A femtosecond laser near-field enhanced processing auxiliary device and method

Abstract

The present invention provides a femtosecond laser near-field enhanced processing auxiliary device and method, the device includes a first air inlet array, a second air inlet array and a processing platform, the first air inlet array and the second air inlet array are both located on the processing platform, the first air inlet array and the second air inlet array are arranged relative to each other, and a femtosecond laser processing area is formed between the first air inlet array and the second air inlet array; the first air inlet array and the second air inlet array each include at least one air inlet pipe, an air inlet pipe support module and a micro-nano particle microtube, and the air inlet pipe and the micro-nano particle microtube are respectively located on both sides of the air inlet pipe support module, the extension directions of the air inlet pipe and the micro-nano particle microtube are perpendicular to each other, and the micro-nano particle microtube is provided with an opening on one side close to and away from the air inlet pipe. The femtosecond laser near-field enhanced processing auxiliary device provided by the present invention only requires a small number of micro-nano particles to realize femtosecond laser near-field enhanced processing, saves materials, and guarantees the controllability and repeatability of each processing to the greatest extent.

Description

Technical Field

[0001] The present invention relates to the technical field of femtosecond laser processing, and in particular to a femtosecond laser near-field enhanced processing auxiliary device and method. Background Art

[0002] In recent years, the extreme size manufacturing of fine structures on the surface of materials can give materials excellent surface properties such as anti-wear and friction reduction, anti-fouling and anti-corrosion, drag reduction and lubrication, which has extremely broad application prospects in the fields of aerospace, biomedicine, marine equipment, etc., and also makes the precision improvement and structural controllability of micro / nano manufacturing extremely important. Femtosecond laser technology is one of the most advanced technologies currently used in micro / nano processing. Because femtosecond lasers have extremely high instantaneous power and extremely short pulse widths, femtosecond lasers can perform high-precision processing on any material without causing significant thermal effects.

[0003] Nano-processing of micro / nano structures on the surface of materials has always been the focus and difficulty in the field of femtosecond laser micro / nano manufacturing. Commercial femtosecond laser processing equipment is limited by the size of the focused laser and the diffraction resolution (about half the laser wavelength), making it difficult to further improve the processing resolution of micro / nano manufacturing beyond the diffraction limit. Unlike ordinary pulsed lasers (nanosecond or picosecond pulses), femtosecond lasers have extremely high instantaneous power, and with the help of nanoparticles or structures, it is very easy to produce near-field enhancement effects, that is, to enhance the light field ablation effect at a spatial scale beyond the diffraction limit, thereby achieving nanoscale processing and manufacturing. Traditional nanoparticles that assist near-field enhancement usually load nanoparticles on the processed samples through two steps: substrate hydrophilization treatment and nanoparticle spin coating. However, sample preparation is required for different samples, which not only changes the surface wettability, but also requires more nanoparticles in the preparation process, which easily leads to material waste. In addition, the nanoparticles spin-coated on the sample are difficult to disperse evenly, and the gaps between particles are difficult to maintain consistency, resulting in poor controllability and processing repeatability. Summary of the invention

[0004] The problem solved by the invention is to provide a femtosecond laser near-field enhanced processing auxiliary device which can save materials and improve controllability and repeatability.

[0005] In order to solve the above problems, the present invention provides a femtosecond laser near-field enhanced processing auxiliary device, comprising a first air inlet array, a second air inlet array and a processing platform, wherein the first air inlet array and the second air inlet array are both located on the processing platform, and the processing platform is used to place a flexible sample to be processed, the first air inlet array and the second air inlet array are arranged opposite to each other, and a femtosecond laser processing area is formed between the first air inlet array and the second air inlet array;

[0006] The first air intake array and the second air intake array each include at least one air intake pipe, at least one air intake pipe support module and at least one micro-nano particle microtube, one end of the air intake pipe is connected to the air intake pipe support module, the air intake pipe support module is provided with an air intake through-hole, and the air intake pipe and the micro-nano particle microtube are respectively located on both sides of the air intake pipe support module, the air intake pipe and the micro-nano particle microtube are both arranged horizontally, and the extension directions of the air intake pipe and the micro-nano particle microtube are perpendicular to each other, the micro-nano particle microtube is provided with openings on one side close to the air intake pipe and on the other side away from the air intake pipe, and one end of the air intake pipe is connected with the opening of the micro-nano particle microtube through the air intake through-hole;

[0007] The micro-nano particle microtubes in the first air intake array and the second air intake array are close to each other, and the air intake tubes in the first air intake array and the second air intake array are far away from each other.

[0008] Preferably, the femtosecond laser near-field enhanced processing auxiliary device also includes a first gas circulation module and a second gas circulation module, and the first gas circulation module and the second gas circulation module are both arranged on the processing platform, respectively arranged on both sides of the femtosecond laser processing area, and the arrangement direction of the first gas circulation module and the second gas circulation module is perpendicular to the arrangement direction of the first air inlet array and the second air inlet array; wherein, the first gas circulation module is used to blow air to the processing platform, and the second gas circulation module is used to absorb dust from the processing platform.

[0009] Preferably, the diameter of the micro-nano particle microtube is 50-100 μm, the length is 60-150 μm, and the width of the opening of the micro-nano particle microtube away from the air inlet pipe is 5-40 μm.

[0010] Preferably, the processing platform is a three-axis adjustable displacement platform.

[0011] Preferably, it also includes a blocking baffle, which is arranged at both ends of the extension direction of the micro-nano particle microtube.

[0012] The present invention places a flexible sample to be processed on a processing platform, forms a femtosecond laser processing area through a first air inlet array and a second air inlet array, and can realize femtosecond laser near-field enhanced processing of the flexible sample to be processed. The first air inlet array and the second air inlet array are arranged relatively to each other, and both include at least one air inlet pipe, at least one air inlet pipe support module and at least one micro-nano particle microtube. The air inlet pipe is connected to the air inlet pipe support module, and an air inlet through hole is provided on the air inlet pipe support module, which can support the air inlet pipe and enable the gas entering the air inlet pipe to enter the micro-nano particle microtube through the air inlet through hole. The micro-nano particle microtube is provided with openings on the side close to and away from the air inlet pipe, which is convenient for inputting micro-nano particles into the micro-nano particle microtube through the air inlet pipe, and in the process of femtosecond laser near-field enhanced processing, ventilation is made through the air inlet pipe to allow the micro-nano particles to pass through the air inlet through hole. The micro-nano particles in the micro-nano particle microtube are pushed to the opening of the micro-nano particle microtube. There is no need to change the surface wetting state of the flexible sample to be processed. Only a small number of micro-nano particles are needed to realize femtosecond laser near-field enhanced processing, saving materials. In addition, the femtosecond laser near-field enhanced processing auxiliary device can confine the micro-nano particles in the micro-nano particle microtube, and accurately transport the micro-nano particles to the femtosecond laser processing area during the femtosecond laser near-field enhanced processing, thereby ensuring the controllability and repeatability of each processing to the greatest extent. The gas entering through the air inlet pipe can not only limit the micro-nano particles, but also remove the ablated products during the femtosecond laser near-field enhanced processing, and protect the femtosecond laser processing area in the flexible sample to be processed, thereby improving the surface quality and recognition after processing.

[0013] On the other hand, the present invention also provides a femtosecond laser near-field enhanced processing method, which uses the femtosecond laser near-field enhanced processing auxiliary device as described above to perform processing, comprising the following steps:

[0014] Step S1, using a target material to perform gold coating on micron-sized metal powder to obtain micro-nano particles;

[0015] Step S2, placing the flexible sample to be processed on the processing platform and below the first air inlet array and the second air inlet array;

[0016] Step S3, sending the micro-nano particles into the micro-nano particle microtubes in the first air inlet array and the second air inlet array through the air inlet pipes in the first air inlet array and the second air inlet array respectively;

[0017] Step S4, adjusting the height of the processing platform so that the flexible sample to be processed is close to the first air inlet array and the second air inlet array, so that the first air inlet array and the second air inlet array are close to each other, and the flexible sample to be processed is driven to curl between the first air inlet array and the second air inlet array;

[0018] Step S5, air is introduced through the air inlet pipes of the first air inlet array and the second air inlet array to move the micro-nano particles in the micro-nano particle microtubes to an opening away from one side of the air inlet pipe, and the femtosecond laser is turned on to perform femtosecond laser near-field enhanced processing on the flexible sample to be processed.

[0019] Preferably, in step S1, the target material includes one of gold, silver, copper and platinum, and the micron-sized metal powder includes one of gold, silver, copper, iron, nickel, platinum, aluminum, zinc and titanium.

[0020] Preferably, in step S4, the curling height of the flexible sample to be processed is less than or equal to the radius of the micro-nano particle microtube.

[0021] Preferably, in step S5, while performing femtosecond laser near-field enhanced processing on the flexible sample to be processed, the first gas circulation module and the second gas circulation module are turned on to clean the femtosecond laser processing area.

[0022] Preferably, after step S5, the method further includes:

[0023] Step S6, move the first air inlet array and the second air inlet array away from each other, lay the flexible sample to be processed flat, then separate the flexible sample to be processed from the first air inlet array and the second air inlet array, move the processing platform horizontally, and perform femtosecond laser near-field enhanced processing on another processing area of ​​the flexible sample to be processed until the femtosecond laser near-field enhanced processing of all processing areas is completed.

[0024] The beneficial effects of the femtosecond laser near-field enhanced processing method provided by the present invention relative to the prior art are the same as those of the femtosecond laser near-field enhanced processing auxiliary device, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of a femtosecond laser near-field enhanced processing auxiliary device in an embodiment of the present invention;

[0026] Figure 2 Schematic diagram of a partial structure of an array unit in a femtosecond laser near-field enhanced processing auxiliary device according to an embodiment of the present invention Figure 1 ;

[0027] Figure 3 Schematic diagram of a partial structure of an array unit in a femtosecond laser near-field enhanced processing auxiliary device according to an embodiment of the present invention Figure 2 ;

[0028] Figure 4 It is a schematic diagram of the process of the femtosecond laser near-field enhanced processing method in an embodiment of the present invention;

[0029] Figure 5 Schematic diagram of the femtosecond laser near-field enhanced processing process in an embodiment of the present invention.

[0030] Reference numerals:

[0031] 1. First air intake array; 11. Air intake pipe; 12. Air intake pipe support module; 121. Air intake hole; 13. Micro-nano particle microtube; 14. Positioning baffle; 2. Second air intake array; 3. Processing platform; 31. X-axis adjustment knob; 32. Y-axis adjustment knob; 4. First air flow module; 5. Second air flow module. DETAILED DESCRIPTION

[0032] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below.

[0033] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention can be combined with each other. The meanings of the terms "comprising", "including", "containing", and "having" are non-restrictive, that is, other steps and other ingredients that do not affect the results can be added. The above terms cover the terms "consisting of" and "essentially consisting of". Unless otherwise specified, materials, equipment, and reagents are commercially available.

[0034] like Figure 1-3 As shown, an embodiment of the present invention provides a femtosecond laser near-field enhanced processing auxiliary device, comprising a first air inlet array 1, a second air inlet array 2 and a processing platform 3, wherein the first air inlet array 1 and the second air inlet array 2 are both located on the processing platform 3, and the processing platform 3 is used to place a flexible sample to be processed, the first air inlet array 1 and the second air inlet array 2 are arranged opposite to each other, and a femtosecond laser processing area is formed between the first air inlet array 1 and the second air inlet array 2;

[0035] The first air intake array 1 and the second air intake array 2 each include at least one air intake pipe 11, at least one air intake pipe support module 12 and at least one micro-nano particle microtube 13, one end of the air intake pipe 11 is connected to the air intake pipe support module 12, an air intake through hole 121 is provided on the air intake pipe support module 12, and the air intake pipe 11 and the micro-nano particle microtube 13 are respectively located on both sides of the air intake pipe support module 12, the air intake pipe 11 and the micro-nano particle microtube 13 are both horizontally arranged, and the extension directions of the air intake pipe 11 and the micro-nano particle microtube 13 are perpendicular to each other, the micro-nano particle microtube 13 is provided with openings on one side close to the air intake pipe 11 and on the other side away from the air intake pipe 11, and one end of the air intake pipe 11 is connected to the opening of the micro-nano particle microtube 13 through the air intake through hole 121;

[0036] The micro-nano particle microtubes 13 in the first air intake array 1 and the second air intake array 2 are close to each other, and the air intake pipes 11 in the first air intake array 1 and the second air intake array 2 are far away from each other.

[0037] like Figure 1-3 As shown, the first air intake array 1 and the second air intake array 2 have the same structure and both include at least one array unit. The array unit includes an air intake pipe 11, an air intake pipe support module 12 and a micro-nano particle microtube 13. The air intake pipe 11 is used for air intake, and the micro-nano particles enter the micro-nano particle microtube 13 through the air intake, and the micro-nano particles in the micro-nano particle microtube 13 are pushed to the opening of the micro-nano particle microtube. The air intake pipe support module 12 is used to support the air intake pipe 11. An air intake through hole 121 is provided on the air intake pipe support module 12. One end of the air intake pipe 11 is located in the air intake through hole 121. The air intake pipe 11 and the micro-nano particle microtube 13 are respectively located on both sides of the air intake pipe support module 12. The air intake pipe 11 and the micro-nano particle microtube 13 are both The micro-nano particle microtube 13 is arranged horizontally, and the extension directions of the air inlet pipe 11 and the micro-nano particle microtube 13 are perpendicular to each other. The micro-nano particle microtube 13 is provided with openings on the side close to the air inlet pipe 11 and the side away from the air inlet pipe 11. The opening close to the side of the air inlet pipe 11 is used to allow the gas of the air inlet pipe 11 to enter the micro-nano particle microtube 13, and the opening away from the side of the air inlet pipe 11 is used to allow the micro-nano particles in the micro-nano particle microtube 13 to be pushed to the opening of the micro-nano particle microtube, so that the micro-nano particles are exposed to the femtosecond laser, forming the effect of femtosecond laser near-field enhancement. In addition, the gas in the air inlet pipe 11 is discharged from the opening on the micro-nano particle microtube 13 away from the air inlet pipe 11, which can take away the ablation generated during the femtosecond laser processing and improve the femtosecond laser processing quality.

[0038] It should be understood that, according to the size of the femtosecond laser processing area in the flexible sample to be processed, the number of array units in the first air inlet array 1 and the second air inlet array 2 can be adjusted, and the number of array units in the first air inlet array 1 and the second air inlet array 2 corresponds to each other to form a femtosecond laser processing area; in addition, the array units in the first air inlet array 1 and the second air inlet array 2 are modularly designed, that is, the position of a single array unit can be adjusted, and when performing femtosecond laser processing, the processing area of ​​the flexible sample to be processed can be selectively processed in combination with the pattern design.

[0039] The femtosecond laser near-field enhanced processing auxiliary device also includes a first gas circulation module 4 and a second gas circulation module 5. The first gas circulation module 4 and the second gas circulation module 5 are both arranged on the processing platform 3, respectively arranged on both sides of the femtosecond laser processing area, and the arrangement direction of the first gas circulation module 4 and the second gas circulation module 5 is perpendicular to the arrangement direction of the first air inlet array 1 and the second air inlet array 2; wherein the first gas circulation module 4 is used to blow air to the processing platform 3, and the second gas circulation module 5 is used to absorb dust from the processing platform 3.

[0040] During the femtosecond laser near-field enhanced processing, the first gas circulation module 4 and the second gas circulation module 5 are turned on, wherein the first gas circulation module 4 blows air toward the processing platform 3, while the second gas circulation module 5 absorbs dust from the processing platform 3. With the cooperation of the two, the femtosecond laser processing area can be cleaned, thereby improving the quality of the femtosecond laser near-field enhanced processing.

[0041] The diameter of the micro-nano particle microtube 13 is 50-100 μm, the length is 60-150 μm, and the width of the opening of the micro-nano particle microtube 13 away from the air inlet pipe 11 is 5-40 μm, wherein the opening width refers to the length of the opening along the circumference of the micro-nano particle microtube 13. Exemplarily, the micro-nano particle microtube 13 is a glass microtube, and its diameter is 50-100 μm, and the length is 60-150 μm, which can ensure that the micro-nano particles contained in the glass microtube are sufficient for femtosecond laser near-field enhancement processing, and the width of the opening is 5-40 μm, which can ensure that the femtosecond laser is incident on the micro-nano particles during the femtosecond laser processing, forming a femtosecond laser near-field enhancement effect.

[0042] In one embodiment, the processing platform 3 is a three-axis adjustable displacement platform. That is, the processing platform 3 can be adjusted in three directions: up and down, left and right, and front and back. During the femtosecond laser processing, the position of the femtosecond laser remains relatively unchanged, and the processing platform 3 can be adjusted to process different positions of the flexible sample to be processed. Among them, the adjustment in the Z-axis direction (up and down direction) can adjust the defocus amount of the femtosecond laser, and the adjustment in the X-axis and Y-axis directions (left and right and front and back directions) can perform femtosecond laser processing on different areas of the flexible sample to be processed.

[0043] For example, Figure 1 As shown, the X-axis adjustment knob 31 and the Y-axis adjustment knob 32 are used to adjust the position of the processing platform 3 in the left-right direction and the front-back direction respectively.

[0044] The femtosecond laser near-field enhanced processing auxiliary device further comprises a blocking plate 14 , and the blocking plate 14 is arranged at two ends of the micro-nano particle microtube 13 in the extension direction.

[0045] In one embodiment, Figure 1 As shown, one micro-nano particle micro-tube 13 corresponds to a plurality of air intake pipes 11 and air intake pipe support modules 12 , and only blocking baffles 14 are provided at both ends of the micro-nano particle micro-tube 13 in the extending direction.

[0046] In another embodiment, Figure 2-3 As shown, one micro-nano particle micro-tube 13 corresponds to one air intake pipe 11 and one air intake pipe support module 12 , and both ends of each micro-nano particle micro-tube 13 in the extension direction are provided with a blocking baffle 14 .

[0047] By arranging the blocking baffles 14 on both sides of the micro-nano particle microtube 13, when the air intake pipe 11 takes in air, the disordered following movement of the micro-nano particles in the micro-nano particle microtube 13 under the blowing of the airflow can be limited, ensuring that the micro-nano particles are confined to the opening of the micro-nano particle microtube 13 under the action of the airflow, thereby improving the effect of femtosecond laser near-field enhanced processing.

[0048] Another embodiment of the present invention provides a femtosecond laser near-field enhanced processing method, which uses the femtosecond laser near-field enhanced processing auxiliary device as described above to perform processing, such as Figure 4 As shown, the following steps are included:

[0049] Step S1, using a target material to perform gold coating on micron-sized metal powder to obtain micro-nano particles;

[0050] Step S2, placing the flexible sample to be processed on the processing platform 3 and below the first air inlet array 1 and the second air inlet array 2;

[0051] Step S3, sending the micro-nano particles into the micro-nano particle microtubes 13 in the first air inlet array 1 and the second air inlet array 2 through the air inlet pipes 11 in the first air inlet array 1 and the second air inlet array 2 respectively;

[0052] Step S4, adjusting the height of the processing platform 3 so that the flexible sample to be processed is close to the first air inlet array 1 and the second air inlet array 2, so that the first air inlet array 1 and the second air inlet array 2 are close to each other, and the flexible sample to be processed is driven to curl between the first air inlet array 1 and the second air inlet array 2;

[0053] Step S5, air is introduced through the air inlet pipes 11 of the first air inlet array 1 and the second air inlet array 2, so that the micro-nano particles in the micro-nano particle microtubes 13 are moved to an opening away from the side of the air inlet pipes 11, and the femtosecond laser is turned on to perform femtosecond laser near-field enhanced processing on the flexible sample to be processed.

[0054] Wherein, in step S1, the target material includes one of gold, silver, copper and platinum, and the micron-sized metal powder includes one of gold, silver, copper, iron, nickel, platinum, aluminum, zinc and titanium. By using the target material to coat and spray gold on the micron-sized metal powder, a certain amount of nano-sized metal powder can be adhered to the surface of the micron-sized metal powder to form micro-nano particles.

[0055] In step S2, the flexible sample to be processed is placed on the processing platform 3 and is located below the first air inlet array 1 and the second air inlet array 2. In the initial state, the first air inlet array 1 and the second air inlet array 2 are far away from each other, so that the flexible sample to be processed can be curled by adjusting the relative positions of the first air inlet array 1 and the second air inlet array 2.

[0056] In step S3, the micro-nano particles are respectively sent into the micro-nano particle microtubes 13 in the first air inlet array 1 and the second air inlet array 2 through the air inlet pipes 11 in the first air inlet array 1 and the second air inlet array 2, so that the femtosecond laser can be incident on the micro-nano particles during the femtosecond laser processing.

[0057] In step S4, the height of the processing platform 3 is adjusted so that the flexible sample to be processed is close to the first air inlet array 1 and the second air inlet array 2, and the first air inlet array 1 and the second air inlet array 2 are close to each other, which drives the flexible sample to be processed to curl slightly. Specifically, the lower surface of the air inlet pipe support module in the first air inlet array 1 and the second air inlet array 2 is close to the flexible sample to be processed, the lower surface of the air inlet pipe support module 12 is a frosted surface, and the upper surface of the processing platform 3 is a smooth surface. In the process of the first air inlet array 1 and the second air inlet array 2 approaching each other, the air inlet pipe support module 12 can drive the flexible sample to be processed to move, so that the middle area of ​​the flexible sample to be processed is curled between the first air inlet array 1 and the second air inlet array 2.

[0058] Among them, the curling height of the flexible sample to be processed is less than or equal to the radius of the micro-nano particle microtube 13, so that the processing area of ​​the micro-curled flexible sample to be processed is close to the opening of the micro-nano particle microtube 13. During the femtosecond laser processing, under the action of the airflow, the micro-nano particles in the micro-nano particle microtube 13 can be pushed to the opening of the micro-nano particle microtube 13 away from the air inlet pipe 11, thereby improving the effect of femtosecond laser near-field enhancement.

[0059] In step S5, air is introduced through the air inlet pipes 11 of the first air inlet array 1 and the second air inlet array 2, so that the micro-nano particles in the micro-nano particle microtubes 13 are pushed to the opening on the side away from the air inlet pipe 11, and the femtosecond laser is turned on to perform femtosecond laser near-field enhanced processing on the flexible sample to be processed. While performing femtosecond laser processing, the first gas flow module 4 and the second gas flow module 5 are turned on to clean the femtosecond laser processing area.

[0060] The schematic diagram of the femtosecond laser near-field enhanced processing process implemented in the embodiment of the present invention is as follows: Figure 5 As shown, air is respectively introduced through the air inlet pipes 11 of the first air inlet array 1 and the second air inlet array 2, so that the micro-nano particles located in the micro-nano particle microtube 13 are pushed to the opening on the side away from the air inlet pipe 11, and the micro-nano particles partially extend into the femtosecond laser processing area, and the nanoparticles are released. Under the incident action of the femtosecond laser, the near-field enhancement effect is achieved, and the processing area of ​​the curled flexible sample to be processed is located near the opening of the micro-nano particle microtube 13, which can further improve the near-field enhancement effect.

[0061] In one embodiment, the gas introduced into the air inlet pipe is argon gas, which can protect the processing area and improve the quality of femtosecond laser processing.

[0062] After step S5, the method further includes:

[0063] Step S6, move the first air inlet array 1 and the second air inlet array 2 away from each other, lay the flexible sample to be processed flat, then separate the flexible sample to be processed from the first air inlet array 1 and the second air inlet array 2, move the processing platform 3 horizontally, and perform femtosecond laser near-field enhanced processing on another processing area of ​​the flexible sample to be processed until the femtosecond laser near-field enhanced processing of all processing areas is completed.

[0064] That is to say, after completing the femtosecond laser near-field enhanced processing of one processing area, the position of the flexible sample to be processed is adjusted by adjusting the processing platform 3, and the femtosecond laser near-field enhanced processing is performed on other processing areas until the processing of all processing areas is completed.

[0065] Through the above-mentioned femtosecond laser near-field enhanced processing auxiliary device and femtosecond laser near-field enhanced processing method, based on the gas flow field regulation, auxiliary femtosecond laser near-field nanometer-level high-precision processing can be achieved, thereby broadening the application of femtosecond laser extreme size processing; there is no need to change the surface wettability of the flexible sample to be processed, by regulating the gas flow field and setting the array unit, limiting the position of the micro-nano particles in the micro-nano particle microtube, the controllability and repeatability of the femtosecond laser super-diffraction processing can be improved; by controlling the gas introduced into the air inlet pipe 11, the processing area of ​​the flexible sample to be processed can be protected, and the quality of femtosecond laser processing can be improved; by continuously blowing and vacuuming during the processing, the debris, smoke and other substances generated during the femtosecond laser processing can be discharged, and a good cleaning effect is achieved; compared with the Bessel beam shaping method, the device and method can simplify the optical path design, reduce the number of optical devices, improve the compactness of the equipment, and reduce the cost of laser processing equipment on the basis of improving the processing accuracy.

[0066] Although the disclosure is disclosed as above, the protection scope of the disclosure is not limited thereto. Those skilled in the art may make various changes and modifications without departing from the spirit and scope of the disclosure, and these changes and modifications will fall within the protection scope of the present invention.

Claims

1. A femtosecond laser near-field enhanced processing auxiliary device, characterized in that: The invention comprises a first air inlet array (1), a second air inlet array (2) and a processing platform (3), wherein the first air inlet array (1) and the second air inlet array (2) are both located on the processing platform (3), and the processing platform (3) is used to place a flexible sample to be processed, the first air inlet array (1) and the second air inlet array (2) are arranged relative to each other, and a femtosecond laser processing area is formed between the first air inlet array (1) and the second air inlet array (2); The first air intake array (1) and the second air intake array (2) each comprise at least one air intake pipe (11), at least one air intake pipe support module (12) and at least one micro-nano particle micro-tube (13); one end of the air intake pipe (11) is connected to the air intake pipe support module (12); an air intake through hole (121) is provided on the air intake pipe support module (12); and the air intake pipe (11) and the micro-nano particle micro-tube (13) are respectively located on the air intake pipe support module. On both sides of the block (12), the air intake pipe (11) and the micro-nano particle microtube (13) are both arranged horizontally, and the extension directions of the air intake pipe (11) and the micro-nano particle microtube (13) are perpendicular to each other, and the micro-nano particle microtube (13) is provided with openings on the side close to the air intake pipe (11) and the side away from the air intake pipe (11), and one end of the air intake pipe (11) is connected to the opening of the micro-nano particle microtube (13) through the air intake through hole (121); The micro-nano particle microtubes (13) in the first air intake array (1) and the second air intake array (2) are close to each other, and the air intake tubes (11) in the first air intake array (1) and the second air intake array (2) are far away from each other.

2. The femtosecond laser near-field enhanced processing auxiliary device according to claim 1, characterized in that: It also includes a first gas circulation module (4) and a second gas circulation module (5), wherein the first gas circulation module (4) and the second gas circulation module (5) are both arranged on the processing platform (3), respectively arranged on both sides of the femtosecond laser processing area, and the arrangement direction of the first gas circulation module (4) and the second gas circulation module (5) is perpendicular to the arrangement direction of the first gas inlet array (1) and the second gas inlet array (2); wherein the first gas circulation module (4) is used to blow air toward the processing platform (3), and the second gas circulation module (5) is used to absorb dust from the processing platform (3).

3. The femtosecond laser near-field enhanced processing auxiliary device according to claim 1, characterized in that: The diameter of the micro-nano particle microtube (13) is 50-100 μm, the length is 60-150 μm, and the width of the opening of the micro-nano particle microtube (13) on the side away from the air inlet pipe (11) is 5-40 μm.

4. The femtosecond laser near-field enhanced processing auxiliary device according to claim 1, characterized in that: The processing platform (3) is a three-axis adjustable displacement platform.

5. The femtosecond laser near-field enhanced processing auxiliary device according to claim 1, characterized in that: It also comprises a blocking baffle (14), wherein the blocking baffle (14) is arranged at two ends of the extension direction of the micro-nano particle microtube (13).

6. A femtosecond laser near-field enhanced processing method, using the femtosecond laser near-field enhanced processing auxiliary device as described in any one of claims 1 to 5 for processing, characterized in that: The following steps are involved: Step S1, using a target material to perform gold coating on micron-sized metal powder to obtain micro-nano particles; Step S2, placing the flexible sample to be processed on the processing platform (3) and below the first air inlet array (1) and the second air inlet array (2); Step S3, respectively sending the micro / nano particles into the micro / nano particle microtubes (13) in the first air inlet array (1) and the second air inlet array (2) through the air inlet pipes (11) in the first air inlet array (1) and the second air inlet array (2); Step S4, adjusting the height of the processing platform (3) so that the flexible sample to be processed is close to the first air inlet array (1) and the second air inlet array (2), so that the first air inlet array (1) and the second air inlet array (2) are close to each other, and the flexible sample to be processed is driven to curl between the first air inlet array (1) and the second air inlet array (2); Step S5, air is introduced through the air inlet pipes (11) of the first air inlet array (1) and the second air inlet array (2), so that the micro-nano particles in the micro-nano particle microtubes (13) are moved to an opening away from the air inlet pipe (11), and a femtosecond laser is turned on to perform femtosecond laser near-field enhanced processing on the flexible sample to be processed.

7. The femtosecond laser near-field enhanced processing method according to claim 6, characterized in that: In the step S1, the target material includes one of gold, silver, copper and platinum, and the micron-sized metal powder includes one of gold, silver, copper, iron, nickel, platinum, aluminum, zinc and titanium.

8. The femtosecond laser near-field enhanced processing method according to claim 6, characterized in that: In the step S4, the curling height of the flexible sample to be processed is less than or equal to the radius of the micro-nano particle microtube (13).

9. The femtosecond laser near-field enhanced processing method according to claim 6, characterized in that: In the step S5, while performing femtosecond laser near-field enhanced processing on the flexible sample to be processed, the first gas circulation module (4) and the second gas circulation module (5) are turned on to clean the femtosecond laser processing area.

10. The femtosecond laser near-field enhanced processing method according to claim 6, characterized in that: After step S5, the method further includes: Step S6, move the first air inlet array (1) and the second air inlet array (2) away from each other, lay the flexible sample to be processed flat, then separate the flexible sample to be processed from the first air inlet array (1) and the second air inlet array (2), move the processing platform (3) horizontally, and perform femtosecond laser near-field enhanced processing on another processing area of ​​the flexible sample to be processed, until the femtosecond laser near-field enhanced processing of all processing areas is completed.

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