A stable high-precision micro-variable-distance chuck device

Abstract

The present application belongs to the field of automation, and discloses a stable high-precision micro-variable-distance chuck device. The device is different from the shaft+linear bearing structure of the prior art, and provides a linear guide rail, a positioning block, a connecting block and a positioning plate to limit the movement, thereby solving the problem of contaminated silicon wafers, greatly improving the stability of the above-mentioned mechanism, prolonging the service life, and enabling the variable-distance chuck device to reach the industrialized scale application level.

Description

TECHNICAL FIELD

[0001] The application belongs to the field of automation, and relates to a stable high-precision micro-variable-distance suction disc device. BACKGROUND

[0002] In the field of automation for the photovoltaic industry, there is an automation demand for the suction and carrying of silicon wafers. At present, the thickness of mainstream 210mm large silicon wafers is less than 0.2mm, and the distance between two silicon wafers in the flow basket between processes is about 5mm. The distance between the wafers in the working basket used in each process will change according to the demand of yield and process, and a wafer guide machine is usually used to rearrange the distance. However, through the variable-distance mechanism, the target can be achieved more quickly and accurately. At present, there are several variable-distance suction structures for the loading and unloading of photovoltaic cells, which can meet the technical requirements of ultra-thin and ultra-multiple suction discs (single wafer thickness <5mm, number >=50), accurate positioning (±0.1mm) and micro-variable-distance (less than 0.7mm) in the automatic carrying of silicon wafers. However, due to the characteristics of the mechanical structure, the stability is not high, the service life is not long, and metal chips will be generated due to wear during long-term use, which will cause pollution to the silicon wafers.

[0003] A high-precision micro-variable-distance suction disc device (CN113130367A) uses a shaft + linear bearing form for bearing and sliding. In the case of bearing bending, the movement of the linear bearing is not smooth in long-time movement.

[0004] A variable micro-variable-distance suction disc device (CN11313036-4A) also uses a shaft + linear bearing form, and the power transmission mode of the hinge mechanism has low mechanical efficiency, and the failure rate will also increase due to the hinge joint. SUMMARY

[0005] In order to overcome the shortcomings of the prior art, so that the variable-distance working mechanism can replace the wafer guide machine mechanism in the process of automatically sucking silicon wafers in the photovoltaic industry, and truly meet the high efficiency and stability required by industrial production, the application provides a stable high-precision micro-variable-distance suction disc device. Different from the shaft + linear bearing structure of the prior art, a linear guide rail, a positioning block, a connecting block and a positioning plate are provided to limit the movement. The application adopts different structures to solve the problem of pollution of silicon wafers and greatly improves the stability of the above-mentioned mechanism, prolongs the service life, and makes the variable-distance suction disc device reach the industrialization scale application level.

[0006] The above-mentioned object of the application is achieved by the following technical scheme:

[0007] A stable high-precision micro-variable spacing chuck device, comprising a variable spacing chuck mechanism, an auxiliary mechanism; the auxiliary mechanism comprises a support assembly, a vacuum assembly; the vacuum assembly and the variable spacing chuck mechanism are arranged on the support assembly, and the vacuum assembly is connected above the variable spacing chuck mechanism; one side of the variable spacing chuck mechanism is connected with a driving assembly;

[0008] The variable spacing chuck mechanism comprises a fixed plate A, a fixed plate B and side plates; the two ends of the fixed plate A and the fixed plate B are connected by the side plates, and the fixed plate A, the fixed plate B and the two side plates form a cuboid structure without upper and lower surfaces; a base plate is arranged on the top surface of the cuboid structure to form a cavity without a bottom surface; a positioning plate group and a plurality of linear guides are arranged in the cavity; the plurality of linear guides are arranged on the inner sides of the side plates; the number of the linear guides arranged on each side plate is the same and the positions are correspondingly arranged; a plurality of sliders are arranged on each linear guide, and one more slider is arranged on the linear guide arranged at the bottom of each side plate than on the other linear guides; the positioning plate group comprises a plurality of positioning plates; the plurality of positioning plates are connected with the sliders through connecting blocks or positioning blocks, and the bottom of the positioning plate is provided with a ceramic suction cup, and the air path of the positioning plate is communicated with the air cavity of the ceramic suction cup; the positioning plate can freely slide on the linear guide;

[0009] A plurality of positioning blocks B, a plurality of connecting blocks, a plurality of positioning blocks A, a plurality of connecting blocks and a plurality of positioning blocks A are sequentially arranged from top to bottom on both sides of the positioning plate group; wherein the plurality of connecting blocks and the plurality of positioning blocks A are connected with the sliders on the linear guides to drive the positioning plate to move. Screws penetrate the side plates, the positioning blocks A or the connecting blocks and the corresponding positioning plates to be connected and locked.

[0010] The plurality of positioning plates specifically comprises a plurality of positioning plates A, a plurality of positioning plates B and a plurality of positioning plates C; the positioning plates are sequentially arranged in the order of the positioning plate A, the positioning plate B, the positioning plate A and the positioning plate C, and can freely slide on the linear guide;

[0011] The inner sides of the fixed plate A and the fixed plate B are provided with end face connecting plates; the end face connecting plate connected with the fixed plate A is referred to as end face connecting plate A, and the fixed plate A is connected with the positioning plate A arranged at the end through the end face connecting plate A; this end is named as the fixed end; the end face connecting plate connected with the fixed plate B is referred to as end face connecting plate B, and the fixed plate B is connected with the positioning plate B arranged at the end through the end face connecting plate B; this end is named as the driving end;

[0012] The positioning block B is internally provided with a groove for connecting with the side of the positioning plate A, the positioning plate B and the positioning plate A connected in sequence. The first layer of positioning block A arranged from top to bottom is internally provided with a groove for connecting with the side of the positioning plate A, the positioning plate C and the positioning plate A connected in sequence. The second layer of positioning block A arranged from top to bottom is internally provided with a groove for connecting with the side of the positioning plate A, the positioning plate B and the positioning plate A connected in sequence.

[0013] The connecting block is connected with the side of the positioning plate A, and the connecting blocks of the upper and lower adjacent layers of the same side are arranged alternately.

[0014] Further, the outer side of each side plate is fixedly provided with a protective sheet metal.

[0015] The vacuum assembly comprises a vacuum cavity and a vacuum generator. The vacuum cavity is mounted on a base plate, and the side of the vacuum cavity is connected with the vacuum generator. The vacuum generator is further provided with a silencer. The vacuum generator is arranged on a support rib plate, and is connected with a vacuum electromagnetic valve and a vacuum gauge through air pipes. The vacuum cavity is provided with a plurality of Y-shaped quick connectors A, and the number of the quick connectors A is half of the number of the positioning plates. The vacuum cavity is further provided with a quick connector B, which is connected with the vacuum port of the vacuum generator through a T-shaped three-way quick connector C. The top of each positioning plate is provided with a quick connector C, which is used for connecting with the quick connector A of the vacuum cavity through an air pipe.

[0016] Further, the interface diameters of the quick connector B and the quick connector A are different. The quick connector B is provided with two. The quick connector B is used for vacuumizing the vacuum cavity.

[0017] The driving assembly comprises a driving cylinder, a floating joint and a cylinder connecting plate. The driving cylinder is arranged on a cylinder support, and the cylinder support is connected to one side of the fixed plate B. The driving cylinder is provided with a speed regulating valve for regulating the extension and retraction speed of the driving cylinder. The cylinder connecting plate is connected to the floating joint at the front end of the driving cylinder. The cylinder connecting plate is connected to the outermost end face connecting plate B and the fixed plate B through screws. Thus, the driving cylinder can drive the extension and retraction of the variable-pitch suction disc mechanism.

[0018] Further, the driving cylinder is a thin cylinder. The speed regulating valve is provided with two. The driving assembly is further provided with a cylinder electromagnetic valve for driving.

[0019] The support assembly comprises a mechanism mounting plate, a mechanism main support; the mechanism mounting plate is arranged on the mechanism main support, and the mechanism mounting plate and the mechanism main support are fixed by a support rib plate; the bottom of the mechanism main support is fixedly connected with a linear module, the driving side of the linear module is connected with a servo motor through a shaft coupling, the linear module is fixed on a module connecting plate, the module connecting plate is connected with a base plate through screws, and a vacuum cavity is arranged between the module connecting plate and the base plate; a cylinder electromagnetic valve is arranged on one side of the mechanism mounting plate, a vacuum electromagnetic valve is arranged on the side of the mechanism main support, and a vacuum gauge is arranged on a metal vacuum gauge support and fixedly connected with the base plate through the metal vacuum gauge support.

[0020] The two side edges of the positioning plate A are in a rectangular structure, the height of the two side edges of the positioning plate A is less than the height of the protruding blocks of the two side edges of the positioning plate C, and the height of the two side edges of the positioning plate A is greater than the height of the recesses of the two side edges of the positioning plate C; the height of the two side edges of the positioning plate A is less than the height of the protruding blocks of the two side edges of the positioning plate B, and the height of the two side edges of the positioning plate A is greater than the height of the recesses of the two side edges of the positioning plate B; the positioning plate A is connected with the slider on the linear guide rail through a connecting block, and is a driven position; the two side edges of the positioning plate B are in a concave structure, the protruding block at the upper end is connected with the recess of the positioning block B; the protruding block at the lower end is connected with the recess of the first layer of positioning block A arranged from top to bottom, and the protruding blocks at the upper end and the lower end are respectively connected with the recesses of the positioning block B and the positioning block A in a translatable manner, and are called double positioning; the positioning plate C is in a convex structure, is protruded in the middle and is recessed at the upper end and the lower end, the protruding block in the middle is connected with the recess of the second layer of positioning block A arranged from top to bottom, and only the protruding block in the middle is connected with the recess of the positioning block A in a translatable manner, and is called single positioning.

[0021] The recess in the positioning block A is provided with three, the depth of the middle recess is greater than that of the two side recesses, and the depths of the two side recesses are the same, the middle recess of the positioning block A is connected with the protruding block of the positioning plate B or the positioning plate C, the recesses at the two sides of the positioning block A are used for being connected with two adjacent positioning plates, and the width of each recess is greater than the width of the corresponding positioning plate. The recess in the positioning block B is provided with three, the depth of the middle recess is greater than that of the two side recesses, and the depths of the two side recesses are the same, the middle recess of the positioning block B is connected with the protruding block of the positioning plate B, the recesses at the two sides of the positioning block B are used for being connected with two positioning plates A, and the width of each recess is greater than the width of the corresponding positioning plate.

[0022] Each positioning plate is provided with a recess at the lower end and is connected with a ceramic suction disc.

[0023] The device is also provided with a PLC control system, and the driving cylinder, the vacuum electromagnetic valve, the cylinder electromagnetic valve, the linear module and the servo motor are connected with the PLC control system.

[0024] In specific work, according to the working condition, a vertical driving mechanism can be arranged on the back of the mechanism mounting plate to drive the whole device to move, the vertical driving mechanism includes but is not limited to the following forms, as long as the function is realized, the vertical driving mechanism includes a driving servo motor, the driving servo motor is connected with a vertical module, and the vertical module is arranged between the module connecting plate and the mechanism mounting plate. Realize the up and down movement of the whole device. The driving servo motor and the vertical module are connected with the PLC control system respectively. The above does not limit a single model, as long as the working function is realized.

[0025] The bottom of the positioning plate is provided with a ceramic suction cup, and the air path of the positioning plate communicates with the air cavity of the ceramic suction cup, and the ceramic suction cup is used for vacuum suction of the silicon wafer. The positioning plate and the positioning block are used for precise positioning and variable spacing of the ceramic suction cup. When the variable spacing suction cup mechanism is in the compression state, all the positioning plates are pressed and tightly attached, and the positioning is performed through the thickness of each positioning plate. When the variable spacing suction cup mechanism is in the stretching state, the positioning plate is pulled and positioned by the adjacent positioning plate through the positioning block. At this time, the distance between the slotted grooves in the positioning block forms the gap of the positioning plate, so that the spacing of the ceramic suction cup is changed.

[0026] The beneficial effects of the present application compared with the prior art are:

[0027] The stable high-precision micro-variable spacing suction cup device provided by the present application can realize precise micro-variable spacing operation of the silicon wafer by changing the spacing of the suction cup during the process of transferring the silicon wafer from the flow basket to the working basket, and has high stability and long service life.

[0028] After the present application is applied to an automatic device, the following advantages are obtained:

[0029] 1. Since the present application can replace the guide piece machine mechanism, the size of the related automatic device can be reduced;

[0030] 2. Since the present application can quickly and accurately complete the variable spacing function and effectively improve the production capacity;

[0031] 3. The present application can avoid the contact between the silicon wafer and the belt, and can completely eliminate the belt mark of the silicon wafer, greatly improving the yield of the silicon wafer.

[0032] 4. Due to the special installation method of the ceramic suction cup, when a single damaged ceramic suction cup is replaced, only a few corresponding fixing screws need to be loosened, without the need to disassemble and reassemble the whole device, which is convenient for maintenance;

[0033] 5. The present application has no metal chip pollution, high stability and long service life, and is suitable for industrial batch use. BRIEF DESCRIPTION OF DRAWINGS

[0034] Figure 1It is the structural schematic diagram of stable high-precision micro-variable distance chuck device of the application.

[0035] Figure 2 It is the exploded view of stable high-precision micro-variable distance chuck device of the application.

[0036] Figure 3 It is the overall exploded view of the variable distance chuck mechanism in the device.

[0037] Figure 4 It is the size diagram of positioning block A in embodiment 1.

[0038] Figure 5 It is the three-dimensional schematic diagram when the hidden side plate in the open state of the device.

[0039] Figure 6 It is Figure 5 The three-dimensional schematic diagram when the linear guide rail and the slider continue to hide in the open state.

[0040] Figure 7 It is Figure 6 The three-dimensional schematic diagram when the positioning block and the connecting block continue to hide in the open state.

[0041] Figure 8 It is the three-dimensional schematic diagram when the hidden side plate, linear guide rail and slider in the closed state of the device.

[0042] Figure 9 It is the schematic diagram of positioning plates of different specifications. Figure a is positioning plate A, figure b is positioning plate B, and figure c is positioning plate C.

[0043] Figure 10 It is the size schematic diagram of the positioning block.

[0044] In the figure: 101. Side plate, 102. Base plate, 103. Fixed plate A, 104. Fixed plate B, 105. Protection sheet metal, 106. Linear guide rail, 107. Slider, 108. Positioning block A, 109. Positioning block B, 110. Connecting block, 111. Positioning plate A, 112. Positioning plate B, 113. Positioning plate C, 114. Cylinder connecting plate, 115. End face connecting plate A, 116. End face connecting plate B, 117. Driving cylinder, 118. Ceramic chuck, 201. Mechanism mounting plate, 202. Mechanism main support, 203. Support rib plate, 204. Sheet metal vacuum gauge support, 205. Module connecting plate, 206. Vacuum cavity, 207. Quick connector A, 208. Vacuum generator, 209. Vacuum gauge, 210 vacuum electromagnetic valve, 211. Cylinder electromagnetic valve, 212. Linear module, 213. Servo motor. DETAILED DESCRIPTION

[0045] The application will be described in detail below with specific examples, but the protection scope of the application is not limited. Unless otherwise specified, the experimental methods used in the application are conventional methods, and the experimental equipment, materials, reagents, etc. used can be obtained from commercial channels. The variable spacing chuck mechanism of the described embodiment considers the variable spacing size and the minimum size of the linear guide rail matched slider, and uses a structure form of single-sided setting of 4 linear guide rails (a total of 8 linear guide rails).

[0046] Example 1

[0047] A stable high-precision micro-variable spacing chuck device, comprising a variable spacing chuck mechanism and an auxiliary mechanism; the auxiliary mechanism comprises a support assembly and a vacuum assembly; the vacuum assembly and the variable spacing chuck mechanism are arranged on the support assembly, and the upper side of the variable spacing chuck mechanism is connected with the vacuum assembly; one side of the variable spacing chuck mechanism is connected with a driving assembly;

[0048] The variable spacing chuck mechanism comprises a fixed plate A 103, a fixed plate B 104 and a side plate 101; the two ends of the fixed plate A 103 and the fixed plate B 104 are connected by the side plate 101 respectively, and the fixed plate A 103, the fixed plate B 104 and the two side plates 101 form a cuboid structure without upper and lower surfaces; a base plate 102 is arranged on the top surface of the cuboid structure to form a cavity lacking a bottom surface; a positioning plate group and 8 linear guide rails 106 are arranged in the cavity; the 8 linear guide rails 106 are arranged on the inner side of the side plate 101 respectively; each side plate 101 is provided with 4 linear guide rails 106 and the positions are correspondingly arranged; a plurality of sliders 107 are arranged on each linear guide rail 106, and the linear guide rail 106 arranged at the bottom of each side plate 101 is provided with one more slider 107 than the other linear guide rails 106; the linear guide rail 106 arranged at the bottom is provided with 13 sliders 107; that is, a total of 49 sliders 107 are arranged on one side in this embodiment, and the positioning plate group comprises 50 positioning plates (the first plate does not need to be moved); the 50 positioning plates are connected with the sliders 107 through connecting blocks 110 or positioning blocks, and ceramic suction cups 118 are arranged on the bottom of the positioning plates and the air path of the positioning plates is communicated with the air cavity of the ceramic suction cups 118; the 50 positioning plates can freely slide on the linear guide rails 106;

[0049] A plurality of positioning block B 109, a plurality of connecting block 110, a plurality of positioning block A 108, a plurality of connecting block 110 and a plurality of positioning block A 108 are sequentially arranged on both sides of the positioning plate group from top to bottom; wherein the plurality of connecting block 110 and the plurality of positioning block A 108 are connected with the sliders 107 on the linear guide rails 106 to drive the positioning plates to move. Screws penetrate the side plate 101, the positioning block A 108 or the connecting block 110 and are connected and locked with the corresponding positioning plates. The number of the positioning block A, the positioning block B and the connecting block 110 can be set according to the number of the positioning plates and the number of the sliders 107.

[0050] The 50 positioning plates specifically include a plurality of positioning plate A 111, a plurality of positioning plate B 112, a plurality of positioning plate C 113; the positioning plates are sequentially arranged in the order of positioning plate A 111, positioning plate B 112, positioning plate A 111, positioning plate C 113, and can freely slide on the linear guide rail 106;

[0051] The inner side of the fixed plate A 103 and the fixed plate B 104 is provided with an end face connecting plate; the end face connecting plate connected with the fixed plate A 103 is called end face connecting plate A 115, and the fixed plate A 103 is connected with the positioning plate A 111 arranged at the end through the end face connecting plate A 115; this end is called fixed end; the end face connecting plate connected with the fixed plate B 104 is called end face connecting plate B 116, and the fixed plate B 104 is connected with the positioning plate B 112 arranged at the end through the end face connecting plate B 116; this end is called driving end;

[0052] The positioning block B 109 is internally provided with a groove for connecting with the side of the positioning plate arranged in the order of positioning plate A 111, positioning plate B 112 and positioning plate A 111. The first layer of positioning block A 108 arranged from top to bottom is internally provided with a groove for connecting with the side of the positioning plate arranged in the order of positioning plate A 111, positioning plate C 113 and positioning plate A 111. The second layer of positioning block A arranged from top to bottom is internally provided with a groove for connecting with the side of the positioning plate arranged in the order of positioning plate A 111, positioning plate B 112 and positioning plate A 111.

[0053] The connecting block 110 is connected with the side of the positioning plate A 111, and the upper and lower adjacent two layers of connecting blocks 110 at the same side are staggered arranged.

[0054] Further, the outer side of each side plate 101 is fixedly provided with a protective sheet metal 105.

[0055] The vacuum assembly comprises a vacuum cavity 206, a vacuum generator 208; the vacuum cavity 206 is mounted on the base plate 102, and the side of the vacuum cavity 206 is connected with the vacuum generator 208; the vacuum generator 208 is further provided with a silencer; the vacuum generator 208 is arranged on the support rib plate 203, and the vacuum generator 208 is connected with the vacuum electromagnetic valve 210 and the vacuum gauge 209 through air pipes respectively; the vacuum cavity 206 is provided with 25 Y-shaped quick connectors A 207, and the number of the quick connectors A 207 is half of the number of the positioning plates; the vacuum cavity 206 is further provided with a quick connector B, the quick connector B is connected with the vacuum port of the vacuum generator 208 through a T-shaped three-way quick connector C, and the top of each positioning plate is provided with a quick connector C, which is used for connecting with the quick connector A 207 of the vacuum cavity 206 through air pipes one by one. The vacuum cavity 206 and the base plate 102 are sealed by using a sealant and then fastened by using screws. The 25 Y-shaped quick connectors 207 are connected with the quick connectors C on the positioning plates where the 50 ceramic suction cups 118 are arranged one by one through air pipes after being divided into two, which are used for providing a vacuum air path.

[0056] Further, the interface diameters of the quick connector B and the quick connector A 207 are different; the quick connector B is provided with two. The quick connector B is used for vacuumizing the vacuum cavity 206.

[0057] The driving assembly comprises a driving cylinder 117, a floating joint, and a cylinder connecting plate 114; the driving cylinder 117 is arranged on a cylinder support, and the cylinder support is connected to one side of the fixed plate B 104; the driving cylinder 117 is provided with a speed regulating valve for regulating the extension and retraction speed of the driving cylinder 117, and the cylinder connecting plate 114 is connected to the driving cylinder 117 through a floating joint at the front end of the driving cylinder 117; the cylinder connecting plate 114 is connected with the outermost end face connecting plate B 116 and the fixed plate B 104 through screws; so that the driving cylinder 117 can drive the extension and retraction of the variable-pitch suction cup mechanism.

[0058] Further, the driving cylinder 117 is a thin cylinder. The speed regulating valve is provided with two. The driving assembly is further provided with a cylinder electromagnetic valve 211 for driving.

[0059] The support assembly comprises a mechanism mounting plate 201, a mechanism main support 202; the mechanism mounting plate 201 is arranged on the mechanism main support 202, and the mechanism mounting plate 201 and the mechanism main support 202 are fixed by arranging a support rib plate 203; the bottom of the mechanism main support 201 is fixedly connected with a linear module 212, the driving side of the linear module 212 is connected with a servo motor 213 through a shaft coupling, the linear module 212 is fixed on a module connecting plate 205, the module connecting plate 205 is connected with a base plate 102 through screws, and a vacuum cavity 206 is arranged between the module connecting plate 205 and the base plate 102; a cylinder electromagnetic valve 211 is arranged on one side of the mechanism mounting plate 201, a vacuum electromagnetic valve 210 is arranged on the side of the mechanism main support 202, and a vacuum gauge 209 is arranged on a sheet metal vacuum gauge support 204 and is fixedly connected with the base plate 102 through the sheet metal vacuum gauge support 204. The variable-pitch suction disc mechanism can be driven by the linear module 212 to perform process micro-motion adjustment.

[0060] The two side edges of the positioning plate A 111 are in a rectangular structure, the height of the two side edges of the positioning plate A 111 is less than the height of the protruding blocks of the two side edges of the positioning plate C 113, and the height of the two side edges of the positioning plate A 111 is greater than the height of the recesses of the two side edges of the positioning plate C 113; the height of the two side edges of the positioning plate A 111 is less than the height of the protruding blocks of the two side edges of the positioning plate B 112, and the height of the two side edges of the positioning plate A 111 is greater than the height of the recesses of the two side edges of the positioning plate B 112; the positioning plate A 111 is connected with the slider 107 on the linear guide rail 106 through a connecting block, and is a driven position; the two side edges of the positioning plate B 112 are in a concave structure, the protruding block at the upper end is connected with the groove of the positioning block B 109; the protruding block at the lower end is connected with the groove of the first layer of positioning block A 108 arranged from top to bottom, because the protruding blocks at the upper end and the lower end are respectively connected in the groove of the positioning block B 109 and the positioning block A 108 and can be connected in translation, it is called double positioning; the positioning plate C 113 is in a convex structure, is convex in the middle and is concave at the upper end and the lower end, the convex block in the middle is connected with the groove of the second layer of positioning block A 108 arranged from top to bottom, because only the convex block in the middle is connected in the groove of the positioning block A 108 and can be connected in translation, it is called single positioning;

[0061] The positioning block A 108 is internally provided with three grooves, the middle groove has a greater depth than the two side grooves, and the two side grooves have the same depth, the middle groove of the positioning block A 108 is connected with the protruding block of the positioning plate B 112 or the positioning plate C 113, the grooves on the two sides of the positioning block A 108 are used to be connected with two adjacent positioning plates, and the width of each groove is greater than the width of the corresponding positioning plate. The positioning block B 109 is internally provided with three grooves, the middle groove has a greater depth than the two side grooves, and the two side grooves have the same depth, the middle groove of the positioning block B 109 is connected with the protruding block of the positioning plate B 112, the grooves on the two sides of the positioning block B 109 are used to be connected with two positioning plates A 111, and the width of each groove is greater than the width of the corresponding positioning plate.

[0062] Each positioning plate is provided with a groove at the lower end, which is used to be connected with a ceramic suction disc 118. The ceramic suction disc 118 is used to suck a silicon wafer by vacuum.

[0063] The device is also provided with a PLC control system, and the driving cylinder 117, the vacuum electromagnetic valve 210, the cylinder electromagnetic valve 211, the linear module 212 and the servo motor 213 are connected with the PLC control system. The above are not limited to a single model, and the working function can be realized.

[0064] The side edge of the positioning plate B 112 (double positioning) has upper and lower protrusions, the lower protrusion part is fixed with the positioning block A 108 connected to the sliding block 107, and the upper protrusion part is fixed with the positioning block B 109 which is not connected to the sliding block 107, and the positioning block B 109 plays a role in balancing the stress, so that the variable pitch suction disc mechanism can uniformly transmit the tension during the opening process. In this way, the uppermost positioning block B 109 and the lowermost positioning block A 108 are positioned and fixed on the positioning plate B 112 (double positioning) through the middle groove, the positioning blocks cross the positioning plate A 111 (driven position) on the two sides, and the positioning edges are in the upper and lower gaps of the side edge of the positioning plate C 113 (single positioning), so no interference occurs. Similarly, the positioning block A 108 of the middle layer is positioned and fixed on the positioning plate C 113 (single positioning) through the middle groove, the positioning block A 108 of the middle layer crosses the positioning plate A 111 (driven position) on the two sides, and the positioning edges are in the middle gap of the side edge of the positioning plate B 112 (double positioning), and no interference occurs.

[0065] When the variable pitch chuck mechanism is in the compressed state, the driving cylinder 117 is extended, and all the positioning plates are pressed against the linear guide rail 106 without any gap, forming a pitch based on the thickness of the positioning plates. When the variable pitch chuck mechanism is in the stretched state, the positioning plate B 112 (double positioning) and the two adjacent positioning plates A 111 (driven position) are limited by the side walls of the grooves on both sides of the upper positioning block B 109 and the lower positioning block A 108, and the positioning plate C 113 (single positioning) and the two adjacent positioning plates A 111 (driven position) are limited by the side walls of the grooves on both sides of the middle positioning block A 108. In this way, the positioning plate A 111 (driven position) located between the positioning plate B 112 (double positioning) and the positioning plate C 113 (single positioning) can pass through the two passages formed by the upper and lower positioning blocks and the middle positioning block to transmit the pulling force, and can ensure that the positioning plates are evenly stressed during force transmission, so that the driving cylinder 117 can sequentially drive all 50 positioning plates to open when it is retracted, forming a gap based on the movable groove distance in the positioning block.

[0066] In actual industrial production, the use of one size embodiment of the device provided by the application is as follows: in the production process of battery pieces in the photovoltaic industry, diffusion and annealing processes are required, and the two process machines are similar, both of which are used for vapor deposition on silicon wafers in high-temperature quartz tubes, so a high-temperature-resistant quartz basket is selected as the carrier of the silicon wafers into the process machine, the spacing is 2.38 mm, and there are 100 layers. In the workshop, the spacing of the baskets used for transporting silicon wafers between various process machines is 5.44 mm, and there are 100 layers. Through the application, the transfer of silicon wafers between the quartz basket and the plastic basket can be realized without other equipment. When the plastic basket is full of silicon wafers and is transported to the mechanism, the variable-spacing suction disc mechanism is driven by the linear module 212 in the auxiliary mechanism to move the position of the variable-spacing suction disc mechanism to the plastic basket material taking position, the driving cylinder 117 is retracted, so that the variable-spacing suction disc mechanism is in a stretched state, and 50 positioning plates are stretched to the side walls of the slots on both sides of the positioning block, so that the spacing between each suction disc is equal to the spacing of the slots on both sides of the positioning block, that is, 5.44 mm. Then, the vertical module carrying the device is lowered to a height at which the silicon wafers can cover the ceramic suction disc air holes, and then the vacuum is opened, the ceramic suction disc 118 sucks the silicon wafers to take away half of the silicon wafers in the plastic basket, and then other motion mechanisms including the above-mentioned vertical module can drive the device to run above the quartz basket, and the variable-spacing suction disc mechanism is driven by the linear module 212 in the auxiliary mechanism to move the position of the variable-spacing suction disc mechanism to the quartz basket material placing position. Then, the driving cylinder 117 is extended, so that the variable-spacing suction disc mechanism is in a compressed state, and all the positioning plates are pressed tightly, so that the spacing between each ceramic suction disc 118 is equal to the thickness of the positioning plate, that is, 4.76 mm. Subsequently, a ceramic split tooth will be ejected from the bottom of the quartz basket, and the above-mentioned vertical module will be lowered to the bottom edge of the silicon wafer close to the root of the ceramic split tooth, and then the ceramic suction disc 118 will be broken to make the silicon wafers fall onto the ceramic split tooth, and after the silicon wafers are aligned by the tooth guard, the ceramic split tooth will fall down to make the silicon wafers enter the odd-numbered layers or even-numbered layers of the 100-layer quartz basket, with a spacing of 4.76 mm, and the quartz basket with a spacing of 2.38 mm can be filled by 2 times of material placing. Similarly, the process of taking silicon wafers from the quartz basket and placing them into the plastic basket also corresponds to the above-mentioned action process. In addition, in actual production, two silicon wafers will be combined when placing the material into the quartz basket, and two silicon wafers will be separated when taking the material from the quartz basket, but both are performed by other additional mechanisms, which does not affect the above-mentioned basic process of the device.

[0067] The above-described embodiments are only preferred embodiments of the application, and not all the embodiments that can be implemented by the application. Any obvious modifications made by those skilled in the art without departing from the principles and spirit of the application should be considered within the scope of protection of the claims of the application.

Claims

1. A stable, high-precision, micro-variable pitch suction cup device, characterized in that, It includes a variable-pitch suction cup mechanism and an auxiliary mechanism; the auxiliary mechanism includes a support assembly and a vacuum assembly; the vacuum assembly and the variable-pitch suction cup mechanism are mounted on the support assembly, and the variable-pitch suction cup mechanism is connected to the vacuum assembly at the top; a drive assembly is connected to one side of the variable-pitch suction cup mechanism. The variable-pitch suction cup mechanism includes a fixed plate A (103), a fixed plate B (104), and a side plate (101). The two ends of the fixed plate A (103) and the fixed plate B (104) are connected by the side plate (101). The fixed plate A (103), the fixed plate B (104), and the two side plates (101) form a cuboid structure without a top or bottom surface. The top surface of the cuboid structure is covered with a base plate (102) to form a cavity without a bottom surface. The cavity is provided with a positioning plate assembly and several linear guide rails (106). The several linear guide rails (106) are respectively arranged inside the side plates (101). Each side plate (101) is provided with... The linear guides (106) are the same number and are positioned accordingly; each linear guide (106) is equipped with several sliders (107), and each side plate (101) has one more slider (107) installed on the bottom linear guide (106) than the other linear guides (106); the positioning plate group includes several positioning plates; the several positioning plates are connected to the sliders (107) through connecting blocks (110) or positioning blocks respectively, and the bottom of the positioning plate is equipped with a ceramic suction cup (118) and the air passage of the positioning plate is connected to the air chamber of the ceramic suction cup (118); the positioning plate can slide freely on the linear guide (106); The positioning plate assembly has several positioning blocks B (109), several connecting blocks (110), several positioning blocks A (108), several connecting blocks (110), and several positioning blocks A (108) arranged sequentially from top to bottom on both sides; among them, several connecting blocks (110) and several positioning blocks A (108) are connected to the sliders (107) on the linear guide rail (106) to drive the positioning plate to move; The plurality of positioning plates specifically include a plurality of positioning plates A (111), a plurality of positioning plates B (112), and a plurality of positioning plates C (113); the positioning plates are arranged in the order of positioning plate A (111), positioning plate B (112), positioning plate A (111), and positioning plate C (113), and can slide freely on the linear guide rail (106); Both the fixed plate A (103) and the fixed plate B (104) are provided with end face connecting plates on their inner sides; the end face connecting plate connected to the fixed plate A (103) is denoted as end face connecting plate A (115), and the fixed plate A (103) is connected to the positioning plate A (111) at the end through the end face connecting plate A (115); this end is named the fixed end; the end face connecting plate connected to the fixed plate B (104) is denoted as end face connecting plate B (116), and the fixed plate B (104) is connected to the positioning plate B (112) at the end through the end face connecting plate B (116); this end is named the driving end; The two sides of the positioning plate A (111) are rectangular. The height of the two sides of the positioning plate A (111) is less than the height of the protrusions on the two sides of the positioning plate C (113), and the height of the two sides of the positioning plate A (111) is greater than the height of the recesses on the two sides of the positioning plate C (113); the height of the two sides of the positioning plate A (111) is less than the height of the protrusions on the two sides of the positioning plate B (112), and the height of the two sides of the positioning plate A (111) is greater than the height of the recesses on the two sides of the positioning plate B (112); Position plate A (111) is connected to slider (107) on linear guide rail (106) via connecting block, and is in driven position; positioning plate B (112) has concave structure on both sides, and its upper protrusion is connected to the groove of positioning block B (109); its lower protrusion is connected to the groove of the first layer positioning block A (108) arranged from top to bottom; positioning plate C (113) has convex structure, with a convex middle and concave upper and lower ends, and its middle protrusion is connected to the groove of the second layer positioning block A (108) arranged from top to bottom. The positioning block A (108) has three internal grooves. The depth of the middle groove is greater than the depth of the two side grooves, and the depth of the two side grooves is the same. The middle groove of the positioning block A (108) is connected to the protrusion of the positioning plate B (112) or the positioning plate C (113). The grooves on both sides of the positioning block A (108) are used to connect with two adjacent positioning plates. The width of each groove is greater than the width of the corresponding positioning plate. The positioning block B (109) has three internal grooves. The depth of the middle groove is greater than the depth of the two side grooves, and the depth of the two side grooves is the same. The middle groove of the positioning block B (109) is connected to the protrusion of the positioning plate B (112). The grooves on both sides of the positioning block B (109) are used to connect with two positioning plates A (111). The width of each groove is greater than the width of the corresponding positioning plate. The connecting block (110) is connected to the side of the positioning plate A (111), and the connecting blocks (110) of the two adjacent layers on the same side are staggered.

2. The stable, high-precision, micro-variable pitch suction cup device as described in claim 1, characterized in that, The screw passes through the side plate (101), positioning block A (108) or connecting block (110) and is connected and locked to the corresponding positioning plate.

3. The stable, high-precision, micro-variable pitch suction cup device as described in claim 2, characterized in that, The vacuum assembly includes a vacuum chamber (206) and a vacuum generator (208). The vacuum chamber (206) is mounted on a base plate (102), and the side of the vacuum chamber (206) is connected to the vacuum generator (208). The vacuum generator (208) is also equipped with a silencer. The vacuum generator (208) is mounted on a support rib plate (203), and the vacuum generator (208) is connected to a vacuum solenoid valve (210) and a vacuum gauge (209) respectively through air pipes. The vacuum chamber (206) is equipped with several Y-shaped quick connectors A (207), and the number of quick connectors A (207) is half the number of positioning plates. The vacuum chamber (206) is also equipped with quick connectors B, which are connected to the vacuum port of the vacuum generator (208) through T-shaped three-way quick connectors C. Each positioning plate is equipped with a quick connector C on its top, which is used to connect to the quick connectors A (207) of the vacuum chamber (206) one by one through air pipes.

4. The stable, high-precision, micro-variable pitch suction cup device as described in claim 3, characterized in that, The drive assembly includes a drive cylinder (117), a floating joint, and a cylinder connecting plate (114). The drive cylinder (117) is mounted on a cylinder bracket, which is connected to one side of a fixed plate B (104). The drive cylinder (117) is equipped with a speed regulating valve to adjust the extension and retraction speed of the drive cylinder (117). The front end of the drive cylinder (117) is connected to the cylinder connecting plate (114) via a floating joint. The cylinder connecting plate (114) is connected to the outermost end face connecting plate B (116) of the drive end and the fixed plate B (104) via screws. Thus, the extension and retraction of the variable pitch suction cup mechanism can be driven by the drive cylinder (117). The drive assembly is also equipped with a cylinder solenoid valve (211) for driving.

5. The stable, high-precision, micro-variable pitch suction cup device as described in claim 4, characterized in that, The support assembly includes a mechanism mounting plate (201) and a mechanism main support (202). The mechanism mounting plate (201) is mounted on the mechanism main support (202), and the mechanism mounting plate (201) and the mechanism main support (202) are reinforced and fixed by a support rib plate (203). The bottom of the mechanism main support (202) is fixedly connected to the linear module (212), and the drive side of the linear module (212) is connected to the servo motor (213) through a coupling. The linear module (212) is fixed to the module connection. On the plate (205), the module connecting plate (205) is connected to the base plate (102) by screws, and the vacuum chamber (206) is set between the module connecting plate (205) and the base plate (102); the cylinder solenoid valve (211) is set on one side of the mechanism mounting plate (201), the vacuum solenoid valve (210) is set on the side of the mechanism main support (202), and the vacuum gauge (209) is set on the sheet metal vacuum gauge bracket (204) and is connected and fixed to the base plate (102) through the sheet metal vacuum gauge bracket (204).

6. The stable, high-precision, micro-variable pitch suction cup device as described in claim 5, characterized in that, Each positioning plate has a groove at its lower end for connecting to a ceramic suction cup (118); the ceramic suction cup (118) is used to vacuum-pick up silicon wafers.

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