Film material carrier conveying mechanism, conveying method and vacuum coating device

Abstract

The present invention relates to the field of vacuum coating technology, and discloses a film material carrier conveying mechanism, a conveying method and a vacuum coating device. The film material carrier conveying mechanism includes a placement table, a grabbing module, a driving module and a lifting module, wherein the stacked film material carriers are placed on the placement table, and the placement table is provided with more than two first placement positions; the grabbing module is used to grab the film material carriers located on the grabbing plane at the first operating position; the driving module is used to drive the placement table so that a certain first placement position is opposite to the first operating position; the lifting module is used to drive the film material carriers on the first placement position opposite to the first operating position to be lifted and lowered, so that the film material carriers to be grabbed are located on the grabbing plane. The film material carriers on the first placement position of the present invention are all stacked to hold more film material carriers; the lifting module drives the first placement position to lift and lower, which is convenient for multiple grabbing of the grabbing module, reduces the number of times the driving module is driven and the number of times the film material carriers are replenished, and improves the coating efficiency.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a film material carrier conveying mechanism, a conveying method and a vacuum coating device. Background Art

[0002] Vacuum evaporation coating is a process in which the coating material is heated in a vacuum environment to evaporate or sublime, then condensed or deposited on a low-temperature workpiece or substrate surface to form a coating. The coating material is typically placed in a coating material carrier. In existing technology, the placement table for these film carriers has a limited capacity, requiring repeated replenishment of the placement table, resulting in low coating efficiency.

[0003] Therefore, there is an urgent need for a film material carrier conveying mechanism, conveying method and vacuum coating device to solve the above problems. Summary of the Invention

[0004] Based on the above, the object of the present invention is to provide a film material carrier conveying mechanism, conveying method and vacuum coating device, which can hold a large number of film material carriers and have high coating efficiency.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A film material carrier transport mechanism, comprising:

[0007] A placement table, on which the stacked film material carriers are placed, and the placement table is provided with two or more first placement positions;

[0008] A gripping module, used for gripping the film material carrier located on the gripping plane at the first operating position;

[0009] A driving module, configured to drive the placement platform so that one of the first placement positions faces the first operating position;

[0010] The lifting module is used to drive the film material carrier on the first placement position opposite to the first operating position to lift and lower, so that the film material carrier to be grasped is located on the grasping plane.

[0011] As a preferred solution of a film material carrier transporting mechanism, the grabbing module includes a grabbing body and two grippers slidably arranged on the grabbing body, and the two grippers are driven by a first driving component to approach each other along the grabbing direction to grab the film material carrier.

[0012] As a preferred solution of the film material carrier transport mechanism, the first drive assembly includes:

[0013] Two connecting rods are connected to the two grippers in a one-to-one correspondence;

[0014] A first driving member, wherein the two connecting rods are both connected to the first driving member, and the first driving member can drive the two connecting rods to rotate so as to make the two claws slide along the grasping body.

[0015] As a preferred solution of a film material carrier transport mechanism, the gripping module further includes a reset component, and the reset component is configured to enable the two grippers to have a tendency to move away from each other.

[0016] As a preferred solution of a film material carrier transport mechanism, the reset assembly includes:

[0017] a second grabbing slider, slidably disposed on the grabbing body, the two grippers being connected to the second grabbing slider, the driving end of the first driving assembly being connected to the second grabbing slider, and the first driving assembly being capable of driving the second grabbing slider to slide to a position where the two grippers are close to each other;

[0018] The second driving member is connected to the second grabbing slider, and the second driving member can move the second grabbing slider to a position where the two grippers are separated from each other.

[0019] As a preferred solution of a film material carrier transport mechanism, the first placement position includes:

[0020] A placement plate is placed above the placement table, and the film material carrier is placed on the placement plate;

[0021] A guide rod is provided through the placement platform, one end of the guide rod is connected to the placement plate, and the other end is connected to the driving end of the lifting module.

[0022] As a preferred solution of the film material carrier transport mechanism, it also includes a moving module, the grabbing module is arranged on the moving module, and the moving module is configured to drive the grabbing module to move between the grabbing position and the second operating position.

[0023] A film material carrier transporting method, using the film material carrier transporting mechanism as described in any of the above solutions, the film material carrier transporting method comprising:

[0024] The driving module drives the placement table so that a first placement position faces the first operating position;

[0025] The lifting module drives the first placement position facing the first operating position to rise, so that the film material carrier to be grasped at the top of the first placement position is located on the grasping plane;

[0026] The moving module drives the grabbing module to the first operating position of the grabbing plane, grabs the film material carrier to be grabbed, and moves to the second operating position in the translation plane;

[0027] The lifting module drives the first placement position to continue to rise, so that the next film material carrier to be grasped at the first placement position is located at the grasping plane.

[0028] As a preferred solution of the film material carrier transport method, after all the film material carriers in the first placement position are transported, the lifting module is reset, and the driving module drives the placement platform to move so that the next first placement position is opposite to the first operating position.

[0029] A vacuum coating device comprises a coating mechanism and a film material carrier transporting mechanism as described in any of the above schemes for transporting a film material carrier for the coating mechanism.

[0030] The beneficial effects of the present invention are:

[0031] The present invention provides a placement table for holding film material carriers, and the placement table is provided with more than two first placement positions to increase the number of film material carriers. In addition, the film material carriers on the first placement positions are stacked, so that each first placement position can hold more film material carriers; the driving module is used to drive the placement table so that one of the first placement positions is opposite to the first operating position, which is convenient for the grasping module to grasp the film material carrier on a certain first placement position; the lifting module is used to drive the first placement position to rise and fall, so that the film material carrier to be grasped on the first placement position can be located on the grasping plane in turn, which is convenient for multiple grasping by the grasping module, simplifies the structure of the grasping module, reduces the number of times the driving module is driven, and at the same time reduces the number of times the film material carriers are replenished to the placement table, thereby improving the coating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in describing the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without any creative work.

[0033] Figure 1 Schematic diagram of a film material carrier transport mechanism provided in a specific embodiment of the present invention;

[0034] Figure 2 Schematic diagram of a grabbing module of a film material carrier transport mechanism provided in a specific embodiment of the present invention;

[0035] Figure 3 1. It is a top view of the cooperation between the gripper and the film material carrier of the film material carrier conveying mechanism provided by a specific embodiment of the present invention;

[0036] Figure 4It is a side view of the cooperation between the gripper and the film material carrier of the film material carrier conveying mechanism provided by a specific embodiment of the present invention;

[0037] Figure 5 This is a front view of a vacuum coating device provided in a specific embodiment of the present invention;

[0038] Figure 6 is a top view of a vacuum coating device provided in a specific embodiment of the present invention;

[0039] Figure 7 It is a top view of a vacuum coating device provided with a second transfer chamber according to a specific embodiment of the present invention;

[0040] Figure 8 It is a top view of another vacuum coating device provided with a second transfer chamber provided in a specific embodiment of the present invention.

[0041] In the picture:

[0042] 100. Film material carrier transport mechanism;

[0043] 110, placement table; 111, first placement position; 112, first operating position; 113, guide rod; 114, positioning pin;

[0044] 120. Grabbing module; 121. Grabbing body; 122. Hand gripper; 1221. Flanging; 1222. Positioning protrusion; 123. Connecting rod; 124. Second driving member; 125. Second grabbing slider; 126. First driving member; 127. First grabbing slider; 128. Mounting block; 1281. Through hole; 129. Steel cable;

[0045] 130. Drive module;

[0046] 140. Lifting module;

[0047] 150, moving module; 151, lifting assembly; 1511, lifting drive; 1512, lifting block; 152, translation assembly; 1521, translation drive; 1522, translation guide rail; 1523, translation slider;

[0048] 200, membrane material carrier; 201, boss; 202, positioning notch;

[0049] 300, coating mechanism; 310, coating chamber; 311, coating platform; 3111, coating position; 3112, second operating position; 320, first transport chamber; 330, first vacuum valve; 340, second transport chamber; 350, second vacuum valve. DETAILED DESCRIPTION

[0050] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present invention more clearly understood, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It is apparent that the described embodiments are only some of the embodiments of the present invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0051] like Figure 1-Figure 5 As shown, this embodiment provides a film material carrier conveying mechanism and conveying method for a vacuum coating device, wherein the film material carrier conveying mechanism 100 includes a placement table 110, a gripping module 120, a driving module 130 and a lifting module 140, wherein the stacked film material carriers 200 are placed on the placement table 110, and the placement table 110 is provided with more than two first placement positions 111; the gripping module 120 is used to grip the film material carrier 200 located on the gripping plane at the first operating position; the driving module 130 is used to drive the placement table 110 so that a certain first placement position 111 is opposite to the first operating position; the lifting module 140 is used to drive the film material carrier 200 on the first placement position 111 facing the first operating position to rise and fall, so that the film material carrier 200 to be gripped is located on the gripping plane.

[0052] By setting a placement table 110 for holding film material carriers 200, more than two first placement positions 111 are provided on the placement table 110 to increase the number of film material carriers 200 that can be held; in addition, the film material carriers 200 on the first placement positions 111 are stacked, so that each first placement position 111 can hold more film material carriers 200; the driving module 130 is used to drive the placement table 110 so that one of the first placement positions 111 is facing the first operating position, which is convenient for the grabbing module 120 to grab the film material carrier 200 on a certain first placement position 111; the lifting module 140 is used to drive the first placement position 111 to rise and fall, so that the film material carrier 200 to be grabbed on the first placement position 111 can be located on the grabbing plane in turn, which is convenient for the grabbing module 120 to grab the film material carrier 200 on the first placement position 111 The multiple grabbing simplifies the structure of the grabbing module 120, reduces the number of driving times of the driving module 130, and reduces the number of times the film material carrier 200 is replenished to the placement table 110, thereby improving the coating efficiency.

[0053] Optionally, multiple first placement positions 111 are arranged along the circumference of the placement table 110, and the driving module 130 can drive the placement table 110 to rotate so that the multiple first placement positions 111 along the circumference of the placement table 110 are opposite the first operating position in sequence. The rotating placement table 110 is more conducive to optimizing the structure and reducing the volume of the film material carrier conveying mechanism 100.

[0054] Specifically, in order to enable the grabbing module 120 to grab the film material carrier 200, the grabbing module 120 includes a grabbing body 121 and two claws 122 slidably arranged on the grabbing body 121. The setting of the grabbing body 121 is used to realize the installation of the claws 122. The two claws 122 are driven by the first driving component to approach each other along the grabbing direction. When the two claws 122 approach each other, they are used to grab the film material carrier 200. The structure of the grabbing module 120 is simple and the grabbing is reliable.

[0055] For example, to improve gripping reliability, a boss 201 is provided on the upper edge of the film material carrier 200, and a flange 1221 is correspondingly provided on the inner side of the gripper 122. The flange 1221 abuts against the edge of the boss 201, effectively preventing the film material carrier 200 from falling off during gripping and handling, making gripping and handling more reliable. It is worth noting that the shape of the film material carrier 200 can be set according to actual needs. In this embodiment, the film material carrier 200 is configured as an annular split film material carrier. The annular split film material carrier can hold more coating material and improve coating efficiency. Adaptively, the shapes of the two claws 122 are adapted to the shape of the annular split membrane material carrier, one of the claws 122 is convex on the inner side to match the concave part of the annular split membrane material carrier; the other claw 122 is concave on the inner side to match the convex part of the annular split membrane material carrier; the parts of the claws 122 that match the membrane material carrier 200 are tightly fitted to ensure the reliability of grasping.

[0056] Preferably, at least one gripper 122 is provided with a positioning protrusion 1222 , and correspondingly, the film material carrier 200 is provided with a positioning notch 202 , and the positioning protrusion 1222 can be placed in the positioning notch 202 for positioning when grasping the film material carrier 200 .

[0057] Furthermore, the first drive assembly includes two connecting rods 123 and a first drive member 126, and the two connecting rods 123 are connected to the two claws 122 one by one; the two connecting rods 123 are connected to the first drive member 126, and the first drive member 126 can drive the two connecting rods 123 to rotate, thereby driving the two claws 122 connected to the two connecting rods 123 to slide along the grasping body 121. When they slide to a position close to each other, they are used to grasp the film material carrier 200.

[0058] Optionally, the two grippers 122 are connected to the first grabbing slider 127 in a one-to-one correspondence, the first grabbing slider 127 is slidingly connected to the grabbing body 121, and the connecting rod 123 is connected to the first grabbing slider 127; the grippers 122 are detachably connected to the first grabbing slider 127 to replace the grippers 122 to adapt to different film material carriers 200, thereby improving the versatility of the film material carrier conveying mechanism 100.

[0059] Preferably, the grabbing module 120 also includes a reset component, which is configured to enable the two claws 122 to have a tendency to move away from each other. When the grabbing module 120 grabs the film material carrier 200 and moves the film material carrier 200 to the second operating position 3112, the setting of the reset component can enable the two claws 122 to move away from each other to put down the film material carrier 200 for subsequent grabbing.

[0060] Furthermore, the reset assembly also includes a second grabbing slider 125, which is slidably arranged on the grabbing body 121, and the two first grabbing sliders 127 are respectively connected to the second grabbing slider 125 through the connecting rod 123; further, the first driving member 126 is a spring, one end of the spring is pressed against the grabbing body 121, and the other end is pressed against the second grabbing slider 125, and the spring is squeezed to make the two first grabbing sliders 127 approach each other, and then used for the two claws 122 to grab the film material carrier 200.

[0061] Illustratively, the reset assembly includes a second drive member 124 and a steel cable 129. The second drive member 124 drives the steel cable 129 to pull the second grabbing slider 125 to a position where the two claws 122 are separated, thereby further squeezing the first drive member 126, causing the two claws 122 to separate and lower the film carrier 200. Accordingly, the second grabbing slider 125 is also connected to a mounting block 128. The mounting block 128 is provided with a through hole 1281 for the steel cable 129 to pass through. Using the steel cable 129 to drive the second grabbing slider 125 simplifies the structure and reduces the space occupied by the grabbing module 120.

[0062] In this embodiment, the first placement position 111 includes a placement plate and a guide rod 113. The placement plate is placed above the placement platform 110, and the film material carrier 200 is placed on the placement plate. The guide rod 113 is installed through the placement platform 110, with one end connected to the placement plate and the other end connected to the driving end of the lifting module 140. The lifting module 140 drives the placement plate to rise and fall, thereby achieving the lifting and lowering of the film material carrier 200 on the placement plate. The guide rod 113 is provided to provide guidance for the lifting and lowering of the placement plate, making the lifting more stable and reliable.

[0063] Preferably, the placement platform 110 is provided with a positioning pin 114, which can position the film material carrier 200. It is worth noting that the positioning pin 114 on the placement platform 110 is also adapted to the positioning notch 202 on the film material carrier 200 to simplify the structure of the film material carrier 200; in addition, the positioning pin 114 extends along the lifting direction to ensure that the positioning pin 114 does not interfere with the lifting process of the film material carrier 200; the height of the positioning pin 114 can be set according to the height of the film material carrier 200, and is not specifically limited here.

[0064] Furthermore, the film carrier transport mechanism 100 further includes a moving module 150, on which the gripping module 120 is disposed. The moving module 150 is configured to drive the gripping module 120 to move between a gripping position and a second operating position 3112, thereby enabling the film carrier 200 to move between the gripping position and the second operating position 3112. It is worth noting that the gripping position is a position on the gripping plane that is directly opposite the first operating position.

[0065] Specifically, the moving module 150 includes a lifting component 151 and a translation component 152, the lifting component 151 is configured to drive the grasping module 120 to lift and lower between the grasping plane and the translation plane, and the translation component 152 is configured to drive the grasping module 120 to translate within the translation plane, wherein the grasping position and the second operating position 3112 are both located on the grasping plane, and the translation plane is set higher than the grasping plane to avoid collision when the grasping module 120 grasps the film material carrier 200 and moves between the grasping position and the second operating position 3112.

[0066] Exemplarily, the translation assembly 152 includes a translation drive 1521, a translation guide rail 1522 and a translation slider 1523. The grabbing module 120 is arranged on the translation slider 1523. The translation drive 1521 can drive the translation slider 1523 to translate on the translation guide rail 1522, thereby realizing the translation of the grabbing module 120 on the translation slider 1523; the lifting assembly 151 includes a lifting drive 1511 and a lifting block 1512. The translation assembly 152 is arranged on the lifting block 1512. The lifting drive 1511 can drive the lifting block 1512 to drive, thereby realizing the lifting and lowering of the translation assembly 152 and the grabbing module 120 arranged on the translation assembly 152.

[0067] The present embodiment also discloses a method for transporting a film material carrier, which adopts the film material carrier transporting mechanism 100 as described in any of the above schemes. The process of transporting a film material carrier 200 using the above-mentioned film material carrier transporting mechanism 100 is as follows: the driving module 130 drives the placement table 110 so that a first placement position 111 is opposite to the first operating position; the lifting module 140 drives the first placement position 111 opposite to the first operating position to rise and fall, so that the film material carrier 200 to be grasped at the first placement position 111 is located at the grasping plane; the moving module 150 drives the grasping module 120 to the first operating position on the grasping plane, grasps the film material carrier 200 to be grasped, and moves to the second operating position 3112 in the translation plane; the lifting module drives the first placement position 111 to continue to rise, so that the next film material carrier 200 to be grasped at the first placement position 111 is located at the grasping plane. By providing the lifting module 140 , the grabbing module 120 can grab the stacked film material carriers 200 in sequence on the same grabbing plane, thereby simplifying the structure of the grabbing module 120 and improving the grabbing efficiency.

[0068] Furthermore, after the film material carriers 200 of the first placement position 111 are all transported, the lifting module is reset, and the driving module drives the placement platform 110 to move so that the next first placement position 111 faces the first operating position, reducing the number of times the driving module 130 is driven during the transportation process and improving the transportation efficiency.

[0069] This embodiment also discloses a vacuum coating device, including a coating mechanism 300 and a film material carrier transporting mechanism 100 as described in any of the above schemes for transporting the film material carrier 200 for the coating mechanism 300, so as to transport the film material carrier 200 containing the coating material to the coating mechanism 300 to ensure normal coating.

[0070] The coating mechanism 300 includes a coating chamber 310 and a first transport chamber 320. The second operating station 3112 is disposed within the coating chamber 310, and the film carrier transport mechanism 100 is disposed within the first transport chamber 320. A first vacuum valve 330 is disposed between the coating chamber 310 and the first transport chamber 320. The first vacuum valve 330 seals the coating chamber 310 and the first transport chamber 320, maintaining their independence. Specifically, during film coating in the coating chamber 310, the film carrier 200 can be replenished only when the vacuum in the first transport chamber 320 is broken. This avoids disrupting the vacuum in the coating chamber 310 while maintaining the vacuum level in the coating chamber 310, thereby ensuring efficient coating. This allows the film carrier 200 to be replenished in the first transport chamber 320 while film coating is occurring in the coating chamber 310.

[0071] Furthermore, a coating platform 311 is provided within the coating chamber 310. The coating platform 311 is configured to move so that a particular coating position 3111 overlaps with a second operating position 3112, thereby receiving the film carrier 200 transported by the film carrier transport mechanism 100. It is understood that the first operating position is a position on the side of the first placement position 111 near the coating chamber 310, and the second operating position 3112 is a position on the side of the coating position 3111 near the first transport chamber 320. This simplifies the transport distance of the film carrier transport mechanism 100 and improves transport efficiency. The coating platform 311 is also provided with a coating position, which is different from the second operating position 3112 and is used for film coating. The coating platform 311 is configured to move so that a particular second placement position 3111 overlaps with the coating position, thereby being used for film coating.

[0072] Specifically, multiple coating stations 3111 are arranged along the circumference of the coating platform 311. The coating platform 311 is rotatable, allowing the multiple coating stations 3111 to be sequentially positioned in the second operating position 3112 to receive the film carrier 200. It is worth noting that the number of coating stations 3111 is compatible with the annular split film carrier. For example, the annular split film carrier has a bending angle of 90 degrees. Accordingly, four coating stations 3111 are provided on the coating platform 311. This allows the four annular split film carriers on the four coating stations 3111 to be spliced ​​into a circular ring, further optimizing the usable area of ​​the coating platform 311. Optionally, the film carriers 200 in the first placement stations 111 of the film carrier handling mechanism are also adapted to the same arrangement. That is, four film carriers 200 are stacked in one first placement station 111, so that one first placement station 111 can be used to supply film carriers 200 to one coating platform 311.

[0073] The vacuum coating apparatus also includes a vacuum pump assembly connected to the first transfer chamber 320. This ensures that when the first vacuum valve 330 connects the coating chamber 310 and the first transfer chamber 320, the vacuum levels in the coating chamber 310 and the first transfer chamber 320 are the same. By providing a separate vacuum pump assembly connected to the first transfer chamber 320, the first transfer chamber 320 can be independently evacuated. This facilitates evacuating the first transfer chamber 320 after the vacuum is broken to replenish the film carriers 200. This ensures that the vacuum levels in the coating chamber 310 and the first transfer chamber 320 are the same when the film carriers 200 are transported between the two chambers, effectively reducing energy consumption. The first vacuum valve 330 effectively maintains a vacuum environment in both the coating chamber 310 and the first transfer chamber 320, allowing for simultaneous coating and replenishment of the film carriers 200, thereby improving coating efficiency.

[0074] In other embodiments, a vacuum pump group connected to the first transport chamber 320 may not be separately provided, but the vacuum pump group of the coating chamber 310 may be connected to the first transport chamber 320. In this case, since the first transport chamber 320 and the coating chamber 310 are connected, it is not possible to only break the vacuum in the first transport chamber 320 to replenish the film material carrier 200. Then, the first vacuum valve 330 can only isolate the coating chamber 310 and the first transport chamber 320 to avoid gas disturbance between the coating chamber 310 and the first transport chamber 320 and the influence of dust on the coating.

[0075] The coating method of the vacuum coating device is as follows: when the first vacuum valve 330 is closed, the film material carrier 200 is replenished in the first conveying chamber 320, and after the replenishment is completed, the first conveying chamber 320 is evacuated; the first vacuum valve 330 is opened, and the film material carrier conveying mechanism 100 conveys the film material carrier 200 from the first operating position to the second operating position 3112. During this period, after each film material carrier 200 is grasped, the lifting module drives the placement plate of the first operating position to rise so as to grasp the next film material carrier 111, and the film material carrier 200 is placed on the second operation position 3112. At the same time, after the film material carrier conveying mechanism 100 places a film material carrier 200 on the coating position 3111 placed on the second operation position 3112, the coating platform 311 rotates to a preset angle so that the next coating position 3111 coincides with the second operation position 3112 to receive the next film material carrier 200. After the conveying is completed, the first vacuum valve 330 is closed and the coating chamber 310 can be coated.

[0076] It is worth noting that when the first vacuum valve 330 is opened to prepare to transport the film material carrier 200 to the second operating position 3112, the vacuum degree of the coating chamber 310 and the first transport chamber 320 is the same. At this time, the coating chamber 310 and the first transport chamber 320 are both in a high vacuum state that can be used for coating, to ensure that after the film material carrier 200 is transported, the coating chamber 310 can directly carry out coating, which reduces the time for vacuuming the coating chamber 310 and improves the coating efficiency.

[0077] The vacuum coating apparatus also includes a second plate handling chamber 340. The coating chamber 310 and the second plate handling chamber 340 are selectively connected via a second vacuum valve 350. The second vacuum valve 350 functions similarly to the first vacuum valve 330. The second plate handling chamber 340 can be equipped with a separate vacuum pump assembly or share a vacuum pump assembly with the first plate handling chamber 320. When the second plate handling chamber 340 is equipped with a vacuum pump assembly, the second vacuum valve 350 ensures the vacuum level in the coating chamber 310 when the vacuum in the second plate handling chamber 340 is broken. When the second plate handling chamber 340 is not equipped with a vacuum pump assembly, the second vacuum valve 350 prevents gas disturbances between the coating chamber 310 and the second plate handling chamber 340, as well as the effects of dust on the coating. For example, both the first vacuum valve 330 and the second vacuum valve 350 can be configured as plug-in valves.

[0078] It is worth noting that when the vacuum coating apparatus is not equipped with a vacuum pump assembly, the first vacuum valve 330 and the second vacuum valve 350 can be replaced with baffles that can prevent gas disturbances and dust from affecting the coating. This replacement not only ensures normal coating but also helps reduce the cost of the vacuum coating apparatus. Furthermore, the baffles can be raised or lowered or rotated to prevent gas disturbances and dust from affecting the coating, or to provide a passage for transporting the film material carrier 200.

[0079] like Figure 7 As shown, a film material carrier conveying mechanism 100 is provided in the second conveying chamber 340. The film material carrier conveying mechanism 100 of the second conveying chamber 340 is used to convey the film material carrier 200 to the coating chamber 310. The film material carrier 200 is replenished into the coating chamber at the same time through the first conveying chamber 320 and the second conveying chamber 340, which is beneficial to increase the speed of replenishing the film material carrier 200.

[0080] or, as Figure 8 As shown, the film material carrier conveying mechanism 100 of the second conveying chamber 340 is used to convey the film material carrier 200 from the coating chamber 310 to the second conveying chamber 340. Different film material carrier conveying mechanisms 100 are used to replenish new film material carriers 200 to the coating chamber 310 and to convey old film material carriers 200 out of the coating chamber 310, which can effectively avoid cross contamination and thus help to ensure the coating effect. In addition, while replenishing new film material carriers 200 through one film material carrier conveying mechanism 100, another film material carrier conveying mechanism 100 is used to convey old film material carriers 200, thereby improving the conveying efficiency.

[0081] It is understandable that when the second transport chamber 340 is used to transport the film material carrier 200 , it is also necessary to ensure that the vacuum levels between the second transport chamber 340 and the coating chamber 310 are the same.

[0082] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

[0083] In the description of the present invention, it should be noted that the terms "center," "up," "down," "left," "right," "vertical," "horizontal," "inside," and "outside" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0084] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

Claims

1. A film material carrier transport mechanism, characterized in that: include: A placement table (110), wherein the placement table (110) is provided with two or more first placement positions (111), wherein the plurality of first placement positions (111) are arranged along the circumference of the placement table (110), and the film material carriers (200) stacked up and down are placed on the first placement positions (111); A grabbing module (120) is used to grab a film material carrier (200) located on a grabbing plane at a first operating position; A driving module (130) is used to drive the placement platform (110) so that one of the first placement positions (111) faces the first operating position; The lifting module (140) is used to drive the film material carrier (200) on the first placement position (111) facing the first operating position to lift and lower, so that the film material carrier (200) to be grasped is located on the grasping plane.

2. The film material carrier transport mechanism according to claim 1, characterized in that: The grabbing module (120) includes a grabbing body (121) and two grippers (122) slidably arranged on the grabbing body (121), and the two grippers (122) are driven by a first driving component to approach each other along a grabbing direction to grab the film material carrier (200).

3. The film material carrier transport mechanism according to claim 2, characterized in that: The first drive assembly comprises: Two connecting rods (123) are connected to the two grippers (122) in a one-to-one correspondence; A first driving member (126), the two connecting rods (123) are both connected to the first driving member (126), and the first driving member (126) can drive the two connecting rods (123) to rotate so that the two claws (122) slide along the grasping body (121).

4. The film material carrier transport mechanism according to claim 2, characterized in that: The gripping module (120) further includes a reset component, which is configured to enable the two grippers (122) to have a tendency to move away from each other.

5. The film material carrier transport mechanism according to claim 4, characterized in that: The reset component includes: A second grabbing slider (125) is slidably disposed on the grabbing body (121), the two grippers (122) are both connected to the second grabbing slider (125), the driving end of the first driving component is connected to the second grabbing slider (125), and the first driving component can drive the second grabbing slider (125) to slide to a position where the two grippers (122) are close to each other; The second driving member (124) is connected to the second grabbing slider (125), and the second driving member (124) can make the second grabbing slider (125) slide to a position where the two grippers (122) are separated from each other.

6. The film material carrier transport mechanism according to claim 1, characterized in that: The first placement position (111) includes: A placement plate is placed above the placement platform (110), and the film material carrier (200) is placed on the placement plate; A guide rod (113) is provided through the placement platform (110), one end of which is connected to the placement plate, and the other end of which is connected to the driving end of the lifting module (140).

7. The film material carrier transport mechanism according to any one of claims 1 to 6, characterized in that: It also includes a moving module (150), the grabbing module (120) is arranged on the moving module (150), and the moving module (150) is configured to drive the grabbing module (120) to move between a grabbing position and a second operating position (3112).

8. A method for transporting a film material carrier, characterized in that: Using the film material carrier transport mechanism according to any one of claims 1 to 7, the film material carrier transport method includes: The driving module (130) drives the placement platform (110) so that a first placement position (111) faces the first operating position; The lifting module (140) drives the first placement position (111) facing the first operating position to rise, so that the film material carrier (200) to be grasped at the top of the first placement position (111) is located on the grasping plane; The moving module (150) drives the grabbing module (120) to a first operating position on the grabbing plane, grabs the film material carrier (200) to be grabbed, and moves to a second operating position (3112) in the translation plane; The lifting module drives the first placement position (111) to continue to rise, so that the next film material carrier (200) to be grasped at the first placement position (111) is located at the grasping plane.

9. The film material carrier transporting method according to claim 8, characterized in that: After all the film material carriers (200) of the first placement position (111) are transported, the lifting module is reset, and the driving module drives the placement platform (110) to move so that the next first placement position (111) faces the first operating position.

10. A vacuum coating device, characterized in that: The invention comprises a coating mechanism (300) and a film material carrier transporting mechanism as claimed in any one of claims 1 to 7, which transports a film material carrier (200) for the coating mechanism (300).

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