A cleaning device integrating detection

Abstract

The present invention discloses a cleaning device integrating detection. The device includes: a high-pressure carbon dioxide gas cylinder, a high-pressure auxiliary heating gas cylinder, a temperature and pressure controller, a display screen, a CCD camera, a gas spray gun, a spray gun bracket, a base, a rotating shaft and a fixture disposed inside a working box; the gases in the high-pressure carbon dioxide gas cylinder and the high-pressure auxiliary heating gas cylinder are transported through pipelines to the temperature and pressure controller for temperature and pressure adjustment, and a cleaning agent with different three-phase carbon dioxide composition ratios is generated according to different devices to be cleaned; it is sprayed onto the surface of the device to be cleaned through the gas spray gun; the fixture is disposed on the inner ring of the base driven by the rotating shaft, fixes the device to be cleaned, and rotates along with the rotating shaft; the CCD camera is connected to the display screen to perform high-definition real-time imaging on the device to be cleaned during the cleaning process. The device has the beneficial effects of a compact structure, high integration degree and good cleaning effect.

Description

Technical Field

[0001] The present invention belongs to the technical field of novel cleaning devices, and more specifically, relates to a cleaning device integrating detection. Background Art

[0002] The core of a laser weapon system to destroy a target lies in the high-energy and high-power laser beam it emits, and the quality and performance of optical thin films are important factors affecting and ensuring the performance of the entire system. These high-power laser systems pose higher requirements for the performance of laser thin films. An optical thin film with good characteristics is not only related to its own deposition process but also closely related to the degree of contamination of the optical thin film by various pollutants during use. For optical components already in high-power laser systems, in order to ensure relatively ideal optical thin film characteristics, how to select a reasonable thin film cleaning solution is crucial for cleaning the thin film pollutants existing during use. In addition, in the field of chip manufacturing, it is also necessary to clean precision samples such as silicon, indium phosphide wafers, and patterned chips in the chip manufacturing field without damage.

[0003] At present, the cleaning methods for optical thin films and high-precision devices include chemical reagent cleaning, ultrasonic cleaning, laser cleaning, sand washing process, etc. The above traditional cleaning solutions all have deficiencies. For example, chemical reagent cleaning will cause pollution, the effect of ultrasonic cleaning is poor, laser cleaning is likely to damage the surface of the cleaned device, and the sand washing process may damage the fragile optical thin film. In recent years, the carbon dioxide snow cleaning solution is a jet cleaning process, which can effectively avoid damaging the optical thin film and the surface of precision devices during the cleaning process and the cleaning process of being dry throughout, and has gradually been put into industrial applications.

[0004] However, since the liquid carbon dioxide molecules in the cleaning agent can break the carbon-hydrogen bonds in organic substances, when targeting different devices to be cleaned, if the proportion of liquid carbon dioxide in the cleaning agent does not match the composition of the pollutants on the surface of the device to be cleaned, it will damage the device to be cleaned (such as the surface of high-precision instruments and coated optical devices, etc.); in addition, since the carbon dioxide snow cleaning belongs to a low-temperature process, condensation is likely to occur during the process of the device to be cleaned returning to room temperature after cleaning, thus easily leading to the occurrence of a secondary pollution process; and currently, the commonly used cleaning system and imaging system are two independent systems, and it is impossible to monitor the cleaning state in real time, and continuous observation is required, which reduces the efficiency of cleaning and detection. Summary of the Invention

[0005] Aiming at the defects of the related art, the purpose of the present invention is to provide a cleaning device integrating detection, aiming to solve the technical problems of damaging the device to be cleaned, low efficiency caused by the independence of the cleaning and acquisition systems, and secondary pollution brought by water vapor residue on the surface of the device to be cleaned caused by the condensation phenomenon in the carbon dioxide snow cleaning solution of the prior art.

[0006] To achieve the above object, the present invention provides a cleaning device integrating detection, including: a carbon dioxide high-pressure gas cylinder, an auxiliary heating gas high-pressure gas cylinder, a temperature and pressure controller, a working chamber, a display screen, and a CCD camera, a gas spray gun, a base, a rotating shaft, and a fixture disposed inside the working chamber;

[0007] After the gases in the carbon dioxide high-pressure gas cylinder and the auxiliary heating gas high-pressure gas cylinder pass through pressure reducing valves, they are transported through pipelines to the temperature and pressure controller. The temperature and pressure controller adjusts the temperature and pressure of the gas, and generates a cleaning agent with different three-phase carbon dioxide composition ratios according to different devices to be cleaned;

[0008] The cleaning agent generated by the temperature and pressure controller is sprayed out at high speed through the gas spray gun onto the surface of the device to be cleaned clamped by the fixture for cleaning;

[0009] The spray gun support is disposed on the side wall inside the working chamber and is used to support the gas spray gun;

[0010] The fixture is disposed on the inner ring of the base driven by the rotating shaft, and is used to fix the device to be cleaned and rotate the device to be cleaned following the rotating shaft;

[0011] The CCD camera is disposed directly above the fixture and is electrically connected to the display screen, and is used to perform high-definition real-time imaging on the surface of the device to be cleaned during the cleaning process.

[0012] Optionally, the temperature and pressure controller is connected to the gas spray gun through two pipelines. The first pipeline transports carbon dioxide gas, and the second pipeline transports auxiliary heating gas; the auxiliary heating gas is nitrogen or compressed air, and is used to adjust the temperature of the carbon dioxide gas, thereby adjusting the composition ratio of the three-phase carbon dioxide in the cleaning agent.

[0013] Optionally, the gas spray gun includes: a carbon dioxide spray gun input pipe orifice, a mixing buffer chamber, an auxiliary heating gas input pipe orifice, a Laval nozzle, and a spray gun outlet;

[0014] The carbon dioxide spray gun input pipe orifice and the auxiliary heating gas input pipe orifice are respectively connected to the mixing buffer chamber, and are used to input carbon dioxide gas and auxiliary heating gas into the mixing buffer chamber for mixing to generate a cleaning agent with three-phase carbon dioxide;

[0015] The cleaning agent flows out from the spray gun outlet through the Laval nozzle and impacts the surface of the item to be cleaned.

[0016] Optionally, the cleaning device further includes a spray gun support, and the spray gun support is disposed on the side wall inside the working chamber and is used to support the gas spray gun;

[0017] The spray gun bracket includes a fixed block, a fixed rod, and a movable rod;

[0018] The fixed block is fixedly arranged on the side wall inside the working box;

[0019] One end of the fixed rod is fixed on the fixed block, and the other end is connected to the end of the gas spray gun away from the nozzle, for supporting the gas spray gun;

[0020] One end of the movable rod is connected to the fixed rod, and the other end is connected to the end of the gas spray gun close to the nozzle. The movable rod can move up and down, for adjusting the angle between the gas gun outlet and the surface of the device to be cleaned.

[0021] Optionally, the cleaning device further includes a foot switch;

[0022] The foot switch is composed of two independent pedals, for respectively controlling the valve switches of the carbon dioxide spray gun input pipe orifice and the auxiliary heating gas input pipe orifice in the gas spray gun.

[0023] Optionally, the working box adopts an ultra-clean working box with adjustable temperature and humidity; the working box is filled with a protective gas and has an exhaust system, for preventing impurity gases such as water vapor from mixing in while maintaining the air pressure.

[0024] Optionally, the objective lens part of the CCD camera can be telescoped up and down, for moving and focusing in cooperation with the surface shape of the device to be cleaned with different curvatures during high-definition imaging, to ensure the imaging clarity.

[0025] Optionally, the temperature and pressure controller integrates a pressure controller, a temperature controller, and a reading display screen. The pressure controller is used to control the pressure of the gas introduced into the temperature and pressure controller, the temperature controller is used to control the temperature of the gas introduced into the temperature and pressure controller, and the reading display screen is arranged on the surface of the temperature and pressure controller, for measuring and displaying the values of the pressure and temperature of the gas introduced into the temperature and pressure controller.

[0026] Optionally, the base is funnel-shaped and includes an upper base and a lower base;

[0027] Both the upper base and the lower base include an inner ring and an outer ring, and the inner ring and the outer ring are not linked; the inner ring is connected by a rotating shaft and rotates following the rotating shaft, while the outer ring is fixed.

[0028] Optionally, the Laval nozzle is used to control the mixed gas pressure in the cleaning agent within 1 - 10 kg / cm3.

[0029] Generally speaking, compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:

[0030] (1) The actual effective cleaning agent used is high-purity nitrogen, compressed air, or carbon dioxide with stable chemical properties, non-toxic, and harmless. It has good cleaning effects and does not produce substances that are toxic or harmful to humans and the environment during the cleaning process.

[0031] (2) By adopting integrated technology to achieve mechatronics, the control of gas pressure and temperature is completed by one device; the CDD imaging system is integrated in the working box to monitor the cleaning status in real time, saving time costs and achieving efficient cleaning.

[0032] (3) A funnel-shaped base is used, which has a stable structure. The bottom motor drives the rotation of the rotating shaft, and at the same time, the spray gun bracket can also be adjusted up and down, so as to achieve the effect of cleaning the device to be cleaned without dead angles in all directions.

[0033] (4) A foot switch is used to replace the trigger to control the valve, which improves the operation safety while saving effort. Description of the Drawings

[0034] Figure 1 is a schematic structural diagram of a cleaning device integrating detection provided by an embodiment of the present invention;

[0035] Figure 2(a) is a schematic cross-sectional view of the gas gun spray gun provided by an embodiment of the present invention;

[0036] Figure 2(b) is a schematic diagram of the Laval nozzle provided by an embodiment of the present invention;

[0037] Figure 3 is a schematic diagram of the funnel-shaped base provided by an embodiment of the present invention.

[0038] In all the drawings, the same reference numerals are used to represent the same elements or structures, where: 1 - carbon dioxide high-pressure gas cylinder, 2 - auxiliary heating gas high-pressure gas cylinder, 3 - temperature and pressure controller, 4 - working box, 5 - CCD camera, 6 - gas spray gun, 7 - spray gun bracket, 8 - foot switch, 9 - base, 10 - rotating shaft, 11 - fixture, 12 - screen, 13 - carbon dioxide spray gun input pipe orifice, 14 - mixing buffer chamber, 15 - auxiliary heating gas input pipe orifice, 16 - Laval nozzle, 17 - gas gun outlet, 18 - fixed rod, 19 - movable rod, 20 - motor, 21 - inner ring, 22 - outer ring. Detailed Embodiments

[0039] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0040] The following describes the content involved in the above embodiments in conjunction with a preferred embodiment.

[0041] Embodiment

[0042] As Figure 1 shown, a cleaning device integrating detection includes: a carbon dioxide high-pressure gas cylinder 1, an auxiliary heating gas high-pressure gas cylinder 2, a temperature and pressure controller 3, a working box 4, a display screen 12, and a CCD camera 5, a gas spray gun 6, a base 9, a rotating shaft 10, and a fixture 11 arranged inside the working box 4;

[0043] The gases in the carbon dioxide high-pressure gas cylinder 1 and the auxiliary heating gas high-pressure gas cylinder 2 are sent to the temperature and pressure controller 3 through a pressure reducing valve and then transported through pipelines. The temperature and pressure controller 3 adjusts the temperature and pressure of the gas and generates a cleaning agent with different three-phase carbon dioxide composition ratios according to different devices to be cleaned;

[0044] The cleaning agent generated by the temperature and pressure controller 3 is sprayed at high speed onto the surface of the device to be cleaned clamped by the fixture 11 for cleaning;

[0045] The fixture 11 is arranged on the inner ring 21 of the base 9 driven by the rotating shaft 10, used to fix the device to be cleaned, and rotates the device to be cleaned along with the rotating shaft 10;

[0046] The CCD camera 5 is arranged directly above the fixture 11 and is electrically connected to the display screen 12, used to perform high-definition real-time imaging on the surface of the device to be cleaned during the cleaning process.

[0047] Optionally, the temperature and pressure controller 3 is connected to the gas spray gun 6 through two pipelines. The first pipeline transports carbon dioxide gas, and the second pipeline transports auxiliary heating gas; the auxiliary heating gas is nitrogen or compressed air, used to adjust the temperature of the carbon dioxide gas, thereby adjusting the composition ratio of the three-phase carbon dioxide in the cleaning agent.

[0048] Combined with Figure 1, the carbon dioxide gas in the high-pressure carbon dioxide gas cylinder 1 flows along the hose, passes through the temperature and pressure controller 3 for temperature and pressure regulation, and then flows into the gas spray gun 6; the nitrogen or compressed air in the auxiliary heating gas high-pressure gas cylinder 2 also flows along the hose, passes through the temperature and pressure controller 3 for temperature and pressure regulation, and then flows into the gas spray gun 6, where it mixes with the carbon dioxide to achieve temperature control of the three-phase carbon dioxide. For different devices to be cleaned, the temperature and pressure controller 3 adjusts the temperature and pressure of the carbon dioxide gas and the auxiliary heating gas therein, and adjusts the composition ratio of the three-phase carbon dioxide in the generated cleaning agent. On the premise of ensuring that the devices to be cleaned are not damaged, the best cleaning effect is achieved. Exemplarily, for pollutants such as dust particles, the component ratio of the cleaning agent composed of gas-liquid-solid three-phase carbon dioxide is 5:4:1, and the cleaning effect is the best when the temperature range is around minus 40 degrees; for fingerprints or organic pollutants, the component ratio of the cleaning agent should be 2:3:5, and the temperature range is between minus 65 and minus 50 degrees, and the cleaning effect is the best. Compared with the vast majority of gas media, carbon dioxide has a triple point temperature range where gas, liquid, and solid coexist (from minus 70 degrees to minus 40 degrees). In this embodiment, at a temperature of minus 56.6 °C, it is easy to achieve spraying with a pressure of about 4.2 kg / m3. Among them, the solid carbon dioxide particles play a role in momentum transfer during cleaning, washing away solid particles such as dust; the liquid carbon dioxide molecules can break the carbon-hydrogen bonds in the organic matter and dissolve organic pollutants such as oil stains and fingerprints as a solvent. While the gaseous carbon dioxide flushes away impurities, it can play a protective role.

[0049] Optionally, the gas spray gun 6 includes: a carbon dioxide spray gun input pipe orifice 13, a mixing buffer chamber 14, an auxiliary heating gas input pipe orifice 15, a Laval nozzle 16, and a gas gun outlet 17;

[0050] The carbon dioxide spray gun input pipe orifice 13 and the auxiliary heating gas input pipe orifice 15 are respectively connected to the mixing buffer chamber 14 for inputting carbon dioxide gas and auxiliary heating gas into the mixing buffer chamber 14 for mixing to generate a cleaning agent with gas-liquid-solid three-phase carbon dioxide;

[0051] The cleaning agent flows out from the gas gun outlet 17 through the Laval nozzle 16 and impacts the surface of the item to be cleaned.

[0052] A simplified cross-sectional view of the gas spray gun 6 is shown in Fig. 2(a). Carbon dioxide gas and auxiliary gas enter the mixing buffer chamber 14 through the corresponding carbon dioxide spray gun input nozzle 13 and the auxiliary heat gas input nozzle 15 respectively for mixing, so as to realize the temperature control of the three-phase carbon dioxide by the auxiliary heat gas, generate a cleaning agent of three-phase carbon dioxide with a preset ratio, and finally flow out from the gas gun outlet 17 through the Laval nozzle 16 to impact the surface of the article to be cleaned. A schematic structural view of the Laval nozzle 16 is shown in Fig. 2(b). The gas spray gun nozzle is the Laval nozzle 16, which can control the range of gas jet pressure. In this embodiment, the Laval nozzle 16 controls the mixed gas pressure in the cleaning agent within 1-10 kg / cm 3 , so as to improve the cleaning effect.

[0053] Optionally, the cleaning device further includes a spray gun bracket 7, and the spray gun bracket 7 is arranged on the side wall inside the working box 4 for supporting the gas spray gun 6;

[0054] The spray gun bracket 7 includes a fixed block, a fixed rod 18 and a movable rod 19;

[0055] The fixed block is fixedly arranged on the side wall inside the working box 4;

[0056] One end of the fixed rod 18 is fixed on the fixed block, and the other end is connected to the end of the gas spray gun 6 away from the nozzle for supporting the gas spray gun 6;

[0057] One end of the movable rod 19 is connected to the fixed rod 18, and the other end is connected to the end of the gas spray gun 6 close to the nozzle. The movable rod 19 can move up and down to adjust the angle between the gas gun outlet 17 and the surface of the device to be cleaned.

[0058] As shown in Fig. 2(a), the gas spray gun 6 is fixed on the fixed block of the spray gun bracket 7 through the fixed rod 18, and by means of the up and down rotation of the movable rod 19, the included angle between the gas gun outlet 17 and the plane to be cleaned is adjusted to form the best inflow angle of the cleaning agent to ensure the best cleaning effect. According to the shapes of different devices to be cleaned, different inflow angles of the cleaning agent can be flexibly adjusted, and the application range is wide.

[0059] Optionally, the cleaning device further includes a foot switch 8;

[0060] The foot switch 8 is composed of two independent pedals for respectively controlling the valve switches of the carbon dioxide spray gun input nozzle 13 and the auxiliary heat gas input nozzle 15 in the gas spray gun 6.

[0061] In the gas spray gun 6 mounted on the bracket inside the device, the input pipe orifice 13 of the carbon dioxide spray gun and the input pipe orifice 15 of the auxiliary heating gas are directly connected to two pedals. The valve switch is controlled through the foot switch 8, so as to control the purging of the auxiliary heating gas or the spraying of the mixed gas in the gas spray gun. The foot switch 8 controls the spraying of the three-phase carbon dioxide substance in a foot-operated manner. Due to the high pressure and fast speed of the spraying substance, compared with the traditional hand-held trigger-type control spraying method, it reduces the impact of high pressure on the fingers, coordinates hands and feet, and has the characteristics of stability and safety. Moreover, the foot switch 8 is composed of two independent pedals, which respectively realize the control of the three-phase carbon dioxide substance and the pure auxiliary heating gas, so as to realize the gas purging and the cleaning of the device to be cleaned with the three-phase carbon dioxide substance.

[0062] On the one hand, it can effectively prevent the situation that the trigger cannot be held firmly due to the high-pressure recoil force of the three-phase carbon dioxide substance during the long-term operation process. On the other hand, the two pedals respectively control the nitrogen purging and the mixed gas cleaning to form two cleaning modes. At the same time, a shielding device is installed on the foot pedal to prevent accidental stepping or being pressed down by an object.

[0063] Optionally, the working chamber 4 adopts an ultra-clean working chamber 4 with adjustable temperature and humidity; the working chamber 4 is filled with a protective gas and has an exhaust system, which is used to prevent impurity gases such as water vapor from mixing in while maintaining the air pressure.

[0064] In this embodiment, an ultra-clean working chamber 4 with adjustable temperature and humidity is adopted. The ultra-clean working chamber 4 with adjustable temperature and humidity is filled with a protective gas and has an exhaust system. The working temperature and humidity in the chamber can be flexibly adjusted according to different materials of the devices to be cleaned, which can effectively prevent the generation of secondary pollution caused by water vapor condensation under different climatic conditions during the cleaning process.

[0065] A CCD camera 5 is arranged inside the ultra-clean working chamber 4 with adjustable temperature and humidity, which is convenient for observing the cleaning situation in real time. The CCD camera, gas spray gun, gas gun bracket, base, rotating shaft and fixture are all integrated inside the ultra-clean working chamber with adjustable temperature and humidity, which has the characteristics of high integration, small volume and compact structure.

[0066] Optionally, the objective lens part of the CCD camera 5 can be telescoped up and down, which is used to move the focus in cooperation with the surface shape of the device to be cleaned with different curvatures during the high-definition imaging process to ensure the imaging clarity.

[0067] The CCD camera 5 is arranged directly above the fixture 11 and is connected to the screen 12 outside the ultra-clean working box 4 with adjustable temperature and humidity, forming a high-definition real-time imaging system. It can realize high-definition real-time imaging of the surface of the device to be cleaned clamped by the fixture 11 during the cleaning process to complete the detection process of the surface of the device to be cleaned. Moreover, the objective lens part of the CCD camera 5 can be adjusted in focus by moving up and down to adapt to the high-definition imaging process of the surface shapes of devices to be cleaned with different curvatures, so as to ensure the clarity of the imaging.

[0068] Optionally, the temperature and pressure controller 3 integrates a pressure controller, a temperature controller and a reading display screen. The pressure controller is used to control the pressure of the gas introduced into the temperature and pressure controller 3, the temperature controller is used to control the temperature of the gas introduced into the temperature and pressure controller 3, and the reading display screen is arranged on the surface of the temperature and pressure controller 3 and is used to measure and display the values of the pressure and temperature of the gas introduced into the temperature and pressure controller 3.

[0069] The pressure controller, the temperature controller and the reading display screen are integrated in the temperature and pressure controller 3, which has the characteristic of high integration. Further, the parameters of the pressure controller and the temperature controller can be adjusted through the reading display screen, and appropriate pressure and temperature parameters can be selected when cleaning devices to be cleaned with different materials.

[0070] Optionally, the base 9 is funnel-shaped and includes an upper base and a lower base;

[0071] Both the upper base and the lower base include an inner ring 21 and an outer ring 22, and the inner ring 21 and the outer ring 22 are not linked; the inner ring 21 is connected by a rotating shaft 10 and rotates following the rotating shaft 10, while the outer ring 22 is fixed.

[0072] As Figure 3 shown, the base 9 is funnel-shaped. The funnel-shaped structure has stability and includes an upper base and a lower base. Among them, both the upper and lower bases 9 of the funnel shape include an inner ring 21 and an outer ring 22, and there is no connection between the two rings and they are independent of each other. The inner ring 21 is connected to the rotating shaft 10 and rotates with the rotation of the motor 20, and is made of a material with a small coefficient of friction to reduce energy loss and is conducive to flexible rotation. The fixture 11 is fixed on the inner ring 21 and is used to fix the device to be cleaned and can rotate with the inner ring 21; the rotating shaft 10 rotates driven by the motor 20, making the fixture 11 linked to it, and the device to be cleaned will also rotate accordingly, realizing 360° rotation of the device to be cleaned. At the same time, combined with the spray gun bracket 7 whose pitch angle can be adjusted up and down, it can realize all-round and dead-angle-free cleaning of the device to be cleaned.

[0073] In an embodiment of the present invention, a carbon dioxide high-pressure gas cylinder and an auxiliary heating gas high-pressure gas cylinder are jointly connected to a temperature and pressure controller in a cleaning device integrating detection. The temperature and pressure of the gas are adjusted in the temperature and pressure controller, so that the mixed gas has different composition ratios of carbon dioxide in three physical states. According to the composition of the contaminants on the surfaces of different devices to be cleaned, the composition ratio of carbon dioxide in three physical states in the cleaning agent is adjusted. On the premise of ensuring that the devices to be cleaned are not damaged, the best cleaning effect is achieved. The displacement platform composed of a rotatable funnel-shaped base, a spray gun bracket, and a fixture inside the box body can not only control the horizontal, vertical, and rotational movements of the device to be cleaned, but also ensure flexible adjustment of the pitching angle of the spray gun, effectively ensuring a dead-angle-free cleaning effect for the device to be cleaned. The CCD camera inside the box body and the screen outside the box body constitute a high-definition real-time imaging system, which can achieve real-time high-definition imaging of the surface of the device to be cleaned to complete the detection process of the surface of the device to be cleaned. The technical problems existing in the prior art, such as damage to the devices to be cleaned, low efficiency caused by the independence of the cleaning and acquisition systems, and secondary pollution to the surfaces of the devices to be cleaned caused by water vapor residues, are solved, and the beneficial effects of a compact structure, high integration, high efficiency, good cleaning effect, energy conservation, and environmental protection are achieved.

[0074] It is easy for those skilled in the art to understand that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cleaning device integrating detection, characterized in that, Including: A high-pressure carbon dioxide gas cylinder (1), a high-pressure auxiliary heating gas cylinder (2), a temperature and pressure controller (3), a working chamber (4), a display screen (12), and a CCD camera (5), a gas spray gun (6), a base (9), a rotating shaft (10), and a fixture (11) disposed inside the working chamber (4); After the gases in the high-pressure carbon dioxide gas cylinder (1) and the high-pressure auxiliary heating gas cylinder (2) pass through pressure reducing valves, they are transported through pipelines to the temperature and pressure controller (3). The temperature and pressure controller (3) adjusts the temperature and pressure of the gas and generates a cleaning agent with different three-phase carbon dioxide composition ratios according to different devices to be cleaned; The cleaning agent generated by the temperature and pressure controller (3) is sprayed at high speed through the gas spray gun (6) onto the surface of the device to be cleaned clamped by the fixture (11) for cleaning; The fixture (11) is disposed on the inner ring (21) of the base (9) driven by the rotating shaft (10), and is used to fix the device to be cleaned and rotate the device to be cleaned following the rotating shaft (10); The CCD camera (5) is disposed directly above the fixture (11) and is electrically connected to the display screen (12), and is used to perform high-definition real-time imaging on the surface of the device to be cleaned during the cleaning process; The temperature and pressure controller (3) is connected to the gas spray gun (6) through two pipelines. The first pipeline transports carbon dioxide gas, and the second pipeline transports auxiliary heating gas. The auxiliary heating gas is nitrogen or compressed air, and is used to adjust the temperature of the carbon dioxide gas, thereby adjusting the composition ratio of the three-phase carbon dioxide in the cleaning agent; Among them, solid carbon dioxide particles are used to wash away solid particles, liquid carbon dioxide is used as a solvent to dissolve organic pollutants, and gaseous carbon dioxide is used to flush impurities.

2. The cleaning device according to claim 1, wherein, The gas spray gun (6) includes: a carbon dioxide spray gun input pipe orifice (13), a mixing buffer chamber (14), an auxiliary heating gas input pipe orifice (15), a Laval nozzle (16), and a gas gun outlet (17); The carbon dioxide spray gun input pipe orifice (13) and the auxiliary heating gas input pipe orifice (15) are respectively connected to the mixing buffer chamber (14) for inputting carbon dioxide gas and auxiliary heating gas into the mixing buffer chamber (14) for mixing to generate a cleaning agent with three-phase carbon dioxide; The cleaning agent flows out from the gas gun outlet (17) through the Laval nozzle (16) to impact the surface of the article to be cleaned.

3. The cleaning device according to claim 2, characterized in that, The cleaning device further includes a spray gun support (7). The spray gun support (7) is disposed on the side wall inside the working chamber (4) and is used to support the gas spray gun (6); The spray gun support (7) includes a fixed block, a fixed rod (18), and a movable rod (19); The fixed block is fixedly disposed on the side wall inside the working chamber (4); One end of the fixed rod (18) is fixed to the fixed block, and the other end is connected to the end of the gas spray gun (6) away from the nozzle for supporting the gas spray gun (6); One end of the movable rod (19) is connected to the fixed rod (18), and the other end is connected to one end of the gas spray gun (6) near the nozzle. The movable rod (19) can move up and down to adjust the angle between the gas gun outlet (17) and the surface of the device to be cleaned.

4. The cleaning device according to claim 2, characterized in that, The cleaning device further includes a foot switch (8); The foot switch (8) is composed of two independent pedals, and is used to separately control the valve switches of the carbon dioxide spray gun input pipe orifice (13) and the auxiliary heat gas input pipe orifice (15) in the gas spray gun (6).

5. The cleaning device according to claim 1, characterized in that, The working box (4) is an ultra-clean working box with adjustable temperature and humidity; the working box (4) is filled with a protective gas and has an exhaust system to prevent impurity gases such as water vapor from mixing in while maintaining the air pressure.

6. The cleaning device according to claim 1, wherein The objective lens part of the CCD camera (5) can be telescoped up and down, and is used to move and focus in cooperation with the surface shape of the device to be cleaned with different curvatures during high-definition imaging to ensure the clarity of the imaging.

7. The cleaning device according to claim 1, wherein The temperature and pressure controller (3) integrates a pressure controller, a temperature controller and a reading display screen. The pressure controller is used to control the pressure of the gas introduced into the temperature and pressure controller (3), the temperature controller is used to control the temperature of the gas introduced into the temperature and pressure controller (3), and the reading display screen is arranged on the surface of the temperature and pressure controller (3) to measure and display the values of the pressure and temperature of the gas introduced into the temperature and pressure controller (3).

8. The cleaning device according to claim 1, wherein, The base (9) is funnel-shaped and includes an upper base and a lower base; Both the upper base and the lower base include an inner ring (21) and an outer ring (22), and the inner ring (21) and the outer ring (22) are not linked; the inner ring (21) is connected by a rotating shaft (10) and rotates following the rotating shaft (10), while the outer ring (22) is fixed.

9. The cleaning device according to claim 2, characterized in that, The Laval nozzle (16) is used to control the mixed gas pressure in the cleaning agent at 1-10 kg / cm 3 .

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