A novel ion source radio frequency neutralizer

Abstract

The present invention discloses a novel ion source radio frequency neutralizer, comprising: a box body, an insulating ionization cavity is arranged inside the box body, the insulating ionization cavity is arranged in the middle of the box body, one end of the insulating ionization cavity is provided with an ion emission hole, the other end of the insulating ionization cavity is connected with an electrode connector, the end of the electrode connector is connected with an air inlet pipe, an inflation cavity is connected to the air inlet pipe, a connecting pipe is connected to the inflation cavity, a control valve is installed on the connecting pipe, and the end of the connecting pipe is connected with a storage tank; an inflation seat, an inflation pipe and inflation holes are arranged inside the inflation cavity; the electron generating device is composed of a stainless steel outer shell, a tungsten wire and an electron emission hole; the tungsten wire is connected with a power supply, the tungsten wire is arranged inside the stainless steel outer shell, and the stainless steel outer shell is connected with negative electricity; a cooling box is fixed on the outer side of the box body, a cooling pipe is placed inside the cooling box, and the inside of the cooling box outside the cooling pipe is filled with a coolant; the novel ion source radio frequency neutralizer is convenient to use and improves the service life.

Description

Technical Field

[0001] The present invention relates to the technical field of neutralizers, and particularly to a new type of ion source radio frequency neutralizer. Background Art

[0002] In existing coating equipment, most thin film structures have requirements for firmness and adhesion. If they do not meet the standards, phenomena such as film peeling will occur. In order to improve this problem, auxiliary deposition of a high-energy wide beam ion source must be carried out, and the ion source has extremely strict requirements for neutralization. If the neutralization is not good, it will cause arcing in the vacuum environment, strengthen the ion repulsion force, and affect the basic and appearance structures of the film. Traditional electronic neutralization methods include thermionic cathode neutralizers, hollow cathode neutralizers, and compound neutralizers, but these also have certain drawbacks in terms of pollution and usage costs. Therefore, radio frequency ion source neutralizers have greatly improved and performance has been enhanced in these aspects. The existing radio frequency ion source neutralizer mainly consists of a holding electrode, a radio frequency coil, a ceramic cup, an electrode (also known as an electron emission electrode), an inflation seat, an electrode connector, etc. However, the electron emission electrode of the existing structure is a cup-shaped body and has a single notch structure. Due to the single notch structure, there are deficiencies such as low radio frequency energy utilization rate, resulting in low ionization efficiency.

[0003] The following problems also exist when using this existing technical solution:

[0004] 1. Low control accuracy;

[0005] 2. Short service life;

[0006] Therefore, improvements need to be made to address the above problems. Summary of the Invention

[0007] The present invention provides the following technical solutions: The purpose of the present invention is to provide a new type of ion source radio frequency neutralizer to solve the problems of many defects, low control accuracy, and short service life of the new type of ion source radio frequency neutralizer in the current market proposed in the above background art.

[0008] To achieve the above purpose, the present invention provides the following technical solutions: A new type of ion source radio frequency neutralizer, comprising:

[0009] A box body, an insulating ionization cavity is arranged inside the box body, the insulating ionization cavity is arranged in the middle of the box body, one end of the insulating ionization cavity is provided with an ion exit hole, the other end of the insulating ionization cavity is connected to an electrode connector, the end of the electrode connector is connected to an air delivery pipe, an inflation cavity is connected to the air delivery pipe, a connecting pipe is connected to the inflation cavity, a control valve is installed on the connecting pipe, and the end of the connecting pipe is connected to a storage tank, and an inert gas is stored in the storage tank;

[0010] Inflatable cavity, an inflatable seat, an inflatable tube and an inflation hole are arranged in the inflatable cavity. The inflatable seat is fixed in the inflatable cavity. The inflatable tube is vertically connected to one side of the inflatable seat. The inflatable tube extends into the insulating ionization cavity. An inflation hole is arranged at the end of the inflatable tube, and the inflation hole is arranged in the insulating ionization cavity;

[0011] Electron generating device, which consists of a stainless-steel shell, a tungsten wire and an electron emission hole; the tungsten wire is connected to a power supply, the tungsten wire is arranged inside the stainless-steel shell, and the stainless-steel shell is connected with negative electricity;

[0012] Cooling box, the cooling box is fixed on the outside of the box body. A cooling tube is placed in the cooling box, and the cooling box outside the cooling tube is filled with coolant.

[0013] Preferably, the ion emission hole is fixed on the box body in a horn shape. An electron generating device is arranged outside the ion emission hole, and a substrate is arranged at the other end of the electron generating device.

[0014] Preferably, the insulating ionization cavity is made of ceramic material and is cup-shaped.

[0015] Preferably, a radio frequency coil is arranged outside the insulating ionization cavity, and the radio frequency coil is wound outside the insulating ionization cavity.

[0016] Preferably, there are two groups of the electron generating devices, which are respectively arranged on both sides of the ion emission hole.

[0017] Preferably, an electron emission hole is arranged on the stainless-steel shell, and the side of the electron emission hole faces the ion emission hole.

[0018] Preferably, the cooling tube is a spiral copper tube.

[0019] Preferably, the upper end of the cooling tube is connected with a drain pipe, and the lower end of the cooling tube is provided with a water inlet pipe and is connected to a low-temperature water source.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows: A storage box is arranged inside the novel ion source radio frequency neutralizer, which can store inert gas and is convenient for the use of the neutralizer; Electron generators are arranged on both sides of the ion emission hole. The electron generators will release electrons, which play a role in neutralizing the ion source and increase the control accuracy; A cooling box is arranged on the outside of the box body. The cooling box can use cold water to reduce the temperature of the box body surface, avoiding the influence of high temperature on the service life of the neutralizer; The novel ion source radio frequency neutralizer is convenient to use and improves the service life.

[0021] 1. An electron generator is arranged, and the electron generator will release electrons, which play a role in neutralizing the ion source and increase the control accuracy.

[0022] 2. A cooling box is provided, which can use cold water to reduce the temperature of the box body surface, avoiding the influence of high temperature on the service life of the neutralizer, and thus improving the service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a schematic front view sectional structure diagram of the present invention;

[0024] Figure 2 It is a schematic structure diagram of the inflation chamber of the present invention;

[0025] Figure 3 It is a schematic structure diagram of the electron generating device of the present invention;

[0026] Figure 4 It is a schematic structure diagram of the cooling box of the present invention.

[0027] In the figure: 1, box body; 2, electrode connector; 3, insulating ionization cavity; 4, radio frequency coil; 5, cooling box; 6, ion emission hole; 7, substrate; 8, electron generating device; 9, gas transmission pipe; 10, inflation chamber; 11, connecting pipe; 12, control valve; 13, storage tank; 14, inflation seat; 15, inflation pipe; 16, inflation hole; 17, stainless steel shell; 18, tungsten wire; 19, electron emission hole; 20, coolant; 21, water outlet pipe; 22, cooling pipe; 23, water inlet pipe. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0028] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0029] Please refer to Figures 1-4 , the present invention provides a technical solution: a new type of ion source radio frequency neutralizer, including:

[0030] Box 1, an insulating ionization cavity 3 is arranged inside Box 1. The insulating ionization cavity 3 is arranged in the middle of Box 1. One end of the insulating ionization cavity 3 is provided with an ion emission hole 6. The other end of the insulating ionization cavity 3 is connected to an electrode connector 2. The end of the electrode connector 2 is connected to an air supply pipe 9. An inflation cavity 10 is connected to the air supply pipe 9. A connecting pipe 11 is connected to the inflation cavity 10. A control valve 12 is installed on the connecting pipe 11. The end of the connecting pipe 11 is connected to a storage tank 13. An inert gas is stored in the storage tank 13. The control valve 12 is used to control the switch of the storage tank 13; The ion emission hole 6 is fixed on Box 1 in a trumpet shape. An electron generating device 8 is arranged outside the ion emission hole 6. The other end of the electron generating device 8 is provided with a substrate 7; The insulating ionization cavity 3 is made of ceramic material. The insulating ionization cavity 3 is cup-shaped and has good insulation performance. A radio frequency coil 4 is arranged outside the insulating ionization cavity 3. The radio frequency coil 4 is wound outside the insulating ionization cavity 3;

[0031] Inflation cavity 10, an inflation seat 14, an inflation pipe 15 and inflation holes 16 are arranged inside the inflation cavity 10. The inflation seat 14 is fixed inside the inflation cavity 10. The inflation pipe 15 is vertically connected to one side of the inflation seat 14. The inflation pipe 15 extends into the insulating ionization cavity 3. The end of the inflation pipe 15 is provided with inflation holes 16. The inflation holes 16 are arranged inside the insulating ionization cavity 3 and are used to inflate the insulating ionization cavity 3;

[0032] Electron generating device 8, the electron generating device 8 is composed of a stainless steel shell 17, a tungsten wire 18 and an electron emission hole 19. There are two groups of electron generating devices 8, which are respectively arranged on both sides of the ion emission hole 6; The tungsten wire 18 is connected to a power supply. The tungsten wire 18 is arranged inside the stainless steel shell 17. The stainless steel shell 17 is connected to negative electricity. The stainless steel shell 17 is provided with an electron emission hole 19, and the electron emission hole 19 faces the side of the ion emission hole 6;

[0033] Cooling box 5, the cooling box 5 is fixed outside Box 1. A cooling pipe 22 is placed inside the cooling box 5. The inside of the cooling box 5 outside the cooling pipe 22 is filled with a coolant 20, which is used to increase the cooling rate; The cooling pipe 22 is a spiral copper pipe. The upper end of the cooling pipe 22 is connected to a drain pipe. The lower end of the cooling pipe 22 is provided with a water inlet pipe 23 and is connected to a low-temperature water source, which is used to increase the cooling effect.

[0034] Refer to Figure 1 , Figures 2, 3, and 4 show that Box 1 is used to support the ion source radio frequency neutralizer. The radio frequency coil 4 will ionize by plan and then generate ions; The cooling box 5 can cool Box 1, increasing the efficiency and service life of Box 1.

[0035] Working principle: When using this new type of ion source radio frequency neutralizer, the power supply connects high-frequency energy to the radio frequency coil 4. The radio frequency coil 4 generates oscillations to ionize the inert gas filled in the insulating ionization cavity 3. The gas filling seat 14 fills the insulating ionization cavity 3 with inert gas, causing ions to be generated in the insulating ionization cavity 3. In its initial state, it is in a plasma state. Subsequently, a negative electric field is applied to the electrode to bombard the electrode surface with ions to generate electrons. The cooling box 5 is used to reduce the temperature of the box body 1, thereby increasing the service life of the box body 1 and the neutralizer. The electron generator releases electrons to neutralize the ion source.

[0036] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A novel ion source radio frequency neutralizer, characterized in that Comprising: A box body (1), inside which an insulating ionization cavity (3) is arranged. The insulating ionization cavity (3) is arranged in the middle of the box body (1). One end of the insulating ionization cavity (3) is provided with an ion emission hole (6). The other end of the insulating ionization cavity (3) is connected to an electrode connector (2). The end of the electrode connector (2) is connected to an air supply pipe (9). An inflation cavity (10) is connected to the air supply pipe (9). A connecting pipe (11) is connected to the inflation cavity (10). A control valve (12) is installed on the connecting pipe (11). The end of the connecting pipe (11) is connected to a storage tank (13), and an inert gas is stored in the storage tank (13). An inflation cavity (10), inside which an inflation seat (14), an inflation pipe (15) and inflation holes (16) are arranged. The inflation seat (14) is fixed inside the inflation cavity (10). The inflation pipe (15) is vertically connected to one side of the inflation seat (14). The inflation pipe (15) extends into the insulating ionization cavity (3). The end of the inflation pipe (15) is provided with inflation holes (16), and the inflation holes (16) are arranged inside the insulating ionization cavity (3). An electron generating device (8), which is composed of a stainless steel shell (17), a tungsten wire (18) and an electron emission hole (19); the tungsten wire (18) is connected to a power supply. The tungsten wire (18) is arranged inside the stainless steel shell (17), and the stainless steel shell (17) is connected to a negative charge. A cooling box (5), which is fixed on the outside of the box body (1). A cooling pipe (22) is placed inside the cooling box (5), and a coolant (20) is filled inside the cooling box (5) outside the cooling pipe (22).

2. The novel ion source radio frequency neutralizer according to claim 1, wherein: The ion emission hole (6) is fixed on the box body (1) in a horn shape. An electron generating device (8) is arranged outside the ion emission hole (6), and a substrate (7) is arranged at the other end of the electron generating device (8).

3. A novel ion source radio frequency neutralizer according to claim 1, characterized in that: The insulating ionization cavity (3) is made of ceramic material and is cup-shaped.

4. A novel ion source radio frequency neutralizer according to claim 1, characterized in that: A radio frequency coil (4) is arranged outside the insulating ionization cavity (3), and the radio frequency coil (4) is wound around the outside of the insulating ionization cavity (3).

5. A novel ion source radio frequency neutralizer according to claim 1, characterized in that: There are two groups of the electron generating devices (8), which are respectively arranged on both sides of the ion emission hole (6).

6. A novel ion source radio frequency neutralizer according to claim 1, characterized in that: The stainless steel shell (17) is provided with an electron emission hole (19), and the electron emission hole (19) faces the side of the ion emission hole (6).

7. A novel ion source radio frequency neutralizer according to claim 1, characterized in that: The cooling pipe (22) is a spiral copper pipe.

8. A novel ion source radio frequency neutralizer according to claim 1, characterized in that: The upper end of the cooling pipe (22) is connected to a drain pipe, and the lower end of the cooling pipe (22) is provided with a water inlet pipe (23) and is connected to a low-temperature water source.

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