A high-precision XY hollow platform structure

Abstract

The present invention relates to the field of motion control technology, specifically disclosing a high-precision X-Y hollow platform structure, comprising an intermediate plate, an X-direction hollow platform assembly, and a Y-direction hollow platform assembly. The intermediate plate is provided with a first rail groove and a second rail groove, wherein the first rail groove is provided with an X-guide rail, and the second rail groove is provided with a Y-guide rail. The X-direction hollow platform assembly comprises a first panel, which is connected to the intermediate plate via the X-guide rail, and an X-direction direct drive motor is provided on the upper surface of the first panel. The X-direction direct drive motor power line and an X-direction encoder are provided on the same side of the first panel parallel to the X-guide rail. The Y-direction hollow platform assembly comprises a second panel, which is connected to the intermediate plate via the Y-guide rail, and a Y-direction direct drive motor is provided on the lower surface of the second panel. The Y-direction direct drive motor power line and a Y-direction encoder are provided on the same side of the second panel parallel to the Y-guide rail. The present invention has the advantages of simple structure, small size, easy installation and use, and high precision.

Description

Technical Field

[0001] The present invention relates to the field of motion control technology, and in particular to a high-precision XY hollow platform structure. Background Art

[0002] Current high-precision XY hollow platforms primarily utilize direct-drive motors, high-precision guide rails, and encoder feedback to achieve high-precision linear motion in the X and Y directions. Due to the high precision requirements, stringent requirements are placed on the structural and circuit layout, as well as the adjustability of the encoder after assembly. High-precision XY hollow platforms also have stringent requirements for size in the X and Y directions; they cannot be too large, and they must have hollow through-holes within the high-precision XY hollow platform for ease of use. Currently, most direct-drive XY hollow platforms install the direct-drive motor, guide rails, and encoder on the same plane. Movement in the X and Y directions requires both the power lines and encoder lines to be activated, increasing the complexity of the structure. Placing the direct-drive motor and encoder between the guide rails increases the difficulty of their installation and makes adjustment difficult after installation. Placing the direct-drive motor and encoder on the side of the guide rails creates wiring difficulties and increases the complexity of the structure. Summary of the Invention

[0003] The technical problem to be solved by the present invention is: how to solve the defects of the prior art such as complex structure, large volume and high installation difficulty.

[0004] In order to solve the above technical problems, the present invention provides a high-precision XY hollow platform structure, comprising:

[0005] An intermediate plate, wherein the upper and lower surfaces of the intermediate plate are respectively provided with a first rail groove extending along the X direction and a second rail groove extending along the Y direction, an X-direction guide rail is provided in the first rail groove, and a Y-direction guide rail is provided in the second rail groove;

[0006] An X-direction hollow platform assembly, the X-direction hollow platform assembly comprising a first panel, the first panel being connected to the middle panel via the X-direction guide rail, an X-direction direct drive motor being provided on the upper surface of the first panel, and an X-direction direct drive motor power line and an X-direction encoder being provided on the same side of the first panel parallel to the X-direction guide rail; and

[0007] The Y-direction hollow platform assembly includes a second panel, the second panel is connected to the middle panel through the Y-direction guide rail, the lower surface of the second panel is provided with a Y-direction direct drive motor, and the second panel is provided with a Y-direction direct drive motor power line and a Y-direction encoder on the same side end parallel to the Y-direction guide rail.

[0008] Further preferably, the X-axis hollow platform assembly also includes a first U-shaped plate, which is arranged at one side end of the first panel parallel to the X-axis guide rail, and a first mounting groove is formed between the first U-shaped plate and the first panel, and the X-axis direct drive motor power line and the X-axis encoder are both placed in the first mounting groove.

[0009] Further preferably, the first U-shaped plate and the X-direction encoder are respectively connected to the upper surface of the intermediate plate, the X-direction direct drive motor power line is connected to the X-direction direct drive motor, and the X-direction encoder is used to feedback the horizontal movement of the first panel along the X-direction.

[0010] Further preferably, the side end of the intermediate plate is provided with a first wire outlet communicating with the first mounting groove, the opening direction of the first wire outlet is perpendicular to the X-direction guide rail, and the power line of the X-direction direct drive motor and the power line of the X-direction encoder are both led out from the first wire outlet.

[0011] Further preferably, a first cover plate is detachably mounted on the upper surface of the first panel, and a first avoidance groove is provided on the lower surface of the first cover plate. When the first cover plate is connected to the first panel, the X-direction direct drive motor is embedded in the first avoidance groove.

[0012] Further preferably, the Y-axis hollow platform assembly also includes a second U-shaped plate, which is arranged at one side end of the second panel parallel to the Y-direction guide rail, and a second mounting groove is formed between the second U-shaped plate and the second panel, and the Y-axis direct drive motor power line and the Y-axis encoder are both placed in the second mounting groove.

[0013] Further preferably, the second U-shaped plate and the Y-direction encoder are respectively connected to the lower surface of the intermediate plate, the Y-direction direct drive motor power line is connected to the Y-direction direct drive motor, and the Y-direction encoder is used to feedback the horizontal movement amount of the second panel along the Y direction.

[0014] Further preferably, the side end of the intermediate plate is provided with a second wire outlet communicating with the second mounting groove, the opening direction of the second wire outlet is parallel to the Y guide rail, and the power line of the Y-direction direct drive motor and the power line of the Y-direction encoder are both led out from the second wire outlet.

[0015] Further preferably, a second cover plate is detachably mounted on the lower surface of the second panel, and a second avoidance groove is provided on the lower surface of the second cover plate. When the second cover plate is connected to the second panel, the Y-direction direct drive motor is embedded in the second avoidance groove.

[0016] Further preferably, the number of the X-guide rails and the Y-guide rails is at least two groups.

[0017] Compared with the prior art, the high-precision XY hollow platform structure provided by the present invention has the following advantages:

[0018] The present invention arranges the X-direction direct-drive motor power line and the X-direction encoder on the same side of the X-guide rail, and the X-direction direct-drive motor is stacked on the top of the X-guide rail through a first panel, and arranges the Y-direction direct-drive motor power line and the Y-direction encoder on the same side of the Y-guide rail, and the Y-direction direct-drive motor is stacked under the Y-guide rail through a second panel. In this way, the size of the structure in the X and Y directions can be reduced, thereby achieving the purpose of saving space, and freeing up a position for opening a through hollow hole in the high-precision XY hollow platform structure, which is convenient for use during work. In addition, the complexity of the structure can be reduced, the manufacturing cost and labor cost can be reduced, and the installation accuracy of the X-guide rail and the Y-guide rail will not be affected during maintenance. In summary, the present invention has the advantages of simple structure, small size, easy installation and use, and high precision. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of a high-precision XY hollow platform structure described in the present invention.

[0020] Figure 2 This is an exploded view of a high-precision XY hollow platform structure described in the present invention.

[0021] Figure 3 It is a structural schematic diagram of the X-direction hollow platform assembly of the present invention.

[0022] Figure 4 It is a schematic structural diagram of the Y-direction hollow platform assembly of the present invention.

[0023] In the figure, 1, X-axis hollow platform assembly; 11, first panel; 12, first U-shaped plate; 13, first cover plate; 14, X-axis direct drive motor; 15, first mounting slot; 16, X-axis direct drive motor power line; 17, X-axis encoder;

[0024] 2. Y-axis hollow platform assembly; 21. Second panel; 22. Second U-shaped plate; 23. Second cover plate; 24. Y-axis direct-drive motor; 25. Second mounting slot; 26. Y-axis direct-drive motor power cable; 27. Y-axis encoder;

[0025] 3. Middle plate; 31. First rail groove; 32. X-guide rail; 33. First wire outlet; 34. Second rail groove; 35. Y-guide rail; 36. Second wire outlet. DETAILED DESCRIPTION

[0026] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention but are not intended to limit the scope of the present invention.

[0027] In the description of the present invention, it should be understood that the terms "upper", "lower", "inside", "outside", "between", "parallel", "vertical", "same side", "other side", etc. used in the present invention to indicate the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0028] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be interpreted broadly, meaning, for example, fixed, removable, or integral; mechanical or electrical; direct or indirect through an intermediary; and internal communication between two components. Those skilled in the art will understand the specific meanings of these terms in the present invention based on the specific circumstances.

[0029] like Figure 1-2 As shown, the present invention provides a high-precision XY hollow platform structure, which includes an X-direction hollow platform component 1, a Y-direction hollow platform component 2 and an intermediate plate 3, wherein the intermediate plate 3 is arranged between the X-direction hollow platform component 1 and the Y-direction hollow platform component 2; specifically, the X-direction hollow platform component 1 is placed at the upper end of the intermediate plate 3, and the Y-direction hollow platform component 2 is placed at the lower end of the intermediate plate 3.

[0030] It should be noted that for the convenience of description and understanding, the X and Y directions are further explained. Figure 1 The direction perpendicular to the left side of the high-precision XY hollow platform structure is defined as the Y direction, and the direction perpendicular to the right side of the high-precision XY hollow platform structure is defined as the X direction.

[0031] In some examples of the present invention, Figure 1-4As shown, the upper surface of the middle plate 3 is provided with a first rail groove 31 extending along the X direction, and the first rail groove 31 is provided with an X guide rail 32. The X-direction hollow platform assembly 1 includes a first panel 11, and the first panel 11 is connected to the middle plate 3 through the X guide rail 32. The upper surface of the first panel 11 is provided with an X-direction direct drive motor 14, and the X-direction direct drive motor 14 is used to drive the first panel 11 to move along the direction of the X guide rail 32. An X-direction direct drive motor power line 16 and an X-direction encoder 17 are provided on the same side end of the first panel 11 parallel to the X guide rail 32, that is, the X-direction direct drive motor power line 16 and the X-direction encoder 17 are arranged on the same side of the X guide rail 32, and the X-direction direct drive motor 14 is stacked on the X guide rail 32 through the first panel 11. This can reduce the size of the structure in the X direction, thereby achieving the purpose of saving space, and freeing up a position for opening a through hollow hole for the high-precision XY hollow platform structure, which is convenient for use during work.

[0032] It should be noted that in order to reduce the complexity of the high-precision XY hollow platform structure, in this embodiment, the structure of the Y-direction hollow platform component 2 is similar to that of the X-direction hollow platform component 1, and the only difference is the installation position and direction. The X-direction hollow platform component 1 is mirror-symmetrical about the middle plate 3 and then rotated 90° to obtain the Y-direction hollow platform component 2, thereby reducing the complexity of the structure and reducing manufacturing costs.

[0033] Specifically, if Figure 1-4 As shown, the lower surface of the middle plate 3 is provided with a second rail groove 34 extending along the Y direction, and a Y guide rail 35 is provided in the second rail groove 34. The Y-direction hollow platform assembly 2 includes a second panel 21, and the second panel 21 is connected to the middle plate 3 through the Y guide rail 35. The lower surface of the second panel 21 is provided with a Y-direction direct drive motor 24, and the second panel 21 is parallel to the same side end of the Y guide rail 35 and is provided with a Y-direction direct drive motor power line 26 and a Y-direction encoder 27; that is, the Y-direction direct drive motor power line 26 and the Y-direction encoder 27 are arranged on the same side of the Y guide rail 35, and the Y-direction direct drive motor 24 is stacked under the Y guide rail 35 (relative to the position of the X-direction direct drive motor) through the second panel 21. In this way, the size of the structure in the Y direction can be reduced, thereby achieving the purpose of saving space, and freeing up a position for opening a through hollow hole for the high-precision XY hollow platform structure, which is convenient for use during work.

[0034] In some examples of the present invention, please refer to Figure 3The X-axis hollow platform assembly 1 also includes a first U-shaped plate 12, which is arranged at one side end of the first panel 11 parallel to the X-axis guide rail 32. It should be noted that the thickness of the first U-shaped plate 12 is greater than the thickness of the first panel 11, so that a step difference is formed at the junction of the first U-shaped plate 12 and the first panel 11, so as to reserve space for the installation of the X-axis direct drive motor 14, thereby achieving the purpose of saving space and reducing the volume of the high-precision XY hollow platform structure.

[0035] In addition, a first mounting groove 15 is formed between the first U-shaped plate 12 and the first panel 11, and the X-direction direct drive motor power line 16 and the X-direction encoder 17 are both placed in the first mounting groove 15. The setting of the first mounting groove 15 is conducive to setting the X-direction direct drive motor power line 16 and the X-direction encoder 17 on the same side of the X-direction guide rail 32, and the X-direction direct drive motor 14 is stacked on the X-direction guide rail 32 through the first panel 11, which can reduce the size of the structure in the X direction, thereby achieving the purpose of saving space.

[0036] Specifically, the first U-shaped plate 12 and the X-direction encoder 17 are respectively connected to the upper surface of the middle plate 3, the X-direction direct drive motor power line 16 is connected to the X-direction direct drive motor 14, and the X-direction encoder 17 is used to feedback the horizontal movement of the first panel 11 along the X-direction.

[0037] In other examples of the present invention, a first cover plate 13 is detachably installed on the upper surface of the first panel 11, and the detachable connection can be a snap-fit ​​connection, a bolt connection, etc. Since the total thickness of the X-direction direct-drive motor 14 and the first panel 11 is greater than the thickness of the first U-shaped plate 12, in order to reduce the volume of the structure, it is necessary to provide a first avoidance groove on the lower surface of the first cover plate 13. When the first cover plate 13 is connected to the first panel 11, the X-direction direct-drive motor 14 is embedded in the first avoidance groove; and since there is a height difference at the junction of the first panel 11 and the first U-shaped plate 12, the first cover plate 13 corresponding to the junction of the first panel 11 and the first U-shaped plate 12 should be set to a stepped structure to facilitate precise fitting and installation to reduce the volume.

[0038] In addition, by providing the first cover plate 13, the X-direction direct drive motor 14, the X-direction direct drive motor power line 16 and the X-direction encoder 17 can also be protected. After the entire machine is installed, the X-direction direct drive motor 14, the X-direction direct drive motor power line 16 and the X-direction encoder 17 can be adjusted, replaced or repaired only by removing the first cover plate 13. Moreover, due to the position arrangement of the X-direction direct drive motor 14, the X-direction direct drive motor power line 16 and the X-direction encoder 17, the installation accuracy of the X-direction guide rail 32 will not be affected during the adjustment, replacement or repair process, thereby ensuring the high precision requirements of the entire equipment, avoiding re-debugging, and saving labor costs.

[0039] In some examples of the present invention, please refer to Figure 4 The Y-axis hollow platform assembly 2 also includes a second U-shaped plate 22, which is arranged at one side end of the second panel 21 parallel to the Y guide rail 35. It should be noted that the thickness of the second U-shaped plate 22 is greater than the thickness of the second panel 21, so that a step difference is formed at the junction of the second U-shaped plate 22 and the second panel 21, so as to reserve space for the installation of the Y-axis direct drive motor 24, thereby achieving the purpose of saving space and reducing the volume of the high-precision XY hollow platform structure.

[0040] In addition, a second mounting groove 25 is formed between the second U-shaped plate 22 and the second panel 21, and the Y-direction direct drive motor power line 26 and the Y-direction encoder 27 are both placed in the second mounting groove 25. The setting of the second mounting groove 25 is conducive to setting the Y-direction direct drive motor power line 26 and the Y-direction encoder 27 on the same side of the Y-direction guide rail 35, and the Y-direction direct drive motor 24 is stacked under the Y-direction guide rail 35 through the second panel 21, which can reduce the size of the structure in the Y direction, thereby achieving the purpose of saving space.

[0041] Specifically, the second U-shaped plate 22 and the Y-direction encoder 27 are respectively connected to the lower surface of the middle plate 3, the Y-direction direct drive motor power line 26 is connected to the Y-direction direct drive motor 24, and the Y-direction encoder 27 is used to feedback the horizontal movement amount of the second panel 21 along the Y direction.

[0042] In other examples of the present invention, a second cover plate 23 is detachably installed on the lower surface of the second panel 21. The detachable connection can be a snap-fit ​​connection, a bolt connection, etc. Since the total thickness of the Y-direction direct-drive motor 24 and the second panel 21 is greater than the thickness of the second U-shaped plate 22, in order to reduce the volume of the structure, a second avoidance groove is required on the lower surface of the second cover plate 23. When the second cover plate 23 is connected to the second panel 21, the Y-direction direct-drive motor 24 is embedded in the second avoidance groove; and since there is a height difference at the junction of the second panel 21 and the second U-shaped plate 22, the second cover plate 23 corresponding to the junction of the second panel 21 and the second U-shaped plate 22 should be set to a stepped structure to facilitate precise fitting and installation to reduce the volume.

[0043] In addition, by setting the second cover 23, the Y-direction direct drive motor 24, the Y-direction direct drive motor power line 26 and the Y-direction encoder 27 can also be protected. After the entire machine is installed, the Y-direction direct drive motor 24, the Y-direction direct drive motor power line 26 and the Y-direction encoder 27 can be adjusted, replaced or repaired only by removing the second cover 23. Moreover, due to the position arrangement of the Y-direction direct drive motor 24, the Y-direction direct drive motor power line 26 and the Y-direction encoder 27, the installation accuracy of the X-direction guide rail 32 will not be affected during the adjustment, replacement or repair process, thereby ensuring the overall high precision requirements of the equipment, avoiding re-debugging, and saving labor costs.

[0044] In other examples of the present invention, a first wire outlet 33 is provided at the side end of the intermediate plate 3, which is communicated with the first mounting groove 15. The opening direction of the first wire outlet 33 is perpendicular to the X-guide rail 32, and the power lines of the X-direction direct-drive motor power line 16 and the X-direction encoder 17 are both led out from the first wire outlet 33; similarly, a second wire outlet 36 is provided at the side end of the intermediate plate 3, which is communicated with the second mounting groove 25. The opening direction of the second wire outlet 36 is parallel to the Y-guide rail 35, and the power lines of the Y-direction direct-drive motor power line 26 and the Y-direction encoder 27 are both led out from the second wire outlet 36; it should be noted that the first wire outlet 33 and the second wire outlet 36 should be arranged on the same side of the intermediate plate 3 to facilitate wiring, reduce the complexity of the structure and the volume occupied. When the Y direction moves, the encoder power line and the direct-drive motor power line do not move, and only move together when the X direction moves, so the structure is simple and more stable.

[0045] In other examples of the present invention, the number of X-direction guide rails 32 and Y-direction guide rails 35 is at least two groups, which can improve the stability of the X-direction hollow platform assembly 1 and the Y-direction hollow platform assembly 2 during operation, so as to increase the accuracy of the horizontal movement of the X-direction hollow platform assembly 1 along the X-direction, and the accuracy of the horizontal movement of the Y-direction hollow platform assembly 2 along the Y-direction.

[0046] The working process of the present invention is as follows: when the high-precision XY hollow platform structure is in use, the X-direction direct-drive motor 14 can drive the first panel 11 to move along the X-direction guide rail 32, and the X-direction encoder 17 is used to feedback the horizontal movement of the first panel 11 along the X-direction; similarly, the Y-direction direct-drive motor 24 can drive the second panel 21 to move along the Y-direction guide rail 35, and the Y-direction encoder 27 is used to feedback the horizontal movement of the second panel 21 along the Y-direction. When adjustment or maintenance is required, only the first cover plate 13 or the second cover plate 23 needs to be removed, which will not affect the accuracy of the entire machine.

[0047] In summary, the present invention provides a high-precision XY hollow platform structure, which can reduce the size of the structure in the X and Y directions, thereby achieving the purpose of saving space, and freeing up a position for opening a through hollow hole in the high-precision XY hollow platform structure, which is convenient for use during work. In addition, it can also reduce the complexity of the structure, reduce manufacturing costs and labor costs, and does not affect the installation accuracy of the X guide rail and the Y guide rail during maintenance; the present invention has the advantages of simple structure, small size, easy installation and use, and high precision.

[0048] The above description is only a preferred embodiment of the present invention. It should be noted that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be considered as the scope of protection of the present invention. The basic principles, main features and advantages of the present invention are shown and described above. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above preferred embodiments. The examples should be regarded as illustrative and non-restrictive. The scope of the present invention is defined by the appended claims rather than the above description. Therefore, it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present invention.

[0049] In addition, it should be understood that although this specification is described in terms of implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in the embodiments can also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

Claims

1. A high-precision XY hollow platform structure, characterized in that: include: An intermediate plate, wherein the upper and lower surfaces of the intermediate plate are respectively provided with a first rail groove extending along the X direction and a second rail groove extending along the Y direction, an X-direction guide rail is provided in the first rail groove, and a Y-direction guide rail is provided in the second rail groove; An X-direction hollow platform assembly, the X-direction hollow platform assembly comprising a first panel, the first panel being connected to the middle panel via the X-direction guide rail, an X-direction direct drive motor being provided on the upper surface of the first panel, and an X-direction direct drive motor power line and an X-direction encoder being provided on the same side of the first panel parallel to the X-direction guide rail; as well as The Y-direction hollow platform assembly includes a second panel, the second panel is connected to the middle panel through the Y-direction guide rail, the lower surface of the second panel is provided with a Y-direction direct drive motor, and the second panel is provided with a Y-direction direct drive motor power line and a Y-direction encoder on the same side end parallel to the Y-direction guide rail.

2. A high-precision XY hollow platform structure according to claim 1, characterized in that: The X-direction hollow platform assembly also includes a first U-shaped plate, which is arranged at one side end of the first panel parallel to the X-direction guide rail, and a first mounting groove is formed between the first U-shaped plate and the first panel, and the X-direction direct drive motor power line and the X-direction encoder are both placed in the first mounting groove.

3. A high-precision XY hollow platform structure according to claim 2, characterized in that: The first U-shaped plate and the X-direction encoder are respectively connected to the upper surface of the middle plate, the X-direction direct drive motor power line is connected to the X-direction direct drive motor, and the X-direction encoder is used to feedback the horizontal movement of the first panel along the X-direction.

4. The high-precision XY hollow platform structure according to claim 2, characterized in that: A first wire outlet is provided at the side end of the middle plate and is communicated with the first mounting groove. The opening direction of the first wire outlet is perpendicular to the X-direction guide rail. The power line of the X-direction direct drive motor and the power line of the X-direction encoder are both led out from the first wire outlet.

5. The high-precision XY hollow platform structure according to claim 1, characterized in that: A first cover plate is detachably mounted on the upper surface of the first panel, and a first avoidance groove is provided on the lower surface of the first cover plate. When the first cover plate is connected to the first panel, the X-direction direct drive motor is embedded in the first avoidance groove.

6. The high-precision XY hollow platform structure according to claim 1, characterized in that: The Y-axis hollow platform assembly also includes a second U-shaped plate, which is arranged at one side end of the second panel parallel to the Y-direction guide rail, and a second mounting groove is formed between the second U-shaped plate and the second panel, and the Y-axis direct drive motor power line and the Y-axis encoder are both placed in the second mounting groove.

7. The high-precision XY hollow platform structure according to claim 6, characterized in that: The second U-shaped plate and the Y-direction encoder are respectively connected to the lower surface of the middle plate, the Y-direction direct drive motor power line is connected to the Y-direction direct drive motor, and the Y-direction encoder is used to feedback the horizontal movement of the second panel along the Y direction.

8. The high-precision XY hollow platform structure according to claim 6, characterized in that: A second wire outlet is provided at the side end of the middle plate and communicates with the second mounting groove. The opening direction of the second wire outlet is parallel to the Y guide rail. The power line of the Y-direction direct drive motor and the power line of the Y-direction encoder are both led out from the second wire outlet.

9. The high-precision XY hollow platform structure according to claim 1, characterized in that: A second cover plate is detachably mounted on the lower surface of the second panel. A second avoidance groove is provided on the lower surface of the second cover plate. When the second cover plate is connected to the second panel, the Y-direction direct drive motor is embedded in the second avoidance groove.

10. The high-precision XY hollow platform structure according to claim 1, characterized in that: The number of the X-guide rails and the number of the Y-guide rails are at least two.

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