Cartridge supply system for storing and handling cartridges and processing apparatus equipped therewith

Abstract

The present invention relates to a cartridge supply system for storing and handling cartridges and a processing apparatus equipped therewith. The system has a cartridge storage device provided with a substrate configured and arranged to support cartridges. A cartridge handler having an end effector with at least one protrusion to support and position a cartridge on the end effector is also provided to transfer cartridges to and from the substrate. The substrate can be provided with a substantially planar surface to support cartridges.

Description

[0001] This application is a divisional application of the invention patent application with the application number 201910822356.6, the title of “Cassette supply system for storing and handling cassettes and processing apparatus equipped therewith”, and the filing date of September 2, 2019. TECHNICAL FIELD

[0002] The present invention relates to a cassette supply system for storing and handling cassettes for substrates, and a processing apparatus equipped therewith. The cassette supply system comprises:

[0003] a cassette storage device provided with a substrate configured and arranged to support cassettes; and

[0004] a cassette handler for transferring cassettes to and from the substrate. BACKGROUND

[0005] When processing substrates such as semiconductor wafers in a processing apparatus, the processing apparatus is adapted to the size of the substrates to be processed and is optimized. The size of the substrates is standardized in a limited number of discrete sizes, with a trend of increasing size over the past decade in order to increase production efficiency. Recently introduced substrate sizes are 200 mm and 300 mm diameter. A wafer fabrication facility will typically employ one substrate size.

[0006] To transport substrates, cassettes can be used, which can require a specific cassette supply system. The cassette supply system can be used in a processing apparatus used in the manufacture of discrete and integrated semiconductor products on semiconductor material substrates. The cassette supply system can have a cassette storage device in which a substrate is configured and arranged to support cassettes to store a plurality of cassettes. A cassette handler can be used to transfer cassettes to and from the substrate.

[0007] Figure 1 is a front / bottom perspective view of a cassette 3 with openings 2 for receiving substrates in horizontal slots (not depicted) inside the cassette. The cassette can be provided with notches, for example three elongated grooves 7 as in the bottom 4, for handling / positioning the cassette 3. The ends of the grooves 7 can be closed as shown or open ended. The grooves 7 can be configured by rims extending from the bottom of the cassette 3.

[0008] Figure 2 is a cross-sectional view of a substrate 1 supporting a cassette 3. Board pins 5 can be provided on the substrate 1 and can match the elongated grooves 7 provided on the bottom of the cassette 3 to position the cassette 3.

[0009] Figure 3 depicts a top view of the substrate 1, the end effector 9 of the cassette handler and the grooves 7 of the cassette during transfer of the cassette from the end effector 9 to the substrate 1 (or vice versa). As depicted in Figure 3, the end effector 9 can also be provided with three handler pins 11 which match the three grooves 7 provided on the bottom of the cassette. The cassette can thereby be positioned on the end effector 9 at a predetermined position by the three handler pins 11.

[0010] During transfer of the pod 3 to the movable substrate 1 and from the movable substrate, the three grooves 7 at the bottom of the pod 3 can be in contact with the three plate pins 5 and the three handler pins 11 at the same time. The position of the pod 3 can thus become over-determined. This over-determined position can result in a jerky movement of the transfer of the pod 3, which can result in particle generation. To mitigate the jerky movement, the end effector 9 can need to move very slowly with high precision when the pod 3 is transferred to the substrate 1 and from the substrate, which can deteriorate the throughput of the system and / or result in a more expensive system.

[0011] Therefore, there can be a need to provide an improved pod supply system that accommodates improved transfer of the pod to and from the substrate. SUMMARY

[0012] Therefore, a pod supply system can be provided for storing and handling pods for substrates. The system can include a pod storage device provided with a substrate, the substrate being constructed and arranged to support a pod and a pod handler to transfer the pod to and from the substrate. The pod handler can include an end effector provided with at least one protrusion to support and position the pod on the end effector. The substrate can be provided with a substantially planar surface to support and position the pod.

[0013] By having a substantially planar surface to support and position the pod on the substrate, the position of the pod will not be over-determined during transfer of the pod between the end effector and the substrate.

[0014] A processing apparatus for manufacturing semiconductor products can be provided with a pod supply system according to the present invention. The processing apparatus can further include a processing device to process a substrate, and a substrate handler constructed and arranged to move the substrate from the pod at a substrate loading / unloading station to the processing device, and to move the substrate from the processing device to the pod at the substrate loading / unloading station after processing. The pod supply system can include a pod handler constructed and arranged to transfer the pod from the substrate to the substrate loading / unloading station (and vice versa). Such a system can enable products to be manufactured in larger quantities, and can be easy to maintain and / or install.

[0015] These and other implementations will become apparent from the following detailed description of certain embodiments, which are provided by way of illustration, not of limitation, of the application, in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0016] It should be understood that the elements in the figures are only for the purpose of illustration and that they can not necessarily be to scale, and that individual elements can be represented with exaggerated or minimal dimensions for purposes of simplicity and clarity. For example, the dimensions of some of the elements in the figures can be exaggerated relative to other elements for purposes of improved understanding of the disclosed embodiments.

[0017] Figure 1 is a front / bottom perspective view of a pod according to the prior art.

[0018] Fig. 2 is a cross-sectional view of a portion of a substrate supporting a cassette according to the prior art.

[0019] Fig. 3 depicts a top view of a portion of a substrate, an end effector of a cassette handler and a recess of a cassette during transport according to the prior art.

[0020] Figure 4 A diagrammatic and partially exposed perspective view of a substrate processing apparatus with a cassette supply system according to an embodiment is shown.

[0021] Figure 5 A plan view of a substrate processing apparatus is shown. Figure 4

[0022] Figure 6 A top view of a portion of a substrate, an end effector of a cassette handler and a recess of a cassette during transport of a cassette by a cassette supply system in Figure 4

[0023] Figure 7 A cross-sectional view of a portion of a substrate supporting a cassette in a cassette supply system in Figure 4

[0024] The drawings are not to scale and in particular the dimensions and the thickness directions are exaggerated, for the sake of clarity. Corresponding areas are referred to using the same reference signs, wherever possible. DETAILED DESCRIPTION

[0025] Figure 4 A diagrammatic and partially exposed perspective view is shown, and Figure 5 A plan view of a substrate processing apparatus is shown, the substrate processing apparatus being for substrates provided in a cassette and being provided with a cassette supply system according to an embodiment. The processing area 21 comprises vertical reactors and a substrate processing chamber 22 is provided between the processing area 21 and a cassette handling area 23 to provide substrates to the reactors. The cassette supply system according to an embodiment is provided in the cassette handling area 23 to transport and store cassettes 3. An input / output station of the apparatus to which cassettes 3 are fed or removed is indicated by 33.

[0026] ​​​The substrate 13 is supplied in a cassette 3 which can be placed on an input / output station 33. A cassette handler 32 can transfer the cassette from the input / output station 33 to a cassette storage 8 located in a cassette handling area 23. This can optionally be achieved by a closable opening 34. The cassette storage 8 can be provided with multiple substrates 1 above each other on which the cassettes 3 can be stored. The cassette handler 32 can be provided with a lifting member 35 which can be moved in a vertical direction so that different levels of the substrates 1 can be reached. The cassette handler 32 can be provided with a cassette end effector 9 which can be slightly smaller in size than the size of the cut-out 26 in the substrate 1. When the cassette handler 32 has transferred the cassette 3 into the storage 8, the end effector 9 can be lowered through one of the cut-outs 26 in the substrate 1 to place the cassette 3 on the plate. Subsequently, the cassette handler 32 can retract its end effector 9 from the cassette storage 8.

[0027] Figure 6 A top view of a cut-out portion of a substrate 1, an end effector 9 of a cassette handler 32 and a recess (e.g. a groove 7 of a cassette 3) is depicted during transfer of the cassette 3 from the cassette handler 32 to the substrate 1 (and vice versa). As Figure 6 As depicted in the middle, the end effector 9 can be provided with at least a first protrusion which can match at least a first recess. For example, three handler pins 11 can match three grooves 7 provided at the bottom of the cassette 3. The cassette 3 can hereby be accurately supported and positioned on the end effector 9.

[0028] During transfer of the cassette 3 to and from the movable substrate 1, the edges of the three grooves 7 at the bottom of the cassette 3 can be in contact with a substantially flat surface to support the cassette 3. By having a substantially flat surface to support and position the cassette on the substrate 1, the position of the cassette 3 can not be over-determined during transfer of the cassette between the end effector and the substrate 1, enabling a fast and simple transfer of the cassette.

[0029] The flat surface can comprise a flexible material, for example, rubber which absorbs energy when the cassette is transferred to the surface. The material can have a high friction to maintain the position of the cassette on the flat surface when the substrate 1 is moved.

[0030] The substrate 1 can be provided with multiple pads 25, each pad provided with a flat surface to support a cassette. The substrate 1 can be provided with three pads 25 to support one cassette around one cut-out 26. One pad 25 can be positioned closer to the center 27 of the substrate 1. Two other pads 25 can be positioned closer to the edges of the substrate 1. The pads can be configured on the substrate to match the grooves 11 provided in the substrate of the cassette 3. The pads can be configured in a triangular form. The triangular form can be an isosceles body with at least two edges of the same length, or even an equilateral form with three edges of the same length.

[0031] Figure 7is a cross-sectional view of a portion of the base plate 1 supporting the cassette 3. The pads 25 provided on the base plate 1 can match the elongated recesses 7 provided at the bottom of the cassette 3 to support the cassette 3. The pads 25 can have a thickness between 1 and 10 mm, preferably between 2 and 5 mm to support the cassette 3. The height of the base plate 1 and cassette 3 combination can be reduced by 5 to 20 mm by using the pads 25 instead of the pins 5 (see Fig. 2), which can be advantageous in systems where the vertical space can be limited by the ceiling of the semiconductor manufacturing factory.

[0032] The base plate 1 with its pads 25 can be constructed and arranged such that the flat surface can be the only contact area with the cassette 3. Since the contact area of the pads 25 and the cassette 3 can be larger than in the case of using pins, high pressure zones in the material can be avoided, making the design easier and less sensitive to wear and / or particle formation.

[0033] The three handler pins 11 can determine the position of the cassette 3 in the horizontal plane during the transport of the cassette 3 by the cassette handler 32. The pads 25 allow the cassette 3 to be positioned in the horizontal plane with a certain play. The pads 25 can act as hard stops only in the vertical direction. However, the flexibility of the material of the pads 25 can absorb the energy of the cassette 3 in the vertical direction in order to possibly make the movement of the cassette transport faster while still avoiding particle generation.

[0034] The base plate 1 can be provided with visual markings of the position of the cassette 3 on the base plate 1. For example, during maintenance, an operator can be able to use the visual markings to position the cassette 3 in the correct position on the base plate so that the cassette handler 32 can be able to move the end effector 32 in the cutout 26 to take the cassette away from the pads 25 with its three handler pins 11.

[0035] The cassette handler 32 can be constructed and arranged such that it can be used not only for transferring cassettes between the input / output station 33 and the storage device 8, but also possibly between the storage device 8 and the rotatable cassette transfer platform 30 as substrate loading / unloading station and / or between the input / output station 33 and the rotatable cassette transfer platform 30. The rotatable cassette transfer platform 30 can be constructed such that upon rotation the cassette 3 can be placed against a partition between the cassette handling area 23 and the substrate handling chamber 22, which can be provided with a closure and a closure mechanism 37. After placing the cassette 3 against the closure of the substrate handling chamber 22, the closure mechanism can grab and unlock the closure of the cassette 3 and can remove the closure of the substrate handling chamber 22 simultaneously with the closure of the cassette 3. The rotatable cassette transfer platform 30 as substrate loading / unloading station can comprise at least a first protrusion, e.g. three pins, to support and position the cassette with high precision. The substrate handler 24 can then transfer the substrate from the cassette 3 to the cassette in a smooth manner. The input / output station 33 can comprise at least a first protrusion, e.g. three pins, to support and position the cassette with high precision, so that an automated guided vehicle or an overhead crane system can automatically place or take out the cassettes from the apparatus for further processing in a semiconductor manufacturing factory.

[0036] The substrate handler 24 can transfer the substrate between the associated cassette and the substrate boat 12. After completion of the substrate loading into the substrate boat 12, the arm 16 can move the substrate boat 12 through a closable opening in the substrate handling chamber 22 into the processing chamber 21. The processing chamber 21 can be provided with a rotating boat transfer platform 11 to support the substrate boat 12.

[0037] Two reactors 6, which can be heated, can be arranged in the processing chamber 21. The heated reactors can be positioned vertically and a substrate boat indicated by 12 filled with substrates 13 can be introduced into the reactors 6 from below in vertical direction. For this purpose, each reactor can have an insertion arm 14, which can be moved in vertical direction.

[0038] The processing of a large number of substrates can be performed as follows. In Figure 4 The operator illustrated in Fig. 1 can load the storage device 8 by manually or with the aid of an automated system introducing a plurality of cassettes on the input / output station and performing control operations on the panel 36. Each of the cassettes 3 can be transferred from the input / output station into the storage compartments 31 by means of the cassette handler 32, which are made for these cassettes 3 in the storage device 8. By rotating the substrate 1 about its center with a moving device and using the lifting member 35, it can be possible to fill the various compartments 31 with cassettes 3. After filling the storage device 8, no further human interaction is required with such automated installation. Then, the associated cassette 3 can be selected from the storage device 8 by rotating the substrate 1 and being removed by the cassette handler 32 and placed on the cassette transfer platform 30.

[0039] The cassette transfer platform 30 can comprise two levels, as Figure 4 The levels can be rotated independently of each other. After the cassette transfer platform 30 has been rotated, the cassette can be placed against the closure 37. After the closure of the cassette has been removed, the substrate can be removed by the substrate handler 24 together with the closure 37 and placed in the substrate boat 12. After the substrate boat 12 has been filled with substrate, it can be available for one of the reactors 6, 7, the closure 19 can be opened, and the substrate boat can be placed on the rotating boat transfer platform 10. The boat transfer platform can then move the substrate boat 12 to a position below the reactor to be loaded. The insertion mechanism 14 can then move the boat into the reactor. The processed substrate can perform the above-mentioned movement counter.

[0040] This system is further described in detail in Applicant's PCT publication no. WO 99 / 38199. Although an operator is described to introduce the cassette on the input / output station, the system is designed such that as an alternative, the cassette can be introduced on the input / output station by means of an automated system, such as an automated guided vehicle or an overhead crane system. In this case, the control system of the substrate handling system can be connected to a main computer system that performs the control functions. In this way, no human interaction is required at all at the substrate handling system.

[0041] The size of the main plate 1 can be adapted to the size of the cassette 3, which can be a box-shaped body, with an open front side that can be closed with a closure. The size of the cassette can be determined by the number and size of the substrates in the cassette. The substrate plate 1 can have a thickness between 0.2 and 4 mm, preferably between 0.3 and 3 mm and can be made of a metal such as steel or aluminum.

[0042] The cassette supply system can have a computer in operative connection with an optical sensor, such as a camera. The computer is provided with a processor and a memory, wherein the memory is provided with machine vision software for detecting at least one of the presence and correct orientation of a substrate cassette on the substrate plate.

[0043] The particular implementations shown and described are illustrative examples of the application and its best mode and are not intended to otherwise limit the scope of aspects and implementations in any way. Indeed, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the systems can not be described in detail. Furthermore, the connecting lines shown in the various figures are intended to represent exemplary functional relationships and / or physical couplings between the various elements. Many alternative or additional functional relationships or physical connections can be present in a practical system, and / or absent in some embodiments.

[0044] It is to be understood that the configurations and / or approaches described herein are exemplary in nature, and that these specific embodiments or examples are not to be considered in a limiting sense, because numerous variations are possible. The specific routines or methods described herein can represent one or more of the various processes that can be employed, and therefore, the shown various acts can be performed in the order shown, in other orders or can be omitted. The various processes described herein can be used individually or in combination with one another.

[0045] The subject matter of the present disclosure includes all novel and non-obvious combinations and sub-combinations of the various processes, systems and configurations disclosed herein, and any and all equivalents thereof.

Claims

1. A cassette supply system for storing and handling cassettes for substrates, the system comprising: a cassette storage device provided with a base plate configured and arranged to support cassettes; and a cassette handler for transferring cassettes to and from the base plate and provided with an end effector provided with at least one protrusion to support and position a cassette onto the end effector; wherein the base plate defines a cut-out, the base plate is provided with a plurality of pads around the cut-out, each pad being formed of a flexible material and comprising a flat upper surface, the flat upper surface of the pads engaging a cassette to support the cassette when the cassette is positioned on the base plate; wherein the base plate is configured and arranged such that the flat upper surface of each pad is the only area of contact with a cassette supported by the base plate, wherein the pads are configured to allow a certain clearance of the positioning of the cassette on the base plate in a horizontal plane, wherein the end effector comprises a handling pin matching a recess provided in the bottom of the cassette to determine the position of the cassette in the horizontal plane during transfer of the cassette by the cassette handler.

2. The cassette supply system according to claim 1, wherein the flexible material comprises rubber.

3. The cassette supply system according to claim 1, wherein the flat upper surface of each pad is the portion of each pad furthest away from the base plate.

4. The cassette supply system according to claim 1, wherein the base plate is provided with three pads to support the cassette.

5. The cassette supply system according to claim 1, wherein the pads are positioned in alignment with respective elongated recesses defined in the bottom surface of the cassette.

6. The cassette supply system according to claim 1, wherein the flat upper surface is configured to match and engage respective edges of the elongated recesses defined in the bottom surface of the cassette.

7. The cassette supply system according to claim 1, wherein each pad further comprises a flat lower surface engaging the base plate, the entirety of each pad being disposed between its respective upper surface and its respective lower surface.

8. The cassette supply system according to claim 1, wherein the plurality of pads comprises a triangular form.

9. The cassette supply system according to claim 8, wherein the triangular form comprises an isosceles shape.

10. The cassette supply system according to claim 1, wherein the system is provided with a sensor to detect at least one of the presence and correct orientation of the cassette on the base plate.

11. The cassette supply system according to claim 10, wherein the system is provided with a computer in operable connection with the sensor and provided with a processor and a memory, wherein the memory is provided with machine vision software for detecting at least one of the presence and correct orientation of the cassette on the base plate.

12. A processing apparatus for processing substrates, comprising: a processing device for processing substrates; a substrate handler configured and arranged to move substrates from a cassette at a substrate loading / unloading station to the processing device and to move the substrates from the processing device to a cassette at a substrate loading / unloading station after processing; and a cassette supply system for storing and handling cassettes for substrates, the system comprising: a cassette storage device provided with a base plate configured and arranged to support cassettes; and a cassette handler for transferring cassettes to and from the base plate and provided with an end effector provided with at least one protrusion to support and position a cassette onto the end effector; wherein the base plate defines a cut-out, the base plate is provided with a plurality of pads around the cut-out, each pad being formed of a flexible material and comprising a flat upper surface, the flat upper surface of the pads engaging a cassette to support the cassette when the cassette is positioned on the base plate; wherein the base plate is configured and arranged such that the flat upper surface of each pad is the only area of contact with a cassette supported by the base plate, wherein the pads are configured to allow a certain clearance of the positioning of the cassette on the base plate in a horizontal plane, wherein the end effector comprises a handling pin matching a recess provided in the bottom of the cassette to determine the position of the cassette in the horizontal plane during transfer of the cassette by the cassette handler. A cassette supply system for storing and handling cassettes for substrates according to claim 1.

13. A processing apparatus for processing substrates according to claim 12, the cassette handler being constructed and arranged to transfer a cassette from the substrate to a substrate load / unload station and from the substrate load / unload station to the substrate.

14. A processing apparatus for processing substrates according to claim 12, wherein the processing device comprises a reactor having a reaction chamber for processing a plurality of substrates.

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