High-temperature calibration furnace for optical fiber pyrometer and temperature correction method

Abstract

The application discloses a high-temperature calibration furnace for an optical fiber high-temperature gauge and a correction method. The high-temperature calibration furnace comprises a resistance wire furnace chamber module, wherein the resistance wire furnace chamber module comprises a shell, a containing cavity for accommodating a lower furnace chamber, a middle furnace chamber and an upper furnace chamber is arranged in the shell, the middle furnace chamber has an H-shaped cross section, the lower furnace chamber and the upper furnace chamber are respectively provided with matched protrusions, and the middle part of the middle furnace chamber is provided with a through hole penetrating along the axial direction of the middle furnace chamber; a resistance wire is embedded in the middle furnace chamber and arranged in a spiral shape, and the two ends of the resistance wire are electrically connected to resistance wire connection terminals on the shell through lead wires; a temperature measuring tube is arranged on the top surface of the lower furnace chamber and along the central axis of the middle furnace chamber, a thermocouple fixing rod arranged along the axial direction of the temperature measuring tube is arranged in the temperature measuring tube, and a thermocouple electrically connected to a temperature controller of an electric control module is arranged at the end of the thermocouple fixing rod; a temperature outlet cylinder communicating with the temperature measuring tube is arranged along the axial center line of the upper furnace chamber, and the temperature outlet cylinder faces the optical fiber high-temperature gauge. The high-temperature calibration furnace can save correction time and is easy to operate.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silicon carbide epitaxial equipment, in particular to a high-temperature calibration furnace for fiber-optic pyrometers and a temperature correction method. BACKGROUND

[0002] CVD equipment (such as MOCVD, SiC-CVD, etc.) for preparing thin film materials is a high-tech equipment integrating vacuum, high temperature, high-speed rotation, etc. In the reaction cavity, the reaction gas flows through the surface of the heated substrate to generate a single crystal thin film of GaN, AlN, SiC or other materials. In this process, the temperature of the substrate is very high, even more than 1200℃ or so. In order to better control the thickness, uniformity, flatness and other quality parameters of the single crystal thin film, the control of the substrate temperature is the key. In order to monitor the temperature of the substrate in real time, a fiber-optic pyrometer is needed to measure the temperature of the substrate, and the fiber-optic pyrometer needs to be corrected regularly to ensure the accuracy of the measurement.

[0003] At present, a black body is mainly used to calibrate the fiber-optic pyrometer. The Planck's law of black body radiation is that the monochromatic radiance of the black body at a certain wavelength is a single-valued function of the temperature. The black body is generated by a black body furnace. The main function of the black body furnace as a black body radiation source is to generate standard radiation at a certain temperature. The black body radiation and the temperature are mainly used in the corresponding relationship. However, the accuracy of the black body calibration is not high, the operation is complex, the calibration time is long, the equipment is expensive, and the power consumption is high. SUMMARY

[0004] To solve the above-mentioned shortcomings, the purpose of the present application is to provide a high-temperature calibration furnace for fiber-optic pyrometers and a temperature correction method, which is used for calibrating the fiber-optic pyrometer.

[0005] In order to achieve the above purposes, the technical scheme adopted by the present application is as follows:

[0006] A high-temperature calibration furnace for fiber-optic pyrometers comprises:

[0007] A resistance wire furnace chamber module comprises:

[0008] A cylindrical shell has a receiving cavity inside, which accommodates a coaxial lower furnace chamber, a middle furnace chamber and an upper furnace chamber. The cross section of the middle furnace chamber is H-shaped. The middle part of the lower furnace chamber and the middle part of the upper furnace chamber have matching protrusions, respectively. The middle part of the middle furnace chamber has a second through hole penetrating along its axial direction.

[0009] The resistance wire is embedded in the middle furnace chamber and arranged in a spiral shape. The two ends of the resistance wire pass through the lower furnace chamber and the shell through the lead lines, respectively, and are electrically connected to the resistance wire connection terminals.

[0010] The temperature measuring tube is arranged on the top surface of the lower furnace and along the central axis of the middle furnace, and a thermocouple fixing rod is arranged along the axial direction of the temperature measuring tube, and a thermocouple is arranged on the end of the thermocouple fixing rod close to the upper furnace, and the distance between the thermocouple and the base surface of the temperature measuring tube is less than or equal to 4 mm, and the thermocouple is electrically connected to the temperature controller of the electric control module.

[0011] A hollow temperature outlet cylinder is arranged along the axial center line of the upper furnace, and the temperature outlet cylinder is connected to the base surface of the temperature measuring tube, and the temperature outlet cylinder is connected to the optical fiber pyrometer, and the optical fiber pyrometer detects the heat radiation generated by the base surface of the temperature measuring tube. The high-temperature calibration furnace is used for calibrating the optical fiber pyrometer of the CVD device, which can save the correction time and is easy to operate.

[0012] Preferably, the resistance wire furnace module comprises:

[0013] Preferably, the optical fiber pyrometer high-temperature calibration furnace further comprises: a centering block embedded in the side of the second through hole away from the lower furnace and sleeved on the temperature measuring tube, for fixing the temperature measuring tube and making it on the central axis of the middle furnace.

[0014] Preferably, the resistance wire is arranged in a spiral shape, and the inner diameter of the resistance wire arranged in a spiral shape is 1-2 mm larger than the diameter of the second through hole of the middle furnace.

[0015] Preferably, the pitch of the resistance wire arranged in a spiral shape is 1.2-1.5 times the diameter of the resistance wire.

[0016] Preferably, the distance between the thermocouple and the base surface of the temperature measuring tube is 1-2 mm.

[0017] Preferably, the shell comprises a bottom shell, a cylindrical shell and a top shell, which are combined to have an accommodating cavity inside, and the accommodating cavity is used to accommodate the lower furnace, the middle furnace and the upper furnace.

[0018] Preferably, a first through hole is formed in the middle of the top shell, and a plurality of grooves are formed on the top shell and radially arranged around the first through hole, and the grooves are connected to the first through hole.

[0019] Preferably, two through holes are formed on the bottom shell for passing through the resistance wire terminals, and an insulating block is sleeved on the resistance wire terminals and fixed with the bottom shell.

[0020] Preferably, the lower furnace, the middle furnace and the upper furnace are respectively made of alumina fiber material.

[0021] The embodiment of the present application provides a temperature correction method for the optical fiber pyrometer high-temperature calibration furnace, and the method comprises the following steps:

[0022] Place the high-temperature calibration furnace directly below the fiber optic pyrometer, ensuring the top of the furnace is within a preset distance of the spray head.

[0023] Adjust the lens of the fiber optic pyrometer to a horizontal position.

[0024] The high-temperature calibration furnace is powered on, and the temperature controller is set to the first target temperature. The high-temperature calibration furnace begins heating, and after reaching and stabilizing the first target temperature...

[0025] The fiber optic pyrometer receives and responds to the thermal radiation emitted by the base surface of the temperature sensing tube, obtaining the first temperature information. The temperature controller is then adjusted to the second target temperature. The fiber optic pyrometer then receives and responds to the thermal radiation emitted by the base surface of the temperature sensing tube, obtaining the second temperature information.

[0026] The second temperature information is compared with the second standard temperature to see if they are consistent or within a preset range. If they are consistent or within the preset range, the calibration of the fiber optic pyrometer is complete. This method is simple to operate and has low power consumption.

[0027] Beneficial effects

[0028] The high-temperature calibration furnace proposed in this application is used to calibrate the fiber optic pyrometer of CVD equipment, which can save calibration time and is easy to operate. The high-temperature calibration furnace has high control accuracy, simple operation, and low power consumption. Attached Figure Description

[0029] The accompanying drawings are provided to illustrate the technical solutions of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the technical solutions of this disclosure and do not constitute a limitation on the technical solutions of this disclosure. The shapes and sizes of the components in the drawings do not reflect actual proportions and are only intended to illustrate the content of this application.

[0030] Figure 1 This is a cross-sectional schematic diagram of the fiber optic pyrometer configured in the reaction chamber according to an embodiment of this application.

[0031] Figure 2 This is a schematic diagram of the structure of a spray head placed in a high-temperature calibration furnace according to an embodiment of this application.

[0032] Figure 3 for Figure 3 A schematic diagram of the structure of a high-temperature calibration furnace with the spray head concealed.

[0033] Figure 4 for Figure 3 A cross-sectional view from the center front view.

[0034] Figure 5 for Figure 4 A cross-sectional schematic diagram of the hidden electrical control box.

[0035] Figure 6 for Figure 2Cross-sectional view under the middle view.

[0036] Figure 7 For Figure 3 Three-dimensional view of the middle hidden top shell and upper hearth.

[0037] Figure 8 Three-dimensional view of the resistance wire around the temperature measuring tube.

[0038] Figure 9 The heating system function topology diagram of the embodiment of the application.

[0039] In the figure, 1, bottom shell, 2, cylindrical shell, 3, top shell, 4, lower hearth, 5, middle hearth, 6, upper hearth, 7, resistance wire, 8, resistance wire terminal, 9, insulating block, 10, thermocouple fixing rod, 11, centering block, 12, temperature outlet cylinder, 13, temperature measuring tube, 131, temperature measuring tube base surface, 14, electric control box, 141, power switch, 142, start button, 143, stop button, 144, temperature controller, 15, spray head, 16, optical fiber pyrometer. DETAILED DESCRIPTION

[0040] The above scheme will be further described in combination with specific embodiments. It should be understood that these embodiments are used to illustrate the application and do not limit the scope of the application. The implementation conditions used in the embodiments can be further adjusted according to the specific manufacturer's conditions, and the implementation conditions not mentioned are usually the conditions in the conventional experiment.

[0041] The application discloses a high-temperature calibration furnace (hereinafter referred to as high-temperature calibration furnace) for an optical fiber pyrometer and a temperature control method. The high-temperature calibration furnace comprises: a resistance wire hearth module, which comprises: a shell having a receiving cavity accommodating a lower hearth, a middle hearth and an upper hearth in the shell, the cross section of the middle hearth is H-shaped, the lower hearth and the upper hearth have matching protrusions respectively, and the middle part of the middle hearth has a through hole penetrating along the axial direction thereof; a resistance wire is embedded in the middle hearth and arranged in a spiral shape, and the two ends of the resistance wire are electrically connected to resistance wire terminals on the shell through lead wires; a temperature measuring tube is arranged on the top surface of the lower hearth and along the central axis of the middle hearth, and the temperature measuring tube is provided with a thermocouple fixing rod arranged along the axial direction thereof, and the end part of the thermocouple fixing rod is provided with a thermocouple electrically connected to a temperature controller of an electric control module; a temperature outlet cylinder is arranged along the axial center line of the upper hearth and communicates with the temperature measuring tube, and the temperature outlet cylinder faces the optical fiber pyrometer, so that the heat radiation energy generated by the base surface of the temperature measuring tube can quickly reach the optical fiber pyrometer. It can save correction time and is easy to operate.

[0042] Next, the high-temperature calibration furnace proposed in the application will be described in combination with the accompanying Figures 1-9

[0043] The high-temperature calibration furnace comprises a resistance wire hearth and an electric control box. ​

[0044] The structure of the resistance wire furnace is shown in Figures 2-8

[0045] The resistance wire furnace comprises:

[0046] A cylindrical shell, which comprises a bottom shell 1, a cylindrical shell 2 and a top shell 3,

[0047] A through hole is formed in the middle of the top shell 3, and a plurality of grooves 31 (also called release grooves) are formed on the top shell 3 and radiate from the through hole. The width of the groove 31 is between 0.1-0.2mm. The release groove can reduce the influence of high temperature on the deformation of the top shell.

[0048] The shell has a receiving cavity, which contains a lower furnace 4, a middle furnace 5 and an upper furnace 6,

[0049] The middle of the lower furnace 4 is provided with a first perforated hole 41 arranged along the axial direction;

[0050] The middle of the middle furnace 5 is provided with a second perforated hole 51 arranged along the axial direction;

[0051] The middle of the upper furnace 6 is provided with a third perforated hole 61 arranged along the axial direction; and the first perforated hole 41, the second perforated hole 51 and the third perforated hole 61 are coaxial after the combination of the lower furnace 4, the middle furnace 5 and the upper furnace 6. The third perforated hole 61 is provided with a temperature outlet cylinder 12.

[0052] The cross section of the middle furnace 5 is H-shaped, and the lower furnace 4 and the upper furnace 6 are respectively in the shape of a few characters (one side of the lower furnace 4 is provided with a protruding part 42 which matches the first receiving part of the middle furnace 5), and the middle furnace 5 also has a second receiving part 52 which matches the protrusion of the upper furnace 6. In this way, the lower furnace 4, the middle furnace 5 and the upper furnace 6 are combined to be columnar and placed in the receiving cavity. The lower furnace 4 is close to the electric control box, and the electric control box is horizontally placed when normally placed, so that the high-temperature calibration furnace is horizontally or approximately horizontally placed on the electric control box.

[0053] In this embodiment, the resistance wire 7 is embedded in the middle furnace 5 around the second perforated hole 51, and the resistance wire 7 does not leak out of the side wall 51a of the second perforated hole 51. The resistance wire is in a spiral shape, and the inner diameter D2 of the spiral resistance wire is 1-2mm larger than the diameter D1 of the second perforated hole 51 of the middle furnace. When manufacturing, the spiral resistance wire can be first fixed and placed in a wooden mold, and then cast into the middle furnace 5.

[0054] The two ends of the resistance wire pass through the lower furnace 4 and the bottom shell 1 respectively and are electrically connected to the resistance wire terminal 8, which is electrically connected to the electric control box. The resistance wire terminal connects the 220V power supply from the electric control box to the resistance wire.

[0055] ​In the above embodiment, the resistance wire terminal 8 is provided with an insulating block 9, preferably, the insulating block 9 is sleeved on the resistance wire terminal 8, thus preventing electric shock. Preferably, the bottom shell 1 is provided with two through holes la for the resistance wire terminal 8 to pass through, and the insulating block 9 is sleeved on the resistance wire terminal 8 and fixed with the bottom shell 1.

[0056] The temperature measuring tube 13 is arranged on the axis of the protrusion 42 of the lower furnace 4 and at the center of the middle furnace 5, and the temperature measuring tube 13 is embedded in the second through hole 51, and the distance between the temperature measuring tube 13 and the resistance wire 7 is very close after combination, so as to improve the detection accuracy. The temperature measuring tube 13 is embedded with a centering block 11 on the side away from the lower furnace 4, the centering block 11 is embedded on one side of the second through hole 51 and sleeved on the temperature measuring tube 13, so as to ensure that the temperature measuring tube 13 is at the center of the middle furnace. One side of the temperature measuring tube 13 is provided with a u-shaped opening 132, and the u-shaped opening 132 is communicated with (opposite to) the temperature outlet tube 12.

[0057] The temperature measuring tube 13 is internally provided with a thermocouple fixing rod 10 arranged along the axial direction of the temperature measuring tube 13, and the top of the thermocouple fixing rod 10 is provided with a thermocouple 10a, the distance between the thermocouple 10a and the base surface 131 of the temperature measuring tube 13 is 1-2mm, and the thermocouple 10a is electrically connected with the temperature controller 144, so that the temperature difference between the temperature read by the temperature controller 144 and the temperature of the base surface of the temperature measuring tube generating heat radiation is very small, and the detection accuracy is improved.

[0058] In the embodiment, the temperature outlet tube 12 is arranged at the center of the upper furnace 6 and communicated with the temperature measuring tube 13, and the heat radiation generated by the base surface 131 of the temperature measuring tube can quickly reach the fiber-optic pyrometer of the CVD equipment (see Figure 5 or Figure 6 ).

[0059] In this embodiment, the cylindrical shell plays a role in fixing and protecting the hearth. In a preferred embodiment, a release groove is radially formed in the middle of the top shell 3 opposite the hole of the temperature outlet cylinder 12, and the depth of the release groove is between 0.1-0.2mm. The release groove can reduce the effect of high temperature on the deformation of the top shell. The lower hearth, the middle hearth and the upper hearth are made of alumina fiber material, which can withstand high temperature. In the above embodiment, the lower hearth and the middle hearth and the middle hearth and the upper hearth are combined by concave-convex combination, also known as trapezoidal staggered step combination, which can be combined more tightly, and the staggered step can reduce the loss of internal heat. The gap 21 between the shell and the hearth is filled with aluminum silicate ceramic fiber felt (not shown in the figure), which plays a role in heat insulation and heat preservation. The resistance wire is arranged in a spiral shape, and the inner diameter of the spiral resistance wire is 1-2mm larger than the diameter of the through hole of the middle hearth, which ensures that the resistance wire is completely wrapped by the middle hearth and is very close to the temperature measuring tube. The pitch of the spiral resistance wire is 1.2-1.5 times the diameter of the resistance wire, which ensures the continuity of the heating of the resistance wire and the uniformity of the temperature field around the temperature measuring tube.

[0060] The electric control box has an electric control module, which includes: a temperature control processor electrically connected to a temperature sampling sensor and a heating system control circuit electrically connected to a heating system.

[0061] The temperature sampling sensor samples the temperature of the heating system in real time and sends the sampled signal to the temperature control processor. The temperature control processor compares the real-time sampled temperature with the target set temperature to adjust the on-off of the heating system control circuit, thereby achieving the purpose of temperature system control. Preferably, the temperature sampling sensor is a thermocouple (in this embodiment, a high-precision thermocouple is used).

[0062] The function topology of the heating system is shown in Figure 9 , which includes:

[0063] The transformer and the heater adjust the voltage applied to the two ends of the heater by adjusting the transformer, so as to change the heating rate of the heating system.

[0064] The switches L3-L4 in the heater loop are SSR-IN controlled contacts. By controlling the voltage across the SSR-IN, the on-off of L3-L4 can be controlled to realize temperature control of the heating system.

[0065] When the switch SW1 is turned on and the SB2 start button is pressed, the main circuit breaker KM1 is turned on to supply power to the primary side of the transformer. When the stop button SB1 is pressed, the KM1 coil loses power, the primary side voltage of the transformer loses power, and the heating stops.

[0066] The temperature control system includes a temperature controller, a temperature sampling circuit, a fault handling circuit and a heating control circuit,

[0067] The temperature sampling circuit is electrically connected to the thermocouple to sample the temperature in the furnace and feed back the sampling value to the temperature controller. The temperature controller uses a differential circuit to process the sampling value and transmit the processed value to the control chip. The control chip processes the sampled temperature value, such as using a PID control algorithm to process the data, and outputs a voltage between output terminals 5 and 6 of the temperature control system to control the on and off of L3 and L4 of the heating system, so as to achieve the purpose of temperature control. The temperature control processor can set different alarm processing modes, such as exceeding the set temperature alarm and setting the temperature deviation alarm. When the alarm signal is triggered, the KA1 coil in the temperature control system will be powered on, and the normally closed contact of KA1 will be disconnected to cut off the heating system. The precision of the thermocouple in this embodiment is one thousandth.

[0068] Next, the control method for calibration using the high-temperature calibration furnace described above is described,

[0069] The method comprises:

[0070] Place the high-temperature calibration furnace directly below the optical fiber pyrometer, and the top of the high-temperature calibration furnace is within a preset range (such as 5-8 mm) from the shower head,

[0071] Adjust the optical fiber pyrometer lens to a horizontal state (such as adjusting the adjusting bolt 161 on the optical fiber pyrometer (see Figure 2 ) to make the optical fiber pyrometer lens horizontal),

[0072] Power on the high-temperature calibration furnace (turn the power switch 141 up), and set a first target temperature on the temperature controller. The high-temperature calibration furnace starts heating (such as pressing the start button 142), and reaches and stabilizes at the first target temperature (such as 1200℃) (such as for 3-5 minutes),

[0073] The optical fiber pyrometer receives and responds to the thermal radiation emitted by the base surface of the temperature measuring tube to obtain first temperature information (the temperature information is obtained through the device connected to the optical fiber pyrometer),

[0074] Adjust the temperature on the temperature controller to the temperature obtained by the optical fiber pyrometer, and adjust to a second target temperature (such as:

[0075] 1300℃),

[0076] The optical fiber pyrometer receives and responds to the thermal radiation emitted by the base surface of the temperature measuring tube to obtain second temperature information. Compare whether the second temperature information is consistent with the second target temperature or within a preset range. If it is consistent or within the preset range, the calibration of the optical fiber pyrometer temperature measurement is completed. The high-temperature calibration furnace has high control precision, simple operation, and low power consumption. If it is not consistent or not within the preset range, adjust or replace the optical fiber pyrometer.

[0077] In this mode, whether the detected temperature of the optical fiber pyrometer follows the adjusted temperature of the high-temperature calibration furnace is observed to check the detection accuracy. In other embodiments, the detection accuracy of the optical fiber pyrometer can also be judged by compensation based on the difference between the first temperature information detected by the optical fiber pyrometer and the standard temperature (the first target temperature) set by the electric control box.

[0078] In an embodiment, whether the second temperature information is consistent with the second standard temperature or within a preset range includes: whether the difference between the second temperature information and the first temperature information is consistent with the difference between the first target temperature and the second target temperature or within a preset range. For example, the first target temperature is 1200℃, the second target temperature is 1300℃, and the difference is 100℃. It is judged whether the optical fiber pyrometer follows 100℃ (or 100℃±2℃) based on the first temperature. If yes, the correction is completed. In other embodiments, the second target temperature can also be lower than the first target temperature.

[0079] In an embodiment, before the calibration, the shower head on which the optical fiber pyrometer is installed is removed from above the reaction chamber.

[0080] The above examples are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent transformation or modification made in the spirit and essence of the present application should be covered within the protection scope of the present application.

Claims

1. A high temperature calibration furnace for optical fiber pyrometers for calibrating CVD equipment, characterized in that, The application relates to a high-temperature calibration furnace for an optical fiber high-temperature gauge. The high-temperature calibration furnace comprises a resistance wire furnace chamber module, which comprises: a cylindrical shell, which has a containing cavity in the shell, the containing cavity containing coaxial lower, middle and upper furnace chambers, the middle furnace chamber being H-shaped in section, the middle part of the lower furnace chamber and the middle part of the upper furnace chamber each having a matched protrusion, and the middle part of the middle furnace chamber having a second through hole penetrating along the axial direction thereof; a resistance wire embedded in the middle furnace chamber and arranged in a spiral shape, two ends of the resistance wire penetrating the lower furnace chamber and the shell through lead wires and being electrically connected to resistance wire connection terminals, the resistance wire being arranged in a spiral shape, and the inner diameter of the spiral-shaped resistance wire being 1-2 mm larger than the diameter of the second through hole of the middle furnace chamber, and the pitch of the spiral-shaped resistance wire being 1.2-1.5 times the diameter of the resistance wire; a temperature measuring tube arranged on the top surface of the lower furnace chamber and along the central axis of the middle furnace chamber, the temperature measuring tube being provided with a thermocouple fixing rod arranged along the axial direction thereof, the end of the thermocouple fixing rod close to the upper furnace chamber being provided with a thermocouple, the distance between the thermocouple and the base surface of the temperature measuring tube being 1-2 mm, and the thermocouple being electrically connected to a temperature controller of an electric control module; a hollow temperature outlet cylinder arranged along the axial center line of the upper furnace chamber, the temperature outlet cylinder being communicated with the base surface of the temperature measuring tube and being communicated with an optical fiber high-temperature gauge, and the optical fiber high-temperature gauge detecting the heat radiation generated by the base surface of the temperature measuring tube.

2. The high-temperature furnace for optical fiber high thermometer calibration according to claim 1, wherein The application further comprises: a centering block embedded in the side of the second through hole away from the lower furnace chamber and sleeved on the temperature measuring tube, the centering block being used for fixing the temperature measuring tube and making the temperature measuring tube be on the central axis of the middle furnace chamber.

3. The high-temperature calibration furnace for the optical fiber high-temperature gauge according to claim 1, wherein the resistance wire is arranged in a spiral shape, and the inner diameter of the spiral-shaped resistance wire is 1-2 mm larger than the diameter of the second through hole of the middle furnace chamber.

4. The high-temperature calibration furnace for the optical fiber high-temperature gauge according to claim 1, wherein the shell comprises a bottom shell, a cylindrical shell and a top shell, and the combination of the bottom shell, the cylindrical shell and the top shell has a containing cavity in the interior, and the containing cavity is used for containing the lower, middle and upper furnace chambers.

5. The high-temperature calibration furnace for the optical fiber high-temperature gauge according to claim 4, wherein a first through hole is formed in the middle part of the top shell, and a plurality of grooves are formed on the top shell and radially arranged along the circumference of the first through hole, and the grooves are communicated with the first through hole.

6. The high-temperature calibration furnace for the optical fiber high-temperature gauge according to claim 4, wherein two through holes are formed on the bottom shell and used for penetrating the resistance wire connection terminals, and an insulating block is sleeved on the resistance wire connection terminals and fixed with the bottom shell.

7. The high-temperature calibration furnace for the optical fiber high-temperature gauge according to claim 1, wherein the lower, middle and upper furnace chambers are respectively made of alumina fiber material. The method comprises the following steps: placing the high-temperature calibration furnace directly below the optical fiber high-temperature gauge, and the distance between the top of the high-temperature calibration furnace and the spray head being within a preset range, adjusting the lens of the optical fiber high-temperature gauge to a horizontal state, and ​ ​ 8. A temperature correction method for a high-temperature calibration furnace for a fiber-optic pyrometer according to any one of claims 1 to 7, characterized in that ​ ​ ​ The high-temperature calibration furnace is powered on and the temperature controller is set to a first target temperature, the high-temperature calibration furnace starts heating, and after the first target temperature is reached and stabilized, The optical fiber pyrometer receives and responds to the thermal radiation emitted by the base surface of the temperature measuring tube to obtain first temperature information, The temperature on the temperature controller is adjusted to a second target temperature, the optical fiber pyrometer receives and responds to the thermal radiation emitted by the base surface of the temperature measuring tube to obtain second temperature information, The second temperature information is compared with the second target temperature to determine whether they are consistent or within a preset range, and if so, the calibration of the optical fiber pyrometer is completed.

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