Substrate leveling structure and leveling device

Abstract

The application provides a substrate leveling structure and a leveling device, the substrate leveling structure comprises a fixing assembly, a leveling plate and a positioning assembly, the fixing assembly is provided with a first abutting surface, the leveling plate is provided with a second abutting surface, the first abutting surface and / or the second abutting surface is provided as a spherical surface, the second abutting surface abuts against the first abutting surface, the leveling plate is rotatably arranged on the fixing assembly through the second abutting surface and the first abutting surface, one end of the positioning assembly is fixedly arranged on the fixing assembly, the other end of the positioning assembly is movably arranged on the leveling plate, and the positioning assembly is used for fixing the leveling plate. The substrate leveling structure can rotatably arrange the leveling plate on the fixing assembly through the first abutting surface and the second abutting surface, so that the leveling plate can be adjusted within the range of the spherical surface, the adjustment can be omnidirectional, the rotation angle and the position are less limited, and the leveling plate can keep a fixed angle through the positioning assembly.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and in particular to a substrate leveling structure and leveling device. Background Technology

[0002] Semiconductor substrate processing apparatuses are used to process semiconductors using techniques including physical vapor deposition (PVD), chemical vapor deposition (CVD), plasma-enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD), plasma-enhanced atomic layer deposition (PEALD), pulsed deposition layer (PDL), molecular layer deposition (MLD), plasma-enhanced pulsed deposition layer (PEPDL), etching, and resist removal. Products processed using these techniques often exhibit deposition or etching inhomogeneities. Currently, these inhomogeneities are typically improved using rotating substrates or equalizing heaters, but these methods do not effectively solve the problem.

[0003] Chinese patent application CN110997976A discloses a nozzle tilting mechanism that provides coarse and fine adjustments via a differential bolt to adjust the tilt and gap of the nozzle module panel relative to the panel in a semiconductor substrate processing apparatus. With the same gap, this method of angle adjustment uses the location of the differential bolt within the space as the rotation point, and this rotation point is offset from the axis of the nozzle module panel. This results in a significant limitation on the possible angle and orientation of rotation, failing to meet the requirements for omnidirectional adjustment. Summary of the Invention

[0004] The purpose of this invention is to provide a substrate leveling structure and leveling device to improve the problem of limited rotation angle and orientation, and the inability to adjust in all directions.

[0005] To achieve the above objectives, the present invention provides a substrate leveling structure, including a fixing component, an adjusting plate, and a positioning component; the fixing component has a first abutment surface, the adjusting plate has a second abutment surface, and the first abutment surface and / or the second abutment surface are configured as spherical surfaces, the second abutment surface abuts against the first abutment surface, and the adjusting plate is rotatably disposed on the fixing component through the second abutment surface and the first abutment surface; one end of the positioning component is fixedly disposed on the fixing component, and the other end of the positioning component is movably disposed on the adjusting plate, the positioning component being used to fix the adjusting plate.

[0006] The beneficial effects of the substrate leveling structure of the present invention are as follows: the fixing component is provided with a first abutting surface, and the adjusting plate is provided with a second abutting surface. The adjusting plate is rotatably disposed on the fixing component through the first abutting surface and the second abutting surface. The first abutting surface and / or the second abutting surface is set as a spherical surface, so that the adjusting plate can be adjusted within the range of the sphere, and can be adjusted in all directions with little restriction on the rotation angle and orientation. One end of the positioning component is fixedly disposed on the fixing component, and the other end of the positioning component is movably disposed on the adjusting plate. The adjusting plate is fixed to the positioning component through the positioning component, so that the adjusting plate can maintain a fixed angle.

[0007] In one feasible solution, the fixing component includes a fixing plate and a plurality of rollers; the plurality of rollers are slidably or rotatably disposed on the fixing plate, and the cross-sections of the plurality of rollers form the first abutment surface. Its advantage lies in that: by forming the first abutment surface with the cross-sections of the plurality of rollers, the first abutment surface is made spherical, which facilitates reducing the space occupied during adjustment and is easy to manufacture.

[0008] In one feasible solution, at least one of the fixing plate and the adjusting plate is provided with a plurality of sliding grooves, and each roller is correspondingly disposed in each of the sliding grooves. The advantage of this is that the sliding grooves limit or fix the rollers, preventing misalignment and improving stability.

[0009] In one feasible solution, the fixing plate is disposed on the first plane, and the cross-section of each of the sliding grooves passes through the center of the sphere and is perpendicular to the first plane. The advantage is that, because the cross-sections of the sliding grooves all pass through the center of the sphere and are perpendicular to the first plane, the adjusting plate can only rotate along the direction defined by the sliding groove, and will not generate a movement component in the direction parallel to the first plane, thus avoiding twisting or misalignment between the adjusting plate and the fixing assembly.

[0010] In one feasible solution, the positioning component includes a fixing member and several push rods; the fixing member includes a fixing part, a connecting part, and a supporting part; the fixing part is fixedly disposed on the fixing component, the connecting part is fixedly disposed on the fixing part, the supporting part is fixedly disposed on the connecting part, and the supporting part extends to one side of the adjusting plate, and the supporting part is provided with several guide holes; each of the push rods is adjustablely disposed in each of the guide holes, and one end of each push rod abuts against the adjusting plate. Its advantages are: by fixing the connecting part with the fixing part, fixing the supporting part with the connecting part, and by providing several guide holes in the supporting part, extending the supporting part to one side of the adjusting plate, and by providing each of the push rods adjustablely disposed in each of the guide holes, and by having one end of each push rod abut against the adjusting plate, the position and angle of the adjusting plate after adjustment can be fixed, making it convenient to use.

[0011] In one feasible solution, the guide hole is a threaded hole, and the push rod is a set screw. Its advantages are: by setting the set screw within the threaded hole, the distance between the set screw and the adjusting plate can be adjusted as the set screw rotates; the adjusting plate is fixed in place by the combined action of several set screws, facilitating adjustment.

[0012] In one feasible solution, a bellows is also included; both ends of the bellows are fixedly disposed on the fixing component and the adjusting plate, respectively. Its advantage is that the bellows ensures a seal between the adjusting plate and the fixing component, facilitating the fixing of other structures.

[0013] The present invention also provides a leveling device, including a spray assembly and a substrate leveling structure as described in any of the above feasible solutions; the spray assembly is disposed on the substrate leveling structure, and the substrate leveling structure is used to adjust the angle of the spray assembly, the spray assembly being used for coating. Its advantages are: by adjusting the angle of the spray assembly through the substrate leveling structure, it is convenient to adjust the angle of the spray assembly as needed, thus facilitating control of the flatness of the coating.

[0014] In one feasible solution, the center of the sphere is located on the side of the spray assembly away from the fixing component. The advantage of this arrangement is that the rotational center of the spray assembly is located on the side of the spray assembly, minimizing the space required for adjusting the spray assembly.

[0015] In one feasible embodiment, the spray assembly is detachably mounted on the substrate leveling structure. This arrangement facilitates the replacement of the spray assembly and allows for adjustment of its relative position to the substrate leveling structure. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the substrate leveling structure in one embodiment of the present invention;

[0017] Figure 2 for Figure 1 A schematic diagram of the cross-sectional structure;

[0018] Figure 3 for Figure 2 Enlarged schematic diagram of the middle roller, fixed plate, and adjusting plate;

[0019] Figure 4 for Figure 1 A three-dimensional structural diagram of the central fixing plate;

[0020] Figure 5 for Figure 1 A schematic diagram of the three-dimensional structure of the central plate;

[0021] Figure 6 This is a cross-sectional view of the leveling structure in another embodiment of the present invention;

[0022] Figure 7 for Figure 6 A schematic diagram showing the position and structure of the center of the ball and the spray assembly.

[0023] Numbering on the map:

[0024] 1. Fixing component; 101. Fixing plate; 102. Roller; 103. Slide groove;

[0025] 2. Adjust the flat plate;

[0026] 3. Positioning assembly; 301. Fixing component; 302. Top rod;

[0027] 4. Corrugated pipe;

[0028] 5. Target structure;

[0029] 6. Spray system components;

[0030] 7. Substrate leveling structure. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0032] To address the problems existing in the prior art, embodiments of the present invention provide a substrate leveling structure.

[0033] Figure 1 This is a three-dimensional structural diagram of the substrate leveling structure in one embodiment of the present invention. Figure 2 for Figure 1 A cross-sectional structural diagram. Figure 3 for Figure 2 Enlarged schematic diagram of the middle roller, fixed plate, and adjusting plate. Figure 4 for Figure 1 A three-dimensional structural diagram of the central fixing plate. Figure 5 for Figure 1 A schematic diagram of the three-dimensional structure of the medium-pressure plate.

[0034] In some embodiments of the present invention, reference is made to Figure 1 , Figure 4 and Figure 5 The device includes a fixing component 1, an adjusting plate 2, and a positioning component 3. The fixing component 1 has a first abutting surface, and the adjusting plate 2 has a second abutting surface. The first abutting surface and / or the second abutting surface are spherical. The second abutting surface abuts against the first abutting surface. The adjusting plate 2 is rotatably mounted on the fixing component 1 through the second abutting surface and the first abutting surface. One end of the positioning component 3 is fixedly mounted on the fixing component 1, and the other end of the positioning component 3 is movably mounted on the adjusting plate 2. The positioning component 3 is used to fix the adjusting plate 2.

[0035] In some specific embodiments of the present invention, the fixing component 1 is horizontally arranged and circular. A protrusion is provided on the upper surface of the fixing component 1, and the first abutment surface is disposed on the outer side of the protrusion. The adjusting plate 2 is disposed on the upper side of the fixing component 1 via the positioning component 3. The outer edge of the adjusting plate 2 extends to the outer side of the protrusion, and the inner surface of the outer edge of the adjusting plate 2 is the second abutment surface. The first abutment surface and / or the second abutment surface are spherical, and the first abutment surface and the second abutment surface abut against each other. In use, the adjusting plate 2 is adjusted to an adjustable state by adjusting the fixing component 1, and then the angle can be adjusted by manually rotating the adjusting plate. This rotation can include: rotation along the horizontal plane, rotation along the vertical plane, and rotation combining the vertical and horizontal directions. This arrangement forms a ball-cage universal joint structure between the fixing component 1 and the adjusting plate 2, facilitating directional adjustment.

[0036] Furthermore, the fixing component 1 can be configured as square, rectangular, polygonal, or other shapes. Typically, the fixing component 1 has a first through hole, and the adjusting plate 2 has a second through hole. The first through hole is used to avoid the target structure 5 acting on the substrate leveling structure, and the second through hole is used to allow the target structure 5 to extend to the upper side of the adjusting plate 2, and the target structure 5 is fixed on the adjusting plate 2. In this way, the positioning component 3 can fix the angle of the adjusting plate 2 by acting on the target structure 5, so that the positioning component 3 and the adjusting plate 2 do not need to interact directly.

[0037] Furthermore, the first through hole and the second through hole can be located either in the central region of the fixing component 1 and the adjusting plate 2, or in a region of the fixing component 1 and the adjusting plate 2 that is off-center.

[0038] The adjusting plate 2 is configured in the shape of petals, with each petal of the adjusting plate 2 evenly arranged around its circumference. The inner side of the outer edge of each petal forms the second contact surface. This configuration facilitates the provision of installation space for the positioning component 3, reduces the overall size of the substrate leveling structure, and also helps to reduce the weight of the positioning component 3.

[0039] It is worth noting that the adjusting plate 2 can also be configured as a disc, with the outer edge of the disc extending downward to the protrusion of the fixing component 1, and the inner surface of the outer edge of the disc being the second abutment surface. The adjusting plate can also be configured as other shapes.

[0040] In addition, the outer periphery of the fixing component 1 is provided with several bolts for fixing, which facilitates the fixing of the substrate leveling structure to the external structure.

[0041] It is worth mentioning that, in actual setup, an extended tubular structure can also be directly set at the second through hole, and the top end of the positioning component 3 can be set on the extended tubular structure, and the target structure 5 can be set inside the extended tubular structure. This makes it easier to adjust the height of the target structure 5 on the adjusting plate 2.

[0042] In actual use, the top level setting of the plate 2 can usually be adjusted quantitatively using a level or other measuring instrument.

[0043] In some embodiments of the present invention, reference is made to Figures 1 to 3 The fixing component 1 includes a fixing plate 101 and a plurality of rollers 102; the plurality of rollers 102 are slidably or rotatably disposed on the fixing plate 101, and the cross-sections of the plurality of rollers 102 form the first contact surface.

[0044] In some specific embodiments of the present invention, the fixing plate 101 is horizontally arranged, the rollers 102 are spherical or cylindrical, the number of rollers 102 is equal to the number of petals, each roller 102 is evenly distributed between the adjusting plate 2 and the fixing plate 101, the rollers 102 are fixed by the clamping force of the adjusting plate 2 and the fixing plate 101, and the outer tangent of each roller 102 forms the first abutting surface.

[0045] It is worth noting that the outer surface of the protrusion of the fixing plate 101 is set as a spherical surface, so that even if the position of the roller 102 moves during adjustment, the position of the center of the sphere will not move.

[0046] Furthermore, the first abutting surface here is formed by the outer tangent of the plurality of rollers 102. It is worth mentioning that the above-mentioned spherical adjustment effect can also be achieved by simply setting the fixing plate 101 and the adjusting plate 2, and setting one of the first abutting surface and the second abutting surface as a spherical surface and the other as a conical surface, or setting both the first abutting surface and the second abutting surface as spherical surfaces.

[0047] In some embodiments of the present invention, reference is made to Figures 1 to 4 At least one of the fixing plate 101 and the adjusting plate 2 is provided with a plurality of sliding grooves 103, and each roller 102 is correspondingly disposed in each of the sliding grooves 103. The fixing plate 101 is disposed on the first plane, and the cross section of each sliding groove 103 passes through the center of the sphere and is perpendicular to the first plane.

[0048] In some specific embodiments of the present invention, both the fixed plate 101 and the adjusting plate 2 are provided with sliding grooves 103, and the number of sliding grooves 103 is equal to the number of rollers 102. The size of the sliding grooves 103 on the fixed plate 101 is slightly larger than the size of the rollers 102. The sliding grooves 103 on the fixed plate 101 allow the rollers 102 to rotate and / or move slightly within them. The sliding grooves 103 on the adjusting plate 2 extend from the bottom surface of the adjusting plate 2 to the inner top surface, and the sliding grooves 103 on the adjusting plate 2 are located on the second abutment surface. The first plane is the horizontal plane. The cross-sections of the sliding grooves 103 on each adjusting plate 2 are located on different vertical planes, and the sliding grooves 103 on the adjusting plate 2 are inclined relative to the horizontal plane in space. This configuration limits the roller 102 by using the groove 103 on the fixed plate 101, and restricts the rotation of the adjusting plate 2 by the interaction between the groove 103 on the adjusting plate 2 and the roller 102, thus ensuring the normal use of the substrate leveling structure.

[0049] It is worth mentioning that when the roller 102 is spherical, the adjusting plate 2 is initially set parallel to the fixing component 1. After adjusting the angle of the adjusting plate 2, the plane on which the adjusting plate 2 is located is no longer parallel to the plane on which the fixing component 1 is located. At this time, by adjusting the adjusting plate in any direction parallel to the plane on which the adjusting plate 2 is located, the adjusting plate 2 and the fixing component 1 can be made to rotate relative to each other.

[0050] In some embodiments, the cross section of the slide groove 103 may also be inclined, that is, when the roller 102 moves relative to each other in the slide groove 103, the adjusting plate 2 and the fixing component 1 simultaneously rotate relative to each other in the vertical and horizontal directions.

[0051] In some embodiments, the slide groove 103 can be provided on the adjusting plate 2, or on the fixing plate 101, or the slide groove 103 can be provided on both the adjusting plate 2 and the fixing plate 101.

[0052] It is worth mentioning that, under normal circumstances, the fixing component 1 and the adjusting plate 2 are usually set vertically, and the slide groove is also usually set vertically in the cross section of the first abutting surface and / or the second abutting surface. Furthermore, due to the gravity of the roller 102, the length of the slide groove on the fixing plate 101 does not need to be set too long, which can prevent the roller 102 from shifting downward.

[0053] In some embodiments of the present invention, reference is made to Figures 1 to 3The positioning component 3 includes a fixing member 301 and several push rods 302. The fixing member 301 includes a fixing part, a connecting part, and a supporting part. The fixing part is fixedly disposed on the fixing component 1, the connecting part is fixedly disposed on the fixing part, and the supporting part is fixedly disposed on the connecting part, extending to one side of the adjusting plate 2. The supporting part is provided with several guide holes. Each push rod 302 is adjustablely disposed in each of the guide holes, and one end of each push rod 302 abuts against the adjusting plate 2. The guide holes are threaded holes, and the push rods 302 are set screws.

[0054] In some specific embodiments of the present invention, the fixing part of the fixing member 301 is fixedly disposed on the upper surface of the fixing plate 101, the connecting part is fixedly disposed on the fixing part, the supporting part is fixedly disposed on the connecting part, the supporting part is circular and extends to the upper side of the second through hole, and the supporting part is coaxially disposed with the second through hole. The supporting part is provided with a plurality of guide holes, and a plurality of push rods 302 are respectively located in each of the guide holes. The guide holes are threaded holes, and the push rods 302 are push screws. Initially, one end of each push screw abuts against the side wall of the adjusting plate 2 or the target structure 5, so that the adjusting plate 2 maintains the current angle. When adjustment is required, each push screw is rotated to make the adjusting plate 2 in an adjustable state. After adjusting the adjusting plate 2 to the required angle, each push screw is adjusted again to make the push screw abut against the side wall of the adjusting plate 2 or the target structure 5 to achieve fixation again.

[0055] It is worth noting that the guide hole can be set vertically or horizontally. When set horizontally, the inner end of the set screw abuts against the target structure 5 to achieve fixation. When set vertically, the bottom end of the set screw abuts against the upper side of the adjusting plate 2 to achieve fixation.

[0056] Furthermore, the top rod 302 can be a combination of a sliding rod and a locking structure, meaning it can be adjusted to move forward or backward and can also be fixed in a certain position.

[0057] In some embodiments, the fixing component 3 may also be configured as follows: the bottom end of the fixing member is fixedly disposed on the fixing plate 101, the top end of the fixing member extends to the upper side of the second through hole, and the top end of the fixing member is configured as a hollow spherical structure. At the same time, a spherical structure adapted to the hollow spherical structure of the fixing member is disposed at the top end of the extension tube structure of the adjusting plate, and a locking structure is disposed on the hollow spherical structure of the fixing member for positioning. In this way, the angle adjustment and positioning of the adjusting plate 2 can also be realized.

[0058] In some embodiments of the present invention, reference is made to Figure 1 and Figure 2It also includes a bellows 4; the two ends of the bellows 4 are respectively fixed to the fixing component 1 and the adjusting plate 2.

[0059] In some specific embodiments of the present invention, the two ends of the corrugated pipe 4 are respectively fixed to the upper side of the fixing plate 101 and the lower side of the adjusting plate 2. This arrangement forms a sealing structure at the first through hole and the second through hole through the corrugated pipe 4, which facilitates the sealing of the substrate leveling structure when it is used to install external structures.

[0060] Figure 6 This is a cross-sectional view of the leveling structure in another embodiment of the present invention. Figure 7 for Figure 6 A schematic diagram showing the position and structure of the center of the ball and the spray assembly.

[0061] In some embodiments of the present invention, reference is made to Figure 6 and Figure 7 It includes a spray assembly 6 and a substrate leveling structure as described in any of the above embodiments; the spray assembly 6 is disposed on the substrate leveling structure, the substrate leveling structure is used to adjust the angle of the spray assembly 6, and the spray assembly 6 is used for coating.

[0062] In some specific embodiments of the present invention, the target structure is the spray assembly 6. The spray assembly 6 is fixed to the adjusting plate through the first through hole. The spray assembly 6 has a stepped surface at the second through hole. The spray assembly 6 is fixed to the adjusting plate through bolts on the stepped surface. The spray assembly 6 is used to coat the wafer. In use, the leveling device is fixed to the external structure, the wafer is placed under the spray assembly 6, and then the spray assembly 6 is turned on to perform coating. Before coating, the angle of the spray assembly 6 relative to the wafer can be adjusted as needed to ensure the flatness of the coating.

[0063] In addition, it can be fixed by hoisting when in use, or it can be used in any hoisting structure that requires leveling.

[0064] It is worth noting that the spray assembly 6 can also be a physical vapor deposition device, a chemical vapor deposition device, a plasma-enhanced chemical vapor deposition device, or a plasma-enhanced pulse deposition device, etc. The spray assembly 6 can also be a photolithography device, an etching device, a cleaning device, or an ion implantation device, etc.

[0065] In some embodiments of the present invention, reference is made to Figure 6 and Figure 7 The center of the sphere is located on the side of the spray assembly 6 away from the fixing assembly.

[0066] In some specific embodiments of the present invention, the center of the sphere is located on the lower side of the spray assembly 6. This arrangement ensures that the distance between the center of the spray assembly 6 and the wafer does not change when the spray assembly 6 is adjusted, thus guaranteeing that the spraying effect before and after adjustment is the same without changing other conditions.

[0067] It is worth noting that, while ensuring that the relative height between the spray assembly 6 and the adjusting plate does not change, the center of the sphere is located on the side of the spray assembly 6 away from the fixing assembly, so that the position of the center of the sphere does not change when rotating.

[0068] Furthermore, the position of the ball center can be set in any plane of the spray assembly 6 during actual installation. The space required for rotation will change accordingly depending on the setting position.

[0069] In some embodiments of the present invention, reference is made to Figure 6 and Figure 7 The spray assembly 6 is detachably mounted on the substrate leveling structure. In some specific embodiments of the present invention, this arrangement facilitates the maintenance and replacement of the spray assembly 6, as well as the adjustment of its height.

[0070] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A substrate leveling structure, characterized in that, Includes fixing components, adjusting plates, and positioning components; The fixing component has a first abutting surface, the adjusting plate has a second abutting surface, and the first abutting surface and / or the second abutting surface are set as spherical surfaces. The second abutting surface abuts against the first abutting surface, and the adjusting plate is rotatably mounted on the fixing component through the second abutting surface and the first abutting surface. One end of the positioning component is fixedly disposed on the fixing component, and the other end of the positioning component is movably disposed on the adjusting plate. The positioning component is used to fix the adjusting plate. The positioning assembly includes a fixing element and several push rods; The fastener includes a fixing part, a connecting part, and a supporting part; The fixing part is fixedly disposed on the fixing component, the connecting part is fixedly disposed on the fixing part, the supporting part is fixedly disposed on the connecting part, and the supporting part extends to one side of the adjusting plate, and the supporting part is provided with a plurality of guide holes; Each of the aforementioned push rods is adjustablely disposed in each of the aforementioned guide holes, and one end of each of the aforementioned push rods abuts against the adjusting plate. The fixing component is provided with a first through hole, and the adjusting plate is provided with a second through hole. The first through hole is used to avoid the target structure of the substrate leveling structure, and the second through hole is used to allow the target structure to extend to the upper side of the adjusting plate, and the target structure is fixed on the adjusting plate.

2. The substrate leveling structure according to claim 1, characterized in that, The fixing assembly includes a fixing plate and several rollers; The plurality of rollers are slidably or rotatably disposed on the fixed plate, and the cross-sections of the plurality of rollers form the first contact surface.

3. The substrate leveling structure according to claim 2, characterized in that, At least one of the fixing plate and the adjusting plate is provided with a plurality of sliding grooves, and each of the rollers is correspondingly arranged in each of the sliding grooves.

4. The substrate leveling structure according to claim 3, characterized in that, The fixing plate is disposed on the first plane, and the cross section of each of the sliding grooves passes through the center of the sphere and is perpendicular to the first plane.

5. The substrate leveling structure according to claim 1, characterized in that, The guide hole is a threaded hole, and the push rod is a push screw.

6. The substrate leveling structure according to claim 1 or 2, characterized in that, It also includes bellows; The two ends of the bellows are respectively fixed to the fixing component and the adjusting plate.

7. A leveling device, characterized in that, Includes a spray assembly and a substrate leveling structure as described in any one of claims 1 to 6; The spraying assembly is disposed on the substrate leveling structure, the substrate leveling structure is used to adjust the angle of the spraying assembly, and the spraying assembly is used for coating.

8. The leveling device according to claim 7, characterized in that, The center of the sphere is located on the side of the spray assembly away from the fixing assembly.

9. The leveling device according to claim 7 or 8, characterized in that, The spray assembly is detachably mounted on the substrate leveling structure.

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