Temperature and flow rate measurement system and method
By changing the transmission spectrum data of direct bandgap thermo-optical material components, the problems of numerous components and low measurement accuracy of flow velocity and temperature measurement instruments using optical fibers as carriers are solved, and miniaturized design and high-precision measurement are achieved.
Patent Information
- Application Number
- CN202111525677.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2021-12-14
- Publication Date
- 2025-09-05
- Estimated Expiration
- 2041-12-14
AI Technical Summary
In the prior art, flow velocity and temperature measurement instruments using optical fiber as a carrier have many components, are not easy to design in a miniaturized manner, and have low measurement accuracy when calculating temperature through the wavelength drift of the fiber Bragg grating.
Direct bandgap thermo-optical material components are used. By combining detection light and heating light, the transmission spectrum data changes of direct bandgap thermo-optical material components are utilized to achieve temperature and flow rate measurement, reduce the number of components, and improve measurement accuracy.
The number of components is reduced, miniaturization is facilitated, and the accuracy of temperature and flow rate measurement is improved.
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Figure CN116263359B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of measuring instruments, and in particular to a temperature and flow rate measurement system and method. Background Art
[0002] Whether in industrial or biomedical fields, the detection and control of fluid temperature and flow rate are crucial. Measuring gas or liquid flow rate is of great practical significance in industries such as food inspection, pharmaceuticals, medical devices, oil / gas exploration, environment, high-voltage power systems, chemical plants, and marine research.
[0003] In related technologies, optical fiber-based sensors can simultaneously measure temperature and flow rate based on the thermo-optical effect. This involves the absorption of light from a pump source by a special material within the optical fiber, generating a certain amount of heat. This heat is then measured using a fiber Bragg grating (FBG). As the fluid being measured removes heat from the sensor, the wavelength of the FBG shifts with temperature. This shift can be accurately detected by an optical spectrum analyzer, allowing the flow rate to be calculated based on the FBG wavelength shift.
[0004] However, heating is achieved by absorbing light through an optical fiber doped with special materials, and temperature is measured using a fiber Bragg grating, which separates heating and temperature measurement. This requires many components and is not conducive to miniaturization. In addition, the temperature is calculated by calculating the wavelength drift of the fiber Bragg grating, and the measurement accuracy is low. Summary of the Invention
[0005] The embodiments of the present application provide a temperature and flow rate measurement system and method to solve the technical problems in the related art that flow rate and temperature measurement instruments using optical fiber as a carrier have many components, are not easy to miniaturize, and calculate temperature by using the wavelength drift of the fiber Bragg grating, resulting in low measurement accuracy.
[0006] In a first aspect, a temperature and flow rate measurement system is provided, comprising:
[0007] a detection light source that emits detection light;
[0008] a heating light source that emits heating light;
[0009] A probe comprising a detection optical fiber, a direct bandgap thermo-optical material component connected to an end face of the detection optical fiber, and a reflective layer connected to a terminal face of the direct bandgap thermo-optical material component;
[0010] a processing module connected to the probe and receiving the reflected light formed by the detection light passing through the reflective layer;
[0011] an optical device, the heating light source, the detection light source, and the detection optical fiber are all connected to the optical device, so that the detection light and the heating light are transmitted to the detection optical fiber through the optical device, and the processing module is connected to the optical device, and the reflected light is transmitted to the processing module through the optical device;
[0012] The on-off module switches the on-off state of the heating light source to switch the flow rate and temperature measurement.
[0013] In some embodiments, the processing module includes a detection instrument, which receives the reflected light to measure transmission spectrum data of the direct bandgap thermo-optical material component.
[0014] In some embodiments, the detection instrument includes a photodetector.
[0015] In some embodiments, the processing module further includes a controller connected to the detection instrument, and the transmission spectrum data of the direct bandgap thermo-optical material component is converted into flow rate data by the controller.
[0016] In some embodiments, the wavelength of the heating light is shorter than the wavelength of the transmission spectrum transition region of the direct bandgap thermo-optical material component;
[0017] The operating wavelength range of the detection light includes the wavelength range of the transmission spectrum transition region of the direct bandgap thermo-optical material component.
[0018] In some embodiments, the direct bandgap thermo-optical material component is made of gallium arsenide, silicon carbide, indium phosphide, or gallium nitride.
[0019] In some embodiments, the power of the heating light source remains constant.
[0020] In some embodiments, the temperature and flow rate measurement system further includes a feedback circuit connected to the detection optical fiber to adjust the power of the heating light source to maintain the probe temperature.
[0021] The beneficial effects of the technical solution provided by this application include:
[0022] An embodiment of the present application provides a temperature and flow rate measurement system. Due to the provision of a direct bandgap thermo-optical material component, the transmission spectrum data of the direct bandgap thermo-optical material component can change with changes in temperature. Therefore, the transmission spectrum data of the direct bandgap thermo-optical material component is different at different temperatures. When the temperature of the area to be measured affects the direct bandgap thermo-optical material component, the transmission spectrum data of the direct bandgap thermo-optical material component changes. In this way, the transmission spectrum data of the direct bandgap thermo-optical material component measured by the detection light and the processing module can be used to measure the temperature of the environment to be measured.
[0023] When the heating light source is turned on, the direct bandgap thermo-optical material component absorbs the heating light and heats up. The amount of heat removed from the direct bandgap thermo-optical material component varies depending on the flow rate of the fluid. Changes in the direct bandgap thermo-optical material component's transmission spectrum reflect temperature changes, reflecting changes in flow rate. Flow rate data can be obtained from the transmission spectrum data of the direct bandgap thermo-optical material component. The use of changes in the transmission spectrum data of the direct bandgap thermo-optical material component, generated by changes in the temperature of the direct bandgap thermo-optical material component, for both temperature and flow rate measurement requires a small number of components, facilitates miniaturization, and offers high measurement accuracy.
[0024] In a second aspect, a temperature and flow rate measurement method is provided, based on the temperature and flow rate measurement system described above, and characterized by comprising:
[0025] Turn off the heating light source and obtain temperature data based on the transmittance spectrum data of the direct bandgap thermo-optical material component;
[0026] The heating light source is turned on, and the flow rate data is obtained based on the transmission spectrum data of the direct bandgap thermo-optical material component.
[0027] In some embodiments, the flow rate data corresponding to the transmission spectrum data of the direct bandgap thermo-optical material component is obtained by calibrating the flow rate data according to a standard flow meter.
[0028] Another embodiment of the present application provides a temperature and flow rate measurement method, which is based on the above-mentioned temperature and flow rate measurement system. Therefore, the beneficial effects of the temperature and flow rate measurement method are consistent with the beneficial effects of the above-mentioned temperature and flow rate measurement system, and will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS
[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.
[0030] Figure 1 Schematic diagram of the temperature and flow rate measurement system provided in an embodiment of the present application;
[0031] Figure 2 A schematic diagram of a probe provided in an embodiment of the present application;
[0032] Figure 3 Transmission spectrum of a direct bandgap thermo-optical material component provided in an embodiment of the present application;
[0033] Figure 4 Transmission spectra of the direct bandgap thermo-optical material component at different temperatures provided in an embodiment of the present application;
[0034] Figure 5 This is a graph showing the relationship between the central wavelength of the transition zone and temperature of the direct bandgap thermo-optical material component provided in an embodiment of the present application.
[0035] In the figure: 1. Detection optical fiber; 2. Direct bandgap thermo-optical material component; 3. Reflection layer; 4. Heating light; 5. Detection light; 6. Reflected light. DETAILED DESCRIPTION
[0036] To make the purpose, technical solutions, and advantages of the embodiments of this application more clear, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.
[0037] The present invention provides a temperature and flow rate measurement system and method. A direct bandgap thermo-optical material component is connected to the end of a detection optical fiber. The ambient temperature to be measured affects the temperature of the direct bandgap thermo-optical material component, causing the transmission spectrum of the direct bandgap thermo-optical material component to drift. Temperature can be measured based on the transmission spectrum drift characteristics of the direct bandgap thermo-optical material component. The direct bandgap thermo-optical material component is heated by heating light, and real-time transmission spectrum data of the direct bandgap thermo-optical material component is simultaneously measured using detection light and a detection instrument. Based on the different temperatures of the direct bandgap thermo-optical material component at different flow rates and the different transmission spectrum data of the direct bandgap thermo-optical material component at different temperatures, flow rate data can be reflected through the transmission spectrum data of the direct bandgap thermo-optical material component. Temperature measurement is performed based on the characteristic that the transmission spectrum data of the direct bandgap thermo-optical material component drifts due to temperature changes. This system integrates heating and temperature measurement to facilitate flow rate measurement. The system requires a small number of components, facilitating miniaturization. At the same time, the drift characteristics of direct bandgap thermo-optical material components are measured, which also improves the measurement accuracy.
[0038] The invention aims to solve the technical problems in related technologies of flow velocity and temperature measuring instruments using optical fiber as carrier, such as having many components, being difficult to design in a miniaturized manner, calculating temperature by wavelength drift of fiber Bragg grating, and having low measurement accuracy.
[0039] Reference Figure 1 A temperature and flow rate measurement system includes a detection light source, a heating light source, a probe, a processing module, an optical device, and an opening and closing module. During measurement, the probe is extended into the fluid environment to measure the temperature and flow rate.
[0040] Reference Figure 2The probe includes a detection optical fiber 1, a direct bandgap thermo-optical material component 2, and a reflective layer 3. The direct bandgap thermo-optical material component 2 is connected to the end of the detection optical fiber 1 and bonded to the core end face of the detection optical fiber. The reflective layer 3 includes a reflective film coated on the terminal face of the direct bandgap thermo-optical material component 2 to reflect light. The direct bandgap thermo-optical material component 2 is made of gallium arsenide or silicon carbide. In this embodiment, gallium arsenide is preferred.
[0041] The heating light source, the detection light source and the detection optical fiber are all connected to the optical device to transmit the detection light and the heating light to the detection optical fiber through the optical device. The processing module is connected to the optical device, and the reflected light is transmitted to the processing module through the optical device.
[0042] The detection light source emits detection light 5, and the heating light source emits heating light 4. Both the detection light source and the heating light source are connected to the probe via an optical device, transmitting the detection light 5 and heating light 4 into the detection optical fiber 1. The wavelength of the heating light 4 is shorter than the wavelength of the lower boundary of the transition region of the transmission spectrum of the direct bandgap thermo-optical material component 2. The heating light 4 is absorbed by the direct bandgap thermo-optical material component 2, causing the probe to heat up. After the detection light 5 enters the probe through the optical device, it is reflected by the reflective layer 3 to form reflected light 6. The reflected light 6 is then transmitted through the optical device to the processing module, which obtains the transmission spectrum data of the direct bandgap thermo-optical material component 2.
[0043] The on / off module is connected to the heating light source and controls its on / off function. When measuring temperature, the on / off module turns the heating light source off, converting the transmittance spectrum data of the direct bandgap thermo-optical material component 2, obtained by the processing module, into temperature data. When measuring flow rate, the on / off module turns the heating light source on, converting the transmittance spectrum data of the direct bandgap thermo-optical material component 2, obtained by the processing module, into flow rate data. This facilitates temperature and flow rate measurements.
[0044] The on / off module includes a light switch connected to the heating light source to control the on / off of the heating light source. The on / off module can also be integrated into the processing module, and the processing module sends a signal to the on / off module to control the on / off of the heating light source.
[0045] The wavelength range of the detection light 5 includes the wavelength range of the transmission spectrum transition region of the direct bandgap thermo-optical material component 2 .
[0046] This embodiment is based on the relationship between the temperature of the direct bandgap thermo-optical material component 2 and its transmission spectrum. Specifically, when the temperature of the direct bandgap thermo-optical material component 2 changes, the transmission spectrum of the direct bandgap thermo-optical material component 2 shifts accordingly. When measuring temperature, the temperature of the direct bandgap thermo-optical material component 2 changes with the temperature of the measured environment. Therefore, the temperature of the measured environment affects the transmission spectrum data of the direct bandgap thermo-optical material component 2. The processing module can then demodulate the transmission spectrum data of the direct bandgap thermo-optical material component 2 to obtain the temperature data of the measured environment.
[0047] In this embodiment, when measuring flow rate, after the heating light source is activated, its power remains constant, the probe temperature is at its maximum value, and the temperature of the probe's direct bandgap thermo-optical material component 2 is maintained. When the probe is placed in the fluid environment to be measured, the movement of the fluid removes heat from the probe. The faster the flow rate, the more heat is removed from the probe, i.e., the lower the temperature of the direct bandgap thermo-optical material component 2. Therefore, different flow rates correspond to different transmission spectra of the direct bandgap thermo-optical material component 2.
[0048] The faster the flow rate and the lower the probe temperature, the greater the shift in the transmission spectrum of the direct-bandgap thermo-optical material component 2. Heating light 4 and probe light 5 enter the probe simultaneously, enabling simultaneous heating and temperature measurement, while also providing feedback on changes in flow rate. Because some wavelengths of the probe light 5 are shorter than the lower boundary of the transition zone of the direct-bandgap thermo-optical material component 2, the power of the heating light source is at least 10 times that of the probe light source to minimize the impact of partial absorption of the probe light 5 by the direct-bandgap thermo-optical material component 2. In this embodiment, after heating, the probe temperature reaches 60-70 degrees Celsius, increasing the probe's temperature fluctuation range and, consequently, the flow rate measurement range.
[0049] In this arrangement, due to the arrangement of the direct bandgap type thermo-optical material component, the transmission spectrum data of the direct bandgap type thermo-optical material component can change with changes in temperature. Therefore, at different temperatures, the transmission spectrum data of the direct bandgap type thermo-optical material component are different. When the temperature of the area to be measured affects the direct bandgap type thermo-optical material component, the transmission spectrum data of the direct bandgap type thermo-optical material component changes. In this way, the transmission spectrum data of the direct bandgap type thermo-optical material component measured by the detection light and the processing module can be used to measure the temperature of the environment to be measured.
[0050] When the heating light source is turned on, the direct bandgap thermo-optical material component absorbs the heating light and heats up. The amount of heat removed from the direct bandgap thermo-optical material component varies depending on the flow rate of the fluid. Changes in the direct bandgap thermo-optical material component's transmission spectrum reflect temperature changes, reflecting changes in flow rate. Flow rate data can be obtained from the transmission spectrum data of the direct bandgap thermo-optical material component. The use of changes in the transmission spectrum data of the direct bandgap thermo-optical material component, generated by changes in the temperature of the direct bandgap thermo-optical material component, for both temperature and flow rate measurement requires a small number of components, facilitates miniaturization, and offers high measurement accuracy.
[0051] The temperature and flow rate measurement system also includes a transmission fiber and two input fibers. The two input fibers connect the detection light source and the heating light source to the optical device, respectively. The transmission fiber connects the probe to the optical device to transmit the detection light 5 and the heating light 4 to the probe through the optical device.
[0052] The temperature and flow rate measurement system also includes a receiving optical fiber, and the processing module includes a detection instrument. The receiving optical fiber connects the optical device and the detection instrument. After the probe light 5 is reflected by the reflective layer 3, the resulting reflected light 6 enters the optical device through the transmission optical fiber and is transmitted from the receiving optical fiber to the detection instrument. The detection instrument then measures the transmittance spectrum data of the direct tape material portion 2. Changes in the transmittance spectrum data measured by the detection instrument can be used to determine changes in the probe temperature and the flow rate of the fluid being measured.
[0053] In this embodiment, the detection instrument includes a photodetector, and the photodetector includes a spectrum detector, which can draw a transmission spectrum curve of the direct bandgap thermo-optical material component 2 .
[0054] The processing module also includes a controller, which is connected to the detection instrument. The controller processes and converts the transmission spectrum data of the direct bandgap thermo-optical material component 2 and outputs it as temperature data or flow rate data. The controller includes data acquisition and processing. The controller collects and processes the digital signals obtained by the detection instrument and displays them on the host computer, thereby displaying the temperature data or flow rate data.
[0055] In this embodiment, when measuring flow velocity, since the power of the heating light source remains constant, the flow velocity data can be obtained by measuring the temperature change of the probe and the corresponding shift in the transmission spectrum of the direct bandgap thermo-optical material component 2. In other embodiments, a feedback circuit can be connected to the detection optical fiber via an optical device to adjust the power of the heating light source to maintain a constant probe temperature. When measuring flow velocity, the feedback circuit adaptively increases or decreases the temperature of the heating light source to maintain the probe temperature, and the fluid flow velocity can also be obtained from the output power of the heating light source. In other embodiments, a phase-locked loop (PLL) mode can be used to periodically vary the optical power output by the heating light source to measure the fluid flow velocity.
[0056] Another embodiment of the present application provides a temperature and flow rate measurement method, based on the temperature and flow rate measurement system described above, comprising the following steps:
[0057] The heating light source is turned off, and temperature data is obtained based on the transmittance spectrum data of the direct bandgap thermo-optical material component 2 .
[0058] When measuring the temperature, the heating light source is turned off, and the temperature of the probe changes with the temperature of the environment to be measured. The transmission spectrum data of the direct bandgap thermo-optical material component 2 reflects the temperature of the direct bandgap thermo-optical material component 2. The temperature of the environment to be measured can be known through the transmission spectrum data of the direct bandgap thermo-optical material component 2.
[0059] The heating light source is turned on, and the flow rate data is obtained based on the transmission spectrum data of the direct bandgap thermo-optical material component.
[0060] When measuring flow velocity, the direct bandgap thermo-optical material component 2 is placed in the fluid environment to be measured. The direct bandgap thermo-optical material component 2 is located at the end of the probe optical fiber. After the heating light 4 enters the detection optical fiber 1, the wavelength of the heating light 4 is less than the lower boundary wavelength of the transition zone of the direct bandgap thermo-optical material component 2. The direct bandgap thermo-optical material component 2 absorbs the heating light 4, causing its own temperature to rise. In this embodiment, the wavelength of the heating light 4 is less than the wavelength of the transition zone of the transmission spectrum of the direct bandgap thermo-optical material component 2. This facilitates the absorption of the heating light 4 by the direct bandgap thermo-optical material component 2, thereby heating the probe.
[0061] The probe light 5 and the heating light 4 enter the probe simultaneously. The wavelength range of the probe light 5 includes the wavelength range of the transition zone of the direct bandgap thermo-optical material component 2. Reflected light 6, formed by the probe light 5, enters a detection instrument, which measures the transmission spectrum data of the direct bandgap thermo-optical material component 2. In this embodiment, the transmission spectrum curve of the direct bandgap thermo-optical material component 2 is obtained by a spectrum detector, and the operating range of the spectrum detector is greater than the wavelength range of the probe light 5.
[0062] The transmission spectrum data of the direct bandgap thermo-optical material component 2 varies at different temperatures, and the flow rate affects the temperature of the direct bandgap thermo-optical material component 2. The greater the flow rate, the lower the temperature of the direct bandgap thermo-optical material component 2. The transmission spectrum data of the direct bandgap thermo-optical material component 2 can be used to obtain the flow rate data of the fluid environment to be measured.
[0063] With this arrangement, after the temperature of the probe is raised, the heat of the probe can be taken away by the fluid, thereby lowering the temperature of the direct bandgap thermo-optical material component 2. As the flow rate changes, the temperature and transmission spectrum data of the direct bandgap thermo-optical material component 2 change together. By measuring the transmission spectrum data of the direct bandgap thermo-optical material component 2, the flow rate data of the fluid environment to be measured can be inferred.
[0064] Reference Figure 3 , the transmission spectrum data of the direct bandgap type thermo-optical material component 2 includes transition region data, Figure 3 The transmission spectrum data of the direct bandgap thermo-optical material component 2 at the temperature T is shown. The transition region wavelength of the transmission spectrum data of the direct bandgap thermo-optical material component 2 is between λ1 and λ2.
[0065] Reference Figure 3 and Figure 4 When measuring the drift of the transmission spectrum data of the direct bandgap thermo-optical material component 2, a specific wavelength data can be preset in the transition zone data, and the drift of the transition zone of the direct bandgap thermo-optical material component 2 can be obtained based on the drift of the specific wavelength data. In this embodiment, the specific wavelength data is preferably the center wavelength of the transition zone of the direct bandgap thermo-optical material component 2. Figure 3 The central wavelength of the transition zone of the direct bandgap type thermo-optic material component 2 is λ. In the transition zone of the direct bandgap type thermo-optic material component 2, the change rate of the transmission spectrum at the central wavelength of the transition zone is the largest. The drift amount of the transition zone data of the direct bandgap type thermo-optic material component 2 can be easily known through the drift amount of the central wavelength of the transition zone of the direct bandgap type thermo-optic material component 2.
[0066] That is, the correspondence between the transmission spectrum data of the direct bandgap type thermo-optical material component 2 and the flow rate data can be measured according to the change of the flow rate data and the drift of the transition zone data of the direct bandgap type thermo-optical material component 2 . Figure 4 The transmission spectra of the direct bandgap thermo-optical material component 2 at temperatures T1 and T2 are shown in FIG. , where T1 is greater than T2. In this embodiment, the direct bandgap thermo-optical material component 2 includes a gallium arsenide layer, and the central wavelength of the transition region of the transmission spectrum of gallium arsenide varies with temperature as shown in FIG. Figure 5 As shown in FIG, the central wavelength of the transition region of the transmission spectrum of GaAs increases with increasing temperature.
[0067] Furthermore, the flow rate data can be calibrated by a standard flow meter. The flow rate data can be calibrated under different transmission spectrum data of the direct bandgap thermo-optical material component 2, and the flow rate data can be obtained through the transmission spectrum data of the direct bandgap thermo-optical material component 2.
[0068] In other embodiments, since fluids of different temperatures cause different temperature changes on the probe, a standard flowmeter can be used to calibrate the flow rates of fluids of different temperatures to correspond to the transmission spectrum data of the direct bandgap thermo-optical material component 2, thereby reducing the impact of different fluid temperatures on the flow rate measurement.
[0069] In this embodiment, heating and temperature measurement can be integrated to reflect the transmission spectrum data of the direct bandgap thermo-optical material component 2 in real time according to the probe temperature, so as to facilitate the acquisition of flow rate data and temperature data in the measured environment through the transmission spectrum data of the direct bandgap thermo-optical material component 2.
[0070] In the description of this application, it should be noted that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be internal communication between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
[0071] It should be noted that, in this application, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprising a ..." does not exclude the presence of other identical elements in the process, method, article or device comprising the element.
[0072] The foregoing is merely a list of specific embodiments of the present application, intended to enable those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application is not limited to the embodiments shown herein, but is intended to conform to the broadest scope consistent with the principles and novel features of the present application.
Claims
1. A temperature and flow rate measurement system, characterized in that: It includes: a detection light source that emits detection light; a heating light source that emits heating light; A probe comprising a detection optical fiber, a direct bandgap thermo-optical material component connected to an end face of the detection optical fiber, and a reflective layer connected to a terminal face of the direct bandgap thermo-optical material component; a processing module connected to the probe and receiving the reflected light formed by the detection light passing through the reflective layer; an optical device, the heating light source, the detection light source, and the detection optical fiber are all connected to the optical device, so that the detection light and the heating light are transmitted to the detection optical fiber through the optical device, and the processing module is connected to the optical device, and the reflected light is transmitted to the processing module through the optical device; The on-off module switches the on-off state of the heating light source to switch the flow rate and temperature measurement.
2. The temperature and flow rate measurement system according to claim 1, characterized in that: The processing module includes a detection instrument, which receives the reflected light to measure the transmission spectrum data of the direct bandgap thermo-optical material component.
3. The temperature and flow rate measurement system according to claim 1, characterized in that: The detection instrument includes a photoelectric detector.
4. The temperature and flow rate measurement system according to claim 2, characterized in that: The processing module further includes a controller connected to the detection instrument, and the transmission spectrum data of the direct bandgap thermo-optical material component is converted into flow rate data by the controller.
5. The temperature and flow rate measurement system according to claim 1, characterized in that: The wavelength of the heating light is shorter than the wavelength of the transmission spectrum transition region of the direct bandgap thermo-optical material component; The operating wavelength range of the detection light includes the wavelength range of the transmission spectrum transition region of the direct bandgap thermo-optical material component.
6. The temperature and flow rate measurement system according to claim 1, characterized in that: The material of the direct bandgap thermo-optical material component includes gallium arsenide, silicon carbide, indium phosphide or gallium nitride.
7. The temperature and flow rate measurement system according to claim 1, characterized in that: The power of the heating light source remains unchanged.
8. The temperature and flow rate measurement system according to claim 1, characterized in that: The system also includes a feedback circuit connected to the detection optical fiber, which adjusts the power of the heating light source to maintain the temperature of the probe.
9. A temperature and flow rate measurement method, based on the temperature and flow rate measurement system according to any one of claims 1 to 8, characterized in that: The following steps are involved: Turn off the heating light source and obtain temperature data based on the transmittance spectrum data of the direct bandgap thermo-optical material component; The heating light source is turned on, and the flow rate data is obtained based on the transmission spectrum data of the direct bandgap thermo-optical material component.
10. The temperature and flow rate measurement method according to claim 9, characterized in that: The flow rate data is calibrated according to a standard flow meter to obtain the flow rate data corresponding to the transmission spectrum data of the direct bandgap thermo-optical material component.
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