that improves control accuracy through wedge motion according to claim 1, characterized in that, The slit blade is made of a thin sheet material in three-dimensional space.

3. The device according to claim 1, having a slit that improves control accuracy through wedge motion, characterized in that, Only one slit blade is installed on each of the four drive shafts.

4. The device with a slit that improves control accuracy through wedge motion according to claim 1, characterized in that, The projection of the slit blade edge and the direction of motion of the drive shaft onto the xy plane is not a right angle.

5. The device according to claim 1, having a slit that improves control accuracy through wedge motion, characterized in that, The angle between the lines projected onto the xy plane of two slit blades mounted on two drive shafts with a projection angle of 90 degrees is also 90 degrees.

6. The device according to claim 1, having a slit that improves control accuracy through wedge motion, characterized in that, In the projection of the four drive shafts into the xy plane, the included angle between adjacent drive shafts is 90 degrees.

7. The device according to claim 1, having a slit that improves control accuracy through wedge motion, characterized in that, It also includes a drive motor for driving the displacement of the transmission shaft.

8. The device according to claim 1, having a slit that improves control accuracy through wedge motion, characterized in that, It also includes a micrometer screw gauge, used to calibrate the position of the drive shaft.

9. The device according to claim 1, having a slit that improves control accuracy through wedge motion, characterized in that, It also includes a vacuum bellows, used to isolate the drive shaft from the atmosphere to ensure a vacuum is drawn when the flange is installed on the accelerator beamline.

10. The device according to claim 1, having a slit with improved control precision through wedge motion, characterized in that, The angle α between the slit blade tip and the drive shaft is designed to be 0-90 degrees. When α is a sweep angle, the drive shaft moves 1 micrometer, and the microbeam changes sinα micrometers on one side. The center position of the microhole is controlled by controlling the length of the drive shaft extending into the flange.

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