A method, system and device for controlling micro-pressure difference in the area of ​​a substrate glass annealing furnace

Abstract

The present invention discloses a micro-pressure difference control method, system and device for a substrate glass annealing furnace area, belonging to the technical field of micro-pressure difference control of air-conditioning system areas. The method comprises the following steps: obtaining a pressure difference parameter of a pressure difference control unit of a platinum channel area to an annealing furnace area and a wind speed parameter of a wind speed control unit, adjusting the pressure difference to a set pressure difference range, and adjusting the wind speed to a set wind speed range; S2: obtaining a pressure difference parameter of a pressure difference control unit of a BOD area to an annealing furnace area and a wind speed parameter of a wind speed control unit, adjusting the pressure difference to a set pressure difference range, and adjusting the wind speed to a set wind speed range; S3: obtaining a pressure difference parameter of a pressure difference control unit of an annealing furnace area to the outside and a pressure difference parameter of an annealing furnace area, when the average value of the pressure difference parameter of the annealing furnace area exceeds the set pressure difference range of the annealing furnace area to the outside, starting an exhaust fan; when the average value of the pressure difference parameter of the annealing furnace area is lower than the set pressure difference range of the annealing furnace area to the outside, turning off the exhaust fan.

Description

Technical Field

[0001] The present invention belongs to the technical field of micro-pressure difference control in air-conditioning system areas, and in particular relates to a method, system and device for micro-pressure difference control in a substrate glass annealing furnace area. Background Art

[0002] Existing annealing furnace air conditioning control systems utilize a traditional fixed-frequency air supply and control cooling via an electric control valve on the chilled water return pipe. This only allows for automatic regulation of the indoor-outdoor pressure differential by the fresh air electric control valve, but fails to meet the process requirements of automatically regulating the pressure differential between the platinum channel and the BOD zone. Exceeding these limits in the pressure differential control area of ​​TFT-LCD glass substrate annealing furnaces can negatively impact the yield rate of the glass substrate forming process, potentially leading to production accidents such as warping, stress defects, and excessive particle size. Using this existing annealing furnace air conditioning control model, the resulting yield rate for the annealing zone glass substrates is only 60%-70%. Summary of the Invention

[0003] In order to overcome the shortcomings of the above-mentioned prior art, the purpose of the present invention is to provide a method, system and device for controlling the micro-pressure difference in the substrate glass annealing furnace area. The method can realize automatic adjustment of the pressure difference between the platinum channel and the annealing furnace area and the pressure difference between the BOD area and the annealing furnace area, thereby improving the yield rate of the substrate glass in the annealing area.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] The present invention provides a method for controlling a micro-pressure difference in a substrate glass annealing furnace area, comprising the following steps:

[0006] S1: Obtain a pressure difference parameter of a pressure difference control unit between the platinum channel area and the annealing furnace area and a wind speed parameter of a wind speed control unit, adjust the pressure difference between the platinum channel area and the annealing furnace area to a set pressure difference range between the platinum channel area and the annealing furnace area through a platinum air conditioner, and adjust the wind speed between the platinum channel area and the annealing furnace area to a set wind speed range between the platinum channel area and the annealing furnace area, with the wind speed flow direction being from the platinum channel area to the annealing furnace area;

[0007] S2: Obtain the pressure difference parameter of the pressure difference control unit between the BOD area and the annealing furnace area and the wind speed parameter of the wind speed control unit, adjust the pressure difference between the BOD area and the annealing furnace area to the set pressure difference range between the BOD area and the annealing furnace area through the BOD area air conditioner, and adjust the wind speed between the BOD area and the annealing furnace area to the set wind speed range between the BOD area and the annealing furnace area, with the wind speed flow direction from the BOD area to the annealing furnace area;

[0008] S3: Obtain the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor areas. When the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor areas exceeds the set pressure difference range of the annealing furnace area to the indoor and outdoor areas, start the exhaust fan; when the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor areas is lower than the set pressure difference range of the annealing furnace area to the indoor and outdoor areas, turn off the exhaust fan.

[0009] The present invention further states that in S1, the process of the platinum air conditioner adjustment is:

[0010] The pressure difference parameters of the pressure difference control unit of the platinum channel area and the wind speed parameters of the wind speed control unit of the annealing furnace area are transmitted to the control unit of the platinum air conditioner. The control unit of the platinum air conditioner processes and outputs the AO control signal of the platinum air conditioner. After receiving the signal, the platinum air conditioner controls the opening of the air valve of the platinum air conditioner and adjusts the frequency of the inverter of the platinum air conditioner.

[0011] The present invention further states that in S2, the process of air conditioning in the BOD area is as follows:

[0012] The BOD area transmits the pressure difference parameters of the pressure difference control unit of the annealing furnace area and the wind speed parameters of the wind speed control unit to the control unit of the BOD area air conditioner. The control unit of the BOD area air conditioner processes and outputs the AO control signal of the BOD area air conditioner. After receiving the signal, the BOD area air conditioner controls the opening of the air valve of the BOD area air conditioner and adjusts the frequency of the inverter of the BOD area air conditioner.

[0013] The present invention further sets a pressure difference range of 0-5 Pa between the platinum channel area and the annealing furnace area; and sets a wind speed range of 0-1 m / s between the platinum channel area and the annealing furnace area.

[0014] The present invention further sets the pressure difference range of the BOD area to the annealing furnace area to be 0-10 Pa; and sets the wind speed range of the BOD area to the annealing furnace area to be 0-1 m / s.

[0015] The present invention further provides that the pressure difference between the indoor and outdoor areas of the annealing furnace is set to range from 0 to 12 Pa.

[0016] The present invention also provides a micro-pressure difference control system for a substrate glass annealing furnace area, comprising:

[0017] The platinum channel area to annealing furnace area regulation module is used to obtain the pressure difference parameters of the pressure difference control unit of the platinum channel area to the annealing furnace area and the wind speed parameters of the wind speed control unit, and then transmit them to the platinum air conditioning control unit. The platinum air conditioning control unit processes and outputs the platinum air conditioning AO control signal. After receiving the signal, the platinum air conditioning controls the opening of the platinum air conditioning air valve and adjusts the frequency of the platinum air conditioning inverter. The pressure difference between the platinum channel area and the annealing furnace area is adjusted to the set pressure difference range of the platinum channel area to the annealing furnace area, and the wind speed between the platinum channel area and the annealing furnace area is adjusted to the set wind speed range of the platinum channel area to the annealing furnace area, and the wind speed flow direction is from the platinum channel area to the annealing furnace area.

[0018] The BOD area to annealing furnace area adjustment module is used to obtain the pressure difference parameters of the pressure difference control unit of the BOD area to the annealing furnace area and the wind speed parameters of the wind speed control unit, and then transmit them to the BOD area air conditioning control unit. The BOD area air conditioning control unit processes and outputs the BOD area air conditioning AO control signal. After receiving the signal, the BOD area air conditioning controls the opening of the BOD area air conditioning air valve and adjusts the frequency of the BOD area air conditioning inverter, adjusts the pressure difference between the BOD area and the annealing furnace area to the set pressure difference range of the BOD area to the annealing furnace area, and adjusts the wind speed between the BOD area and the annealing furnace area to the set wind speed range of the BOD area to the annealing furnace area, and the wind speed flow direction is from the BOD area to the annealing furnace area;

[0019] The annealing furnace area indoor and outdoor adjustment module is used to obtain the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor. When the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor exceeds the set pressure difference range of the annealing furnace area to the indoor and outdoor, the exhaust fan is started; when the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor is lower than the set pressure difference range of the annealing furnace area to the indoor and outdoor, the exhaust fan is turned off.

[0020] The present invention further comprises a pressure difference control unit, wherein the pressure difference control unit comprises a pressure difference control unit between the platinum channel area and the annealing furnace area, and a pressure difference control unit between the BOD area and the annealing furnace area;

[0021] The pressure difference control unit between the platinum channel area and the annealing furnace area is set at the boundary between the platinum channel area and the annealing furnace area; the pressure difference control unit between the BOD area and the annealing furnace area is set at the boundary between the BOD area and the annealing furnace area.

[0022] The present invention further includes a wind speed control unit for the platinum channel area to the annealing furnace area, and a wind speed control unit for the BOD area to the annealing furnace area;

[0023] The wind speed control unit of the platinum channel area to the annealing furnace area is set at the boundary between the platinum channel area and the annealing furnace area; the wind speed control unit of the BOD area to the annealing furnace area is set at the boundary between the BOD area and the annealing furnace area.

[0024] The present invention further includes an exhaust system, which includes an exhaust fan, an exhaust fan controller, and a pressure differential transmitter between the indoor and outdoor areas of the annealing furnace;

[0025] The exhaust fan is connected to the exhaust fan controller, and the exhaust fan is used to exhaust the annealing furnace area; the annealing furnace area indoor and outdoor pressure differential transmitter is connected to the exhaust fan controller; the annealing furnace area indoor and outdoor pressure differential transmitter is used to measure the annealing furnace area indoor and outdoor pressure differential.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] The present invention provides a method for controlling a micro-pressure difference in an annealing furnace area for substrate glass. The method automatically adjusts the pressure difference by controlling the pressure difference parameters between the annealing furnace area in a platinum channel area, between the annealing furnace area in a BOD area, and between the annealing furnace area and indoor and outdoor pressures, and by adjusting the pressure difference and wind speed within a set range, and exhausting air through an exhaust system. This method improves the yield rate of the substrate glass in the annealing area to 70%-80%, and the yield rate of the substrate glass in the annealing area can be increased by approximately 10%. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 This is a diagram of a micro-pressure difference control device for the annealing furnace area of ​​a TFT-LCD substrate glass according to the present invention;

[0029] Figure 2 This is a diagram of the micro-pressure difference control device in the existing annealing furnace area.

[0030] Among them: 1-Platinum channel to annealing furnace area differential pressure transmitter; 2-Platinum channel to annealing furnace area wind speed sensor; 3-BOD area to annealing furnace area differential pressure transmitter; 4-BOD area to annealing furnace area wind speed sensor; 5-First exhaust fan; 6-First exhaust fan controller; 7-Second exhaust fan; 8-Second exhaust fan controller; 9-Annealing furnace area to indoor and outdoor differential pressure transmitter; 10-Supply air duct pressure measuring device; 11-Supply air duct pressure measuring controller; 12-Return air duct air volume measuring device; 13-Supply air duct air volume measuring device; 14-Return air duct temperature measuring device; 15-Annealing furnace air conditioner; 16-Return air duct temperature measuring controller. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0032] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0033] The present invention discloses a method for controlling micro-pressure difference in a substrate glass annealing furnace area, and the specific steps are as follows:

[0034] S1: Obtain the pressure difference parameters and wind speed parameters of the platinum channel area to the annealing furnace area through the pressure difference control unit and wind speed control unit of the platinum channel area to the annealing furnace area, that is, obtain the pressure difference parameters and wind speed parameters through the platinum channel to the annealing furnace area pressure difference transmitter 1 and the platinum channel to the annealing furnace area wind speed sensor 2;

[0035] S2: The obtained pressure difference parameters and wind speed parameters between the platinum channel area and the annealing furnace area are transmitted to the platinum air conditioning control unit. The platinum air conditioning control unit processes and outputs a platinum air conditioning AO control signal. After receiving the signal, the platinum air conditioning controls the opening of the platinum air conditioning air valve and adjusts the frequency of the platinum air conditioning inverter. The pressure difference between the platinum channel area and the annealing furnace area is adjusted to a set pressure difference range of 0-5Pa between the platinum channel area and the annealing furnace area. The wind speed between the platinum channel area and the annealing furnace area is adjusted to a set wind speed range of 0-1m / s between the platinum channel area and the annealing furnace area. The wind speed flow direction is positive, that is, the wind speed flow direction is from the platinum channel area to the annealing furnace area.

[0036] S3: obtaining the pressure difference parameters of the pressure difference control unit between the BOD area and the annealing furnace area and the wind speed parameters of the wind speed control unit through the pressure difference control unit between the BOD area and the annealing furnace area, that is, obtaining the pressure difference parameters of the pressure difference control unit between the BOD area and the annealing furnace area and the wind speed parameters of the wind speed control unit through the pressure difference transmitter 3 between the BOD area and the annealing furnace area and the wind speed sensor 4 between the BOD area and the annealing furnace area;

[0037] S4: The pressure difference parameter of the pressure difference control unit between the BOD area and the annealing furnace area and the wind speed parameter of the wind speed control unit are transmitted to the BOD area air conditioning control unit. The BOD area air conditioning control unit processes and outputs a BOD area air conditioning AO control signal. After receiving the signal, the BOD area air conditioning controls the opening of the BOD area air conditioning air valve and adjusts the frequency of the BOD area air conditioning inverter to adjust the pressure difference between the BOD area and the annealing furnace area to a set pressure difference of 0 to 10 Pa between the BOD area and the annealing furnace area, and adjusts the wind speed between the BOD area and the annealing furnace area to a set wind speed of 0 to 1 m / s between the BOD area and the annealing furnace area, and the wind speed flow direction is positive, that is, the wind speed flow direction is from the BOD area to the annealing furnace area;

[0038] S5: Obtain the pressure difference parameter of the pressure difference control unit between the annealing furnace area and the indoor and outdoor areas. When the average value of the pressure difference parameter of the pressure difference control unit between the annealing furnace area and the indoor and outdoor areas exceeds the set pressure difference range of 0~12Pa between the annealing furnace area and the indoor and outdoor areas, start the exhaust fan; when the average value of the pressure difference parameter of the pressure difference control unit between the annealing furnace area and the indoor and outdoor areas is lower than the set pressure difference range of 0~12Pa between the annealing furnace area and the indoor and outdoor areas, turn off the exhaust fan.

[0039] The present invention discloses a micro-pressure difference control system for a substrate glass annealing furnace area, the system comprising a platinum channel area to annealing furnace area adjustment module, a BOD area to annealing furnace area adjustment module, and an annealing furnace area to outdoor adjustment module;

[0040] The platinum channel area to annealing furnace area adjustment module is used to obtain the pressure difference parameters of the pressure difference control unit of the platinum channel area to the annealing furnace area and the wind speed parameters of the wind speed control unit, and then transmit them to the platinum air conditioning control unit. The platinum air conditioning control unit processes and outputs a platinum air conditioning AO control signal. After receiving the signal, the platinum air conditioning controls the opening of the platinum air conditioning air valve and adjusts the frequency of the platinum air conditioning inverter to adjust the pressure difference between the platinum channel area and the annealing furnace area to the set pressure difference range of the platinum channel area to the annealing furnace area, and adjusts the wind speed between the platinum channel area and the annealing furnace area to the set wind speed range of the platinum channel area to the annealing furnace area;

[0041] The BOD area to annealing furnace area adjustment module is used to obtain the pressure difference parameter of the pressure difference control unit of the BOD area to the annealing furnace area and the wind speed parameter of the wind speed control unit, and then transmit them to the BOD area air conditioning control unit. The BOD area air conditioning control unit processes and outputs a BOD area air conditioning AO control signal. After receiving the signal, the BOD area air conditioning controls the opening of the BOD area air conditioning air valve and adjusts the frequency of the BOD area air conditioning inverter to adjust the pressure difference between the BOD area and the annealing furnace area to the set pressure difference range of the BOD area to the annealing furnace area, and adjusts the wind speed between the BOD area and the annealing furnace area to the set wind speed range of the BOD area to the annealing furnace area;

[0042] The annealing furnace area indoor and outdoor adjustment module is used to obtain the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor, and when the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor exceeds the set pressure difference range of the annealing furnace area to the indoor and outdoor, the exhaust fan is started; when the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor is lower than the set pressure difference range of the annealing furnace area to the indoor and outdoor, the exhaust fan is turned off.

[0043] The micro-pressure difference control system of the substrate glass annealing furnace area includes a pressure difference control unit, a wind speed control unit and an exhaust control unit;

[0044] The pressure difference control unit includes a pressure difference control unit for the platinum channel area to the annealing furnace area, and a pressure difference control unit for the BOD area to the annealing furnace area; the wind speed control unit includes a wind speed control unit for the platinum channel area to the annealing furnace area, and a wind speed control unit for the BOD area to the annealing furnace area; the exhaust control unit includes an exhaust fan and an exhaust fan controller;

[0045] The pressure difference control unit between the platinum channel area and the annealing furnace area is a platinum channel to annealing furnace area pressure difference transmitter 1, the wind speed control unit between the platinum channel area and the annealing furnace area is a platinum channel to annealing furnace area wind speed sensor 2, the pressure difference control unit between the BOD area and the annealing furnace area is a BOD area to annealing furnace area pressure difference transmitter 3, and the wind speed control unit between the BOD area and the annealing furnace area is a BOD area to annealing furnace area wind speed sensor 4;

[0046] The boundary between the platinum channel area and the annealing furnace area is provided with a pressure difference control unit between the platinum channel area and the annealing furnace area, and a wind speed control unit between the platinum channel area and the annealing furnace area; the boundary between the BOD area and the annealing furnace area is provided with a pressure difference control unit between the BOD area and the annealing furnace area, and a wind speed control unit between the BOD area and the annealing furnace area;

[0047] The exhaust fan controller is connected to the exhaust fan, and the exhaust fan is used to exhaust the annealing furnace area. Further, the exhaust fan includes a first exhaust fan 5 and a second exhaust fan 7, and the exhaust fan controller includes a first exhaust fan controller 6 connected to the first exhaust fan 5 and a second exhaust fan controller 8 connected to the second exhaust fan 7.

[0048] The present invention is described in further detail below with reference to the accompanying drawings:

[0049] See also Figure 1 A set of differential pressure transmitters, namely, Platinum channel to annealing furnace area differential pressure transmitter 1, and two sets of wind speed sensors, namely, Platinum channel to annealing furnace area wind speed sensor 2, are installed at the boundary between the platinum channel area and the annealing furnace area. The differential pressure and wind speed between the platinum channel and the annealing furnace area are monitored in real time, and the measured values ​​are fed back to the platinum air-conditioning control unit. After processing, the control unit outputs an AO signal to control the opening of the platinum air-conditioning fresh air valve or increase the frequency of the platinum air-conditioning inverter, or a combination of the two to adjust the opening and frequency given output, so that the differential pressure between the platinum channel and the annealing furnace area is close to the set value, and the wind speed flow direction is positive and within the set value range, so as to avoid exceeding the control parameters of the platinum channel area.

[0050] A set of pressure differential transmitters, i.e., pressure differential transmitter 3 between the BOD area and the annealing furnace area, and two sets of wind speed sensors, i.e., wind speed sensor 4 between the BOD area and the annealing furnace area, are installed at the boundary between the BOD area and the annealing furnace area to monitor the pressure differential and wind speed between the BOD area and the annealing furnace area in real time, and the pressure differential measurement value is fed back to the BOD area air-conditioning control unit. After processing, the control unit outputs an AO signal to control the opening of the BOD air-conditioning fresh air valve or increase the frequency of the BOD air-conditioning inverter, or adjust the opening and frequency given output by combining the two, so that the pressure differential between the BOD area and the annealing furnace area is close to the set value, and the wind speed flow direction is positive and within the set value range, so as to avoid exceeding the control parameters of the BOD area.

[0051] The existing annealing furnace area pressure difference control system includes: an annealing furnace air conditioner 15, the annealing furnace air conditioner 15 is connected to the supply air duct and the return air duct, the annealing furnace air conditioner 15 is connected to the fresh air electric regulating valve, the fresh air electric regulating valve is arranged on the return air duct, the return air duct is provided with a return air duct temperature measuring device and a return air duct temperature measuring controller 16 for controlling the return air duct temperature measuring device, and the return air duct is also provided with a return air duct air volume measuring device 12; the supply air duct is provided with a supply air duct pressure measuring device 10 and a supply air duct pressure measuring controller 11 for controlling the supply air duct pressure measuring device, and the supply air duct is also provided with a supply air duct air volume measuring device 13.

[0052] While retaining the existing annealing furnace area differential pressure control system (a pressure transmitter is installed in the annealing furnace area to measure the indoor and outdoor pressure differential and upload it to the controller. The control system sets the indoor and outdoor pressure differential value, and the control unit automatically outputs an AO signal to control the opening of the fresh air valve after processing), thereby achieving annealing furnace area differential pressure control, two new exhaust systems are added to the annealing furnace area and two sets of differential pressure transmitters are installed, namely, annealing furnace area indoor and outdoor differential pressure transmitters 9 (which monitor the indoor and outdoor pressure differentials in different annealing furnace areas respectively). When the average room pressure differential in the annealing furnace area exceeds the upper limit of the set value, the exhaust system automatically starts, that is, the first exhaust fan controller 6 controls the first exhaust fan 5 to start exhausting, and the control unit automatically controls the variable frequency operation. When the average room pressure differential in the annealing furnace area exceeds the lower limit of the set value, the exhaust system automatically stops, that is, the second exhaust fan controller 8 controls the second exhaust fan 7 to stop exhausting.

[0053] The above content is only for explaining the technical idea of ​​the present invention and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the claims of the present invention.

Claims

1. A method for controlling micro-pressure difference in a substrate glass annealing furnace area, characterized in that: The following steps are involved: S1: Obtain a pressure difference parameter of a pressure difference control unit between the platinum channel area and the annealing furnace area and a wind speed parameter of a wind speed control unit, adjust the pressure difference between the platinum channel area and the annealing furnace area to a set pressure difference range between the platinum channel area and the annealing furnace area through a platinum air conditioner, and adjust the wind speed between the platinum channel area and the annealing furnace area to a set wind speed range between the platinum channel area and the annealing furnace area, with the wind speed flow direction being from the platinum channel area to the annealing furnace area; S2: Obtain the pressure difference parameter of the pressure difference control unit between the BOD area and the annealing furnace area and the wind speed parameter of the wind speed control unit, adjust the pressure difference between the BOD area and the annealing furnace area to the set pressure difference range between the BOD area and the annealing furnace area through the BOD area air conditioner, and adjust the wind speed between the BOD area and the annealing furnace area to the set wind speed range between the BOD area and the annealing furnace area, with the wind speed flow direction from the BOD area to the annealing furnace area; S3: Obtain the pressure difference parameter of the pressure difference control unit between the annealing furnace area and the indoor and outdoor areas. When the average value of the pressure difference parameter of the pressure difference control unit between the annealing furnace area and the indoor and outdoor areas exceeds the set pressure difference range between the annealing furnace area and the indoor and outdoor areas, start the exhaust fan; when the average value of the pressure difference parameter of the pressure difference control unit between the annealing furnace area and the indoor and outdoor areas is lower than the set pressure difference range between the annealing furnace area and the indoor and outdoor areas, turn off the exhaust fan; In S1, the platinum air conditioner adjustment process is: The platinum channel area transmits the pressure difference parameters of the pressure difference control unit and the wind speed parameters of the wind speed control unit to the platinum air conditioner control unit. The platinum air conditioner control unit processes and outputs the AO control signal of the platinum air conditioner. After receiving the signal, the platinum air conditioner controls the opening of the air valve of the platinum air conditioner and adjusts the frequency of the inverter of the platinum air conditioner. In S2, the process of air conditioning in the BOD area is as follows: The BOD area transmits the pressure difference parameters of the pressure difference control unit of the annealing furnace area and the wind speed parameters of the wind speed control unit to the control unit of the BOD area air conditioner. The control unit of the BOD area air conditioner processes and outputs the AO control signal of the BOD area air conditioner. After receiving the signal, the BOD area air conditioner controls the opening of the air valve of the BOD area air conditioner and adjusts the frequency of the inverter of the BOD area air conditioner.

2. The micro-pressure difference control method for the substrate glass annealing furnace area according to claim 1, characterized in that: The pressure difference range of the platinum channel area to the annealing furnace area is set to 0~5Pa; the wind speed range of the platinum channel area to the annealing furnace area is set to 0~1m / s.

3. The method for controlling the micro-pressure difference in the substrate glass annealing furnace area according to claim 1, wherein: The pressure difference range of the BOD area to the annealing furnace area is set to 0~10Pa; the wind speed range of the BOD area to the annealing furnace area is set to 0~1m / s.

4. The method for controlling the micro-pressure difference in the substrate glass annealing furnace area according to claim 1, characterized in that: The pressure difference between the indoor and outdoor areas of the annealing furnace is set to range from 0 to 12 Pa.

5. A micro-pressure difference control system for a substrate glass annealing furnace area, characterized in that: include: The platinum channel area to annealing furnace area regulation module is used to obtain the pressure difference parameters of the pressure difference control unit of the platinum channel area to the annealing furnace area and the wind speed parameters of the wind speed control unit, and then transmit them to the platinum air conditioning control unit. The platinum air conditioning control unit processes and outputs the platinum air conditioning AO control signal. After receiving the signal, the platinum air conditioning controls the opening of the platinum air conditioning air valve and adjusts the frequency of the platinum air conditioning inverter. The pressure difference between the platinum channel area and the annealing furnace area is adjusted to the set pressure difference range of the platinum channel area to the annealing furnace area, and the wind speed between the platinum channel area and the annealing furnace area is adjusted to the set wind speed range of the platinum channel area to the annealing furnace area, and the wind speed flow direction is from the platinum channel area to the annealing furnace area. The BOD area to annealing furnace area adjustment module is used to obtain the pressure difference parameters of the pressure difference control unit of the BOD area to the annealing furnace area and the wind speed parameters of the wind speed control unit, and then transmit them to the BOD area air conditioning control unit. The BOD area air conditioning control unit processes and outputs the BOD area air conditioning AO control signal. After receiving the signal, the BOD area air conditioning controls the opening of the BOD area air conditioning air valve and adjusts the frequency of the BOD area air conditioning inverter, adjusts the pressure difference between the BOD area and the annealing furnace area to the set pressure difference range of the BOD area to the annealing furnace area, and adjusts the wind speed between the BOD area and the annealing furnace area to the set wind speed range of the BOD area to the annealing furnace area, and the wind speed flow direction is from the BOD area to the annealing furnace area; The annealing furnace area indoor and outdoor adjustment module is used to obtain the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor. When the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor exceeds the set pressure difference range of the annealing furnace area to the indoor and outdoor, the exhaust fan is started; when the average value of the pressure difference parameters of the pressure difference control unit of the annealing furnace area to the indoor and outdoor is lower than the set pressure difference range of the annealing furnace area to the indoor and outdoor, the exhaust fan is turned off.

6. The micro-pressure difference control system for the substrate glass annealing furnace area according to claim 5, characterized in that: The pressure difference control unit of the platinum channel area to the annealing furnace area is arranged at the boundary between the platinum channel area and the annealing furnace area; the pressure difference control unit of the BOD area to the annealing furnace area is arranged at the boundary between the BOD area and the annealing furnace area; The wind speed control unit of the platinum channel area to the annealing furnace area is arranged at the boundary between the platinum channel area and the annealing furnace area; the wind speed control unit of the BOD area to the annealing furnace area is arranged at the boundary between the BOD area and the annealing furnace area; It also includes an exhaust system, the exhaust system including an exhaust fan, an exhaust fan controller, and a pressure difference transmitter (9) between the annealing furnace area and the indoor and outdoor areas; The exhaust fan is connected to the exhaust fan controller, and the exhaust fan is used for exhausting the annealing furnace area; the annealing furnace area indoor and outdoor pressure differential transmitter (9) is connected to the exhaust fan controller; the annealing furnace area indoor and outdoor pressure differential transmitter (9) is used to measure the annealing furnace area indoor and outdoor pressure differential.

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