Material tape support device, double-sided roll-to-roll exposure machine, and exposure method

Abstract

The present application provides a kind of material belt support device, double-sided roll-to-roll exposure machine and exposure method, including rack, first horizontal guide rail and second horizontal guide rail are arranged in length direction up and down;First adsorption component is arranged in the middle part of rack, the first adsorption component can be moved along the travel of first horizontal guide rail and is adsorbed to substrate;Second adsorption component is arranged in the middle part of rack, the second adsorption component can be moved along the travel of second horizontal guide rail and is adsorbed to substrate;And end clamping mechanism is arranged in the length direction both ends of rack, and the end clamping mechanism is respectively clamped to the feed end and the receiving end of substrate.Through the adsorption component of support effect is set in the middle part of substrate suspension, substrate can also be adsorbed, and end clamping mechanism is set in the both ends of substrate, so that substrate is effectively limited during exposure, avoid vibration and displacement due to the movement of precision motion platform during exposure.

Description

Technical Field

[0001] This invention relates to the field of laser direct writing exposure technology, specifically to a tape support device, a double-sided roll-to-roll exposure machine, and an exposure method. Background Technology

[0002] Traditional double-sided exposure machines use glass supports underneath the substrate (also known as the feed strip) to ensure the substrate is flat and within the focal depth range of the exposure lens for optimal exposure. While glass supports meet the exposure requirements, dust and dirt inevitably accumulate on the glass, and cleaning is difficult during the exposure process, leading to a decrease in product yield.

[0003] Double-sided exposure machines use unwinding and winding machines on both sides to tighten and straighten the substrate roll, keeping it suspended in the air. This avoids the dust and dirt that can occur with glass supports. However, because the substrate is a soft material, and the suspended portion in the middle is generally quite long, it inevitably sags and deforms at the center of the suspension under its own weight, affecting accuracy. Furthermore, vibrations are unavoidable during platform movement. Without any fixing measures during exposure, the vibrations from platform movement and the slight vibrations of the substrate itself will all affect exposure accuracy.

[0004] If the substrate under the exposure area is to be supported, when the substrate is exposed in multiple strips, in order to achieve a complete exposure operation, the substrate above and below the exposed area needs to be unobstructed, which places higher demands on the support device. Summary of the Invention

[0005] This invention provides a tape support device, a double-sided roll-to-roll exposure machine, and an exposure method that can reduce vibration and displacement of roll-to-roll substrates during exposure.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0007] A strip support device, comprising:

[0008] The frame has a first horizontal guide rail and a second horizontal guide rail arranged vertically along its length.

[0009] A first adsorption component is disposed in the middle of the frame, which can move along the stroke of the first horizontal guide rail and adsorb the substrate;

[0010] A second adsorption assembly is disposed in the middle of the frame, which is capable of moving along the stroke of the second horizontal guide rail and adsorbing the substrate; and

[0011] An end clamping mechanism is provided at both ends of the frame along its length to clamp the feeding end and the receiving end of the substrate respectively.

[0012] Furthermore, the first adsorption assembly includes a plurality of first crossbeams with adsorption holes for supporting the middle part of the suspended substrate. A pair of first side beams are provided at both ends of the plurality of first crossbeams. A first mounting crossbeam is provided at one end of the first side beam. The first mounting crossbeam is fixedly connected to the telescopic end of the first drive mechanism. The first drive mechanism can drive the first side beam to move along the first horizontal guide rail.

[0013] Furthermore, the second adsorption assembly includes a plurality of second crossbeams with adsorption holes for supporting the suspended middle portion of the substrate. A pair of second side beams are provided at both ends of the plurality of second crossbeams. A second mounting crossbeam is provided at the end of the second side beam away from the first mounting crossbeam. The second mounting crossbeam is fixedly connected to the telescopic end of the second drive mechanism. The second drive mechanism can drive the second side beam to move along the second horizontal guide rail.

[0014] Furthermore, the end clamping mechanism includes an upper roller and a lower roller arranged vertically, and a clamping cylinder for driving the upper and lower rollers to clamp.

[0015] The present invention also provides a double-sided roll-to-roll exposure machine, including an unwinding device and a rewinding device for conveying a substrate, and a material strip support device as described above for tensioning and suspending the substrate, wherein an upper exposure component and a lower exposure component are distributed above and below the material strip support device.

[0016] The present invention also provides a double-sided roll-to-roll exposure method using the above-mentioned strip support device, wherein the substrate includes a first strip, a second strip, and a third strip in the exposure area, and the double-sided roll-to-roll exposure method includes the following steps:

[0017] S1. The first adsorption component adsorbs the second strip, the second adsorption component adsorbs the third strip, and then the first strip is exposed.

[0018] S2. The second adsorption component is kept adsorbing the third strip, the first adsorption component moves under the first strip to adsorb the first strip, and then the second strip is exposed.

[0019] S3. Keep the first adsorption component adsorbing the first strip, move the second adsorption component under the second strip to adsorb the second strip, and then expose the third strip.

[0020] S4. The first adsorption component and the second adsorption component move to the second and third strips respectively to expose the next set of substrates.

[0021] As can be seen from the above technical solutions, the present invention has the following beneficial effects:

[0022] 1) By setting an adsorption component that can provide support in the middle of the suspended substrate, the substrate can also be adsorbed. Furthermore, end clamping mechanisms are set at both ends of the substrate, thereby effectively limiting the substrate during exposure and preventing vibration and displacement of the roll-to-roll substrate due to the movement of the precision motion platform, thus improving exposure accuracy.

[0023] 2) Two independent adsorption components are used so that one adsorption component always adsorbs the substrate during the exposure process, avoiding the slight movement of the substrate during the exposure process. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the material strip support device of the present invention;

[0025] Figure 2 This is a schematic diagram of the structure of the first adsorption component in this invention;

[0026] Figure 3 This is a schematic diagram of the end clamping mechanism in this invention;

[0027] Figure 4 This is a schematic diagram of the overall structure of the double-sided roll-to-roll exposure machine of the present invention;

[0028] Figure 5 This is a flowchart of the double-sided roll-to-roll exposure method of the present invention;

[0029] Figure 6 This is a schematic diagram of the multiple states of the adsorption component in the double-sided roll-to-roll exposure method of the present invention. Detailed Implementation

[0030] A preferred embodiment of the present invention will now be described in detail with reference to the accompanying drawings.

[0031] The tape support device of this invention is used in a roll-to-roll laser direct-write exposure machine to straighten and clamp the substrate, preventing minor movement of the substrate during exposure. The tape support device achieves the tensioning effect during exposure by supporting and adsorbing the suspended portion in the middle of the substrate and clamping the ends of the substrate.

[0032] like Figure 1 and 2As shown, the material strip support device 30 includes a frame 31, on which a first horizontal guide rail 32 and a second horizontal guide rail 33 are arranged vertically along the length direction. A first adsorption component is provided in the middle of the frame 31, which can move along the stroke of the first horizontal guide rail 32 and adsorb the substrate; a second adsorption component is also provided in the middle of the frame 31, which can move along the stroke of the second horizontal guide rail 33 and adsorb the substrate; end clamping mechanisms 80 are provided at both ends of the frame 31, which clamp the feeding end and receiving end of the substrate respectively.

[0033] The first adsorption assembly includes multiple parallel first crossbeams 341, a pair of first side beams 342, a first mounting crossbeam 343, and a first drive mechanism 344. The pair of first side beams 342 are fixed to both ends of the multiple first crossbeams 341. The first drive mechanism 344 can drive the first side beams 342 to move along the first horizontal guide rail 32. The telescopic end of the first drive mechanism 344 is fixedly connected to the first mounting crossbeam 343, which is located at one end of the first side beam 342. The fixed end of the first drive mechanism 344 is connected to the frame 31.

[0034] The second adsorption assembly includes a plurality of second crossbeams 351 for supporting the middle part of the substrate that is suspended in the air. A pair of second side beams 352 are provided at both ends of the plurality of second crossbeams. The second side beams are provided with a second mounting beam 353 at the end away from the first mounting crossbeam 343. The second mounting beams are fixedly connected to the telescopic end of the second drive mechanism 354. The second drive mechanism 354 can drive the second side beams 352 to move along the second horizontal guide rail 33.

[0035] The first drive mechanism 344 and the second drive mechanism 354 can be designed in various forms, such as a cylinder push rod structure or a motor lead screw structure. This embodiment uses a motor lead screw structure to avoid impacts during the drive process that could affect the stability of the conveyor belt.

[0036] Both the first crossbeam 341 and the second crossbeam 351 have a support surface that supports the middle part of the suspended substrate. The combination of multiple first crossbeams and multiple second crossbeams can avoid the problem of large sagging deformation under gravity due to the large span of the substrate.

[0037] In this invention, both the first crossbeam 341 and the second crossbeam 351 have adsorption holes 3411 for vacuum suction, allowing the substrate to be adsorbed onto the crossbeams during exposure, thus preventing minute movement of the substrate during the exposure process and the movement of the adsorption assembly. In this embodiment, the first and second crossbeams are staggered, and the vacuum device that produces the adsorption effect is also staggered.

[0038] like Figure 3As shown, the end clamping mechanism 80 includes an upper roller 81 and a lower roller 82 arranged vertically, and a clamping cylinder for driving the upper and lower rollers to clamp together. The upper and lower rollers clamp the feeding end and receiving end of the substrate by merging. The clamping cylinders used in this invention include a first clamping cylinder 83 and a second clamping cylinder 84 for driving the upper roller, and a third clamping cylinder 85 and a fourth clamping cylinder 86 for driving the lower roller. The upper and lower rollers are respectively provided with a first mounting plate 87 and a second mounting plate 88 at both ends. The first clamping cylinder 83 and the third clamping cylinder 85 are respectively provided on both sides of the first mounting plate 87, and the second clamping cylinder 84 and the fourth clamping cylinder 86 are respectively provided on both sides of the second mounting plate 88.

[0039] like Figure 4 As shown, the present invention also provides a double-sided roll-to-roll exposure machine, including an upper exposure assembly 10, a lower exposure assembly 20 and a strip support device 30 located at the middle exposure station, and an unwinding device 40 and a rewinding device 50 located on both sides of the exposure station. The upper exposure assembly 10 and the lower exposure assembly 20 are arranged above and below the strip support device. The strip support device 30 is used to tension and suspend the substrate, so that the substrate is in a taut and straightened state. The unwinding device 40 and the rewinding device 50 allow the substrate to pass through the exposure station, and the upper and lower exposure assemblies complete the exposure of the pattern.

[0040] The material belt support device also includes a lifting component 70, which is used to adjust the height of the first adsorption component 34 and the second adsorption component 35 so that the substrate height is at the focal surface of the upper and lower exposure components.

[0041] This invention employs two independent adsorption components, ensuring that one adsorption component consistently adsorbs the substrate during exposure, thus preventing minute movements of the substrate. When the first driving mechanism 344 moves the first crossbeam 341 of the first adsorption component, the first crossbeam 341 does not generate adsorption force, while the second crossbeam 351 does. Conversely, when the second driving mechanism 354 moves the second crossbeam 351 of the second adsorption component, the second crossbeam 351 does not generate adsorption force, while the first crossbeam 341 does. Therefore, this invention also provides a double-sided roll-to-roll exposure method based on the aforementioned tape support device. In this embodiment, a set of substrates in the exposure area includes a first strip 91, a second strip 92, and a third strip 93. Each strip needs to be exposed separately before the next set of substrates is exposed. (Refer to...) Figure 5 and 6 The double-sided roll-to-roll exposure method specifically includes the following steps:

[0042] S1. The first crossbeam 341 is used to adsorb the second strip 92, the second crossbeam 351 is used to adsorb the third strip 93, and then the first strip 91 is exposed.

[0043] S2. After the first strip 91 is exposed, the second crossbeam 351 continues to hold the third strip 93. At this time, the first drive mechanism 344 drives the first crossbeam 341 to move under the first strip 91 to hold the first strip, and then exposes the second strip 92.

[0044] S3. After the second strip 92 is exposed, the first crossbeam 341 continues to hold the first strip 91. At this time, the second drive mechanism 354 drives the second crossbeam 351 to move under the second strip 92 to hold the second strip. Then the third strip 93 is exposed.

[0045] After the exposure of the third strip 93 is completed in S4, the first crossbeam 341 and the second crossbeam 351 need to be reset and restored to the state of S1. That is, they need to be moved under the second strip 92 and the third strip 93 respectively, and then the next set of substrates will be exposed.

[0046] The above-described embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various modifications and improvements made by those skilled in the art to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the protection scope defined by the claims of the present invention.

Claims

1.A double-sided roll-to-roll exposure method using a material belt supporting device, wherein a substrate includes a first strip, a second strip and a third strip in an exposure area, characterized in that: the material belt supporting device includes a frame, a first horizontal guide rail and a second horizontal guide rail arranged vertically along the length direction of the frame, a first adsorption assembly arranged in the middle of the frame and capable of moving along the stroke of the first horizontal guide rail and adsorbing the substrate, a second adsorption assembly arranged in the middle of the frame and capable of moving along the stroke of the second horizontal guide rail and adsorbing the substrate, and an end clamping mechanism arranged at both ends of the length direction of the frame and clamping the feeding end and the receiving end of the substrate respectively; the first adsorption assembly includes a plurality of first cross beams with adsorption holes for supporting the suspended middle part of the substrate, and a pair of first side edge beams arranged at both ends of the plurality of first cross beams, one end of the first side edge beam is provided with a first mounting cross beam fixedly connected with the extension end of a first driving mechanism, and the first driving mechanism can drive the first side edge beam to move along the first horizontal guide rail; the second adsorption assembly includes a plurality of second cross beams with adsorption holes for supporting the suspended middle part of the substrate, and a pair of second side edge beams arranged at both ends of the plurality of second cross beams, one end of the second side edge beam away from the first mounting cross beam is provided with a second mounting cross beam fixedly connected with the extension end of a second driving mechanism, and the second driving mechanism can drive the second side edge beam to move along the second horizontal guide rail; the double-sided roll-to-roll exposure method includes the following steps: S1, the first adsorption assembly adsorbs the second strip, the second adsorption assembly adsorbs the third strip, and then the first strip is double-sidedly exposed; S2, the second adsorption assembly keeps adsorbing the third strip, the first adsorption assembly moves to adsorb the first strip below, and then the second strip is double-sidedly exposed; S3, the first adsorption assembly keeps adsorbing the first strip, the second adsorption assembly moves to adsorb the second strip below, and then the third strip is double-sidedly exposed; S4, the first adsorption assembly and the second adsorption assembly respectively move to the second strip and the third strip below to expose the next group of substrates; the end clamping mechanism includes an upper roller and a lower roller arranged vertically, and a clamping cylinder for driving the upper and lower rollers to clamp; the clamping cylinder includes a first clamping cylinder and a second clamping cylinder for driving the upper roller to move, and a third clamping cylinder and a fourth clamping cylinder for driving the lower roller to move, wherein the upper and lower rollers are respectively provided with a first mounting plate and a second mounting plate at both ends, the first clamping cylinder and the third clamping cylinder are respectively arranged on both sides of the first mounting plate, and the second clamping cylinder and the fourth clamping cylinder are respectively arranged on both sides of the second mounting plate. ​ ​ ​ ​ ​ ​ ​ 2. The double-sided roll-to-roll exposure method according to claim 1, wherein ​ 3. The double-sided roll-to-roll exposure method according to claim 2, wherein ​

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