Substrate holding robot and substrate handling robot

Abstract

The substrate holding robot (1) comprises: a blade (31) including a supporting portion (311, 312) for supporting a substrate (W); a movable pressing unit (32, 33) including a pressing component (32a, 33a) capable of moving forward and backward for pressing the substrate; and a tilt adjustment mechanism (34, 35, 36, 37) capable of adjusting the tilt of the pressing component.

Description

Technical Field

[0001] The present invention relates to a substrate holding robot and a substrate transporting robot, and to a substrate holding robot and a substrate transporting robot having a movable pressing unit. Background Art

[0002] Conventionally, there is known a substrate holding robot equipped with a movable pressing unit. For example, Japanese Patent Application Laid-Open No. 2013-69914 discloses such a robot.

[0003] Japanese Patent Application Laid-Open No. 2013-69914 discloses a substrate transport robot (substrate holding robot) for transporting a substrate. The substrate transport robot includes a movable pressing unit including a pressing portion that moves forward and backward for pressing the substrate.

[0004] Although not explicitly described in Japanese Patent Application Laid-Open No. 2013-69914, it is considered that a pressing portion is provided in a conventional substrate transport robot such as that described in Japanese Patent Application Laid-Open No. 2013-69914 so as to press a substrate arranged at a designed position.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2013-69914

[0006] However, in the above-mentioned conventional substrate transport robot, when the position of the actual substrate pressed by the pressing portion deviates from the originally assumed design position, it is difficult to press the substrate by the pressing portion according to the actual position of the substrate. In other words, there is a problem that it is difficult to properly press the actual substrate by the pressing portion (pressing member). Summary of the invention

[0007] The subject (object) of the present invention is to provide a substrate holding robot and a substrate transport robot which can appropriately press a substrate by a pressing member even when the actual position of the substrate pressed by the pressing member deviates from the originally assumed design position.

[0008] The substrate holding robot according to the first aspect of the invention comprises: a blade including a support portion for supporting a substrate; a movable pressing unit including a pressing member that can move forward and backward for pressing the substrate; and a tilt adjustment mechanism that can adjust the tilt of the pressing member.

[0009] The substrate transport robot based on the second aspect of the invention includes a substrate holding robot and an arm for moving the substrate holding robot, wherein the substrate holding robot includes: a blade, which includes a supporting portion for supporting the substrate; a movable pressing unit, which includes a pressing component that can move forward and backward and is used to press the substrate; and a tilt adjustment mechanism that can adjust the tilt of the pressing component.

[0010] According to the present invention, as described above, by providing a tilt adjustment mechanism capable of adjusting the tilt of the pressing component, the tilt of the pressing component can be adjusted to an appropriate tilt according to the actual position of the substrate pressed by the pressing component. Therefore, even if the actual position of the substrate pressed by the pressing component deviates from the originally assumed design position, the substrate can be properly pressed by the pressing component. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a diagram showing the structure of a substrate transport robot according to one embodiment of the present invention.

[0012] Figure 2 It is a perspective view showing the structure of a substrate holding robot according to one embodiment of the present invention.

[0013] Figure 3 It is a plan view showing the structure of a substrate holding robot according to one embodiment of the present invention.

[0014] Figure 4 It is a plan view showing the structure of a first movable pressing unit of a substrate holding robot according to an embodiment of the present invention.

[0015] Figure 5 It is a side view showing the structure of a first movable pressing unit of a substrate holding robot according to an embodiment of the present invention.

[0016] Figure 6 (A) and (B) are diagrams for explaining adjustment of the inclination in the XY plane of the pressing member of the first movable pressing unit of the substrate holding robot according to one embodiment of the present invention.

[0017] Figure 7 (A) and (B) are diagrams for explaining adjustment of the inclination in the YZ plane of the pressing member of the first movable pressing unit of the substrate holding robot according to one embodiment of the present invention.

[0018] Figure 8 It is a plan view showing the structure of the second movable pressing unit of the substrate holding robot according to one embodiment of the present invention.

[0019] Fig. 9It is a side view showing the structure of the second movable pressing unit of the substrate holding robot according to one embodiment of the present invention.

[0020] Fig.10 It is a perspective view showing the structure of a movable supporting unit of a substrate holding robot according to one embodiment of the present invention.

[0021] Fig.11 It is a side view showing the structure of a movable supporting unit of a substrate holding robot according to one embodiment of the present invention.

[0022] Fig.12 This is a diagram for explaining replacement of a support member of a movable support unit of a substrate holding robot according to an embodiment of the present invention. DETAILED DESCRIPTION

[0023] Hereinafter, one embodiment of the present invention which embodies the present invention will be described based on the drawings.

[0024] Reference Figures 1 to 12 , the structure of the substrate transport robot 100 based on this embodiment is described.

[0025] like Figure 1 As shown, the substrate transport robot 100 includes a substrate holding robot 1 and an arm 2 for moving the substrate holding robot 1. Figure 2 to Figure 12 As shown, the substrate holding robot 1 includes: a blade 31, which includes supporting parts 311 and 312 for supporting the substrate W; a movable pressing unit 32 (33), which includes a pressing component 32a (33a) for pressing the substrate (semiconductor wafer) W and moving it forward and backward; and a tilt adjustment mechanism 34 and 35 (36, 37), which can adjust the tilt of the pressing component 32a.

[0026] According to the present embodiment, as described above, by providing the inclination adjustment mechanisms 34 and 35 (36, 37) capable of adjusting the inclination of the pressing part 32a (33a), the inclination of the pressing part 32a (33a) can be adjusted to an appropriate inclination according to the actual position of the substrate W pressed by the pressing part 32a (33a). Therefore, even if the actual position of the substrate W pressed by the pressing part 32a (33a) deviates from the originally assumed design position, the substrate W can be properly pressed by the pressing part 32a (33a).

[0027] like Figure 2 to Figure 9 As shown, the substrate holding robot 1 includes a blade 31 , movable pressing units 32 and 33 , and tilt adjustment mechanisms 34 , 35 , 36 , and 37 .

[0028] like Figure 3 to Figure 9As shown, the tilt adjustment mechanism 34 (35) can adjust the tilt of the pressing member 32a by rotating the pressing member 32a around a predetermined rotation axis C1 (C2). The tilt adjustment mechanism 36 (37) can adjust the tilt of the pressing member 33a by rotating the pressing member 33a around a predetermined rotation axis C3 (C4). Figure 6 and Figure 7 In the figure, the adjustment of the inclination of the pressing member 32a is exaggerated for easy understanding.

[0029] The tilt adjustment mechanism 34 (35) includes a tilt adjustment pin 34a (35a) that supports the pressing member 32a so that it can rotate around a predetermined rotation axis C1 (C2). By rotating the pressing member 32a around the predetermined rotation axis C1 (C2) with the tilt adjustment pin 34a (35a) as the rotation center, the tilt of the pressing member 32a can be adjusted. The tilt adjustment mechanism 36 (37) includes a tilt adjustment pin 36a (37a) that supports the pressing member 33a so that it can rotate around a predetermined rotation axis C3 (C4). By rotating the pressing member 33a around the predetermined rotation axis C3 (C4) with the tilt adjustment pin 36a (37a) as the rotation center, the tilt of the pressing member 33a can be adjusted. In addition, the tilt adjustment pins 34a and 36a are examples of the "first tilt adjustment pin" in the claims. In addition, the tilt adjustment pins 35a and 37a are examples of the "second tilt adjustment pin" in the claims.

[0030] The tilt adjustment pin 34a (36a) is provided to extend in a direction (Z direction) perpendicular to the main surface 31c of the blade 31. The tilt adjustment mechanism 34 (36) can adjust the tilt of the pressing member 32a (33a) in a plane (XY plane) parallel to the main surface 31c of the blade 31 by rotating the pressing member 32a (33a) around a rotation axis C1 (C3) extending in a direction (Z direction) perpendicular to the main surface 31c of the blade 31 with the tilt adjustment pin 34a (36a) as the rotation center.

[0031] The pressing member 32a (33a) includes a pair of pressing members 32a (33a). The tilt adjustment pin 34a (36a) includes a pair of tilt adjustment pins 34a (36a) corresponding to the pair of pressing members 32a (33a). The tilt adjustment mechanism 34 (36) rotates the pair of pressing members 32a (33a) around the rotation axis C1 (C3) extending in the direction (Z direction) perpendicular to the main surface 31c of the blade 31, respectively, with the pair of tilt adjustment pins 34a (36a) as the rotation center, so that the tilt of the pair of pressing members 32a (33a) in the plane parallel to the main surface 31c of the blade 31 (in the XY plane) can be adjusted, so that the pair of pressing members 32a (33a) in the plane parallel to the main surface 31c of the blade 31 (in the XY plane) is close to or away from each other.

[0032] The tilt adjustment pin 35a (37a) is provided to extend in a direction (X direction) parallel to the main surface 31c of the blade 31 and orthogonal to the advancing and retreating direction (Y direction) of the movable pressing unit 32 (33). The tilt adjustment mechanism 35 (37) can adjust the tilt of the pressing member 32a (33a) in a plane (in the YZ plane) perpendicular to the main surface 31c of the blade 31 by rotating the pressing member 32a (33a) around the rotation axis C2 (C4) extending in a direction (X direction) parallel to the main surface 31c of the blade 31 and orthogonal to the advancing and retreating direction (Y direction) of the movable pressing unit 32 (33) with the tilt adjustment pin 35a (37a) as the rotation center.

[0033] The blade 31 includes a plurality of (4) blades 31 arranged in a direction (Z direction) perpendicular to the main surface 31c of the blade 31. The pressing member 32a (33a) presses the substrates W respectively arranged on the plurality of blades 31 together. The tilt adjustment mechanism 35 (37) rotates the pressing member 32a (33a) about a rotation axis C2 (C4) extending in a direction (X direction) parallel to the main surface 31c of the blade 31 and orthogonal to the advance and retreat direction (Y direction) of the movable pressing unit, with the tilt adjustment pin 35a (37a) as the rotation center, so that the tilt of the pressing member 32a (33a) in a plane perpendicular to the main surface 31c of the blade 31 (in the YZ plane) can be adjusted along the tilt formed by the respective outer peripheral edges Wa of the plurality of (4) substrates W in the direction (Z direction) perpendicular to the main surface 31c of the blade 31.

[0034] like Figure 3As shown, the substrate holding robot 1 further includes a movable support unit 38 including a support member 38a for supporting the substrate W to move forward and backward. The support parts 311 and 312 include a front support part 311 provided on the side of the front end 31a of the blade 31 (the Y1 direction side), and a rear support part 312 provided on the side of the base end 31b of the blade 31 (the Y2 direction side). The movable support unit 38 supports the substrate W together with the front support part 311. The movable pressing units 32 and 33 include a first movable pressing unit 32 for pressing the substrate W supported by the front support part 311 and the movable support unit 38, and a second movable pressing unit 33 for pressing the substrate W supported by the front support part 311 and the rear support part 312.

[0035] It can also be configured such that, when viewed from a direction perpendicular to the main surface 31c of the blade 31 (Z direction), the pair of pressing members 32a (33a) are arranged at symmetrical positions with respect to the center line L1 extending in the forward and backward direction (Y direction) of the movable pressing unit 32 (33), and press the substrate W at symmetrical positions with respect to the center line L1 extending in the forward and backward direction (Y direction) of the movable pressing unit 32 (33), but the configuration of the pair of pressing members 32a (33a) is not limited to this. The pair of pressing members 32a (33a) only needs to press the substrate W at any two points on the arc of the substrate W. If the pair of pressing members 32a (33a) press the substrate W at any two points on the arc of the substrate W, the vector can be dispersed, so it is also possible to cope with the situation where the substrate W is in close contact with the blade 31 (the substrate W can be pressed and appropriately moved).

[0036] like Figure 10 to Figure 12 As shown in FIG. 1 , the support members 38a are arranged in a direction perpendicular to the main surface 31c of the blade 31, and include a plurality of (4) support members 38a that respectively support a plurality of (4) substrates W arranged in a direction perpendicular to the main surface 31c of the blade 31 (Z direction). The movable support unit 38 can replace the middle support members (the second or third layer support members) 38a in a state where the support members (the first layer support members) 38a at the end portions in the direction perpendicular to the main surface 31c of the blade 31 (Z direction) are installed.

[0037] The movable support unit 38 further includes a plurality of mounting members 38b on which the support members 38a are respectively mounted. The mounting member 38b of the middle support member (the support member of the second layer or the third layer) 38a is fixed to the mounting member 38b of the end support member (the support member of the first layer or the fourth layer) 38a via the fastening member 38c. The movable support unit 38 can replace the middle support member (the support member of the second layer or the third layer) 38a while the end support member (the support member of the first layer or the fourth layer) 38a is mounted by removing the fastening member 38c to remove the mounting member 38b of the middle support member (the support member of the second layer or the third layer) 38a from the mounting member 38b of the end support member (the support member of the first layer or the fourth layer) 38a.

[0038] like Figure 1 As shown, the arm 2 is a horizontal multi-joint robot arm. The arm 2 includes a first arm 2a and a second arm 2b. The first arm 2a is configured to be rotatable relative to a base 5 described later with one end as the rotation center. Specifically, one end of the first arm 2a is rotatably connected to the base 5 via a first joint. The second arm 2b is configured to be rotatable relative to the first arm 2a with one end as the rotation center. Specifically, one end of the second arm 2b is rotatably connected to the other end of the first arm 2a via a second joint. In addition, at the other end of the second arm 2b, a substrate holding robot 1 is rotatably connected via a third joint. A driving mechanism including a servo motor as a driving source for rotational drive, a rotation position sensor for detecting the rotation position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the joint is provided at each joint of the first joint, the second joint, and the third joint.

[0039] In addition, the substrate transport robot 100 further includes a base 5 on which the arm 2 is mounted, and an arm lifting mechanism 6 on which the base 5 is mounted. The base 5 is configured such that one end is connected to one end of the first arm 2a, and the other end is connected to the arm lifting mechanism 6. The arm lifting mechanism 6 is configured to lift the arm 2 by lifting the base 5. The arm lifting mechanism 6 includes a servo motor as a driving source for lifting and lowering, a rotation position sensor for detecting the rotation position of the output shaft of the servo motor, and a power transmission mechanism for transmitting the output of the servo motor to the base 5 (arm 2).

[0040] like Figure 2 As shown, the substrate holding robot 1 is provided with a plurality of (four) blades 31. That is, the substrate holding robot 1 is configured to be able to transport (to be able to hold) a plurality of (four) substrates W.

[0041] The blade 31 is a thin plate-shaped support plate that supports the substrate W. The blade 31 has a shape that is divided into two branches on the side of the front end portion 31a. In the blade 31, a pair of front support parts 311 are separately provided in the two-branched parts. The pair of front support parts 311 have a plurality of (2) support surfaces set at different heights from each other. In addition, a pair of rear support parts 312 have support surfaces set at a height substantially the same as the support surfaces on the lower side (Z2 direction side) of the pair of front support parts 311. In addition, the "height" refers to the distance from the main surface 31c of the blade 31 in the direction (Z direction) perpendicular to the main surface 31c of the blade 31.

[0042] A pair of front supports 311 and a pair of rear supports 312 are provided on the main surface 31c of the blade 31. The support surfaces of the pair of front supports 311 and the pair of rear supports 312 are configured to support the back side (surface on the Z2 direction side) of the outer peripheral portion of the substantially circular substrate W from below.

[0043] like Figure 2 to Figure 12 As shown, the substrate holding robot 1 includes a first movable pressing unit 32 , a second movable pressing unit 33 , and a movable supporting unit 38 .

[0044] like Figure 4 and Figure 5 As shown in FIG. 1 , the first movable pressing unit 32 includes a pressing member 32a, a cylinder 32b as an actuator for moving the pressing member 32a forward and backward in the Y direction, and a mounting portion 32c on which the pressing member 32a is mounted and connects the pressing member 32a and the cylinder 32b. The first movable pressing unit 32 is configured so that the pressing member 32a can be moved forward in the Y1 direction by the cylinder 32b via the mounting portion 32c to press the substrate W. In addition, the first movable pressing unit 32 is configured so that the pressing member 32a can be moved backward in the Y2 direction by the cylinder 32b via the mounting portion 32c to be disposed in a retreat position where the substrate W is not pressed.

[0045] The pressing component 32a includes a pair of pressing components 32a arranged in the X direction. The pair of pressing components 32a is arranged to extend in a direction (Z direction) perpendicular to the main surface 31c of the blade 31 so as to be able to press a plurality of substrates W supported on a plurality of blades 31 at once. The cylinder 32b has a rod that moves forward and backward in the Y direction. The rod of the cylinder 32b is connected to the base end of the mounting portion 32c. The mounting portion 32c has a shape that is divided into two strands on the front end side (Y1 direction side). In the mounting portion 32c, a pair of pressing components 32a are separately provided in the two-stranded portion.

[0046] The mounting portion 32c includes a pair of first mounting members 321 to which the pressing members 32a are respectively mounted, and a second mounting member 322 to which the pair of first mounting members 321 are mounted. The first mounting member 321 includes a first portion 321a to which the pressing member 32a is mounted, and a second portion 321b mounted on the second mounting member 322. The first portion 321a is provided to extend in a direction (Z direction) perpendicular to the main surface 31c of the blade 31 with a length substantially the same as that of the pressing member 32a. In addition, the pressing member 32a is fixed to the first portion 321a by a fastening member 35b.

[0047] The tilt adjustment mechanism 35 includes a fastening member 35b. The tilt adjustment mechanism 35 can adjust the tilt of the pressing member 32a in a plane (in a YZ plane) perpendicular to the main surface 31c of the blade 31 by rotating the pressing member 32a around the rotation axis C2 with the tilt adjustment pin 35a as the rotation center in a state where the fastening member 35b is loosened (see Figure 7 ). In addition, the tilt adjustment mechanism 35 is configured such that, after the tilt of the pressing member 32a in a plane perpendicular to the main surface 31c of the blade 31 (in the YZ plane) is adjusted by the tilt adjustment pin 35a, the fastening member 35b is tightened to fix the tilt of the pressing member 32a. The fastening member 35b is provided to extend in a direction (X direction) parallel to the direction in which the tilt adjustment pin 35a extends. In addition, the tilt adjustment pin 35a is inserted into the pressing member 32a and the first portion 321a of the first mounting member 321 in the X direction.

[0048] The second portion 321b of the first mounting member 321 is provided to extend from the first portion 321a toward the cylinder 32b side (Y2 direction side). In addition, the second portion 321b is mounted on the second mounting member 322. In addition, the second mounting member 322 has a shape that is bifurcated at the front end side (Y1 direction side). In the second mounting member 322, the first mounting member 321 is fixed to each of the bifurcated front end portions by a fastening member 34b.

[0049] The tilt adjustment mechanism 34 includes a fastening member 34b. The tilt adjustment mechanism 34 rotates the first mounting member 321 and the pressing member 32a around the rotation axis C1 with the tilt adjustment pin 34a as the rotation center in a state where the fastening member 34b is loosened, thereby adjusting the tilt of the pressing member 32a in a plane (in the XY plane) parallel to the main surface 31c of the blade 31 (see FIG. Figure 6). In addition, the tilt adjustment mechanism 34 is configured such that, after the tilt of the pressing member 32a in a plane parallel to the main surface 31c of the blade 31 (in the XY plane) is adjusted by the tilt adjustment pin 34a, the fastening member 34b is tightened to fix the tilt of the pressing member 32a. The fastening member 34b is provided to extend in a direction (Z direction) parallel to the direction in which the tilt adjustment pin 34a extends. In addition, the tilt adjustment pin 34a is inserted into the second portion 321b of the first mounting member 321 and the second mounting member 322 in the Z direction.

[0050] like Figure 8 and Fig. 9 As shown in FIG. 1 , the second movable pressing unit 33 includes a pressing member 33a, a cylinder 33b as an actuator for moving the pressing member 33a forward and backward in the Y direction, and a mounting portion 33c on which the pressing member 33a is mounted and connects the pressing member 33a and the cylinder 33b. The second movable pressing unit 33 is configured so that the pressing member 33a can be moved forward in the Y1 direction by the cylinder 33b via the mounting portion 33c to press the substrate W. In addition, the second movable pressing unit 33 is configured so that the pressing member 33a can be moved backward in the Y2 direction by the cylinder 33b via the mounting portion 33c to be arranged in a retreat position where the substrate W is not pressed.

[0051] The pressing component 33a includes a pair of pressing components 33a arranged in the X direction. The pair of pressing components 33a is arranged to extend in a direction (Z direction) perpendicular to the main surface 31c of the blade 31 so as to be able to press a plurality of substrates W supported on the plurality of blades 31 at once. The cylinder 33b has a rod that moves forward and backward in the Y direction. The rod of the cylinder 33b is connected to the base end of the mounting portion 33c. The mounting portion 33c has a shape that is divided into two strands on the front end side (Y1 direction side). In the mounting portion 33c, a pair of pressing components 33a are separately provided in the two-stranded portion.

[0052] The mounting portion 33c includes a pair of first mounting members 331 to which the pressing members 33a are respectively mounted, and a second mounting member 332 to which the pair of first mounting members 331 are mounted. The first mounting member 331 includes a first portion 331a to which the pressing member 33a is mounted, and a second portion 331b mounted on the second mounting member 332. The first portion 331a is provided to extend in a direction (Z direction) perpendicular to the main surface 31c of the blade 31 with a length substantially the same as that of the pressing member 33a. In addition, the pressing member 33a is fixed to the first portion 331a by a fastening member 37b.

[0053] The tilt adjustment mechanism 37 includes a fastening member 37b. The tilt adjustment mechanism 37 can adjust the tilt of the pressing member 33a in a plane (in a YZ plane) perpendicular to the main surface 31c of the blade 31 by rotating the pressing member 33a around the rotation axis C4 with the tilt adjustment pin 37a as the rotation center in a state where the fastening member 37b is loosened (see Figure 7 ). In addition, the tilt adjustment mechanism 37 is configured such that the tilt of the pressing member 33a is fixed by tightening the fastening member 37b in a state where the tilt of the pressing member 33a in a plane perpendicular to the main surface 31c of the blade 31 (in the YZ plane) is adjusted by the tilt adjustment pin 37a. The fastening member 37b is provided to extend in a direction (X direction) parallel to the direction in which the tilt adjustment pin 37a extends. In addition, the tilt adjustment pin 37a is inserted into the pressing member 33a and the first portion 331a of the first mounting member 331 in the X direction.

[0054] The second portion 331b of the first mounting member 331 is provided to extend from the first portion 331a toward the cylinder 33b side (Y2 direction side). In addition, the second portion 331b is mounted on the second mounting member 332. In addition, the second mounting member 332 has a shape that is bifurcated at the front end side (Y1 direction side). In the second mounting member 332, the first mounting member 331 is fixed to each of the bifurcated front end portions by the fastening member 36b.

[0055] The tilt adjustment mechanism 36 includes a fastening member 36b. The tilt adjustment mechanism 36 can adjust the tilt of the pressing member 33a in a plane (in the XY plane) parallel to the main surface 31c of the blade 31 by rotating the first mounting member 331 and the pressing member 33a around the rotation axis C3 with the tilt adjustment pin 36a as the rotation center in a state where the fastening member 36b is loosened (see FIG. Figure 6 ). In addition, the tilt adjustment mechanism 36 is configured such that the tilt of the pressing member 33a is fixed by tightening the fastening member 36b in a state where the tilt of the pressing member 33a in a plane parallel to the main surface 31c of the blade 31 (in the XY plane) is adjusted by the tilt adjustment pin 36a. The fastening member 36b is provided to extend in a direction (Z direction) parallel to the direction in which the tilt adjustment pin 36a extends. In addition, the tilt adjustment pin 36a is inserted into the second portion 331b of the first mounting member 331 and the second mounting member 332 in the Z direction.

[0056] like Figure 10 to Figure 12As shown in FIG. 1 , the movable support unit 38 includes a support member 38a, a cylinder 38d as an actuator for moving the support member 38a forward and backward in the Y direction, and a mounting portion 38e to which the support member 38a is mounted and to connect the support member 38a and the cylinder 38d. The movable support unit 38 is configured so that the support member 38a can be moved forward in the Y1 direction by the cylinder 38d via the mounting portion 38e to be arranged at a supporting position for supporting the substrate W. In addition, the movable support unit 38 is configured so that the support member 38a can be moved backward in the Y2 direction by the cylinder 38d via the mounting portion 38e to be arranged at a retreat position for not supporting the substrate W.

[0057] The supporting member 38a includes a pair of supporting members 38a arranged in the X direction. A pair of supporting members 38a is arranged in a direction (Z direction) perpendicular to the main surface 31c of the blade 31 in a number corresponding to the number of blades 31 (4 groups). In addition, a pair of supporting members 38a has a supporting surface set to be substantially the same height as the supporting surface on the upper side (Z1 direction side) of a pair of front supporting parts 311. Each supporting surface of a pair of supporting members 38a is configured to support the back side (the surface on the Z2 direction side) of the outer peripheral portion of the roughly circular substrate W from the bottom. The cylinder 38d has a rod that moves forward and backward in the Y direction. The rod of the cylinder 38d is connected to the base end portion of the mounting portion 38e. The mounting portion 38e has a shape that is divided into two strands on the front end side (Y1 direction side). In the mounting portion 38e, a pair of supporting members 38a are separately provided in the two-stranded portion.

[0058] The mounting portion 38e includes a mounting member 38b and a mounting member 38f for mounting the mounting member 38b. The mounting member 38b includes a plate-shaped pedestal portion on the upper surface of which the support member 38a is mounted. The pedestal portion of the mounting member 38b is provided so as to extend in the advancing and retreating direction (Y direction) of the movable support unit 38. The mounting member 38f has a shape that is bifurcated at the front end side (Y1 direction side). The support member 38a and the mounting member 38b are provided at the bifurcated front end portions of the mounting member 38f.

[0059] The supporting member (supporting member of the first layer) 38a at the end portion of the upper side (Z1 direction side) is fixed to the mounting member 38f via the fastening member 38g. In addition, the middle supporting member (supporting member of the second layer) 38a at the upper side (Z1 direction side) is fixed to the supporting member (supporting member of the first layer) 38a at the end portion of the upper side (Z1 direction side) via the fastening member 38c at the upper side (Z1 direction side). The head of the fastening member 38g and the fastening member 38c at the upper side (Z1 direction side) that engages with a tool (hexagonal wrench, etc.) for removal is exposed at the upper side (Z1 direction side).

[0060] In addition, the supporting member (supporting member of the 4th layer) 38a at the end of the lower side (Z2 direction side) is fixed to the spacer part 38i via the fastening member 38h. The spacer part 38i is fixed to the mounting member 38f together with the supporting member (supporting member of the 1st layer) 38a at the end of the upper side (Z1 direction side) via the fastening member 38h. In addition, the middle supporting member (supporting member of the 3rd layer) 38a at the lower side (Z2 direction side) is fixed to the supporting member (supporting member of the 4th layer) 38a at the end of the lower side (Z2 direction side) via the fastening member 38c at the lower side (Z2 direction side). The head of the fastening member 38h and the fastening member 38c at the lower side (Z2 direction side) for the removal tool (hexagonal wrench, etc.) is exposed at the lower side (Z2 direction side).

[0061] The movable support unit 38 can remove the middle support member 38a on both sides (Z1 direction side, upper side) and the other side (Z2 direction side, lower side) in the direction (Z direction) perpendicular to the main surface 31c of the blade 31, while the end support member 38a is attached to the main body of the mounting portion 38e. In addition, the movable support unit 38 can remove the plurality of (4) support members 38a by removing the fastening member 38g and removing the plurality of (4) mounting members 38b from the mounting member 38f. In addition, the movable support unit 38 can remove the mounting member 38b of the support member 38a at the end on the lower side (Z2 direction side) and the mounting member 38b of the middle support member 38a at the lower side (Z2 direction side) by removing the fastening member 38h, thereby removing the end support member 38a on the lower side (Z2 direction side) and the middle support member 38a on the lower side (Z2 direction side).

[0062] In addition, in the substrate holding robot 1, the supporting surfaces on the upper side (Z1 direction side) of the pair of front supporting parts 311 and the supporting surfaces of the pair of supporting members 38a of the movable supporting unit 38 support the processed (cleaned) substrate W. Furthermore, the pair of pressing members 32a of the first movable pressing unit 32 presses the processed (cleaned) substrate W supported by the supporting surfaces on the upper side (Z1 direction side) of the pair of front supporting parts 311 and the supporting surfaces of the pair of supporting members 38a of the movable supporting unit 38.

[0063] In addition, in the substrate holding robot 1, the supporting surfaces of the pair of front supporting parts 311 on the lower side (Z2 direction side) and the supporting surfaces of the pair of rear supporting parts 312 support the substrate W before processing (before cleaning). Furthermore, the pair of pressing members 33a of the second movable pressing unit 33 press the substrate W before processing (before cleaning) supported by the supporting surfaces of the pair of front supporting parts 311 on the lower side (Z2 direction side) and the supporting surfaces of the pair of rear supporting parts 312. The pair of front supporting parts 311, the pair of rear supporting parts 312, the movable supporting unit 38, the first movable pressing unit 32, and the second movable pressing unit 33 are used separately for the substrate W before processing (before cleaning) and the substrate W after processing (after cleaning).

[0064] [Effects of this embodiment]

[0065] In this embodiment, the following effects can be obtained.

[0066] In this embodiment, as described above, by providing inclination adjustment mechanisms 34 and 35 (36, 37) capable of adjusting the inclination of the pressing part 32a (33a), the inclination of the pressing part 32a (33a) can be adjusted to an appropriate inclination according to the actual position of the substrate W pressed by the pressing part 32a (33a). Therefore, even if the actual position of the substrate W pressed by the pressing part 32a (33a) deviates from the originally assumed design position, the substrate W can be properly pressed by the pressing part 32a (33a).

[0067] In addition, in the present embodiment, as described above, the tilt adjustment mechanisms 34 and 35 (36, 37) can adjust the tilt of the pressing member 32a (33a) by rotating the pressing member 32a (33a) around the predetermined rotation axes C1 and C2 (C3, C4). Thus, the tilt of the pressing member 32a (33a) can be easily adjusted to an appropriate tilt corresponding to the position of the substrate W only by rotating the pressing member 32a (33a) around the predetermined rotation axes C1 and C2 (C3, C4).

[0068] In addition, in this embodiment, as described above, the tilt adjustment mechanism 34 and 35 (36, 37) includes the tilt adjustment pins 34a and 35a (36a, 37a) that support the pressing member 32a (33a) so as to be rotatable around the predetermined rotation axes C1 and C2 (C3, C4). In addition, by rotating the pressing member 32a (33a) around the predetermined rotation axes C1 and C2 with the tilt adjustment pins 34a and 35a (36a, 37a) as the rotation center, the tilt of the pressing member 32a (33a) can be adjusted. Thus, the pressing component 32a (33a) can be simply and reliably rotated about the specified rotation axes C1 and C2 (C3, C4) using the tilt adjustment pins 34a and 35a (36a, 37a), so that the tilt of the pressing component 32a (33a) can be simply and reliably adjusted to an appropriate tilt corresponding to the position of the substrate W by the tilt adjustment mechanism 34 and 35 (36, 37) including the tilt adjustment pins 34a and 35a (36a, 37a).

[0069] In addition, in the present embodiment, as described above, the tilt adjustment pins 34a and 35a (36a, 37a) include the tilt adjustment pin 34a (36a) provided to extend in a direction perpendicular to the main surface 31c of the blade 31. In addition, the tilt adjustment mechanism 34 (36) can adjust the tilt of the pressing member 32a (33a) in a plane parallel to the main surface 31c of the blade 31 by rotating the pressing member 32a (33a) around the rotation axis C1 (C3) extending in a direction perpendicular to the main surface 31c of the blade 31 with the tilt adjustment pin 34a (36a) as the rotation center. Thus, the inclination of the pressing part 32a (33a) in a plane parallel to the main surface 31c of the blade 31 can be adjusted to appropriately correspond to the outer peripheral edge Wa of the substrate W, thereby preventing the substrate W from being properly pressed by the pressing part 32a (33a) due to the inclination of the pressing part 32a (33a) in a plane parallel to the main surface 31c of the blade 31 not appropriately corresponding to the outer peripheral edge Wa of the substrate W.

[0070] In addition, in the present embodiment, as described above, the pressing member 32a (33a) includes a pair of pressing members 32a (33a). In addition, the tilt adjustment pin 34a (36a) includes a pair of tilt adjustment pins 34a (36a) corresponding to the pair of pressing members 32a (33a). In addition, the tilt adjustment mechanism 34 (36) rotates the pair of pressing members 32a (33a) around the rotation axis C1 (C3) extending in a direction perpendicular to the main surface 31c of the blade 31 with the pair of tilt adjustment pins 34a (36a) as the rotation center, thereby adjusting the tilt of the pair of pressing members 32a (33a) in a plane parallel to the main surface 31c of the blade 31 so that the pair of pressing members 32a (33a) are moved closer to each other or farther away from each other in a plane parallel to the main surface 31c of the blade 31. Thus, the inclination of the pair of pressing parts 32a (33a) in a plane parallel to the main surface 31c of the blade 31 can be easily adjusted to appropriately correspond to the outer peripheral edge Wa of the substrate W, thereby easily preventing the substrate W from being properly pressed by the pair of pressing parts 32a (33a) due to the inclination of the pair of pressing parts 32a (33a) in a plane parallel to the main surface 31c of the blade 31 not appropriately corresponding to the outer peripheral edge Wa of the substrate W.

[0071] In addition, in the present embodiment, as described above, the tilt adjustment pins 34a and 35a (36a, 37a) include the tilt adjustment pin 35a (37a) which is arranged to extend in a direction parallel to the main surface 31c of the blade 31 and perpendicular to the advancing and retreating direction of the movable pressing unit 32 (33). The tilt adjustment mechanism 35 (37) can adjust the inclination of the pressing member 32a (33a) in a plane perpendicular to the main surface 31c of the blade 31 by rotating the pressing member 32a (33a) around the rotation axis C2 (C4) extending in a direction parallel to the main surface 31c of the blade 31 and perpendicular to the advancing and retreating direction of the movable pressing unit 32 (33) with the tilt adjustment pin 35a (37a) as the rotation center. Thus, the inclination of the pressing part 32a (33a) in the plane perpendicular to the main surface 31c of the blade 31 can be adjusted to appropriately correspond to the inclination of the substrate W in the plane perpendicular to the main surface 31c of the blade 31 (the inclination of the substrate W relative to the horizontal direction), thereby preventing the substrate W from being properly pressed by the pressing part 32a (33a) due to the inclination of the pressing part 32a (33a) in the plane perpendicular to the main surface 31c of the blade 31 not appropriately corresponding to the inclination of the substrate W in the plane perpendicular to the main surface 31c of the blade 31.

[0072] In addition, in the present embodiment, as described above, the blade 31 includes a plurality of blades 31 arranged in a direction perpendicular to the main surface 31c of the blade 31. In addition, the pressing member 32a (33a) presses the substrates W respectively arranged on the plurality of blades 31 together, and the tilt adjustment mechanism 35 (37) rotates the pressing member 32a (33a) about the rotation axis C2 (C4) extending in a direction parallel to the main surface 31c of the blade 31 and orthogonal to the advancing and retreating direction of the movable pressing unit 32 (33) with the tilt adjustment pin 35a (37a) as the rotation center, thereby being able to adjust the tilt of the pressing member 32a (33a) in a plane perpendicular to the main surface 31c of the blade 31 in a manner along the tilt formed by the respective outer peripheral edges Wa of the plurality of substrates W along the direction perpendicular to the main surface 31c of the blade 31. Thus, the inclination of the pressing member 32a (33a) in the plane perpendicular to the main surface 31c of the blade 31 can be adjusted to appropriately correspond to the inclination formed by the respective outer peripheries Wa of the plurality of substrates W along the direction perpendicular to the main surface 31c of the blade 31. As a result, in a structure in which the plurality of substrates W are pressed together by the pressing member 32a (33a), it is possible to suppress a situation in which the plurality of substrates W cannot be properly pressed by the pressing member 32a (33a) (the substrate W at one end can be pressed but the substrate W at the other end cannot be pressed) due to the inclination of the pressing member 32a (33a) in the plane perpendicular to the main surface 31c of the blade 31 not appropriately corresponding to the inclination formed by the respective outer peripheries Wa of the plurality of substrates W along the direction perpendicular to the main surface 31c of the blade 31.

[0073] In addition, in the present embodiment, as described above, the substrate holding robot 1 further includes a movable support unit 38 for supporting the substrate W to move forward and backward. In addition, the support parts 311 and 312 include a front support part 311 provided on the front end part 31a side of the blade 31, and a rear support part 312 provided on the base end part 31b side of the blade 31. In addition, the movable support unit 38 supports the substrate W together with the front support part 311, and the movable pressing units 32 and 33 (42, 43) include a first movable pressing unit 32 for pressing the substrate W supported by the front support part 311 and the movable support unit 38, and a second movable pressing unit 33 for pressing the substrate W supported by the front support part 311 and the rear support part 312. Thus, two (two types) of substrates W can be held by one blade 31. In addition, even when the substrate holding robot 1 includes two movable pressing units, namely the first movable pressing unit 32 and the second movable pressing unit 33, the inclination of the respective pressing parts 32a (33a) of the first movable pressing unit 32 and the second movable pressing unit 33 can be adjusted to an appropriate inclination.

[0074] In addition, in the present embodiment, as described above, the pressing member 32a (33a) includes a pair of pressing members 32a (33a). In addition, when viewed from a direction (Z direction) perpendicular to the main surface 31c of the blade 31, the pair of pressing members 32a (33a) are arranged at symmetrical positions with respect to the center line L1 extending in the forward and backward directions of the movable pressing unit 32 (33). In addition, the pair of pressing members 32a (33a) press the substrate W at symmetrical positions with respect to the center line L1 extending in the forward and backward directions of the movable pressing unit 32 (33). Therefore, unlike the case where the movable pressing unit 32 (33) presses the substrate W only by one pressing component 32a (33a) (the case where the substrate W is pressed at one point), by pressing the substrate W by a pair of pressing components 32a (33a) (pressing the substrate W at two points), the vector can be dispersed. Therefore, even when the substrate W is tightly attached to the blade 31, the substrate W can be pressed and appropriately moved by the pair of pressing components 32a (33a).

[0075] In addition, in the present embodiment, as described above, the substrate holding robot 1 further includes a movable support unit 38 including a support member 38a that can move forward and backward and supports the substrate W. In addition, the support member 38a includes a plurality of support members 38a arranged in a direction perpendicular to the main surface 31c of the blade 31 and respectively supporting a plurality of substrates W arranged in a direction perpendicular to the main surface 31c of the blade 31. In addition, the movable support unit 38 can replace the middle support member 38a in a state where the end support members 38a in the direction perpendicular to the main surface 31c of the blade 31 are mounted among the plurality of support members 38a. Thus, the middle support member 38a can be replaced in a state where the end support members 38a are mounted, so that the replacement operation of the middle support member 38a can be easily performed compared with a case where the plurality of support members 38a need to be removed at once.

[0076] In addition, in the present embodiment, as described above, the movable support unit 38 further includes a plurality of mounting members 38b to which the support members 38a are respectively mounted. In addition, the mounting member 38b of the middle support member 38a is fixed to the mounting member 38b of the end support member 38a via the fastening member 38c. In addition, the movable support unit 38 can replace the middle support member 38a in a state where the end support member 38a is mounted by removing the fastening member 38c to remove the mounting member 38b of the middle support member 38a from the mounting member 38b of the end support member 38a. Thus, the middle support member 38a can be replaced only by removing the fastening member 38c, so that the replacement operation of the middle support member 38a can be performed more easily.

[0077] [Modifications]

[0078] In addition, all points of the embodiments disclosed this time should be considered as illustrative and not limiting the present invention. The scope of the present invention is not limited by the description of the above-mentioned embodiments, but is indicated by the claims, and also includes the meaning equivalent to the claims and all changes (modifications) within the scope thereof.

[0079] For example, in the above embodiment, an example in which the arm is a horizontal multi-joint robot arm is shown, but the present invention is not limited to this. For example, the arm may be an arm other than a horizontal multi-joint robot arm such as a vertical multi-joint robot arm.

[0080] In addition, in the above-mentioned embodiment, an example in which a plurality of blades are provided on the substrate holding robot is shown, but the present invention is not limited to this. For example, a single blade may be provided on the substrate holding robot.

[0081] In addition, in the above-mentioned embodiment, an example in which four blades are provided on the substrate holding robot is shown, but the present invention is not limited to this. For example, a plurality of blades other than four may be provided on the substrate holding robot.

[0082] In addition, in the above-mentioned embodiment, an example in which the blade has a bifurcated shape is shown, but the present invention is not limited to this. For example, the blade may have a shape other than the bifurcated shape.

[0083] In the above embodiment, the blade is configured to support two substrates at different heights, but the present invention is not limited thereto. For example, the blade may be configured to support only one substrate (support the substrate at only one height).

[0084] In addition, in the above-mentioned embodiment, an example in which the movable support unit is provided is shown, but the present invention is not limited to this. For example, the movable support unit may not be provided.

[0085] In addition, in the above-mentioned embodiment, an example is shown in which the movable support unit includes a pair of support members, but the present invention is not limited to this. For example, the movable support unit may also include a single support member.

[0086] In addition, in the above-mentioned embodiment, an example is shown in which two pressing units, namely the first movable pressing unit and the second movable pressing unit, are provided, but the present invention is not limited thereto. For example, only one movable pressing unit may be provided.

[0087] In addition, in the above-mentioned embodiment, an example is shown in which the movable pressing unit includes a pair of pressing members, but the present invention is not limited to this. For example, the movable pressing unit may include only one pressing member.

[0088] In addition, in the above embodiment, an example is shown in which the tilt adjustment mechanism includes a tilt adjustment pin, but the present invention is not limited to this. For example, the tilt adjustment mechanism may include a tilt adjustment structure such as a tilt adjustment screw in addition to the tilt adjustment pin.

[0089] In addition, in the above-mentioned embodiment, an example of two tilt adjustment mechanisms is shown, namely, a tilt adjustment mechanism for adjusting the tilt of the pressing component in a plane parallel to the main surface of the blade, and a tilt adjustment mechanism for adjusting the tilt of the pressing component in a plane perpendicular to the main surface of the blade, but the present invention is not limited to this. In the present invention, only one of the tilt adjustment mechanism for adjusting the tilt of the pressing component in a plane parallel to the main surface of the blade and the tilt adjustment mechanism for adjusting the tilt of the pressing component in a plane perpendicular to the main surface of the blade may be provided.

[0090] Description of Reference Numerals

[0091] 1…substrate holding robot; 2…arm; 31…blade; 31a…front end portion; 31b…base end portion; 31c…main surface; 32…first movable pressing unit (movable pressing unit); 32a, 33a…pressing member; 33…second movable pressing unit (movable pressing unit); 34, 35, 36, 37…tilt adjustment mechanism; 34a, 36a…tilt adjustment pin (first tilt adjustment pin); 35a, 37a…tilt adjustment pin (second tilt adjustment pin); 38…movable supporting unit; 38a…supporting member; 38b…mounting member; 38c…fastening member; 100…substrate transport robot; 311…front supporting portion (supporting portion); 312…rear supporting portion (supporting portion); C1, C2, C3, C4…rotation axis; L1…center line; W…substrate; Wa…outer periphery of substrate.

Claims

1. A substrate holding robot, characterized in that: have: a blade including a support portion supporting a base plate; A movable pressing unit, comprising a pressing component, the pressing component can move forward and backward and is used to press the substrate; a tilt adjustment mechanism capable of adjusting the tilt of the pressing member; and a movable support unit, which can move forward and backward and is used to support the substrate, The support portion includes a front support portion provided on the front end side of the blade and a rear support portion provided on the base end side of the blade. The movable support unit supports the substrate together with the front support portion. The movable pressing unit includes a first movable pressing unit for pressing the substrate supported by the front supporting portion and the movable supporting unit, and a second movable pressing unit for pressing the substrate supported by the front supporting portion and the rear supporting portion.

2. A substrate holding robot, characterized in that: have: a blade including a support portion supporting a base plate; A movable pressing unit, comprising a pressing component, the pressing component can move forward and backward and is used to press the substrate; a tilt adjustment mechanism capable of adjusting the tilt of the pressing member; and A movable support unit includes a support member that can move forward and backward and is used to support the substrate. The supporting member includes a plurality of supporting members, the plurality of supporting members are arranged in a direction perpendicular to the main surface of the blade, and respectively support a plurality of substrates arranged in a direction perpendicular to the main surface of the blade. The movable support unit can replace the intermediate support member in a state where the support members at the end portions in the direction perpendicular to the main surface of the blade among the plurality of support members are mounted.

3. A substrate holding robot, characterized in that: have: a blade including a support portion supporting a base plate; a movable pressing unit, comprising a pressing member capable of moving forward and backward and used for pressing the substrate; and a tilt adjustment mechanism capable of adjusting the tilt of the pressing member, The tilt adjustment mechanism includes a tilt adjustment pin that supports the pressing member so as to be rotatable around a predetermined rotation axis, and the tilt of the pressing member can be adjusted by rotating the pressing member around the predetermined rotation axis with the tilt adjustment pin as a rotation center. The tilt adjustment pin includes: a first tilt adjustment pin provided in a manner extending in a direction perpendicular to the main surface of the blade; and a second tilt adjustment pin provided in a manner extending in a direction parallel to the main surface of the blade and orthogonal to the advancing and retreating direction of the movable pressing unit. The tilt adjustment mechanism can adjust the tilt of the pressing member in a plane parallel to the main surface of the blade by rotating the pressing member around a rotation axis extending in a direction perpendicular to the main surface of the blade with the first tilt adjustment pin as the rotation center, and The tilt adjustment mechanism can adjust the tilt of the pressing member in a plane perpendicular to the main surface of the blade by rotating the pressing member around a rotation axis extending in a direction parallel to the main surface of the blade and orthogonal to the advance and retreat direction of the movable pressing unit with the second tilt adjustment pin as the rotation center.

4. The substrate holding robot according to claim 3, characterized in that: The pressing component includes a pair of pressing components, The first tilt adjustment pins include a pair of first tilt adjustment pins corresponding to the pair of pressing members. The tilt adjustment mechanism adjusts the tilt of the pair of pressing parts in a plane parallel to the main surface of the blade in such a manner that the pair of pressing parts approach or move away from each other in the plane parallel to the main surface of the blade by rotating the pair of pressing parts respectively around a rotation axis extending in a direction perpendicular to the main surface of the blade with the pair of first tilt adjustment pins respectively as the rotation center.

5. The substrate holding robot according to claim 3, characterized in that: The blade includes a plurality of blades arranged in a direction perpendicular to a main surface of the blade, The pressing member presses the substrates respectively arranged on the plurality of blades together. The tilt adjustment mechanism rotates the pressing component around a rotation axis extending in a direction parallel to the main surface of the blade and orthogonal to the advance and retreat direction of the movable pressing unit, with the second tilt adjustment pin as the rotation center, thereby being able to adjust the tilt of the pressing component in a plane perpendicular to the main surface of the blade in a manner along the tilt formed by the respective outer peripheries of the plurality of substrates along the direction perpendicular to the main surface of the blade.

6. The substrate holding robot according to any one of claims 1 to 3, characterized in that: The pressing component includes a pair of pressing components, When observed from a direction perpendicular to the main surface of the blade, the pair of pressing parts are arranged at symmetrical positions relative to a center line extending in the advance and retreat direction of the movable pressing unit, and press the substrate at symmetrical positions relative to the center line extending in the advance and retreat direction of the movable pressing unit.

7. The substrate holding robot according to claim 2, characterized in that: The movable support unit further includes a plurality of mounting components on which the support components are respectively mounted. The mounting member of the middle supporting member is fixed to the mounting member of the supporting member at the end via a fastening member. The movable support unit can replace the intermediate support member with the end support member mounted thereon by removing the fastening member to remove the mounting member of the intermediate support member from the mounting member of the end support member.

8. A substrate handling robot, characterized in that: have: The substrate holding robot according to any one of claims 1 to 7; and An arm that enables the substrate holding robot to move.

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