A probe-based method for calibrating the coordinate system of an industrial robot tool.

By using a multi-iterative contact method between the probe calibration block and the probe, a high-precision industrial robot tool coordinate system is established, which solves the problem of low calibration accuracy in existing technologies and enables rapid replication and precise debugging of robot processes.

CN116117621BActive Publication Date: 2025-12-02SHANGHAI FANUC ROBOTICS
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Patent Information

Application Number
CN202310164172.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-02-24
Publication Date
2025-12-02
Estimated Expiration
2043-02-24

AI Technical Summary

Technical Problem

The existing industrial robot tool coordinate system has low calibration accuracy, relies on the operator's skill level, and is difficult to meet the requirements of grinding and deburring processes, and it is also difficult to achieve rapid replication of robot processes.

Method used

The probe calibration block is used to contact the probe, and a high-precision tool coordinate system is established through multiple iterations of correction. This includes multiple corrections of the probe user coordinate system and the initial tool coordinate system. A transition coordinate system is established using the center of the probe ball head, and the calibration accuracy is improved through multiple iterations of calibration.

Benefits of technology

It improves the calibration accuracy of the tool coordinate system, reduces the difficulty of operation, realizes high-precision calibration of the robot tool coordinate system, and supports the rapid replication of processes between different robots.

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Abstract

This invention discloses a probe-based method for calibrating the tool coordinate system of an industrial robot. The method includes: first, installing a probe calibration block on the end effector of robot 1; then, using the probe calibration block to contact a fixed probe to establish the robot's user coordinate system at the center of the probe's ball head; next, removing the probe calibration block, installing the electric spindle and tool calibration block, and ensuring the tool calibration block's axis coincides with the needle-shaped grinding tool's axis; the robot holding the tool calibration block in a specific posture contacts the fixed probe to acquire robot position data, and calibrating the robot's tool coordinate system using the acquired position data and related algorithms. This invention reduces operational difficulty, improves tool coordinate system calibration accuracy, establishes a high-precision tool coordinate system calibration method, and solves the problem of low calibration accuracy in robot tool coordinate systems.
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Description

Technical Field

[0001] This invention relates to the technical field of industrial robots, and in particular to a probe-based method for calibrating the coordinate system of industrial robot tools. Background Technology

[0002] Currently, most grinding and deburring applications on the market utilize handheld needle-shaped grinding heads from robots. The accuracy of the industrial robot's tool coordinate system significantly impacts the ease of debugging the grinding and deburring process. When the industrial robot's coordinate system reaches a certain level of accuracy, the debugging process for grinding and deburring will be greatly simplified, and even robot-based process replication will be possible.

[0003] Generally speaking, industrial robots are calibrated using the three-point or six-point method to establish their tool coordinate system. This relies on point-to-point manual teaching, and the calibration accuracy depends entirely on the operator's skill level. The highest accuracy achieved by manual calibration is only about 0.5mm.

[0004] Currently, most robot tool coordinate system calibrations have certain shortcomings:

[0005] The calibration accuracy depends on the operator's skill level, and the accuracy varies from person to person. Moreover, the calibration accuracy is relatively low, generally only reaching ±0.5mm, which is difficult to meet the general application of grinding and deburring processes.

[0006] In the 3C industry, the grinding and deburring process places a huge demand on industrial robots, but debugging batch robot processes is a challenge. Therefore, it is essential to invent a high-precision coordinate system calibration method, which would facilitate the replication of robot processes and reduce debugging difficulties. Summary of the Invention

[0007] In view of this, the purpose of the present invention is to provide a probe-based method for calibrating the coordinate system of industrial robot tools.

[0008] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0009] A probe-based method for calibrating the coordinate system of an industrial robot tool, comprising:

[0010] S1:

[0011] Install the probe calibration block onto the end effector of the robot, establish a transition tool coordinate system at the geometric center of the probe calibration block, and arrange the probe.

[0012] The robot holds the probe calibration block and touches the probe from three directions to obtain three touch points Pn(xn, yn, zn) in the robot's world coordinate system. The three touch points Pn(xn, yn, zn) include: P1(x1, y1, z1), P2(x2, y2, z2), and P3(x3, y3, z3).

[0013] A probe user coordinate system UF1(X, Y, Z, 0, 0, 0) is established at the center of the probe ball head of the probe. The direction of the probe user coordinate system is consistent with the direction of the robot world coordinate system, where X = x1 + l / 2 + R; Y = y1 + b / 2 + R; Z = z1 + h / 2 + R; where l, b, and h are the widths of the probe calibration block in the three directions; and R is the radius of the probe ball head.

[0014] S2:

[0015] The method for correcting the probe user coordinate system includes:

[0016] In the probe user coordinate system UF1(X, Y, Z, 0, 0, 0), the robot holds the probe calibration block and touches the probe along the X direction of the probe user coordinate system, recording the touch point P4(x4, y4, z4); the robot holds the probe calibration block, rotates the probe calibration block 180°, and then touches the probe along the -X direction of the probe user coordinate system, recording the point as P5(x5, y5, z5); the correction amount in the X direction of the probe user coordinate system is obtained as ΔX = x4 + x5;

[0017] In the probe user coordinate system UF1(X, Y, Z, 0, 0, 0), the robot holds the probe calibration block and touches the probe along the Y direction of the probe user coordinate system, recording the touch point P6(x6, y6, z6); the robot holds the probe calibration block, rotates the probe calibration block 180°, and then touches the probe along the -Y direction of the probe user coordinate system, recording the point P7(x7, y7, z7); the correction amount in the Y direction of the probe user coordinate system is obtained as ΔY = y6 + y7.

[0018] In the probe user coordinate system UF1(X, Y, Z, 0, 0, 0), the robot holds the probe calibration block and touches the probe along the -Z direction of the probe user coordinate system, and records the touch point P8(x8, y8, z8); the correction amount in the Z direction of the probe user coordinate system is obtained as ΔZ = z8 - h / 2 - R.

[0019] The corrected probe user coordinate system UF1'(X, Y, Z, 0, 0, 0) is obtained;

[0020] in,

[0021] S3:

[0022] Disassemble the probe calibration block and install the grinding electric spindle; install the tool calibration block to the end of the robot; manually establish the initial tool coordinate system at the center of the cylindrical bottom of the tool calibration block;

[0023] The initial tool coordinate system UT1(X, Y, Z, W, P, R) is defined as follows: X, Y, and Z of the initial tool coordinate system UT1 determine the origin position of the initial tool coordinate system; W of the initial tool coordinate system UT1 determines the rotation orientation of the X-axis of the initial tool coordinate system UT1; P of the initial tool coordinate system UT1 determines the rotation orientation of the Y-axis of the initial tool coordinate system UT1; and R of the initial tool coordinate system UT1 determines the rotation orientation of the Z-axis of the initial tool coordinate system UT1.

[0024] S4:

[0025] In the initial tool coordinate system and the corrected probe user coordinate system, the robot holds the tool calibration block and touches the probe. The initial position of the touch is automatically generated by the size data of the initial tool coordinate system calibration block. After the touch, the precise position values ​​of the touch point in the initial coordinate system are obtained as P1(xp1, yp1, zp1), P2(xp2, yp2, zp2), W1(xw1, yw1, zw1), and W2(xw2, yw2, zw2).

[0026] Calculate the correction amount of W in the initial tool coordinate system UT1. Δ W, calculate the correction amount of P in the initial tool coordinate system UT1. Δ P;

[0027] in,

[0028] in,

[0029] Correction amount Δ W and correction amount Δ P is compensated to the initial tool coordinate system UT1(X, Y, Z, W, P, R) to obtain the corrected tool coordinate system UT1'(X, Y, Z, W, P, R);

[0030] in,

[0031] Where ΔR = 0;

[0032] S5:

[0033] In the corrected probe user coordinate system, the robot holds the tool calibration block in a fixed posture and touches the probe from three directions to obtain the actual precise values ​​of the touch points X5(x5, y5, z5), X6(x6, y6, z6), and X7(x7, y7, z7). The actual center O(x, y, z) is calculated using X5(x5, y5, z5), X6(x6, y6, z6), and X7(x7, y7, z7). The actual center O(x, y, z) is compared with the theoretical center O0(0, 0, 0) to calculate the deviation value ΔX in the X direction and the deviation value ΔY in the Y direction of the tool coordinate system.

[0034] in,

[0035] in,

[0036] The correction amounts ΔX and ΔY are compensated to the corrected tool coordinate system UT1'(X, Y, Z, W, P, R) to obtain the corrected tool coordinate system UT1"(X, Y, Z, W, P, R);

[0037] in,

[0038] S6:

[0039] In the revised probe user coordinate system, the robot holds the tool calibration block and moves it from top to bottom, so that the lower surface touches the probe, and obtains the actual accurate value Z8(x8, y8, z8) of the touch point. If the actual tool coordinate system is not on the lower surface of the tool calibration block, the deviation value ΔZ in the Z direction of the tool coordinate system is calculated.

[0040] Where, ΔZ=z8-R;

[0041] The correction amount ΔZ is compensated to the tool coordinate system UT1"(X,Y,Z,W,P,R) after the second correction to obtain the tool coordinate system UT1"'(X,Y,Z,W,P,R) after the third correction;

[0042] in,

[0043] In the above-mentioned probe-based industrial robot tool coordinate system calibration method, in S2, P1(x1, y1, z1), P2(x2, y2, z2), and P3(x3, y3, z3) are all automatically generated by any teaching point P0(x0, y0, z0) where the probe calibration block touches the probe and the size data of the probe calibration block;

[0044] Among them, xn=x0+Δxn; yn=y0+Δyn; zn=z0+Δzn;

[0045] Where Δxn, Δyn, and Δzn are the positional deviations between the touch point and the teaching point.

[0046] In the above-described probe-based industrial robot tool coordinate system calibration method, in step S2, after correcting the implementation of the probe user coordinate system correction method, the probe user coordinate system correction method is repeated multiple times for multiple iterative corrections until the values ​​of ΔX, ΔY, and ΔZ of the probe user coordinate system are less than a first set threshold, at which point the iteration stops.

[0047] In the probe-based industrial robot tool coordinate system calibration method described above, in step S4, multiple iterative corrections are performed until the values ​​of ΔP and ΔW of the initial tool coordinate system UT1 are less than a second set threshold, at which point the iteration stops.

[0048] In the above-mentioned probe-based industrial robot tool coordinate system calibration method, in S5, multiple iterative corrections are performed until the values ​​of ΔX and ΔY of the corrected tool coordinate system UT1' are less than a third set threshold, at which point the iteration stops.

[0049] In the above-mentioned probe-based industrial robot tool coordinate system calibration method, in S6, multiple iterative corrections are performed until the ΔZ value of the tool coordinate system UT1” after the second correction is less than the fourth set threshold, at which point the iteration stops.

[0050] In the above-mentioned probe-based industrial robot tool coordinate system calibration method, the first set threshold, the second set threshold, the third set threshold, and the fourth set threshold are all within ±0.05mm.

[0051] The present invention, by employing the above-mentioned technology, has the following positive effects compared with the prior art:

[0052] (1) This invention reduces the difficulty of operation, improves the calibration accuracy of the tool coordinate system, establishes a high-precision tool coordinate system calibration method, and solves the problem of low calibration accuracy of robot tool coordinate system.

[0053] (2) The high-precision robot coordinate system of the present invention can realize the rapid replication of trajectories between different robots, thereby achieving rapid replication of processes. Attached Figure Description

[0054] Figure 1 This is a schematic diagram of a probe-based robot tool coordinate system calibration method;

[0055] Figure 2 This is a schematic diagram of the probe calibration block;

[0056] Figure 3 This is a schematic diagram of the tool calibration block;

[0057] Figure 4 This is a schematic diagram of the probe user coordinate system generation method;

[0058] Figure 5 This is a schematic diagram of the method for generating points in the probe user coordinate system;

[0059] Figure 6 This is a schematic diagram of the probe user coordinate system correction method;

[0060] Figure 7 This is the coordinate system correction process;

[0061] Figure 8 This is a schematic diagram illustrating the method for generating the coordinate system of a grinding tool;

[0062] Figure 9 This is a schematic diagram of the P-value correction for the coordinate system of the grinding tool;

[0063] Figure 10 This is a schematic diagram of the W-value correction for the coordinate system of the grinding tool;

[0064] Figure 11 This is a schematic diagram of the XY value correction for the coordinate system of the grinding tool;

[0065] Figure 12 This is a schematic diagram of the Z-value correction for the coordinate system of the grinding tool;

[0066] In the attached diagram: 1. Robot; 2. Electric spindle; 3. Needle-shaped grinding tool; 4. Tool calibration block; 5. Probe; 6. Probe calibration block; 7. Probe ball head. Detailed Implementation

[0067] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0068] In the description of this invention, it should be understood that the orientation or positional relationship indicated by terms such as "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "lateral", and "vertical" are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this invention, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, and therefore should not be construed as a limitation of this invention.

[0069] Please see Figures 1 to 12 The diagram illustrates a preferred embodiment of a probe-based industrial robot tool coordinate system calibration method.

[0070] The overall scheme of this invention is as follows: First, the probe calibration block 6 is installed on the end effector of the robot 1. The robot user coordinate system is established at the center of the probe ball head 7 of the probe 5 by contacting the probe calibration block 6 with the fixed probe 5. Then, the probe calibration block 6 is removed, and the electric spindle 2 and tool calibration block 4 are installed, keeping the axis of the tool calibration block 4 coincident with the axis of the needle-shaped grinding tool 3. The robot 1 holds the tool calibration block 4 in a certain posture and contacts the fixed probe 5 to obtain the robot position. The robot tool coordinate system is calibrated by the obtained position data and related algorithms.

[0071] This invention requires the probe 5 to have high sensitivity; the calibration block is divided into a probe calibration block 6 and a tool calibration block 4, and the perpendicularity, flatness, parallelism and other form and position tolerances and dimensional tolerances of each surface have high machining accuracy; the key dimensions of the probe calibration block 6 are the length l, width b and height h of the bottom square; the key dimension of the tool calibration block 4 is the radius r of the bottom cylinder, and at the same time, it is necessary to ensure that the axis of the mounting shaft coincides with the axis of the bottom cylinder.

[0072] The industrial robot tool coordinate system calibration method of the present invention specifically includes the following steps:

[0073] S1:

[0074] Install probe calibration block 6 onto the end effector of robot 1, and establish a transition tool coordinate system at the geometric center of probe calibration block 6; please refer to Figure 4 As shown, fix probe 5 in a suitable position;

[0075] Please see Figure 5 As shown, robot 1 holds probe calibration block 6 and touches probe 5 from three directions respectively, obtaining three touch points Pn(xn, yn, zn) in the robot world coordinate system. The three touch points Pn(xn, yn, zn) include: P1(x1, y1, z1), P2(x2, y2, z2), and P3(x3, y3, z3).

[0076] Establish a probe user coordinate system UF1(X, Y, Z, 0, 0, 0) at the center of the probe ball head 7 of probe 5. The direction of the probe user coordinate system is consistent with the direction of the robot world coordinate system. Where X = x1 + l / 2 + R; Y = y1 + b / 2 + R; Z = z1 + h / 2 + R; where l, b, and h are the widths of the probe calibration block 6 in the three directions; and R is the radius of the probe ball head 7 of probe 5.

[0077] S2:

[0078] The method for correcting the probe user coordinate system includes:

[0079] In the probe user coordinate system UF1(X, Y, Z, 0, 0, 0), robot 1 holds probe calibration block 6 and touches probe 5 along the X direction of the probe user coordinate system, recording the touch point P4(x4, y4, z4); robot 1 holds probe calibration block 6 and rotates probe calibration block 6 180° and then touches probe 5 along the -X direction of the probe user coordinate system, recording the point P5(x5, y5, z5); the correction amount in the X direction of the probe user coordinate system is obtained as ΔX = x4 + x5;

[0080] Please see Figure 6 As shown, in the probe user coordinate system UF1(X, Y, Z, 0, 0, 0), robot 1 holds probe calibration block 6 and touches probe 5 along the Y direction of the probe user coordinate system, recording the touch point P6(x6, y6, z6); robot 1 holds probe calibration block 6 and rotates probe calibration block 6 180° and then touches probe 5 along the -Y direction of the probe user coordinate system, recording the point P7(x7, y7, z7); the correction amount in the Y direction of the probe user coordinate system is obtained as ΔY=y6+y7.

[0081] In the probe user coordinate system UF1(X, Y, Z, 0, 0, 0), robot 1 holds probe calibration block 6 and touches probe 5 along the -Z direction of the probe user coordinate system, and records the touch point P8(x8, y8, z8); the correction amount in the Z direction of the probe user coordinate system is obtained as ΔZ=z8-h / 2-R.

[0082] The corrected probe user coordinate system UF1'(X, Y, Z, 0, 0, 0) is obtained;

[0083] in,

[0084] After revising the method for correcting the probe user coordinate system, repeat the method multiple times for iterative correction until the values ​​of ΔX, ΔY, and ΔZ of the probe user coordinate system are less than the first set threshold, at which point the iteration stops.

[0085] S3:

[0086] Please see Figure 8 As shown, disassemble the probe calibration block 6, install the grinding electric spindle 2, and install the tool calibration block 4 to the end of the robot 1; manually establish the initial tool coordinate system at the center of the cylindrical bottom of the tool calibration block 4;

[0087] The initial tool coordinate system is UT1(X, Y, Z, W, P, R), where X, Y, and Z of the initial tool coordinate system UT1 determine the position of the origin of the initial tool coordinate system; W of the initial tool coordinate system UT1 determines the rotational orientation of the X-axis of the initial tool coordinate system UT1; P of the initial tool coordinate system UT1 determines the rotational orientation of the Y-axis of the initial tool coordinate system UT1; and R of the initial tool coordinate system UT1 determines the rotational orientation of the Z-axis of the initial tool coordinate system UT1.

[0088] It should be noted that in this step and the following steps, the orientation of the coordinate system must first be corrected, and the orientation correction must be performed in the order of R, P, W; after the orientation correction is completed, the X, Y, and Z parameters are then corrected. Since the tool shown in this invention is a cylindrical tool, the R orientation, i.e., the rotation in the Z direction, has little impact on practical applications and therefore does not need to be corrected.

[0089] S4:

[0090] Please see Figure 9 , Figure 10 As shown, in the initial tool coordinate system and the corrected probe user coordinate system, the robot 1 holds the tool calibration block 4 and touches the probe 5. The initial position of the touch is automatically generated by the size data of the initial tool coordinate system calibration block. After the touch, the precise position values ​​of the touch point in the initial coordinate system are obtained as P1(xp1, yp1, zp1), P2(xp2, yp2, zp2), W1(xw1, yw1, zw1), and W2(xw2, yw2, zw2).

[0091] Calculate the correction amount ΔW of W in the initial tool coordinate system UT1, and calculate the correction amount ΔP of P in the initial tool coordinate system UT1;

[0092] in,

[0093] in,

[0094] The correction amounts ΔW and ΔP are compensated to the initial tool coordinate system UT1(X, Y, Z, W, P, R) to obtain the corrected tool coordinate system UT1'(X, Y, Z, W, P, R).

[0095] in,

[0096] Where ΔR = 0;

[0097] The iteration is repeated until the values ​​of ΔP and ΔW in the initial tool coordinate system UT1 are less than the second set threshold, at which point the iteration stops.

[0098] S5:

[0099] Please see Figure 11 As shown, in the corrected probe user coordinate system, the robot 1 holds the tool calibration block 4 in a fixed posture and touches the probe 5 from three directions to obtain the actual precise values ​​of the touch point X5(x5, y5, z5), X6(x6, y6, z6), and X7(x7, y7, z7). The actual center O(x, y, z) is calculated using X5(x5, y5, z5), X6(x6, y6, z6), and X7(x7, y7, z7). The actual center O(x, y, z) is compared with the theoretical center O0(0, 0, 0) to calculate the deviation value ΔX in the X direction and the deviation value ΔY in the Y direction of the tool coordinate system.

[0100] in,

[0101] in,

[0102] The correction amounts ΔX and ΔY are compensated to the corrected tool coordinate system UT1'(X, Y, Z, W, P, R) to obtain the corrected tool coordinate system UT1"(X, Y, Z, W, P, R);

[0103] in,

[0104] The process is iterated and corrected multiple times until the values ​​of ΔX and ΔY in the corrected tool coordinate system UT1' are less than the third set threshold, at which point the iteration stops.

[0105] S6:

[0106] Please see Figure 12 As shown, in the probe user coordinate system after the correction, the robot 1 holds the tool calibration block 4 and moves it from top to bottom, so that the lower surface touches the probe 5, and obtains the actual accurate value Z8 (x8, y8, z8) of the touch point. If the actual tool coordinate system is not on the lower surface of the tool calibration block 4, the deviation value ΔZ in the Z direction of the tool coordinate system is calculated.

[0107] Where, ΔZ=z8-R;

[0108] The correction amount ΔZ is compensated to the tool coordinate system UT1"(X,Y,Z,W,P,R) after the second correction to obtain the tool coordinate system UT1"'(X,Y,Z,W,P,R) after the third correction;

[0109] in,

[0110] The process is iterated and corrected multiple times until the value of ΔZ in the corrected tool coordinate system UT1” is less than the fourth set threshold, at which point the iteration stops.

[0111] In the above-mentioned probe-based industrial robot tool coordinate system calibration method, in S2, P1(x1, y1, z1), P2(x2, y2, z2), and P3(x3, y3, z3) are all automatically generated by any teaching point P0(x0, y0, z0) where the probe calibration block 6 touches the probe 5 and the size data of the probe calibration block 6.

[0112] Among them, xn=x0+Δxn; yn=y0+Δyn; zn=z0+Δzn;

[0113] Where Δxn, Δyn, and Δzn are the positional deviations between the touch point and the teaching point.

[0114] Furthermore, as a preferred embodiment, the first set threshold, the second set threshold, the third set threshold, and the fourth set threshold are all within ±0.05mm.

[0115] At this point, the calibration and correction of the grinding tool coordinate system has been completed. The tool coordinate system has been established at the center of the lower surface of the cylindrical calibration block, i.e., on the axis of the needle-shaped grinding tool 3. Furthermore, based on the threshold value set during each correction, the accuracy of the tool coordinate system can be improved to within ±0.05mm.

[0116] The above description is merely a preferred embodiment of the present invention and does not limit the implementation and protection scope of the present invention. Those skilled in the art should realize that any equivalent substitutions and obvious changes made based on the description and illustrations of the present invention should be included within the protection scope of the present invention.

Claims

1. A probe-based method for calibrating the coordinate system of an industrial robot tool, characterized in that, include: S1: Install the probe calibration block onto the end effector of the robot, establish a transition tool coordinate system at the geometric center of the probe calibration block, and arrange the probe. The robot holds the probe calibration block and touches the probe from three directions to obtain three touch points Pn(xn, yn, zn) in the robot's world coordinate system. The three touch points Pn(xn, yn, zn) include: P1(x1, y1, z1), P2(x2, y2, z2), and P3(x3, y3, z3). A probe user coordinate system UF1 (X, Y, Z, 0, 0, 0) is established at the center of the probe's ball head. The direction of the probe user coordinate system is consistent with the direction of the robot world coordinate system, where X = x1 + l / 2 + R; Y = y1 + b / 2 + R; Z = z1 + h / 2 + R; where l, b, and h are the widths of the probe calibration block in the three directions; and R is the radius of the probe's ball head. S2: The method for correcting the probe user coordinate system includes: In the probe user coordinate system UF1 (X, Y, Z, 0, 0, 0), the robot holds the probe calibration block and touches the probe along the X direction of the probe user coordinate system, recording the touch point P4 (x4, y4, z4); the robot holds the probe calibration block, rotates the probe calibration block 180°, and then touches the probe along the -X direction of the probe user coordinate system, recording the point as P5 (x5, y5, z5); the correction amount in the X direction of the probe user coordinate system is obtained as ΔX = x4 + x5; In the probe user coordinate system UF1 (X, Y, Z, 0, 0, 0), the robot holds the probe calibration block and touches the probe along the Y direction of the probe user coordinate system, recording the touch point P6 (x6, y6, z6); the robot holds the probe calibration block, rotates the probe calibration block 180°, and then touches the probe along the -Y direction of the probe user coordinate system, recording the point P7 (x7, y7, z7); the correction amount in the Y direction of the probe user coordinate system is obtained as ΔY = y6 + y7. In the probe user coordinate system UF1 (X, Y, Z, 0, 0, 0), the robot holds the probe calibration block and touches the probe along the -Z direction of the probe user coordinate system, recording the touch point P8 (x8, y8, z8); the correction amount in the Z direction of the probe user coordinate system is obtained as ΔZ = z8 - h / 2 - R. The corrected probe user coordinate system UF1' (X, Y, Z, 0, 0, 0) is obtained. where, UF1’(X, Y, Z, 0, 0, 0) = UF1(X, Y, Z, 0, 0, 0) × ; S3: Disassemble the probe calibration block, install the grinding electric spindle, and install the tool calibration block to the end of the robot; manually establish the initial tool coordinate system at the center of the cylindrical bottom of the tool calibration block; The initial tool coordinate system UT1 (X, Y, Z, W, P, R) is defined as follows: X, Y, and Z of the initial tool coordinate system UT1 determine the origin position of the initial tool coordinate system; W of the initial tool coordinate system UT1 determines the rotation orientation of the X-axis of the initial tool coordinate system UT1; P of the initial tool coordinate system UT1 determines the rotation orientation of the Y-axis of the initial tool coordinate system UT1; and R of the initial tool coordinate system UT1 determines the rotation orientation of the Z-axis of the initial tool coordinate system UT1. S4: In the initial tool coordinate system and the corrected probe user coordinate system, the robot holds the tool calibration block and touches the probe. The initial position of the touch is automatically generated by the size data of the initial tool coordinate system calibration block. After the touch, the precise position values ​​of the touch point in the initial coordinate system are obtained as P1(xp1, yp1, zp1), P2(xp2, yp2, zp2), W1(xw1, yw1, zw1), and W2(xw2, yw2, zw2). Calculate the correction amount of W in the initial tool coordinate system UT1. W, calculate the correction amount of P in the initial tool coordinate system UT1. P; in, ; in, ; Correction amount W and correction amount P is compensated to the initial tool coordinate system UT1(X, Y, Z, W, P, R) to obtain the corrected tool coordinate system UT1'(X, Y, Z, W, P, R). Among them, UT1' (X, Y, Z, W, P, R) = UT1 (X, Y, Z, W, P, R) × ;in, =0; S5: In the corrected probe user coordinate system, the robot holds the tool calibration block in a fixed posture and touches the probe from three directions to obtain the actual precise values ​​of the touch points: X5(x5, y5, z5), X6(x6, y6, z6), and X7(x7, y7, z7). The actual center O(x, y, z) is calculated using X5(x5, y5, z5), X6(x6, y6, z6), and X7(x7, y7, z7). The actual center O(x, y, z) is then compared with the theoretical center O0(0, 0, 0) to calculate the deviation value in the X direction of the tool coordinate system. The deviation value ΔY in the Y direction; in, ; ; in, ; ; ; ; Correction amount The correction amount ΔY is compensated to the corrected tool coordinate system UT1'(X,Y,Z,W,P,R) to obtain the corrected tool coordinate system UT1''(X,Y,Z,W,P,R). where, UT1’’(X, Y, Z, W, P, R) = UT1’(X, Y, Z, W, P, R) × ; S6: In the revised probe user coordinate system, the robot holds the tool calibration block and moves it from top to bottom, so that the lower surface touches the probe, and obtains the actual accurate value Z8(x8, y8, z8) of the touch point. If the actual tool coordinate system is not on the lower surface of the tool calibration block, the deviation value ΔZ in the Z direction of the tool coordinate system is calculated. in, ; Correction amount The tool coordinate system is compensated to the corrected tool coordinate system UT1'' (X, Y, Z, W, P, R) to obtain the corrected tool coordinate system UT1''' (X, Y, Z, W, P, R) after three corrections. where, UT1’’’(X, Y, Z, W, P, R) = UT1’’(X, Y, Z, W, P, R) × .

2. The probe-based industrial robot tool coordinate system calibration method according to claim 1, characterized in that, In S2, P1(x1, y1, z1), P2(x2, y2, z2), and P3(x3, y3, z3) are all automatically generated from any teaching point P0(x0, y0, z0) where the probe calibration block touches the probe and the size data of the probe calibration block. Among them, xn=x0+Δxn; yn=y0+Δyn; zn=z0+Δzn; Where Δxn, Δyn, and Δzn are the positional deviations between the touch point and the teaching point.

3. The probe-based industrial robot tool coordinate system calibration method according to claim 1, characterized in that, In S2, after correcting the method for modifying the probe user coordinate system, the method for modifying the probe user coordinate system is repeated multiple times for multiple iterative modifications until the values ​​of ΔX, ΔY, and ΔZ of the probe user coordinate system are less than a first set threshold, at which point the iteration stops.

4. The probe-based industrial robot tool coordinate system calibration method according to claim 3, characterized in that, In S4, multiple iterations are performed until the values ​​of ΔP and ΔW in the initial tool coordinate system UT1 are less than the second set threshold, at which point the iteration stops.

5. The probe-based industrial robot tool coordinate system calibration method according to claim 4, characterized in that, In S5, multiple iterative corrections are performed until the corrected tool coordinate system UT1' is reached. The iteration stops when the value of ΔY is less than the third set threshold.

6. The probe-based industrial robot tool coordinate system calibration method according to claim 5, characterized in that, In S6, multiple iterative corrections are performed until the tool coordinate system UT1'' after the second correction is reached. The iteration stops when the value is less than the fourth set threshold.

7. The probe-based industrial robot tool coordinate system calibration method according to claim 6, characterized in that, The first set threshold, the second set threshold, the third set threshold, and the fourth set threshold are all within ±0.05mm.

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