Head drive device

Abstract

A magnetic head driving device (10A) comprises a magnetic head supporting portion (16) supporting a magnetic head component (17), a first beam (21), a second beam (22), a first piezoelectric unit (51) comprising a pair of piezoelectric elements (51a, 51b), and a second piezoelectric unit (61) comprising a pair of piezoelectric elements (61a, 61b). When a voltage is applied to the piezoelectric elements (51a, 51b) of the first piezoelectric unit (51), the piezoelectric elements (51a, 51b) are deformed, and the distal end (21b) of the first beam (21) moves. The piezoelectric elements (61a, 61b) of the second piezoelectric unit (61) are also deformed by the applied voltage, so that the distal end (22b) of the second beam (22) moves in the same direction as the distal end (21b) of the first beam (21).

Description

Technical Field

[0001] The present invention relates to a magnetic head driving device of a data storage device using a magnetic tape as a recording medium. Background Art

[0002] Data storage devices using magnetic tape as a recording medium are known. Examples of data storage devices are described in US 10971184 B (Patent Document 1) and JP 2020-129424 A (Patent Document 2). These data storage devices include a housing, a magnetic tape contained in the housing, a tape winding mechanism, a head assembly, etc. Data is magnetically recorded in the tape. The head assembly includes a magnetic head, a head drive device that causes the magnetic head to move relative to the tape, etc. The elements arranged in the magnetic head perform access such as reading data recorded in the tape and data wiring.

[0003] The magnetic head driving device of the data storage device described in Patent Document 1 includes a magnetic head stack assembly and a voice coil motor for moving the magnetic head stack assembly. A magnetic head arm including a spring function is provided at the far end of the magnetic head stack assembly. The magnetic head is mounted on the magnetic head arm. The magnetic head is moved in the width direction of the magnetic tape by the voice coil motor.

[0004] The magnetic head driving device of the data storage device described in Patent Document 2 includes a coarse actuator and a fine actuator, corresponding to the increase in recording density of magnetic tape. The coarse actuator moves the magnetic head with a large stroke. The fine actuator moves the magnetic head with a relatively small stroke. A stepper motor or a voice coil motor (VCM) is used for the coarse actuator. A piezoelectric element such as lead zirconate titanate (PZT) can be used for the fine actuator.

[0005] In the magnetic head drive device of Patent Document 1, a small magnetic head is moved in the width direction of the magnetic tape by a voice coil motor. In this type of conventional device, the magnetic tape may be damaged by contact with the magnetic head. In addition, in the conventional device, it is difficult to stably maintain the magnetic head at a predetermined position relative to the magnetic tape moving at a high speed. In another conventional device, a large magnetic head having a length corresponding to the width of the magnetic tape can be used. However, the large magnetic head is heavy. Therefore, it is difficult to stably support the magnetic head by a magnetic head arm having a suspension function.

[0006] The magnetic head driving device of Patent Document 2 includes a coarse motion actuator composed of a voice coil motor and a fine motion actuator composed of a piezoelectric element. This type of conventional device has some problems. For example, the structure is complicated and the number of parts increases.

[0007] A hard disk drive using a magnetic disk as a recording medium is known. In the case of a hard disk drive, an air bearing is formed between the surface of the magnetic disk and the magnetic head. In the magnetic head drive device of Patent Document 2, a magnetic tape is used as a recording medium. Therefore, in order to prevent the magnetic tape from being damaged during fast winding or fast rewinding, a structure in which the magnetic tape contacts the magnetic head is adopted in the magnetic head drive device of Patent Document 2. However, in this conventional device, the structure of the magnetic head drive device is more complicated.

[0008] An object of the present invention is to provide a head driving device which can stably hold a head component and function as a microactuator. Summary of the invention

[0009] According to one embodiment, a magnetic head driving device includes a magnetic head supporting portion supporting a magnetic head component, a first beam, a first base side hinge portion, a first magnetic head side hinge portion, a second beam, a second base side hinge portion, a second magnetic head side hinge portion, a first piezoelectric unit, and a second piezoelectric unit. The magnetic head driving device includes a first and a second base facing each other with a space in between. The magnetic head supporting portion is arranged between the first base and the second base. The first beam extends from the first base to the magnetic head supporting portion. The first base side hinge portion connects the base of the first beam to the first base. The first magnetic head side hinge portion connects the distal end of the first beam to the magnetic head supporting portion.

[0010] The second beam is arranged on the opposite side of the first beam, with the magnetic head support portion in between. The second beam extends from the second base to the magnetic head support portion. The second base side hinge portion connects the base of the second beam to the second base. The second magnetic head side hinge portion connects the distal end of the second beam to the magnetic head support portion. The first piezoelectric unit is arranged between the first base and the base of the first beam. The first piezoelectric unit displaces the distal end of the first beam by deformation when a voltage is applied. The second piezoelectric unit is arranged between the second base and the base of the second beam. The second piezoelectric unit displaces the distal end of the second beam by deformation when a voltage is applied.

[0011] The magnetic head driving device of the present invention can stably hold the magnetic head component and play the role of a micro-actuator.

[0012] The width of the first base-side hinge portion may be smaller than the width of the base of the first beam, and the width of the first head-side hinge portion may be smaller than the width of the distal end of the first beam. The width of the second base-side hinge portion may be smaller than the width of the base of the second beam, and the width of the second head-side hinge portion may be smaller than the width of the distal end of the second beam.

[0013] According to an embodiment, the head driving device is tapered. Here, tapered means that the planar shape of the first beam is a shape in which the width decreases from the base of the first beam to the distal end of the first beam. In addition, the planar shape of the second beam is a shape in which the width decreases from the base of the second beam to the distal end of the second beam.

[0014] In the magnetic head driving device, the first element accommodating portion may be provided on both sides of the first base side hinge portion. A pair of first piezoelectric elements constituting the first piezoelectric unit is provided in the first element accommodating portion. The second element accommodating portion may be provided on both sides of the second base side hinge portion. A pair of second piezoelectric elements constituting the second piezoelectric unit is provided in the second element accommodating portion.

[0015] According to an embodiment, one of the first piezoelectric elements may be disposed in the first element accommodating portion with a predetermined polarity. The other of the first piezoelectric elements is disposed in the first element accommodating portion so that it rotates to have an opposite polarity. One of the paired second piezoelectric elements may be disposed in the second element accommodating portion with a predetermined polarity. The other of the paired second piezoelectric elements is disposed in the second element accommodating portion so that it rotates to have an opposite polarity.

[0016] According to an embodiment, Figure 3 As shown in the exemplary embodiment, the magnetic head driving device may include a first suspension and a second suspension made of a metal plate member. The first suspension includes a first beam, a first base side hinge portion and a first magnetic head side hinge portion. The second suspension includes a second beam, a second base side hinge portion and a second magnetic head side hinge portion. The second suspension forms a linear symmetric shape with the first suspension relative to an axis passing through the center of the magnetic head supporting portion.

[0017] For example, Fig.10 As shown, a magnetic head driving device including a first suspension and a second suspension may include a first curved portion and a second curved portion. The first curved portion is formed in the first suspension. The second curved portion is formed in the second suspension. The first curved portion is bent at an angle less than or equal to 90° relative to the magnetic head supporting portion in the thickness direction of the plate member. The second curved portion is bent at the same angle as the first curved portion relative to the magnetic head supporting portion on the same side as the first curved portion.

[0018] The head driving device of each of some embodiments may include a damping member disposed in at least a portion of the first beam, the second beam, and the head supporting portion, such as Figures 5 to 9 shown.

[0019] like Figures 14 to 17 As shown, a first microactuator assembly and a second microactuator assembly can be provided. The first microactuator assembly includes a first head support, a first suspension and a second suspension. The second microactuator assembly includes a second head support, a third suspension and a fourth suspension. These first to fourth suspensions can be composed of a common metal plate component and can include a substantially common structure.

[0020] The first suspension and the second suspension are line symmetrical with respect to an axis passing through the center of the first head support portion. The third suspension and the fourth suspension are line symmetrical with respect to an axis passing through the center of the second head support portion. The first head support portion and the second head support portion may be connected to each other by a connection portion.

[0021] For example, with Figures 18 to 22 Similar to the three-dimensional magnetic head driving device shown in , a first curved portion, a second curved portion, a third curved portion and a fourth curved portion may be provided. The first curved portion is formed in the first suspension. The first curved portion is bent at an angle less than or equal to 90° relative to the first magnetic head supporting portion in the thickness direction of the plate member. The second curved portion is formed in the second suspension. The second curved portion is bent at the same angle as the first curved portion relative to the first magnetic head supporting portion on the same side as the first curved portion.

[0022] A third curved portion is formed in the third suspension. The third curved portion is bent at the same angle as the first curved portion relative to the second magnetic head supporting portion and on the same side as the first curved portion. A fourth curved portion is formed in the fourth suspension. The fourth curved portion is bent at the same angle as the second curved portion relative to the second magnetic head supporting portion and on the same side as the second curved portion.

[0023] Other purposes and advantages of the present invention will be explained in the following description, and some of these other purposes and advantages will become obvious through the following description, or these purposes and advantages can be learned through practice of the present invention. The purposes and advantages of the present invention are realized and obtained by the means and combinations specifically pointed out below. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the summary of the invention given above and the detailed description given below, serve to explain the principles of the invention.

[0025] Figure 1 is a plan view of the magnetic head driving device according to the first embodiment.

[0026] Figure 2 is along Figure 1 A cross-sectional view of the head drive device taken along line F2-F2.

[0027] Figure 3 yes Figure 1 A plan view of a plate component of a head drive device is shown.

[0028] Figure 4 is along Figure 1 A partial cross-sectional view of the head drive device of the F4-F4 line.

[0029] Figure 5is a plan view of the head driving device according to the second embodiment, in which the damping member is indicated by hatching.

[0030] Figure 6 is along Figure 5 A cross-sectional view of the head drive device along the F6-F6 line.

[0031] Figure 7 is a plan view of the head driving device according to the third embodiment, in which the damping member is indicated by hatching.

[0032] Figure 8 is a plan view of the head driving device according to the fourth embodiment, in which each damping member is indicated by hatching.

[0033] Fig. 9 is a plan view of the head driving apparatus according to the fifth embodiment, in which the damping member is indicated by hatching.

[0034] Fig.10 2 is a side view of a magnetic head driving device including a first curved portion and a second curved portion.

[0035] Fig.11 It is a diagram showing the vibration characteristics of 0-1.5 kHz of the head driving device according to the second to fifth embodiments.

[0036] Fig.12 It is a diagram showing the vibration characteristics of the head driving device according to the second to fifth embodiments at 8-9.5 kHz.

[0037] Fig.13A 1 is a plan view showing a head driving device including the damping member of Comparative Example 1.

[0038] Fig. 13B 1 is a plan view showing a head driving device including a damping member according to Comparative Example 2.

[0039] Fig.14 It is a three-dimensional view of a magnetic head driving device according to the sixth embodiment.

[0040] Fig.15 yes Fig.14 A plan view of the head drive device shown.

[0041] Fig.16 It is a plan view of a magnetic head driving device according to the seventh embodiment.

[0042] Fig.17 It is a plan view of a magnetic head driving device according to the eighth embodiment.

[0043] Fig.18 is a front view schematically showing a data storage device including a head driving device according to a ninth embodiment.

[0044] Fig.19 yes Fig.18 A perspective view of an actuator assembly of a data storage device is shown.

[0045] Fig. 20 yes Fig.19 An exploded perspective view of the actuator assembly is shown.

[0046] Fig.21 It is along Fig.19 Observed in the direction indicated by arrow F21 Fig.19 A diagram of a head drive apparatus with an actuator assembly is shown.

[0047] Fig. 22 yes Fig.19 A three-dimensional view of the head drive device and the terminal part shown.

[0048] Fig.23 It is shown Fig.19 The vibration characteristics of the head drive device shown in Fig.14 FIG. 4 is a diagram showing the vibration characteristics of the head drive device.

[0049] Fig.24 is a plan view of a plate member including a connecting portion for connecting two head supporting portions.

[0050] Fig.25 It is a plan view of a magnetic head driving device according to a tenth embodiment.

[0051] Fig.26 is a plan view of a plate member including a connection portion for connecting three head supporting portions. DETAILED DESCRIPTION

[0052] [First embodiment]( Figures 1 to 4 )

[0053] This manual refers to Figure 1-4 A head driving device 10A according to the first embodiment will be described.

[0054] Figure 1 It is a plan view of the head driving device 10A. Figure 2 is along Figure 1 1 is a cross-sectional view of the head driving device 10A taken along line F2-F2. The head driving device 10A includes a plate member 11 formed of metal (eg, stainless steel). Figure 3 : is a plan view of the plate member 11. The thickness of the plate member 11 is 0.1 mm to 0.3 mm (for example, 0.15 mm). For example, the length L1 of the plate member 11 is 20 mm. However, the length L1 may be different from this example.

[0055] The frame portion 12 is formed in a portion of the plate member 11. The frame portion 12 includes a first base portion 13 and a second base portion 14. The first base portion 13 faces the second base portion 14 with a space therebetween. The first base portion 13 and the second base portion 14 are connected to each other by a bridge portion 15. Therefore, the relative positions of the first base portion 13 and the second base portion 14 are substantially unchanged. For example, the distance L2 between the first base portion 13 and the second base portion 14 (e.g., Figure 3 However, the distance L2 may be different from this example.

[0056] A head support portion 16 is provided at the center between the first base portion 13 and the second base portion 14. The head support portion 16 supports a head component 17 used as a magnetic head. The head component 17 may be called a head rod or a slider. The head component 17 is fixed to the head support portion 16 by fixing means such as an adhesive.

[0057] The magnetic head unit 17 is arranged on a magnetic tape 18 (in Figure 1 The magnetic head component 17 extends in the width direction T1 (indicated by the double-dotted dashed line portion in FIG. 1 ). The magnetic head component 17 is an example of a recording medium. The magnetic head component 17 is provided with an element capable of converting a magnetic signal into an electrical signal, such as an MR (magnetic resistivity) element. Through these elements, the magnetic tape 18 is accessed for data writing or reading.

[0058] The head driving device 10A includes a first beam 21 and a second beam 22. The first beam 21 extends from the first base 13 to the head support 16. The second beam 22 is provided on the 180-degree opposite side of the first beam 21, crossing the intervening head support 16. The second beam 22 extends from the second base 14 to the head support 16.

[0059] Figure 1 FIG. 1 is a plan view of the magnetic head driving device 10A. Figure 1 As shown in FIG. 1 , the planar shape of the first beam 21 is a taper whose width decreases from the base 21a to the distal end 21b. In this specification, the planar shape refers to the shape (plan view) of the first beam 21 when the first beam 21 is viewed from a direction opposite to the plane of the plate member 11. The planar shape of the second beam 22 is also a taper whose width decreases from the base 22a of the second beam 22 to the distal end 22b.

[0060] A first base-side hinge portion 31 is formed between the base portion 21a of the first beam 21 and the first base portion 13. The width W1 of the first base-side hinge portion 31 (eg Figure 3 The width W2 of the base 21a of the first beam 21 is smaller than that of the base 21a of the first beam 21. The base 21a of the first beam 21 is connected to the first base 13 through the first base side hinge 31. The first base side hinge 31 is formed with element accommodating portions 32 and 33 consisting of recessed portions on both sides.

[0061] A first head-side hinge portion 35 is provided between the distal end 21b of the first beam 21 and the head support portion 16. Slits 36 and 37 are formed on both sides of the first head-side hinge portion 35. The width of the first head-side hinge portion 35 is equal to or smaller than the width of the distal end 21b of the first beam 21. The distal end 21b of the first beam 21 is connected to the head support portion 16 through the first head-side hinge portion 35.

[0062] A second base-side hinge portion 41 is provided between the base portion 22a of the second beam 22 and the second base 14. The width W3 (eg Figure 3 The width W4 of the base 22a of the second beam 22 is smaller than that of the base 22a of the second beam 22. The base 22a of the second beam 22 is connected to the second base 14 through the second base side hinge 41. The second base side hinge 41 is formed with element accommodating portions 42 and 43 consisting of recessed portions on both sides.

[0063] A second magnetic head side hinge portion 45 is provided between the distal end 22b of the second beam 22 and the magnetic head support portion 16. Slits 46 and 47 are formed on both sides of the second magnetic head side hinge portion 45. The width of the second magnetic head side hinge portion 45 is equal to or smaller than the width of the distal end 22b of the second beam 22. The distal end 22b of the second beam 22 is connected to the magnetic head support portion 16 through the second magnetic head side hinge portion 45.

[0064] A first piezoelectric unit 51 is provided between the first base 13 and the base 21a of the first beam 21. The first piezoelectric unit 51 has a pair of first piezoelectric elements 51a, 51b. These piezoelectric elements 51a, 51b are formed of a piezoelectric body such as lead zirconate titanate (PZT). The piezoelectric body has the characteristic of deforming under the state of applying voltage. The first piezoelectric elements 51a and 51b are respectively inserted into the first element accommodating portions 32 and 33. These first piezoelectric elements 51a and 51b are fixed to the plate member 11 by an electrically insulating adhesive.

[0065] Figure 4 is along Figure 1 A cross-sectional view of the F4-F4 line. Figure 4 An element accommodating portion 32 and a piezoelectric element 51a are shown. The thickness t1 of the piezoelectric element 51a is less than the thickness t2 of the plate member 11. For example, the thickness t1 of the piezoelectric element 51a is 0.1 mm. However, the thickness t1 may be different from this example. A first electrode 55 made of a metal film is formed on the surface of the piezoelectric element 51a. A second electrode 56 made of a metal film is formed on the other surface of the piezoelectric element 51a. When a voltage is applied to these electrodes 55 and 56, the piezoelectric element 51a deforms (expands and contracts) based on the direction of current flow. The direction in which the piezoelectric elements 51a and 51b expand and contract is the length direction of the first beam 21. The piezoelectric elements 51a and 51b have a common structure.

[0066] The piezoelectric element 51a is accommodated in the element accommodating portion 32 with a predetermined polarity, thereby expanding or contracting based on the polarity of the applied voltage. The polarity is positive or negative. The piezoelectric element 51b is also accommodated in the element accommodating portion 32 with a predetermined polarity, thereby expanding or contracting based on the polarity of the applied voltage. Figure 1 In the embodiment ( Figure 1 ), the piezoelectric element 51a and the piezoelectric element 51b are housed in the element housing portion 33 so that they face opposite directions. Therefore, the piezoelectric element 51a and the piezoelectric element 51b have opposite polarities.

[0067] When the piezoelectric element 51a contracts by applying a voltage and the piezoelectric element 51b expands, the distal end 21b of the first beam 21 moves in the first direction (by Figure 1 When the piezoelectric element 51a expands and the piezoelectric element 51b contracts, the distal end 21b of the first beam 21 moves in the second direction ( Figure 1 The displacement of the magnetic head Y2 is shown in FIG.

[0068] A second piezoelectric unit 61 is provided between the second base 14 and the base 22a of the second beam 22. The second piezoelectric unit 61 includes a pair of second piezoelectric elements 61a and 61b. These piezoelectric elements 61a and 61b are inserted into the second element accommodating portions 42 and 43, respectively. These piezoelectric elements 61a and 61b are fixed to the plate member 11 by an electrically insulating adhesive. The second piezoelectric elements 61a and 61b are composed of a piezoelectric body, and their structure is the same as that of the first piezoelectric elements 51a and 51b.

[0069] Figure 1 The piezoelectric element 61 of the second piezoelectric unit 61 shown is accommodated in the element accommodating portion 42 with a predetermined polarity, and expands or contracts according to the polarity of the applied voltage. The piezoelectric element 61b is accommodated in the element accommodating portion 43 so that it faces the opposite direction of the piezoelectric element 61a, thereby having a polarity opposite to that of the piezoelectric element 61a. The piezoelectric element 61b is indicated by hatching.

[0070] When the piezoelectric element 61a contracts by applying a voltage and the piezoelectric element 61b expands, the distal end 22b of the second beam 22 moves in the first direction (by Figure 1 When the piezoelectric element 61a expands and the piezoelectric element 61b contracts, the distal end 22b of the second beam 22 is displaced in the second direction (indicated by the arrow Y2). When the distal end 22b of the second beam 22 is displaced in the same direction as the distal end 21b of the first beam 21, the magnetic head component 17 moves in the first direction Y1 or the second direction Y2.

[0071] The first beam 21, the first base side hinge 31 and the first head side hinge 35 constitute the first suspension SP1. The second beam 22, the second base side hinge 41 and the second head side hinge 45 constitute the second suspension SP2. These suspensions SP1 and SP2, the head support 16, the first piezoelectric unit 51 and the second piezoelectric unit 61 constitute the microactuator assembly MA1.

[0072] The first suspension SP1 and the second suspension SP2 are connected with respect to an axis C2 (eg, Figure 3 The first beam 21 and the second beam 22 extend in a direction perpendicular to the axis C2. The first suspension SP1 and the second suspension SP2 are formed of a common plate member 11 made of stainless steel. The thickness of the first suspension SP1 is equal to the thickness of the second suspension SP2.

[0073] [Second to fifth embodiments]( Figures 5 to 9 )

[0074] Figure 5 A head driving device 10B according to a second embodiment is shown. Figure 6 is along Figure 5 The head drive device 10B is a cross-sectional view of the head drive device 10B taken along the line F6-F6. The head drive device 10B includes a damping member DM1. Since the other structures of the head drive device 10A and the head drive device 10B of the first embodiment are common, the description thereof is omitted by adding common reference numerals to the common structural elements.

[0075] like Figure 6 As shown, the damping member DM1 includes a viscoelastic material layer 70 and a restraining plate 71. The viscoelastic material layer 70 is formed of a polymer material that can exert anti-stickiness when deformed. For example, the polymer material is an acrylic resin and has stickiness. The restraining plate 71 is formed of a synthetic resin such as polyester. The restraining plate 71 overlaps the viscoelastic material layer 70.

[0076] Figure 5 The damping member DM1 shown in FIG. 1 covers the head support portion 16, the entire portion of the first beam 21, and the entire portion of the second beam 22. Figure 5 In FIG. 1 , the damping component DM1 is indicated by hatching. Figure 6 As shown, the damping member DM1 also covers the slits 36 , 37 , 46 and 47 .

[0077] Figure 710C according to the third embodiment is shown. The head driving device 10C further includes a damping member DM2. For convenience, the damping member DM2 is indicated by hatching. The damping member DM2 is disposed at a position midway from the head supporting portion 16 in the length direction of the first beam 21 and at a position midway from the head supporting portion 16 in the length direction of the second beam 22. Since the other structures of the head driving device 10B of the second embodiment and the head driving device 10C of the third embodiment are common, the description thereof is omitted by adding common reference numerals to the common structural elements. The damping member DM2 is disposed in at least a portion of the head supporting portion 16 and the first beam 21 and the second beam 22.

[0078] Figure 8 A head driving device 10D according to a fourth embodiment is shown. The head driving device 10D includes a pair of damping members DM3. The damping members DM3 are respectively provided in the first beam 21 and the second beam 22. No damping members are provided in the head supporting portion 16. When no damping members are provided in the head supporting portion 16, each damping member may be attached to the opposite side or back side of each of the first beam 21 and the second beam 22. Since the other structures of the head driving device 10B of the second embodiment and the head driving device 10D of the fourth embodiment are common, the description thereof is omitted by adding common reference numerals to the common structural elements.

[0079] Fig. 9 A head driving device 10E according to a fifth embodiment is shown. The damping member DM4 provided in this head driving device 10E covers the head supporting portion 16, the entire portion of the first beam 21, and the entire portion of the second beam 22. None of the slits 36, 37, 46, and 47 is covered by the damping member DM4. Since the other structures of the head driving device 10B of the second embodiment and the head driving device 10E of the fifth embodiment are common, the description thereof is omitted by adding common reference numerals to the common structural elements.

[0080] Fig.10 The head driving device shown includes a first bent portion 75 formed in the first suspension SP1 and a second bent portion 76 formed in the second suspension SP2. The first bent portion 75 is bent at an angle θ1 less than or equal to 90° in the thickness direction of the plate member 11 with respect to the head supporting portion 16. The second bent portion 76 is bent at the same angle θ2 as the first bent portion 75 with respect to the head supporting portion 16 on the same side as the first bent portion 75. Fig.10 The head actuator shown includes curved portions 75 and 76, and has a three-dimensional shape like a mountain.

[0081] Fig.11The vibration characteristics of the first mode of 0 to 1.5 kHz of the magnetic head drive devices 10A to 10E according to the first to fifth embodiments are shown. Fig.11 In the figure, the horizontal axis represents frequency and the vertical axis represents gain.

[0082] exist Fig.11 In FIG. 1 , the dotted line N1 represents the vibration characteristics of the magnetic head driving device 10A of the first embodiment without the damping member. Fig.11 In the figure, a dashed line DM1 indicates a head driving device 10B including a damping member DM1 according to the second embodiment ( Figure 5 ) The double-dashed line DM2 shows the vibration characteristics of the head drive device 10C including the damping member DM2 according to the third embodiment. Figure 7 ) The thin line DM3 shows the vibration characteristics of the head drive device 10D ( Figure 8 ). The solid line DM4 shows the vibration characteristics of the head drive device 10E ( Fig. 9 )’s vibration characteristics.

[0083] like Fig.11 As shown by the middle dotted line N1, the resonance peak of the magnetic head driving device of the first embodiment not including the damping member is steep. In contrast, in each of the magnetic head driving devices of the second to fifth embodiments including the damping member, the resonance peak is gentle. In particular, the magnetic head driving device 10E ( Fig. 9 ) has the smallest resonance peak. Therefore, regarding the vibration characteristics of 0 to 1.5 kHz, the damping member DM4 ( Fig. 9 ) may be preferred.

[0084] Fig.12 The vibration characteristics of the first mode of 8 to 9.5 kHz of the magnetic head drive devices 10A to 10E of the first to fifth embodiments are shown. Fig.12 In the figure, the horizontal axis represents frequency and the vertical axis represents gain.

[0085] exist Fig.12 In FIG. 1 , a dotted line N1 represents the vibration characteristics of the head driving device 10A of the first embodiment which does not include a damping member. Fig.12 In the figure, a dashed line DM1 indicates a head driving device 10B including a damping member DM1 according to the second embodiment ( Figure 5 ) The double-dashed line DM2 shows the vibration characteristics of the head drive device 10C ( Figure 7 ). The thin line DM3 shows the vibration characteristics of the head drive device 10D ( Figure 8). The solid line DM4 shows the vibration characteristics of the head drive device 10E ( Fig. 9 )’s vibration characteristics.

[0086] like Fig.12 As shown by the middle dotted line N1, the resonance peak value of the magnetic head driving device of the first embodiment not including the damping member is large. In contrast, in each of the magnetic head driving devices of the second to fifth embodiments including the damping member, the resonance peak value is small. In particular, the resonance mode ( Figure 5 ) and the resonance mode ( Figure 7 ) are each substantially flat. For this reason, regarding the vibration characteristics of 8 to 9.5 kHz, the damping member DM1 of the second embodiment and the damping member DM2 of the third embodiment may be preferable.

[0087] [Comparative Example 1] Fig.13A )

[0088] Fig.13A A magnetic head driving device 10F according to Comparative Example 1 is shown. The damping member DM5 provided in this magnetic head driving device 10F includes a first extending portion 81 and a second extending portion 82. The first extending portion 81 extends from the first base side hinge portion 31 to the first base 13. The second extending portion 82 extends from the second base side hinge portion 41 to the second base 14. The other structures of the magnetic head driving device 10B of the second embodiment and the magnetic head driving device 10F of Comparative Example 1 are common.

[0089] The vibration characteristics of the head actuator 10F of Comparative Example 1 are the same as those of the head actuator 10B of the second embodiment. However, the damping member DM5 of Comparative Example 1 has the disadvantages of being complicated in shape and heavy compared to the damping member DM1 of the second embodiment.

[0090] [Comparative Example 2] Fig. 13B )

[0091] Fig. 13B There is shown a head actuator 10G according to Comparative Example 2. The damping member DM6 provided in this head actuator 10G includes an extension 83 covering the first piezoelectric unit 51 and an extension 84 covering the second piezoelectric unit 61. The other structures of the head actuator 10B of the second embodiment and the head actuator 10G of Comparative Example 2 are common.

[0092] Regarding the vibration characteristics of the head drive device 10G of Comparative Example 2, the gain of the first mode is large compared with the head drive device 10B of the second embodiment. In addition, the damping member DM6 of Comparative Example 2 has a disadvantage of being heavier than the damping member DM1 of the second embodiment. These factors indicate that the damping member should preferably be provided so as not to cover the base side hinge portion 31 or 41, or the piezoelectric unit 51 or 61.

[0093] [Sixth embodiment] Fig.14 and Fig.15 )

[0094] This manual refers to Fig.14 and Fig.15 A head driving device 10H according to a sixth embodiment will be described. Fig.14 It is a perspective view of the magnetic head driving device 10H. Fig.15 It is a plan view of the head driving device 10H.

[0095] The head driving device 10H includes a first microactuator assembly MA1 and a second microactuator assembly MA2. The first microactuator assembly MA1 is constructed in the same manner as the microactuator assembly MA1 of the first embodiment ( Figures 1 to 4 ). To this end, the second microactuator assembly MA2 is explained below.

[0096] Fig.14 and Fig.15 The second microactuator assembly MA2 shown includes a third suspension SP3 and a fourth suspension SP4. The third suspension SP3 and the first suspension SP1 include a common structure. The fourth suspension SP4 and the second suspension SP2 include a common structure.

[0097] A first head supporting portion 16 and a second head supporting portion 116 are provided at the center between the first base portion 13 and the second base portion 14. The second head supporting portion 116 is provided at another position in the length direction of the head component 17 relative to the first head supporting portion 16. The head component 17 is supported by the first head supporting portion 16 and the second head supporting portion 116. The head component 17 is fixed to the first head supporting portion 16 and the second head supporting portion 116 by fixing means such as adhesive.

[0098] The second microactuator assembly MA2 includes a second head support portion 116, a third beam 121, and a fourth beam 122. The third beam 121 extends from the first base portion 13 to the second head support portion 116. The fourth beam 122 is disposed on the 180-degree opposite side of the third beam 121, crossing the intervening second head support portion 116. The fourth beam 122 extends from the second base portion 14 to the second head support portion 116.

[0099] Fig.15The third beam 121 has a planar shape that is a taper whose width decreases from the base 121a to the distal end 121b of the third beam 121. The fourth beam 122 also has a planar shape that is a taper whose width decreases from the base 122a to the distal end 122b of the fourth beam 122.

[0100] The third base side hinge portion 131 is formed between the base portion 121a of the third beam 121 and the first base portion 13. The width of the third base side hinge portion 131 is smaller than the width of the base portion 121a of the third beam 121. The base portion 121a of the third beam 121 is connected to the first base portion 13 through the third base side hinge portion 131. Element accommodating portions 132 and 133 constituted by recessed portions are formed on both sides of the third base side hinge portion 131.

[0101] A third magnetic head side hinge portion 135 is provided between the distal end 121b of the third beam 121 and the second magnetic head support portion 116. Slits 136 and 137 are formed on both sides of the third magnetic head side hinge portion 135. The width of the third magnetic head side hinge portion 135 is equal to or smaller than the width of the distal end 121b of the third beam 121. The distal end 121b of the third beam 121 is connected to the second magnetic head support portion 116 through the third magnetic head side hinge portion 135.

[0102] A fourth base side hinge portion 141 is provided between the base portion 122a of the fourth beam 122 and the second base portion 14. The width of the fourth base side hinge portion 141 is smaller than the width of the base portion 122a of the fourth beam 122. The base portion 122a of the fourth beam 122 is connected to the second base portion 14 through the fourth base side hinge portion 141. Element accommodating portions 142 and 143 formed by recesses are formed on both sides of the fourth base side hinge portion 141.

[0103] A fourth head-side hinge portion 145 is provided between the distal end 122b of the fourth beam 122 and the second head support portion 116. Slits 146 and 147 are formed on both sides of the fourth head-side hinge portion 145. The width of the fourth head-side hinge portion 145 is equal to or smaller than the width of the distal end 122b of the fourth beam 122. The distal end 122b of the fourth beam 122 is connected to the second head support portion 116 through the fourth head-side hinge portion 145.

[0104] The third piezoelectric unit 151 is disposed between the first base 13 and the base 121a of the third beam 121. The third piezoelectric unit 151 includes a pair of piezoelectric elements 151a and 151b. The piezoelectric elements 151a and 151b are formed of a piezoelectric body such as lead zirconate titanate (PZT). The piezoelectric body deforms when a voltage is applied. The piezoelectric elements 151a and 151b are inserted into the element accommodating portions 132 and 133, respectively. The piezoelectric elements 151a and 151b are fixed to the plate member 11 by an electrically insulating adhesive.

[0105] The piezoelectric elements 151a and 151b expand or contract based on the polarity (positive or negative) of the applied voltage. For example, when the piezoelectric element 151a expands and the piezoelectric element 151b contracts, the distal end 121b of the third beam 121 is displaced in the first direction. When the piezoelectric element 151a contracts and the piezoelectric element 151b expands, the distal end 121b of the third beam 121 is displaced in the second direction.

[0106] The fourth piezoelectric unit 161 is provided between the second base 14 and the base 122a of the fourth beam 122. The fourth piezoelectric unit 161 includes a pair of piezoelectric elements 161a and 161b. These piezoelectric elements 161a and 161b are inserted into the element accommodating portions 142 and 143, respectively. The piezoelectric elements 161a and 161b are fixed to the plate member 11 by an electrically insulating adhesive.

[0107] The third beam 121, the third base side hinge 131 and the third head side hinge 135 constitute the third suspension SP3. The fourth beam 122, the fourth base side hinge 141 and the fourth head side hinge 145 constitute the fourth suspension SP4. These suspensions SP3 and SP4, the second head support 116, the third piezoelectric unit 151 and the fourth piezoelectric unit 161 constitute the second microactuator assembly MA2.

[0108] like Fig.15 As shown, the axis C4 passes through the center C1 of the first head support portion 16. The axis C4 also passes through the center C3 of the second head support portion 116. The third suspension SP3 and the fourth suspension SP4 are line symmetrical about the axis C4. The third beam 121 and the fourth beam 122 extend in a direction perpendicular to the axis C4. The third suspension SP3 and the fourth suspension SP4 are composed of a common plate member 11 made of stainless steel. The thickness of the third suspension SP3 is equal to the thickness of the fourth suspension SP4.

[0109] The head driving device 10H (of the sixth embodiment) Fig.15 ) is supported by the first microactuator assembly MA1 and the second microactuator assembly MA2. Therefore, the magnetic head assembly 17 is supported at two positions in the length direction of the magnetic head assembly 17. Thus, it is possible to Fig.14 The rigidity of the head driving device 10H is improved in the X-axis, Y-axis, and Z-axis directions (as shown), thereby stabilizing the head component 17.

[0110] Fig.14 and Fig.15The four piezoelectric elements 51b, 61b, 151b and 161b shown are accommodated in the element accommodating portions 33, 43, 133 and 143 along a predetermined direction regarding polarity. The four piezoelectric elements 51a, 61a, 151a and 161a indicated by hatching are accommodated in the element accommodating portions 32, 42, 132 and 142 so that they face in opposite directions and thus have opposite polarities to the piezoelectric elements 51b, 61b, 151b and 151b.

[0111] like Fig.15 As shown, it is assumed that the positive input voltage of [+y] is applied to all piezoelectric elements. In this case, the piezoelectric elements 51b, 61b, 151b and 161b in the normal position expand, and the piezoelectric elements 51a, 61a, 151a and 161a in the reverse state contract. Through this structure, the magnetic head component 17 moves along the first direction (shown by the arrow Y1).

[0112] and Fig.15 On the contrary, suppose that the negative input voltage of [-y] is applied to all piezoelectric elements. In this case, the piezoelectric elements 51b, 61b, 151b and 161b in the normal position contract, and the piezoelectric elements 51a, 61a, 151a and 161a in the reverse state expand. Through this structure, the magnetic head component 17 moves along the second direction (the opposite direction of the arrow Y1). Therefore, in the case of the present embodiment, the input signal of [±y] of 1 system can be used to move the magnetic head component 17 in the Y-axis direction.

[0113] [Seventh embodiment] Fig.16 )

[0114] Fig.16 A magnetic head driving device 10J according to the seventh embodiment is shown. The piezoelectric elements 51a, 51b, 61a, 61b, 151a, 151b, 161a and 161b include a common structure. The piezoelectric elements 51a, 51b, 161a and 161b are accommodated in the element accommodating parts 32, 33, 142 and 143 along a predetermined direction with respect to polarity. The piezoelectric elements 61a, 61b, 151a and 151b indicated by hatching are accommodated in the element accommodating parts 42, 43, 132 and 133 so that they rotate to have opposite polarities. The other structures are the same as those of the sixth embodiment ( Fig.14 and Fig.15 )same.

[0115] like Fig.16 As shown in FIG. 1 , when a positive input voltage of [+x] is applied to all piezoelectric elements, the piezoelectric elements 51a, 51b, 161a and 161b in the normal position expand, and the piezoelectric elements 61a, 61b, 151a and 151b in the reverse state contract. Fig.16 The displacement in the tilt direction is shown by the arrow X.

[0116] and Fig.16 On the contrary, when a negative input voltage [-x] is applied to all the piezoelectric elements, the piezoelectric elements 51a, 51b, 161a and 161b in the normal position contract, and the piezoelectric elements 61a, 61b, 151a and 151b in the reverse state contract. With this structure, the magnetic head component 17 moves in the tilt direction opposite to the arrow X. Thus, the magnetic head component 17 can be driven in the tilt direction by an input signal of [±x] of a system.

[0117] [Eighth Embodiment] Fig.17 )

[0118] Fig.17 The magnetic head drive device 10K according to the eighth embodiment is shown. The magnetic head drive device 10K is different from the magnetic head drive device 10K of the seventh embodiment ( Fig.16 ) have a common structure. Piezoelectric elements 51a, 51b, 161a and 161b are accommodated in element accommodating portions 32, 33, 142 and 143 in a predetermined direction with respect to polarity. Piezoelectric elements 61a, 61b, 151a and 151b indicated by hatching are accommodated in element accommodating portions 42, 43, 132 and 133 so that they can rotate with respect to polarity.

[0119] like Fig.17 As shown, it is assumed that an input voltage of [x+y] is applied to the piezoelectric elements 51b, 61a, 151a and 161b, and it is assumed that an input voltage of [xy] is applied to the piezoelectric elements 51a, 61b, 151b and 161a. In this case, the magnetic head component 17 moves in the tilt direction shown by the arrow X, and the magnetic head component 17 moves in the first direction (shown by the arrow Y1).

[0120] and Fig.17 On the contrary, it is assumed that an input voltage of [-xy] is applied to the piezoelectric elements 51b, 61a, 151a and 161b, and it is assumed that an input voltage of [-x+y] is applied to the piezoelectric elements 51a, 61b, 151b and 161a. In this case, the magnetic head unit 17 moves in the opposite direction of the arrow X, and moves in the opposite direction of the arrow Y. Thus, the magnetic head unit 17 is driven in the tilt direction and the Y-axis direction by the input signals of the two systems.

[0121] [Ninth embodiment] Figures 18 to 23 )

[0122] Fig.18The data storage device 200 including the magnetic head driving device 10L according to the ninth embodiment is schematically shown. For example, the data storage device 200 includes a housing 201, an actuator assembly 202, a first winding device 203, a second winding device 204, and a plurality of guide rollers 205. The data storage device 200 is not limited to Fig.18 Examples shown and can be built in various modes as needed.

[0123] A magnetic tape 18 as a recording medium is wound around reels 210 and 211. A magnetic head unit 17 is provided in an actuator assembly 202. The actuator assembly 202 includes a function of moving the magnetic head unit 17 in the width direction (Y-axis direction) and the tilt direction of the magnetic tape 18. Through the magnetic head unit 17, the magnetic tape 18 is accessed (data is written or read).

[0124] Fig.19 An example of an actuator assembly 202 including the head driving device 10L is shown. Fig.19 The double magnetic arrow PT1 shown in FIG. 1 is the pitch direction of the magnetic head component 17 . Fig. 20 is an exploded perspective view of the actuator assembly 202 . Fig.21 is from Fig.19 The magnetic head driving device 10L is viewed in the direction indicated by arrow F21.

[0125] The actuator assembly 202 includes a slider 222, coarse motion voice coil motors 223 and 224, a tilt drive block 225, and a head drive device 10L. The slider 222 can move along a pair of guide members 220 and 221. The voice coil motors 223 and 224 move the slider 222. The tilt drive block 225 is attached to the slider 222. The tilt drive block 225 rotates around a tilt axis 226 in a tilt direction.

[0126] A pair of voice coil motors 223 and 224 include yokes 230 and 231, magnets 232 and 233, and coils 234 and 235, respectively. The voice coil motors 223 and 224 move the slider 222, the head driving device 10L, and the tilt driving block 225 along the guide members 220 and 221. The voice coil motors 223 and 224 rotate the head driving device 10L and the tilt driving block 225 around the tilt axis 226.

[0127] like Fig.21 As shown, the head driving device 10L includes a first microactuator assembly MA1' having a three-dimensional shape and a second microactuator assembly MA2' having a three-dimensional shape. The first microactuator assembly MA1' includes a first curved portion 241 and a second curved portion 242. The second microactuator assembly MA2' includes a third curved portion 243 and a fourth curved portion 244. The first microactuator assembly MA1' and the second microactuator assembly MA2' include a common structure.

[0128] The first microactuator assembly MA1′ is similar to the microactuator assembly MA1 (6th embodiment) except that the first microactuator assembly MA1′ includes the bent portions 241 and 242. Fig.14 and Fig.15 ) is constructed in the same manner as the microactuator assembly MA2 of the sixth embodiment except that the second microactuator assembly MA2' includes the structure of the bent portions 243 and 244. Fig.14 and Fig.15 ) With regard to the microactuator assemblies MA1' and MA2' of the present embodiment, the parts common to the microactuator assemblies MA1 and MA2 of the sixth embodiment are denoted by the same reference numerals, and the description thereof is omitted.

[0129] like Fig.21 As shown, a first bent portion 241 is formed in the first head side hinge portion 35. A second bent portion 242 is formed in the second head side hinge portion 45. The first bent portion 241 is bent at an angle θ1 less than 90° relative to the first head support portion 16 along the thickness direction of the plate member 11. The second bent portion 242 is bent at an angle θ2 to one side of the first bent portion relative to the first head support portion 16 along the thickness direction of the plate member 11. The angle θ1 of the first bent portion 241 is equal to the angle θ2 of the second bent portion 242. Each of the angles θ1 and θ2 is, for example, 45°.

[0130] The third bent portion 243 is formed in the third head-side hinge portion 135 (eg, Fig.15 As shown in Fig.19 and Fig. 20 As shown, the third bent portion 243 is bent in the same direction as the first bent portion 241. Therefore, the third bent portion 243 is bent at the same angle θ1 (eg, 45°) as the first bent portion 241 with respect to the second head supporting portion 116 in the thickness direction of the plate member 11.

[0131] The fourth bent portion 244 is formed in the fourth head-side hinge portion 145 (eg, Fig.15 As shown in Fig.19 and 20 As shown, the fourth bent portion 244 is bent in the same direction as the third bent portion 243. Therefore, the fourth bent portion 244 is bent at the same angle θ2 (eg, 45°) as the third bent portion 243 relative to the second head supporting portion 116 in the thickness direction of the plate member 11.

[0132] Since the bent portions 241, 242, 243 and 244 are provided, the head drive device 10L of the present embodiment has a three-dimensional shape like a mountain. Fig.14 and Fig.15 ) compared to the head drive device 10H of the sixth embodiment ( Fig.14 and Fig.15 )'s head drive device 10H is large.

[0133] like Fig. 22 As shown, the frame portion 12 of the magnetic head driving device 10L is provided with a terminal portion 300. Similarly, the magnetic head component 17 is provided with a terminal portion 301. The piezoelectric elements 61a, 61b, 161a, 161b are provided with terminals 310, 311, 312, 313, respectively. The terminal portion 300 of the frame portion 12 is electrically connected to the terminal portion 301 of the magnetic head component 17 and the terminals 310, 311, 312, 313 of the piezoelectric elements 61a, 61b, 161a, 161b.

[0134] Fig.23 According to the ninth embodiment ( Figure 19-22 ) and the vibration characteristics of the head drive device 10L of the sixth embodiment ( Fig.14 ) is a magnetic head drive device 10H. Fig.23 In FIG. 1 , the solid line indicates the vibration characteristics of the head driving device 10L having the curved portions 241, 242, 243, 244. The angle of each of the curved portions 241, 242, 243, 244 is 45°. Fig.23 In FIG. 1 , the dotted line indicates the vibration characteristics of the head driving device 10H having no curved portion.

[0135] exist Fig.23 In FIG. 1 , R1 represents the pitch mode of the magnetic head driving device 10H that does not include a curved portion. The pitch mode of the magnetic head driving device 10H that does not include a curved portion appears at around 1 kHz. Fig.23 , R2 represents the pitch mode of the head driving device 10L including the curved portion. The pitch mode of the head driving device 10L including the curved portion appears at around 11 kHz. The head driving device 10L including the curved portion has a three-dimensional shape. According to the head driving device 10L having the three-dimensional shape, the frequency of the pitch mode can be greatly increased compared with the frequency of the head driving device 10H having a planar shape.

[0136] Similar to Fig.24In the manner of the plate member 11 shown, a connecting portion 270 for connecting the first head supporting portion 16 to the second head supporting portion 116 can be provided. By providing the connecting portion 270, the positional relationship between the first head supporting portion 16 and the second head supporting portion 116 is stabilized. This structure can prevent the positions of the first head supporting portion 16 and the second head supporting portion 116 from changing when the bending portions 241, 242, 243 and 244 are bent. In addition, by providing the connecting portion 270, the adhesive surface property of the head member 17 can be improved. In addition, by using the connecting portion 270, the head member 17 can be supported in a stable state.

[0137] Fig.25 A magnetic head driving device 10M according to a tenth embodiment is shown. The magnetic head driving device 10M includes a first microactuator assembly MA1, a second microactuator assembly MA2, and a third microactuator assembly MA3. The third microactuator assembly MA3 includes a third magnetic head supporting portion 416, a fifth beam 421, a sixth beam 422, a fifth piezoelectric unit 451, and a sixth piezoelectric unit 461.

[0138] The third head support portion 416 is provided between the first base 13 and the second base 14. The third head support portion 416 supports the head component 17. The fifth beam 421 extends from the first base 13 to the third head support portion 416. The first base 13 is connected to the base of the fifth beam 421 through the fifth base side hinge portion 431. The distal end of the fifth beam 421 is connected to the third head support portion 416 through the fifth head side hinge 435.

[0139] The sixth beam 422 is disposed on the opposite side of the fifth beam 421 across the third head support portion 416. The sixth beam 422 extends from the second base 14 to the third head support portion 416. The second base 14 is connected to the base of the sixth beam through a sixth base side hinge portion 441. The distal end of the sixth beam 422 is connected to the third head support portion 416 through a sixth head side hinge portion 445.

[0140] The fifth piezoelectric unit 451 is disposed between the first base 13 and the base of the fifth beam 421. The fifth piezoelectric unit 451 displaces the distal end of the fifth beam 421 by deforming in a state where a voltage is applied. The sixth piezoelectric unit 461 is disposed between the second base 14 and the base of the sixth beam 422. The sixth piezoelectric unit 461 displaces the distal end of the sixth beam 422 by deforming in a state where a voltage is applied.

[0141] The microactuator assemblies MA1, MA2 and MA3 include a common structure. Each of the microactuator assemblies MA1, MA2 and MA3 is provided with a Fig.14 and Fig.15The head drive device 10M of the present embodiment is constructed in the same manner as the microactuator assembly MA1 shown in the figure. Since the head drive device 10M of the present embodiment includes three microactuator assemblies MA1, MA2 and MA3, the rigidity can be further increased. In these microactuator assemblies MA1, MA2 and MA3, curved portions 241, 242, 243 and 244 similar to the curved portions in the head drive device 10L of the sixth embodiment can be formed. The microactuator assembly including the curved portions 241, 242, 243 and 244 has a three-dimensional shape. The number of microactuator assemblies can be four or more.

[0142] Fig.26 The plate member 11 shown includes a connecting portion 470. The connecting portion 470 connects the first head supporting portion 16, the second head supporting portion 116, and the third head supporting portion 416. By providing the connecting portion 470, the positional relationship of the head supporting portions 161, 116, and 416 can be kept constant.

[0143] When implementing the present invention, the specific mode of each element constituting each head driving device can be modified in various ways. In addition, various forms can be applied to data storage devices as needed.

[0144] Other advantages and modifications will readily occur to those skilled in the art. Therefore, in a broad sense, the present invention is not limited to the specific details and representative embodiments shown and described herein. Therefore, various modifications may be made without departing from the spirit or scope of the overall inventive concept defined by the appended claims and their equivalents.

Claims

1. A magnetic head driving device for driving a magnetic head component (17), characterized in that: The device comprises: The first base (13) and the second base (14) face each other with a space therebetween; a magnetic head supporting portion (16), arranged between the first base portion (13) and the second base portion (14), and supporting the magnetic head component (17); A first beam (21) extending from the first base (13) to the magnetic head support portion (16); a first base side hinge portion (31) connecting the base of the first beam (21) with the first base (13); a first magnetic head side hinge portion (35) connecting the distal end of the first beam (21) to the magnetic head support portion (16); A second beam (22) is arranged on the opposite side of the first beam (21), sandwiching the magnetic head support portion (16) in the middle, and extending from the second base portion (14) to the magnetic head support portion (16); a second base side hinge portion (41) connecting the base of the second beam (22) to the second base (14); a second magnetic head side hinge portion (45) connecting the distal end of the second beam (22) to the magnetic head support portion (16); a first piezoelectric unit (51) disposed between the first base (13) and the base of the first beam (21), and causing the distal end of the first beam (21) to displace by deformation when a voltage is applied; and A second piezoelectric unit (61) is arranged between the second base (14) and the base of the second beam (22), and causes the distal end of the second beam (22) to displace by deformation when a voltage is applied.

2. The magnetic head driving device according to claim 1, characterized in that: The width of the first base-side hinge portion (31) is smaller than the width of the base of the first beam (21), The width of the first head-side hinge portion (35) is smaller than the width of the distal end of the first beam (21), the width of the second base-side hinge portion (41) is smaller than the width of the base of the second beam (22), and The width of the second head-side hinge portion (45) is smaller than the width of the distal end of the second beam (22).

3. The magnetic head driving device according to claim 2, characterized in that: The planar shape of the first beam (21) is a shape in which the width decreases from the base of the first beam (21) toward the distal end of the first beam (21), and The planar shape of the second beam (22) is a shape in which the width decreases from the base of the second beam (22) toward the distal end of the second beam (22).

4. The magnetic head driving device according to claim 2, characterized in that: First element accommodating portions (32, 33) are provided on both sides of the first base side hinge portion (31), and a pair of first piezoelectric elements (51a, 51b) constituting the first piezoelectric unit (51) are arranged in the first element accommodating portions (32, 33); and Second element accommodating portions (42, 43) are provided on both sides of the second base side hinge portion (41), and a pair of second piezoelectric elements (61a, 61b) constituting the second piezoelectric unit (61) are arranged in the second element accommodating portions (42, 43).

5. The magnetic head driving device according to claim 4, characterized in that: One of the first piezoelectric elements (51a, 51b) has a predetermined polarity, The other of the first piezoelectric elements (51a, 51b) is arranged to rotate so as to have opposite polarity, One of the second piezoelectric elements (61a, 61b) has a predetermined polarity, and The other of the second piezoelectric elements (61a, 61b) is arranged so as to be rotated so as to have an opposite polarity.

6. The magnetic head driving device according to claim 1, characterized in that: Also includes: a first suspension (SP1) formed of a metal plate member (11) and including the first beam (21), the first base-side hinge portion (31) and the first head-side hinge portion (35); and A second suspension (SP2) is formed by the plate member (11), includes the second beam (22), the second base side hinge portion (41) and the second head side hinge portion (45), and forms a linearly symmetrical shape with the first suspension (SP1) relative to an axis (C2) passing through the center of the head support portion (16).

7. The magnetic head driving device according to claim 6, characterized in that: Also includes: a first bent portion (75) formed in the first suspension (SP1) and bent at an angle of less than 90° or 90° in the thickness direction of the plate member (11) relative to the head support portion (16); and A second bent portion (76) is formed in the second suspension (SP2) and is bent on the same side as the first bent portion (75) relative to the head supporting portion (16).

8. The magnetic head driving device according to claim 1, characterized in that: It also includes a damping component (DM1) (DM2) (DM3) (DM4), the damping component (DM1) (DM2) (DM3) (DM4) The magnetic head support portion is provided in at least a portion of the first beam (21), the second beam (22) and the magnetic head support portion.

9. A magnetic head driving device for driving a magnetic head component (17), characterized in that: The device comprises: A first base (13) and a second base (14) face each other with a space therebetween; a first magnetic head supporting portion (16) is disposed between the first base (13) and the second base (14) to support the magnetic head component (17); A first beam (21) extending from the first base portion (13) to the first magnetic head support portion (16); a first base side hinge portion (31) connecting the base of the first beam (21) with the first base (13); a first magnetic head side hinge portion (35) connecting the distal end of the first beam (21) with the first magnetic head supporting portion (16); a second beam (22) disposed on the opposite side of the first beam (21), sandwiching the first magnetic head supporting portion (16) in the middle, and extending from the second base portion (14) to the first magnetic head supporting portion (16); a second base side hinge portion (41) connecting the base of the second beam (22) to the second base (14); a second magnetic head side hinge portion (45) connecting the distal end of the second beam (22) to the first magnetic head supporting portion (16); a first piezoelectric unit (51) disposed between the first base (13) and the base of the first beam (21), and causing the distal end of the first beam (21) to be displaced by deformation when a voltage is applied; a second piezoelectric unit (61) disposed between the second base (14) and the base of the second beam (22), and causing the distal end of the second beam (22) to be displaced by deformation when a voltage is applied; a second magnetic head support portion (116) disposed between the first base (13) and the second base (14), and supporting the magnetic head component (17); a third beam (121) extending from the first base portion (13) to the second magnetic head supporting portion (116); a third base side hinge portion (131) connecting the base of the third beam (121) to the first base (13); a third magnetic head side hinge portion (135) connecting the distal end of the third beam (121) with the second magnetic head supporting portion (116); a fourth beam (122) disposed on the opposite side of the third beam (121), sandwiching the second magnetic head supporting portion (116) in the middle, and extending from the second base portion (14) to the second magnetic head supporting portion (116); a fourth base side hinge portion (141) connecting the base of the fourth beam (122) with the second base portion (14); a fourth magnetic head side hinge portion (145) connecting the distal end of the fourth beam (122) to the second magnetic head supporting portion (116); a third piezoelectric unit (151) disposed between the first base (13) and the base of the third beam (121), and causing the distal end of the third beam (121) to displace by deformation when a voltage is applied; and A fourth piezoelectric unit (161) is arranged between the second base (14) and the base of the fourth beam (122), and causes the distal end of the fourth beam (122) to displace by deformation when a voltage is applied.

10. The magnetic head driving device according to claim 9, characterized in that: Also includes: a first suspension (SP1) formed of a metal plate member (11) and including the first beam (21), the first base side hinge portion (31) and the first head side hinge portion (35); a second suspension (SP2) formed by the plate member (11), including the second beam (22), the second base side hinge portion (41) and the second head side hinge portion (45), and forming a line symmetric shape with the first suspension (SP1) relative to an axis (C4) passing through the center of the first head support portion (16); a third suspension (SP3) formed by the plate member (11), including the third beam (121), the third base side hinge portion (131) and the third head side hinge portion (135); and A fourth suspension (SP4) is formed by the plate component (11), including the fourth beam (122), the fourth base side hinge portion (141) and the fourth head side hinge portion (145), and forms a linearly symmetrical shape with the third suspension (SP3) relative to an axis (C4) passing through the center of the second head supporting portion (116).

11. The magnetic head driving device according to claim 10, characterized in that: Also includes: a first bent portion (241) formed in the first suspension (SP1) and bent at an angle of less than 90° or 90° in the thickness direction of the plate member (11) relative to the first head support portion (16); a second bent portion (242) formed in the second suspension (SP2) and bent at the same angle as the first bent portion (241) relative to the first head supporting portion (16) and on the same side as the first bent portion (241); a third bent portion (243) formed in the third suspension (SP3) and bent at the same angle as the first bent portion (241) relative to the second head supporting portion (116) and on the same side as the first bent portion (241); and A fourth bent portion (244) is formed in the fourth suspension (SP4) and is bent at the same angle as the second bent portion (242) relative to the second head supporting portion (116) and on the same side as the second bent portion (242).

12. The magnetic head driving device according to claim 11, characterized in that: It also includes a connecting portion (270) for connecting the first magnetic head supporting portion (16) with the second magnetic head supporting portion (116).

13. The magnetic head driving device according to claim 9, characterized in that: Also includes: a third magnetic head supporting portion (416), arranged between the first base portion (13) and the second base portion (14), and supporting the magnetic head component (17); a fifth beam (421) extending from the first base portion (13) to the third magnetic head supporting portion (416); a fifth base side hinge portion (431) connecting the base of the fifth beam (421) and the first base (13); a fifth magnetic head side hinge portion (435) connecting the distal end of the fifth beam (421) and the third magnetic head supporting portion (416); a sixth beam (422) disposed on the opposite side of the fifth beam (421), sandwiching the third magnetic head supporting portion (416) in the middle, and extending from the second base (14) to the third magnetic head supporting portion (416); a sixth base side hinge portion (411) connecting the base of the sixth beam (422) with the second base (14); a sixth magnetic head side hinge portion (445) connecting the distal end of the sixth beam (422) to the third magnetic head supporting portion (416); a fifth piezoelectric unit (451) disposed between the first base (13) and the base of the fifth beam (421), and displacing the distal end of the fifth beam (421) by deformation when a voltage is applied; and A sixth piezoelectric unit (461) is arranged between the second base (14) and the base of the sixth beam (422), and displaces the distal end of the sixth beam (422) by deformation when a voltage is applied.

14. The magnetic head driving device according to claim 13, characterized in that: It also includes a connecting portion (470), which connects the first magnetic head supporting portion (16), the second magnetic head supporting portion (116) and the third magnetic head supporting portion (416).

Images