Microfocusing ray source control circuit and microfocusing ray source

Abstract

This invention discloses a control circuit and a micro-focused X-ray source. The control circuit includes a control signal conditioning circuit, a first opto-isolation circuit, a drive circuit, and a feedback circuit. The control signal conditioning circuit's control signal input terminal is used to receive a control signal, and its feedback signal input terminal is electrically connected to the output terminal of the feedback circuit. The control signal conditioning circuit generates a conditioning signal based on the control signal. The first opto-isolation circuit's input terminal is electrically connected to the output terminal of the control signal conditioning circuit, and its output terminal is electrically connected to the control terminal of the drive circuit. The output terminal of the first opto-isolation circuit is also electrically connected to the input terminal of the feedback circuit. The first opto-isolation circuit generates a first isolation signal based on the conditioning signal. The feedback circuit generates a feedback signal based on the first isolation signal. This invention electrically isolates the high-voltage and low-voltage sides of the circuit, which improves circuit safety.

Description

Technical Field

[0001] This invention relates to the field of electronic equipment technology, and in particular to a micro-focused X-ray source control circuit and a micro-focused X-ray source. Background Technology

[0002] Currently, the development of micro-focused X-ray sources mainly requires real-time acquisition and closed-loop control of several parameters, including filament voltage control, grid voltage control, and focusing voltage control.

[0003] When developing and using micro-focused X-ray sources, closed-loop control is required between the high-voltage feedback signal and the control signal. The high-voltage feedback sampling mainly uses a resistor voltage divider, which requires high-voltage components or a large number of resistors for voltage division. If a short circuit occurs in the resistor during use, the corresponding high voltage will flow into the control terminal and cause a safety accident. Summary of the Invention

[0004] This invention provides a micro-focused X-ray source control circuit and a micro-focused X-ray source to electrically isolate the high-voltage and low-voltage sides of the circuit, thereby improving the circuit's safety.

[0005] According to one aspect of the present invention, a micro-focusing X-ray source control circuit is provided, comprising: a control signal conditioning circuit, a first opto-isolation circuit, a driving circuit, and a feedback circuit;

[0006] The control signal input terminal of the control signal conditioning circuit is used to receive the control signal, the feedback signal input terminal of the control signal conditioning circuit is electrically connected to the output terminal of the feedback circuit, and the control signal conditioning circuit is used to generate a conditioning signal according to the control signal.

[0007] The input terminal of the first opto-isolation circuit is electrically connected to the output terminal of the control signal adjustment circuit, the output terminal of the first opto-isolation circuit is electrically connected to the control terminal of the drive circuit, and the output terminal of the first opto-isolation circuit is also electrically connected to the input terminal of the feedback circuit. The first opto-isolation circuit is used to generate a first isolation signal according to the adjustment signal.

[0008] The feedback circuit is used to generate a feedback signal based on the first isolation signal, so that the control signal adjustment circuit forms a closed-loop control.

[0009] The output terminal of the drive circuit is electrically connected to the setting component of the micro-focusing X-ray source, and is used to control the operation of the setting component according to the first isolation signal.

[0010] Optionally, the control circuit of the micro-focused X-ray source further includes: a boost circuit and a reference power generation circuit. The boost circuit is used to increase the voltage signal input to its own input terminal by a factor of N before outputting it, where N is a positive integer. The output terminal of the boost circuit is electrically connected to the reference terminal of the reference power generation circuit. The output terminal of the reference power generation circuit is electrically connected to the first power supply terminal and the second power supply terminal of the first opto-isolation circuit, as well as the power supply terminal of the feedback circuit and the power supply terminal of the drive circuit. The output terminal of the boost circuit is electrically connected to the first reference terminal and the second reference terminal of the first opto-isolation circuit, as well as the reference terminal of the feedback circuit and the reference terminal of the drive circuit, respectively. The voltage output by the reference power generation circuit is of the same order of magnitude as the voltage output by the boost circuit, and the difference between the voltage output by the reference power generation circuit and the voltage output by the boost circuit is of the same order of magnitude as the operating voltage of the devices included in the control circuit.

[0011] Optionally, the reference power generation circuit includes a first transformer, a first rectifier diode, a second rectifier diode, and a voltage conversion module. The first output terminal of the first transformer is electrically connected to the first terminal of the first rectifier diode, the second terminal of the first rectifier diode is electrically connected to the input terminal of the voltage conversion module, the second output terminal of the first transformer is electrically connected to the first terminal of the second rectifier diode, the second terminal of the second rectifier diode is electrically connected to the input terminal of the voltage conversion module, the third output terminal of the first transformer and the reference terminal of the voltage conversion module are both electrically connected to the output terminal of the boost circuit, and the output terminal of the voltage conversion module serves as the output terminal of the reference power generation circuit.

[0012] Optionally, the control signal conditioning circuit includes: a feedback module, a first resistor, a first switching transistor, and a voltage follower module;

[0013] The first input terminal of the feedback module serves as the control signal input terminal of the control signal conditioning circuit, and the second input terminal of the feedback module serves as the feedback signal input terminal of the control signal conditioning circuit. The output terminal of the feedback module is electrically connected to the first terminal of the first switching transistor via the first resistor. The second terminal of the first switching transistor is electrically connected to the first terminal of the voltage follower module. The third terminal of the first switching transistor is grounded. The first terminal of the voltage follower module is also electrically connected to a fixed power supply. The second terminal of the voltage follower module is electrically connected to the fixed power supply. The third terminal of the voltage follower module serves as the output terminal of the control signal conditioning circuit.

[0014] Optionally, the feedback module includes an amplifier, a first capacitor, a second capacitor, and a second resistor;

[0015] The first input terminal of the amplifier serves as the first input terminal of the feedback module, the second input terminal of the amplifier serves as the second input terminal of the feedback module, the output terminal of the amplifier serves as the output terminal of the feedback module, the first terminal of the first capacitor is electrically connected to the second input terminal of the amplifier, the second terminal of the first capacitor is electrically connected to the first terminal of the second resistor, the second terminal of the second resistor is electrically connected to the output terminal of the amplifier, the first terminal of the second capacitor is electrically connected to the second input terminal of the amplifier, and the second terminal of the second capacitor is electrically connected to the output terminal of the amplifier.

[0016] Optionally, the first opto-isolation circuit includes: a first infrared diode, a first photodiode, and a second switching transistor. The first terminal of the first infrared diode is electrically connected to a fixed power supply, and the second terminal of the first infrared diode serves as the input terminal of the first opto-isolation circuit.

[0017] The first end of the first photodiode is electrically connected to the first power supply terminal of the first opto-isolation circuit, and the second end of the first photodiode is electrically connected to the first reference terminal of the first opto-isolation circuit.

[0018] The first terminal of the second switch is electrically connected to the second terminal of the first photodiode, the second terminal of the second switch is electrically connected to the second power supply terminal of the first opto-isolation circuit, the third terminal of the second switch is electrically connected to the second reference terminal of the first opto-isolation circuit, and the third terminal of the second switch also serves as the output terminal of the first opto-isolation circuit.

[0019] Optionally, the feedback circuit includes: a voltage-to-frequency conversion module and a second opto-isolation circuit. The input terminal of the voltage-to-frequency conversion module serves as the input terminal of the feedback circuit, the reference terminal of the voltage-to-frequency conversion module serves as the reference terminal of the feedback circuit, the power supply terminal of the voltage-to-frequency conversion module serves as the power supply terminal of the feedback circuit, the output terminal of the voltage-to-frequency conversion module is electrically connected to the input terminal of the second opto-isolation circuit, and the output terminal of the second opto-isolation circuit serves as the output terminal of the feedback circuit.

[0020] Optionally, the second opto-isolation circuit includes a second infrared emitting diode and a photoelectric conversion unit. The second infrared emitting diode is electrically connected to the output terminal of the reference power generation circuit. The second terminal of the second infrared emitting diode serves as the input terminal of the second opto-isolation circuit, and the output terminal of the photoelectric conversion unit serves as the output terminal of the second opto-isolation circuit.

[0021] Optionally, the driving circuit includes: a power supply module, a second transformer, a third rectifier diode, and a fourth rectifier diode.

[0022] The first terminal of the power module is electrically connected to the first input terminal of the second transformer, the second terminal of the power module is electrically connected to the second input terminal of the second transformer, the third input terminal of the second transformer serves as the control terminal of the drive circuit, the first output terminal of the second transformer is electrically connected to the first terminal of the third rectifier diode, the second terminal of the third rectifier diode serves as the output terminal of the drive circuit, the second output terminal of the second transformer is electrically connected to the first terminal of the fourth rectifier diode, the second terminal of the fourth rectifier diode is electrically connected to the second terminal of the third rectifier diode, and the third output terminal of the second transformer serves as the reference terminal of the drive circuit.

[0023] According to another aspect of the present invention, a micro-focused X-ray source is provided, including the micro-focused X-ray source control circuit described in any of the preceding claims.

[0024] The control circuit of the micro-focused X-ray source provided by this invention includes: a control signal conditioning circuit, a first opto-isolation circuit, a drive circuit, and a feedback circuit; the control signal conditioning circuit's control signal input terminal is used to receive a control signal, and its feedback signal input terminal is electrically connected to the output terminal of the feedback circuit, thus generating an conditioning signal based on the control signal; the first opto-isolation circuit's input terminal is electrically connected to the output terminal of the control signal conditioning circuit, its output terminal is electrically connected to the control terminal of the drive circuit, and its output terminal is also electrically connected to the input terminal of the feedback circuit, thus generating a first isolation signal based on the conditioning signal; the feedback circuit generates a feedback signal based on the first isolation signal, enabling the control signal conditioning circuit to form a closed-loop control; the drive circuit's output terminal is electrically connected to a setting component of the micro-focused X-ray source, controlling the setting component to operate based on the first isolation signal. The signals in the control signal conditioning circuit (weak current side) are all weak current signals, and the signals in the drive circuit (strong current side) are all strong current signals. The control signal conditioning circuit and the drive circuit are isolated by the first opto-isolation circuit so that in the event of discharge or short circuit on the strong current side, the electrical isolation will prevent harm to the operator and ensure the operator's personal safety.

[0025] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the control circuit of a micro-focused X-ray source provided in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the control circuit of another micro-focused X-ray source provided in an embodiment of the present invention;

[0029] Figure 3 This is a schematic diagram of the control circuit of another micro-focused X-ray source provided in an embodiment of the present invention;

[0030] Figure 4 This is a schematic diagram of the control circuit of another micro-focused X-ray source provided in an embodiment of the present invention. Detailed Implementation

[0031] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0032] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0033] Figure 1 This is a schematic diagram of the control circuit of a micro-focused X-ray source provided in an embodiment of the present invention, with reference to... Figure 1The control circuit of the micro-focused X-ray source includes: a control signal conditioning circuit 1, a first opto-isolation circuit 2, a drive circuit 3, and a feedback circuit 4;

[0034] The control signal input terminal A1 of the control signal conditioning circuit 1 is used to receive the control signal. The feedback signal input terminal A2 of the control signal conditioning circuit 1 is electrically connected to the output terminal U0 of the feedback circuit 4. The control signal conditioning circuit 1 is used to generate the conditioning signal according to the control signal.

[0035] The input terminal A3 of the first opto-isolation circuit 2 is electrically connected to the output terminal U1 of the control signal adjustment circuit 1. The output terminal U2 of the first opto-isolation circuit 2 is electrically connected to the control terminal B1 of the drive circuit 3. The output terminal U2 of the first opto-isolation circuit 2 is also electrically connected to the input terminal A4 of the feedback circuit 4. The first opto-isolation circuit 2 is used to generate a first isolation signal according to the adjustment signal.

[0036] Feedback circuit 4 is used to generate a feedback signal based on the first isolation signal so that control signal adjustment circuit 1 forms closed-loop control;

[0037] The output terminal U3 of the drive circuit 3 is electrically connected to the setting component of the micro-focusing X-ray source, and is used to control the operation of the setting component according to the first isolation signal.

[0038] The control signal received by the control signal conditioning circuit 1 is emitted by the control module included in the microfocused X-ray source, where the control module can be a microcontroller. The control signal is the signal that controls the voltage output from the output terminal U2 of the drive circuit 3. The voltages in the control signal conditioning circuit 1 are all weak voltages, typically around ten volts, while the voltages in the drive circuit 3 are strong voltages, typically around kilovolts. To prevent the large voltage from affecting the control signal conditioning circuit 1 and inducing electric shock accidents in the event of a short circuit in the drive circuit 3, this embodiment sets up a first opto-isolation circuit 2 to electrically isolate the two. The first opto-isolation circuit can include an optocoupler, which transmits electrical signals using light as a medium, thereby electrically isolating the input and output signals. The setting component of the microfocused X-ray source can be one of the filament, grid, or focusing components of the microfocused X-ray source, or other components in the microfocused X-ray source that require closed-loop control. The feedback circuit A4 is used to collect the first isolation signal output by the first opto-isolation circuit 2 and generate a feedback signal based on it, which is then output to the control signal conditioning circuit 1. Thus, the entire control circuit forms a closed-loop control based on the control signal and the feedback signal.

[0039] The operation of the control circuit of the microfocused X-ray source is as follows: Control signal adjustment circuit 1 generates an adjustment signal based on the received control signal. This adjustment signal changes with the control signal; for example, when the control signal increases, the adjustment signal also increases. First opto-isolation circuit 2 electrically isolates the adjustment signal and outputs it to drive circuit 3. Drive circuit 3 controls the voltage output to the filament, grid, or focusing point based on the magnitude of the first isolation signal output from the first opto-isolation circuit, thereby controlling the operating voltage of the microfocused X-ray source's setting components according to the control signal. Feedback circuit 4 generates a feedback signal based on the first isolation signal output from first opto-isolation circuit 2 and outputs it to control signal adjustment circuit 1, thus forming a closed-loop control.

[0040] The signals in the control signal conditioning circuit (weak current side) are all weak current signals, and the signals in the drive circuit (strong current side) are all strong current signals. The control signal conditioning circuit and the drive circuit are isolated by the first opto-isolation circuit so that in the event of discharge or short circuit on the strong current side, the electrical isolation will prevent harm to the operator and ensure the operator's personal safety.

[0041] Figure 2 This is a schematic diagram of the control circuit of another micro-focused X-ray source provided in an embodiment of the present invention, with reference to... Figure 2 Optionally, the control circuit of the micro-focused X-ray source also includes: a boost circuit 5 and a reference power generation circuit 6. The boost circuit 5 is used to increase the voltage signal connected to its input terminal by N times before outputting it, where N is a positive integer. The output terminal U4 of the boost circuit 5 is electrically connected to the reference terminal E1 of the reference power generation circuit 6. The output terminal U5 of the reference power generation circuit 6 is electrically connected to the first power supply terminal I1 and the second power supply terminal I2 of the first opto-isolation circuit 2, and is also electrically connected to the power supply terminal I3 of the feedback circuit 4 and the power supply terminal I4 of the drive circuit 3. The output terminal U4 of the boost circuit 5 is electrically connected to the first reference terminal E2 and the second reference terminal E3 of the first opto-isolation circuit 2, and is also electrically connected to the reference terminal E4 of the feedback circuit 4 and the reference terminal E5 of the drive circuit 3, respectively. The voltage output by the reference power generation circuit 6 is of the same order of magnitude as the voltage output by the boost circuit 5, and the difference between the voltage output by the reference power generation circuit 6 and the voltage output by the boost circuit 5 is of the same order of magnitude as the operating voltage of the devices included in the control circuit.

[0042] The boost circuit 5 converts a small voltage into a large voltage, which is then output to the reference power supply generation circuit 6. The reference power supply generation circuit 6 further converts the voltage based on the large voltage output from the boost circuit 5. Specifically, it can add a set value to the large voltage output from the boost circuit 5 before outputting the voltage. This set value is on the same order of magnitude as the operating voltage of the components in the control circuit of the entire micro-focused X-ray source. For example, if the large voltage output from the boost circuit 5 is -5KV, and the operating voltage of the components in the control circuit of the micro-focused X-ray source is typically tens of volts, then the voltage output from the reference power supply generation circuit 6 can be -5KV + 15V. The first opto-isolation circuit 2, the feedback circuit 4, and the drive circuit 3 are all supplied with a power supply voltage of -5KV + 15V by the reference power supply generation circuit 6. Simultaneously, the first opto-isolation circuit 2, the feedback circuit 4, and the drive circuit 3 are all supplied with a reference voltage of -5KV by the boost circuit 5. Setting the power supply voltage and reference voltage of the above circuit to the same order of magnitude can, on the one hand, meet the requirement of high voltage (several kilovolts) for the setting component driving the micro-focusing X-ray source, and on the other hand, control the voltage difference between any two nodes in the feedback circuit 4, the driving circuit 3, and the first opto-isolation circuit 2 to be a voltage of tens of volts, thereby preventing the components in the circuit from being damaged by high voltage discharge.

[0043] Figure 3 This is a schematic diagram of the control circuit of another micro-focused X-ray source provided in an embodiment of the present invention, with reference to... Figure 3 Optionally, the boost circuit includes a third transformer T3, multiple third capacitors C3, multiple fourth capacitors C4, multiple first diodes D1, and multiple second diodes D2.

[0044] The primary side of the third transformer T3 includes three input terminals: a first input terminal TA, a second input terminal TB, and a third input terminal TC. The third input terminal TC is connected to a regulated power supply. The first input terminal TA and the second input terminal TB can be connected to different ports of the control module, allowing alternating conduction between the first input terminal TA and the second input terminal TB, and between the second input terminal TB and the third input terminal TC. The third transformer T3 also includes a first output terminal F1 and a second output terminal F2, with the second output terminal F2 grounded (GND). Multiple third capacitors C3 are connected in series between the first output terminal F1 of the third transformer T3 and a designated second diode D2, which is connected to the output terminal U4 of the boost circuit 5. Multiple fourth capacitors C4 are connected in series between the second output terminal F2 of the third transformer T3 and the output terminal U4 of the boost circuit 5. A first diode D1 is connected between adjacent third capacitors C3 and fourth capacitors C4, and a second diode D2 is connected between adjacent fourth capacitors C4 and third capacitors C3. The cathode of the first diode D1 is electrically connected to the anode of the second diode D2. For specific connection relationships, please refer to [reference needed]. Figure 3For example, when the control module controls the first input terminal TA and the third input terminal T3 of the third transformer T3 to be turned on, the potential of the first output terminal F1 of the third transformer T3 is negative and the potential of the second output terminal F2 is positive, charging the first third capacitor C3, making the potential of the right plate of the first third capacitor C3 positive and the potential of the left plate negative. When the control module controls the third input terminal TC and the second input terminal TB of the third transformer T3 to be turned on, the potential of the first output terminal F1 of the third transformer T3 is positive and the potential of the second output terminal F2 is negative. This is equivalent to the coil between the first output terminal F1 and the second output terminal F2 being connected in series with the first third capacitor C3, continuing to charge the first fourth capacitor C4, and so on. Therefore, the total number of third capacitors C3 and fourth capacitors C4 is the multiple by which the voltage of the boost circuit increases.

[0045] Continue to refer to Figure 3 Optionally, the reference power generation circuit 6 includes a first transformer T1, a first rectifier diode D3, a second rectifier diode D4, and a voltage conversion module 61. The first output terminal of the first transformer T1 is electrically connected to the first terminal of the first rectifier diode D3, and the second terminal of the first rectifier diode D3 is electrically connected to the input terminal Vin of the voltage conversion module 61. The second output terminal of the first transformer T1 is electrically connected to the first terminal of the second rectifier diode D4, and the second terminal of the second rectifier diode D4 is electrically connected to the input terminal Vin of the voltage conversion module 61. The third output terminal of the first transformer T1 and the reference terminal of the voltage conversion module 61 are both electrically connected to the output terminal U4 of the boost circuit 5. The output terminal Vo of the voltage conversion module 61 serves as the output terminal U5 of the reference power generation circuit 6.

[0046] The reference terminal of voltage conversion module 61 serves as the reference terminal E1 of reference power generation circuit 6. First transformer T1 is connected to AC power, and its output, after passing through first rectifier diode D3 and second rectifier diode D4, is output to the input terminal Vin of voltage conversion module 61. A resistor is connected between the second terminal of first rectifier diode D3 and the input terminal Vin of voltage conversion module 61, and a diode is connected between the reference terminal of voltage conversion module 61 and the input terminal Vin to prevent input Vin from flowing into the reference terminal of voltage conversion module 61. Voltage conversion module 61 can be a K78L15ACZ chip to boost or buck its input terminal Vin and output it to its output terminal Vo. For example, the voltage input to the input terminal Vin of voltage conversion module 61 after rectification by first transformer T1 is 24V. Since the third output terminal of first transformer T1 is connected to the output terminal U4 of boost circuit 5, 24V is a voltage based on -5KV. After connecting the reference terminal of the voltage conversion module 61 to the output terminal U4 of the boost circuit 5, the 15V voltage output by the voltage conversion module 61 is also based on the -5KV voltage, that is, the voltage output by the output terminal of the voltage conversion module 61 is -5KV+15V.

[0047] Figure 4 This is a schematic diagram of the control circuit of another micro-focused X-ray source provided in an embodiment of the present invention, with reference to... Figure 4 Optionally, the control signal conditioning circuit 1 includes: a feedback module 11, a first resistor R1, a first switching transistor Q1, and a voltage follower module 12;

[0048] The first input terminal of the feedback module 11 serves as the control signal input terminal A1 of the control signal conditioning circuit 1, and the second input terminal of the feedback module 11 serves as the feedback signal input terminal A2 of the control signal conditioning circuit 1. The output terminal of the feedback module 11 is electrically connected to the first terminal of the first switching transistor Q1 via the first resistor R1. The second terminal of the first switching transistor Q1 is electrically connected to the first terminal of the voltage follower module 12. The third terminal of the first switching transistor Q1 is grounded to GND. The first terminal of the voltage follower module 12 is also electrically connected to the fixed power supply VI. The second terminal of the voltage follower module 12 is electrically connected to the fixed power supply VI. The third terminal of the voltage follower module 12 serves as the output terminal U1 of the control signal conditioning circuit 1.

[0049] The first input terminal of feedback module 11 is connected to resistors and capacitors to filter the input control signal. The second input terminal of feedback module 11 is also connected to resistors and capacitors to filter the feedback signal output from feedback circuit 4. The first switching transistor Q1 can be a transistor, exemplarily an NPN transistor. The voltage output from the third terminal of voltage follower module 12 is equal to the voltage input from its first terminal. Voltage follower module 12 can also be a transistor, exemplarily an NPN transistor. The fixed power supply VI can be used to provide a fixed voltage of 15V. Optionally, the feedback module 11 includes amplifier M1, a first capacitor C1, a second capacitor C2, and a second resistor R2. The first input terminal of amplifier M1 serves as the first input terminal of the feedback module 11, the second input terminal of amplifier M1 serves as the second input terminal of the feedback module 11, and the output terminal of amplifier M1 serves as the output terminal of the feedback module 11. The first terminal of the first capacitor C1 is electrically connected to the second input terminal of amplifier M1, the second terminal of the first capacitor C1 is electrically connected to the first terminal of the second resistor R2, the second terminal of the second resistor R2 is electrically connected to the output terminal of amplifier M1, and the first terminal of the second capacitor C2 is electrically connected to the second input terminal of amplifier M1, and the second terminal of the second capacitor C2 is electrically connected to the output terminal of amplifier M1. Amplifier M1, first capacitor C1, second capacitor C2, and second resistor R2 constitute a feedback regulation circuit. That is, when the control signal input to the first input terminal of amplifier M1 increases, the voltage output from the output terminal of amplifier M1 increases, causing the current at the second terminal of the first switching transistor Q1 to increase, thereby causing the voltage output from the third terminal of the voltage follower module 12 to decrease. The voltage output from the third terminal of the voltage follower module 12 is increased by the voltage output to the drive circuit 3 after passing through the first opto-isolation circuit 2, thereby increasing the voltage of the gate, filament or focus, and realizing the control of the gate, filament or focus through the control signal.

[0050] Continue to refer to Figure 4 Optionally, the first opto-isolation circuit 2 includes: a first infrared diode D5, a first photodiode D6, and a second switch Q2. The first terminal of the first infrared diode D5 is electrically connected to the fixed power supply VI, and the second terminal of the first infrared diode D5 serves as the input terminal A3 of the first opto-isolation circuit 2.

[0051] The first terminal of the first photodiode D6 is electrically connected to the first power supply terminal I1 of the first opto-isolation circuit 2, and the second terminal of the first photodiode D6 is electrically connected to the first reference terminal E2 of the first opto-isolation circuit 2.

[0052] The first terminal of the second switch Q2 is electrically connected to the second terminal of the first photodiode D6. The second terminal of the second switch Q2 is electrically connected to the second power supply terminal I2 of the first opto-isolation circuit 2. The third terminal of the second switch Q2 is electrically connected to the second reference terminal E3 of the first opto-isolation circuit 2. The third terminal of the second switch Q2 also serves as the output terminal U2 of the first opto-isolation circuit 2.

[0053] Optionally, the first terminal of the first infrared diode D5 is electrically connected to a fixed power supply VI via a third resistor R3. The fixed power supply VI can be a 15V DC power supply. The first infrared diode D5 is used to emit infrared light, and the lower the voltage at the second terminal of the first infrared diode D5, the stronger the emitted infrared light. The second terminal of the first photodiode D6 is electrically connected to the first reference terminal E2 of the first opto-isolation circuit 2 via a fourth resistor R4. The second terminal of the second switch Q2 is electrically connected to the second power supply terminal I2 of the first opto-isolation circuit 2 via a fifth resistor R5. The second switch Q2 is electrically connected to the second reference terminal E3 of the first opto-isolation circuit 2 via a sixth resistor R6. The second switch Q2 can be a MOS transistor; in this embodiment, it is exemplarily shown as an NMOS transistor. The stronger the light received by the first photodiode D6, the greater its reverse current, which in turn increases the voltage input to the first terminal of the second switch Q2, resulting in a greater degree of conduction of the second switch Q2 and consequently, a greater voltage at the third terminal of the second switch Q2. Electrical isolation can be achieved using only an infrared diode and a photodiode, resulting in a simple structure.

[0054] Continue to refer to Figure 4 Optionally, the feedback circuit 4 includes: a voltage-to-frequency conversion module 41 and a second opto-isolation circuit 42. The input terminal of the voltage-to-frequency conversion module 41 serves as the input terminal A4 of the feedback circuit 4, the reference terminal of the voltage-to-frequency conversion module 41 serves as the reference terminal E4 of the feedback circuit 4, the power supply terminal of the voltage-to-frequency conversion module 41 serves as the power supply terminal I3 of the feedback circuit 4, the output terminal of the voltage-to-frequency conversion module 41 is electrically connected to the input terminal of the second opto-isolation circuit 42, and the output terminal of the second opto-isolation circuit 42 serves as the output terminal U0 of the feedback circuit 4. For example, when the voltage output from the output terminal U2 of the first opto-isolation circuit 2 increases, the frequency of the voltage-to-frequency conversion module 41 increases, thereby causing the voltage output from the output terminal of the voltage-to-frequency conversion module 41 to decrease. After passing through the second opto-isolation circuit 42, the feedback signal output increases, thus achieving closed-loop control of the control signal and the feedback signal. It is worth noting that...

[0055] Continue to refer to Figure 4Optionally, the second opto-isolation circuit 42 includes a second infrared emitting diode D7 and a photoelectric conversion unit 421. The second infrared emitting diode D7 is electrically connected to the output terminal U5 of the reference power generation circuit 6. The second terminal of the second infrared emitting diode D7 serves as the input terminal of the second opto-isolation circuit 42, and the output terminal of the photoelectric conversion unit 421 serves as the output terminal of the second opto-isolation circuit 42.

[0056] The second infrared emitting diode D7 is electrically connected to the output terminal U5 of the reference power supply generation circuit 6 via the seventh resistor R7. When the control signal input to the control signal conditioning circuit 1 increases, the voltage output from the output terminal U2 of the first opto-isolation circuit 2 increases, which in turn decreases the voltage at the second terminal of the second infrared emitting diode D7. Consequently, the current in the second infrared emitting diode D7 increases, resulting in enhanced infrared light emission. The photoelectric conversion unit 421 can be a DPL810 chip, used to convert the optical signal into an electrical signal. The photoelectric conversion unit 421 is also connected to a fixed power supply VI, which supplies power to the photoelectric conversion unit 421. After the light received by the photoelectric conversion unit 421 is enhanced, the voltage output from its output terminal increases, which in turn increases the feedback signal input to the feedback signal input terminal A2 in the control signal conditioning circuit 1, ultimately achieving closed-loop control.

[0057] Continue to refer to Figure 4 Optionally, the drive circuit 3 includes: a power supply module 31, a second transformer T2, a third rectifier diode D8, and a fourth rectifier diode D9;

[0058] The first terminal H1 of the power module 31 is electrically connected to the first input terminal L1 of the second transformer T2. The second terminal of the power module 31 is electrically connected to the second input terminal L2 of the second transformer T2. The third input terminal of the second transformer T2 serves as the control terminal B1 of the drive circuit 3. The first output terminal of the second transformer T2 is electrically connected to the first terminal of the third rectifier diode D8. The second terminal of the third rectifier diode D8 serves as the output terminal U3 of the drive circuit 3. The second output terminal of the second transformer T2 is electrically connected to the first terminal of the fourth rectifier diode D9. The second terminal of the fourth rectifier diode D9 is electrically connected to the second terminal of the third rectifier diode D8. The third output terminal of the second transformer T2 serves as the reference terminal E5 of the drive circuit 3.

[0059] The third output terminal of the second transformer T2 is electrically connected to the output terminal U4 of the boost circuit 5 via inductor L0. The power module 31 can be an SG3525 chip. Besides the first terminal H1 and the second terminal H2, the power module 31 includes multiple ports. Some ports are directly or indirectly connected to the output terminal U4 of the boost circuit 5, and some ports are directly or indirectly connected to the output terminal U5 of the reference power generation circuit 6. The drive circuit 3 also includes a first control switch Q3 and a second control switch Q4. The first terminal of the first control switch Q3 is electrically connected to the first terminal H1 of the power module via a resistor. The second terminal of the first control switch Q3 is electrically connected to the first input terminal L1 of the second transformer T2, and the third terminal of the first control switch Q3 is electrically connected to the output terminal U4 of the boost circuit 5. The first terminal of the second control switch Q4 is electrically connected to the second terminal H2 of the power module via a resistor. The second terminal of the second control switch Q4 is electrically connected to the second input terminal L2 of the second transformer T2, and the third terminal of the second control switch Q4 is electrically connected to the output terminal U4 of the boost circuit 5. The power module 31 controls the voltage input to the second transformer T2 by controlling the conduction time of the first control switch Q3 and the second control switch Q4. When the voltage input to the first input terminal or the second input terminal L2 of the second transformer T2 remains constant, an increase in the control signal input to the control signal adjustment circuit 1 increases the voltage output from the output terminal U2 of the first opto-isolation circuit 2, thereby increasing the voltage input to the third input terminal of the second transformer T2. This, in turn, increases the voltage output from the second transformer T2 to the setting component of the micro-focused X-ray source, thus controlling the setting component of the micro-focused X-ray source.

[0060] This invention also provides a micro-focused X-ray source, including the aforementioned micro-focused X-ray source control circuit. Furthermore, the beneficial effects of the micro-focused X-ray source are the same as those of the micro-focused X-ray source control circuit, and will not be repeated here.

[0061] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0062] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A control circuit for a micro-focused X-ray source, characterized in that, include: Control signal conditioning circuit, first opto-isolation circuit, drive circuit and feedback circuit; The control signal input terminal of the control signal conditioning circuit is used to receive the control signal, the feedback signal input terminal of the control signal conditioning circuit is electrically connected to the output terminal of the feedback circuit, and the control signal conditioning circuit is used to generate a conditioning signal according to the control signal. The input terminal of the first opto-isolation circuit is electrically connected to the output terminal of the control signal adjustment circuit, the output terminal of the first opto-isolation circuit is electrically connected to the control terminal of the drive circuit, and the output terminal of the first opto-isolation circuit is also electrically connected to the input terminal of the feedback circuit. The first opto-isolation circuit is used to generate a first isolation signal according to the adjustment signal. The feedback circuit is used to generate a feedback signal based on the first isolation signal, so that the control signal adjustment circuit forms a closed-loop control. The output terminal of the drive circuit is electrically connected to the setting component of the micro-focusing X-ray source, and is used to control the operation of the setting component according to the first isolation signal; The control signal conditioning circuit includes: a feedback module, a first resistor, a first switching transistor, and a voltage follower module; The first input terminal of the feedback module serves as the control signal input terminal of the control signal conditioning circuit, the second input terminal of the feedback module serves as the feedback signal input terminal of the control signal conditioning circuit, the output terminal of the feedback module is electrically connected to the first terminal of the first switching transistor via the first resistor, the second terminal of the first switching transistor is electrically connected to the first terminal of the voltage follower module, the third terminal of the first switching transistor is grounded, the first terminal of the voltage follower module is also electrically connected to a fixed power supply, the second terminal of the voltage follower module is electrically connected to the fixed power supply, and the third terminal of the voltage follower module serves as the output terminal of the control signal conditioning circuit. The driving circuit includes: a power supply module, a second transformer, a third rectifier diode, and a fourth rectifier diode. The first terminal of the power module is electrically connected to the first input terminal of the second transformer, the second terminal of the power module is electrically connected to the second input terminal of the second transformer, the third input terminal of the second transformer serves as the control terminal of the drive circuit, the first output terminal of the second transformer is electrically connected to the first terminal of the third rectifier diode, the second terminal of the third rectifier diode serves as the output terminal of the drive circuit, the second output terminal of the second transformer is electrically connected to the first terminal of the fourth rectifier diode, the second terminal of the fourth rectifier diode is electrically connected to the second terminal of the third rectifier diode, and the third output terminal of the second transformer serves as the reference terminal of the drive circuit.

2. The control circuit for the micro-focused X-ray source according to claim 1, characterized in that, Also includes: A boost circuit and a reference power supply generation circuit, wherein the boost circuit is used to increase the voltage signal connected to its input terminal by N times before outputting it, where N is a positive integer; The output terminal of the boost circuit is electrically connected to the reference terminal of the reference power generation circuit. The output terminal of the reference power generation circuit is electrically connected to the first power supply terminal and the second power supply terminal of the first opto-isolation circuit, as well as the power supply terminal of the feedback circuit and the power supply terminal of the drive circuit. The output terminal of the boost circuit is electrically connected to the first reference terminal and the second reference terminal of the first opto-isolation circuit, as well as the reference terminal of the feedback circuit and the reference terminal of the drive circuit, respectively. The voltage output by the reference power generation circuit is on the same order of magnitude as the voltage output by the boost circuit, and the difference between the voltage output by the reference power generation circuit and the voltage output by the boost circuit is on the same order of magnitude as the operating voltage of the devices included in the control circuit.

3. The control circuit for the micro-focused X-ray source according to claim 2, characterized in that, The reference power generation circuit includes a first transformer, a first rectifier diode, a second rectifier diode, and a voltage conversion module. The first output terminal of the first transformer is electrically connected to the first terminal of the first rectifier diode, the second terminal of the first rectifier diode is electrically connected to the input terminal of the voltage conversion module, the second output terminal of the first transformer is electrically connected to the first terminal of the second rectifier diode, the second terminal of the second rectifier diode is electrically connected to the input terminal of the voltage conversion module, the third output terminal of the first transformer and the reference terminal of the voltage conversion module are both electrically connected to the output terminal of the boost circuit, and the output terminal of the voltage conversion module serves as the output terminal of the reference power generation circuit.

4. The control circuit for the micro-focusing X-ray source according to claim 1, characterized in that, The feedback module includes an amplifier, a first capacitor, a second capacitor, and a second resistor; The first input terminal of the amplifier serves as the first input terminal of the feedback module, the second input terminal of the amplifier serves as the second input terminal of the feedback module, the output terminal of the amplifier serves as the output terminal of the feedback module, the first terminal of the first capacitor is electrically connected to the second input terminal of the amplifier, the second terminal of the first capacitor is electrically connected to the first terminal of the second resistor, the second terminal of the second resistor is electrically connected to the output terminal of the amplifier, the first terminal of the second capacitor is electrically connected to the second input terminal of the amplifier, and the second terminal of the second capacitor is electrically connected to the output terminal of the amplifier.

5. The control circuit for the micro-focused X-ray source according to claim 2, characterized in that, The first opto-isolation circuit includes: a first infrared diode, a first photodiode, and a second switching transistor. The first end of the first infrared diode is electrically connected to a fixed power supply, and the second end of the first infrared diode serves as the input terminal of the first opto-isolation circuit. The first end of the first photodiode is electrically connected to the first power supply terminal of the first opto-isolation circuit, and the second end of the first photodiode is electrically connected to the first reference terminal of the first opto-isolation circuit. The first terminal of the second switch is electrically connected to the second terminal of the first photodiode, the second terminal of the second switch is electrically connected to the second power supply terminal of the first opto-isolation circuit, the third terminal of the second switch is electrically connected to the second reference terminal of the first opto-isolation circuit, and the third terminal of the second switch also serves as the output terminal of the first opto-isolation circuit.

6. The control circuit for the micro-focused X-ray source according to claim 2, characterized in that, The feedback circuit includes: a voltage-to-frequency conversion module and a second opto-isolation circuit. The input terminal of the voltage-to-frequency conversion module serves as the input terminal of the feedback circuit, the reference terminal of the voltage-to-frequency conversion module serves as the reference terminal of the feedback circuit, the power supply terminal of the voltage-to-frequency conversion module serves as the power supply terminal of the feedback circuit, the output terminal of the voltage-to-frequency conversion module is electrically connected to the input terminal of the second opto-isolation circuit, and the output terminal of the second opto-isolation circuit serves as the output terminal of the feedback circuit.

7. The control circuit for the micro-focused X-ray source according to claim 6, characterized in that, The second opto-isolation circuit includes a second infrared emitting diode and a photoelectric conversion unit. The second infrared emitting diode is electrically connected to the output terminal of the reference power generation circuit. The second terminal of the second infrared emitting diode serves as the input terminal of the second opto-isolation circuit, and the output terminal of the photoelectric conversion unit serves as the output terminal of the second opto-isolation circuit.

8. A micro-focused X-ray source, characterized in that, The control circuit for the microfocusing X-ray source as described in any one of claims 1-7.

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