A filtering device for automatically purifying electroplating solution and a purification method thereof

Abstract

The present invention relates to a filtering device for automatically purifying electroplating solution and a purification method thereof in the field of automatic processing; the filtering device for automatically purifying electroplating solution includes a filtering box body, and a feeding drive seat arranged on the filtering box body, and an air inlet and a liquid inlet are arranged on the feeding drive seat; a pre-filtering structure corresponding to the air inlet and the liquid inlet is arranged in the feeding drive seat; a grading filtering part corresponding to the pre-filtering structure and a liquid storage tank for receiving located below the grading filtering part are arranged in the filtering box body. The present invention provides a filtering device for automatically purifying electroplating solution and a purification method thereof, which have the functions of giving a positive pressure and automatically rotating to assist in multiple-stage filtering.

Description

Technical Field

[0001] The present invention relates to the field of automated processing, and particularly relates to a filtering device for automatically purifying electroplating solution and a purification method thereof. Background Art

[0002] In the process of manufacturing 3D MEMS semiconductor probe cards, electroplating is a crucial step, and electroplating copper has developed into the preferred choice for deposition in the semiconductor industry. Copper electroplating is a surface processing form that converts copper ions into metal by providing electrons to the solution to form a coating. However, many impurities will be generated during the chemical reaction between the anode and cathode in the electroplating process. If these impurities are not processed in time, it will seriously affect the effect of the coating.

[0003] Currently, the commonly used simple filtering device only has one-time filtration, with poor filtration effect and difficult replacement and disassembly of the filter element; the complex filtering device has a large size and high cost. Summary of the Invention

[0004] The present invention overcomes the deficiencies of the prior art and provides a filtering device for automatically purifying electroplating solution and a purification method thereof, which has the functions of providing a given positive pressure and automatically rotating to assist multiple-stage filtration.

[0005] To achieve the above object, the technical solution adopted by the present invention is: a filtering device for automatically purifying electroplating solution, including a filter box body, and a feed driving seat arranged on the filter box body, the feed driving seat is provided with an air inlet and a liquid inlet; a pre-filtering structure corresponding to the air inlet and the liquid inlet is arranged in the feed driving seat; a grading filtering part corresponding to the pre-filtering structure and a liquid storage tank for receiving located below the grading filtering part are arranged in the filter box body.

[0006] In a preferred embodiment of the present invention, the pre-filtering structure is docked with the filter box body through the feed driving seat; the pre-filtering structure includes a fixed ring embedded in the feed driving seat, and a filter cup is installed on the fixed ring, and the filter cup is docked with the air inlet and the liquid inlet.

[0007] In a preferred embodiment of the present invention, a servo motor is arranged on the feed driving seat, and a long shaft driven by the servo motor penetrates into the filter cup and is drivingly connected with a plurality of stirring blades.

[0008] In a preferred embodiment of the present invention, the grading filtering part includes a plurality of filtering tanks arranged longitudinally and stacked, and the filtering pores of the filtering tank located in the upper layer in the grading filtering part are larger than those of the filtering tank located in the lower layer.

[0009] In a preferred embodiment of the present invention, the cross-section of the upper side of the filtering tank is larger than that of the lower side of the filtering tank.

[0010] In a preferred embodiment of the present invention, a plurality of sliding wheels connected by axles are respectively arranged on both sides of the lower part of the filtering tank, and a plurality of pairs of guide rails are longitudinally and spacedly arranged in the filtering tank body; at least part of the sliding wheels are slidably arranged in the sliding grooves of the guide rails.

[0011] In a preferred embodiment of the present invention, each pair of guide rails is oppositely arranged on both side walls in the filtering tank body; a sliding groove is arranged on the guide rail, and a raised guide bar is arranged in the sliding groove; at least part of the sliding wheels are slidably embedded in the sliding groove, and a guide groove is arranged on the outer periphery of the sliding wheel, and the guide bar can be at least partly slidably embedded into the guide groove.

[0012] In a preferred embodiment of the present invention, a pressure sensor is arranged on the filtering tank; and / or, a liquid level induction probe is arranged on the liquid storage tank.

[0013] In a preferred embodiment of the present invention, the purification method of the filtering device for automatically purifying electroplating solution includes the following steps;

[0014] Step S1, introducing the electroplating solution to be filtered into the filter cup in the feed driving seat through the liquid inlet, performing rough filtration through the filter cup, adding pressurized gas through the air inlet to give a positive pressure; at the same time, rotating the stirring paddle blades introduced into the filter cup to stir the electroplating solution to improve the filtration efficiency;

[0015] Step S2, the electroplating solution falls into the grading filtration part in the filtering tank body after passing through the filter cup and is subjected to grading filtration, and is filtered layer by layer through the filtering tank in the grading filtration part;

[0016] Step S3, the electroplating solution falls into the liquid storage tank arranged at the lower part of the grading filtration part after being filtered layer by layer through the grading filtration part.

[0017] In a preferred embodiment of the present invention, the use state of the filter screen on the filtering tank is detected by the pressure sensor arranged on the filtering tank; the liquid level height of the collected liquid is detected by the liquid level induction probe arranged on the liquid storage tank.

[0018] In a preferred embodiment of the present invention, the use state of the screen on the filtering tank is detected by the pressure sensor arranged on the filtering tank.

[0019] The present invention solves the defects in the background technology, and the beneficial effects of the present invention are:

[0020] The present invention provides a filtering device for automatically purifying electroplating solution, which has the function of multiple grading filtrations.

[0021] By giving a positive pressure to the electroplating solution to be filtered in the filter cup of the pre-filtration structure and setting an automatic stirring paddle blade, the structure for accelerating the liquid flow realizes high-efficiency filtration. Multiple filtrations are realized through the filter cup of the pre-filtration structure and multiple filtering tanks, improving the filtration quality. Brief Description of the Drawings

[0022] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 It is a schematic exploded structure diagram of a preferred embodiment of the present invention;

[0024] Figure 2 It is a schematic top view structure diagram of a preferred embodiment of the present invention;

[0025] Figure 3 It is a schematic side view structure diagram of a preferred embodiment of the present invention;

[0026] Figure 4 It is a schematic side view structure diagram when the baffle on one side is removed in a preferred embodiment of the present invention;

[0027] Figure 5 It is a schematic axonometric structure diagram when the baffle on one side is removed in a preferred embodiment of the present invention;

[0028] Figure 6 It is a schematic axonometric structure diagram of the pre-filter structure and the servo motor assembled in a preferred embodiment of the present invention (the filter screen pattern on the filter screen cup is not shown in the figure);

[0029] Figure 7 It is a schematic axonometric structure diagram of the servo motor, coupling, long shaft, and stirring paddle assembled in a preferred embodiment of the present invention;

[0030] Figure 8 It is a schematic axonometric structure diagram of the fixing ring in a preferred embodiment of the present invention;

[0031] Figure 9 It is Figure 8 an enlarged structure diagram of part B in;

[0032] Figure 10 It is a schematic axonometric structure diagram of the filter screen cup in a preferred embodiment of the present invention (the filter screen pattern on the filter screen cup is not shown in the figure);

[0033] Figure 11 It is Figure 10 an enlarged structure diagram of part A in;

[0034] Figure 12 It is a schematic axonometric structure diagram of the filter tank in a preferred embodiment of the present invention;

[0035] Figure 13 It is a schematic axonometric structure diagram of the filter tank with the mesh removed in a preferred embodiment of the present invention Figure 1 ;

[0036] Figure 14 It is a schematic axonometric structure diagram of the filter tank with the mesh removed in a preferred embodiment of the present invention Figure 2 ;

[0037] Figure 15 It is an axonometric structure schematic diagram of removing the mesh in the filter tank in the preferred embodiment of the present invention Figure 3 ;

[0038] Figure 16 It is an axonometric structure schematic diagram of the guide rail in the preferred embodiment of the present invention;

[0039] Figure 17 It is a schematic diagram of the working process in the preferred embodiment of the present invention Figure 1 ;

[0040] Figure 18 It is a schematic diagram of the working process in the preferred embodiment of the present invention Figure 2 ;

[0041] Among them, 1 - machine base, 11 - feeding drive base; 12 - filter box body, 13 - top cover, 131 - liquid inlet, 132 - air inlet, 14 - slot, 141 - baffle, 142 - guide rail, 15 - start-stop switch, 16 - through slot; 2 - servo motor, 20 - reducer, 21 - coupling, 22 - long shaft, 23 - stirring paddle; 3 - pre-filter structure, 31 - fixing ring, 311 - hollow ring, 312 - support rib, 313 - buckle, 32 - filter screen cup, 321 - boss, 322 - clamping slot; 4 - grading filtration part, 41 - filter tank one, 42 - filter tank two, 43 - filter tank three, 44 - liquid storage tank, 45 - stop bar, 46 - handle, 47 - leakage hole, 48 - mesh, 49 - sliding wheel; 6 - pressure sensor, 8 - indicator light. Embodiment

[0042] Now, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. These drawings are all simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, so they only show the components related to the present invention. Embodiment

[0043] As Figures 1 to 5 shown, Figure 1 It is an exploded structure schematic diagram of this embodiment; Figure 2 It is a top view structure schematic diagram of this embodiment; Figure 3 It is a side view structure schematic diagram of this embodiment; Figure 4 It is a side view structure schematic diagram when the baffle 141 on one side in this embodiment is removed; Figure 5It is an axonometric structural schematic diagram when the baffle 141 on one side in this embodiment is removed. An automatic electroplating solution purification filtering device includes a machine base 1. The machine base 1 includes a filtering tank body 12. An inlet feeding driving seat 11 is arranged at the upper part of the filtering tank body 12. An installation cavity connected to the filtering tank body 12 is arranged inside the inlet feeding driving seat 11. A top cover 13 is arranged at the upper part of the installation cavity. An air inlet 132 and a liquid inlet 131 are arranged on the inlet feeding driving seat 11. A pre-filtering structure 3 connected to the air inlet 132 and the liquid inlet 131 is arranged in the installation cavity of the inlet feeding driving seat 11. The pre-filtering structure 3 is connected to the filtering tank body 12 through the inlet feeding driving seat 11. The liquid inlet 131 introduces the electroplating solution to be filtered into the pre-filtering structure 3. The air inlet 132 introduces positive pressure gas into the pre-filtering structure 3 of the inlet feeding driving seat 11.

[0044] As Figure 1 , Figure 4 , Figure 6 , Figure 7 shown, the pre-filtering structure 3 includes a fixing ring 31 embedded in the inlet feeding driving seat 11. A filter screen cup 32 is installed on the fixing ring 31. The filter screen cup 32 is connected to the air inlet 132 and the liquid inlet 131. As Figure 6 , Figure 8 , Figure 9 shown, both the upper part and the lower part of the fixing ring 31 are hollow circular rings 311. The spaced hollow circular rings 311 are supported and connected by a plurality of support ribs 312 evenly distributed on the outer periphery. As Figure 6 , Figure 8 , Figure 9 shown, in this embodiment, four support ribs 312 evenly distributed on the outer periphery of a pair of hollow circular rings 311 are adopted. A plurality of installation holes for assembling with the inlet feeding driving seat 11 are arranged on the upper hollow circular ring 311. A plurality of outwardly protruding buckles 313 are arranged on the lower hollow circular ring 311. The fixing ring 31 can be assembled with the filter screen cup 32 through the lower hollow circular ring 311 and the buckles 313, that is, the filter screen cup 32 is embedded into the hollow circular ring 311 of the fixing ring 31. The boss 321 arranged on the outer periphery of the filter screen cup 32 abuts against the lower hollow circular ring 311, and the buckle 313 can be embedded and docked with the card slot 322 on the boss 321, realizing the convenient assembly of the fixing ring 31 and the filter screen cup 32. The filter screen cup 32 adopts the hard filter screen structure as shown in the figure.

[0045] As Figure 1 , Figure 7 shown, a stirring paddle 23 introduced into the filter screen cup 32 is also drivenly arranged inside the inlet feeding driving seat 11. A servo motor 2 is arranged on the inlet feeding driving seat 11. The servo motor 2 is drivingly connected to one end of a long shaft 22 through a coupling 21 and a reducer 20. The other end of the long shaft 22 penetrates into the filter screen cup 32 and is drivingly connected to two groups of stirring paddles 23.

[0046] AsFigure 1 , Figures 3 to 5 As shown, the filter box body 12 adopts a box structure, and one side of the box is an open structure, and longitudinal slots 14 are arranged on both sides of the open part, and a detachable baffle 141 is inserted into the slot 14 of the open part. After the baffle 141 is inserted into the box, a filter cavity is formed inside, and the filter cavity in the filter box body 12 corresponds to the pre-filter structure 3, that is, the filter cavity is connected to the installation cavity. The liquid inlet 131 and the air inlet 132 are connected to the filter cavity through the pre-filter structure 3 in the installation cavity.

[0047] Specifically, Figure 1 , Figure 4 , Figure 5 As shown, a plurality of pairs of guide rails 142 are longitudinally spaced apart in the filter cavity; each pair of guide rails 142 is disposed on two side walls of the filter box body 12 in a relative manner. Figure 16 As shown, a slide groove is provided on the guide rail 142, and a guide bar protruding upward is provided in the slide groove. In this embodiment, three pairs of guide rails 142 arranged in upper, middle and lower longitudinal intervals are provided in the filter chamber according to the filtering state requirements. The filter chamber is divided into three filtering areas of upper, middle and lower levels by each pair of relatively arranged guide rails 142.

[0048] like Figure 1 , Figure 4 , Figure 5 As shown, the filter chamber of the filter box body 12 also contains a detachable graded filter unit 4 and a liquid storage tank 44 located below the graded filter unit 4. Figure 1 , Figure 2 , Figure 5 As shown, an opening is provided on one side of the filter box body 12, and a baffle 141 is inserted into the opening. The insertable baffle 141 is provided to facilitate placement and removal of the graded filter part 4 and the liquid storage tank 44 installed in the filter box body 12.

[0049] Specifically, Figure 1 , Figure 4 , Figure 5 As shown, the graded filtering part 4 includes a plurality of filter slots. In this embodiment, the plurality of filter slots include a filter slot 1 41, a filter slot 2 42, and a filter slot 3 43 arranged in a longitudinally stacked manner. The filter slot 1 41, the filter slot 2 42, and the filter slot 3 43 are respectively inserted into three pairs of guide rails 142. The structures adopted by the filter slot 1 41, the filter slot 2 42, and the filter slot 3 43 all include a filter plate, and the cross-section of the upper side of the filter slot is larger than the cross-section of the lower side of the filter slot. Figures 12 to 15As shown in the figure, the filter disk adopted in this embodiment is an inverted hollow frustum of a pyramid structure, but it is not limited to this. In other embodiments, the structure of the filter disk can be selected from other shaped filter disks in the prior art according to actual usage requirements. A plurality of leakage holes 47 are provided at the bottom of the filter disk. A handle 46 for applying force is provided at one end outside the filter disk. A retaining bar 45 is provided on the side of the bottom of the filter disk opposite to the force application side. Channel steels for guiding are respectively provided at the bottoms on both sides in the pushing and pulling direction of the filter disk, and a plurality of sliding wheels 49 connected to the shaft hubs are connected to the channel steels. This facilitates pushing the filter disk into the filter cavity, reducing mechanical friction and mechanical damage between devices. At least part of the sliding wheel 49 is slidably embedded in the chute of the guide rail 142. A guide groove is provided on the outer periphery of the sliding wheel 49, and a guide bar in the chute of the guide rail 142 can be at least partially slidably embedded in the guide groove. Further, a wire mesh 48 is laid in a suspended manner in the filtering concave cavity of the filter disks of the first filter tank 41, the second filter tank 42, and the third filter tank 43. The filtering pores of the wire mesh 48 or the leakage holes 47 of the filter disks in the upper-level filter tanks in the grading filtering part 4 are larger than those of the wire mesh 48 or the leakage holes 47 of the filter disks in the lower-level filter tanks.

[0050] As Figure 1 , Figure 4 shown, the structure of the liquid storage tank 44 adopts a receiving tray as the receiving structure for receiving the filtered electroplating solution. The bottom of the receiving tray of the liquid storage tank 44 is also provided with a support structure such as the support ribs 312, channel steels, and sliding wheels 49 at the bottom of the filter tank. Embodiment

[0051] As Figures 1 to 5 shown, wherein, Figure 1 is the exploded structure schematic diagram of this embodiment; Figure 2 is the top view structure schematic diagram of this embodiment; Figure 3 is the side view structure schematic diagram of this embodiment; Figure 4 is the side view structure schematic diagram when the baffle 141 on one side in this embodiment is removed; Figure 5It is an axonometric structural schematic diagram when the baffle 141 on one side in this embodiment is removed. An automatic electroplating solution purification and filtration device includes a machine base 1. The machine base 1 includes a filtration tank body 12. An inlet feeding driving seat 11 is arranged at the upper part of the filtration tank body 12. An installation cavity docked with the filtration tank body 12 is arranged inside the inlet feeding driving seat 11. A top cover 13 is arranged at the upper part of the installation cavity. An air inlet 132 and a liquid inlet 131 are arranged on the inlet feeding driving seat 11. A pre-filtration structure 3 corresponding to the air inlet 132 and the liquid inlet 131 is arranged in the installation cavity of the inlet feeding driving seat 11. The pre-filtration structure 3 is docked with the filtration tank body 12 through the inlet feeding driving seat 11. The liquid inlet 131 introduces the electroplating solution to be filtered into the pre-filtration structure 3. The air inlet 132 introduces positive pressure gas into the pre-filtration structure 3 of the inlet feeding driving seat 11. And a start-stop switch 15 electrically connected to the electrical equipment in the inlet feeding driving seat 11, and an indicator light 8 connected to the start-stop switch are also arranged on one side of the machine base 1. Among them, the start-stop switch 15 adopts a switch component commonly used in the prior art to realize circuit on-off; the indicator light 8 also adopts an indicator light 8 commonly used in the prior art to indicate the circuit on-off state.

[0052] As Figure 1 , Figure 4 , Figure 6 , Figure 7 shown, the pre-filtration structure 3 includes a fixed ring 31 embedded in the inlet feeding driving seat 11. A filter cup 32 is installed on the fixed ring 31. The filter cup 32 is docked with the air inlet 132 and the liquid inlet 131. As Figure 6 , Figure 8 , Figure 9 shown, both the upper and lower parts of the fixed ring 31 are hollow rings 311. The spaced hollow rings 311 are supported and connected by a plurality of support ribs 312 evenly distributed on the outer periphery. As Figure 6 , Figure 8 , Figure 9 shown, in this embodiment, four support ribs 312 evenly distributed on the outer periphery of a pair of hollow rings 311 are adopted. A plurality of installation holes assembled with the inlet feeding driving seat 11 are arranged on the upper hollow ring 311. A plurality of outwardly protruding buckles 313 are arranged on the lower hollow ring 311. The fixed ring 31 can be assembled with the filter cup 32 through the lower hollow ring 311 and the buckles 313, that is, the filter cup 32 is embedded into the hollow ring 311 of the fixed ring 31. A boss 321 arranged on the outer periphery of the filter cup 32 abuts against the lower hollow ring 311, and the buckle 313 can be embedded and docked with a slot 322 on the boss 321 to realize the assembly of the fixed ring 31 and the filter cup 32. The filter cup 32 adopts the hard filter screen structure as shown in the figure.

[0053] As Figure 1 , Figure 7As shown, the feed drive seat 11 is also provided with a driving stirring blade 23 introduced into the filter cup 32. The feed drive seat 11 is provided with a servo motor 2, which is drivingly connected to one end of the long shaft 22 through a coupling 21 and a reducer 20, and the other end of the long shaft 22 is inserted into the insertion groove 16 on the top cover 13 of the feed drive seat 11 and enters the filter cup 32, and then is drivingly connected to two sets of stirring blades 23.

[0054] like Figure 1 , Figures 3 to 5 As shown, the filter box body 12 adopts a box structure, and one side of the box is an open structure, and longitudinal slots 14 are arranged on both sides of the open part, and a detachable baffle 141 is inserted into the slot 14 of the open part. After the baffle 141 is inserted into the box, a filter cavity is formed inside, and the filter cavity in the filter box body 12 corresponds to the pre-filter structure 3, that is, the filter cavity is connected to the installation cavity. The liquid inlet 131 and the air inlet 132 are connected to the filter cavity through the pre-filter structure 3 in the installation cavity.

[0055] Specifically, Figure 1 , Figure 4 , Figure 5 As shown, a plurality of pairs of guide rails 142 are longitudinally spaced apart in the filter cavity; each pair of guide rails 142 is disposed on two side walls of the filter box body 12 in a relative manner. Figure 16 As shown, a slide groove is provided on the guide rail 142, and a guide bar protruding upward is provided in the slide groove. In this embodiment, three pairs of guide rails 142 arranged in upper, middle and lower longitudinal intervals are provided in the filter chamber according to the filtering state requirements. The filter chamber is divided into three filtering areas of upper, middle and lower levels by each pair of relatively arranged guide rails 142.

[0056] like Figure 1 , Figure 4 , Figure 5 As shown, the filter chamber of the filter box body 12 also contains a detachable graded filter unit 4 and a liquid storage tank 44 located below the graded filter unit 4. Figure 1 , Figure 2 , Figure 5 As shown, an opening is provided on one side of the filter box body 12, and a baffle 141 is inserted into the opening. The insertable baffle 141 is provided to facilitate placement and removal of the graded filter part 4 and the liquid storage tank 44 installed in the filter box body 12.

[0057] Specifically, Figure 1 , Figure 4 , Figure 5As shown, the hierarchical filtration section 4 includes a number of filtration tanks. In this embodiment, the number of filtration tanks includes filtration tank one 41, filtration tank two 42, and filtration tank three 43 arranged vertically and stacked. Filtration tank one 41, filtration tank two 42, and filtration tank three 43 are respectively inserted into three pairs of guide rails 142. The structures of filtration tank one 41, filtration tank two 42, and filtration tank three 43 all include a filtration disc, and the cross-section of the upper side of the filtration tank is larger than that of the lower side of the filtration tank. As Figures 12 to 15 shown, the filtration disc used in this embodiment is an inverted hollow frustum structure, but it is not limited to this. In other embodiments, the structure of the filtration disc can be selected from other shapes of filtration discs in the prior art according to actual usage requirements. A plurality of leakage holes 47 are provided at the bottom of the filtration disc, a handle 46 for applying force is provided at one end outside the filtration disc, a retaining bar 45 is provided on the side of the bottom of the filtration disc opposite to the force application side, and channel steels for guiding are respectively provided at the bottoms on both sides of the pushing and pulling direction of the filtration disc. A plurality of sliding wheels 49 connected by shaft hubs are connected to the channel steels. At least part of the sliding wheels 49 is slidably embedded in the chute of the guide rail 142, a guide groove is provided on the outer periphery of the sliding wheels 49, and at least part of the guide bar in the chute of the guide rail 142 can be slidably embedded in the guide groove. Further, a wire mesh 48 is laid in a suspended manner in the filtration cavity of the filtration discs of filtration tank one 41, filtration tank two 42, and filtration tank three 43. The filtration pores of the wire mesh 48 or the leakage holes 47 of the filtration tank in the upper layer in the hierarchical filtration section 4 are larger than those of the wire mesh 48 or the leakage holes 47 of the filtration tank in the lower layer. Further, pressure sensors 6 are provided at the lower parts of filtration tank one 41, filtration tank two 42, and filtration tank three 43; and the pressure sensors 6 correspond to a plurality of leakage holes 47. The pressure sensors 6 of filtration tank one 41, filtration tank two 42, and filtration tank three 43 detect the pressure of each layer of filtration tank, and the usage state of the filter screen of the filtration tank can be reflected by monitoring the pressure state. The pressure sensors 6 are sensor elements commonly used in the prior art for detecting the liquid flow pressure, and the selected models of the sensors will not be listed one by one here.

[0058] As Figure 1 、 Figure 4 shown, the structure of the liquid storage tank 44 uses a receiving tray as the receiving structure for receiving the filtered electroplating solution. The bottom of the receiving tray of the liquid storage tank 44 is also provided with a support structure such as the support ribs 312, channel steels, and sliding wheels 49 at the bottom of the filtration tank. Further, a liquid level induction probe is provided in the liquid storage cavity of the liquid storage tank 44. The liquid level induction probe is an element commonly used in the prior art for detecting the liquid level height, and the selected models of the sensors will not be listed one by one here. Embodiment

[0059] On the basis of Embodiment 1 or Embodiment 2, as Figures 17 to 18 shown, the purification method of the filtration device for automatically purifying electroplating solution includes the following steps;

[0060] Step S1: Introduce the electroplating solution to be filtered into the filter cup 32 in the feed driving seat 11 through the liquid inlet 131. After rough filtration in the filter cup 32, add pressurized gas through the air inlet 132 to give a positive pressure. At the same time, rotate the stirring paddle 23 introduced into the filter cup 32 to stir the electroplating solution to improve the filtration efficiency.

[0061] Step S2: After passing through the filter cup 32, the electroplating solution falls into the grading filtration part 4 in the filter box body 12 for grading filtration, and is filtered layer by layer through the filter tanks in the grading filtration part 4.

[0062] Step S3: After being filtered layer by layer by the grading filtration part 4, the electroplating solution falls into the liquid storage tank 44 arranged at the lower part of the grading filtration part 4.

[0063] During the above purification process, the usage status of the filter screen on the filter tank is detected by the pressure sensor 6 arranged on the filter tank; the liquid level height of the collected liquid is detected by the liquid level induction probe arranged on the liquid storage tank 44.

[0064] Working principle:

[0065] Through the filter device for automatically purifying electroplating solution in Embodiment 1 or Embodiment 2 of the present invention, high-efficiency filtration is achieved. The filter device for automatically purifying electroplating solution can realize the purification and filtration operation of the electroplating solution, with the liquid flowing from top to bottom. After the present invention is powered on and started, the electroplating solution to be filtered is introduced into the middle filter cup 32 of the pre-filtration structure 3 through the liquid inlet 131, and at the same time, positive pressure gas is introduced into the filter cup 32 of the feed driving seat 11 through the air inlet 132. A positive pressure is provided for the liquid in the filter cup 32 through the air inlet 132 to accelerate the liquid flow and facilitate improving the filtration efficiency of the liquid in the filter cup 32. At the same time, the filter cup 32 adopts an embedded docking structure, which is convenient for the disassembly, installation and cleaning of the filter cup 32. In addition, a stirring paddle 23 introduced into the filter cup 32 is driven. The stirring paddle 23 can also be used to stir the electroplating solution, accelerate the liquid flow, improve the filtration speed and efficiency, and reduce the precipitation of impurities on the filter cup 32.

[0066] The poor single filtration effect affects the electroplating effect. Multi-stage filtration is realized through the middle filter cup 32 of the pre-filtration structure 3 and the multi-layer filter tanks in the grading filtration part 4 to improve the filtration quality. A pressure sensor 6 is installed on each layer of filter tank, as well as an alarm indicator light 8 corresponding to the pressure sensor 6. When the pressure of the filter tank is less than the set value per unit time, it means that the upper filter element needs to be replaced, and the corresponding indicator light 8 will light up to alarm the operator. The lowermost liquid storage tank 44 is the electroplating solution that can be finally recycled. When the liquid level exceeds the warning liquid level, the corresponding indicator light 8 will light up to prompt the operator to collect the electroplating solution.

[0067] Based on the inspiration of the ideal embodiments of the present invention, through the above description, relevant personnel can completely make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and the technical scope must be determined according to the scope of the claims.

Claims

1. An automatic purification filtration device for electroplating solution, comprising a filtration tank body (12), and a feed driving seat (11) arranged on the filtration tank body (12). Characterized in that, An air inlet (132) and a liquid inlet (131) are arranged on the feed driving seat (11); A pre-filtration structure (3) corresponding to the air inlet (132) and the liquid inlet (131) is arranged in the feed driving seat (11); A grading filtration part (4) corresponding to the pre-filtration structure (3) and a liquid storage tank (44) for receiving located below the grading filtration part (4) are arranged in the filtration tank body (12); The pre-filtration structure (3) is docked with the filtration tank body (12) through the feed driving seat (11); The pre-filtration structure (3) includes a fixed ring (31) embedded in the feed driving seat (11), a filter cup (32) is installed on the fixed ring (31), and the filter cup (32) is docked with the air inlet (132) and the liquid inlet (131); The grading filtration part (4) includes a plurality of longitudinally stacked and arranged filtration tanks, and the filtration pores of the filtration tanks in the upper layer of the grading filtration part (4) are larger than those of the filtration tanks in the lower layer; A plurality of axially hub-connected sliding wheels (49) are respectively arranged on both sides of the lower part of the filtration tank, and a plurality of pairs of guide rails (142) are longitudinally spaced in the filtration tank body (12); At least part of the sliding wheel (49) is slidably arranged in the chute of the guide rail (142); Each pair of guide rails (142) is oppositely arranged on the two side walls in the filtration tank body (12); And a chute is arranged on the guide rail (142), and a raised guide bar is arranged in the chute; At least part of the sliding wheel (49) is slidably embedded in the chute, a guide groove is arranged on the outer periphery of the sliding wheel (49), and the guide bar can be at least partially slidably embedded in the guide groove.

2. The automatic purification filtration device for electroplating solution according to claim 1, Characterized in that: A servo motor (2) is arranged on the feed driving seat (11), and a long shaft (22) driven by the servo motor (2) passes through the filter cup (32) and is drivingly connected with a plurality of stirring blades (23).

3. The automatic purification filtration device for electroplating solution according to claim 1, Characterized in that: The cross-section of the upper side of the filtration tank is larger than the cross-section of the lower side of the filtration tank.

4. The automatic purification filtration device for electroplating solution according to claim 1, Characterized in that: A pressure sensor (6) is arranged on the filtration tank; Or / and, a liquid level induction probe is arranged on the liquid storage tank (44).

5. A purification method for an automatic purification filtration device for electroplating solution, Characterized in that: A purification method realized by using the automatic purification filtration device for electroplating solution according to any one of claims 1 to 4, including the following steps; Step S1, introduce the electroplating solution to be filtered into the filter cup (32) of the pre-filtering structure (3) in the feed driving seat (11) through the liquid inlet (131), and conduct rough filtration through the filter cup (32). Add pressurized gas through the air inlet (132) to give a positive pressure. At the same time, rotate the stirring paddle (23) introduced into the filter cup (32) to stir the electroplating solution to improve the filtration efficiency. Step S2, after passing through the filter cup (32), the electroplating solution falls into the grading filtration section (4) in the filter tank body (12) for grading filtration, and is filtered layer by layer through the filter tanks in the grading filtration section (4). Step S3, after being filtered layer by layer by the grading filtration section (4), the electroplating solution falls into the liquid storage tank (44) provided at the lower part of the grading filtration section (4).

6. The purification method of the filtration device for automatically purifying electroplating solution according to claim 5, characterized in that: the usage state of the wire mesh (48) on the filter tank is detected by the pressure sensor (6) provided on the filter tank; the liquid level height is detected by the liquid level induction probe provided on the liquid storage tank (44).

Images