Data acquisition and diagnostic system and method for a lithography machine

Abstract

The application provides a photolithography machine data acquisition and diagnosis system and method, the photolithography machine data acquisition and diagnosis system comprises a host computer, a switch, a diagnosis controller, and a multi-core motion control board and a data interface board hung on a command bus; the host computer, the switch and the diagnosis controller are sequentially connected through the command bus, and the data interface board is connected with a plurality of high-speed signal acquisition boards through optical fibers; the high-speed signal acquisition boards are used for data storage, data analysis and abnormal data recovery, and the multi-core motion control board is used for data storage, performance analysis and abnormal data error reporting; the application reduces the data storage and processing pressure of the diagnosis controller and the host computer, reduces the bandwidth occupied in the data transmission process, improves the photolithography machine system sampling data processing capacity and real-time performance; the multi-core motion control board generates different data diagnosis requests when there are errors or abnormal data in the original data or performance analysis data, improves the troubleshooting efficiency of the photolithography machine performance and reliability problems, and optimizes the design feedback of the photolithography machine.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit manufacturing, and in particular to a data acquisition and diagnosis system and method for a lithography machine. Background Art

[0002] The lithography machine control system is the "brain" and "nerve" of the machine. It organically connects various subsystems and enables them to operate in an orderly manner. Programs are set up and coordinated through the machine's overall management software, enabling control of various machine functions and completing the machine's workflow. The control hardware architecture aims to provide a reliable and compatible control platform for each subsystem, while also constraining the control implementation of each subsystem to ultimately meet product performance requirements. However, with the continuous increase in the servo frequency of the lithography machine's motion stage motor and the increasing amount of high-speed real-time data processing and acquisition involved, the traditional lithography machine control hardware system based on the VME parallel bus is no longer able to meet the increasing data transmission bandwidth requirements. While the VME64x bus, with its highest bandwidth to date, reaches 320 Mbps (Byte / s), it still cannot meet the data transmission requirements of high-end lithography machines. Furthermore, the lithography machine control system contains a large number of weak signal sensors, such as capacitive sensors, eddy current sensors, and light energy sensors. If the wrong data transmission method is used, these sensors are highly susceptible to electromagnetic interference, which in turn affects the lithography machine's performance. The VPX architecture is a next-generation high-speed serial bus standard proposed by the VITA (VME International Trade Association) based on the VME bus. The VPX architecture's basic specifications, mechanical structure, and bus signaling are defined in the ANSI / VITA 46 series of technical specifications. The VPX architecture incorporates serial bus technologies, including the Serial Rapid IO (SRIO) protocol, PCIe (PCI-Express), and 10 Gigabit Ethernet, supporting higher backplane bandwidth. The VPX core switch provides 32 differential pairs, each theoretically capable of 10 Gbps of data exchange. A single VPX module theoretically offers a maximum data exchange rate of 8 Gbps. The VPX architecture also replaces the VME mainframe architecture with a switched architecture. This architecture frees system performance from the limitations of the mainframe. Furthermore, with a switched architecture, processors can send data at any time, without having to wait for the bus to initiate a transmission, making it particularly suitable for multi-processor systems. Compared with VME bus, it has obvious advantages, such as: fast transmission rate, 4×Serial can reach 10Gbps (Byte / s); support for hardware error correction, reducing software overhead; high data transmission efficiency, up to 94%; support for multiple topologies, star, dual star, full network, etc.; VPX backplane supports multiple connection methods, and the backplane has multiple functional areas (Plane) that transmit different signals.

[0003] The existing photolithography machine based on VPX architecture realizes the adaptation of different platforms with multiple motor shafts, large amount of information and complex control algorithm. However, when the performance and reliability of the photolithography machine are checked, a long time is consumed, a large amount of human resources is occupied, and the checking efficiency is low. In addition, the design optimization of the photolithography machine lacks feedback, thereby prolonging the iteration development cycle.

[0004] Therefore, there is a need to improve the checking efficiency of the performance and reliability of the photolithography machine and optimize the design feedback of the photolithography machine. SUMMARY

[0005] The purpose of the present application is to provide a photolithography machine data acquisition and diagnosis system and method, which improves the checking efficiency of the performance and reliability of the photolithography machine and optimizes the design feedback of the photolithography machine.

[0006] In order to achieve the above purpose, the present application provides a photolithography machine data acquisition and diagnosis system, which comprises an upper computer, a switch, a diagnosis controller, a multi-core motion control board and a data interface board connected to a command bus; wherein the upper computer, the switch and the diagnosis controller are connected in turn through the command bus, and the data interface board is connected to a plurality of high-speed signal acquisition boards through optical fibers.

[0007] The high-speed signal acquisition board comprises a first data acquisition module, an original data storage module, a data preprocessing module and an abnormal data recovery module, which are used to store the original data collected by the sensor and the data recovered after the abnormality, and to analyze the data and recover the abnormal data.

[0008] The multi-core motion control board comprises a second data acquisition module, an original data shared storage space, a performance analysis module, an abnormal data error reporting module and a memory, which are used to store the original data and performance analysis data uploaded by the high-speed signal acquisition board, and to analyze the performance and report the error of the abnormal data.

[0009] Optionally, the multi-core motion control board and the data interface board are also connected to a data bus and an internal synchronization bus.

[0010] Optionally, it further comprises a synchronization master card, a synchronization slave card, an SRIO exchange card and a sensor signal board connected to the command bus, the data bus and the internal synchronization bus; wherein the synchronization master card and the synchronization slave card are connected through an external synchronization bus, and the data interface board, the sensor signal board, the diagnosis controller and the multi-core motion control board exchange data through the SRIO exchange card.

[0011] Optionally, the high-speed signal acquisition board is connected to a plurality of sensors through a level bus / differential bus.

[0012] Optionally, at least two VPX chassis are included, each of the VPX chassis includes the diagnostic controller, the multi-core motion control board, the data interface board, the SRIO switch board and the sensor signal board, the VPX chassis also includes the synchronization main board card or the synchronization slave board, and any VPX chassis including the synchronization main board card is connected to several VPX chassis including the synchronization slave boards.

[0013] Optionally, it is characterized in that when there are errors or abnormal data in the original data or performance analysis data stored in the multi-core motion control board, the multi-core motion control board will generate different data diagnostic requests, including hard real-time data diagnostic requests and soft real-time data diagnostic requests.

[0014] Accordingly, the present invention further provides a lithography machine data acquisition and diagnosis method, which uses the lithography machine data acquisition and diagnosis system to perform hard real-time data acquisition and diagnosis, comprising:

[0015] Multi-core motion control boards generate hard real-time data diagnostic requests;

[0016] The hard real-time data diagnosis request is uploaded to the synchronous slave card via the internal synchronous bus, and then uploaded to the synchronous master card via the external synchronous bus;

[0017] The synchronous master card receives the hard real-time data diagnosis request and performs arbitration, generates a hard real-time diagnosis command and sends it to the synchronous slave card;

[0018] The synchronous slave board transmits the hard real-time diagnostic command to the multi-core motion control board, the data interface board and the sensor signal board through an internal synchronous bus;

[0019] The multi-core motion control board, the data interface board and the sensor signal board upload the stored hard real-time diagnostic data to the diagnostic controller in sequence through the synchronous slave board and the synchronous main board, and upload it to the host computer through the command bus.

[0020] Optionally, the hard real-time diagnostic data includes underlying hardware data and whole-machine synchronization data of the lithography machine.

[0021] Accordingly, the present invention further provides a lithography machine data acquisition and diagnosis method, which uses the lithography machine data acquisition and diagnosis system to perform soft real-time data acquisition and diagnosis, including:

[0022] The multi-core motion control board generates soft real-time data diagnostic requests;

[0023] The soft real-time data diagnosis request is uploaded to the diagnosis controller via the command bus, and then uploaded to the host computer via the command bus;

[0024] The host computer receives the soft real-time data diagnosis request and performs arbitration, generates a soft real-time diagnosis command and sends it to the diagnosis controller, and the diagnosis controller transmits the soft real-time diagnosis command to the multi-core motion control board, the data interface board, and the sensor signal board through the command bus;

[0025] The multi-core motion control board, the data interface board and the sensor signal board upload the stored soft real-time diagnostic data to the diagnostic controller via the SRIO switch board, and upload it to the host computer via the command bus.

[0026] Optionally, the soft real-time diagnostic data includes process data, performance analysis data and abnormal diagnosis data during the scanning process.

[0027] In summary, the present invention provides a data acquisition and diagnosis system and method for a lithography machine, the data acquisition and diagnosis system for the lithography machine comprising a host computer, a switch, a diagnostic controller, and a multi-core motion control board and a data interface board mounted on a command bus; the host computer, the switch, and the diagnostic controller are sequentially connected via a command bus, and the data interface board is connected to a number of high-speed signal acquisition boards via optical fibers; wherein the high-speed signal acquisition board has data storage, data analysis, and abnormal data recovery functions, and the multi-core motion control board has data storage, performance analysis, and abnormal data error reporting functions. The high-speed signal acquisition board and the multi-core motion control board described in the present invention reduce the data storage and processing pressure of the diagnostic controller and the host computer, reduce the bandwidth occupied during data transmission, and improve the sampling data processing capability and real-time performance of the lithography machine system; when there are errors or abnormal data in the original data or performance analysis data, the multi-core motion control board will generate different data diagnostic requests, thereby improving the efficiency of troubleshooting lithography machine performance and reliability issues and optimizing the design feedback of the lithography machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the architecture of a lithography machine data acquisition and diagnosis system provided by one embodiment of the present invention;

[0029] Figure 2 A schematic structural diagram of a high-speed signal acquisition board in a lithography machine data acquisition and diagnostic system provided by one embodiment of the present invention;

[0030] Figure 3 A schematic diagram of the structure of a multi-core motion control board in a lithography machine data acquisition and diagnostic system provided by an embodiment of the present invention;

[0031] Figure 4 A schematic diagram of data exchange between various boards in a lithography machine data acquisition and diagnostic system provided by one embodiment of the present invention;

[0032] Figure 5 A schematic diagram of the architecture of a lithography machine data acquisition and diagnosis system according to an embodiment of the present invention performing hard real-time data acquisition;

[0033] Figure 6 A flow chart of hard real-time data acquisition for a lithography machine data acquisition and diagnosis method provided by an embodiment of the present invention;

[0034] Figure 7 A schematic diagram of the architecture of a lithography machine data acquisition and diagnosis system according to an embodiment of the present invention performing soft real-time data acquisition;

[0035] Figure 8 A flow chart of soft real-time data acquisition for a lithography machine data acquisition and diagnosis method provided by an embodiment of the present invention;

[0036] The accompanying drawings are numerals as follows:

[0037] 101-host computer; 102-switch; 200-diagnostic controller;

[0038] 301-Multi-core motion control board; 302-Synchronous master card; 303-Synchronous slave card; 304-SRIO switch board;

[0039] 401-data interface board; 402-sensor signal board; 403-high-speed signal acquisition board; 500-sensor. DETAILED DESCRIPTION

[0040] The following is a more detailed description of the specific embodiments of the present invention with reference to schematic diagrams. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the drawings are greatly simplified and not to exact scale, and are only used for the purpose of conveniently and clearly illustrating the embodiments of the present invention.

[0041] Figure 1 A schematic diagram of the architecture of a lithography machine data acquisition and diagnosis system provided by one embodiment of the present invention; Figure 2 This is a structural diagram of a high-speed signal acquisition board; Figure 3 This is a schematic diagram of the structure of a multi-core motion control board. Figures 1 to 3 The lithography machine data acquisition and diagnostic system described in this embodiment includes a host computer 101, a switch 102, a diagnostic controller 200, and a multi-core motion control board 301 and a data interface board 401 connected to a command bus (i.e., an Ethernet bus). The host computer 101, the switch 102, and the diagnostic controller 200 are sequentially connected via the command bus, and the data interface board 401 is connected to a plurality of high-speed signal acquisition boards 403 via optical fibers.

[0042] The high-speed signal acquisition board 403 comprises a first data acquisition module, an original data storage module, a data preprocessing module and an abnormal data recovery module, and is used for storing original data and abnormal data recovered by the sensor 500, and performing data analysis and abnormal data recovery.

[0043] The multi-core motion control board 301 comprises a second data acquisition module, an original data shared storage space, a performance analysis module, an abnormal data error reporting module and a memory, and is used for storing original data and performance analysis data uploaded by the high-speed signal acquisition board 132, and performing performance analysis and abnormal data error reporting.

[0044] In the embodiment, the multi-core motion control board 301 and the data interface board 401 are also hung on a data bus (i.e. an SRIO bus) and an internal synchronization bus (i.e. an interrupt bus). The lithography machine data acquisition and diagnosis system further comprises a synchronization master board card 302, a synchronization slave board card 303, an SRIO exchange board 304 and a sensor signal board 402 hung on a command bus, a data bus and an internal synchronization bus; wherein the synchronization master board card 302 and the synchronization slave board card 303 are connected through an external synchronization bus. Referring to Figure 4 , the data interface board 401, the sensor signal board 402, the diagnosis controller 200 and the multi-core motion control board 301 exchange data through the SRIO exchange board 304. Optionally, the high-speed signal acquisition board 403 is connected with a plurality of sensors 500 through a level bus / differential bus.

[0045] It should be noted that, referring to Figure 1 , the lithography machine data acquisition and diagnosis system comprises five layers of architecture, i.e. an application layer, a logic layer, a control layer, a signal flow layer and a sensor layer, wherein the application layer comprises the host computer 101 and the switch 102, the logic layer comprises the diagnosis controller 200 (Power PC, PPC), the control layer comprises the multi-core motion control board 301, the synchronization master board card 302, the synchronization slave board card 303 and the SRIO exchange card 304, the signal flow layer comprises the data interface board 401, the sensor signal board 402 and the high-speed signal acquisition board 403, and the sensor layer comprises the sensor 500.

[0046] In the embodiment, the lithography machine data acquisition and diagnosis system comprises at least two VPX cabinets, each of which comprises the diagnostic controller 200, the multi-core motion control board 301, the data interface board 401, the SRIO exchange board 304 and the sensor signal board 402, and further comprises the synchronization master board card 302 or the synchronization slave board card 303. It should be noted that the number of VPX cabinets containing the synchronization master board card 302 in the lithography machine data acquisition and diagnosis system can be several, and each VPX cabinet containing the synchronization master board card 302 is connected to several VPX cabinets containing the synchronization slave board card 303.

[0047] Referring to Figure 2 In the high-speed signal acquisition board 403, the first data acquisition module is used to acquire raw data uploaded by a plurality of sensors 500, the raw data storage module locally stores the raw data, and the data preprocessing module processes the locally stored raw data to improve the diagnosis efficiency. When there is abnormal data in the data processing process, the abnormal data recovery module can recover the detected abnormal data locally and provide reliable data information for the diagnosis system when triggering the diagnosis process subsequently.

[0048] Referring to Figure 3 In the multi-core motion control board 301, the second data acquisition module is used to acquire raw data transmitted by each board card, the raw data shared storage space locally stores the raw data, the performance analysis module processes the locally stored raw data, and triggers different diagnosis processes according to the processing result, thereby improving the data diagnosis efficiency. When there is abnormal data in the raw data, the abnormal data error reporting module can trigger diagnosis requests of different levels. The memory is used to store the raw data, performance analysis data and data after abnormal error reporting.

[0049] Referring to Figures 1 to 4All sensors 500 within the sensor layer upload the raw data collected during each sampling cycle to the high-speed signal acquisition board 403. The high-speed signal acquisition board 403 stores and pre-processes the raw data. If abnormal data exists in the raw data, the high-speed signal acquisition board 403 can recover the abnormal data through the abnormal data recovery module. Subsequently, the high-speed signal acquisition board 403 uploads the raw data and the data after abnormality recovery to the data interface board 401 via optical fiber. The data interface board 401 transmits the raw data and the data after abnormality recovery to the multi-core motion control board 301 via the SRIO switch card 304. Next, the multi-core motion control board 301 stores the received raw data and performs performance analysis on it. When errors or abnormal data are found in the raw data or performance analysis data stored in the multi-core motion control board 301, the multi-core motion control board 301 generates different data diagnostic requests, including hard real-time data diagnostic requests and soft real-time data diagnostic requests. It should be noted that the received raw data stored by the multi-core motion control board 301 includes not only the data uploaded by the high-speed signal acquisition board 403, but also the data transmitted by other boards in the control layer and the signal flow layer.

[0050] Figure 5 A schematic diagram of the architecture of the lithography machine data acquisition and diagnosis system provided in this embodiment when performing hard real-time data acquisition; Figure 6 Flowchart of hard real-time data acquisition for the lithography machine data acquisition and diagnosis method provided in this embodiment. Figure 5 and Figure 6 This embodiment provides a method for collecting and diagnosing data of a lithography machine, which uses the lithography machine data collection and diagnosis system to perform hard real-time data collection and diagnosis, including:

[0051] First, the entire machine is initialized, and the diagnostic controller 200 configures the synchronous mainboard card 302. During the scanning process of the lithography machine, the multi-core motion control board 301 generates a hard real-time data diagnostic request.

[0052] Next, the hard real-time data diagnosis request is uploaded to the synchronous slave card 303 via the internal synchronous bus, and then uploaded to the synchronous master card 302 via the external synchronous bus.

[0053] Subsequently, the synchronous master card 302 receives the hard real-time data diagnosis request and performs arbitration, generates a hard real-time diagnosis command, and broadcasts the hard real-time diagnosis command to the synchronous slave card 303 via the external synchronous bus.

[0054] Then, the synchronization slave board 303 broadcasts the hard real-time diagnosis command to the multi-core motion control board 301, the data interface board 401, the sensor signal board 402, etc. through the internal synchronization bus. The multi-core motion control board 301, the data interface board 401, the sensor signal board 402, etc. upload the locally stored hard real-time diagnosis data to the synchronization slave board 303 through the internal synchronization bus, and then to the synchronization master board 302 through the external synchronization bus, and then to the diagnosis controller 200, a switch (not shown in the figure) and finally to the host computer (not shown in the figure) through the command bus in turn.

[0055] Optionally, the hard real-time diagnosis data includes bottom hardware data and whole machine synchronization data of the lithography machine.

[0056] Figure 7 FIG. 1 is a schematic diagram of the architecture of the lithography machine data acquisition and diagnosis system provided in the embodiment for soft real-time data acquisition, Figure 8 FIG. 2 is a flowchart of the lithography machine data acquisition and diagnosis method provided in the embodiment for soft real-time data acquisition. Referring to Figure 7 and Figure 8 The embodiment further provides a lithography machine data acquisition and diagnosis method, which adopts the lithography machine data acquisition and diagnosis system for soft real-time data acquisition and diagnosis, and includes the following steps:

[0057] First, during the scanning process of the lithography machine, the multi-core motion control board 301 generates a soft real-time data diagnosis request.

[0058] Then, the soft real-time data diagnosis request is uploaded to the diagnosis controller 200 through the command bus in the VPX case, and then to the host computer 101 through the command bus outside the VPX case.

[0059] The host computer 101 receives the soft real-time data diagnosis request and performs arbitration, generates a soft real-time diagnosis command and issues it to the diagnosis controller 200, and the diagnosis controller 200 broadcasts the soft real-time diagnosis command to the multi-core motion control board 301, the data interface board 401 and the sensor signal board 402, etc. through the command bus.

[0060] Subsequently, the multi-core motion control board 301, the data interface board 401 and the sensor signal board 402, etc. upload the locally stored soft real-time diagnosis data to the diagnosis controller 200 through the SRIO exchange board 304, and then to the host computer 101 through the command bus.

[0061] Optionally, the soft real-time diagnosis data includes process data, performance analysis data and abnormal diagnosis data in the scanning process.

[0062] In this embodiment, the high-speed signal acquisition board and the multi-core motion control board have the functions of local storage and data processing, which reduces the data storage and processing pressure of the diagnostic controller and the host computer, reduces the bandwidth occupied during data transmission, and improves the sampling data processing capability and real-time performance of the lithography machine system; the multi-core motion control board will generate different data diagnostic requests when there are errors or abnormal data in the original data or performance analysis data, thereby improving the efficiency of troubleshooting the performance and reliability problems of the lithography machine and optimizing the design feedback of the lithography machine.

[0063] In summary, the present invention provides a data acquisition and diagnosis system and method for a lithography machine, the data acquisition and diagnosis system for the lithography machine comprising a host computer, a switch, a diagnostic controller, and a multi-core motion control board and a data interface board mounted on a command bus; the host computer, the switch, and the diagnostic controller are connected in sequence via a command bus, and the data interface board is connected to a number of high-speed signal acquisition boards via optical fibers; wherein the high-speed signal acquisition board has data storage, data analysis, and abnormal data recovery functions, and the multi-core motion control board has data storage, performance analysis, and abnormal data error reporting functions. The high-speed signal acquisition board and the multi-core motion control board described in the present invention reduce the data storage and processing pressure of the diagnostic controller and the host computer, reduce the bandwidth occupied during data transmission, and improve the sampling data processing capability and real-time performance of the lithography machine system; when there are errors or abnormal data in the original data or performance analysis data, the multi-core motion control board will generate different data diagnostic requests, thereby improving the efficiency of troubleshooting lithography machine performance and reliability issues and optimizing the design feedback of the lithography machine.

[0064] The above description is merely a preferred embodiment of the present invention and does not limit the present invention in any way. Any person skilled in the art who, without departing from the scope of the present invention, makes any equivalent substitution, modification, or other changes to the technical solution and technical content disclosed in the present invention shall be deemed to be within the scope of the present invention and still fall within the scope of protection of the present invention.

Claims

1. A lithography machine data acquisition and diagnosis system, characterized in that: The system comprises a host computer, a switch, a diagnostic controller, and a multi-core motion control board and a data interface board connected to a command bus; wherein the host computer, the switch, and the diagnostic controller are sequentially connected via the command bus, and the data interface board is connected to several high-speed signal acquisition boards via optical fibers; The high-speed signal acquisition board includes a first data acquisition module, a raw data storage module, a data preprocessing module and an abnormal data recovery module, which are used to store the raw data collected by the sensor and the data after abnormal recovery, and perform data analysis and abnormal data recovery; The multi-core motion control board includes a second data acquisition module, a raw data shared storage space, a performance analysis module, an abnormal data error reporting module and a memory, which are used to store the raw data and performance analysis data uploaded by the high-speed signal acquisition board, and perform performance analysis and abnormal data error reporting; When there are errors or abnormal data in the original data or performance analysis data stored in the multi-core motion control board, the multi-core motion control board will generate different data diagnosis requests, including hard real-time data diagnosis requests and soft real-time data diagnosis requests; Hard real-time diagnostic data includes the underlying hardware data of the lithography machine and the synchronization data of the entire machine; Soft real-time diagnostic data includes process data of the scanning process, performance analysis data and abnormal diagnosis data.

2. The lithography machine data acquisition and diagnosis system according to claim 1, characterized in that: The multi-core motion control board and the data interface board are also connected to the data bus and the internal synchronization bus.

3. The lithography machine data acquisition and diagnosis system according to claim 2, characterized in that: It also includes a synchronous main board card, a synchronous slave board card, an SRIO switch board and a sensor signal board mounted on the command bus, the data bus and the internal synchronous bus; wherein the synchronous main board card and the synchronous slave board card are connected via an external synchronous bus, and the data interface board, the sensor signal board, the diagnostic controller and the multi-core motion control board exchange data via the SRIO switch board.

4. The lithography machine data acquisition and diagnosis system according to claim 3, wherein: The high-speed signal acquisition board is connected to a plurality of the sensors via a level bus / differential bus.

5. The lithography machine data acquisition and diagnosis system according to claim 3, characterized in that: The system comprises at least two VPX chassis, each of which comprises the diagnostic controller, the multi-core motion control board, the data interface board, the SRIO switch board and the sensor signal board. The VPX chassis further comprises the synchronization main board card or the synchronization slave board card, and any VPX chassis comprising the synchronization main board card is connected to several VPX chassis comprising the synchronization slave boards.

6. A method for data acquisition and diagnosis of a lithography machine, using the lithography machine data acquisition and diagnosis system according to claim 1 to perform hard real-time data acquisition and diagnosis, characterized in that: include: Multi-core motion control boards generate hard real-time data diagnostic requests; The hard real-time data diagnosis request is uploaded to the synchronous slave card via the internal synchronous bus, and then uploaded to the synchronous master card via the external synchronous bus; The synchronous master card receives the hard real-time data diagnosis request and performs arbitration, generates a hard real-time diagnosis command and sends it to the synchronous slave card; The synchronous slave board transmits the hard real-time diagnostic command to the multi-core motion control board, the data interface board and the sensor signal board through an internal synchronous bus; The multi-core motion control board, the data interface board and the sensor signal board upload the stored hard real-time diagnostic data to the diagnostic controller in sequence through the synchronous slave board and the synchronous main board, and upload it to the host computer through the command bus.

7. A method for data acquisition and diagnosis of a lithography machine, using the lithography machine data acquisition and diagnosis system according to claim 1 to perform soft real-time data acquisition and diagnosis, characterized in that: include: The multi-core motion control board generates soft real-time data diagnostic requests; The soft real-time data diagnosis request is uploaded to the diagnosis controller via the command bus, and then uploaded to the host computer via the command bus; The host computer receives the soft real-time data diagnosis request and performs arbitration, generates a soft real-time diagnosis command and sends it to the diagnosis controller, and the diagnosis controller transmits the soft real-time diagnosis command to the multi-core motion control board, the data interface board, and the sensor signal board through the command bus; The multi-core motion control board, the data interface board and the sensor signal board upload the stored soft real-time diagnostic data to the diagnostic controller via the SRIO switch board, and upload it to the host computer via the command bus.

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