Substrate handling robot

Abstract

The substrate transfer robot (100) includes a cable guiding portion (5) which is provided with a robot cable (101) and deforms in a manner of following the robot cable (101) that moves together with the lifting of the arm (2). The robot cable (101) is disposed inside the housing (4) and extends from the arm (2).

Description

Technical Field

[0001] The present invention relates to a substrate transfer robot, and more particularly to a substrate transfer robot having a robot cable extending from an arm. Background Art

[0002] Conventionally, substrate transfer robots have been known. For example, a substrate transfer robot is disclosed in Japanese Patent Application Laid-Open No. 2013-69914.

[0003] A substrate transfer robot composed of a horizontal articulated robot is disclosed in Japanese Patent Application Laid-Open No. 2013-69914. The substrate transfer robot includes a base, an arm connected to the base and rotatable in a horizontal plane, and a substrate transfer manipulator connected to the arm and rotatable in a horizontal plane.

[0004] In addition, although not explicitly described in Japanese Patent Application Laid-Open No. 2013-69914, among conventional substrate transfer robots such as those described in Japanese Patent Application Laid-Open No. 2013-69914, there are substrate transfer robots in which the arm is lifted and lowered by a lifting mechanism.

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2013-69914

[0006] Here, in a substrate transfer robot in which the arm is lifted and lowered, a robot cable extending from the arm and a cable guide portion for guiding the robot cable move along with the lifting and lowering of the arm. In this case, there is a problem that dust and the like are diffused in the space (such as a clean room) where the substrate transfer robot is arranged, along with the movement of the robot cable and the cable guide portion. Summary of the Invention

[0007] The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a substrate transfer robot capable of suppressing the diffusion of dust and the like in a space where the substrate transfer robot is arranged.

[0008] A substrate transfer robot according to an aspect of the present invention includes: a substrate holding manipulator; an arm that moves the substrate holding manipulator; an arm lifting mechanism that lifts and lowers the arm; a substantially columnar housing that covers the arm lifting mechanism; and a cable guide portion that arranges a robot cable and deforms so as to follow the robot cable that moves along with the lifting and lowering of the arm, the robot cable being arranged inside the housing and extending from the arm.

[0009] In the substrate transfer robot according to one aspect of the present invention, as described above, the substrate transfer robot includes a cable guide portion that arranges the robot cable and deforms so as to follow the robot cable that moves together with the lifting of the arm. The robot cable is arranged inside the housing and extends from the arm. Thus, since the robot cable and the cable guide portion are arranged inside the housing, even if the robot cable and the cable guide portion move inside the housing, it is possible to suppress the diffusion of dust and the like to the outside of the housing. As a result, it is possible to suppress the diffusion of dust and the like in the space (clean room) where the substrate transfer robot is arranged.

[0010] According to the present invention, as described above, it is possible to suppress the diffusion of dust and the like in the space where the substrate transfer robot is arranged. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 is a perspective view of a substrate transfer robot according to an embodiment of the present invention.

[0012] Figure 2 is a side view (a view observed from the Y1 direction side) of a substrate transfer robot according to an embodiment of the present invention.

[0013] Figure 3 is a front view (a view observed from the X1 direction side) of a substrate transfer robot according to an embodiment of the present invention.

[0014] Figure 4 is a cross-sectional view (a cross-sectional view along the Y-Z plane) of a substrate transfer robot according to an embodiment of the present invention.

[0015] Figure 5 is along Figure 3 a cross-sectional view taken along line 400-400.

[0016] Figure 6 (a) of is a view showing a state where the drive unit is located above the housing. Figure 6 (b) of is a view showing a state where the drive unit is located below the housing.

[0017] Figure 7 is a top view (a view observed from the Z1 direction side) of a connector of a substrate transfer robot according to an embodiment of the present invention.

[0018] Figure 8 is along Figure 3 a cross-sectional view taken along line 500-500.

[0019] Figure 9 is a bottom view (a view observed from the X2 direction side) of a substrate transfer robot according to an embodiment of the present invention.

[0020] Figure 10 It is a perspective view of a substrate transfer robot based on a modified example. Detailed implementation

[0021] Hereinafter, an embodiment of the present invention that embodies the present invention will be described with reference to the drawings.

[0022] Refer to Figures 1 to 9 to describe the structure of the substrate transfer robot 100 based on this embodiment.

[0023] As Figure 1 and Figure 2 shown, the substrate transfer robot 100 includes a substrate holding manipulator 1 that holds a substrate (semiconductor wafer), and an arm 2 that moves the substrate holding manipulator 1.

[0024] As Figure 1 and Figure 2 shown, the arm 2 is a horizontal multi-joint robot arm. The arm 2 includes a first arm 201 and a second arm 202. The first arm 201 is configured to be rotatable about one end relative to a base 2a described later. Specifically, one end of the first arm 201 is rotatably connected to the base 2a via a first joint. The second arm 202 is configured to be rotatable about one end relative to the first arm 201. Specifically, one end of the second arm 202 is rotatably connected to the other end of the first arm 201 via a second joint. In addition, at the other end of the second arm 202, the substrate holding manipulator 1 is rotatably connected via a third joint. At each of the first joint, the second joint, and the third joint, a drive mechanism including a servo motor as a drive source for rotational drive, a rotational position sensor that detects the rotational position of the output shaft of the servo motor, and a power transmission mechanism that transmits the output of the servo motor to the joint is provided.

[0025] As Figures 3 to 5 shown, in this embodiment, the substrate transfer robot 100 includes: an arm lifting mechanism 3 that lifts and lowers the arm 2; a housing 4 that covers the substantially columnar arm lifting mechanism 3; and a cable guide portion 5 (cable conveyor (registered trademark)) (refer to Figure 4 ), which arranges the robot cable 101 and deforms in a manner following the robot cable 101 that moves together with the lifting and lowering of the arm 2, and the robot cable 101 is arranged inside the housing 4 and extends from the arm 2.

[0026] The substantially columnar housing 4 is made of metal or the like and has a space inside. In addition, signals are exchanged between the substrate transfer robot 100 and the robot control unit 200 via the robot cable 101. In addition, the cable guide portion 5 has a function of protecting the robot cable 101 disposed (connected) in the cable guide portion 5. In addition, the cable guide portion 5 has a structure to which a small component like a chain is connected.

[0027] In addition, in the present embodiment, as Figure 4 shown, at least a part of the robot cable 101 is inserted into the inside of the cable guide portion 5. Specifically, the central portion of the robot cable 101 is inserted into the inside of the cable guide portion 5, and both end portions of the robot cable 101 are disposed outside the cable guide portion 5.

[0028] In addition, in the present embodiment, one end 5a of the cable guide portion 5 is a mobile end that moves together with the elevation of the arm 2, and the other end 5b of the cable guide portion 5 is a fixed end fixed to the housing 4. Specifically, the robot cable 101 is fixed to one end 5a and the other end 5b of the cable guide portion 5. In addition, one end 5a of the cable guide portion 5 is fixed to the elevating portion 3a. Thus, one end 5a of the cable guide portion 5 and the robot cable 101 fixed to one end 5a of the cable guide portion 5 move together with the elevation of the arm 2. In addition, the other end 5b of the cable guide portion 5 is fixed to a plate-like member 4f inside the housing 4. The plate-like member 4f is disposed along the Z direction.

[0029] In addition, in the present embodiment, the robot cable 101 includes: a first cable portion 101a, disposed in the cable guide portion 5 and moving together with the elevation of the arm 2; and a second cable portion 101b, disposed outside the cable guide portion 5 and fixed so as not to move together with the elevation of the arm 2, extending along the vertical direction (Z direction). Moreover, the substrate transfer robot 100 further includes a connector 6, which is provided at the end of the second cable portion 101b and is connected to the robot control unit 200 (refer to Figure 3 ) provided outside the housing 4 for controlling the substrate transfer robot 100.

[0030] Specifically, the first cable portion 101a is the central portion of the robot cable 101. In addition, the second cable portion 101b is one end portion of the robot cable 101. In addition, the second cable portion 101b is disposed to extend from the Y2 direction side of the plate-like member 4f over the upper end to the Y1 direction side. In addition, the second cable portion 101b is disposed along the plate-like member 4f on the Y1 direction side of the plate-like member 4f. In addition, a third cable portion 101c, which is the other end portion of the robot cable 101, is disposed outside the cable guide portion 5.

[0031] In addition, in the present embodiment, asFigure 1 and Figure 7 As shown in Figure 7 , the connector 6 is disposed on the outer surface 4a of the housing 4. Specifically, the lower side portion of the housing 4 has a stepped shape, and the connector 6 is disposed on the outer surface 4a which is the upper side surface of the stepped shape. In addition, the connector 6 is configured to extend upward.

[0032] As Figure 1 and Figure 2 shown in Figure 2 , the substrate transfer robot 100 further includes a base 2a for mounting the arm 2. Moreover, as Figure 4 shown in Figure 4 , the arm lifting mechanism 3 includes a lifting portion 3a for mounting the base 2a and a driving portion 3b (motor) for lifting the lifting portion 3a. The lifting portion 3a is mounted on the transfer belt 3c, and by driving the transfer belt 3c by the driving portion 3b, the lifting portion 3a is lifted. As Figure 5 shown in Figure 5 , by rotating the pulley 3e by the driving portion 3b (motor), the transfer belt 3c moves.

[0033] The transfer belt 3c is configured to extend along the Z direction. In addition, the pulleys 3e are provided at the upper and lower portions of the housing 4. The transfer belt 3c is wound around the pulleys 3e.

[0034] In addition, in the present embodiment, as Figure 4 shown in Figure 4 , the driving portion 3b is disposed at the upper portion of the housing 4. Here, as Figure 6 shown in (b) of Figure 6 , if the driving portion 3b is disposed at the lower portion of the housing 4, the driving portion 3b becomes an obstacle to the air flow path of the fan 7 that discharges the air inside the housing 4 to the outside. Therefore, by disposing the driving portion 3b at the upper portion of the housing 4, it is possible to prevent the driving portion 3b from becoming an obstacle to the air flow path of the fan 7. In addition, the driving portion 3b is mounted on the outside of the housing 4. In addition, a cover member 4g for covering the driving portion 3b is provided on the housing 4.

[0035] In addition, as Figure 6 shown in (a) of Figure 6 , by disposing the driving portion 3b at the upper portion of the housing 4, compared with the case where the driving portion 3b is disposed at the lower portion of the housing 4 (refer to Figure 6 shown in (b) of Figure 6 ), the length L1 of the transfer belt 3c corresponding to between the driving portion 3b and the lifting portion 3a is shorter than the length L2 in the case of being disposed at the lower portion, and the tension on the transfer belt 3c becomes larger. Therefore, it is possible to prevent the transfer belt 3c from skipping teeth. That is, as Figure 6 shown in (b) of Figure 6 , if the length L2 of the transfer belt 3c corresponding to between the driving portion 3b and the lifting portion 3a becomes longer, the elongation of the transfer belt 3c becomes larger, and thus it is likely to skip teeth.

[0036] In addition, in the present embodiment, as Figure 3 and Figure 4As shown, the elevating part 3a protrudes from the housing 4, and a first hole part 3d into which the robot cable 101 extending from the base 2a is inserted is provided in the elevating part 3a. Further, the robot cable 101 extending from the arm 2 is arranged in the cable guiding part 5 via the first hole part 3d of the elevating part 3a.

[0037] In addition, as Figure 1 shown, a convex part 4h protruding toward the X1 direction side is provided in the housing 4. The third cable part 101c of the robot cable 101 (refer to Figure 4 ) is arranged to extend from the first space 4b (refer to Figure 8 ) side to the second space 4c (refer to Figure 8 ) side inside the convex part 4h.

[0038] In addition, in the present embodiment, as Figure 8 shown, the housing 4 includes a first space 4b in which the arm elevating mechanism 3 is arranged and a second space 4c in which the cable guiding part 5 is arranged. As Figure 4 shown, the first space 4b and the second space 4c are configured to extend in the Z direction. In addition, the first space 4b and the second space 4c are arranged adjacent to each other in the Y direction. In addition, the first space 4b and the second space 4c are connected to each other. Further, the first space 4b is the space on the Y2 direction side of the housing 4. In addition, the second space 4c is the space on the Y1 direction side of the housing 4.

[0039] In addition, in the present embodiment, as Figure 4 shown, the substrate transfer robot 100 further includes a fan 7 which is arranged inside the housing 4 and discharges the air inside the housing 4 to the outside.

[0040] Specifically, in the present embodiment, as Figure 4 shown, the substrate transfer robot 100 is arranged in the clean room 300. The fan 7 is provided at the lower part of the housing 4 (the second space 4c). A second hole part 4e through which the air discharged by the fan 7 passes is provided in the lower surface 4d of the housing 4 (refer to Figure 9 ). It is configured to discharge the air discharged by the fan 7 from the third hole part 301a provided in the floor surface 301 of the clean room 300 to below the floor surface 301 (the Z2 direction) via the second hole part 4e.

[0041] [Effects of the Present Embodiment]

[0042] In the present embodiment, the following effects can be obtained.

[0043] In the present embodiment, as described above, the substrate transfer robot 100 includes a cable guiding portion 5 that disposes the robot cable 101 and deforms in a manner following the movement of the robot cable 101 along with the lifting and lowering of the arm 2. The robot cable 101 is disposed inside the housing 4 and extends from the arm 2. Accordingly, since the robot cable 101 and the cable guiding portion 5 are disposed inside the housing 4, even if the robot cable 101 and the cable guiding portion 5 move inside the housing 4, it is possible to suppress the diffusion of dust and the like to the outside of the housing 4. As a result, it is possible to suppress the diffusion of dust and the like in the space (inside the clean room 300) where the substrate transfer robot 100 is disposed.

[0044] In addition, in the present embodiment, as described above, at least a part of the robot cable 101 is inserted inside the cable guiding portion 5. Accordingly, since at least a part of the robot cable 101 is inserted inside the cable guiding portion 5, it is possible to easily move the robot cable 101 along with the movement of the cable guiding portion 5. Further, by inserting at least a part of the robot cable 101 inside the cable guiding portion 5, compared with the case where the entire robot cable 101 is disposed outside the cable guiding portion 5, the space occupied by the robot cable 101 inside the housing 4 can be reduced, and thus the housing 4 can be miniaturized.

[0045] In addition, in the present embodiment, as described above, one end 5a of the cable guiding portion 5 is a moving end that moves along with the lifting and lowering of the arm 2, and the other end 5b of the cable guiding portion 5 is a fixed end fixed to the housing 4. Accordingly, it is possible to move (deform) the cable guiding portion 5 along with the lifting and lowering of the arm 2 while fixing the other end 5b of the cable guiding portion 5.

[0046] In addition, in the present embodiment, as described above, the robot cable 101 includes: a first cable portion 101a that is disposed in the cable guiding portion 5 and moves along with the lifting and lowering of the arm 2; and a second cable portion 101b that is disposed outside the cable guiding portion 5, is fixed and does not move along with the lifting and lowering of the arm 2, and extends in the vertical direction. The substrate transfer robot 100 further includes a connector 6 that is provided at an end of the second cable portion 101b and is connected to a robot control unit 200 that is provided outside the housing 4 and controls the substrate transfer robot 100. Accordingly, it is possible to connect the robot cable 101 and the robot control unit 200 that controls the substrate transfer robot 100 through the connector 6 provided outside the housing 4, and thus it is possible to simplify the connection operation between the robot cable 101 and the robot control unit 200.

[0047] In addition, in the present embodiment, as described above, the connector 6 is disposed on the outer surface 4a of the housing 4. Thus, by simply connecting the robot control unit 200 to the connector 6 disposed on the outer surface 4a of the housing 4, the robot cable 101 can be easily connected to the robot control unit 200.

[0048] In addition, in the present embodiment, as described above, a base 2a of the mounting arm 2 is further provided, and the arm lifting mechanism 3 includes a lifting portion 3a for mounting the base 2a and a driving portion 3b for lifting the lifting portion 3a. Thus, by driving the driving portion 3b to lift the lifting portion 3a, the arm 2 can be easily lifted.

[0049] In addition, in the present embodiment, as described above, the driving portion 3b is disposed on the upper portion of the housing 4. Thus, interference of the driving portion 3b with the cable guiding portion 5 can be suppressed.

[0050] In addition, in the present embodiment, as described above, the lifting portion 3a protrudes from the housing 4, and a first hole portion 3d for inserting the robot cable 101 extending from the base 2a is provided in the lifting portion 3a. The robot cable 101 extending from the arm 2 is disposed in the cable guiding portion 5 via the first hole portion 3d of the lifting portion 3a. Thus, the robot cable 101 disposed in the cable guiding portion 5 via the first hole portion 3d can be easily moved together with the movement of the lifting portion 3a.

[0051] In addition, in the present embodiment, as described above, the housing 4 includes a first space 4b for disposing the arm lifting mechanism 3 and a second space 4c for disposing the cable guiding portion 5. Thus, since the arm lifting mechanism 3 and the cable guiding portion 5 are disposed in separate spaces, interference between the arm lifting mechanism 3 and the cable guiding portion 5 can be suppressed.

[0052] In addition, in the present embodiment, as described above, a fan 7 is further provided, and the fan 7 is disposed inside the housing 4 and discharges the air inside the housing 4 to the outside. Thus, dust and the like generated inside the housing 4 can be discharged to the outside of the housing 4.

[0053] In addition, in the present embodiment, as described above, the substrate transfer robot 100 is disposed in the clean room 300, the fan 7 is provided at the lower portion of the housing 4, and a second hole portion 4e through which the air discharged by the fan 7 passes is provided in the lower surface 4d of the housing 4. The air discharged by the fan 7 is discharged downward from the floor surface 301 through the second hole portion 4e and the third hole portion 301a provided in the floor surface 301 of the clean room 300. Thus, when discharging dust and the like generated inside the housing 4 to the outside of the housing 4, diffusion of the dust and the like discharged from the housing 4 inside the clean room 300 can be suppressed.

[0054] [Modification Example]

[0055] Furthermore, all aspects of the embodiments disclosed herein should be considered illustrative and not restrictive of the present invention. The scope of the present invention is not defined by the description of the above embodiments, but is represented by the claims, and also includes equivalents of the claims and all modifications (variations) within its scope.

[0056] For example, in the above embodiment, an example of applying a cable conveyor (registered trademark) as the cable guide portion 5 is shown, but the present invention is not limited thereto. In the present invention, a cable guide portion other than the cable conveyor (registered trademark) may also be applied as the cable guide portion 5.

[0057] In addition, in the above embodiment, an example in which a part of the robot cable 101 is inserted into the inside of the cable guide portion 5 is shown, but the present invention is not limited thereto. For example, the entire robot cable 101 may be inserted into the inside of the cable guide portion 5. In addition, the entire robot cable 101 may be mounted outside the cable guide portion 5.

[0058] In addition, in the above embodiment, an example in which the other end 5b of the cable guide portion 5 is a fixed end fixed to the housing 4 is shown, but the present invention is not limited thereto. For example, the other end 5b of the cable guide portion 5 may also be a movable end.

[0059] In addition, in the above embodiment, an example in which the connector 6 is disposed on the outer surface 4a of the upper surface of the stepped shape of the housing 4 is shown, but the present invention is not limited thereto. For example, the connector 6 may also be disposed on the side surface of the housing 4 (the surface on the X-direction side or the surface on the Y-direction side).

[0060] In addition, in the above embodiment, an example in which the arm lifting mechanism 3 is composed of a lifting portion 3a, a conveying belt 3c for mounting the lifting portion 3a, and a driving portion 3b (motor) for driving the conveying belt 3c is shown, but the present invention is not limited thereto. For example, the arm lifting mechanism may also be configured by mounting the lifting portion 3a on a ball screw that converts the rotational motion of a motor or the like into a linear motion.

[0061] In addition, in the above embodiment, an example in which the driving portion 3b is disposed on the upper portion of the housing 4 is shown, but the present invention is not limited thereto. If the driving portion 3b does not obstruct the air passage of the fan 7, the driving portion 3b may also be disposed on the lower portion of the housing 4.

[0062] In addition, in the above-described embodiment, an example is shown in which the robot cable 101 extending from the arm 2 is disposed in the cable guide portion 5 via the first hole portion 3d of the elevating portion 3a. However, the present invention is not limited thereto. For example, a cutout portion may be provided in the elevating portion 3a instead of the first hole portion 3d, and the robot cable 101 may be disposed in the cable guide portion 5 via the cutout portion.

[0063] In addition, in the above-described embodiment, an example is shown in which the fan 7 is provided in the lower portion of the housing 4. However, the present invention is not limited thereto. For example, the fan 7 may be provided in the upper portion of the housing 4 to discharge the air in the housing 4 from the third hole portion 301a of the floor surface 301.

[0064] In addition, in the above-described embodiment, an example is shown in which the arm 2 of the substrate transfer robot 100 is a horizontal multi-joint robot arm. However, the present invention is not limited thereto. For example, it may be configured such that, as in the substrate transfer robot 600 of the modified example shown in Figure 10 the arm 602 linearly moves along the X direction. The substrate transfer robot 600 is configured such that the arm 602 moves up and down along the Z direction with respect to the substantially columnar housing 604.

[0065] Description of Reference Numerals

[0066] 1... Substrate holding manipulator; 2... Arm; 2a... Base; 3... Arm elevating mechanism; 3a... Elevating portion; 3b... Driving portion; 3d... First hole portion; 4... Housing; 4a... Outer surface; 4b... First space; 4c... Second space; 4d... Lower surface; 4e... Second hole portion; 5... Cable guide portion; 5a... One end (of the cable guide portion); 5b... The other end (of the cable guide portion); 6... Connector; 7... Fan; 100... Substrate transfer robot; 101... Robot cable; 101a... First cable portion; 101b... Second cable portion; 200... Robot control portion; 300... Clean room; 301... Floor surface; 301a... Third hole portion.

Claims

1. A substrate handling robot, wherein, the substrate handling robot includes: a substrate holding manipulator; an arm for moving the substrate holding manipulator; an arm lifting mechanism for lifting and lowering the arm; a columnar housing covering the arm lifting mechanism; and a cable guiding portion, in which robot cables are arranged and which deforms in a manner following the robot cables that move together with the lifting and lowering of the arm. The robot cables are arranged inside the housing and extend from the arm, the robot cables include: a first cable portion arranged in the cable guiding portion and moving together with the lifting and lowering of the arm; and a second cable portion arranged outside the cable guiding portion and fixed so as not to move together with the lifting and lowering of the arm. The second cable portion extends along the vertical direction, the substrate handling robot further includes a connector provided at an end of the second cable portion and connected to a robot control portion provided outside the housing for controlling the substrate handling robot, inside the housing, a plate-like member is arranged along the vertical direction. An end of the cable guiding portion is fixed to the plate-like member, and the second cable portion passes over the upper end of the plate-like member and is arranged between the plate-like member and the housing along the plate-like member.

2. The substrate handling robot according to claim 1, wherein, at least a part of the robot cables is inserted inside the cable guiding portion.

3. The substrate handling robot according to claim 1, wherein, one end of the cable guiding portion is a mobile end that moves together with the lifting and lowering of the arm, the other end of the cable guiding portion is a fixed end fixed to the housing.

4. The substrate handling robot according to claim 1, wherein, the connector is arranged on the outer surface of the housing.

5. The substrate handling robot according to claim 1, wherein, the housing includes a first space for arranging the arm lifting mechanism and a second space for arranging the cable guiding portion.

6. The substrate handling robot according to claim 1, wherein, it further includes a fan arranged inside the housing and exhausting the air inside the housing to the outside.

7. The substrate handling robot according to claim 6, wherein, the substrate handling robot is arranged in a clean room, the fan is arranged at the lower part of the housing, a second hole portion through which the air exhausted by the fan passes is provided on the lower surface of the housing, and it is configured to exhaust the air exhausted by the fan from a third hole portion provided on the floor surface of the clean room to the lower side of the floor surface via the second hole portion.

8. The substrate handling robot according to claim 1, wherein, the substrate handling robot further includes: a base for installing the arm, the arm lifting mechanism includes: a lifting portion for installing the base; and a driving portion for lifting and lowering the lifting portion.

9. The substrate handling robot according to claim 8, wherein, the lifting portion protrudes from the housing, and a first hole portion for inserting the robot cables extending from the base is provided in the lifting portion. The robot cable extending from the arm is disposed in the cable guide portion via the first hole portion of the lifting portion.

10. The substrate transfer robot according to claim 8, wherein, the drive portion is disposed in the upper portion of the housing.

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