A two-dimensional guide rail straightness and perpendicularity testing device

Abstract

The application discloses a kind of two-dimensional guide rail straightness and perpendicularity testing device, comprising: X-axis guide rail, one end of the X-axis guide rail is fixedly connected with X-axis motor, the output end of the X-axis motor is fixedly connected with X-axis screw rod, and X-axis sliding block is threadedly sleeved on the X-axis screw rod;Y-axis guide rail, the Y-axis guide rail is vertically arranged with X-axis guide rail, one end of the Y-axis guide rail is fixedly connected with Y-axis motor, the output end of the Y-axis motor is fixedly connected with Y-axis screw rod, and Y-axis sliding block is threadedly sleeved on the Y-axis screw rod;Five-prism, the five-prism is fixedly connected with the top of X-axis sliding block;Photoelectric phase-sensitive sensor, laser and multidimensional adjusting mechanism.The application can quickly and accurately test the straightness and perpendicularity of two-dimensional guide rail by the setting of multidimensional adjusting mechanism, five-prism and photoelectric phase-sensitive sensor etc., to improve the testing efficiency of the straightness and perpendicularity of two-dimensional guide rail.

Description

Technical Field

[0001] This invention relates to the field of two-dimensional motion platform technology, and in particular to a two-dimensional guide rail straightness and perpendicularity testing device. Background Technology

[0002] Two-dimensional motion platforms are fundamental components of numerous instruments and processing equipment, such as coordinate measuring machines, microscopes, milling machines, engraving machines, and glue applicators. Therefore, the accuracy of a two-dimensional motion platform, including straightness and perpendicularity, is crucial and generally directly determines the overall precision level of the machine. A two-dimensional motion platform typically consists of two guide rails, one mounted on a slider of the other, providing mutually perpendicular motion. On one hand, the straightness of a single guide rail is critical; on the other hand, the perpendicularity of the motion axes of the two guide rails is also important. Only when two highly straight individual guide rails are assembled together with strict perpendicularity can a high-precision two-dimensional motion platform be formed. In the actual assembly process of the guide rails, straightness is generally adjusted using an autocollimator, laser interferometer, or dial indicator. Perpendicularity can be calibrated using a laser interferometer, dial indicator, and standard perpendicularity gauge blocks.

[0003] However, when using a laser interferometer, the lenses, tools, and setup methods required for straightness and perpendicularity measurements are different, so they can only be measured separately. First, the straightness of a single axis is measured, and then the experimental setup is changed to measure the perpendicularity. The same situation applies when using a dial indicator or other methods. Summary of the Invention

[0004] 1. Technical problems to be solved

[0005] The purpose of this invention is to solve the problem in the prior art that the lenses, tools and arrangement methods required for straightness and perpendicularity measurement are different, so they can only be measured separately, first measuring the straightness of a single axis and then changing the experimental device to measure the perpendicularity. Therefore, this invention proposes a two-dimensional guide rail straightness and perpendicularity testing device.

[0006] 2. Technical Solution

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] A two-dimensional guide rail straightness and perpendicularity testing device, comprising:

[0009] An X-axis guide rail is provided, with an X-axis motor fixedly connected to one end of the X-axis guide rail. An X-axis screw is fixedly connected to the output end of the X-axis motor, and an X-axis slider is threaded onto the X-axis screw.

[0010] The Y-axis guide rail is perpendicular to the X-axis guide rail. A Y-axis motor is fixedly connected to one end of the Y-axis guide rail. A Y-axis screw is fixedly connected to the output end of the Y-axis motor. A Y-axis slider is threaded onto the Y-axis screw.

[0011] A pentaprism, which is fixedly connected to the top of the X-axis slider;

[0012] A photoelectric phase-sensitive sensor, wherein the photoelectric phase-sensitive sensor is fixedly connected to the top of the Y-axis slider;

[0013] A laser is positioned at the end of the X-axis guide rail away from the X-axis motor, and the output end of the laser is arranged parallel to the pentaprism.

[0014] A multidimensional adjustment mechanism, the top of which is connected to the bottom of the laser.

[0015] Preferably, guide rods are fixedly connected inside both the X-axis guide rail and the Y-axis guide rail, and guide openings corresponding to the guide rods are provided on both the X-axis slider and the Y-axis slider.

[0016] Preferably, a plurality of balls are slidably connected inside the guide opening, and the edges of the balls are in contact with the guide rod.

[0017] Preferably, the laser is a 632.8nm red single-mode helium-neon gas laser with an optical power of 1mW, a beam diameter of 1mm, and a divergence angle of 1.2 milliradians.

[0018] Preferably, the pentaprism has dimensions of 22mm × 50mm × 50mm and is made of optical glass BK7.

[0019] Preferably, the photosensitive sensor is model S5990, with a sensing surface size of 4mm × 4mm and a measurement accuracy of 1 micrometer.

[0020] Preferably, the multi-dimensional adjustment mechanism includes a mounting base, the top of which is connected to a support plate via a telescopic cylinder, the top of which is rotatably connected to a vertical rod, and one side of which is rotatably connected to an arc-shaped locking rod via a rotating shaft. The support plate is provided with multiple locking slots corresponding to the arc-shaped locking rod. The top of the vertical rod is rotatably connected to a laser via a rotating rod, and one side of the laser is fixedly connected to a servo motor. The output end of the servo motor is fixedly connected to the rotating rod.

[0021] Preferably, the bottom of the support plate is fixedly connected to a plurality of symmetrically arranged sliding rods, the top of the mounting base is provided with a sliding cavity corresponding to the sliding rod, and a limit block is fixedly connected to one end of the sliding rod located in the sliding cavity.

[0022] 3. Beneficial effects

[0023] Compared with the prior art, the advantages of this invention are:

[0024] (1) In this invention, the pitch angle can be adjusted slightly by the multi-dimensional adjustment mechanism so that the laser beam can be parallel to the X-axis; the pentaprism can turn the incident laser beam at a fixed 90-degree angle, that is, strictly perpendicular to the X-axis, so that the beam can determine the adjustment target of the Y-axis guide rail.

[0025] (2) In this invention, by mounting the photoelectric phase sensor on the Y-axis slider, it can move along the Y-rail. After the position is finely adjusted, the laser spot after the pentaprism is turned can irradiate the sensing surface of the phase sensor.

[0026] (3) In this invention, by setting up a multi-dimensional adjustment mechanism, a pentaprism and a photoelectric phase-sensitive sensor, the straightness and perpendicularity of the two-dimensional guide rail can be tested quickly and accurately, thereby improving the testing efficiency of the straightness and perpendicularity of the two-dimensional guide rail. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the structure of a two-dimensional guide rail straightness and perpendicularity testing device proposed in this invention;

[0028] Figure 2 This is a side view of the X-axis slider of a two-dimensional guide rail straightness and perpendicularity testing device proposed in this invention.

[0029] Figure 3 This is a side view of the multi-dimensional adjustment mechanism of a two-dimensional guide rail straightness and perpendicularity testing device proposed in this invention.

[0030] Figure 4 This is a side view of the servo motor structure of a two-dimensional guide rail straightness and perpendicularity testing device proposed in this invention.

[0031] Figure 5 This is a schematic diagram of measurement data and calculations in Embodiment 1 of the present invention.

[0032] In the diagram: 1. X-axis guide rail, 2. Y-axis guide rail, 3. Pentagonal prism, 4. Photoelectric phase sensor, 5. Laser, 6. Multi-dimensional adjustment mechanism, 7. X-axis motor, 8. X-axis screw, 9. X-axis slider, 10. Y-axis motor, 11. Y-axis screw, 12. Y-axis slider, 13. Guide rod, 14. Ball bearing, 15. Mounting base, 16. Telescopic cylinder, 17. Support plate, 18. Vertical rod, 19. Rotary shaft, 20. Arc-shaped clamp, 21. Rotary rod, 22. Servo motor, 23. Slide rod, 24. Limit block. Detailed Implementation

[0033] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0034] Example 1:

[0035] Reference Figure 1-5 A two-dimensional guide rail straightness and perpendicularity testing device, comprising:

[0036] X-axis guide rail 1, one end of which is fixedly connected to X-axis motor 7, the output end of X-axis motor 7 is fixedly connected to X-axis screw 8, and X-axis slider 9 is threaded onto X-axis screw 8 to drive X-axis slider 9 to slide.

[0037] Y-axis guide rail 2 is set perpendicular to X-axis guide rail 1. One end of Y-axis guide rail 2 is fixedly connected to Y-axis motor 10, which is used to drive Y-axis screw 11 to rotate. The output end of Y-axis motor 10 is fixedly connected to Y-axis screw 11, which is used to drive Y-axis slider 12 to slide. Y-axis slider 12 is threaded onto Y-axis screw 11.

[0038] Pentagonal prism 3 is fixedly connected to the top of X-axis slider 9. The dimensions of pentagonal prism 3 are 22mm×50mm×50mm, and the material is optical glass BK7.

[0039] The photoelectric phase sensor 4 is fixedly connected to the top of the Y-axis slider 12. The photoelectric phase sensor 4 is model S5990, the sensing surface size is 4mm×4mm, and the measurement accuracy is 1 micrometer.

[0040] Laser 5 is located at the end of X-axis guide rail 1 away from X-axis motor 7. The output end of laser 5 is parallel to pentaprism 3. Laser 5 is a 632.8nm red single-mode helium-neon gas laser with an optical power of 1mW, a beam diameter of 1mm, and a divergence angle of 1.2 milliradians.

[0041] A multi-dimensional adjustment mechanism 6 is provided, with its top connected to the bottom of the laser 5. The multi-dimensional adjustment mechanism 6 includes a mounting base 15. A support plate 17 is connected to the top of the mounting base 15 via a telescopic cylinder 16 for adjusting the height of the support plate 17. A vertical rod 18 is rotatably connected to the top of the support plate 17. An arc-shaped locking rod 20 is rotatably connected to one side of the vertical rod 18 via a rotating shaft 19 for adjusting the direction of the laser 5. The support plate 17 is surrounded by a ring that corresponds to the arc-shaped locking rod 20. The top of the upright 18 is rotatably connected to the laser 5 via a rotating rod 21. A servo motor 22 is fixedly connected to one side of the laser 5 to drive the rotating rod 21 to rotate and adjust the angle of the laser. The output end of the servo motor 22 is fixedly connected to the rotating rod 21. A number of symmetrically arranged sliding rods 23 are fixedly connected to the bottom of the support plate 17 to support the support plate 17. The top of the mounting base 15 is provided with a sliding cavity corresponding to the sliding rod 23. A limit block 24 is fixedly connected to one end of the sliding rod 23 located in the sliding cavity to prevent the sliding rod 23 from falling out of the sliding cavity.

[0042] In this invention, guide rods 13 are fixedly connected inside both the X-axis guide rail 1 and the Y-axis guide rail 2. Guide openings corresponding to the guide rods 13 are provided on both the X-axis slider 9 and the Y-axis slider 12 to prevent the X-axis slider 9 and the Y-axis slider 12 from shaking. Multiple balls 14 are slidably connected inside the guide openings, and the edges of the balls 14 are in contact with the guide rods 13.

[0043] In this invention, the X-axis straightness is measured as follows: The Y-axis slider 12 is moved to its lowest position, bringing the photosensitive sensor 4 close to the pentaprism 3, and the Y-axis is locked. Since the photosensitive sensor 4 and the pentaprism 3 are close, the influence of their intermediate distance can be ignored. The X-axis slider 9 is moved to one end, the laser 5 is turned on, and the X-axis slider 9 is gradually moved while recording the output value of the photosensitive sensor 4, i.e., the position of the laser spot on it. Since the laser output is an ideal straight line, the output of the photosensitive sensor 4 is its deviation relative to this straight line, i.e., the straightness of the X-axis.

[0044] In this invention, the Y-axis straightness is measured as follows: The X-axis slider 9 is moved close to the laser 5, at which point the pentaprism 3 is also close to the laser 5, with negligible distance between them. The laser 5 is turned on, and the Y-axis slider 12 is gradually moved while recording the output value of the photosensitive sensor 4, i.e., the position of the laser spot on it. Since the laser output is converted into a straight line perpendicular to the X-axis by the pentaprism 3, the output of the photosensitive sensor 4 is its deviation relative to this straight line, i.e., the straightness of the Y-axis.

[0045] In this invention, data processing and perpendicularity calculation are performed as follows: For the X-axis and Y-axis data mentioned above, linear fitting is first performed on each of them. The maximum residual of the X-axis data relative to the linearly fitted line of the X-axis is the maximum straightness deviation of the X-axis; the maximum residual of the Y-axis data relative to the linearly fitted line of the Y-axis is the maximum straightness deviation of the Y-axis. In the linear fitting formula, the parallelism deviation angle of each axis relative to the laser line can be obtained through the slope term of the curve. Since the pentaprism 3 has already produced a standard 90-degree deflection of the laser, the difference between the two slope terms is the perpendicularity deviation of the two axes.

[0046] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A two-dimensional guide rail straightness and perpendicularity testing device, characterized in that, include: X-axis guide rail (1), one end of which is fixedly connected to an X-axis motor (7), the output end of which is fixedly connected to an X-axis screw (8), and an X-axis slider (9) is threaded onto the X-axis screw (8); Y-axis guide rail (2), the Y-axis guide rail (2) is perpendicular to the X-axis guide rail (1), one end of the Y-axis guide rail (2) is fixedly connected to a Y-axis motor (10), the output end of the Y-axis motor (10) is fixedly connected to a Y-axis screw (11), and a Y-axis slider (12) is threaded onto the Y-axis screw (11); Pentagonal prism (3), the pentagonal prism (3) is fixedly connected to the top of the X-axis slider (9); A photoelectric phase-sensitive sensor (4) is fixedly connected to the top of the Y-axis slider (12); A laser (5) is located at one end of the X-axis guide rail (1) away from the X-axis motor (7), and the output end of the laser (5) is arranged parallel to the pentaprism (3). A multidimensional adjustment mechanism (6) is provided, the top of which is connected to the bottom of the laser (5); Guide rods (13) are fixedly connected inside the X-axis guide rail (1) and the Y-axis guide rail (2). Guide openings corresponding to the guide rods (13) are provided on the X-axis slider (9) and the Y-axis slider (12). Multiple balls (14) are slidably connected inside the guide openings. The edges of the balls (14) are in contact with the guide rods (13). The laser (5) is a 632.8nm red single-mode helium-neon gas laser with an optical power of 1mW, a beam diameter of 1mm, and a divergence angle of 1.2 milliradians. The pentaprism (3) has dimensions of 22mm×50mm×50mm and is made of optical glass BK7. The photoelectric phase-sensitive sensor (4) is model S5990 with a sensing surface size of 4mm×4mm and a measurement accuracy of 1 micrometer. The multi-dimensional adjustment mechanism (6) includes a mounting base (15). The top of the support plate (17) is connected to the support plate (18) via a telescopic cylinder (16). The top of the support plate (17) is rotatably connected to the upright (18). One side of the upright (18) is rotatably connected to the arc-shaped locking rod (20) via a rotating shaft (19). The support plate (17) is surrounded by multiple slots corresponding to the arc-shaped locking rod (20). The top of the upright (18) is rotatably connected to the laser (5) via a rotating rod (21). One side of the laser (5) is fixedly connected to a servo motor (22). The output end of the servo motor (22) is fixedly connected to the rotating rod (21). The bottom of the support plate (17) is fixedly connected to multiple symmetrically arranged sliding rods (23). The top of the mounting base (15) is provided with a sliding cavity corresponding to the sliding rod (23). One end of the sliding rod (23) located in the sliding cavity is fixedly connected to a limit block (24).

Images