A micro-parts self-calibration device and method based on micro-droplet array

Abstract

The present invention provides a micro-part self-calibration device and method based on a micro-droplet array, comprising a micro-hole array component, a droplet injection component and a micro-motion platform component, wherein the micro-hole array component comprises a micro-hole array and a capillary microtube embedded in each micro-hole, and a liquid is quantitatively injected into the capillary microtube through the droplet injection component; a droplet array matching the sheet-like micro-part is constructed according to its shape, target position and target posture; the micro-part contacts the constructed micro-droplet array to form a liquid bridge between the two; when there is an error between the position and posture of the micro-part and its target position and posture, an asymmetric liquid bridge is generated between the constructed micro-part and the micro-droplet array, and the micro-part is quickly aligned with the position and posture of the micro-droplet array under the driving force of the liquid bridge restoring force, so as to realize the self-calibration of the position and posture of the micro-part; and the droplet array parameters are matched according to the shape, target position and posture of the micro-part. The method is simple and easy to implement, and is suitable for the self-calibration of a single or multiple sheet-like parts.

Description

Technical Field

[0001] The invention relates to the field of droplet micro-manipulation, and in particular to a micro-part self-calibration device and method based on a micro-droplet array. Background Art

[0002] Automatic calibration of micro-parts' posture is an important part of micro-assembly. With the miniaturization of mechanical and electronic products, components are also gradually tending towards miniaturization and thinning, which puts higher requirements on calibration technology. The position and posture deviation of complex-shaped tiny parts directly affects the assembly accuracy of tiny parts, and further affects the assembly quality and equipment performance. Therefore, a fast, accurate and simple calibration method is of great significance to improving the assembly quality of micro-parts and improving assembly efficiency. At present, the operating methods for micro-parts assembly at home and abroad are mainly mechanical methods based on micro-grippers, vacuum adsorption methods and adhesion-based methods.

[0003] The vacuum adsorption method uses a vacuum generator to generate negative pressure inside the straw to provide adsorption force to adsorb micro parts. Professor Huang Xinhan of Huazhong University of Science and Technology has developed a vacuum micro-gripper with controllable adsorption force based on fuzzy control, which can automatically pick up and release small balls with a diameter of 100-800μm. Zesch designed and assembled a vacuum micro-gripper with vibration release function, which can pick up and place the operation object. The release positioning accuracy of polystyrene microspheres with a radius of 35-100μm is 4.5±0.5μm, and the release success rate is about 100% (110 test results). The biggest feature of the vacuum adsorption method is that it is simple in structure and easy to control, but vacuum adsorption has strict requirements on the shape and surface roughness of the grasping component, and the vacuum degree needs to be strictly controlled. If the vacuum is too large, it may cause the sheet-like micro parts to break. The method itself is difficult to directly adjust the posture of tiny parts. Generally, the operator or the robot arm is required to control the position and posture of the adsorption pen. In addition, due to the fixed diameter of the micro-tube at the end, the size range of the object that can be manipulated is also limited.

[0004] The main methods based on adhesion currently include van der Waals force, electrostatic force and surface tension adsorption. Hu Junhui et al. studied a method for grasping and releasing micro-objects based on van der Waals force and piezoelectric vibration. By using the van der Waals force between the micro-manipulation probe and the manipulated sample, micro-objects such as algae cells, pollen, fibers, micro-copper wires and graphene micro-sheets can be effectively grasped. By moving the micro-manipulation probe, the controlled sample can be moved to the desired position through any three-dimensional path, and the captured micro-objects can be released by controlling the ultrasonic vibration of the micro-manipulation probe. Saito and Takahashi of Japan proposed a method for releasing solid microspheres with a diameter of 30um by adjusting the voltage to control the electrostatic force between the probe and the microparticles.

[0005] Van der Waals forces are common between molecules, so they are difficult to control. In addition, the amplitude of van der Waals forces is limited and is not suitable for manipulating heavier objects. Electrostatic forces are more susceptible to external electromagnetic interference. Therefore, the application of these two methods has limitations. The surface tension of liquids at the microscale is obvious and is not easily disturbed by the outside world. Moreover, droplets can be flexibly deformed to fit micro-parts of various geometric shapes, while also avoiding the local stress concentration of tiny parts. Therefore, methods based on surface tension adsorption have become the mainstream of adhesion adsorption methods. By utilizing the good fluidity of the droplets themselves, a liquid bridge can be formed between the micro-manipulation tool and the object of operation to form a flexible contact. At the same time, the droplets can conform to the flexible deformation of the surface of the object of operation, so that no mechanical damage will be caused to the contact surface.

[0006] Rong Weibin and others from Harbin Institute of Technology proposed a micromanipulator mechanism based on the control of liquid medium adhesion. The mechanism uses the surface tension of the liquid to grasp objects and reduces the adhesion between the liquid and the target object through an ejection device, thereby releasing the target object.

[0007] Liquid bridge force methods are widely used in self-assembly technology. Jean Berthier et al. believe that capillary-driven droplet self-alignment technology is currently a widely studied self-assembly and micro-assembly technology. In this technology, the surface tension associated with capillary pinning generates restoring and torsional forces to align moving parts. So far, most studies have been aimed at the alignment of square chips on a dedicated patch on a wafer. Jean Berthier et al. studied the displacement restoring forces of more complex moving parts, such as regular convex and non-convex polygons, and regular polygons with regular polygonal cavities. In order to solve the packaging problem of microsystems, the theory was also extended to polygonal shapes with connecting holes (channels). M Mastrangeli et al. reviewed the research progress and application status of various self-assembly technologies in recent years, including shape matching, fluid-driven capillary self-alignment, molten-solder-driven self-alignment, and magnetic, electrophoretic, and dielectrophoretic self-assembly. The method of assembling two-dimensional MEMS structures into three-dimensional MEMS structures was described, and the method of using capillary forces to fold two-dimensional plates into three-dimensional structures, assemble parts onto common substrates, or assemble parts into two-dimensional or three-dimensional structures with each other was discussed. Finally, colloidal self-assembly and DNA-based self-assembly, which are mainly applied at the nanoscale, are reviewed. In their paper, Bo Chang et al. demonstrated for the first time the self-alignment of microchips on a soft and stretchable substrate with patterns, indicating that capillary self-alignment technology has great potential in constructing soft printed circuits.

[0008] Micro-grippers are used to manipulate tiny parts. According to different energy supply and driving methods, micro-gripper methods can be divided into piezoelectric micro-grippers, pneumatic micro-grippers, etc. Chen proposed an optimized two-finger gripper based on piezoelectric drive. The end of the gripper is processed into a hemispherical end effector, and then the end effector is vibrated to overcome the adhesion between the end effector and the target object. The microbeads were grasped and released by vibration, with a high success rate and stable grasping. Alogla et al. from Heriot-Watt University in the UK made a micro-gripper based on pneumatic drive and completed the picking and release experiment of microspheres with a diameter of 200μm. These mechanical gripping manipulators have the characteristics of dexterity, high driving accuracy, and complex control. In terms of operation performance, this type of micro-manipulator is often relatively complex in structure and relatively large in size relative to the size of the object being operated, so it cannot adapt to occasions with relatively narrow space. In addition, since this type of micro-gripper micro-manipulator mostly adopts a two-finger structure type, when the thickness of the micro-manipulation object is thin, it is difficult to use the micro-gripper micro-manipulation method, and the clamping force is difficult to control, which is easy to cause mechanical damage to the object being operated. Since each tungsten wire rod of the manipulator is evenly distributed in space, it is impossible to achieve automatic calibration for micro parts of specific shapes. Summary of the invention

[0009] In view of the shortcomings of the above problems, the present invention provides a micro-part self-calibration device and method based on a micro-droplet array. The method constructs a micro-hole array corresponding to the shape, target position and target posture of the sheet-like micro-part according to the shape, target position and target posture of the sheet-like micro-part, injects liquid into the selected micro-hole array to form stable droplets, and the micro-part contacts the constructed micro-droplet array to form a liquid bridge between the two. The restoring force of the liquid bridge is used to drive the micro-part to quickly align with the posture of the droplet array, so as to achieve self-calibration of the position and posture of the micro-part. By matching the operating end face of the droplet array with the shape of the micro-part, self-calibration of the position and posture of micro-parts of different shapes and sizes can be achieved, and the posture of the micro-part can be changed.

[0010] The present invention is achieved by at least one of the following technical solutions.

[0011] A micro-part self-calibration device based on a micro-droplet array comprises a micro-hole array component, a droplet injection component and a micro-motion platform component; the micro-hole array component comprises a micro-hole array plate and a plurality of capillary microtubes; a micro-hole array is provided on the micro-hole array plate; the capillary microtubes are embedded in micro-holes; the small holes at the lower ends of the capillary microtubes are connected to the droplet injection component; liquid is injected through the droplet injection component to form tiny droplets on the upper end surface of the capillary microtubes; the micro-hole array component is located on the micro-motion platform component; the micro-motion platform component is used to adjust the position and posture of the micro-hole array plate.

[0012] Preferably, the micro-motion platform assembly includes an XYR alignment platform, and the position and posture of the microwell array plate are adjusted by adjusting manual adjustment knobs in the X direction, the Y direction, and the R direction rotating around the Z axis.

[0013] Preferably, the microwell array is m×n microwells arranged uniformly.

[0014] Preferably, the microwell array plate includes one or more microwell arrays of different shapes.

[0015] Preferably, the center distance of the holes in the microwell array is 1.5-2.0 times the hole diameter.

[0016] Preferably, the micropore array is made of hydrophobic material, with an inner diameter of 0.2 mm to 0.6 mm and a thickness of 3 mm to 5 mm;

[0017] The inner diameter of the capillary microtube is 0.1 mm-0.5 mm, the upper end surface of the capillary microtube is flush with the upper end surface of the micropore array, and the lower end surface exceeds the micropore array by 3-5 mm.

[0018] The method for implementing the micro-parts self-calibration device based on a micro-droplet array comprises the following steps:

[0019] S1. According to the target posture of the micro-part, adjust the micro-motion platform assembly so that the posture of the micro-hole array is consistent with the target posture of the micro-part;

[0020] S2. Construct a droplet array according to the surface shape of the micro-part and the target position: inject liquid into the selected microwell array to form a stable droplet on the upper end surface of the capillary microtube;

[0021] S3. Adjust the X-direction knob, Y-direction knob, and R-direction knob of the micro-motion platform assembly to adjust the posture of the microwell array plate so that the posture of the droplet array is consistent with the target posture of the micropart; when there is an error between the position posture of the micropart and the target position posture, an asymmetric liquid bridge will be generated between the micropart and the droplet array, and the micropart will quickly align with the posture of the droplet array under the drive of the liquid bridge restoring force, thereby realizing self-calibration of the position posture of the micropart.

[0022] Preferably, the shape and number of array meshes of the microhole array are selected according to the shape and size of the micro-parts, so as to realize self-calibration of the position and posture of micro-parts of different shapes and sizes.

[0023] Preferably, in step S2, the amount of liquid injected by the droplet injection assembly and the type of the injected liquid are determined according to the size of the capillary microtubes embedded in the microwell array and the mass of the micro-parts.

[0024] Preferably, the micropore diameter, the center distance between holes, and the capillary microtube diameter are changed to adapt to the size changes of different micro-parts, and the overall size of the micropore array plate and the number of micropores are changed to adapt to the parallel processing of multiple micro-parts, thereby expanding its scope of application.

[0025] Compared with the existing technology, the present invention has the following beneficial effects:

[0026] 1. It has a wide range of applicable objects. The micro-droplet array can operate on micro-parts of any shape and size, and can well handle parts with rough surfaces and holes that are difficult to deal with by other methods;

[0027] 2. This method is simple and easy to use, and is suitable for the self-calibration of single or multiple sheet parts. By using the capillary restoring force generated by the asymmetric liquid bridge, the micro-parts can be adsorbed by droplets when there is an error in the position and posture of the micro-parts. After the adsorption is stable, it can automatically adjust to the ideal position without any human intervention.

[0028] 3. Non-destructive operation. The mechanism of micro-part control is mainly based on the surface tension of the droplets. It is a flexible contact and will not cause mechanical damage to the surface of the micro-parts.

[0029] 4. Precise control: the selection of each microhole and the injection volume of the droplet are independently controlled, which can achieve precise control of the target position and posture of the micro parts with a simple control method;

[0030] 5. The overall structure is simple, most of the structural parts have regular shapes, are easy to process, have a small volume relative to the volume of the operating object, and have a flexible structure. It can be used in relatively narrow occasions or integrated into assembly lines. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 This is a schematic diagram of a self-calibration device based on a micro-droplet array in this embodiment;

[0032] Figure 2 This is a schematic diagram of the micro-droplet array of this embodiment adsorbing micro-parts based on surface tension;

[0033] Figure 3 This is a schematic diagram of the process of the micro-droplet array absorbing a rectangular micro-part and realizing automatic calibration in this embodiment;

[0034] Figure 4 This is a schematic diagram of the process of the micro-droplet array adsorbing an L-shaped micro-part and realizing automatic calibration in this embodiment;

[0035] In the figure, 1-microwell array plate, 2-capillary microtube, 3-support column, 4-micromotion platform assembly, 5-micro parts, 6-droplet injection assembly, 7-liquid bridge. DETAILED DESCRIPTION

[0036] The purpose of the present invention is further described in detail below through specific examples. The examples cannot be repeated here one by one, but the following embodiments of the invention are not limited to the following examples in conjunction with the accompanying drawings and specific implementation methods. Unless otherwise specified, the materials and processing methods used in the present invention are conventional materials and processing methods in the art.

[0037] Example 1

[0038] A micro-parts self-calibration device based on a micro-droplet array, such as Figure 1 , Figure 2 As shown, it includes a microwell array component, a droplet injection component 6 and a micro-motion platform component 4;

[0039] The micropore array assembly includes a micropore array plate 1 and a plurality of capillary microtubes 2. The micropore array plate 1 is provided with a micropore array, in which the capillary microtubes 2 are embedded. The micropore array is m×n micropores evenly arranged, and a small hole is provided at the lower end of the capillary microtube 2. The droplet injection assembly 6 includes a syringe and a hose. The lower end of each capillary microtube 2 is connected to the corresponding syringe through the corresponding hose, and the droplet is injected into the capillary microtube 2 through the small hole of the syringe. The supporting micropore array assembly is installed on the micro-motion platform assembly 4 through the supporting column 3.

[0040] The micro-motion platform assembly 4 includes an XYR alignment platform, and the position and posture of the micro-motion platform are adjusted by adjusting the manual adjustment knobs in the X direction, the Y direction, and the R direction rotating around the Z axis, thereby adjusting the position and posture of the micro-hole array plate. After multiple adjustments, the posture of the micro-hole array is consistent with the target posture of the micro-part.

[0041] The size of the micro-hole array is determined by the size of the micro-parts or the number of micro-parts that are self-calibrated at the same time. Figure 1 As shown, the micropore array plate 1 includes one or more micropore arrays of different shapes. By changing the overall size and the number of micropores of the micropore array plate 1 to accommodate the parallel processing of multiple micro-components 5, its application range is expanded.

[0042] like Figure 2 The m×n mesh micropores in the micropore array assembly are evenly arranged, and the hole center distance is 2 times the hole diameter. The micropore array is made of hydrophobic material, the inner diameter of the micropore is 0.2mm-0.6mm, and the thickness is 3mm-5mm. The inner diameter of the capillary microtube 2 is 0.1mm-0.5mm; the upper end surface of the capillary microtube 2 is flush with the upper end surface of the micropore, and the lower end surface exceeds the lower end surface of the micropore by 3mm, and is connected to the droplet injection assembly 6.

[0043] In this embodiment, a self-calibration micro-operation method based on a micro-droplet array includes the following steps:

[0044] S1. Select the shape and number of array meshes of the microhole array according to the shape and size of the micropart 5. According to the target posture of the micropart 5, adjust the X-axis direction knob, Y-direction knob and R direction knob rotating around the Z-axis of the micro-motion platform assembly 4 so that the posture of the microhole array is consistent with the target posture of the micropart.

[0045] S2. Construct a droplet array according to the surface shape and target position of the micro-part: inject liquid into the selected micro-hole array, form stable droplets on the upper end surface of the micro-tube 2, form a droplet array, and adjust the micro-motion platform assembly 4 so that the posture of the droplet array is consistent with the target posture of the micro-part. When there is an error between the position and posture of the micro-part and its target position and posture, an asymmetric liquid bridge will be generated between the micro-part and the droplet array. Driven by the restoring force of the liquid bridge, the micro-part quickly aligns with the position and posture of the droplet array to achieve self-calibration of the position and posture of the micro-part. According to the shape and size of the micro-part, the shape of the operating end face of the droplet array and the number of array meshes are matched, so that self-calibration of the position and posture of micro-parts of different shapes and sizes can be achieved.

[0046] The hydrophobic material used in the microporous array plate 1 ensures that the constructed droplet array is uniform and stable through the difference in wetting properties between the capillary microtubes 2 and the surface of the microporous array, and the droplets are independent of each other and will not merge with each other.

[0047] The condition for stable adsorption of the micro-part 5 is that the surface tension of the micro-part 5 is dominant at the microscopic scale and the influence of gravity can be ignored; the amount of liquid injected by the droplet injection component 6 and the type of injected liquid are selected from liquids with a large surface tension coefficient, generally water or non-corrosive inorganic liquids, and are determined according to the size of the capillary microtubes 2 embedded in the micropore array and the mass of the micro-part, so that the resulting liquid bridge force and torque are greater than the force and torque required for adjusting the position and posture of the micro-part 5.

[0048] In this embodiment, the mass of the micro-part 5 can be obtained by weighing a plurality of identical micro-parts 5 with an electronic balance and then calculating the average value. The experimental data involved include the volume of the injected liquid, the height of the liquid bridge 7, the contact angle between the injected liquid and the micro-part 5, the contact angle between the injected liquid and the upper end surface of the capillary microtube 2, and the position and posture of the micro-part 5;

[0049] The size changes of different micro-parts can be adapted by changing the micropore diameter, the center distance between holes, and the diameter of the capillary microtube 2. At the same time, the overall size of the micropore array component and the number of micropores can be changed to adapt to the parallel processing of multiple micro-parts, thereby expanding its scope of application.

[0050] Example 2

[0051] In this embodiment, taking a rectangular micro-part as an example, the whole process is as follows: Figure 3As shown. Assume that the surface side length of the rectangular micro-part is 1.5mm*0.9mm and the thickness is 0.25mm. The micro-hole diameter is 0.3mm and the hole center distance is 2 times the hole diameter. The self-calibration micro-operation method of this embodiment includes the following steps:

[0052] S1. Select a group of microholes corresponding to the shape and size of the rectangular micropart to construct a microhole array. In the initial state, the center of the rectangular micropart and the center of the selected microhole array deviate by -0.04 mm in the x direction, 0.05 mm in the y direction, and 20° around the z axis.

[0053] S2, injecting an equal amount of droplets into each microtube of the selected microwell array through the droplet injection assembly 6, forming a stable rectangular microdroplet array on the upper end surface of the capillary microtube 2, such as Figure 3 As shown in a.

[0054] S3, move the rectangular micro-part downwards and close to the micro-droplet array. When it contacts the micro-droplet array, several asymmetric liquid bridges 7 will be formed. Since the liquid bridge 7 will always evolve towards the trend of minimum energy, the adsorbed rectangular micro-part will change its position and posture under the action of the asymmetric liquid bridge force, such as Figure 3 As shown in b, after waiting for 1 second to stabilize, the shapes and positions of the rectangular micro-parts and the micro-droplet array are aligned to achieve automatic calibration, as shown in Figure 3 For micro-parts that need to be processed in batches, the overall size of the micro-hole array component and the number of micro-holes can be changed to accommodate the parallel processing of multiple micro-parts, which is not limited to the special case of processing a single part in this embodiment.

[0055] Example 3

[0056] In this embodiment, taking the adsorption of L-shaped micro-parts as an example, the whole process is as follows: Figure 4 As shown. Assume that the surface dimensions of the L-shaped micro-part are 2.1mm*1.5mm and the thickness is 0.25mm. The micro-hole diameter is 0.3mm and the hole center distance is 2 times the hole diameter. The self-calibration micro-operation method based on the micro-droplet array of this embodiment includes the following steps:

[0057] S1. Select a group of microholes corresponding to the shape and size of the L-shaped micropart to construct a microhole array. In the initial state, the center of the L-shaped micropart deviates from the center of the selected microhole array by 0.01 mm in the x direction, 0.04 mm in the y direction, and 15° around the z axis.

[0058] S2, injecting an equal amount of droplets into each microtube of the selected microwell array through the droplet injection assembly 6, forming a stable similar L-shaped microdroplet array on the upper end surface of the capillary microtube 2, such as Figure 4 As shown in a.

[0059] S3, move the L-shaped micro-part downwards and close to the micro-droplet array. When it contacts the micro-droplet array, several asymmetric liquid bridges will be formed. Since the liquid bridge will always evolve towards the trend of minimum energy, the adsorbed L-shaped micro-part will change its position and posture under the action of the asymmetric liquid bridge force, such as Figure 4 As shown in b, after waiting for 1 second to stabilize, the shapes and positions of the L-shaped micro-parts and the micro-droplet array are aligned to achieve automatic calibration, as shown in Figure 4 For micro-parts that need to be processed in batches, the overall size of the micro-hole array assembly and the number of micro-holes can be changed to accommodate the parallel processing of multiple micro-parts, which is not limited to the special case of processing a single part in this embodiment.

[0060] The above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A micro-parts self-calibration device based on a micro-droplet array, characterized in that: The invention comprises a micropore array component, a liquid droplet injection component (6) and a micro-motion platform component (4); the micropore array component comprises a micropore array plate (1) and a plurality of capillary microtubes (2); a micropore array is provided on the micropore array plate (1); the capillary microtubes (2) are embedded in the micropores; the small holes at the lower ends of the capillary microtubes (2) are connected to the liquid droplet injection component (6); liquid is injected through the liquid droplet injection component (6) to form tiny liquid droplets on the upper end surfaces of the capillary microtubes (2); the micropore array component is located on the micro-motion platform component (4); the micro-motion platform component (4) is used to adjust the position and posture of the micropore array plate (1).

2. A micro-parts self-calibration device based on a micro-droplet array according to claim 1, characterized in that: The micro-motion platform assembly (4) comprises an XYR alignment platform, and the position and posture of the microwell array plate are adjusted by adjusting manual adjustment knobs in the X direction, the Y direction and the R direction rotating around the Z axis.

3. A micro-parts self-calibration device based on a micro-droplet array according to claim 1, characterized in that: The microwell array is m×n microwells arranged evenly.

4. The micro-parts self-calibration device based on a micro-droplet array according to claim 1, characterized in that: The microwell array plate (1) comprises one or more microwell arrays of different shapes.

5. The micro-parts self-calibration device based on a micro-droplet array according to claim 1, characterized in that: The center distance of the holes in the microwell array is 1.5-2.0 times the hole diameter.

6. A micro-parts self-calibration device based on a micro-droplet array according to any one of claims 1 to 5, characterized in that: The micropore array is made of hydrophobic material, with an inner diameter of 0.2mm-0.6mm and a thickness of 3mm-5mm; The inner diameter of the capillary microtube (2) is 0.1 mm-0.5 mm, the upper end surface of the capillary microtube (2) is flush with the upper end surface of the micropore array, and the lower end surface exceeds the micropore array by 3-5 mm.

7. A method for implementing a micro-part self-calibration device based on a micro-droplet array as claimed in claim 6, characterized in that: The following steps are involved: S1, adjusting the micro-motion platform assembly (4) according to the target posture of the micro-part (5) so that the posture of the micro-hole array is consistent with the target posture of the micro-part (5); S2. constructing a droplet array according to the surface shape of the micro-part (5) and the target position: injecting liquid into the selected micro-hole array to form stable droplets on the upper end surface of the capillary microtube (2); S3, adjusting the X direction knob, the Y direction knob, and the R direction knob of the micro-motion platform assembly (4) to adjust the posture of the micro-well array plate so that the posture of the droplet array is consistent with the target posture of the micro-part (5); When there is an error between the position and posture of the micro-part (5) and the target position and posture, an asymmetric liquid bridge will be generated between the micro-part (5) and the droplet array. Driven by the restoring force of the liquid bridge, the micro-part (5) will quickly align with the position and posture of the droplet array, thereby achieving self-calibration of the position and posture of the micro-part (5).

8. The self-calibration method according to claim 7, characterized in that: The shape and number of array meshes of the microhole array are selected according to the shape and size of the micropart (5), so as to realize self-calibration of the position and posture of microparts (5) of different shapes and sizes.

9. The self-calibration method according to claim 7, characterized in that: In step S2, the amount of liquid injected by the droplet injection assembly (6) and the type of the injected liquid are determined according to the size of the capillary microtubes (2) embedded in the microwell array and the mass of the micro-components.

10. The self-calibration method according to claim 7, characterized in that: By changing the micropore diameter, the center distance between the pores, and the diameter of the capillary microtube (2), the size changes of different micro-parts can be accommodated. At the same time, by changing the overall size of the micropore array plate (1) and the number of micropores, the parallel processing of multiple micro-parts (5) can be accommodated, thereby expanding its scope of application.

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