A vacuum suction cup fixture

Abstract

The present invention discloses a vacuum suction cup jig, comprising a chassis, a first channel provided therein, one end of which is connected to the outside of the chassis; a circumferential movable block, the circumferential movable block being slidably connected to the chassis in the circumferential direction of the chassis, the circumferential movable block being provided with a second channel, one end of which is connected to the other end of the first channel; and a radial movable block, the radial movable block being slidably connected to the circumferential movable block in the radial direction of the chassis, the radial movable block being provided with a third channel. The present invention adopts a suction cup fixation method instead of a wax fixation method, and the silicon product and the suction cup jig are connected and fixed by vacuum. It is only necessary to control the flatness and parallelism of the contact surface between the jig and the product to achieve a seamless connection between the silicon product and the jig, thereby ensuring the accuracy in subsequent processing.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor silicon material manufacturing, and in particular to a vacuum suction cup jig. Background Art

[0002] With the growth of the silicon product market, customers' demand for high-standard silicon products is also increasing. The inner and outer diameter requirements are only the most basic requirements. Silicon products have also added other shapes, such as holes, threads, steps, etc.

[0003] In the prior art, quartz ingot plate jigs are mostly used when processing silicon products. The silicon product and the jig are bonded together by wax sticking. The installation before processing and the disassembly after processing take up a certain number of steps and require certain labor costs, which affects the processing efficiency. In addition, this method relies on manual labor, so the accuracy of the gap at the bonding point cannot be guaranteed, and it is difficult to ensure the flatness of the silicon product installed on the jig, which affects the accuracy in subsequent processing. Furthermore, the distance between the silicon product and the jig is relatively close under the wax sticking method. For silicon products of various shapes, the wax sticking method cannot support and fix the silicon product at appropriate points to ensure that there are no problems during processing and shaping. For example, the tool and the jig collide when processing holes, threads, steps, etc. Summary of the Invention

[0004] In order to solve at least one of the technical problems mentioned in the background technology, the purpose of the present invention is to provide a vacuum suction cup fixture to improve the fixing accuracy of silicon products and the fixture and simplify the installation and fixing process of silicon products and the fixture.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A vacuum suction cup fixture comprises a chassis, a first channel is provided in the chassis, one end of the first channel is connected to the outside of the chassis; a circumferential movable block is slidably connected to the chassis in the circumferential direction of the chassis, a second channel is provided on the circumferential movable block, one end of the second channel is connected to the other end of the first channel; a radial movable block is slidably connected to the circumferential movable block in the radial direction of the chassis; a third channel is provided in the radial movable block, one end of the third channel is connected to the other end of the second channel, and a suction port is provided at the upper end of the radial movable block for adsorbing silicon products, and the suction port is connected to the other end of the third channel.

[0007] Compared with the existing technology, the present invention has the following advantages: the silicon product and the suction cup fixture are fixed by vacuum instead of the wax fixation method, and the silicon product and the suction cup fixture are connected and fixed by vacuum. It only needs to control the flatness and parallelism of the contact surface between the fixture and the product to achieve seamless connection between the silicon product and the fixture, thus ensuring the accuracy in subsequent processing;

[0008] The suction cup fixture uses an external air pump to control the suction effect. Compared with the wax sticking method, it can completely achieve the rapid installation and removal of silicone products and fixtures, reducing a lot of working hours, reducing labor costs, and improving production efficiency.

[0009] The adjustable position of the circumferential movable block and the radial movable block can realize the circumferential and radial position adjustment of the suction port on the fixture, so that suitable points can be found for effective support and fixation of silicone products of different shapes, with a wide range of applications.

[0010] By fixing the suction port in a small area, space is reserved on one side for the inner and outer diameters of disk-shaped, ring-shaped and other silicon products, so that the inner and outer diameters can be left suspended. During processing, the product can be processed directly without reserving dimensions, and there is no need to add manual grinding steps later, thus reducing the risk of silicon product scrapping.

[0011] The mobility of the circumferential movable blocks can reserve gaps between adjacent circumferential movable blocks. When performing operations such as drilling at the corresponding positions of the silicon product above the gaps, the risk of the tool processing hitting the fixture platform can be avoided.

[0012] Furthermore, an arc groove is provided on the chassis, and a sliding portion is provided on the lower side of the circumferential movable block. The sliding portion is located in the arc groove and is slidably connected to the arc groove, thereby achieving a stable circumferential movement effect between the circumferential movable block and the chassis.

[0013] Furthermore, the first channel has a first opening connected to the bottom wall of the arc groove, and the second channel has a second opening connected to the lower wall of the sliding part. The lower wall of the sliding part is in contact with the bottom wall of the arc groove. In the vertical projection position, the first opening is located within the range of the second opening, and the connection effect between the first opening and the second opening is guaranteed within the moving range of the circumferential movable block.

[0014] Furthermore, the vertical projection of the first opening is a hole-shaped, and the vertical projection of the second opening is an arc extending along the circumference of the chassis. The arc corresponds to the moving trajectory of the circumferential movable block, so that it has the ability to maintain covering the first opening.

[0015] Furthermore, a first rubber ring for sealing is provided around the circumference of the second opening to enhance the sealing performance.

[0016] Furthermore, a sliding groove is provided on the circumferential movable block, and the radial movable block is slidably connected to the sliding groove, thereby achieving a stable radial movement effect between the radial movable block and the chassis.

[0017] Furthermore, the second channel has a third opening connected to the bottom wall of the slide groove, and the third channel has a fourth opening connected to the lower wall of the radial movable block. The lower wall of the radial movable block is in contact with the bottom wall of the slide groove. In the vertical projection position, the third opening is located within the range of the fourth opening. Within the moving range of the radial movable block, the connection effect between the third opening and the fourth opening is guaranteed.

[0018] Furthermore, the vertical projection of the third opening is hole-shaped, and the vertical projection of the fourth opening is a straight line extending radially along the chassis, which corresponds to the moving trajectory of the radial movable block, enabling it to maintain coverage of the third opening.

[0019] Furthermore, a second rubber ring for sealing is provided around the circumference of the fourth opening to enhance the sealing performance.

[0020] Furthermore, it also includes a pressure plate, and a flange is provided on the circumferential side of the radial movable block. The pressure plate is fixed to the upper wall of the circumferential movable block and rests on the upper side of the flange to ensure that the lower wall of the radial movable block is tightly attached to the bottom wall of the slide groove to ensure an airtight effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0022] Figure 2 for Figure 1 A schematic diagram of the structure after some components are hidden;

[0023] Figure 3 It is a schematic diagram of the structure of the circumferential movable block and the radial movable block;

[0024] Figure 4 for Figure 3 Schematic diagram of the cross-section structure in ;

[0025] Figure 5 It is a structural diagram of the circumferential movable block;

[0026] Figure 6 for Figure 5 A structural diagram from another perspective;

[0027] Figure 7 It is a structural diagram of the radial movable block;

[0028] Figure 8 for Figure 7 A structural diagram from another perspective;

[0029] Figure 9 for Figure 1 A schematic diagram of the positional relationship between the first opening and the second opening in the vertical projection direction;

[0030] Figure 10 for Figure 1 Schematic diagram of the positional relationship between the third opening and the fourth opening in the vertical projection direction.

[0031] In the figure: 1. chassis; 11. arc groove; 12. first opening; 13. side opening; 2. circumferential movable block; 21. sliding portion; 22. slide groove; 23. second opening; 24. third opening; 25. first rubber ring; 26. pressure plate; 3. radial movable block; 31. fourth opening; 32. suction port; 33. flange; 34. second rubber ring. DETAILED DESCRIPTION

[0032] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0033] See also Figure 1 This embodiment provides a vacuum suction cup fixture, including a chassis 1, a circumferential movable block 2 mounted on the chassis 1, and a radial movable block 3 mounted on the circumferential movable block 2. The radial movable block 3 has a suction port 32 for sucking and fixing silicon products. One circumferential movable block 2 and one radial movable block 3 form a group. Multiple groups are provided on the chassis 1, which facilitates arbitrary adjustment of the position of each group to adapt to silicon products of various shapes and sizes, including but not limited to plate-shaped, disc-shaped, ring-shaped, etc.

[0034] Specifically, refer to Figure 2 , an arc groove 11 is provided on the chassis 1, and the arc groove 11 is arranged along the circumference of the chassis 1. In this embodiment, three arc grooves 11 are arranged in a central annular array of the chassis 1. A sliding portion 21 is provided on the lower side of the circumferential movable block 2, and the sliding portion 21 extends downward into the arc groove 11, so that the circumferential movable block 2 can slide circumferentially in the arc groove 11. In this embodiment, the number of the circumferential movable blocks 2 is preferably six, and every two are located in one of the slide grooves 22; in use, the position of each of the circumferential movable blocks 2 is adjusted according to the size and shape of the silicon product, wherein, by reserving a gap between adjacent circumferential movable blocks 2, it is convenient for the tool to continue downward processing at this position when processing the silicon product, avoiding damage caused by collision with the tool.

[0035] Reference Figure 3 and Figure 5The radial movable block 3 is installed on the circumferential movable block 2. A slide groove 22 is opened on the circumferential movable block 2 along the radial direction of the chassis 1. The radial movable block 3 extends into the slide groove 22 and can move radially along the slide groove 22, thereby adjusting the radial position of the suction port 32 thereon, and then cooperating with the circumferential movable block 2 to adjust the position of the suction port 32 in the circumferential direction, so that the entire vacuum suction cup of this embodiment can be flexibly adjusted according to the size and shape of the silicon product, so as to provide effective support and fixing effect on the bottom of the silicon product at multiple points.

[0036] Reference Figure 1 and Figure 7 The suction port 32 is used to suck up the silicon product, that is, after the plane on the silicon product is in contact with the suction port 32, the suction force is generated by vacuuming the inside of the suction port 32 to fix the silicon product, that is, an external air pump is required to perform the suction function. The vacuum suction cup of this embodiment also needs to be provided with an air guide channel connected to the suction port 32 for the air pump to suck. However, due to the mobility of the chassis 1, the circumferential movable block 2, and the radial movable block 3, the air guide channel must ensure both an effective passage and good air tightness, so there are certain requirements for its setting.

[0037] Specifically, first, refer to Figure 2 A first channel is provided in the suction cup, one end of the first channel forms a side opening 13 on the side wall of the suction cup for connection to an external air pump, and the other end is connected to the bottom wall of the arc groove 11 to form a first opening 12, and the first opening 12 is hole-shaped in the vertical projection direction.

[0038] Secondly, refer to Figure 2 、 5 6. A second channel is provided in the circumferential movable block 2, one end of which is connected to the lower wall of the sliding portion 21 to form a second opening 23, and the second opening 23 is an arc extending along the circumference of the chassis 1 in the vertical projection direction. The lower wall of the sliding portion 21 is attached to the bottom wall of the arc groove 11, so that the first opening 12 is connected to the second opening 23, and within the moving range of the circumferential movable block 2, the first opening 12 is always located within the range of the second opening 23 in the vertical projection direction. Figure 9 As shown, effective passage and good airtightness are guaranteed.

[0039] The other end of the second channel is connected to the bottom wall of the chute 22 to form a third opening 24, and the third opening 24 is a hole in the vertical projection. Figure 10 shown.

[0040] Furthermore, refer to Figure 4 、7 8. A third channel is provided in the radial movable block 3, one end of the third channel is connected to the lower wall of the radial movable block 3 to form a fourth opening 31, and the other end is connected to the suction port 32. The fourth opening 31 is a straight line extending radially along the chassis 1 in the vertical projection direction. The lower wall of the radial movable block 3 is attached to the bottom wall of the chute 22, so that the third opening 24 is connected to the fourth opening 31, and within the moving range of the radial movable block 3, the third opening 24 is always located within the range of the fourth opening 31 in the numerical vertical projection direction. Figure 4 、 10 As shown, effective passage and good air tightness are guaranteed.

[0041] In summary, no matter how the positions of the circumferential movable block 2 and the radial movable block 3 are adjusted, an effective suction effect can be formed at the suction port 32 after the air pump is started.

[0042] Furthermore, for the surface-to-surface fit between the lower wall of the sliding portion 21 and the bottom wall of the arc groove 11, and the surface-to-surface fit between the lower wall of the radial movable block 3 and the bottom wall of the slide groove 22, since the flatness of the plane is limited by the process, air leakage is inevitable during suction. Therefore, in this embodiment, a first rubber ring 25 is provided around the circumference of the second opening 23, and the first rubber ring 25 abuts against the bottom wall of the arc groove 11 to form a more effective sealing effect on the circumference of the first opening 12 and the second opening 23; similarly, a second rubber ring 34 is provided around the circumference of the fourth opening 31, and the second rubber ring 34 abuts against the bottom wall of the slide groove 22 to form a more effective sealing effect on the circumference of the third opening 24 and the fourth opening 31.

[0043] It should be added that the radial movable block 3 is a movable part. In order to ensure its close fit with the chute 22 and ensure air tightness, refer to Figure 3 As shown, in this embodiment, a pressure plate 26 is further provided on the upper wall of the circumferential movable block 2, and the pressure plate 26 is fixed to the circumferential movable block 2. A flange 33 is provided on the circumferential side of the radial movable block 3. The pressure plate 26 presses against the flange 33 on the upper side to press the radial movable block 3 to the bottom of the slide groove 22, and maintains the compression effect during the movement of the radial movable block 3 to ensure air tightness.

[0044] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations that come within the meaning and range of equivalents of the claims be embraced therein.

Claims

1. A vacuum suction cup fixture, comprising a chassis (1), characterized in that: The chassis (1) is provided with a first channel, one end of which is connected to the outside of the chassis (1); the chassis (1) further includes a circumferential movable block (2), the circumferential movable block (2) is slidably connected to the chassis (1) in the circumferential direction of the chassis (1), the circumferential movable block (2) is provided with a second channel, one end of which is connected to the other end of the first channel; the chassis (1) further includes a radial movable block (3), the radial movable block (3) is slidably connected to the circumferential movable block (2) in the radial direction of the chassis (1); the radial movable block (3) is provided with a third channel, one end of which is connected to the other end of the second channel, the upper end of the radial movable block (3) is provided with a suction port (32) for adsorbing silicon products, and the suction port (32) is connected to the other end of the third channel.

2. A vacuum suction cup fixture according to claim 1, characterized in that: An arc groove (11) is provided on the chassis (1), and a sliding portion (21) is provided on the lower side of the circumferential movable block (2). The sliding portion (21) is located in the arc groove (11) and is slidably connected to the arc groove (11).

3. The vacuum suction cup fixture according to claim 2, characterized in that: The first channel has a first opening (12) connected to the bottom wall of the arc groove (11), and the second channel has a second opening (23) connected to the lower wall of the sliding portion (21). The lower wall of the sliding portion (21) is in contact with the bottom wall of the arc groove (11), and in a vertical projection position, the first opening (12) is located within the range of the second opening (23).

4. The vacuum suction cup fixture according to claim 3, characterized in that: The vertical projection of the first opening (12) is in the shape of a hole, and the vertical projection of the second opening (23) is in the shape of an arc extending along the circumference of the chassis (1).

5. A vacuum suction cup fixture according to claim 3 or 4, characterized in that: A first rubber ring (25) for sealing is provided around the circumference of the second opening (23).

6. The vacuum suction cup fixture according to claim 1, characterized in that: A sliding groove (22) is provided on the circumferential movable block (2), and the radial movable block (3) is slidably connected to the sliding groove (22).

7. The vacuum suction cup fixture according to claim 6, characterized in that: The second channel has a third opening (24) connected to the bottom wall of the slide groove (22), and the third channel has a fourth opening (31) connected to the lower wall of the radial movable block (3). The lower wall of the radial movable block (3) is in contact with the bottom wall of the slide groove (22), and in terms of the vertical projection position, the third opening (24) is located within the range of the fourth opening (31).

8. The vacuum suction cup fixture according to claim 7, characterized in that: The vertical projection of the third opening (24) is in the shape of a hole, and the vertical projection of the fourth opening (31) is in the shape of a straight line extending in the radial direction of the chassis (1).

9. A vacuum suction cup jig according to claim 7 or 8, characterized in that: A second rubber ring (34) for sealing is provided around the circumference of the fourth opening (31).

10. The vacuum suction cup fixture according to claim 6, characterized in that: It also includes a pressure plate (26), a flange (33) is provided on the circumferential side of the radial movable block (3), and the pressure plate (26) is fixed to the upper wall of the circumferential movable block (2) and abuts against the upper side of the flange (33).

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