Probe lifting device and probe stage

Abstract

The application discloses a probe lifting device and a probe station. The probe lifting device comprises a fixing base, a motor, a first eccentric wheel, a second eccentric wheel and an adjusting base. The motor is arranged on the fixing base and comprises a motor shaft. The first eccentric wheel is sleeved on the motor shaft and can rotate synchronously with the motor shaft. The second eccentric wheel comprises a main body and a connecting shaft. The main body is sleeved on the first eccentric wheel, and the second eccentric wheel is rotationally connected with the first eccentric wheel. The adjusting base is used for connecting a probe and adjusting the position of the probe. The adjusting base is slidingly connected with the fixing base along a set direction, and the connecting shaft is rotationally connected with the adjusting base, so that the rotation of the motor shaft can drive the adjusting base to move along the set direction. The probe lifting device converts the rotation of the motor shaft into the movement of the adjusting base along the set direction through the cooperation of the first eccentric wheel and the second eccentric wheel, the transmission error is small, and the movement accuracy of the adjusting base is high.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of testing, in particular to a probe lifting device and a probe station. BACKGROUND

[0002] The LED probe station is used to test the photoelectric parameters of the chip by contacting the probe with the chip. The precision and stability of the probe are related to the testing precision and performance of the LED probe station. Therefore, the probe assembly is one of the core components of the LED probe station.

[0003] In the prior art, the probe is moved up and down to complete the test in the case of fixing the chip. Specifically, the motor drives the screw rod to rotate, and the screw rod is connected with the probe seat. The rotation of the screw rod drives the movement of the probe seat in the vertical direction. However, if the motor shaft is directly connected with the screw rod, the motor needs to occupy a large space in the axial direction of the screw rod. If the motor and the screw rod are arranged side by side, the motor and the screw rod need to be connected through the synchronous wheel and the synchronous belt. However, the synchronous belt has a certain elasticity, and the probe movement height will have a certain error when moving at a high frequency, thereby affecting the overall testing precision. SUMMARY

[0004] The present application aims to solve at least one of the technical problems existing in the prior art. To this end, the present application provides a probe lifting device with smaller transmission error and higher movement precision of the adjusting seat.

[0005] The present application also provides a probe station with the above-mentioned probe lifting device.

[0006] The probe lifting device according to the first aspect of the present application comprises:

[0007] a fixed seat;

[0008] a motor, the motor being arranged on the fixed seat, the motor comprising a motor shaft;

[0009] a first eccentric wheel, the first eccentric wheel being sleeved on the motor shaft and being capable of rotating synchronously with the motor shaft;

[0010] a second eccentric wheel, the second eccentric wheel comprising a main body and a connecting shaft, the main body being sleeved on the first eccentric wheel, the second eccentric wheel being rotatably connected with the first eccentric wheel;

[0011] an adjusting seat, the adjusting seat being used to connect the probe and being capable of adjusting the position of the probe, the adjusting seat being slidably connected with the fixed seat in a set direction, the connecting shaft being rotatably connected with the adjusting seat, so that the rotation of the motor shaft can drive the movement of the adjusting seat in the set direction.

[0012] The probe lifting device according to the embodiment of the application has at least the following beneficial effects: the probe lifting device of the application converts the rotation of the motor shaft into the movement of the adjusting seat along the set direction through the cooperation of the first eccentric wheel and the second eccentric wheel, the motor shaft directly drives the adjusting seat through the rigid first eccentric wheel and the second eccentric wheel, the stroke of the movement of the adjusting seat is determined by the eccentricity of the first eccentric wheel, and when the first eccentric wheel does not change, the end position of the adjusting seat along the set direction is stable and does not change, which is suitable for large-batch chip detection of the same specification. Moreover, the deformation of the first eccentric wheel and the second eccentric wheel in the transmission process is basically negligible, the transmission error is small, and the movement accuracy of the adjusting seat is high.

[0013] According to some embodiments of the application, the distance between the axis of the first eccentric wheel and the axis of the motor shaft is a first eccentricity, the distance between the axis of the connecting shaft and the axis of the main body is a second eccentricity, the main body and the first eccentric wheel are coaxially arranged, and the second eccentricity is not less than the first eccentricity.

[0014] According to some embodiments of the application, the first eccentric wheel has a first through hole for the motor shaft to pass through, the first eccentric wheel further has a first weakening groove extending in the axial direction and a second weakening groove extending in the radial direction, the first weakening groove communicates with the first through hole in the radial direction, the first weakening groove communicates with the second weakening groove in the axial direction, the first weakening groove and the second weakening groove divide the first eccentric wheel into a first locking part and a second locking part, and the distance between the first locking part and the second locking part can be adjusted to enable the first eccentric wheel to be fixedly connected to the motor shaft.

[0015] According to some embodiments of the application, the second eccentric wheel has a receiving cavity, the first eccentric wheel is located in the receiving cavity, the second eccentric wheel has a second through hole on the outer peripheral surface thereof and communicating with the receiving cavity, the first eccentric wheel includes a first locking part, a second locking part and a first locking member, the first locking member is arranged in the first locking part and the second locking part to adjust the distance between the first locking part and the second locking part, and the first locking member can pass through the second through hole.

[0016] According to some embodiments of the application, the outer peripheral surface of the first eccentric wheel has a mounting groove extending to the end surface of the first eccentric wheel in the axial direction, and the probe lifting device further includes a first bearing, the inner ring of the first bearing is connected to the bottom of the mounting groove, and the outer ring of the first bearing is connected to the inner wall of the second eccentric wheel.

[0017] According to some embodiments of the present application, the first eccentric wheel further comprises a second locking member connected to an end face of the first eccentric wheel, one end of the first bearing is in abutment with a side wall of the mounting groove, and the other end is in abutment with the second locking member to limit the relative displacement of the first bearing and the first eccentric wheel.

[0018] According to some embodiments of the present application, the connecting shaft and the adjusting seat are connected through a second bearing, the second bearing is sleeved on the connecting shaft, an end face of the connecting shaft away from the main body part is provided with a fixing hole extending axially to a mounting position of the second bearing, and the second eccentric wheel further comprises a third locking member penetrating through the fixing hole and capable of expanding and deforming the connecting shaft to limit the displacement of the second bearing.

[0019] According to some embodiments of the present application, the adjusting seat comprises a base, a first sliding seat and a first adjusting member, the first sliding seat is in sliding connection with the base in a first direction, the first adjusting member is arranged on the first sliding seat and in abutment with the base to drive the first sliding seat to move in the first direction, the adjusting seat further comprises a first elastic member arranged in the first direction, one end of the first elastic member is connected to the base, and the other end is connected to the sliding seat, and the relative displacement of the first sliding seat and the base can cause the first elastic member to elastically deform.

[0020] According to some embodiments of the present application, the adjusting seat further comprises a second sliding seat and a second adjusting member arranged on the second sliding seat, the second sliding seat and the first sliding seat are in sliding connection in a second direction, and the second adjusting member is in abutment with the first sliding seat to drive the second sliding seat to move in the second direction.

[0021] The adjusting seat further comprises a third sliding seat and a third adjusting member arranged on the third sliding seat, the third sliding seat and the second sliding seat are in sliding connection in a third direction, and the third adjusting member is in abutment with the second sliding seat to drive the third sliding seat and the second sliding seat to produce relative displacement in the third direction.

[0022] The third sliding seat is used for connecting the probe.

[0023] The probe station according to the second aspect of the embodiments of the present application comprises:

[0024] The probe lifting device mentioned in any one of the above embodiments;

[0025] The probe is connected to the probe lifting device.

[0026] The object carrying mechanism is used for placing a chip.

[0027] The probe lifting device can drive the probe to move so that the probe can contact the chip.

[0028] According to the probe station of the embodiment of the present application, at least the following advantages are achieved: the probe is connected to the probe lifting device, the probe lifting device can drive the probe to move so that the probe can contact the chip for testing. By using the probe lifting device, the testing precision and testing speed of the probe station are improved, and the testing efficiency is improved.

[0029] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be understood by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0030] The present application will be further described below in conjunction with the drawings and embodiments, wherein:

[0031] Figure 1 It is an exploded schematic view of the probe lifting device of the embodiment of the present application;

[0032] Figure 2 It is a partial cross-sectional schematic view of the probe lifting device of the embodiment of the present application;

[0033] Figure 3 It is a schematic view of the connection structure of the first eccentric wheel, the second eccentric wheel and the motor shaft of the embodiment of the present application;

[0034] Figure 4 It is a schematic view of the structure of the first eccentric wheel of the embodiment of the present application;

[0035] Figure 5 It is a schematic view of the connection structure of the first eccentric wheel and the first bearing of the embodiment of the present application;

[0036] Figure 6 It is a schematic view of the structure of the second eccentric wheel of the embodiment of the present application;

[0037] Figure 7 It is a schematic view of the structure of the adjusting seat of the embodiment of the present application.

[0038] Reference signs:

[0039] The fixed seat 100, the slide rail 110, the motor 200, the motor shaft 210, the first eccentric wheel 300, the first through hole 310, the first weakening groove 320, the second weakening groove 330, the first locking part 340, the second locking part 350, the second locking piece 360, the mounting groove 370, the second eccentric wheel 400, the main body part 410, the connecting shaft 420, the second through hole 430, the fixed hole 440, the third locking piece 450, the adjusting seat 500, the base 510, the first sliding seat 520, the first adjusting piece 530, the first elastic piece 540, the second sliding seat 550, the second adjusting piece 560, the third sliding seat 570, the third adjusting piece 580, the sliding groove 590, the first bearing 600, and the second bearing 610. DETAILED DESCRIPTION

[0040] Embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the present application, and cannot be understood as a limitation of the present application.

[0041] In the description of the present application, it is understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, only for the convenience of describing the present application and simplifying the description, and is not intended to indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0042] In the description of the present application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. is understood as not including the number, above, below, etc. is understood as including the number. If it is described as first, second, only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0043] In the description of the present application, unless otherwise explicitly limited, the words such as setting, mounting, connecting, etc. should be understood in a broad sense, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0044] In the description of the application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the description, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0045] Referring to Figure 1 As shown, the probe lifting device of the present application comprises a fixed seat 100, a motor 200, a first eccentric wheel 300, a second eccentric wheel 400 and an adjusting seat 500. The motor 200 can provide power to drive the probe to reciprocate in a set direction. The motor 200 is arranged on the fixed seat 100, and the motor 200 comprises a motor shaft 210 which can rotate about its rotation axis. Referring to Figure 2 and Figure 3 As shown, the first eccentric wheel 300 is sleeved on the motor shaft 210 and fixedly connected with the motor shaft 210, and can rotate synchronously with the motor shaft 210. The first eccentric wheel 300 and the motor shaft 210 are not coaxial, and the first eccentric wheel 300 performs eccentric motion with the rotation of the motor shaft 210. The second eccentric wheel 400 is rotationally connected with the first eccentric wheel 300, and comprises a main body part 410 and a connecting shaft 420. The main body part 410 is sleeved on the first eccentric wheel 300, and moves under the driving of the first eccentric wheel 300. The main body part 410 is coaxially arranged with the first eccentric wheel 300. The connecting shaft 420 and the main body part 410 are not coaxial, and the connecting shaft 420 is rotationally connected with the adjusting seat 500.

[0046] The adjusting seat 500 is used for connecting the probe, and a structure for adjusting the position of the probe is arranged on the adjusting seat 500, which can be used for fine adjustment of the relative position of the probe and the adjusting seat 500. The adjusting seat 500 and the fixed seat 100 are slidingly connected in a set direction, for example, as shown in Figure 1 As shown, the set direction is the vertical direction, and the adjusting seat 500 and the fixed seat 100 are connected through the cooperation of the vertically extending slide rail 110 and the slide groove 590, so as to realize the sliding of the adjusting member relative to the fixed seat 100 in the vertical direction.

[0047] It should be noted that, referring to Figure 2As shown, the connecting shaft 420 is rotationally connected with the adjusting seat 500, one end of the connecting shaft 420 is inserted into the adjusting seat 500 and can only rotate relative to the adjusting seat 500. For the convenience of understanding, taking the vertical direction as the setting direction, the circular motion of the first eccentric wheel 300 in the vertical plane is decomposed into the displacement in the vertical direction and the displacement in the horizontal direction, the connecting shaft 420 of the second eccentric wheel 400 is connected with the adjusting seat 500 and can only move in the vertical direction, the rotation of the first eccentric wheel 300 and the second eccentric wheel 400 is matched, and the self-adaptive rotation of the second eccentric wheel 400 is used to offset the horizontal displacement of the first eccentric wheel 300, so that the rotation of the motor shaft 210 is converted into the movement of the adjusting seat 500 in the vertical direction.

[0048] Based on the above, the probe lifting device of the present application converts the rotation of the motor shaft 210 into the movement of the adjusting seat 500 in the setting direction through the cooperation of the first eccentric wheel 300 and the second eccentric wheel 400, the motor shaft 210 directly drives the adjusting seat 500 through the rigid first eccentric wheel 300 and the second eccentric wheel 400, and the stroke of the movement of the adjusting seat 500 is determined by the eccentricity of the first eccentric wheel 300. When the first eccentric wheel 300 does not change, the end position of the adjusting seat 500 in the setting direction is constant and stable, which is suitable for large-scale detection of chips of the same specification. Compared with the transmission through the synchronous wheel and the synchronous belt, the first eccentric wheel 300 and the second eccentric wheel 400 of the present application are made of rigid material, and the deformation in the transmission process is basically negligible, the transmission error is small, and the movement accuracy of the adjusting seat 500 is high.

[0049] Taking the movement of the adjusting seat 500 in the vertical direction as an example, in the prior art, the movement of the adjusting seat 500 is driven by the motor 200 connected with the lead screw, the lead screw is vertically arranged, the motor shaft 210 is coaxially connected with the lead screw, and then the motor 200 is arranged at the upper end or the lower end of the lead screw. The adjusting device needs to occupy more space in the vertical direction, and the center of gravity of the overall device is high. In the present application, the motor shaft 210 is arranged perpendicular to the movement direction of the adjusting seat 500, which is more conducive to the space distribution of the probe lifting device. In addition, in the lead screw transmission, the motor shaft 210 often needs to rotate several turns to move the adjusting seat 500 to the specified position. In the present application, the motor shaft 210 rotates one circle, and the adjusting seat 500 completes one stroke of movement, which is more efficient and faster.

[0050] In some embodiments, for the convenience of description, the distance from the axis of the first eccentric wheel 300 to the axis of the motor shaft 210 is set as the first eccentricity, and the distance from the axis of the connecting shaft 420 to the axis of the main body 410 is set as the second eccentricity. The main body 410 and the first eccentric wheel 300 are coaxially arranged, and the second eccentricity is not less than the first eccentricity, so as to avoid the second eccentricity from being stuck when self-rotating to eliminate the horizontal displacement and causing the probe lifting device to malfunction.

[0051] In some embodiments, reference Figure 3 , Figure 4 and Figure 5 As shown, the first eccentric wheel 300 has a first through hole 310, through which the motor shaft 210 passes and is connected to the first eccentric wheel 300. Specifically, the first eccentric wheel 300 has a first weakening groove 320 and a second weakening groove 330. The first weakening groove 320 extends axially, and the second weakening groove 330 extends radially. The first weakening groove 320 communicates radially with the first through hole 310, and the first weakening groove 320 communicates axially with the second weakening groove 330. Thus, the first weakening groove 320 and the second weakening groove 330 divide the first eccentric wheel 300 into a first locking portion 340 and a second locking portion 350. One of the first locking part 340 and the second locking part 350 is provided with a through hole, and the other is provided with a corresponding threaded hole. The first eccentric wheel 300 also includes a first locking member (not shown in the figure). The first locking member can pass through the through hole of the locking part and extend into the threaded hole to be threadedly connected with the threaded hole, thereby realizing the connection between the first locking part 340 and the second locking part 350. By rotating the first locking member, the distance between the first locking part 340 and the second locking part 350 can be adjusted. When the first locking member is loosened, the diameter of the first through hole 310 is slightly larger than the outer diameter of the motor shaft 210. After the motor shaft 210 passes through the first through hole 310, the first locking member is tightened to reduce the diameter of the first through hole 310, so that the first eccentric wheel 300 is fixedly connected to the motor shaft 210.

[0052] In some embodiments, reference Figure 4 and Figure 5 As shown, the outer peripheral surface of the first eccentric wheel 300 has a mounting groove 370, which extends axially to the end face of the first eccentric wheel 300 away from the connecting shaft 420. The probe lifting device also includes a first bearing 600, the inner ring of which is connected to the bottom of the mounting groove 370, and the outer ring of which is connected to the inner wall of the second eccentric wheel 400, so that the first eccentric wheel 300 and the second eccentric wheel 400 are rotatably connected. The end face of the first bearing 600 near the connecting shaft 420 abuts against the groove wall of the mounting groove 370, thereby limiting the displacement of the first bearing 600 in the direction near the connecting shaft 420. The displacement in the other direction is limited by the second locking member 360, such as... Figure 3 and Figure 5 As shown, the second locking member 360 is connected to the end face of the first eccentric wheel 300 away from the connecting shaft 420. Part of the second locking member 360 is exposed on this end face and abuts against the side of the first bearing 600, so that the side of one end of the first bearing 600 abuts against the groove wall of the mounting groove 370, and the side of the other end abuts against the second locking member 360, thereby restricting the relative displacement of the first bearing 600 and the first eccentric wheel 300.

[0053] In some embodiments, as shown in Figure 3 The second eccentric wheel 400 has a receiving cavity in which the first eccentric wheel 300 is located, and the outer circumferential surface of the second eccentric wheel 400 has a second through hole 430 communicating with the receiving cavity. The second through hole 430 can be only one or multiple, as shown in Figure 6 The multiple second through holes 430 are circumferentially distributed on the outer circumferential surface of the second eccentric wheel 400, which plays a role in reducing weight. In addition, the first locking member is also installed on the first eccentric wheel 300 through the second through hole 430, and a screwdriver or a hex wrench force tool is used to lock or loosen the first locking member. It should be emphasized that the screwdriver or the hex wrench force tool needs to pass through the second through hole 430 to tighten the first locking member on the first eccentric wheel 300.

[0054] In combination with the foregoing embodiments, referring to Figure 3 Since the second locking member 360 needs to be connected to the end surface of the first eccentric wheel 300, if the first eccentric wheel 300 is fixedly connected to the motor shaft 210 first, the distance between the end surface of the first eccentric wheel 300 and the side wall of the motor 200 is too small, and the second locking member 360 cannot be installed. Therefore, the relative positions of the first eccentric wheel 300, the first bearing 600 and the second eccentric wheel 400 can be fixed first, that is, the second locking member 360 is locked, and then the motor shaft 210 is inserted into the first through hole 310 for locking. At this time, the second through hole 430 is used to install the first locking member.

[0055] In some embodiments, the connecting shaft 420 and the adjusting seat 500 are connected through a second bearing 610, the second bearing 610 is sleeved on the connecting shaft 420, and the end surface of the connecting shaft 420 away from the main body part 410 is provided with a fixing hole 440, as shown in Figure 3 The fixing hole 440 extends to the installation position of the second bearing 610 along the axial direction of the connecting shaft 420, and the second eccentric wheel 400 further includes a third locking member 450 which is threaded through and screwed with the fixing hole 440. During assembly, the second bearing 610 is first sleeved on the motor shaft 210, and then the third locking member 450 is installed into the fixing hole 440. With the rotation of the third locking member 450, the connecting shaft 420 is gradually forced to expand, the outer diameter of the connecting shaft 420 increases, and then the connecting shaft 420 is connected with the second bearing 610 in interference, thereby limiting the displacement of the second bearing 610 relative to the connecting shaft 420.

[0056] In some embodiments, the adjusting seat 500 comprises a base 510, a first sliding seat 520 slidably connected with the base 510 in a first direction, and a first adjusting member 530 arranged on the first sliding seat 520 and abutting against the base 510. By rotating the first adjusting member 530, the first sliding seat 520 can be driven to move in the first direction, so as to realize fine adjustment of the probe in the first direction. The adjusting seat 500 further comprises a first elastic member 540 arranged in the first direction, one end of which is connected with the base 510 and the other end is connected with the first sliding seat. When the operator rotates the first adjusting member 530 to drive the first sliding seat 520 to move away from the base 510, the first elastic member 540 is deformed by tension and has a tendency to restore the elastic deformation, i.e. when the first adjusting member 530 is rotated reversely, the first elastic member 540 drives the first sliding seat 520 to move towards the base 510.

[0057] Further, the adjusting seat 500 can realize fine adjustment in a second direction and a third direction in addition to the fine adjustment in the first direction. Preferably, the first direction, the second direction and the third direction are perpendicular to each other. The adjusting seat 500 further comprises a second sliding seat 550 arranged on the first sliding seat 520 and capable of sliding relative to the first sliding seat 520 in a second direction, and a second adjusting member 560 arranged on the first sliding seat 520 and abutting against the second sliding seat 550. By rotating the second adjusting member 560, the second sliding seat 550 can be driven to move in the second direction. Similarly, a second elastic member can be arranged between the second sliding seat 550 and the first sliding seat 520, which extends in the second direction and is connected with the second sliding seat 550 and the first sliding seat 520 respectively.

[0058] The adjusting seat 500 further comprises a third sliding seat 570 arranged on the second sliding seat 550 and capable of sliding relative to the second sliding seat 550 in a third direction, and a third adjusting member 580 arranged on the second sliding seat 550 and abutting against the third sliding seat 570. By rotating the third adjusting member 580, the third sliding seat 570 can be driven to move in the third direction. Similarly, a third elastic member can be arranged between the third sliding seat 570 and the second sliding seat 550, which extends in the third direction and is connected with the third sliding seat 570 and the second sliding seat 550 respectively.

[0059] The probe is connected with the third sliding seat 570, and the base 510, the first sliding seat 520, the second sliding seat 550 and the third sliding seat 570 are sequentially connected and can move in one direction relative to each other, so as to realize adjustment of the probe in three directions. In addition, as shown in FIG. 1, the adjusting seat 500 further comprises a fourth sliding seat 590 arranged on the third sliding seat 570 and capable of sliding relative to the third sliding seat 570 in a fourth direction, and a fourth adjusting member 590 arranged on the third sliding seat 570 and abutting against the fourth sliding seat 590. By rotating the fourth adjusting member 590, the fourth sliding seat 590 can be driven to move in the fourth direction. Figure 7In the shown embodiment, taking the shaft center distance N of the first eccentric wheel 300 as an example, the moving distance of the adjusting seat 500 in the vertical direction is 2N. It should be noted that the present application uses two-stage eccentric wheel conversion, and the moving stroke of the adjusting seat 500 is a fixed value. Further, when the chip specifications change slightly, the probe needs to move a distance of 2N+M or 2N-M to just touch the chip, at this time, a certain range of fine adjustment in the vertical direction can be performed on the adjusting seat 500 through the first adjusting member 530, so that the probe can be moved to any position in the range of 2N+M to 2N-M. The setting of the adjusting seat 500 makes the application range of the probe lifting device larger.

[0060] In the embodiment of the second aspect of the present application, the probe table comprises the probe lifting device mentioned in any of the above embodiments, the probe, and the object carrying mechanism for placing the chip to be tested. The probe is connected to the probe lifting device, and the probe lifting device can drive the probe to move so that the probe contacts the chip to perform testing. By using such a probe lifting device, the testing precision and testing speed of the probe table are improved, which is beneficial to improve the testing efficiency.

[0061] The embodiments of the present application are described in detail above in combination with the drawings, but the present application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the purpose of the present application. In addition, the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

Claims

1. Probe lifting device, characterized in that The utility model relates to a probe fixing device, including: A fixed seat; A motor is arranged on the fixed seat, and the motor includes a motor shaft; A first eccentric wheel is sleeved on the motor shaft and can rotate synchronously with the motor shaft; A second eccentric wheel includes a main body part and a connecting shaft, the main body part is sleeved on the first eccentric wheel, and the second eccentric wheel is rotationally connected with the first eccentric wheel; An adjusting seat is used for connecting a probe and can adjust the position of the probe, the adjusting seat is slidingly connected with the fixed seat along a set direction, the connecting shaft is rotationally connected with the adjusting seat, so that the rotation of the motor shaft can drive the movement of the adjusting seat along the set direction; The adjusting seat includes a base, a first sliding seat and a first adjusting part, the first sliding seat is slidingly connected with the base along a first direction, the first adjusting part is arranged on the first sliding seat and abuts against the base to drive the first sliding seat to move along the first direction, the adjusting seat further includes a first elastic part, the first elastic part is arranged along the first direction, one end of the first elastic part is connected with the base, and the other end is connected with the sliding seat, and the relative displacement of the first sliding seat and the base can cause the elastic deformation of the first elastic part; The adjusting seat further includes a second sliding seat and a second adjusting part arranged on the second sliding seat, the second sliding seat and the first sliding seat are slidingly connected along a second direction, and the second adjusting part abuts against the first sliding seat to drive the second sliding seat to move along the second direction; The adjusting seat further includes a third sliding seat and a third adjusting part arranged on the third sliding seat, the third sliding seat and the second sliding seat are slidingly connected along a third direction, and the third adjusting part abuts against the second sliding seat to drive the third sliding seat and the second sliding seat to produce relative displacement along the third direction; The third sliding seat is used for connecting the probe.

2. The probe lifting device according to claim 1, characterized in that The distance between the axis of the first eccentric wheel and the axis of the motor shaft is a first eccentric distance, the distance between the axis of the connecting shaft and the axis of the main body part is a second eccentric distance, the main body part and the first eccentric wheel are coaxially arranged, and the second eccentric distance is not less than the first eccentric distance.

3. The probe lift device of claim 1, wherein, The first eccentric wheel has a first through hole for the motor shaft to pass through, the first eccentric wheel further has a first weakening groove extending in the axial direction and a second weakening groove extending in the radial direction, the first weakening groove communicates with the first through hole in the radial direction, the first weakening groove communicates with the second weakening groove in the axial direction, the first weakening groove and the second weakening groove divide the first eccentric wheel into a first locking part and a second locking part, and the spacing between the first locking part and the second locking part can be adjusted, so that the first eccentric wheel is fixedly connected with the motor shaft.

4. The probe lift device of claim 1, wherein, The second eccentric wheel has a containing cavity, the first eccentric wheel is located in the containing cavity, the second eccentric wheel has a second through hole on the outer circumferential surface of the second eccentric wheel, the first eccentric wheel comprises a first locking part, a second locking part and a first locking member, the first locking member is arranged through the first locking part and the second locking part to adjust the distance between the first locking part and the second locking part, and the first locking member can pass through the second through hole.

5. The probe lift device of claim 1, wherein, The outer circumferential surface of the first eccentric wheel has a mounting groove extending to the end surface of the first eccentric wheel in the axial direction, the probe lifting device further comprises a first bearing, the inner ring of the first bearing is connected to the bottom of the mounting groove, and the outer ring of the first bearing is connected to the inner wall of the second eccentric wheel.

6. The probe lifting device according to claim 5, characterized in that The first eccentric wheel further comprises a second locking member connected to the end surface of the first eccentric wheel, one end of the first bearing abuts against the side wall of the mounting groove, and the other end of the first bearing abuts against the second locking member to limit the relative displacement of the first bearing and the first eccentric wheel.

7. The probe lift device of claim 1, wherein, The connecting shaft and the adjusting seat are connected through a second bearing, the second bearing is sleeved on the connecting shaft, the end surface of the connecting shaft away from the main body part is provided with a fixing hole extending to the mounting position of the second bearing in the axial direction, the second eccentric wheel further comprises a third locking member arranged through the fixing hole and capable of expanding and deforming the connecting shaft to limit the displacement of the second bearing.

8. Probe station, characterized in that Comprise: The probe lifting device according to any one of claims 1 to 7; A probe connected to the probe lifting device; A carrier mechanism for placing a chip; Wherein the probe lifting device can drive the probe to move so that the probe can contact the chip.

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