A mask plate manual removal device and its manual removal method

Abstract

The present invention provides a manual removal device for a mask plate and a manual removal method thereof, which includes a positioning drive rod, a first auxiliary rod, a second auxiliary rod and a removal rod. The positioning drive rod includes a positioning rod, a first drive rod and a second drive rod. The first and second drive rods are respectively slidably connected to the left and right ends of the positioning rod to move along the Y direction, and both are provided with grooves. The first and second auxiliary rods are respectively slidably connected to the first and second drive rods, and both are provided with protruding parts, and the protruding parts cooperate with the grooves to drive them to move in opposite directions along the X direction. The removal rod includes a horizontal rod, a first vertical rod and a second vertical rod. The first and second vertical rods are respectively slidably connected to the first and second auxiliary rods to push the removal rod upward to lift the mask plate. The device of the present invention can conveniently, quickly and stably remove the mask plate from the mask plate storage cabinet, avoid the mask plate from colliding with the support or the inner wall of the storage cabinet during the removal process, improve the production efficiency and product yield, and reduce the cost.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor production devices, and relates to a manual removal device for a mask plate and a manual removal method thereof. Background Art

[0002] Lithography technology is one of the core technologies in micro-nano processing fields such as integrated circuit manufacturing, printed circuit board manufacturing, and micro-electromechanical component manufacturing. During the lithography process, a lithography mask plate (also known as a "reticle") is a pattern transfer device or master plate in the microelectronics manufacturing process. Through lithography, the design pattern on the lithography mask plate is transferred to the photoresist, and then through etching, the pattern is etched onto the substrate, thereby realizing the transfer of the pattern to the silicon wafer. Therefore, the mask plate is an essential component in the lithography process.

[0003] Since it is necessary to go through more than a dozen or even dozens of lithography processes during the chip manufacturing process, and each lithography requires a lithography mask plate, the quality of each mask plate will directly affect the quality of lithography. Subtle errors or defects on the mask plate will directly affect the yield and stability of the chip. The mask plate usually consists of a substrate and a light-shielding film. The commonly used materials for the substrate include glass, resin, etc. Among them, the glass substrate is favored due to its stable chemical properties and low thermal expansion rate. The mask plate storage cabinet set inside the machine platform of the commonly used lithography machine can store at most 12 mask plates. Please refer to Figure 1 and Figure 2 wherein, Figure 1 shows a front view schematic diagram of the mask plate storage cabinet 101 of the lithography machine, Figure 2 is Figure 1 a partial enlarged view in Figure 3 . The mask plate 102 (with a dust-proof film 103 provided on the back) is supported by a support member 104 and placed in the mask plate storage cabinet 101. If the machine platform is down for a long time (such as power failure / awaiting materials for more than 6 hours), the staff needs to manually remove the mask plate 102 and transfer it to the machine platform to avoid product line breakage. However, since the distance between the top surface of each storage box in the storage cabinet and the upper surface of the mask plate is extremely narrow (about a few millimeters), directly removing the mask plate from the storage cabinet by hand is likely to cause scratches on the glass surface of the mask template 102 (which will cause product defects) or damage to the dust-proof film 103 (it takes two weeks to repair outside the factory, which may lead to production line breakage). Please refer to

[0004] Therefore, how to provide a mask plate manual removal device and its manual removal method to achieve convenient, fast and stable removal of the mask plate from the mask plate storage cabinet, and avoid scratches on the glass substrate surface, wear of the vacuum adsorption area or damage to the dust-proof film caused by the collision of the mask plate with the support or the inner wall of the storage cabinet during the removal process, so as to improve production efficiency and product yield, and effectively reduce production costs, has become an important technical problem that needs to be solved urgently by those skilled in the art.

[0005] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solutions of the present application and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the present application. Summary of the Invention

[0006] In view of the above-mentioned disadvantages of the prior art, the purpose of the present invention is to provide a manual removal device for a mask plate, which is used to solve the problems in the prior art that the mask plate collides with the storage cabinet or the support, or the dust-proof film collides with the support during the manual removal process of the mask plate, seriously affecting the product yield and production efficiency, and increasing the production cost.

[0007] To achieve the above purpose and other related purposes, the present invention provides a manual removal device for a mask plate, including:

[0008] A positioning driving rod, including a positioning rod, a first driving rod and a second driving rod. The positioning rod extends along the X direction, and the first driving rod and the second driving rod both extend along the Y direction. The X direction is perpendicular to the Y direction. The first driving rod is slidably connected to the left end of the positioning rod to move along the Y direction, and the second driving rod is slidably connected to the right end of the positioning rod to move along the Y direction. Grooves are provided on the opposite surfaces of the first driving rod and the second driving rod.

[0009] A first auxiliary rod and a second auxiliary rod. The first auxiliary rod is located on the right side of the first driving rod and is slidably connected to the first driving rod. The second auxiliary rod is located on the left side of the second driving rod and is slidably connected to the second driving rod. Protrusions are provided on the surfaces of the first auxiliary rod facing the first driving rod and the second auxiliary rod facing the second driving rod. The protrusions are matched with the grooves. When the first driving rod and the second driving rod move along the Y direction, the first auxiliary rod and the second auxiliary rod are driven to move towards each other along the X direction.

[0010] The removal rod includes a horizontal rod, a first vertical rod, and a second vertical rod. The first vertical rod is connected to the left end of the horizontal rod, and the second vertical rod is connected to the right end of the horizontal rod. The first vertical rod is also slidably connected to the first auxiliary rod, and the second vertical rod is also slidably connected to the second auxiliary rod. When the first auxiliary rod and the second auxiliary rod move towards each other in the X direction, the first auxiliary rod and the second auxiliary rod push the removal rod upward to lift the mask.

[0011] Optionally, a slide rail is provided on the surface of the first driving rod having the groove and the surface of the second driving rod having the groove, and the protruding portion slides along the slide rail.

[0012] Optionally, the side surface of the groove close to the positioning rod is an inclined plane, and the side surface of the groove away from the positioning rod is a curved surface.

[0013] Optionally, the top end of the protruding portion is an arc surface.

[0014] Optionally, a ball is provided at the top end of the protruding portion.

[0015] Optionally, the connection surface between the first auxiliary rod and the first vertical rod includes at least one of an inclined plane and a curved surface, and the connection surface between the second auxiliary rod and the second vertical rod includes at least one of an inclined plane and a curved surface.

[0016] Optionally, the angle range of the angle between the inclined plane and the X-Y plane is 10° to 30°.

[0017] Optionally, the number range of the grooves of the first driving rod is 1 to 5, and the number range of the grooves of the first driving rod is 1 to 5.

[0018] Optionally, the positioning driving rod further includes a positioning driving rod handle connected to the positioning rod, and the removal rod further includes a removal rod handle connected to the horizontal rod.

[0019] The present invention also provides a method for manually removing a mask, including the following steps:

[0020] Provide a mask manual removal device as described above;

[0021] Insert the mask manual removal device into the storage compartment of the mask storage cabinet and make the removal rod located below the mask;

[0022] Pulling the first driving rod and the second driving rod outwardly along the Y direction to drive the first auxiliary rod and the second auxiliary rod to move toward each other along the X direction, and the first auxiliary rod and the second auxiliary rod push the removal rod to move upward to lift the mask during the process of moving toward each other along the X direction;

[0023] The removal rod is pulled outward along the Y direction to remove the mask.

[0024] As described above, the manual mask removal device and manual removal method of the present invention can avoid the problem of scratching and abrasion of the mask glass substrate surface due to collision between the mask and the support or the inner wall of the mask storage cabinet due to poor hand stability during the removal process, which further causes product defects, or poor vacuum adsorption of the mask working platform of the lithography machine due to scratches on the vacuum adsorption area of the mask, which leads to the inability to produce. In addition, it can also avoid the production line disconnection caused by damage to the dustproof film of the mask during the mask removal process, improve production efficiency, product yield and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 Shown is a front view schematic diagram of the overall structure of the mask storage cabinet.

[0026] Figure 2 Display as Figure 1 Schematic diagram of the front view of storing a mask in a single storage cell.

[0027] Figure 3 Schematic diagram showing areas where collisions are likely to occur when manually removing the mask.

[0028] Figure 4 Shown is a schematic top view of the overall structure of the manual mask removal device of the present invention.

[0029] Figure 5 Shown is a schematic top view of the partial structure of the first driving rod and the first auxiliary rod.

[0030] Figure 6 Shown is a schematic cross-sectional view of the local structure of the first auxiliary rod and the first vertical rod.

[0031] Figure 7 Shown is a schematic diagram of the steps of the manual mask removal method.

[0032] Figure 8 Shown is a front view schematic diagram of the manual mask removal device when the template is placed in the storage cabinet.

[0033] Figure 9 Shown is a front view schematic diagram of the removal of the rod supporting the mask.

[0034] Figure 10 Shown is a top view schematic diagram when the removal rod supports the mask.

[0035] Figure 11 Shown is a partial structure top view schematic diagram of the first driving rod and the first auxiliary rod after pulling the first driving rod.

[0036] Figure 12 Shown is a partial structure cross-sectional schematic diagram of the first auxiliary rod and the first vertical rod when the removal rod supports the mask.

[0037] Element reference numeral description

[0038] Storage cell 101

[0039] Mask 102

[0040] Dust-proof film 103

[0041] Support 104

[0042] Positioning drive rod 1

[0043] Positioning rod 11

[0044] First driving rod 12

[0045] Second driving rod 13

[0046] Groove 14

[0047] Positioning drive rod handle 15

[0048] First auxiliary rod 2

[0049] Protrusion 21

[0050] Second auxiliary rod 3

[0051] Removal rod 4

[0052] Horizontal rod 41

[0053] First vertical rod 42

[0054] Second vertical rod 43

[0055] Removal rod handle 44 Detailed implementation manners

[0056] The following uses specific specific examples to illustrate the implementation manners of the present invention. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0057] Please refer to Figures 4 to 12 . It should be noted that the illustrations provided in this embodiment only schematically illustrate the basic concept of the present invention. Therefore, only the components related to the present invention are shown in the drawings, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0058] Embodiment 1

[0059] This embodiment provides a manual removal device for a mask plate. Please refer to Figure 4 , which shows a top view structural schematic diagram of the manual removal device of this embodiment, including a positioning driving rod 1, a first auxiliary rod 2, a second auxiliary rod 3, and a removal rod 4.

[0060] Specifically, the positioning driving rod 1 includes a positioning rod 11, a first driving rod 12, and a second driving rod 13. The positioning rod 11 extends along the X direction, and the first driving rod 12 and the second driving rod 13 both extend along the Y direction. The X direction is perpendicular to the Y direction. The first driving rod 12 is slidably connected to the left end of the positioning rod 11 to move along the Y direction, and the second driving rod 13 is slidably connected to the right end of the positioning rod 11 to move along the Y direction. Please refer to Figure 5 , which shows a partial top view structural schematic diagram of the first driving rod 12 and the first auxiliary rod 2. Grooves 14 are provided on the opposite sides of the first driving rod 12 and the second driving rod 13.

[0061] Specifically, the first auxiliary rod 2 is located on the right side of the first driving rod 12 and is slidably connected to the first driving rod. The second auxiliary rod 3 is located on the left side of the second driving rod 13 and is slidably connected to the second driving rod. Protrusion parts 21 are provided on the surfaces of the first auxiliary rod 2 facing the first driving rod 12 and the second auxiliary rod 3 facing the second driving rod 13. The protrusion parts 21 cooperate with the grooves 14. When the first driving rod 12 and the second driving rod 13 move along the Y direction, the first auxiliary rod 2 and the second auxiliary rod 3 are driven to move towards each other along the X direction.

[0062] Specifically, the removal rod 4 includes a horizontal rod 41, a first vertical rod 42, and a second vertical rod 43. The first vertical rod 42 is connected to the left end of the horizontal rod 41, and the second vertical rod 43 is connected to the right end of the horizontal rod 41. The first vertical rod 42 is also slidably connected to the first auxiliary rod 2, and the second vertical rod 43 is also slidably connected to the second auxiliary rod 3. When the first auxiliary rod 2 and the second auxiliary rod 3 move towards each other along the X direction, the first auxiliary rod 2 and the second auxiliary rod 3 push the removal rod 4 upward to lift the mask plate 102.

[0063] As an example, the number range of the grooves 14 on the first driving rod 12 is 1 to 5, and the number range of the grooves 14 on the first driving rod 12 is 1 to 5. In this embodiment, the number of grooves 14 on both the first driving rod 12 and the second driving rod 13 is two. When the number of the grooves 14 is relatively large, it is relatively easy to pull the first driving rod 12 and the second driving rod 13 to drive the first auxiliary rod 2 and the second auxiliary rod 3. However, if the number of the grooves 14 is too large, on the one hand, it will increase the manufacturing difficulty and cost of the device, and on the other hand, it may also cause adverse effects during the use of the device. For example, when the number of the grooves 14 is too large, the distance of the platform area between adjacent grooves 14 is too small. After pulling the driving rod to drive the auxiliary rod to move the moving-out rod 4 upward to support the mask plate 102, due to the pressure exerted by the mask plate 102 on the moving-out rod 4, the protrusion 21 on the auxiliary rod may easily and uncontrollably slide into the groove 14, so that the mask plate 102 suddenly moves downward along with the moving-out rod 4 before it is completely moved out of the storage cabinet, resulting in a collision between the lower surface of the mask plate 102 and the support member 104 and causing damage.

[0064] As an example, one side surface of the groove 14 close to the positioning rod 11 is an inclined plane, and the side surface of the groove 14 far from the positioning rod 11 is a curved surface.

[0065] Specifically, due to the special design of the shapes of the two side surfaces of the groove 14 in the Y direction, on the one hand, the space formed between the side surfaces of the groove 14 can fully accommodate the protrusion 21, making the structure of the device more stable; on the other hand, one side surface being an inclined plane can prevent the auxiliary rod from moving in the opposite direction to the expected direction during subsequent use, and the other side surface being a curved surface can reduce the pulling resistance during the process of pulling the vertical part and save the time for moving out the mask plate 102. In addition, the remaining area of the side surface where the groove 14 is located except for the opening of the groove 14 is a platform area. After the protrusion 21 slides along the groove 14 to the platform area, it no longer continues to move in the X direction. The platform area is smoothly connected to the above-mentioned curved surface. That is, the morphology of the curved surface and the curved surface smoothly connecting the platform area is in an "S" shape, which can minimize the resistance of pulling the driving rod to drive the auxiliary rod to move.

[0066] As an example, a side of the first driving rod 12 having the groove 14 and a side of the second driving rod 13 having the groove 14 are both provided with a slide rail (not shown in the figure), and the protrusion 21 slides along the slide rail. The provision of the slide rail can better restrict the movement route of the protrusion 21, and prevent the movement direction of the auxiliary rod from deviating from the expected route. For example, in the process of pulling the driving rod, the inconsistency of the force direction may cause the protrusion 21 to not only move along the Y direction when sliding on the side of the driving rod, but also to move in the up and down directions, thereby increasing the removal time of the mask 102.

[0067] As an example, the top of the protrusion 21 is an arc surface, or a ball is provided on the top of the protrusion 21. The above-mentioned shape setting of the protrusion 21 is used to easily realize the movement of the auxiliary rod in the X direction during the process of pulling the vertical part. Of course, the shape of the protrusion 21 includes but is not limited to the above two ways, and also includes other shapes or structural settings that can achieve similar easy sliding effects.

[0068] As an example, see Figure 6 , showing a partial cross-sectional view of the removal rod 4 of the first auxiliary rod 2 and the first vertical rod 42, the connection surface between the first auxiliary rod 2 and the first vertical rod 42 includes at least one of an inclined plane and a curved surface, and the connection surface between the second auxiliary rod 3 and the second vertical rod 43 includes at least one of an inclined plane and a curved surface. Taking the connection surface between the first auxiliary rod 2 and the first vertical rod 42 as an example, when the surface of the first auxiliary rod 2 that contacts the first vertical rod 42 is an inclined plane, the surface of the first vertical rod 42 that connects to the first auxiliary rod 2 is also an inclined plane, and the inclination angles of the two are preferably the same, so that the connection surfaces can fit better and achieve balance; when the surface of the auxiliary rod that contacts the removal rod 4 is a curved surface, the surface of the removal rod 4 that contacts the auxiliary rod is also a curved surface, and the curved surfaces of the two need to be consistent.

[0069] As an example, the angle between the inclined plane and the XY plane ( Figure 6 The angle θ) shown in the figure is in the range of 10° to 30°. When the connection surface between the auxiliary rod and the removal rod 4 is an inclined plane, the angle between the contact surface and the horizontal direction is in the range of 10° to 30°, which can achieve the stability of the structure of the device when it is not in use, and ensure that the removal rod 4 can be moved along the Z direction to support the mask 102 through the auxiliary rod in the use state, and the Z direction is perpendicular to the XY plane. In this embodiment, the angle is 20°. In other embodiments, the angle includes but is not limited to 15° and 25°.

[0070] As an example, see Figure 4, the positioning driving rod 1 further includes a positioning driving rod handle 15, the positioning driving rod handle 15 is connected to the positioning rod 11, the moving-out rod 4 further includes a moving-out rod handle 44, and the moving-out rod handle 44 is connected to the horizontal rod 41. The purpose of setting the positioning driving handle is to more conveniently place the device into the space at the lower position in the mask 102 storage cabinet. The purpose of setting the moving-out rod handle 44 is to more conveniently and stably move out the mask 102.

[0071] The mask manual moving-out device of this embodiment can, when manually moving out the mask from the mask storage cabinet, avoid product defects caused by scratches and abrasions on the glass substrate surface of the mask due to poor stability during the moving-out process, resulting in collisions between the mask and the support or the inner wall of the mask storage cabinet, or problems such as poor vacuum adsorption on the mask workbench of the lithography machine due to scratches on the vacuum adsorption area of the mask, which leads to inability to produce. In addition, it can also avoid the situation of production line interruption caused by damage to the dust-proof film of the mask during the moving-out process of the mask.

[0072] Embodiment 2

[0073] This embodiment provides a method for manually taking out a mask. Please refer to Figure 7 , which shows a schematic diagram of the steps of the method for manually taking out a mask in this embodiment, and includes the following steps:

[0074] The present invention also provides a method for manually taking out a mask, including the following steps:

[0075] S1: Provide a mask manual moving-out device as described in Embodiment 1;

[0076] S2: Insert the mask manual moving-out device into the storage compartment of the mask storage cabinet and make the moving-out rod located below the mask;

[0077] S3: Pull the first driving rod and the second driving rod outward in the Y direction to drive the first auxiliary rod and the second auxiliary rod to move towards each other in the X direction. During the process of moving towards each other in the X direction, the first auxiliary rod and the second auxiliary rod push the moving-out rod upward to lift the mask;

[0078] S4: Pull the moving-out rod outward in the Y direction to move out the mask.

[0079] First, please refer to Figure 4 , execute step S1 to provide a mask manual moving-out device as described in Embodiment 1.

[0080] Please refer to Figure 8 and Figures 4 to 6, perform step S2, manually extend the mask plate removal device into the storage cell 101 of the mask plate storage cabinet and position the removal rod 4 below the mask plate 102.

[0081] Please refer to Figures 9 to 12 , perform S3, pull the first drive rod 12 and the second drive rod 13 outward in the Y direction to drive the first auxiliary rod 2 and the second auxiliary rod 3 to move toward each other in the X direction. During the process of the first auxiliary rod 2 and the second auxiliary rod 3 moving toward each other in the X direction, the removal rod 4 is pushed upward to lift the mask plate 102.

[0082] Specifically, please refer to Figure 4 and Figure 8 , place the mask plate manual removal device into the storage cell 101 of the mask plate storage cabinet, such that the positioning drive rod 1, the first auxiliary rod 2, and the second auxiliary rod 3 are above the bottom surface of the storage cell 101. Among them, the sides of the first drive rod 12 and the second drive rod 13 are respectively in contact with the opposite side walls of the storage cell 101, and the removal rod 4 is located in the lower region of the mask plate 102. After the mask plate manual removal device is placed, pull the first drive rod 12 and the second drive rod 13 along the Figure 4 direction indicated by the Y-direction arrow in . Since there is a sliding connection relationship between the protrusion 21 of the first auxiliary rod 2 and the groove 14 of the first drive rod 12 (the protrusion of the second auxiliary rod 3 and the groove 14 of the second drive rod 13), when the first drive rod 12 (the second drive rod 13) is forced to move along the arrow direction, the first auxiliary rod 2 (the second auxiliary rod 3) will move along the direction indicated by the X-direction arrow (the first auxiliary rod 2 and the second auxiliary rod 3 move toward each other in the X direction). The ends of the first auxiliary rod 2 and the second auxiliary rod 3 away from the inner side wall of the storage cell 101 always move along the side surface of the positioning rod 11. During the process of the first auxiliary rod 2 and the second auxiliary rod 3 moving toward each other in the X direction, the first vertical rod 42 slidably connected to the first auxiliary rod 2 will move upward along the Figure 8 direction indicated by the Z-direction arrow in and contact the lower surface of the mask plate 102 to lift the mask plate 102.

[0083] Perform step S4, pull out the removal rod 4 in the Y direction to remove the mask plate 102. After the first vertical rod 42 and the second vertical rod 43 lift the mask plate 102 in step S3, moving the removal rod 4 in the Y direction can remove the mask plate 102. And during the movement, the lower surface of the mask plate 102 and the dust-proof film 103 will not rub against the support member 104, and the mask plate 102 will not tilt and rub against the top surface of the storage cell, which can ensure the structural integrity of the mask plate 102 and the dust-proof film 104. On the one hand, it will not have an adverse impact on the subsequent lithography process. On the other hand, it will not cause the production line to break due to reinstalling the dust-proof film, thus affecting the production efficiency.

[0084] The method for manually removing the mask plate in this embodiment can conveniently, quickly and stably manually remove the mask plate from the mask plate storage cabinet, avoiding scratches and abrasions on the glass substrate surface of the mask plate caused by the collision of the mask plate with the support member or the inner wall of the mask plate storage cabinet during the removal process, or scratches on the vacuum adsorption area of the mask plate, or damage to the dust-proof film of the mask plate caused by friction and collision during the removal process, improving the production efficiency, product yield and reducing the production cost.

[0085] In summary, the mask plate manual removal device and its manual removal method of the present invention can avoid scratches and abrasions on the glass substrate surface of the mask plate caused by the collision of the mask plate with the support member or the inner wall of the mask plate storage cabinet due to the poor stability of the hand during the removal process of the mask plate from the mask plate storage cabinet, further causing product defects, or the problem that the vacuum adsorption on the mask plate working platform of the lithography machine is poor due to scratches on the vacuum adsorption area of the mask plate, resulting in inability to produce. In addition, it can also avoid the production line break caused by the damage of the dust-proof film of the mask plate during the removal process of the mask plate, improving the production efficiency, product yield and reducing the production cost. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

[0086] The above embodiments are only illustrative of the principles and effects of the present invention, and are not used to limit the present invention. Any person familiar with this technology can modify or change the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or changes completed by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed by the present invention should still be covered by the claims of the present invention.

Claims

1. A manual removal device for a photomask, characterized in that Comprising: A positioning drive rod, including a positioning rod, a first drive rod and a second drive rod. The positioning rod extends along the X direction, the first drive rod and the second drive rod both extend along the Y direction, the X direction is perpendicular to the Y direction. The first drive rod is slidably connected to the left end of the positioning rod to move along the Y direction, and the second drive rod is slidably connected to the right end of the positioning rod to move along the Y direction. Grooves are provided on the opposite surfaces of the first drive rod and the second drive rod facing each other. A first auxiliary rod and a second auxiliary rod. The first auxiliary rod is located on the right side of the first drive rod and is slidably connected to the first drive rod. The second auxiliary rod is located on the left side of the second drive rod and is slidably connected to the second drive rod. Protruding portions are provided on the surfaces of the first auxiliary rod facing the first drive rod and the second auxiliary rod facing the second drive rod. The protruding portions cooperate with the grooves. When the first drive rod and the second drive rod move along the Y direction, they drive the first auxiliary rod and the second auxiliary rod to move towards each other along the X direction. A removal rod, including a horizontal rod, a first vertical rod and a second vertical rod. The first vertical rod is connected to the left end of the horizontal rod, and the second vertical rod is connected to the right end of the horizontal rod. The first vertical rod is also slidably connected to the first auxiliary rod, and the second vertical rod is also slidably connected to the second auxiliary rod. When the first auxiliary rod and the second auxiliary rod move towards each other along the X direction, the first auxiliary rod and the second auxiliary rod push the removal rod upward to lift the mask plate.

2. The mask manual removal device according to claim 1, characterized in that: Sliding rails are provided on the surfaces of the first drive rod having the grooves and the second drive rod having the grooves. The protruding portions slide along the sliding rails.

3. The mask manual removal device according to claim 1, wherein: The side surface of the groove close to the positioning rod is an inclined plane, and the side surface of the groove far from the positioning rod is a curved surface.

4. The manual removal device of the mask according to claim 1, wherein: The top end of the protruding portion is an arc surface.

5. The mask manual removal device according to claim 1, wherein: A ball is provided at the top end of the protruding portion.

6. The mask manual removal device according to claim 1, wherein: The connection surface between the first auxiliary rod and the first vertical rod includes at least one of an inclined plane and a curved surface. The connection surface between the second auxiliary rod and the second vertical rod includes at least one of an inclined plane and a curved surface.

7. The mask manual removal device according to claim 6, wherein: The angle range of the included angle between the inclined plane and the X-Y plane is 10° to 30°.

8. The mask manual removal device according to claim 1, characterized in that: The number range of the grooves of the first drive rod is 1 to 5, and the number range of the grooves of the first drive rod is 1 to 5.

9. The mask manual removal device according to claim 1, characterized in that: The positioning drive rod further includes a positioning drive rod handle, the positioning drive rod handle is connected to the positioning rod, and the removal rod further includes a removal rod handle, the removal rod handle is connected to the horizontal rod.

10. A method for manually removing a photomask, characterized in that, Including the following steps: Providing a mask plate manual removal device as described in any one of claims 1-9; Inserting the mask plate manual removal device into the storage compartment of the mask plate storage cabinet and making the removal rod located below the mask plate; Pull the first drive rod and the second drive rod outward in the Y direction to drive the first auxiliary rod and the second auxiliary rod to move towards each other in the X direction. During the process of moving towards each other in the X direction, the first auxiliary rod and the second auxiliary rod push the removal rod upward to lift the mask plate. Pull out the removal rod outward in the Y direction to remove the mask plate.

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