Laser devices and methods for manufacturing laser devices

Abstract

The laser device of the present invention includes: a rod-shaped laser medium extending along a first direction; a first light source unit comprising a first base and a plurality of excitation light sources mounted on the first base; a second light source unit disposed parallel to the first light source unit in a second direction intersecting the first direction, comprising a second base and a plurality of excitation light sources mounted on the second base; and a support member supporting the laser medium, the first light source unit, and the second light source unit. At least one of the first base and the support member includes a first defining portion defining the position of the first base relative to the support member, and at least one of the second base and the support member includes a second defining portion defining the position of the second base relative to the support member.

Description

TECHNICAL FIELD

[0001] The present application relates to a laser device and a manufacturing method of a laser device. BACKGROUND

[0002] There is known a laser device provided with a rod-shaped laser medium and a plurality of excitation light sources that emit excitation light for exciting the laser medium (for example, refer to Patent Literature 1).

[0003] PRIOR ART DOCUMENTS

[0004] PATENT LITERATURE

[0005] Patent Literature 1: Japanese Patent Application Laid-Open No. 2005-285807 SUMMARY

[0006] PROBLEMS TO BE SOLVED BY THE INVENTION

[0007] The laser device described above exists in a case where the laser device is mounted on a laser system, and each excitation light source is configured to be detachable from the laser device. In such a configuration, when each excitation light source is exchanged, it is necessary to strictly adjust the position and orientation of each excitation light source with respect to the laser medium in such a manner that the excitation distribution in the laser medium becomes a desired state. On the other hand, the laser device described above exists in a case where the entire laser device is configured to be detachable from the laser system. In such a configuration, when each excitation light source is exchanged, it is necessary to strictly adjust the position and orientation of the laser device in the laser system in such a manner that the optical axis of the laser medium coincides with the optical axis of the laser system.

[0008] An object of the present application is to provide a laser device and a manufacturing method of such a laser device that can achieve ease of detachment of a plurality of excitation light sources and ease of positioning of the plurality of excitation light sources.

[0009] MEANS FOR SOLVING THE PROBLEMS

[0010] The laser device of one aspect of the present application includes: a rod-shaped laser medium extending in a first direction; a first light source unit including a first base and a plurality of excitation light sources mounted on the first base, disposed in parallel with the first light source unit in a second direction intersecting the first direction, and including a second base and a plurality of excitation light sources mounted on the second base; and a support member that supports the laser medium, the first light source unit, and the second light source unit, at least one of the first base and the support member including a first regulation portion that regulates the position of the first base with respect to the support member, and at least one of the second base and the support member including a second regulation portion that regulates the position of the second base with respect to the support member.

[0011] In the laser device, the first base and the plurality of excitation light sources are unitized as the first light source unit, and the second base and the plurality of excitation light sources are unitized as the second light source unit, and the first light source unit and the second light source unit are supported by the support member in a state of being arranged side by side in the second direction. Thus, the plurality of excitation light sources can be easily attached to and detached from the support member by attaching and detaching the first base and the second base to and from the support member, respectively. Further, when the support member supporting the laser medium is provided with the first base and the second base, the position of the first base with respect to the support member is regulated by the first regulation portion, and the position of the second base with respect to the support member is regulated by the second regulation portion. Thus, the plurality of excitation light sources can be easily positioned with respect to the laser medium by providing the support member supporting the laser medium with the first base and the second base. As described above, according to the laser device, the plurality of excitation light sources can be easily attached and the positioning of the plurality of excitation light sources can be easily performed.

[0012] In the laser device of one aspect of the present application, the support member can include a first holding member and a second holding member arranged side by side in the first direction, and a connecting member connecting the first holding member and the second holding member, and the first light source unit and the second light source unit can be arranged between the first holding member and the second holding member. Thus, the laser device can be downsized and the configuration thereof can be simplified.

[0013] In the laser device of one aspect of the present application, the connecting member can have a support surface that supports the first base and the second base so as to be slidable in the second direction. Thus, the plurality of excitation light sources can be easily attached to and detached from the support member by sliding the first base and the second base on the support surface of the connecting member, respectively.

[0014] In the laser device of one aspect of the present application, the connecting member can include, as the first regulation portion, a first stopper that regulates movement of the first base in the second direction, and as the second regulation portion, a second stopper that regulates movement of the second base in the second direction. Thus, the plurality of excitation light sources can be easily and reliably positioned with respect to the laser medium by bringing the first base and the second base into contact with the first stopper and the second stopper of the connecting member, respectively.

[0015] In the laser device of one aspect of the present application, the first base can include a first flow path through which a refrigerant flows, the second base can include a second flow path through which the refrigerant flows, and the support member can include a third flow path through which the refrigerant flows. Thus, the laser medium and the plurality of excitation light sources can be cooled.

[0016] In the laser device of one aspect of the present application, the first flow path, the second flow path, and the third flow path can be communicated. Thus, the laser medium and the plurality of excitation light sources can be efficiently cooled.

[0017] In the laser device of one aspect of the present application, it can also be that the support includes a cylinder having the laser medium disposed inside, the cylinder having light transmissivity, the third flow path includes a main flow path including a flow path between the laser medium and the cylinder, a first branch flow path and a second branch flow path branching from the main flow path, and a third branch flow path and a fourth branch flow path merging with the main flow path, a downstream end of the first branch flow path is connected to an upstream end of the first flow path, a downstream end of the second branch flow path is connected to an upstream end of the second flow path, an upstream end of the third branch flow path is connected to a downstream end of the first flow path, and an upstream end of the fourth branch flow path is connected to a downstream end of the second flow path. Thus, the laser medium and the plurality of excitation light sources can be efficiently cooled with a simple flow path structure.

[0018] In the laser device of one aspect of the present application, it can also be that the plurality of excitation light sources are arranged along a circumference centered on a center line of the laser medium as viewed from a first direction. Thus, uniformization of excitation distribution of the laser medium can be achieved.

[0019] In the laser device of one aspect of the present application, it can also be that the plurality of excitation light sources each include a semiconductor laser element. Thus, long life of the excitation light sources can be achieved. Further, since the plurality of excitation light sources are unitized as the first light source unit or the second light source unit, the precision required in processing of the semiconductor laser element single product is not needed.

[0020] In the laser device of one aspect of the present application, it can also be that the semiconductor laser element includes a plurality of semiconductor laser bars stacked. Thus, the laser medium can be efficiently and sufficiently excited.

[0021] The laser device of one aspect of the present application includes: a rod-shaped laser medium extending in a first direction; a first light source unit including a first base and a plurality of excitation light sources mounted to the first base; a second light source unit including a second base and a plurality of excitation light sources mounted to the second base, the second light source unit being arranged in parallel with the first light source unit in a second direction intersecting the first direction; and a support supporting the laser medium, the first light source unit, and the second light source unit, at least one of the first base and the support including a first prescribed portion that prescribes a position of the first base with respect to the support, and at least one of the first base and the second base including a second prescribed portion that prescribes a position of the second base with respect to the first base.

[0022] In the laser device, the first base and the plurality of excitation light sources are unitized as a first light source unit, and the second base and the plurality of excitation light sources are unitized as a second light source unit, and the first light source unit and the second light source unit are supported by the support member in a state of being arranged side by side in the second direction. Thus, the plurality of excitation light sources can be easily attached to and detached from the support member by attaching and detaching the first base and the second base to and from the support member, respectively. Further, when the first base and the second base are attached to the support member which supports the laser medium, the position of the first base with respect to the support member is regulated by the first regulation portion, and the position of the second base with respect to the first base is regulated by the second regulation portion. Thus, the plurality of excitation light sources can be easily positioned with respect to the laser medium by attaching the first base and the second base to the support member which supports the laser medium, respectively. As described above, according to the laser device, the plurality of excitation light sources can be easily attached and the plurality of excitation light sources can be easily positioned.

[0023] The manufacturing method of the laser device according to one aspect of the present application includes: a step of preparing a first light source unit including a first base and a plurality of excitation light sources attached to the first base, and a second light source unit including a second base and a plurality of excitation light sources attached to the second base; and a step of arranging the first base from one side in a second direction intersecting a first direction in which a laser medium extending in a rod shape is supported by a support member, and arranging the second base from the other side in the second direction in the support member, thereby arranging the first light source unit and the second light source unit side by side in the second direction.

[0024] In the manufacturing method of the laser device, the plurality of excitation light sources can be easily positioned with respect to the laser medium by arranging the first base from one side in a second direction intersecting a first direction in which a laser medium extending in a rod shape is supported by a support member, and arranging the second base from the other side in the second direction in the support member. Thus, according to the manufacturing method of the laser device, the laser device in which the plurality of excitation light sources are positioned with respect to the laser medium can be easily obtained.

[0025] Effects of the Invention

[0026] According to the present application, a laser device in which the plurality of excitation light sources can be easily attached and the plurality of excitation light sources can be easily positioned, and a manufacturing method of such a laser device can be provided. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 FIG. 1 is a sectional view of a laser device according to an embodiment.

[0028] Figure 2 FIG. 2 is a sectional view of the laser device shown in FIG. 1 along the line II-II. Figure 1 FIG. 3 is a sectional view of the laser device shown in FIG. 1 along the line III-III.

[0029] Figure 3 is a sectional view of the laser device shown in FIG. 1 along the line IV-IV.Figure 1 The cross-sectional view of the laser device along line III-III is shown.

[0030] Figure 4 It is along Figure 3 The diagram shows a cross-sectional view of the laser device along line IV-IV.

[0031] Figure 5 It is along Figure 3 The diagram shows a cross-sectional view of the laser device with VV lines.

[0032] Figure 6 It is along Figure 3 The diagram shows a cross-sectional view of the laser device along the VI-VI line.

[0033] Figure 7 This is a cross-sectional view of a laser device used to illustrate a method for manufacturing a laser device according to one embodiment.

[0034] Figure 8 It is along Figure 7 The cross-sectional view of the laser device shown in VIII-VIII.

[0035] Figure 9 This is a front view of the first and second light source units in the modified example.

[0036] Figure 10 This is a three-dimensional view of the first light source unit in the modified example.

[0037] Figure 11 This is a schematic diagram showing the excitation distribution of the laser medium in the first and second light source units of the modified example.

[0038] Figure 12 This is a front view of the first and second light source units in the modified example. Detailed Implementation

[0039] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. Furthermore, the same or equivalent parts are labeled with the same reference numerals in the various figures, and repeated descriptions are omitted.

[0040] like Figure 1 and Figure 2 As shown, the laser device 1 includes a laser medium 20, a first light source unit 30, a second light source unit 40, and a support member 50. The laser medium 20, the first light source unit 30, and the second light source unit 40 are supported by the support member 50. As an example, the laser device 1 is used as a laser amplifier to amplify the laser L in a laser system. Hereinafter, the direction in which the laser L is incident on the laser device 1 is referred to as the X direction, the direction perpendicular to the X direction is referred to as the Y direction, and the direction perpendicular to both the X and Y directions is referred to as the Z direction.

[0041] The laser medium 20 is a rod-shaped solid laser medium extending in the X direction (first direction). The laser medium 20 has a center line CL parallel to the X direction. The shape of the laser medium 20 is, for example, a cylindrical shape having a diameter of about 10 mm and a length of about 200 mm. The material of the laser medium 20 is, for example, Nd:YAG.

[0042] The first light source unit 30 and the second light source unit 40 are arranged side by side in the Y direction (second direction intersecting the first direction). The first light source unit 30 is arranged on one side in the Y direction with respect to the center line CL. The second light source unit 40 is arranged on the other side in the Y direction with respect to the center line CL. The first light source unit 30 includes a first base 31 and a plurality of excitation light sources 32. The plurality of excitation light sources 32 are mounted to the first base 31. The second light source unit 40 includes a second base 41 and a plurality of excitation light sources 42. The plurality of excitation light sources 42 are mounted to the second base 41.

[0043] The first base 31 and the second base 41 are each a plate-shaped member having the X direction as a thickness direction. The combination of the first base 31 and the second base 41 defines an opening having a plurality of inner surfaces opposite the laser medium 20. Each of the excitation light sources 32 is arranged on a plurality of placement surfaces 31a possessed by the first base 31 among the plurality of inner surfaces. Each of the excitation light sources 42 is arranged on a plurality of placement surfaces 41a possessed by the second base 41 among the plurality of inner surfaces. The shape of the combination of the first base 31 and the second base 41 is, for example, a rectangular plate shape. The material of each of the first base 31 and the second base 41 is, for example, aluminum. The thickness of each of the first base 31 and the second base 41 is greater than the thickness of each of the first holding member 51 and the second holding member 52 described later. Thus, the plurality of excitation light sources 32, 42 can be reliably held.

[0044] The plurality of excitation light sources 32, 42 each emit excitation light EL for exciting the laser medium 20. The plurality of excitation light sources 32, 42 are arranged in a circumferential direction centered on the center line CL of the laser medium 20 as viewed in the X direction. In the present embodiment, the combination of the first base 31 and the second base 41 defines an opening having a regular hexagonal shape with six placement surfaces 31a, 41a as the plurality of inner surfaces, and the six excitation light sources 32, 42 are arranged in the circumferential direction centered on the center line CL at an interval of 60°. In this way, the plurality of excitation light sources 32, 42 are arranged on the inner side (laser medium 20 side) with respect to the first base 31 and the second base 41, and thus the plurality of excitation light sources 32, 42 can be reliably protected even if an impact is applied to the laser device 1 from the outside.

[0045] Each excitation light source 32 includes a semiconductor laser element 33 and a lens 34. The semiconductor laser element 33 emits excitation light EL toward the laser medium 20. The lens 34 is disposed on the laser medium 20 side with respect to the semiconductor laser element 33. The lens 34 condenses the excitation light EL emitted from the semiconductor laser element 33 on the laser medium 20. The semiconductor laser element 33 includes a plurality of semiconductor laser bars 33a and a heat sink 33b. The plurality of semiconductor laser bars 33a are stacked in a manner that emission end surfaces of the respective semiconductor laser bars 33a are arranged in two dimensions in a plane perpendicular to a direction in which the semiconductor laser element 33 opposes the laser medium 20. The heat sink 33b is disposed on the placement surface 31a in a state of supporting the plurality of semiconductor laser bars 33a. The heat sink 33b absorbs heat generated in the plurality of semiconductor laser bars 33a and dissipates the heat to the first base 31. In addition, each excitation light source 32 can not include the lens 34.

[0046] Each excitation light source 42 includes a semiconductor laser element 43 and a lens 44. The semiconductor laser element 43 emits excitation light EL toward the laser medium 20. The lens 44 is disposed on the laser medium 20 side with respect to the semiconductor laser element 43. The lens 44 condenses the excitation light EL emitted from the semiconductor laser element 43 on the laser medium 20. The semiconductor laser element 43 includes a plurality of semiconductor laser bars 43a and a heat sink 43b. The plurality of semiconductor laser bars 43a are stacked in a manner that emission end surfaces of the respective semiconductor laser bars 43a are arranged in two dimensions in a plane perpendicular to a direction in which the semiconductor laser element 43 opposes the laser medium 20. The heat sink 43b is disposed on the placement surface 41a in a state of supporting the plurality of semiconductor laser bars 43a. The heat sink 43b absorbs heat generated in the plurality of semiconductor laser bars 43a and dissipates the heat to the second base 41. In addition, each excitation light source 42 can not include the lens 44.

[0047] The support 50 includes a first holding member 51, a second holding member 52, a connecting member 53, a pair of leg members 54, and a cylinder 55. As one example, the support 50 is installed in the setting portion S of the laser system.

[0048] The first holding member 51 and the second holding member 52 are each a plate-shaped member with the X direction as a thickness direction. The first holding member 51 and the second holding member 52 are arranged side by side in the X direction at a prescribed interval. The first holding member 51 holds one end portion of the laser medium 20 in the X direction in a state in which one end surface 20a of the laser medium 20 in the X direction is exposed. The second holding member 52 holds the other end portion of the laser medium 20 in the X direction in a state in which the other end surface 20b of the laser medium 20 in the X direction is exposed. The first light source unit 30 and the second light source unit 40 are arranged between the first holding member 51 and the second holding member 52. The first holding member 51 and the second holding member 52 each have, for example, a rectangular plate shape. The first holding member 51 and the second holding member 52 each have, for example, aluminum as a material. The first light source unit 30 and the second light source unit 40 are located more inward than the outer edges of the first holding member 51 and the second holding member 52, respectively, when viewed in the X direction (that is, do not protrude outward from the outer edges). Thus, even if an impact is applied to the laser device 1 from the X direction, the first light source unit 30 and the second light source unit 40 can be reliably protected.

[0049] The connecting member 53 is a plate-shaped member with the Z direction as a thickness direction. The connecting member 53 connects the first holding member 51 and the second holding member 52. In the present embodiment, the connecting member 53 is erected between the end portion of the first holding member 51 on the side of the setting portion S and the end portion of the second holding member 52 on the side of the setting portion S. The connecting member 53 has, for example, a rectangular plate shape. The connecting member 53 has, for example, aluminum as a material.

[0050] A pair of leg members 54 are attached to the end portion of the first holding member 51 on the side of the setting portion S and the end portion of the second holding member 52 on the side of the setting portion S, respectively. Each leg member 54 has a plurality of long holes 54a with the Y direction as a length direction. As one example, the support member 50 is fastened to the setting portion S via the plurality of long holes 54a by a plurality of bolts (not shown), and is thereby fixed to the setting portion S.

[0051] The cylinder 55 is a cylindrical member extending in the X direction. The cylinder 55 is erected between the first holding member 51 and the second holding member 52 in a state in which the laser medium 20 is arranged inside the cylinder 55. The cylinder 55 has a light-transmitting property (transmissivity with respect to excitation light EL emitted from each excitation light source 32, 42). The cylinder 55 has, for example, a cylindrical shape. The cylinder 55 has, for example, synthetic quartz as a material.

[0052] The link member 53 has a groove 53a extending in the Y direction. The both ends of the groove 53a in the Y direction are open to one side and the other side in the Y direction. The bottom surface of the groove 53a is a support surface 56 that slidably supports the first base 31 and the second base 41 in the Y direction. The link member 53 includes a first stopper (first regulation portion) 57 and a second stopper (second regulation portion) 58. The first stopper 57 regulates movement of the first base 31 in the Y direction. More specifically, the first stopper 57 regulates movement of the first base 31 in the Y direction toward the side close to the laser medium 20. The second stopper 58 regulates movement of the second base 41 in the Y direction. More specifically, the second stopper 58 regulates movement of the second base 41 in the Y direction toward the side close to the laser medium 20.

[0053] By the first base 31 being fitted into the groove 53a of the link member 53, the position of the first base 31 in the X direction and the Z direction is regulated with respect to the support member 50 (further, with respect to the laser medium 20). By the first base 31 abutting against the first stopper 57, the position of the first base 31 in the Y direction is regulated with respect to the support member 50 (further, with respect to the laser medium 20). In this state, the first base 31 is fixed to the first holding member 51 and the second holding member 52, respectively, by a bolt (omitted from the drawing) or the like.

[0054] By the second base 41 being fitted into the groove 53a of the link member 53, the position of the second base 41 in the X direction and the Z direction is regulated with respect to the support member 50 (further, with respect to the laser medium 20). By the second base 41 abutting against the second stopper 58, the position of the second base 41 in the Y direction is regulated with respect to the support member 50 (further, with respect to the laser medium 20). In this state, the second base 41 is fixed to the first holding member 51 and the second holding member 52, respectively, by a bolt (omitted from the drawing) or the like.

[0055] As shown in Figure 3 and Figure 4 , the support member 50 includes a third flow path 90. As shown in Figure 5 , the first base 31 includes a first flow path 70. As shown in Figure 6 , the second base 41 includes a second flow path 80. Refrigerant flows in the first flow path 70, the second flow path 80, and the third flow path 90. The refrigerant is, for example, water. The first flow path 70, the second flow path 80, and the third flow path 90 communicate. That is, the first flow path 70, the second flow path 80, and the third flow path 90 are connected in a manner that refrigerant supplied from a common supply source (omitted from the drawing) flows.

[0056] As shown in Figure 3 and Figure 4As shown, the third flow path 90 includes a main flow path 91. The main flow path 91 includes multiple flow path sections 91a, 91b, 91c, 91d, and 91e. Flow path section 91b is the flow path between the laser medium 20 and the cylinder 55. Flow path section 91d is the flow path within the piping 59 installed between the first holding member 51 and the second holding member 52.

[0057] A flow path portion 91a is formed within the first retaining member 51. The upstream end of the flow path portion 91a is located on the side 51a of the first retaining member 51. The upstream end of the flow path portion 91a is a refrigerant supply port. The downstream end of the flow path portion 91a is connected to the upstream end of the flow path portion 91b. A flow path portion 91c is formed within the second retaining member 52. The upstream end of the flow path portion 91c is connected to the downstream end of the flow path portion 91b. The downstream end of the flow path portion 91c is connected to the upstream end of the flow path portion 91d. A flow path portion 91e is formed within the first retaining member 51. The upstream end of the flow path portion 91e is connected to the downstream end of the flow path portion 91d. The downstream end of the flow path portion 91e is located on the side 51a of the first retaining member 51. The downstream end of the flow path portion 91e is a refrigerant discharge port. Furthermore, since the upstream end of the flow path portion 91a, which serves as the refrigerant supply port, and the downstream end of the flow path portion 91e, which serves as the refrigerant discharge port, are located on the side 51a of the first retaining member 51, the external piping can be easily removed.

[0058] In the main flow path 91 configured as described above, refrigerant is supplied from the upstream end of the flow path section 91a, and the refrigerant flows in the order of flow path sections 91a, 91b, 91c, 91d, and 91e, and is discharged from the downstream end of the flow path section 91e. As a result, the laser medium 20 is cooled.

[0059] like Figure 3 , Figure 5 and Figure 6 As shown, the third flow path 90 further includes a first branch flow path 93 and a second branch flow path 94. The first branch flow path 93 and the second branch flow path 94 are formed within the first retaining member 51. The first branch flow path 93 branches from the main flow path 91. The upstream end 93a of the first branch flow path 93 connects to the middle of the flow path portion 91a of the main flow path 91 (the portion of the main flow path 91 upstream of the flow path portion 91b). The downstream end 93b of the first branch flow path 93 is located on the surface 51b of the first retaining member 51 on the side of the second retaining member 52. The second branch flow path 94 branches from the main flow path 91. The upstream end 94a of the second branch flow path 94 connects to the middle of the flow path portion 91a of the main flow path 91. The downstream end 94b of the second branch flow path 94 is located on the surface 51b of the first retaining member 51.

[0060] The third flow path 90 further includes a third branch flow path 95 and a fourth branch flow path 96. The third branch flow path 95 and the fourth branch flow path 96 are formed within the first retaining member 51. The third branch flow path 95 merges with the main flow path 91. The upstream end 95a of the third branch flow path 95 is located on the surface 51b of the first retaining member 51. The downstream end 95b of the third branch flow path 95 is connected to the middle of the flow path portion 91e of the main flow path 91 (the portion of the main flow path 91 downstream of the flow path portion 91b). The fourth branch flow path 96 merges with the main flow path 91. The upstream end 96a of the fourth branch flow path 96 is located on the surface 51b of the first retaining member 51. The downstream end 96b of the fourth branch flow path 96 is connected to the middle of the flow path portion 91e of the main flow path 91.

[0061] like Figure 5 As shown, the first flow path 70 is formed within the first base 31 in a straight line extending along the Z direction when viewed from the X direction. The upstream end 70a and downstream end 70b of the first flow path 70 are located on the surface 31b of the first retaining member 51 side of the first base 31. The surface 31b of the first base 31 is in contact with the surface 51b of the first retaining member 51. In this state, the downstream end 93b of the first branch flow path 93 is connected to the upstream end 70a of the first flow path 70, and the upstream end 95a of the third branch flow path 95 is connected to the downstream end 70b of the first flow path 70. In addition, O-rings are used, for example, in the connection between the downstream end 93b and the upstream end 70a and the connection between the upstream end 95a and the downstream end 70b to prevent refrigerant leakage.

[0062] In the first branch flow path 93, the first flow path 70, and the third branch flow path 95 configured as described above, refrigerant is supplied from the main flow path 91 at the upstream end 93a of the first branch flow path 93. The refrigerant flows in the order of the first branch flow path 93, the first flow path 70, and the third branch flow path 95. At the downstream end 95b of the third branch flow path 95, the refrigerant merges with the main flow path 91. As a result, the first base 31 is cooled. In the semiconductor laser element 33 of each excitation light source 32, multiple semiconductor laser strips 33a are cooled by means of heat sinks 33b by cooling the first base 31.

[0063] like Figure 6As shown, the second flow path 80 is formed within the second base 41 in a straight line extending along the Z direction when viewed from the X direction. The upstream end 80a and downstream end 80b of the second flow path 80 are located on the surface 41b of the second base 41 on the side of the first retaining member 51. The surface 41b of the second base 41 is in contact with the surface 51b of the first retaining member 51. In this state, the downstream end 94b of the second branch flow path 94 is connected to the upstream end 80a of the second flow path 80, and the upstream end 96a of the fourth branch flow path 96 is connected to the downstream end 80b of the second flow path 80. In addition, O-rings are used, for example, in the connection between the downstream end 94b and the upstream end 80a and the connection between the upstream end 96a and the downstream end 80b to prevent refrigerant leakage.

[0064] In the second branch flow path 94, the second flow path 80, and the fourth branch flow path 96 configured as described above, refrigerant is supplied from the main flow path 91 at the upstream end 94a of the second branch flow path 94. The refrigerant flows in the order of the second branch flow path 94, the second flow path 80, and the fourth branch flow path 96. At the downstream end 96b of the fourth branch flow path 96, the refrigerant merges with the main flow path 91. As a result, the second base 41 is cooled. In the semiconductor laser element 43 of each excitation light source 42, multiple semiconductor laser strips 43a are cooled by means of heat sinks 43b by cooling the second base 41.

[0065] The manufacturing method of laser device 1 is described. In this embodiment, as... Figure 7 As shown, the support member 50, which supports the laser medium 20, is installed in the setting section S of the laser system. Firstly, as... Figure 8 As shown, the first light source unit 30 and the second light source unit 40 are prepared (preparation step). Then, on the support member 50 which is supporting the laser medium 20, the first base 31 is arranged from one side in the Y direction, and the second base 41 is arranged from the other side in the Y direction on the support member 50, thereby arranging the first light source unit 30 and the second light source unit 40 side by side in the Y direction (side-by-side arrangement step). In this state, the first base 31 is fixed to the first holding member 51 and the second holding member 52 respectively using bolts (not shown), and the second base 41 is fixed to the first holding member 51 and the second holding member 52 respectively using bolts (not shown).

[0066] When the first base 31 is attached to the support 50, the position of the first base 31 in the X direction and the Z direction is defined with respect to the support 50 (further, with respect to the laser medium 20) by fitting the first base 31 into the groove 53a of the link member 53. Further, the position of the first base 31 in the Y direction is defined with respect to the support 50 (further, with respect to the laser medium 20) by sliding the first base 31 on the support surface 56 of the link member 53 to abut against the first stopper 57. At this time, the first base 31 is prevented from coming into contact with the cylinder 55 and the cylinder 55 from being damaged.

[0067] When the second base 41 is attached to the support 50, the position of the second base 41 in the X direction and the Z direction is defined with respect to the support 50 (further, with respect to the laser medium 20) by fitting the second base 41 into the groove 53a of the link member 53. Further, the position of the second base 41 in the Y direction is defined with respect to the support 50 (further, with respect to the laser medium 20) by sliding the second base 41 on the support surface 56 of the link member 53 to abut against the second stopper 58. At this time, the second base 41 is prevented from coming into contact with the cylinder 55 and the cylinder 55 from being damaged.

[0068] As described above, in the laser device 1, the first base 31 and the plurality of excitation light sources 32 are unitized as the first light source unit 30, and the second base 41 and the plurality of excitation light sources 42 are unitized as the second light source unit 40, and the first light source unit 30 and the second light source unit 40 are supported by the support 50 in a state of being arranged side by side in the Y direction. Thereby, the plurality of excitation light sources 32, 42 can be easily attached to and detached from the support 50 by attaching and detaching the first base 31 and the second base 41 to and from the support 50, respectively. Further, when the first base 31 and the second base 41 are attached to the support 50 that supports the laser medium 20, the position of the first base 31 with respect to the support 50 is defined by the first stopper 57, and the position of the second base 41 with respect to the support 50 is defined by the second stopper 58. Thereby, the plurality of excitation light sources 32, 42 can be easily positioned with respect to the laser medium 20 by attaching the first base 31 and the second base 41 to the support 50 that supports the laser medium 20, respectively. As is clear from the above description, according to the laser device 1, the easy attachment and detachment of the plurality of excitation light sources 32, 42 and the easy positioning of the plurality of excitation light sources 32, 42 can be achieved.

[0069] In the laser device 1, the support 50 includes the first holding member 51 and the second holding member 52 arranged side by side in the X direction, and the link member 53 that links the first holding member 51 and the second holding member 52, and the first light source unit 30 and the second light source unit 40 are arranged between the first holding member 51 and the second holding member 52. Thereby, the laser device 1 can be miniaturized and the configuration thereof can be simplified.

[0070] In the laser device 1, the connecting member 53 has a support surface 56 that supports the first base 31 and the second base 41 so as to be slidable in the Y direction. Thus, the support member 50 can be easily disassembled and assembled with respect to the plurality of excitation light sources 32, 42 by sliding the first base 31 and the second base 41 on the support surface 56 of the connecting member 53, respectively.

[0071] In the laser device 1, the connecting member 53 includes a first stopper 57 that limits movement of the first base 31 in the Y direction and a second stopper 58 that limits movement of the second base 41 in the Y direction. Thus, the plurality of excitation light sources 32, 42 can be easily and reliably positioned with respect to the laser medium 20 by bringing the first base 31 and the second base 41 into abutment with the first stopper 57 and the second stopper 58 of the connecting member 53, respectively.

[0072] In the laser device 1, the first base 31 includes a first flow path 70 through which a refrigerant flows, the second base 41 includes a second flow path 80 through which a refrigerant flows, and the support member 50 includes a third flow path 90 through which a refrigerant flows. Thus, the laser medium 20 and the plurality of excitation light sources 32, 42 can be cooled.

[0073] In the laser device 1, the first flow path 70, the second flow path 80, and the third flow path 90 are communicated. Thus, the laser medium 20 and the plurality of excitation light sources 32, 42 can be efficiently cooled.

[0074] In the laser device 1, the third flow path 90 includes a main flow path 91 including a flow path portion 91b between the laser medium 20 and the cylinder 55, a first branch flow path 93 and a second branch flow path 94 that branch from the main flow path 91, and a third branch flow path 95 and a fourth branch flow path 96 that join the main flow path 91. In the laser device 1, a downstream end 93b of the first branch flow path 93 is connected to an upstream end 70a of the first flow path 70, a downstream end 94b of the second branch flow path 94 is connected to an upstream end 80a of the second flow path 80, an upstream end 95a of the third branch flow path 95 is connected to a downstream end 70b of the first flow path 70, and an upstream end 96a of the fourth branch flow path 96 is connected to a downstream end 80b of the second flow path 80. Thus, the laser medium 20 and the plurality of excitation light sources 32, 42 can be efficiently cooled with a simple flow path structure.

[0075] In the laser device 1, the plurality of excitation light sources 32, 42 are arranged in a circumferential direction centered on a center line CL of the laser medium 20 as viewed in the X direction. Thus, uniformization of excitation distribution of the laser medium 20 can be achieved.

[0076] In the laser device 1, each excitation source 32 includes a semiconductor laser element 33, and each excitation source 42 includes a semiconductor laser element 43. This enables the long lifespan of each excitation source 32 and 42. Furthermore, since the multiple excitation sources 32 are modularized as a first light source unit 30, and the multiple excitation sources 42 are modularized as a second light source unit 40, the precision required in processing where individual semiconductor laser elements are not needed is eliminated.

[0077] In laser device 1, semiconductor laser element 33 includes a plurality of stacked semiconductor laser strips 33a, and semiconductor laser element 43 includes a plurality of stacked semiconductor laser strips 43a. This allows for efficient and sufficient excitation of the laser medium 20.

[0078] In the manufacturing method of the laser device 1, multiple excitation sources 32 and 42 can be easily positioned on the laser medium 20 simply by placing the first base 31 on one side of the support member 50 in the Y direction, which intersects the X direction extending from the rod-shaped laser medium 20, and placing the second base 41 on the support member 50 from the other side in the Y direction. Therefore, according to the manufacturing method of the laser device 1, a laser device 1 in which multiple excitation sources 32 and 42 are positioned on the laser medium 20 can be easily obtained.

[0079] This invention is not limited to the embodiments described above. For example, in the above embodiments, the first light source unit 30 includes three excitation light sources 32, but the first light source unit 30 only needs to include multiple excitation light sources 32. Similarly, in the above embodiments, the second light source unit 40 includes three excitation light sources 42, but the second light source unit 40 only needs to include multiple excitation light sources 42. As an example, it is also possible to... Figure 9 As shown in (a), the first light source unit 30 contains four excitation light sources 32, and the second light source unit 40 contains four excitation light sources 42. Alternatively, as shown in (a),... Figure 9 As shown in (b), the first light source unit 30 includes two excitation light sources 32, and the second light source unit 40 includes two excitation light sources 42. In either case, the multiple excitation light sources 32 and 42 are arranged at equal angular intervals along a circumference centered on the center line CL.

[0080] It can also be like Figure 10 As shown in (a), the first light source unit 30 includes a plurality of excitation light sources 32a arranged in a row along a circumference centered on the center line CL, and a plurality of excitation light sources 32b arranged in a row along a circumference offset from the center line in the X direction. Figure 10 In the first light source unit 30 shown in (a), one excitation light source 32a and one excitation light source 32b are arranged side by side in the X direction. The second light source unit 40 combined with the first light source unit 30 has the same structure as the first light source unit 30.

[0081] It can also be like Figure 10 As shown in (b), the first light source unit 30 includes at least one excitation light source 32a arranged along a circumference centered on the center line CL, and a plurality of excitation light sources 32b arranged in another column along a circumference offset from that circumference in the X direction. Figure 10 In the first light source unit 30 shown in (b), three excitation sources 32a and 32b are arranged at 60° intervals along a circumference centered on the center line CL, such that one excitation source 32a is located between two excitation sources 32b when viewed from the X direction. The second light source unit 40 combined with the first light source unit 30 also has the same structure as the first light source unit 30.

[0082] In this case, one excitation source 32a and two excitation sources 42a are as follows: Figure 11 As shown in (a), they are arranged at 120° intervals along a circumference centered on the center line CL. Two excitation sources 32b and one excitation source 42b are as follows... Figure 11 As shown in (b), they are arranged at 120° intervals along another circumference centered on the center line CL. As a result, the six excitation sources 32a, 32b, 42a, and 42b are as follows: Figure 11 As shown in (c), the laser media 20 is arranged at 60° intervals along a circle centered on the center line CL when viewed from a direction parallel to the center line CL. Thus, the excitation light EL emitted from each excitation source 32a, 32b, 42a, 42b imparts a uniform excitation distribution to the laser medium 20.

[0083] like Figure 12 As shown, in the first light source unit 30, multiple excitation light sources 32 can be disposed on the outer surface of the first base 31, and a through hole 31c through which the excitation light EL emitted from each excitation light source 32 into the laser medium 20 passes can be formed in the first base 31. Similarly, in the second light source unit 40, multiple excitation light sources 42 can be disposed on the outer surface of the second base 41, and a through hole 41c through which the excitation light EL emitted from each excitation light source 42 into the laser medium 20 passes can be formed in the second base 41.

[0084] The first flow path 70 can also be formed in a bent state (e.g., bent in a manner close to each excitation light source 32) within the first base 31. Similarly, the second flow path 80 can also be formed in a bent state (e.g., bent in a manner close to each excitation light source 42) within the second base 41. However, their formation becomes easier when the first flow path 70 and the second flow path 80 are formed in a straight line within the first base 31 and the second base 41, respectively.

[0085] The first flow path 70 can also include a pipe provided separately from the main body portion of the first base 31 on which the plurality of excitation light sources 32 are mounted. Similarly, the second flow path 80 can also include a pipe provided separately from the main body portion of the second base 41 on which the plurality of excitation light sources 42 are mounted.

[0086] The fin 33b of the semiconductor laser element 33 can also include a flow path through which the refrigerant is introduced from the first flow path 70 and through which the refrigerant is discharged to the first flow path 70. Similarly, the fin 43b of the semiconductor laser element 43 can also include a flow path through which the refrigerant is introduced from the second flow path 80 and through which the refrigerant is discharged to the second flow path 80.

[0087] The first base 31 and the second base 41 can also not include the first flow path 70 and the second flow path 80, respectively. In this case, the first base 31 and the second base 41 can each be provided with a fin. By cooling the first base 31 and the second base 41 by air cooling or natural heat dissipation, each semiconductor laser element 33, 43 is cooled.

[0088] Each excitation light source 32 can include an electronic cooling element for cooling the semiconductor laser element 33. Similarly, each excitation light source 42 can include an electronic cooling element for cooling the semiconductor laser element 43.

[0089] In the above-described embodiment, the support 50 includes the first stopper 57 as the first regulation portion that regulates the position of the first base 31 with respect to the support 50, but the first base 31 can include the first regulation portion, or both the first base 31 and the support 50 can include the first regulation portion. That is, at least one of the first base 31 and the support 50 can include the first regulation portion that regulates the position of the first base 31 with respect to the support 50. The first regulation portion can be a positioning pin and a positioning hole, a positioning bolt and a positioning threaded hole (in this case, also serving as a fixing of the first base 31 to the support 50), or the like.

[0090] In the above-described embodiment, the support 50 includes the second stopper 58 as the second regulation portion that regulates the position of the second base 41 with respect to the support 50, but the second base 41 can include the second regulation portion, or both the second base 41 and the support 50 can include the second regulation portion. That is, at least one of the second base 41 and the support 50 can include the second regulation portion that regulates the position of the second base 41 with respect to the support 50. The second regulation portion can be a positioning pin and a positioning hole, a positioning bolt and a positioning threaded hole (in this case, also serving as a fixing of the second base 41 to the support 50), or the like.

[0091] In the above-described embodiments, the support 50 includes the first stopper 57 as the first regulation portion that regulates the position of the first base 31 with respect to the support 50, and the second stopper 58 as the second regulation portion that regulates the position of the second base 41 with respect to the support 50, but at least one of the first base 31 and the support 50 can include the first regulation portion that regulates the position of the first base 31 with respect to the support 50, and at least one of the first base 31 and the second base 41 can include the second regulation portion that regulates the position of the second base 41 with respect to the first base 31. In this case, it is possible to easily attach and detach the plurality of excitation light sources 32, 42 to and from the support 50 by attaching and detaching the first base 31 and the second base 41 to and from the support 50, respectively. Further, it is possible to easily position the plurality of excitation light sources 32, 42 with respect to the laser medium 20 by attaching the first base 31 and the second base 41 to the support 50 that supports the laser medium 20, respectively.

[0092] The support 50 can not include the connecting member 53 as long as it supports the laser medium 20, the first light source unit 30, and the second light source unit 40, and can include either the first holding member 51 or the second holding member 52 regardless of whether it includes the connecting member 53. In addition, the support 50 can be configured to support the laser medium 20, the first light source unit 30, and the second light source unit 40 without bringing the laser medium 20, the first light source unit 30, and the second light source unit 40 into contact with the support 50. For example, there can be a case where the first light source unit 30 is supported by the support 50 in a state of being in contact with the support 50, and the second light source unit 40 is supported by the support 50 in a state of being in contact with the first light source unit 30 and being spaced apart from the support 50.

[0093] Explanation of Reference Signs

[0094] 1 ……laser device; 20 ……laser medium; 30 ……first light source unit; 31 ……first base; 32 ……excitation light source; 33 ……semiconductor laser element; 33a ……semiconductor laser bar; 40 ……second light source unit; 41 ……second base; 42 ……excitation light source; 43 ……semiconductor laser element; 43a ……semiconductor laser bar; 50 ……support member; 51 ……first holding member; 52 ……second holding member; 53 ……connecting member; 55 ……cylinder; 56 ……support surface; 57 ……first stopper (first regulation portion); 58 ……second stopper (second regulation portion); 70 ……first flow path; 70a ……upstream end; 70b ……downstream end; 80 ……second flow path; 80a ……upstream end; 80b ……downstream end; 90 ……third flow path; 91 ……main flow path; 91b ……flow path portion (flow path); 93 ……first branch flow path; 93b ……downstream end; 94 ……second branch flow path; 94b ……downstream end; 95 ……third branch flow path; 95a ……upstream end; 96 ……fourth branch flow path; 96a ……upstream end.

Claims

1. A laser device, wherein provided are: a rod-shaped laser medium extending in a first direction; a first light source unit including a first base and a plurality of excitation light sources mounted on the first base; a second light source unit disposed in parallel with the first light source unit in a second direction intersecting the first direction, including a second base and a plurality of excitation light sources mounted on the second base; and a support member supporting the laser medium, the first light source unit, and the second light source unit, the first light source unit and the second light source unit are respectively detachable with respect to the support member, at least one of the first base and the support member includes a first regulation portion that regulates a position of the first base with respect to the support member, at least one of the second base and the support member includes a second regulation portion that regulates a position of the second base with respect to the support member, the support member includes a first holding member and a second holding member disposed in parallel in the first direction, and a link member linking the first holding member and the second holding member, the first light source unit and the second light source unit are disposed between the first holding member and the second holding member, the link member has a support surface that supports the first base and the second base so as to be slidable in the second direction.

2. The laser device according to claim 1, wherein the link member includes a first stopper that limits movement of the first base in the second direction as the first regulation portion, and includes a second stopper that limits movement of the second base in the second direction as the second regulation portion.

3. The laser device according to claim 1 or 2, wherein the first base includes a first flow path through which a refrigerant flows, the second base includes a second flow path through which a refrigerant flows, the support member includes a third flow path through which a refrigerant flows.

4. The laser device according to claim 3, wherein the first flow path, the second flow path, and the third flow path are communicated.

5. The laser device according to claim 4, wherein the support member includes a cylinder in which the laser medium is disposed on an inner side, the cylinder is light-transmissive, the third flow path includes a main flow path including a flow path between the laser medium and the cylinder, a first branch flow path and a second branch flow path branched from the main flow path, and a third branch flow path and a fourth branch flow path that join the main flow path, a downstream end of the first branch flow path is connected to an upstream end of the first flow path, a downstream end of the second branch flow path is connected to an upstream end of the second flow path, an upstream end of the third branch flow path is connected to a downstream end of the first flow path, an upstream end of the fourth branch flow path is connected to a downstream end of the second flow path.

6. The laser device according to any one of claims 1 to 5, wherein the plurality of excitation light sources are disposed along a circumference centered on a center line of the laser medium when viewed from the first direction.

7. The laser device according to any one of claims 1 to 6, wherein ​ Each of the plurality of excitation light sources includes a semiconductor laser element.

8. The laser device according to claim 7, wherein The semiconductor laser element includes a plurality of semiconductor laser bars stacked.

9. A laser device, comprising: a rod-shaped laser medium extending in a first direction; a first light source unit including a first base and a plurality of excitation light sources mounted on the first base; a second light source unit disposed in parallel with the first light source unit in a second direction intersecting the first direction, including a second base and a plurality of excitation light sources mounted on the second base; and a support member supporting the laser medium, the first light source unit, and the second light source unit, the first light source unit and the second light source unit are respectively detachable with respect to the support member, at least one of the first base and the support member includes a first regulation portion that regulates a position of the first base with respect to the support member, at least one of the first base and the second base includes a second regulation portion that regulates a position of the second base with respect to the first base, the support member includes a first holding member and a second holding member disposed in parallel in the first direction, and a link member linking the first holding member and the second holding member, the first light source unit and the second light source unit are disposed between the first holding member and the second holding member, the link member has a support surface that supports the first base and the second base so as to be slidable in the second direction.

10. A manufacturing method of a laser device, comprising: preparing a first light source unit including a first base and a plurality of excitation light sources mounted on the first base, a second light source unit including a second base and a plurality of excitation light sources mounted on the second base, and a support member supporting a rod-shaped laser medium extending in a first direction, the support member including a first holding member and a second holding member disposed in parallel in the first direction, and a link member linking the first holding member and the second holding member; and sliding the first base with respect to a support surface of the link member from one side in a second direction intersecting the first direction, and disposing the first light source unit between the first holding member and the second holding member, sliding the second base with respect to the support surface from the other side in the second direction, and disposing the second light source unit between the first holding member and the second holding member, thereby disposing the first light source unit and the second light source unit in parallel in the second direction. ​ ​

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