Electrical discharge machining device

Abstract

The present invention relates to an electrical discharge machining device, comprising at least a carrier and an electrical discharge machining unit. The carrier is used to carry at least one workpiece to be machined. The electrical discharge machining unit is used to perform an electrical discharge machining process on a plurality of machining target areas of the workpiece to be machined along a machining travel direction. The electrical discharge machining unit comprises a plurality of electrodes distributed in parallel along a first direction. When the electrical discharge machining unit performs the electrical discharge machining process along the machining travel direction, the discharge section of the electrodes and the machining target areas of the workpiece to be machined move relative to each other along a second direction. The present invention can save the overall machining time and the time required for replacing the electrodes.

Description

Technical Field

[0001] This invention relates to a processing apparatus, and more particularly to an electrical discharge machining apparatus. Background Technology

[0002] With the booming development of the semiconductor industry, electrical discharge machining (EDM) technology is commonly used to process ingots or wafers. EDM is a manufacturing process that uses electrical discharge to generate sparks, shaping the workpiece into a desired form. Two electrodes are separated by a dielectric material and a voltage is applied, generating a periodically changing, rapidly varying current discharge to process the workpiece. EDM uses two electrodes: one called the tool electrode or discharge electrode, and the other called the workpiece electrode, which is connected to the workpiece. During EDM, there is no actual contact between the discharge electrode and the workpiece electrode.

[0003] When the potential difference between two electrodes increases, the electric field between them also increases until the electric field strength exceeds the dielectric strength. At this point, dielectric collapse occurs, current flows through the electrodes, and some material is removed. When the current stops, new dielectric material flows into the electric field between the electrodes, removing the previously removed material and restoring the dielectric insulating effect. After the current flows again, the potential difference between the two electrodes returns to its state before dielectric collapse, thus allowing for a new cycle of dielectric collapse.

[0004] However, existing electrical discharge machining (EDM) technologies suffer from drawbacks such as poor surface roughness and numerous surface cracks that can extend along non-cutting directions, leading to unexpected breakage. Furthermore, existing EDM techniques, for example, ingot cutting, use a fixture to hold the ingot's periphery, i.e., radially, to prevent rolling or displacement. However, since the cutting surface is also radial, conventional techniques can only cut the ingot exposed outside the fixture, failing to cut the area where the fixture and ingot overlap. Therefore, conventional techniques require stopping the machine and readjusting the position before cutting can resume. Additionally, existing EDM technologies can only cut or thin one wafer at a time, resulting in a very slow process. Moreover, existing EDM technologies use only a single cutting wire, and since current EDM equipment lacks a quick-release design, if the cutting wire breaks unexpectedly, it requires a significant downtime for replacement. Summary of the Invention

[0005] In view of this, one or more objectives of the present invention is to provide an electrical discharge machining apparatus to solve the many problems of the prior art.

[0006] To achieve the aforementioned objectives, the present invention provides an electrical discharge machining (EDM) apparatus, comprising at least: a stage for supporting at least one workpiece; and an EDM unit for performing an EDM process on a plurality of target areas of the workpiece on the stage along a machining travel direction, the EDM unit comprising: a plurality of electrodes arranged parallel to each other along a first direction; and a fixture composed of at least two support members and at least two holding members respectively connected together, the sides of the plurality of electrodes respectively abutting against the two support members. The component is configured such that one of the discharge sections of the plurality of electrodes is suspended; and a power supply unit provides a first power source to the plurality of electrodes and the workpiece during the discharge processing procedure, so as to apply discharge energy to the plurality of processing target areas of the workpiece through the discharge section of the plurality of electrodes, wherein when the discharge processing unit performs the discharge processing procedure along the processing travel direction, the discharge section of the plurality of electrodes and the plurality of processing target areas of the workpiece move relative to each other along a second direction.

[0007] The discharge section of the plurality of electrodes and the plurality of processing target areas of the workpiece move relative to each other in a reciprocating or cyclic manner along the second direction.

[0008] The two supporting members and the two holding members move reciprocally or cyclically together with the plurality of electrodes, so that the plurality of electrodes apply the discharge energy to the workpiece in the discharge section.

[0009] The electrical discharge machining unit adjusts the tension values ​​of the plurality of electrodes by causing relative displacement between the two support members or the two holding members.

[0010] The electrical discharge machining apparatus also includes a stabilizing component for stabilizing the movement of the plurality of electrodes relative to the workpiece.

[0011] The plurality of electrodes are simultaneously distributed in parallel along the first direction and a third direction, the third direction being perpendicular to the first direction or the second direction.

[0012] Among them, the plurality of electrodes, which are distributed in parallel along the first direction, are distributed in different numbers along the third direction.

[0013] The plurality of electrodes are distributed at different heights in parallel along the first direction.

[0014] The plurality of electrodes are in contact with each other.

[0015] The electrical discharge machining unit has a connection structure that extends along the first direction to connect the plurality of electrodes that are distributed in parallel along the first direction.

[0016] The plurality of electrodes are either linear or plate-shaped.

[0017] The transverse cross-sections of these multiple electrodes are asymmetrical.

[0018] The power supply unit is either a single power output or a complex array of power outputs.

[0019] The power supply unit is electrically connected to the plurality of electrodes in series or in parallel.

[0020] The platform moves along the first direction, the second direction, or the processing direction.

[0021] The platform rotates around the first direction, the second direction, or the processing direction.

[0022] The electrical discharge machining apparatus further includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides an external force to remove the residue generated by the plurality of electrodes applying the discharge energy to the workpiece.

[0023] The electrical discharge machining apparatus also includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides a plurality of external forces to remove the residue generated by the plurality of electrodes applying the discharge energy to the workpiece.

[0024] The slag removal unit is an ultrasonic generator or a piezoelectric oscillator that causes the fixture, the workpiece to be processed, and the plurality of electrodes to oscillate.

[0025] The electrical discharge machining apparatus also includes a force measurement unit for measuring the tension values ​​of the plurality of electrodes.

[0026] The electrical discharge machining apparatus also includes a vibration measurement unit for measuring the vibration values ​​of the plurality of electrodes.

[0027] The power supply unit of the electrical discharge machining unit further includes providing a second power source to the plurality of electrodes, thereby providing a DC power source or a radio frequency source to the plurality of electrodes.

[0028] The workpiece to be processed has a planar area and is connected to the platform via the planar area.

[0029] The platform also includes a clamping element for securing the workpiece.

[0030] The workpiece is connected to the platform or the clamping element by an adhesive.

[0031] The adhesive is a conductive adhesive.

[0032] The electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along with the clamping component along the machining travel direction.

[0033] The clamping member holds a buffer member, and the buffer member fixes the workpiece to be processed through a conductive adhesive layer. The electrical discharge machining unit performs the electrical discharge machining process on the workpiece to be processed on the platform along the processing travel direction.

[0034] The clamping member holds a conductive frame to fix the workpiece, and the electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along the machining travel direction.

[0035] The clamping member comprises two plates, at least one of which is a comb-shaped plate.

[0036] The clamping member axially supports one side of the workpiece to be processed, and the discharge energy forms a processing groove in the processing target area of ​​the workpiece to be processed by an adhesive to fix the two walls of the processing groove.

[0037] The discharge energy forms a processing groove in the processing target area of ​​the workpiece, and the processing groove is filled with a filler material.

[0038] The two load-bearing components are either plate structures or sleeve structures.

[0039] The two supporting components each include a first sheet and a second sheet, and the plurality of electrodes are clamped between the first sheet and the second sheet.

[0040] The two supporting members each have a through groove, and the two holding members each have a protrusion corresponding to the through groove. The two supporting members are connected to the protrusions of the two holding members by the through groove.

[0041] The two supporting members each have a through hole, and the two holding members each have a screw hole. The two supporting members are screwed into the screw holes of the two holding members by means of a bolt passing through the through hole.

[0042] The two holding members each have a groove structure, and the two bearing members are inserted into the groove structure of the two holding members to be correspondingly connected to the two holding members.

[0043] Each of the two holding members has a conductive structure, thereby electrically connecting to the plurality of electrodes abutting against the two supporting members.

[0044] The two holding members simultaneously fix the two bearing members and the plurality of electrodes.

[0045] An insulating structure is provided between the plurality of electrodes to prevent them from making electrical contact with each other.

[0046] The two supporting components have a plurality of limiting grooves for limiting the plurality of electrodes.

[0047] The plurality of electrodes are fixed in the plurality of limiting grooves with adhesive.

[0048] The electrical discharge machining unit also includes an attachment member that is connected to the plurality of electrodes at the edges of the two support members.

[0049] The attachment component is electrically connected to the first power source or a second power source of the power supply unit.

[0050] The heads and tails of the plurality of electrodes are respectively connected to the same or different of the two supporting components.

[0051] The edges of the two load-bearing components have chamfered corners.

[0052] The plurality of electrodes are equidistantly and parallelly distributed along the first direction.

[0053] The plurality of electrodes are connected to each other via a conductive structure, thereby electrically connecting the power supply unit.

[0054] The work to be processed on the platform is a semiconductor ingot or wafer.

[0055] In this process, the electrical discharge machining device sequentially or simultaneously cuts or polishes the workpiece carried on the platform.

[0056] The electrical discharge machining apparatus also includes a laser unit for providing a heat source to the workpiece before, during, or after the electrical discharge machining process.

[0057] The workpiece to be processed is formed by electrically bonding together multiple workpieces.

[0058] As described above, the electrical discharge machining apparatus of the present invention has the following advantages:

[0059] (1) By using multi-layer electrodes, the problem of having to stop the machine to replace a broken single electrode can be effectively solved.

[0060] (2) The fixture is composed of at least two load-bearing components and at least two holding components respectively connected together. The quick-release design can greatly reduce the time required to replace the electrodes and adjust the tension of the discharge electrodes.

[0061] (3) By means of parallel distributed electrodes, multiple processing target areas can be cut or polished at the same time, effectively saving the overall processing time.

[0062] (4) The stabilizing component can reduce electrode jitter, provide a guiding effect, and can be used as an electrical contact.

[0063] (5) The slag removal unit can provide external force to one or more processing target areas to help remove the slag generated by the electrical discharge machining process.

[0064] (6) The clamping device has a variety of clamping modes, which can effectively solve the problem that traditional electrical discharge machining technology cannot cut the overlapping area between the fixture and the workpiece.

[0065] To enable you to have a better understanding of the technical features and effects of this invention, preferred embodiments and detailed descriptions are provided below. Attached Figure Description

[0066] Figure 1 This is a front view schematic diagram of the electrical discharge machining apparatus of the present invention.

[0067] Figure 2 This is a top view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention.

[0068] Figure 3 This is a side view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention.

[0069] Figure 4 This is a top view schematic diagram of the workpiece to be processed according to the present invention, which is composed of multiple workpieces to be processed connected together.

[0070] Figure 5 This is a side view schematic diagram of the electrical discharge machining unit of the present invention performing an electrical discharge machining process on multiple workpieces.

[0071] Figure 6 This is a schematic diagram showing that the cross-section of the electrode of the present invention is circular or square.

[0072] Figure 7 This is a side view schematic diagram showing that the two ends of the electrode of the present invention are respectively connected to different supporting components.

[0073] Figure 8 This is a top view schematic diagram showing the two ends of the electrode of the present invention connected to different supporting components.

[0074] Figure 9 This is a schematic diagram of the processing groove of the present invention filled with filler material.

[0075] Figure 10 This is a schematic diagram of the electrical discharge machining apparatus of the present invention having a stabilizing component.

[0076] Figure 11 This is a schematic diagram showing that the limiting groove of the bearing member of the present invention has multiple electrodes.

[0077] Figure 12 This is a side view of the load-bearing component of the present invention, which is a plate-type structure.

[0078] Figure 13 This is a side view of another plate-type structure as the load-bearing component of the present invention.

[0079] Figure 14 This is a side view schematic diagram of multiple load-bearing components of the present invention being screwed to a holding component.

[0080] Figure 15 This is a side view of the retaining member of the present invention, which is assembled with the load-bearing member by a groove structure.

[0081] Figure 16 This is a top view schematic diagram of the holding member of the present invention having a conductive structure connected to the electrode.

[0082] Figure 17 For insulation structure set at Figure 16 A top view of the conductive structure and the relationship between the electrodes.

[0083] Figure 18 This is a side view schematic diagram of the platform of the present invention radially clamping the workpiece to be processed by the clamping member.

[0084] Figure 19 This is a side view of the platform of the present invention, in which the workpiece is axially clamped by the clamping member.

[0085] Figure 20 This is a side view of the platform of the present invention, in which the workpiece is fixed on one side by a clamping member.

[0086] Figure 21 This is a side view schematic diagram of the clamping member of the present invention fixing the workpiece to be processed via a buffer member.

[0087] Figure 22 This is a side view of the clamping member of the present invention fixing the workpiece to be processed via a conductive frame.

[0088] Figure 23 This is a side view of the clamping component of the present invention, which is a comb-shaped plate.

[0089] Figure 24 This is a side view schematic diagram of the electrical discharge machining unit of the present invention having an adjustable tension value.

[0090] Figure 25 This is a schematic diagram of the fixture of the present invention, in which multiple supporting members are arranged to make the electrodes distributed in parallel.

[0091] Figure 26 This is a schematic diagram of the arrangement of electrodes separated by a separator column in the fixture of the present invention.

[0092] Explanation of reference numerals in the attached figures:

[0093] 10: Electrical Discharge Machining Equipment

[0094] 20: Platform

[0095] 21: Additional Circuit Board

[0096] 22: Stabilizing components

[0097] 23: Board body

[0098] 24: Clamping components

[0099] 25: Conductive frame

[0100] 26: Adhesive

[0101] 27: Buffer component

[0102] 28: Contact surface

[0103] 29: Comb teeth opening

[0104] 30: Electrical Discharge Machining Unit

[0105] 31: Electrical contacts

[0106] 32: Electrode

[0107] 33: Divider column

[0108] 34: Power Supply Unit

[0109] 34': Another power supply unit

[0110] 35: Connection Structure

[0111] 36: Jig

[0112] 40: Load-bearing components

[0113] 41: Shaft hole

[0114] 42: Limiting groove

[0115] 43: Through groove

[0116] 44a: First sheet

[0117] 44b: Second sheet

[0118] 45: Through hole

[0119] 46: Attached components

[0120] 47: Chamfer

[0121] 50: Holding member

[0122] 51: Bump

[0123] 52: base body

[0124] 53: Bump

[0125] 54: Conductive structure

[0126] 56: Insulation structure

[0127] 57: Trench Structure

[0128] 59: Bolt

[0129] 60: Tension Measurement Unit

[0130] 62: Vibration Measurement Unit

[0131] 64: Slag Discharge Unit

[0132] 70: Laser Unit

[0133] 100: Work to be processed

[0134] 110: Processing target area

[0135] 120: Machining grooves

[0136] 124: Filler material

[0137] A: Both sides

[0138] B: Discharge section

[0139] D: Spacing

[0140] H: Depth

[0141] h: depth

[0142] X: First direction

[0143] Y: Second direction

[0144] Z: Third-party direction

[0145] F: Processing direction

[0146] P1: First power supply

[0147] P2: Second power supply Detailed Implementation

[0148] To facilitate understanding of the technical features, content, advantages, and effects of this invention, the invention is described in detail below with reference to accompanying drawings and embodiments. The drawings used are for illustrative purposes only and do not necessarily represent the actual scale and precise configuration of the invention. Therefore, the scale and configuration of the accompanying drawings should not be used to interpret or limit the scope of the invention in actual implementation. Furthermore, for ease of understanding, the same elements in the following embodiments are indicated by the same symbols.

[0149] Furthermore, unless otherwise specified, the terms used throughout this specification and claims generally have their ordinary meaning in the context of this art, the disclosure herein, and the specific content. Certain terms used to describe the invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

[0150] The use of terms such as "first," "second," and "third" in this document does not specifically refer to any order or sequence, nor is it intended to limit the invention. Rather, it is merely used to distinguish components or operations described using the same technical terms.

[0151] Secondly, when this article uses terms such as "contains", "includes", "has", or "contains", these are all open-ended terms, meaning that they include but are not limited to.

[0152] Figure 1 This is a front view schematic diagram of the electrical discharge machining apparatus of the present invention. Figure 2 This is a top view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention. Figure 3 This is a side view schematic diagram of a partial structure of the electrical discharge machining apparatus of the present invention. Please refer to... Figures 1 to 3 The electrical discharge machining (EDM) apparatus 10 of the present invention includes a stage 20 and an electrical discharge machining unit 30. The stage 20 is used to support at least one workpiece 100. The workpiece 100 can be any conductor or semiconductor structure, such as an ingot or a wafer, and its shape can be, for example, a cylindrical block or a sheet. However, the radial cross-section of the workpiece 100 is not limited to a circle, and it can be any shape, such as a circle with a planar region. The workpiece 100 can also be selectively connected to the stage 20 with a planar region. The workpiece 100 defines a plurality of processing target areas 110, and these processing target areas 110 are distributed in parallel at any suitable processing location in the workpiece 100. The distance D between these processing target areas 110 corresponds to (e.g., is the same as) the cutting thickness, thinning thickness, or cutting spacing of the workpiece 100, and its value can be selectively adjusted according to actual process requirements, and therefore can be equal or unequal to each other.

[0153] like Figures 1 to 3As shown, the electrical discharge machining (EDM) unit 30 is used to perform electrical discharge machining (EDM) processes on the target areas 110 of the workpiece 100 on the stage 20 along a machining travel direction F. For example, it sequentially or simultaneously performs cutting and / or electric discharge grinding (EDG) processes on these target areas 110 of the workpiece 100. This invention is not limited to the stage 20 moving the workpiece 100 toward the electrode 32 of the EDM unit 30 or the EDM unit 30 driving the electrode 32 toward the workpiece 100. As long as the EDM unit 30 and the workpiece 100 on the stage 20 can move relative to each other along the aforementioned machining travel direction F, it is applicable to this invention. In other words, the stage 20 of this invention can be a fixed stage or a movable or rotatable stage. This invention is illustrated by exemplifying the stage 20 as a work platform with an additional circuit board 21. The workpiece 100 of the present invention is not limited to being composed of a single workpiece; the workpiece 100 of the present invention may also be composed of, for example, multiple workpieces connected together, wherein these workpieces may be selectively joined together with each other, for example, by adhesive 26 (e.g.) Figure 4 As shown), the adhesive can be a conductive adhesive. Furthermore, the electrical discharge machining unit 30 of the present invention can selectively perform electrical discharge machining processes (e.g., on one or more workpieces 100) sequentially or simultaneously. Figure 5 (As shown). Among them, Figure 4 This is a top view diagram illustrating a process where multiple workpieces are bonded together for electrical discharge machining. Figure 5 A side view schematic diagram illustrating the electrical discharge machining (EDM) process of the present invention on multiple workpieces.

[0154] like Figures 1 to 3 As shown, the electrical discharge machining unit 30 includes a plurality of electrodes 32, a power supply unit 34, and a fixture 36. These electrodes 32 are linear or plate-shaped conductive structures, such as conductive wires or foils, distributed parallel to each other along a first direction X. The number of electrodes 32 is selectively chosen based on actual needs. The distance between these electrodes 32 corresponds to the cutting or thinning thickness of the workpiece 100. The transverse cross-sections of these electrodes 32 can be any shape, either identical or different, such as linear or plate-shaped, or any symmetrical (e.g.,...). Figure 6The shape can be circular, square, or asymmetrical. The power supply unit 34 is electrically connected to the electrode 32 and the workpiece 100 via electrical contacts 31. The power supply unit 34 can be a single power output or multiple power outputs to supply the first power supply P1. The power supply unit 34 can also be connected to the electrode 32 in series or parallel, as long as discharge energy can be applied to the processing target area 110 of the workpiece 100 via the electrode 32, it is suitable for use in this invention. The material of the discharge electrode 32 can be, for example, selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum, and zinc. The thickness of the discharge electrode 32 is approximately less than 300 μm, preferably ranging from approximately 30 μm to approximately 300 μm.

[0155] Please see Figures 1 to 3 The fixture 36 is composed of at least two supporting members 40 and at least two retaining members 50 respectively connected in a corresponding manner. The two sides A of the electrode 32 are movably or fixedly abutted against the two supporting members 40, so that the discharge section B of the electrode 32 is suspended in the air, wherein the two supporting members 40 are separated by a distance. The dimensions of the two supporting members 40 and the height of the electrode 32 they support are not particularly limited to be the same or different, as long as the discharge section B of the electrode 32 can be suspended in the air, it is applicable to this invention. The retaining members 50 are selectively detachable or fixedly and securely connected to the supporting members 40. The retaining members 50 are disposed on a base 52, wherein the base 52 can be a structure that fixes the position of the retaining members 50, or the base 52 can be a motion mechanism that allows the retaining members 50 to move or rotate, thereby correspondingly driving the supporting members 40 to move or rotate, so that the discharge section B of the electrode 32 can move left and right reciprocally. Taking the seat 52 as an example of a motion mechanism, the motion mechanism can be, for example, any moving mechanism capable of reciprocating left and right, such as a sliding mechanism, or, for example, any rotating mechanism capable of reciprocating or cyclic rotation, such as a motor, to correspondingly drive the holding member 50 to perform moving or rotating movements. In this way, the supporting member 40 and the holding member 50 can selectively reciprocate or cyclically move together with the electrode 32, so that the electrode 32 applies discharge energy to the workpiece 100 in the discharge section B. To ensure better adhesion of the electrode 32 to the supporting member 40, the edge of the supporting member 40 selectively has a chamfer 47, such as... Figure 2 and Figure 12 As shown.

[0156] In the electrical discharge machining (EDM) process, the power supply unit 34 provides a first power supply P1 to the electrode 32 and the workpiece 100, thereby applying discharge energy to the processing target area 110 of the workpiece 100 via the discharge section B of the electrode 32. When the EDM unit 30 performs the EDM process on the processing target area 110 of the workpiece 100 along the processing travel direction (cutting / polishing direction) F, the discharge section B of the electrode 32 and the processing target area 110 of the workpiece 100 move relative to each other along the second direction Y, for example, in a reciprocating or cyclical manner. That is, one of the electrode 32 and the workpiece 100 can be fixed, while the other can move relative to each other. Alternatively, both the electrode 32 and the workpiece 100 can move relative to each other. The processing travel direction F can be, for example, perpendicular to the first direction X or the second direction Y, or inclined to the first direction X or the second direction Y. For example, taking the workpiece 100 moving relative to the electrode 32 as an example, the stage 20 of the present invention is, for example, a movable or rotatable moving stage, and moves, for example, along the first direction X, the second direction Y or the processing direction F, or rotates about the first direction X, the second direction Y or the processing direction F as the axis.

[0157] In this invention, such as Figures 1 to 3 As shown, electrodes 32 distributed parallel to each other along the first direction X can, for example, be movably surrounding two carrier members 40 spaced apart by a distance, such that the discharge section B of the electrode 32 is suspended and can reciprocate or circulate along the second direction Y as the two carrier members 40 move. Alternatively, the electrode 32 can, for example, be fixedly connected to or surrounding two carrier members 40 spaced apart by a distance. The electrical discharge machining unit 10 selectively has a connection structure 35, which extends along the first direction X to connect multiple electrodes 32 distributed parallel to each other along the first direction X. The connection structure 35 can increase the structural stability of the discharge electrodes 32 during the electrical discharge machining process. Therefore, the connection structure 35 can be made of a non-conductive material. However, if the connection structure 35 is made of a conductive material, it can be used as an electrical contact 31. That is, the head and tail ends of the electrode 32 are respectively connected to the same carrier member 40 (e.g., Figure 1 (as shown) or different (e.g.) Figure 7 and Figure 8 As shown), this allows the discharge section B of electrode 32 to be suspended in the air, and it can reciprocate along the second direction Y as the two supporting members 40 reciprocate. Figure 7 As shown, electrode 32 is not limited to surrounding the two support members 40; electrode 32 may also selectively span only the top side of the two support members 40.

[0158] like Figure 9As shown, in the electrical discharge machining (EDM) process, the EDM unit 30 applies discharge energy to the target area 110 of the workpiece 100 via the discharge section B of the electrode 32 along the machining travel direction F. Therefore, a plurality of machining grooves 120 can be formed on the target area 110 of the workpiece 100 along the machining travel direction F. The depth h of the machining grooves 120 increases as the EDM process progresses until the entire EDM process is completed. For example... Figure 9 As shown, the processing groove 120 is selectively filled with filler material 124, which can reduce the vibration of the workpiece 100 and maintain the original cutting / thinning distance of the workpiece 100, and also prevent the thin sheets of the workpiece 100 after cutting or grinding from colliding with each other. The filler material 124 can be an insulating material such as air, deionized water, oil, glue, or other suitable insulating substances as a dielectric material.

[0159] like Figure 10 As shown, in the electrical discharge machining process, the discharge section B of electrode 32 moves along the machining travel direction F to apply discharge energy to the machining target area 110 of the workpiece 100. Moreover, the discharge section B of electrode 32 and the machining target area 110 of workpiece 100 move relative to each other along the second direction Y. Therefore, in order to avoid the vibration phenomenon generated by electrode 32 during the electrical discharge machining process, the electrical discharge machining apparatus 10 of the present invention selectively has a stabilizing member 22. The stabilizing member 22 is provided, for example, on the stage 20 or the fixture 36. The position of the stabilizing member 22 is, for example, located between the two sides A of electrode 32. The shape of the stabilizing member 22 is not particularly limited. As long as it can reduce the vibration of electrode 32, it can be applied to the present invention. For example, the contact surface 28 where the stabilizing member 22 contacts the electrode 32 can be, for instance, a plane. This can reduce vibration by supporting the suspended electrode 32. Alternatively, the contact surface 28 can optionally have guide grooves. These grooves not only support the suspended electrode 32 but also stabilize and guide it during reciprocating movement relative to the workpiece 100. Furthermore, the stabilizing member 22 can optionally have a highly extendable structure, allowing the height of the contact surface 28 to change with the depth of the machining groove 120.

[0160] In this invention, the shape of the load-bearing member 40 is not particularly limited, and it can be, for example, a plate-type structure (such as...). Figure 12 and Figure 13 (as shown) or sleeve structure (such as Figures 1 to 10(As shown). The surface of the supporting member 40 has, for example, a plurality of limiting grooves 42, in which the electrode 32 is confined. The electrodes 32 in different limiting grooves 42 can be electrically independent or can be connected sequentially and electrically connected to each other. The limiting grooves 42 are also distributed parallel to each other along the first direction X with the aforementioned spacing D, thereby allowing the electrodes 32 to be distributed parallel to each other along the first direction X. The width of the limiting groove 42 corresponds to the width of the electrode 32, for example, the width of the limiting groove 42 is slightly larger than the width of the electrode 32, thereby allowing the electrode 32 to be confined in the limiting groove 42. Two supporting members 40 may, for example, have limiting grooves 42. If there is no need for relative movement between the electrode 32 and the supporting member 40, for example, if the supporting member 40 does not need to rotate, the present invention can also selectively use an attachment member 46 (e.g., Figure 7 and Figure 8 As shown, electrode 32 is fixed in limiting groove 42, wherein the attachment member 46 has, for example, a plurality of protrusions whose positions and sizes correspond to those of the limiting groove 42, or the attachment member 46 may be adhesive. Furthermore, the attachment member 46 may also be selectively electrically connected to a first power supply P1 supplied by power supply unit 34 or a second power supply P2 of another power supply unit 34', wherein the second power supply P2 may be, for example, a DC power supply or radio frequency power. That is, the attachment member 46 may be selectively used as... Figure 1 Use of electrical contact 31.

[0161] Please see Figure 11 Please also refer to Figures 1 to 10As shown, taking a cylindrical sleeve structure as an example, the limiting grooves 42 are distributed parallel to each other along the first direction X (i.e., the axial direction of the supporting member 40) and extend into the supporting member 40 to a depth H along the third direction Z (i.e., the radial direction of the supporting member 40). The depth H of the limiting grooves 42 can be determined according to actual needs, and the depth H of the limiting grooves 42 is not limited to being the same for all of them; that is, the depth H of the limiting grooves 42 distributed parallel to the first direction X can also be different for all of them. The two sides A of the electrodes 32 are in contact with each other to form a stacked state, and are located in the limiting grooves 42 by surrounding the supporting member 40. Furthermore, the number of electrodes 32 in different limiting grooves 42 is not limited to being the same for all of them; that is, the number of electrodes 32 located in different limiting grooves 42 can also be different for all of them. In other words, the number of electrodes 32 distributed parallel to the first direction X can be the same for all of them distributed parallel to the third direction Z, or the number of electrodes 32 distributed parallel to the first direction X can be different for all of them distributed parallel to the third direction Z. The third direction Z is, for example, perpendicular to the first direction X, that is, the third direction Z is the radial direction of the bearing member 40 and parallel to the radial direction of the workpiece 100. However, since the electrical discharge machining process may be a vertical cutting or polishing along the radial direction of the workpiece 100, or an oblique cutting or polishing along the radial direction of the workpiece 100 at an angle, depending on the actual process requirements, the stage 20 or the fixture 36 may be adjusted to make the third direction Z parallel to the machining travel direction F.

[0162] The retaining member 50 can be selectively detachable or fixedly and securely connected to the bearing member 40. The connection configuration between the bearing member 40 and the retaining member 50 is not particularly limited, as long as it allows the bearing member to be connected to the retaining member 50, or allows the bearing member 40 to selectively move or rotate via the movement or rotation of the retaining member 50, it is applicable to this invention. Figure 2 (As shown) or other shaped sleeves, the support member 40 can be fitted onto the protrusion 51 of the retaining member 50 via the shaft hole 41. Furthermore, to reduce the time required to replace the electrode 32 in case of accidental breakage, the present invention can, for example, first fit the shaft hole 41 of the support member 40 onto a dummy support member that also has a protrusion. In this way, the user can quickly remove the support member 40, which surrounds the electrode 32, from the dummy support member and fit the shaft hole 41 of the support member 40 onto the protrusion 51 of the retaining member 50, or insert the protrusion 51 of the retaining member 50 into the shaft hole 41 of the support member 40, thus quickly completing the assembly of the jig.

[0163] Taking a plate structure as an example (e.g.) Figure 12 and Figure 13As shown), the supporting member 40 includes a first sheet 44a and a second sheet 44b, and the electrode 32 is clamped between the first sheet 44a and the second sheet 44b. Figure 12 For example, electrode 32 is first wound onto first sheet 44a, and then second sheet 44b is bonded onto first sheet 44a. Second sheet 44b is, for example, bonded into a groove in first sheet 44a to clamp electrode 32. Second sheet 44b can be used as a separator between multiple layers of wound electrodes 32, and the distance between multiple layers of electrodes 32 can be adjusted by changing the thickness of second sheet 44b. The support member 40 may optionally have a slot 43, which allows it to be fitted onto the protrusion 53 of retaining member 50. The slot 43 is not limited to single-sided or double-sided openings; any type of slot 43 or assembly method is applicable in this invention as long as it allows the support member 40 and retaining member 50 to be assembled together. Alternatively, as... Figure 14 As shown, the supporting member 40 can be selectively assembled with the retaining member 50 by means of screw connection, for example, the supporting member 40 has a through hole 45, and the protrusions 53 of the retaining member 50 have screw holes, wherein the supporting member 40 is screwed into the screw hole of the retaining member 50 by means of a bolt 59 passing through the through hole 45. Or, as Figure 15 As shown, the retaining member 50 may also selectively have, for example, a groove structure 57, into which the bearing member 40 is inserted to be correspondingly assembled onto the retaining member 50.

[0164] In addition, such as Figure 16 As shown, the retaining member 50 may also have, for example, a conductive structure 54, which spans a plurality of electrodes 32, for example, along the first direction X, thereby electrically connecting the electrodes 32 abutting against the supporting member 40. In this way, the first power supply P1 provided by the power supply unit 34 can selectively connect to the electrodes 32, for example, via the conductive structure 54; that is, the conductive structure 54 can selectively serve as... Figure 1 The electrical contact 31 is used. Additionally, an insulating structure 56 may be selectively provided between the electrodes 32 to prevent electrical contact between them. For example, such as... Figure 17 As shown, the insulating structure 56 may, for example, be disposed between the electrode 32 and the conductive structure 54. The material of the insulating structure 56 is not particularly limited, as long as it provides the aforementioned insulating effect, it is suitable for use in this invention.

[0165] Furthermore, the heights of the electrodes 32 located in different limiting grooves 42 are not necessarily the same; the heights of the electrodes 32 located in different limiting grooves 42 may also be different. Alternatively, the heights of the electrodes 32 on different supporting members 40 are not necessarily the same; the heights of the electrodes 32 located in different supporting members 40 may also be different. That is, as... Figure 11As shown, the electrodes 32 can not only be distributed parallel to each other along the first direction X, but can also be selectively distributed parallel to each other along the third direction Z at the same height or different heights. The electrodes 32 located in the same limiting groove 42 can be stacked on top of each other or arranged in parallel.

[0166] In addition, such as Figure 11 As shown, since multiple electrodes 32 are distributed parallel to each other along the third direction Z (processing travel direction F), when these electrodes 32, distributed parallel to each other along the third direction Z, sequentially cut or polish the processing target area 110 of the workpiece 100 along the processing travel direction F, the subsequent electrode 32 will repeat the position already passed by the previous electrode 32. In other words, taking the processing travel direction F from top to bottom as an example, even if the previous electrode 32 (e.g., the lower electrode) breaks, the subsequent electrode 32 (e.g., the upper electrode) can still replace the previous electrode 32 to apply discharge energy. Figure 1 The processing target area 110 of the workpiece 100 shown is thus shown. Therefore, by means of the electrode replacement function, the present invention can avoid adverse effects such as process interruption caused by electrode breakage.

[0167] The workpiece 100 is placed on a stage 20, which may optionally include clamping members 24 for fixing the workpiece 100. The stage 20 or the clamping members 24 thereon may optionally be adhesively connected to the workpiece 100, wherein the adhesive is, for example, a conductive adhesive, which provides both conductivity and fixation. For example, if the workpiece 100 is a block-shaped object (such as a crystal ingot), the clamping members 24 may, for example, clamp the periphery of the crystal ingot cylinder, that is, radially clamp the two sides of the crystal ingot, such as... Figure 18 As shown, this is to prevent rolling or displacement, and to ensure that the processing target area 110 of the workpiece 100 is located outside the clamping member 24. Alternatively, the clamping member 24 may, for example, clamp both ends of the ingot, that is, axially clamp both sides of the ingot, such as... Figure 19 As shown, this is to prevent displacement and to ensure that the processing target area 110 of the workpiece 100 is located between the two clamping members 24. The clamping members 24 may be, for example, two plates 23 separated from each other, used to clamp the workpiece 100 using the two plates 23.

[0168] like Figure 20 As shown, the clamping member 24 can also be, for example, a single plate 23, used to support one side of the workpiece 100. Furthermore, the present invention can selectively use adhesive 26 to bond the two walls of the processing groove 120 of the processing target area 110 of the workpiece 100, which can avoid vibration of the workpiece 100 during the electrical discharge machining process and also prevent burrs from forming before the end of the electrical discharge machining process. The workpiece 100 is not limited to being fixed to one side of the clamping member 24 via adhesive 26 at both axial ends or radial periphery.

[0169] like Figure 21 As shown, the clamping member 24 can also clamp a buffer member 27, and the buffer member 27 fixes the workpiece 100 to be processed via an adhesive 26. The electrical discharge machining unit 30 performs an electrical discharge machining process on the workpiece 100 on the stage 20 along the machining travel direction F, and may even perform an electrical discharge machining process on the workpiece 100 together with the buffer member 27. The adhesive 26 is, for example, a conductive adhesive layer. The workpiece 100 is not limited to being fixed to the buffer member 27 via the adhesive 26 at both ends of the axial direction or the radial periphery.

[0170] like Figure 22 As shown, the clamping member 24 can also fix the workpiece 100 by clamping the conductive frame 25, for example. The electrical discharge machining unit 30 performs an electrical discharge machining process on the workpiece 100 on the stage 20 along the machining travel direction F. It can even perform an electrical discharge machining process on the workpiece 100 together with the conductive frame 25, for example. The workpiece 100 is not limited to being fixed to one side of the clamping member 24 by adhesive 26 at both ends of the axial direction or the radial periphery.

[0171] In addition, such as Figure 23 As shown in the figures above, the clamping member 24 may also be a comb-shaped plate, for example, at least one of the two plates is a comb-shaped plate, and the position of the comb tooth opening 29 of the comb-shaped plate corresponds to the position of the electrode 32, that is, the position of the processing target area 110.

[0172] Among them, such as Figure 24 As shown, the electrical discharge machining unit 30 selectively has an adjustable tension value, and for example, by causing relative displacement between the two bearing members 40 or the two holding members 50 (e.g. Figure 24 (As indicated by the double arrows at the bottom left and right sides), for example, by moving them closer to or further away from each other, thereby adjusting the tension value of electrode 32. Figure 24 As shown, the electrical discharge machining unit 30 also includes a force measurement unit 60, such as a tension meter, for measuring the tension value of the electrode 32. Figure 24 As shown, the electrical discharge machining apparatus also includes a vibration measurement unit 62 for measuring the vibration value of the electrode 32.

[0173] like Figure 24As shown, the electrical discharge machining (EDM) apparatus 30 also includes a slag removal unit 64. When the EDM apparatus 30 performs an EDM process on the workpiece 100, the slag removal unit 64 provides one or more external forces to remove the residue generated by the electrode 32 applying discharge energy to the workpiece 100. The direction of the external force generated by the slag removal unit 64 corresponds to the discharge section B of the electrode 32. The slag removal unit 64 can be, for example, an airflow generator, a waterflow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating component. The external force can be, for example, airflow, waterflow, ultrasonic oscillation, piezoelectric oscillation, attraction, or magnetism. The slag removal unit 64 is not limited to being disposed on the fixture 36 and the stage 20; it can even be disposed around the discharge section B of the electrode 32. Taking the slag removal unit 64 as an ultrasonic generator or a piezoelectric oscillator as an example, the slag removal unit 64 can be installed on the fixture 36 and the stage 20, for example. By directly generating external force to act directly on the fixture 36 and the stage 20, the external force generated by the slag removal unit 64 can also cause the fixture 36, the workpiece 100, or the electrode 32 to vibrate, and for example, vibrate simultaneously, which can provide an auxiliary effect in removing residue.

[0174] In other feasible embodiments, the electrical discharge machining unit 30 of the present invention can, for example, drive the discharge sections B of multiple electrodes 32 to move reciprocally or cyclically by reciprocating or cyclically rotating two or more support members 40. The connection configuration between the support members 40 and the electrodes 32 can be as follows: Figure 25 As shown, each electrode 32 surrounds four support members 40. These electrodes 32 share two of the four support members 40, so the two sides A of these electrodes 32 are in contact with each other in a stacked state and move together against the two shared support members 40. The remaining support members 40 are arranged in pairs at different heights, so that the electrodes 32 are distributed parallel to each other at a certain interval. In this way, when the support members 40 reciprocate or circulate, the discharge section B of these electrodes 32 will also be displaced relative to the workpiece 100, and will be located at different heights by means of the paired support members 40 at different heights, that is, distributed parallel to each other at the interval. Among them, the two shared support members 40 reciprocate or circulate simultaneously at the same speed, so the reciprocating or circulating speed of these electrodes 32 along the second direction Y will also be the same.

[0175] In other equally feasible embodiments, the electrical discharge machining unit 30 of the present invention can, for example, drive the discharge sections B of the multiple electrodes 32 to move reciprocally or cyclically by reciprocating or cyclically rotating two support members 40. For example, the configuration of the support members 40 and the electrodes 32 can be as follows: Figure 26As shown, the two sides A of these electrodes 32 are in contact with each other to form a stacked state and move together against the two supporting members 40. The discharge sections B of these electrodes 32 are distributed parallel to each other at a distance by the partition posts 33. Thus, when the supporting members 40 reciprocate or rotate cyclically, the discharge sections B of these electrodes 32 will also be displaced relative to the workpiece 100 and are separated by the partition posts 33 and distributed parallel to each other. Among them, these electrodes 32 move against the partition posts 33. The position of the partition posts 33 is fixed, but it can be a fixed or rolling design, and it has a limiting groove to serve as a guide post. The partition posts 33 can also be selectively made of conductive material, so that the electrodes 32 can be electrically connected to the power supply unit 34 through the partition posts 33. That is, the partition posts 33 can also be selectively used as Figure 1 The electrical contact 31 is used. The two supporting members 40 rotate synchronously or cyclically at the same speed, so the electrodes 32 will also move at the same speed along the second direction Y.

[0176] In other equally feasible embodiments, such as Figure 24 As shown, the electrical discharge machining (EDM) unit 30 of the present invention may also optionally include, for example, a laser unit 70, for providing a heat source to the workpiece 100 before, during, or after the EDM process performed by the EDM unit 30, thereby partially (locally) heating or overall heating of the workpiece 100. That is, the heat source provided by the laser unit 70 can provide energy before or during the EDM process to increase the efficiency of the EDM process, and can also provide repair, polishing, and annealing effects after the EDM process.

[0177] In summary, the electrical discharge machining apparatus of the present invention has the following advantages:

[0178] (1) By using multi-layer electrodes, the problem of having to stop the machine to replace a broken single electrode can be effectively solved.

[0179] (2) The fixture is composed of at least two load-bearing components and at least two holding components respectively connected together. The quick-release design can greatly reduce the time required to replace the electrodes and adjust the tension of the discharge electrodes.

[0180] (3) By means of parallel distributed electrodes, multiple processing target areas can be cut or polished at the same time, effectively saving the overall processing time.

[0181] (4) The stabilizing component can reduce electrode jitter, provide a guiding effect, and can be used as an electrical contact.

[0182] (5) The slag removal unit can provide external force to one or more processing target areas to help remove the slag generated by the electrical discharge machining process.

[0183] (6) The clamping device has a variety of clamping modes, which can effectively solve the problem that traditional electrical discharge machining technology cannot cut the overlapping area between the fixture and the workpiece.

[0184] The above description is merely illustrative and not restrictive. Any equivalent modifications or alterations made without departing from the spirit and scope of this invention should be included in the appended claims.

Claims

1. An electrical discharge machining apparatus, characterized in that, At least includes: A stage for supporting at least one workpiece to be processed, wherein the stage further includes a clamping member for securing the workpiece, the clamping member comprising two plates, at least one of which is a comb-shaped plate; and An electrical discharge machining (EDM) unit is configured to perform an EDM process on a plurality of target areas of the workpiece on a workpiece on a workpiece on a workpiece along a machining travel direction. The EDM unit comprises: A plurality of electrodes, which are distributed in parallel along a first direction; A fixture comprising at least two support members and at least two retaining members connected by a quick-release design, wherein the sides of a plurality of electrodes respectively abut against the two support members, such that a discharge section of one of the plurality of electrodes is suspended in the air; and A power supply unit provides a first power source to the plurality of electrodes and the workpiece during the electrical discharge machining process, so as to apply a discharge energy to the plurality of processing target areas of the workpiece through the discharge sections of the plurality of electrodes, wherein when the electrical discharge machining unit performs the electrical discharge machining process along the processing travel direction, the discharge sections of the plurality of electrodes and the plurality of processing target areas of the workpiece move relative to each other along a second direction.

2. The electrical discharge machining apparatus as described in claim 1, characterized in that, The discharge section of the plurality of electrodes and the plurality of processing target areas of the workpiece move in a cyclical relative manner along the second direction.

3. The electrical discharge machining apparatus as described in claim 2, characterized in that, The two supporting members and the two holding members move reciprocally or cyclically together with the plurality of electrodes, so that the plurality of electrodes apply the discharge energy to the workpiece in the discharge section.

4. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit adjusts the tension values ​​of the plurality of electrodes by causing relative displacement between the two support members or the two holding members.

5. The electrical discharge machining apparatus as described in claim 2, characterized in that, It also includes a stabilizing component for stabilizing the movement of the plurality of electrodes relative to the workpiece.

6. The electrical discharge machining apparatus as described in claim 1, characterized in that, The plurality of electrodes are simultaneously distributed in parallel along the first direction and a third direction, the third direction being perpendicular to the first direction or the second direction.

7. The electrical discharge machining apparatus as described in claim 6, characterized in that, The plurality of electrodes, which are distributed in parallel along the first direction, are distributed in different numbers along the third direction.

8. The electrical discharge machining apparatus as described in claim 1, characterized in that, The plurality of electrodes are distributed at different heights in parallel along the first direction.

9. The electrical discharge machining apparatus as described in claim 8, characterized in that, The plurality of electrodes are in contact with each other.

10. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit has a connection structure that extends along the first direction to connect the plurality of electrodes that are distributed in parallel along the first direction.

11. The electrical discharge machining apparatus as described in claim 1, characterized in that, The plurality of electrodes are either linear or plate-shaped.

12. The electrical discharge machining apparatus as described in claim 1, characterized in that, The transverse cross-sections of the plurality of electrodes are asymmetrical.

13. The electrical discharge machining apparatus as described in claim 1, characterized in that, The power supply unit is either a single power output or a complex array of power outputs.

14. The electrical discharge machining apparatus as described in claim 1, characterized in that, The power supply unit is electrically connected to the plurality of electrodes in series or in parallel.

15. The electrical discharge machining apparatus as described in claim 1, characterized in that, The platform moves along the first direction, the second direction, or the processing direction.

16. The electrical discharge machining apparatus as described in claim 1, characterized in that, The stage rotates around the first direction, the second direction, or the processing direction.

17. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides an external force to remove the residue generated by the plurality of electrodes applying the discharge energy to the workpiece.

18. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a slag removal unit. When the electrical discharge machining unit performs the electrical discharge machining procedure on the workpiece, the slag removal unit provides a plurality of external forces to remove the residue generated by the plurality of electrodes applying the discharge energy to the workpiece.

19. The electrical discharge machining apparatus as described in claim 17 or 18, characterized in that, The slag removal unit is an ultrasonic generator or a piezoelectric oscillator that causes the fixture, the workpiece, or the plurality of electrodes to oscillate.

20. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a force measurement unit for measuring the tension values ​​of the plurality of electrodes.

21. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining apparatus also includes a vibration measurement unit for measuring the vibration values ​​of the plurality of electrodes.

22. The electrical discharge machining apparatus as described in claim 1, characterized in that, The power supply unit of the electrical discharge machining unit further includes providing a second power source to the plurality of electrodes, thereby providing a DC power source or a radio frequency source to the plurality of electrodes.

23. The electrical discharge machining apparatus as described in claim 1, characterized in that, The workpiece to be processed has a planar area and is connected to the stage via the planar area.

24. The electrical discharge machining apparatus as described in claim 1, characterized in that, The discharge section of the plurality of electrodes and the plurality of processing target areas of the workpiece move reciprocally relative to each other along the second direction.

25. The electrical discharge machining apparatus as described in claim 1, characterized in that, The platform or clamping element is connected to the workpiece by an adhesive.

26. The electrical discharge machining apparatus as described in claim 25, characterized in that, The adhesive is a conductive adhesive.

27. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along with the clamping component in the machining travel direction.

28. The electrical discharge machining apparatus as described in claim 1, characterized in that, The clamping member holds a buffer component, and the buffer component fixes the workpiece to be processed through a conductive adhesive layer. The electrical discharge machining unit performs the electrical discharge machining process on the workpiece to be processed on the platform along the processing travel direction.

29. The electrical discharge machining apparatus as described in claim 1, characterized in that, The clamping member holds a conductive frame to fix the workpiece, and the electrical discharge machining unit performs the electrical discharge machining process on the workpiece on the platform along the machining travel direction.

30. The electrical discharge machining apparatus as described in claim 24, characterized in that, The two supporting members and the two holding members move reciprocally or cyclically together with the plurality of electrodes, so that the plurality of electrodes apply the discharge energy to the workpiece in the discharge section.

31. The electrical discharge machining apparatus as described in claim 1, characterized in that, The clamping member axially supports one side of the workpiece to be processed, and the discharge energy forms a processing groove in the processing target area of ​​the workpiece to be processed by an adhesive to fix the two walls of the processing groove.

32. The electrical discharge machining apparatus as described in claim 1, characterized in that, The discharge energy forms a processing groove in the processing target area of ​​the workpiece, and the processing groove is filled with a filler material.

33. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two load-bearing components are either plate structures or sleeve structures.

34. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two supporting components each include a first sheet and a second sheet, and the plurality of electrodes are clamped between the first sheet and the second sheet.

35. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two supporting members each have a through groove, and the two retaining members each have a protrusion corresponding to the through groove. The two supporting members are connected to the protrusions of the two retaining members by the through groove.

36. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two supporting members each have a through hole, and the two retaining members each have a screw hole. The two supporting members are screwed into the screw holes of the two retaining members by means of a bolt passing through the through hole.

37. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two holding members each have a groove structure, and the two bearing members are inserted into the groove structure of the two holding members to be correspondingly connected to the two holding members.

38. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two holding members each have a conductive structure, thereby electrically connecting to the plurality of electrodes abutting against the two supporting members.

39. The electrical discharge machining apparatus as described in claim 1, 37, or 38, characterized in that, The two holding members simultaneously fix the two bearing members and the plurality of electrodes.

40. The electrical discharge machining apparatus as described in claim 38, characterized in that, An insulating structure is provided between the plurality of electrodes to prevent them from making electrical contact with each other.

41. The electrical discharge machining apparatus as described in claim 1, characterized in that, The two supporting components have a plurality of limiting grooves for limiting the plurality of electrodes.

42. The electrical discharge machining apparatus as described in claim 41, characterized in that, The plurality of electrodes are fixed in the plurality of limiting grooves with adhesive.

43. The electrical discharge machining apparatus as described in claim 1 or 41, characterized in that, The electrical discharge machining unit also includes an attachment member that is connected to the plurality of electrodes at the edges of the two support members.

44. The electrical discharge machining apparatus as described in claim 43, characterized in that, The attachment component is electrically connected to the first power source or a second power source of the power supply unit.

45. The electrical discharge machining apparatus as described in claim 1, characterized in that, The heads and tails of the plurality of electrodes are respectively connected to the same or different of the two supporting components.

46. ​​The electrical discharge machining apparatus as described in claim 1, characterized in that, The edges of the two load-bearing components have chamfered corners.

47. The electrical discharge machining apparatus as described in claim 1, characterized in that, The plurality of electrodes are equidistantly and parallelly distributed along the first direction.

48. The electrical discharge machining apparatus as described in claim 1, characterized in that, The plurality of electrodes are connected to each other via a conductive structure, thereby electrically connecting the power supply unit.

49. The electrical discharge machining apparatus as described in claim 1, characterized in that, The work to be processed on the platform is a semiconductor ingot or wafer.

50. The electrical discharge machining apparatus as described in claim 1, characterized in that, The electrical discharge machining device sequentially or simultaneously cuts or polishes the workpiece carried by the platform during the electrical discharge machining process.

51. The electrical discharge machining apparatus as described in claim 1, characterized in that, It also includes a laser unit for providing a heat source to the workpiece before, during, or after the electrical discharge machining process.

52. The electrical discharge machining apparatus as described in claim 1, characterized in that, The workpiece to be processed is formed by electrically bonding together multiple workpieces.

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