Dual-drive electromagnetic microgripper

Abstract

The present invention discloses a dual-drive electromagnetic micro-gripper, comprising: a support portion, comprising a base, a middle plate disposed on the base, and two side plates, the middle plate being located between the two side plates, each side plate being provided with a clamping arm at one end facing away from the base, and the two opposing side surfaces of the middle plate forming cavities with the two side plates; a permanent magnet disposed within the middle plate; a coil mechanism, comprising two FPC coils, each disposed within a corresponding cavity, each FPC coil comprising a multi-layer planar coil; the two FPC coils being independently energized; when the FPC coils are energized, the FPC coils generate a magnetic field and interact with the permanent magnets, causing the corresponding side plate to move, driving the corresponding clamping arm to move. The present invention utilizes planar FPC coils, miniaturizing the electromagnetic micro-gripper and improving reliability; the two FPC coils can be independently energized, thereby increasing the adjustable clamping range; achieving good printing quality and improved clamping accuracy; and achieving high displacement accuracy and rapid response.

Description

Technical Field

[0001] The present invention relates to the field of micro-operation technology, and in particular to a dual-drive electromagnetic micro-gripper. Background Art

[0002] Microgrippers are the end effectors of typical micro-electromechanical systems (MEMS) manipulation and manufacturing equipment, such as micro-nano devices. During operation, they come into direct contact with the object being manipulated, performing an automated grasping-holding-release process. Therefore, the performance of microgrippers directly impacts the quality, efficiency, and precision of micromanipulation.

[0003] Among the existing types of micro-grippers, the electrothermal-driven micro-gripper is based on the principle of thermal expansion. Due to the relatively small thermal strain, it is easy to generate a large output force to produce a large displacement in a specific direction. However, the operating temperature of the electrothermal micro-gripper is high and the response speed is slow. The electrostatic micro-gripper uses the Coulomb force between charges to drive, with high precision and frequency, but is limited by the influence of driving characteristics and materials, and exhibits the disadvantages of excessive driving voltage, small stroke, and small clamping force. The piezoelectric-driven piezoelectric ceramic has a small deformation, requires an additional amplification mechanism, and cannot be manufactured using MEMS technology, and is large in size. The electromagnetic micro-gripper is driven by a coil, has high resolution and fast response speed, and meets the requirements of micro-manipulation precision. However, due to the volume of the electromagnetic coil, the size of the electromagnetic micro-gripper is large, which limits the scope of use of the electromagnetic micro-gripper. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the present invention aims to provide a dual-drive electromagnetic micro-gripper.

[0005] In order to achieve the above objectives, an embodiment of the present invention provides the following technical solutions:

[0006] A dual-drive electromagnetic micro-gripper, comprising:

[0007] A support portion, the support portion comprising a base, a middle plate provided on the base, and two side plates, the middle plate being located between the two side plates, each side plate being provided with a clamping arm at one end facing away from the base, and forming a cavity between two opposite side surfaces of the middle plate and the two side plates;

[0008] a permanent magnet, disposed in the middle plate;

[0009] A coil mechanism, the coil mechanism comprising two FPC coils, each of the FPC coils being disposed in a corresponding cavity, and each of the FPC coils comprising a multi-layer planar coil;

[0010] The two FPC coils are independently energized; when the FPC coils are energized, the FPC coils generate a magnetic field and exert force on the permanent magnet, so that the corresponding side plate moves and drives the corresponding clamping arm to move.

[0011] As a further improvement of the present invention, a central hole and two side holes located on both sides of the central hole are provided in the base, the central hole is connected to the interior of the middle plate, and the side holes are connected to the cavity.

[0012] As a further improvement of the present invention, a stopper and two cover plates are provided. One end of the stopper extends into the middle hole to stop the permanent magnet. Both cover plates are assembled on the base and connected to the other end of the stopper extending from the middle hole.

[0013] As a further improvement of the present invention, a first mounting hole is formed at the other end of the stopper, and a second mounting hole and at least one third mounting hole are formed on the cover plate, wherein the second mounting hole corresponds to the first mounting hole.

[0014] As a further improvement of the present invention, a first limiting groove and a second limiting groove are provided on one side of each cover plate, the depth of the first limiting groove is smaller than the depth of the second limiting groove, a step surface is formed between the first limiting groove and the second limiting groove, and the first mounting hole is connected to the first limiting groove.

[0015] As a further improvement of the present invention, each of the cover plates is provided with at least one limiting hole, the at least one limiting hole is connected to the second limiting groove, and at least one protruding column protrudes outward from the two opposite side surfaces of the base, and the protruding column is placed in the limiting hole.

[0016] As a further improvement of the present invention, notches are passed through the two opposite side surfaces of the base, the notches are connected to the side holes, the side panels are connected to the notches, and the width of the lower ends of the side panels is smaller than the width of the notches.

[0017] As a further improvement of the present invention, the size of the permanent magnet is (2-4) mm×(3-6) mm×(0.5-1.5) mm, and the distance between the permanent magnet and the FPC coil is 0.05-0.15 mm.

[0018] As a further improvement of the present invention, the line width of each layer of the planar coil is 30-80 μm, and the spacing between adjacent turns of each layer of the planar coil is 30-80 μm.

[0019] As a further improvement of the present invention, the plane size of the FPC coil is (2-6) mm×(8-12) mm, the total thickness of the FPC coil is 0.10-0.15 mm, and the total number of turns of the FPC coil is 80-110 turns.

[0020] The beneficial effects of the present invention are:

[0021] (1) The coil of the present invention adopts an FPC coil, which is manufactured by the FPC process. It is a planar micro coil with small size and good flexibility. It is easy to assemble in the side plate to control the overall volume of the clamp. It has a compact structure and a small size. While providing sufficient driving force, it can effectively reduce the size of the micro clamp, realizing the miniaturization of the electromagnetic micro clamp, and has good reliability and is not easy to damage.

[0022] (2) The two FPC coils can be energized independently, so that the two clamping arms can be driven separately, making the adjustable clamping range larger and significantly expanding the application range of the electromagnetic micro-gripper.

[0023] (3) The other structures are printed by a high-precision micron-level 3D printer, which has good printing quality and improves the clamping accuracy.

[0024] (4) High displacement accuracy and fast response, improving the accuracy, stability and speed of clamping. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 A schematic structural diagram of a preferred embodiment of the present invention;

[0027] Figure 2 A schematic bottom view of the structure of a preferred embodiment of the present invention;

[0028] Figure 3 This is a schematic structural diagram of a preferred embodiment of the present invention without permanent magnets and FPC coils;

[0029] Figure 4 Schematic diagram of the structure of a permanent magnet according to a preferred embodiment of the present invention;

[0030] Figure 5 A schematic structural diagram of a stopper according to a preferred embodiment of the present invention;

[0031] Figure 6This is a schematic structural diagram of a cover plate according to a preferred embodiment of the present invention;

[0032] Figure 7 This is a schematic diagram showing the principle of generating attraction between a permanent magnet and two FPC coils according to a preferred embodiment of the present invention;

[0033] Figure 8 Schematic diagram of the top view of the FPC coil according to a preferred embodiment of the present invention;

[0034] Figure 9 This is a bottom-up structural diagram of an FPC coil according to a preferred embodiment of the present invention;

[0035] Figure 10 A structural layer diagram of an FPC coil according to a preferred embodiment of the present invention;

[0036] Figure 11 Graph showing the electrothermal simulation results of an FPC coil according to a preferred embodiment of the present invention;

[0037] Figure 12 Graph showing electromagnetic simulation results of an FPC coil according to a preferred embodiment of the present invention;

[0038] Figure 13 Schematic diagram of the structure of different ends of the clamping arm of a preferred embodiment of the present invention;

[0039] Figure 14 Graph showing the relationship between the attractive force and repulsive force of the FPC coil and the permanent magnet and the voltage in a preferred embodiment of the present invention;

[0040] In the figure: 1. Support part, 11. Base, 111. Middle hole, 112. Side hole, 113. Notch, 114. Raised column, 12. Middle plate, 13. Side plate, 131. Through hole, 14. Cavity, 2. Clamping arm, 3. Permanent magnet, 4. FPC coil, 41. Planar coil, 42. Connecting hole, 43. First electrode, 44. Second electrode, 5. Stopper, 51. First mounting hole, 6. Cover plate, 61. Second mounting hole, 62. Second mounting hole, 63. First limiting groove, 64. Second limiting groove, 65. Limiting hole. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0042] See also Figures 1-8The embodiment of the present application discloses a dual-drive electromagnetic micro-gripper, comprising: a support part 1, the support part 1 comprising a base 11, a middle plate 12 and two side plates 13 arranged on the base 11, the middle plate 12 is located between the two side plates 13, and each side plate 13 is provided with a clamping arm 2 at one end facing away from the base 11, and cavities 14 are formed between the two opposite side surfaces of the middle plate 12 and the two side plates 13 respectively; a permanent magnet 3 is arranged in the middle plate 12; a coil mechanism, the coil mechanism comprises two FPC coils 4, each FPC coil 4 is arranged in a corresponding cavity 14, and each FPC coil 4 comprises a multi-layer planar coil 41; the two FPC coils are independently energized; when the FPC coil 4 is energized, the FPC coil 4 generates a magnetic field and exerts a force on the permanent magnet 3, so that the corresponding side plate 13 moves and drives the corresponding clamping arm 2 to move.

[0043] In this embodiment, the base 11 is provided with a central hole 111 and two side holes 112 located on either side of the central hole 111. The central hole 111 communicates with the interior of the middle plate 12, while the side holes 112 communicate with the cavity 14. This arrangement facilitates the assembly of the permanent magnet 3 into the middle plate 12 along the central hole 111 and the assembly of the FPC coil 4 into the cavity 14 along the side holes 112, resulting in quick and high-quality assembly.

[0044] Specifically, the cross-section of the side panel 13 is [-shaped, and the interior of the side panel 13 is a cavity 14, and the FPC coil 4 is fixed inside the side panel 13. To improve the stability of the FPC coil 4, the side panel 13 is preferably provided with at least one through hole 131, through which glue can be injected into the side panel 13 to adhere the FPC coil 4 to the side panel 13.

[0045] See also Figure 3 There are notches 113 on both opposite sides of the base 11, the notches 113 are connected to the side holes 112, the side panels 13 are connected to the notches 113, and the width of the lower end of the side panels 13 is smaller than the width of the notches 113, which facilitates the movement of the side panels 13, thereby facilitating the movement of the clamping arm 2.

[0046] A stopper 5 and two cover plates 6 are also provided. One end of the stopper 5 extends into the central hole 111 to stop the permanent magnet 3. The two cover plates 6 are assembled to the base 11 and connected to the other end of the stopper 5 extending from the central hole 111. The cover plates 6 are assembled to the base 11 so that the cover plates 6 and the base 11 are integrated. The cover plates 6 are connected to the stopper 5. In this way, the base 11, the two cover plates 6, and the stopper 5 are integrated, so that the permanent magnet 3 is firmly fixed in the central plate 12.

[0047] See also Figure 5 、 Figure 6The other end of the stopper 5 defines a first mounting hole 51, and the cover plate 6 defines a second mounting hole 61 and at least one third mounting hole 62, with the second mounting hole 61 corresponding to the first mounting hole 61. A latch can be inserted sequentially through the second mounting hole 61 of one cover plate 6, the first mounting hole 51 of the stopper 5, and the second mounting hole 61 of the other cover plate 6 to lock the stopper 5 and the two cover plates 6. The third mounting hole 62 of one cover plate 6 corresponds to the third mounting hole 62 of the other cover plate 6, and the latch can be inserted through the two opposing third mounting holes 62 to lock the two cover plates 6 to the base 11.

[0048] A first limiting groove 63 and a second limiting groove 64 are defined on one side of each cover plate 6. The depth of the first limiting groove 63 is less than that of the second limiting groove 64. A stepped surface 65 is formed between the first limiting groove 63 and the second limiting groove 64. The first mounting hole 61 communicates with the first limiting groove 63. The other end of the stopper 5 is located within the space enclosed by the two first limiting grooves 63. The first limiting groove 63 limits the stopper 5, thereby improving its stability. The base 11 is partially located within the second limiting groove 64, improving the stability of the assembly between the base 11 and the cover plate 6.

[0049] Specifically, each cover plate 6 is provided with at least one limiting hole 66, at least one limiting hole 66 is connected to the second limiting groove 64, and at least one protruding column 114 protrudes outward from the two opposite side surfaces of the base 11, and the protruding column 114 is placed in the limiting hole 66, further improving the stability of the connection between the cover plate 6 and the base 11.

[0050] In this embodiment, the support portion 1 is preferably printed and formed by a micron-level 3D printer to improve the clamping accuracy of the clamp. The stopper 5 and the two cover plates 6 are preferably printed and formed by a micron-level 3D printer to improve the assembly quality.

[0051] The FPC coil 4 in this embodiment is a micro-coil manufactured using a flexible printed circuit board (FPC) process. This process uses polyimide or polyester film as a substrate to create a highly reliable and flexible printed circuit board. It features high wiring density, light weight, thinness, and excellent bendability. The present invention utilizes a multilayer board structure to create the FPC coil 4, which not only achieves a very thin design and compact size, but also offers excellent reliability and flexibility, preventing damage and effectively reducing costs.

[0052] Preferably, the line width of each layer of planar coil 41 is 30-80 μm, and the spacing between adjacent turns of each layer of planar coil 41 is 30-80 μm. Specifically, the line width of each layer of planar coil 41 of FPC coil 4 is 60 μm, and the spacing between adjacent turns of each layer of planar coil 41 is 60 μm. This reduces the difficulty of the manufacturing process, improves the consistency of the vertical and horizontal width of the planar coil 41, and makes the planar coil 41 fuller and more uniform, and can achieve a yield rate of 60%.

[0053] The planar dimensions of the FPC coil are (2-6) mm × (8-12) mm, the total thickness of the FPC coil 4 is 0.10-0.15 mm, and the total number of turns of the FPC coil 4 is 80-110 turns. Specifically, the planar dimensions of the FPC coil 4 are 4 mm × 10 mm, the total thickness of the FPC coil 4 is 0.11 mm, and the total number of turns of the FPC coil 4 is 90 turns. The FPC coil 4 includes six layers of planar coils 41. Please refer to Figure 8 、 Figure 9 The six layers of planar coils 41 are staggered. Staggered placement means that the planar coils 41 of adjacent layers are not aligned and stacked, but are staggered by 50-60 μm. Figure 10 There is a PI (polyimide) layer between each layer of planar coils 41, the purpose of which is to isolate the two adjacent planar coils 41. The planar coils 41 are first prepared layer by layer, and then pressed together, and finally connection holes 22 are punched to achieve the connection between each two planar coils 41. Specifically, each layer of planar coils 41 includes a Cu coil and a glue layer covering the relative surfaces of the Cu coils. A PI layer is provided between adjacent planar coils 41, and the connection hole 42 is the connection point between each two planar coils 41. In this embodiment, since six layers of planar coils 41 are provided, the length of the wire is increased, so that the resistance of the FPC coil 4 is lower, the heat generation is lower, and the generated magnetic field strength is stronger. The FPC coil 4 is also provided with a first electrode 43 and a second electrode 44 to facilitate the passage of current from the outside.

[0054] The FPC coil 4 model is simulated to determine the current that can flow into the FPC coil 4 and the placement of the permanent magnet 3. First, an electrothermal simulation is performed using the Thermal-Electric module in Workbench. A current excitation of 0.06A is applied, and the boundary condition is natural air convection on the upper and lower surfaces, that is, only air convection heat dissipation is considered, with a value of 5W / (m2·℃). After solving, the maximum temperature of the FPC coil 4 is 58.9℃, as shown in the figure. Figure 11 As shown, it is within the acceptable range. And the current can be increased appropriately for short-term operation, so the current flowing through the FPC coil 4 can be adjusted from about 0.06A to a maximum of 0.14A. Increasing the current further will cause the simulation temperature to exceed 100°C.

[0055] Then, electromagnetic simulation is performed on the FPC coil 4 model to determine the magnetic field distribution of the FPC coil 4 and the arrangement position of the permanent magnet 3. The simulation software used is Maxwell, and a current excitation of 0.06A is applied to the cross section of the FPC coil 4. The simulation results are as follows: Figure 12 As shown in FIG, the range with the largest magnetic field strength is within 1 mm from the surface of the FPC coil 4, and its value is 4e-3T, where T is the unit of magnetic induction. Therefore, the permanent magnet 3 should be arranged within 1 mm from the FPC coil 4.

[0056] The length and width of the permanent magnet 3 and the distance from the FPC coil 4 were optimized through simulation. The width, length, and distance between the permanent magnet 3 and the FPC coil 4 were set as variables to simulate the interaction force between the permanent magnet 3 and the FPC coil 4. Table 1 shows some of the simulated data. It can be seen from the table that when the width of the permanent magnet 3 changes from 2.8mm to 3.6mm, the interaction force does not change much, but when the width increases to 5mm, the interaction force actually decreases; after the length changes from 10mm to 5mm, the change in the interaction force is not obvious; the closer the permanent magnet 3 is to the FPC coil 4, the greater the interaction force. The preferred size of the permanent magnet 3 is (2-4)mm×(3-6)mm×(0.5-1.5)mm, and the distance between the permanent magnet 3 and the FPC coil 4 is 0.05-0.15mm. According to the data in the table, the permanent magnet 3 is finally selected to have a width of 3 mm, a length of 5 mm, and a thickness of 1 mm, that is, the size of the permanent magnet 3 is 3 mm × 5 mm × 1 mm, and the permanent magnet 3 is arranged 0.1 mm away from the FPC coil 4 to ensure a strong interaction force between the permanent magnet 3 and the FPC coil 4.

[0057] Table 1 Numerical results of simulation of permanent magnets with different parameters

[0058] width length Distance from FPC coil Interaction force 2.8mm 10mm 1mm 6.37mN 2.8mm 10mm 0.1mm 13.95mN 3mm 10mm 1mm 6.5mN 3mm 10mm 0.1mm 14.22mN 3.6mm 10mm 1mm 6.6mN 3.6mm 10mm 0.1mm 14.27mN 5mm 10mm 1mm 5.47mN 5mm 10mm 0.1mm 12.16mN 3mm 6mm 1mm 7.06mN 3mm 6mm 0.1mm 17.98mN 3mm 5mm 1mm 7.6mN 3mm 5mm 0.1mm 19.10mN 3mm 4mm 1mm 7.5mN 3mm 4mm 0.1mm 18.84mN

[0059] Except for the FPC coil 4 and the permanent magnet 3, the other structures of the micro-gripper are all printed and formed using photosensitive resin through a micron-level 3D printer. The photosensitive resin is mainly composed of polymer monomers and prepolymers, which are doped with photosensitizers. When irradiated with ultraviolet light of a wavelength of 250 to 300 nm, it will immediately cause a polymerization reaction and complete the solid-state conversion. The micro-gripper of this embodiment uses photosensitive resin as a material. After curing, it has a high hardness, is not easy to break, and has a certain flexibility. It can work in complex and harsh environments. In this way, the end of the micro-gripper can also be designed into different complex shapes to suit different clamped objects, such as Figure 13 shown. Figure 13 The ends of the two clamping arms 2 shown in (a) are both vertical, suitable for clamping objects with a diameter of 100 μm to 400 μm. Preferably, the two clamping arms 2 are 200 μm apart. Figure 13The ends of the two clamping arms 2 shown in (b) are both hollow, the clamping surface is arc-shaped and is provided with a hollow drainage structure, which is suitable for clamping objects in liquids. Figure 13 The ends of the two clamping arms 2 shown in (c) are both arc-shaped, suitable for clamping spherical objects. Preferably, the two clamping arms 2 are 140 μm apart. Figure 13 The ends of the two clamping arms 2 shown in (d) are both serrated, and a plurality of serrations with a pitch of 20 μm are provided on the clamping surface, thereby increasing the roughness of the clamping surface to clamp the object more stably. Figure 13 The two gripping arms 2 shown in (e) have specially shaped tips, capable of gripping objects of specific shapes. Different tip shapes can be tailored to the specific object being gripped. Combined with the convenience of high-precision 3D printing, microgrippers tailored to specific objects can be easily manufactured.

[0060] Experiments were conducted on the manufactured FPC coil 4 to measure the attraction and repulsion between the FPC coil 4 and the permanent magnet 3. The FPC coil 4 was fixed on an electronic balance, and the NdFe35 permanent magnet 3 with a size of 3mm×5mm was fixed on a spiral fine-tuning table. The height of the spiral fine-tuning table was adjusted so that the FPC coil 4 and the permanent magnet 2 were 150μm apart. The force between the FPC coil 4 and the permanent magnet 3 was changed by changing the magnitude and direction of the voltage passed through the FPC coil 4, and the value of the force was obtained based on the reading of the electronic balance. The resolution of the electronic balance used is one ten-thousandth. The data measured in the experiment were plotted into a curve, as shown in the figure. Figure 14 As shown, Figure 14 (a) is the relationship between suction force and voltage, Figure 14 (b) is a graph showing the relationship between repulsive force and voltage. At a drive current of 0.1A (or a drive voltage of 2.5V), the experimentally measured value is around 8mN, while the simulated value is 9.2mN, a 15% difference. This indicates that the simulation results are reliable.

[0061] Microgripper microassembly experiments were conducted using an experimental platform consisting of an operating platform, a mounting platform, a microscope, a monitor, and a power supply. The operating platform includes two three-axis motion platforms; the mounting platform is responsible for mounting the microgripper; the microscope is connected to a camera and transmits signals to the monitor; and the power supply can be connected to a computer and control the power supply voltage via the computer. The power supply communicates with a host computer or a master control device such as a PLC via an RS232 or RS485 serial port. The master control device can control the power supply's on / off, voltage, current, and other functions through the serial interface, and can also receive information from the power supply. The communication protocol uses MODBUS-RTU. To simplify operation, the power supply will execute the corresponding operation after receiving a write register instruction from the host computer, but will not respond to the host computer.

[0062] When the present invention is in use, when both FPC coils 4 are energized, the middle plate 12 and the permanent magnet 3 remain stationary. According to the direction of the current flowing through the FPC coils 4, the permanent magnet 3 generates a force on the two FPC coils 4 respectively. The permanent magnet 3 can simultaneously generate an attractive force or a repulsive force on the two FPC coils 4. Each FPC coil 4 and the corresponding side plate 13 move, thereby driving the two clamping arms 2 to move toward or away from each other. The permanent magnet 3 can also generate an attractive force on one of the FPC coils 4 and a repulsive force on the other FPC coil 4. When one of the FPC coils 4 is energized and the other FPC coil 4 is not energized, the permanent magnet 3 generates an attractive force or a repulsive force on the energized FPC coil 4, and the other FPC coil 4 remains stationary. The energized FPC coil 4 then drives the corresponding side plate 13 and the clamping arm 2 to move.

[0063] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

[0064] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A dual-drive electromagnetic micro-gripper, characterized in that: include: A support portion, the support portion comprising a base, a middle plate provided on the base, and two side plates, the middle plate being located between the two side plates, each side plate being provided with a clamping arm at one end facing away from the base, and forming a cavity between two opposite side surfaces of the middle plate and the two side plates; The support portion is printed by a micron-level 3D printer; a permanent magnet, disposed in the middle plate; A coil mechanism, wherein the coil mechanism includes two FPC coils, each of the FPC coils is disposed in a corresponding cavity, each of the FPC coils is manufactured using a flexible circuit board process, and each of the FPC coils includes a multi-layer planar coil; The two FPC coils are independently energized; when the FPC coils are energized, the FPC coils generate a magnetic field and exert force on the permanent magnet, so that the corresponding side plate moves and drives the corresponding clamping arm to move.

2. The dual-drive electromagnetic micro-gripper according to claim 1, characterized in that: The base is provided with a central hole and two side holes located on both sides of the central hole. The central hole is connected to the interior of the middle plate, and the side holes are connected to the cavity.

3. The dual-drive electromagnetic micro-gripper according to claim 2, characterized in that: A stopper and two cover plates are also provided. One end of the stopper extends into the middle hole to stop the permanent magnet. The two cover plates are both assembled on the base and connected to the other end of the stopper extending from the middle hole.

4. The dual-drive electromagnetic micro-gripper according to claim 3, characterized in that: The other end of the stopper is provided with a first mounting hole, and the cover plate is provided with a second mounting hole and at least one third mounting hole, wherein the second mounting hole corresponds to the first mounting hole.

5. The dual-drive electromagnetic micro-gripper according to claim 4, characterized in that: A first limiting groove and a second limiting groove are formed on one side of each cover plate. The depth of the first limiting groove is less than the depth of the second limiting groove. A step surface is formed between the first limiting groove and the second limiting groove. The first mounting hole is connected to the first limiting groove.

6. The dual-drive electromagnetic micro-gripper according to claim 5, characterized in that: Each of the cover plates is provided with at least one limiting hole, and the at least one limiting hole is connected to the second limiting groove. Two opposite side surfaces of the base each protrude outward with at least one protruding column, and the protruding column is placed in the limiting hole.

7. The dual-drive electromagnetic micro-gripper according to claim 2, characterized in that: Two opposite side surfaces of the base are penetrated by notches, the notches are communicated with the side holes, the side plates are connected to the notches, and the width of the lower ends of the side plates is smaller than the width of the notches.

8. The dual-drive electromagnetic micro-gripper according to claim 1, characterized in that: The size of the permanent magnet is (2-4) mm×(3-6) mm×(0.5-1.5) mm, and the distance between the permanent magnet and the FPC coil is 0.05-0.15 mm.

9. The dual-drive electromagnetic micro-gripper according to claim 1, characterized in that: The line width of each layer of the planar coil is 30-80 μm, and the spacing between adjacent turns of each layer of the planar coil is 30-80 μm.

10. The dual-drive electromagnetic micro-gripper according to claim 1 or 9, characterized in that: The plane size of the FPC coil is (2-6) mm×(8-12) mm, the total thickness of the FPC coil is 0.10-0.15 mm, and the total number of turns of the FPC coil is 80-110 turns.

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