Special gas weighing calibration system and method thereof

Abstract

The application discloses a special gas weighing calibration system and a method thereof, and comprises a weighing display controller, wherein the weighing display controller is electrically connected with two weighing sensors symmetrically arranged below SiCl4 evaporation tanks; the weighing sensors detect the weight of the SiCl4 evaporation tanks and the auxiliary pipelines in the heating partition; the SiCl4 evaporation tanks are connected with a vacuum pump and a SiCl4 raw material tank through the pipelines; the SiCl4 raw material tank is arranged on an industrial platform scale and is connected with a N2 gas source through the pipelines; the application uses the known substance weight to replace the standard weight in the weighing calibration method, improves the convenience of the special gas weighing calibration, is easy to operate by the operator, and can improve the weighing precision of the weighing detection system compared with inputting the scale body parameters for calibration.

Description

Technical Field

[0001] This invention relates to the field of special gas weighing calibration, and in particular to a special gas weighing calibration system and method. Background Technology

[0002] In the CVD process for preparing SiC, it is necessary to constantly monitor the weight of the SiCl4 evaporator to replenish SiCl4 in real time. Therefore, the calibration of the weighing detection system for the SiCl4 evaporator is crucial. The structure of existing equipment prevents the use of standard weights for calibration of the weighing detection system; calibration must be performed by inputting scale parameters. However, due to factors such as scale installation and off-center loading, the displayed weight often has deviations. Furthermore, the space available for installing the SiCl4 evaporator is often limited, making it impossible to calibrate the weighing system using standard weights. Therefore, this application proposes a solution to this problem. Summary of the Invention

[0003] Purpose of the invention: The purpose of this invention is to provide a special gas weighing calibration system and method, which facilitates the calibration of the weighing detection system, improves the convenience of operation, and thus improves the weighing accuracy of the weighing system.

[0004] Technical Solution: The present invention provides a special gas weighing calibration system, comprising a weighing display controller, characterized in that: the weighing display controller is electrically connected to two weighing sensors symmetrically arranged below a SiCl4 evaporator; the weighing sensors detect the weight of the SiCl4 evaporator and its auxiliary pipelines within a heating baffle; the SiCl4 evaporator is connected to a vacuum pump and a SiCl4 raw material tank respectively via pipelines; the SiCl4 raw material tank is mounted on an industrial platform scale and connected to an N2 gas source via pipelines.

[0005] Preferably, the pipeline between the SiCl4 evaporator and the SiCl4 raw material tank is equipped with manual valve one and manual valve three for cutting off and guiding the flow of SiCl4 raw material to the SiCl4 evaporator, and is connected by VCR connector thread.

[0006] Preferably, a check valve is provided between the manual valve three and the SiCl4 raw material tank to prevent the raw material in the SiCl4 raw material tank from flowing back.

[0007] Preferably, a second manual valve is provided between the SiCl4 evaporator and the vacuum pump to cut off and open the vacuum pump for extracting air from the SiCl4 evaporator and its auxiliary pipelines. The second manual valve is connected to the SiCl4 evaporator by a VCR connector thread and to the vacuum pump by a corrugated hose compression fitting.

[0008] Preferably, a manual valve four for cutting off and opening the flow of N2 gas from the SiCl4 raw material tank to the SiCl4 raw material tank is provided between the SiCl4 raw material tank and the N2 gas source, and is connected by a VCR connector thread.

[0009] A special gas weighing calibration method, characterized by the following steps:

[0010] S1: Determine whether the SiCl4 evaporator and the SiCl4 raw material tank are on the same horizontal plane and whether the weight of the SiCl4 raw material tank is ≥150kg. If the SiCl4 evaporator and the SiCl4 raw material tank are on the same horizontal plane, proceed to S2. If the SiCl4 evaporator is higher than the SiCl4 raw material tank, proceed to S9.

[0011] S2: Open manual valve one and manual valve two, and the vacuum pump will evacuate the SiCl4 evaporator and its auxiliary pipelines, with the external negative pressure gauge reaching -0.1 MPa;

[0012] S3: Set the maximum scale division and rated range on the weighing display, and confirm and calibrate the zero point;

[0013] S4: Prepare a SiCl4 raw material container Akg. Place a 300kg platform scale under the raw material container and record the weight of the SiCl4 raw material container Akg at this time.

[0014] S5: Open manual valve one and manual valve three. Since the SiCl4 evaporator is in a vacuum state, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time, B kg. When AB≥40Kg, close manual valve one, manual valve two and manual valve three, and record the value of AB, C kg.

[0015] S6: Set the value on the weighing display to Ckg, and confirm that Ckg is the calibration point one;

[0016] S7: Open manual valve one and manual valve three. Since the SiCl4 evaporator is in a vacuum state, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank Dkg at this time. When CD≥40Kg, close manual valve one, manual valve two and manual valve three, and record the value of AB Ekg.

[0017] S8: Set the value on the weighing display to Ekg, confirm that Ekg is calibration point two, and the weighing calibration is complete;

[0018] S9: After repeating the operation of S2, prepare a SiCl4 raw material container A1kg. Place a 300kg platform scale under the raw material container and record the weight of the SiCl4 raw material container A1kg at this time.

[0019] S10: Open manual valve 1, manual valve 3 and manual valve 4. Slowly inject N2 gas into the raw material tank. Because the N2 gas pressure is high and the SiCl4 evaporator pressure is low, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time as B1kg. When A1-B1≥40Kg, close manual valve 1, manual valve 2, manual valve 3 and manual valve 4. Record the value of A1-B1 as C1kg.

[0020] S11: Set the value on the weighing display to C1kg and confirm that C1kg is calibration point one;

[0021] S12: Open manual valve 1, manual valve 3 and manual valve 4. Slowly inject N2 gas into the raw material tank. Due to the high pressure of N2 gas, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time, D1kg. When C1-D1≥40Kg, close manual valve 1, manual valve 2, manual valve 3 and manual valve 4. Record the value of A1-B1, E1kg.

[0022] S13: Set the value on the weighing display to E1kg, confirm that E1kg is calibration point two, and the weighing calibration is complete.

[0023] Preferably, the calculation method for the maximum scale value is as follows:

[0024] Maximum weighing capacity = maximum number of divisions × maximum division value;

[0025] The maximum weighing capacity is 100 kg;

[0026] The maximum division number is set to 10000;

[0027] The maximum scale value is calculated to be 0.01.

[0028] Beneficial effects: This application fully considers the confined installation environment of the SiCl4 evaporator, and thus improves the convenience of weighing and calibrating special gases by using the known weight of the substance instead of standard weights. It is easy for operators to operate, and compared with calibration by inputting the scale parameters, using the known weight of the substance instead of standard weights can also improve the weighing accuracy of the weighing detection system. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the special gas weighing calibration system in this application;

[0030] Figure 2 This is a partially enlarged view of the special gas weighing calibration system in this application;

[0031] Figure 3 This is a left sectional view of the special gas weighing calibration system in this application;

[0032] Figures 1-3 In the text, the names of each structure are:

[0033] 1. Weighing display controller; 2. Weighing sensor; 3. SiCl4 evaporator; 4. Heating baffle; 5. Vacuum pump; 6. SiCl4 raw material tank; 7. Industrial platform scale; 8. N2 gas source; 9. Manual valve one; 10. Manual valve two; 11. Manual valve three; 12. Manual valve four; 13. Check valve. Detailed Implementation

[0034] The present application will be further described below with reference to specific embodiments.

[0035] like Figure 1-3 The diagram shown is a structural schematic of this application. In this embodiment, it includes a weighing display controller 1, which is electrically connected to two weighing sensors 2 symmetrically arranged below the SiCl4 evaporator 3. The weighing sensors 2 detect the weight of the SiCl4 evaporator 3 and its auxiliary pipelines inside the heating baffle 4.

[0036] The SiCl4 evaporator 3 is connected to the vacuum pump 5 and the SiCl4 raw material tank 6 via pipelines. The pipeline between the SiCl4 evaporator 3 and the SiCl4 raw material tank 6 is equipped with manual valve 9 and manual valve 11 for cutting off and guiding the flow of SiCl4 raw material to the SiCl4 evaporator 3, and the connection is made by VCR threaded connectors. The SiCl4 evaporator 3 is connected to the vacuum pump 5 with manual valve 10 for cutting off and guiding the vacuum pump to extract air from the SiCl4 evaporator 3 and its auxiliary pipelines. Manual valve 10 is connected to the SiCl4 evaporator 3 by VCR threaded connectors and to the vacuum pump 5 by corrugated hose compression fitting.

[0037] A check valve 13 is also installed between the manual valve 11 and the SiCl4 raw material tank 6 to prevent the raw material in the SiCl4 raw material tank 6 from flowing back.

[0038] The SiCl4 raw material tank 6 is installed on the industrial platform scale 7 and connected to the N2 gas source 8 through a pipeline. A manual valve 12 is installed between the SiCl4 raw material tank 6 and the N2 gas source 8 to cut off and open the flow of N2 gas from the source to the SiCl4 raw material tank 6. The valve is connected by a VCR connector thread.

[0039] A special gas weighing calibration method specifically includes the following steps:

[0040] S1: When the SiCl4 evaporator and the SiCl4 raw material tank are on the same horizontal plane and the weight of the SiCl4 raw material tank is ≥150kg, proceed to S2; when the SiCl4 evaporator is higher than the SiCl4 raw material tank, proceed to S9.

[0041] S2: Open manual valve one and manual valve two, and the vacuum pump will evacuate the SiCl4 evaporator and its auxiliary pipelines, with the external negative pressure gauge reaching -0.1 MPa;

[0042] S3: Set the maximum scale division and rated range on the weighing display, confirm and calibrate the zero point. The calculation method for the maximum scale division is as follows:

[0043] Maximum weighing capacity = maximum number of divisions × maximum division value;

[0044] The maximum weighing capacity is 100 kg;

[0045] The maximum division number is set to 10000;

[0046] The maximum scale division value is calculated to be 0.01;

[0047] S4: Prepare a SiCl4 raw material container Akg. Place a 300kg platform scale under the raw material container and record the weight of the SiCl4 raw material container Akg at this time.

[0048] S5: Open manual valve one and manual valve three. Since the SiCl4 evaporator is in a vacuum state, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time, B kg. When AB≥40Kg, close manual valve one, manual valve two and manual valve three, and record the value of AB, C kg.

[0049] S6: Set the value on the weighing display to Ckg, and confirm that Ckg is the calibration point one;

[0050] S7: Open manual valve one and manual valve three. Since the SiCl4 evaporator is in a vacuum state, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank Dkg at this time. When CD≥40Kg, close manual valve one, manual valve two and manual valve three, and record the value of AB Ekg.

[0051] S8: Set the value on the weighing display to Ekg, confirm that Ekg is calibration point two, and the weighing calibration is complete;

[0052] S9: After repeating the operation of S2, prepare a SiCl4 raw material container A1kg. Place a 300kg platform scale under the raw material container and record the weight of the SiCl4 raw material container A1kg at this time.

[0053] S10: Open manual valve 1, manual valve 3 and manual valve 4. Slowly inject N2 gas into the raw material tank. Because the N2 gas pressure is high and the SiCl4 evaporator pressure is low, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time as B1kg. When A1-B1≥40Kg, close manual valve 1, manual valve 2, manual valve 3 and manual valve 4. Record the value of A1-B1 as C1kg.

[0054] S11: Set the value on the weighing display to C1kg and confirm that C1kg is calibration point one;

[0055] S12: Open manual valve 1, manual valve 3 and manual valve 4. Slowly inject N2 gas into the raw material tank. Due to the high pressure of N2 gas, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time, D1kg. When C1-D1≥40Kg, close manual valve 1, manual valve 2, manual valve 3 and manual valve 4. Record the value of A1-B1, E1kg.

[0056] S13: Set the value on the weighing display to E1kg, confirm that E1kg is calibration point two, and the weighing calibration is complete.

[0057] This application takes into full account the confined installation environment of the SiCl4 evaporator, and thus improves the convenience of weighing and calibrating special gases by using a weighing calibration method that uses the known weight of the substance instead of standard weights. This method is easy for operators to use and, compared with calibration by inputting the scale parameters, can also improve the weighing accuracy of the weighing detection system by using the known weight of the substance instead of standard weights.

Claims

1. A method for calibrating the weighing of a special gas, characterized in that: This includes a special gas weighing calibration system for calibrating a SiCl4 evaporator tube weighing detection system. The system includes a weighing display controller electrically connected to two weighing sensors symmetrically positioned below the SiCl4 evaporator. The weighing sensors detect the weight of the SiCl4 evaporator and its associated piping within the heating baffle. The SiCl4 evaporator is connected via piping to a vacuum pump and a SiCl4 raw material tank. The SiCl4 raw material tank is mounted on an industrial scale and connected to an N2 gas source via piping. The specific special gas weighing calibration method includes the following steps: S1: Determine whether the SiCl4 evaporator and the SiCl4 raw material tank are on the same horizontal plane and whether the weight of the SiCl4 raw material tank is ≥150kg. If the SiCl4 evaporator and the SiCl4 raw material tank are on the same horizontal plane, proceed to S2. If the SiCl4 evaporator is higher than the SiCl4 raw material tank, proceed to S9. S2: Open manual valve one and manual valve two, and the vacuum pump will evacuate the SiCl4 evaporator and its auxiliary pipelines, with the external negative pressure gauge reaching -0.1 MPa; S3: Set the maximum scale division and rated range on the weighing display, and confirm and calibrate the zero point; S4: Prepare a SiCl4 raw material container Akg. Place a 300kg platform scale under the raw material container and record the weight of the SiCl4 raw material container Akg at this time. S5: Open manual valve one and manual valve three. Since the SiCl4 evaporator is in a vacuum state, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time, B kg. When AB≥40Kg, close manual valve one, manual valve two and manual valve three, and record the value of AB, C kg. S6: Set the value on the weighing display to Ckg, and confirm that Ckg is the calibration point one; S7: Open manual valve one and manual valve three. Since the SiCl4 evaporator is in a vacuum state, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank D kg at this time. When BD≥40Kg, close manual valve one, manual valve two and manual valve three, and record the value of BD E kg. S8: Set the value on the weighing display to Ckg+Ekg, confirm that Ckg+Ekg is calibration point two, and the weighing calibration is complete; S9: After repeating the operation of S2, prepare a SiCl4 raw material container A1kg. Place a 300kg platform scale under the raw material container and record the weight of the SiCl4 raw material container A1kg at this time. S10: Open manual valve 1, manual valve 3 and manual valve 4. Slowly inject N2 gas into the raw material tank. Because the N2 gas pressure is high and the SiCl4 evaporator pressure is low, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time as B1kg. When A1-B1≥40Kg, close manual valve 1, manual valve 2, manual valve 3 and manual valve 4. Record the value of A1-B1 as C1kg. S11: Set the value on the weighing display to C1kg and confirm that C1kg is calibration point one; S12: Open manual valve 1, manual valve 3 and manual valve 4. Slowly inject N2 gas into the raw material tank. Due to the high pressure of N2 gas, the SiCl4 raw material in the SiCl4 raw material tank will be poured into the SiCl4 evaporator. Record the weight of the SiCl4 raw material tank at this time, D1kg. When B1-D1≥40Kg, close manual valve 1, manual valve 2, manual valve 3 and manual valve 4. Record the value of B1-D1, E1kg. S13: Set the value on the weighing display to C1kg+E1kg, confirm that C1kg+E1kg is calibration point two, and the weighing calibration is complete.

2. The special gas weighing calibration method according to claim 1, characterized in that: The pipeline between the SiCl4 evaporator and the SiCl4 raw material tank is equipped with manual valve one and manual valve three for cutting off and guiding the flow of SiCl4 raw material to the SiCl4 evaporator, and is connected by VCR connector thread.

3. The special gas weighing calibration method according to claim 2, characterized in that: A check valve is installed between the manual valve three and the SiCl4 raw material tank to prevent the raw material in the SiCl4 raw material tank from flowing back.

4. The special gas weighing calibration method according to claim 1, characterized in that: A second manual valve is installed between the SiCl4 evaporator and the vacuum pump to cut off and open the vacuum pump for extracting air from the SiCl4 evaporator and its auxiliary pipelines. The second manual valve is connected to the SiCl4 evaporator by a VCR connector thread and to the vacuum pump by a corrugated hose compression fitting.

5. The special gas weighing calibration method according to claim 1, characterized in that: A manual valve four is installed between the SiCl4 raw material tank and the N2 gas source to cut off and open the flow of N2 gas from the SiCl4 raw material tank, and is connected by a VCR connector thread.

6. The special gas weighing calibration method according to claim 1, characterized in that: The method for calculating the maximum scale value is as follows: Maximum weighing capacity = maximum number of divisions × maximum division value; The maximum weighing capacity is 100 kg; The maximum division number is set to 10000; The maximum scale value is calculated to be 0.01.

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