A variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace

Abstract

The present invention discloses a variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace, which relates to the technical field of single crystal silicon manufacturing, and can at least partially solve the problems in the prior art that the cleaning tooling for the auxiliary chamber has poor versatility for auxiliary chambers of different sizes and cannot clean the impurities at the top of the auxiliary chamber. A variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to an embodiment of the present invention includes a support cylinder assembly and an elastic scraping blade for cleaning the inner wall of the auxiliary chamber. The elastic scraping blade is arc-shaped, and a support assembly with variable length is further arranged between the support cylinder assembly and the elastic scraping blade. One end of the support assembly is arranged on the outer peripheral wall of the support cylinder assembly, and the other end is arranged on the concave side of the elastic scraping blade.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal silicon manufacturing, and particularly relates to a variable diameter cleaning device for a secondary chamber of a single crystal furnace. Background Art

[0002] During the growth process of a single crystal rod, the survival rate is a crucial factor affecting production efficiency, and the cleanliness inside the single crystal furnace directly affects the survival rate of the single crystal rod. At present, in order to further improve the production efficiency of products and reduce the occurrence of wire breaks during the production process, the cleanliness requirements for the secondary chamber furnace wall are getting higher and higher.

[0003] At present, the commonly used cleaning tooling for the inner wall of the secondary chamber in the industry is a device with a fixed diameter and cannot be used for secondary chambers of different sizes, so its versatility is not strong; secondly, the diameter of the current cleaning tooling for the inner wall of the secondary chamber is the same as the inner diameter of the secondary chamber. During the cleaning process of the inner wall of the secondary chamber, the cleaning tooling for the inner wall of the secondary chamber needs to move up and down to scrape the inner wall of the secondary chamber. When the cleaning tooling for the inner wall of the secondary chamber moves from bottom to top, the impurities and oxides on the inner wall of the secondary chamber are brought to the top of the secondary chamber. The existing cleaning tooling for the inner wall of the secondary chamber cannot clean the impurities and oxides at the top of the secondary chamber. When the single crystal furnace is running, after the argon gas at the top of the secondary chamber is turned on, the impurities are extremely likely to enter the inside of the single crystal furnace along with the argon gas, causing wire breaks during the single crystal growth process and resulting in a decrease in the survival rate. Therefore, how to solve the problem that the current secondary chamber cleaning tooling cannot cope with secondary chambers of different sizes and how to clean the impurities at the top of the secondary chamber are the problems to be solved in this application.

[0004] In view of this, this application is specifically proposed. Summary of the Invention

[0005] The purpose of the present invention is to provide a variable diameter cleaning device for a secondary chamber of a single crystal furnace, which is used to solve the problems in the prior art that the secondary chamber cleaning tooling has poor versatility for secondary chambers of different sizes and cannot clean the impurities at the top of the secondary chamber.

[0006] To solve the above technical problems, the present invention adopts the following solutions:

[0007] The present invention provides a variable diameter cleaning device for a secondary chamber of a single crystal furnace, including a support cylinder assembly and an elastic scraping blade for cleaning the inner wall of the secondary chamber. The elastic scraping blade is arc-shaped, and a support assembly with a variable length is further arranged between the support cylinder assembly and the elastic scraping blade. One end of the support assembly is arranged on the outer peripheral wall of the support cylinder assembly, and the other end is arranged on the concave side of the elastic scraping blade.

[0008] In some optional embodiments, the support cylinder assembly includes an outer cylinder main body in the shape of a rectangular cylinder. The vertical projection of the support assembly is perpendicular to the outer peripheral wall of the outer cylinder main body, and one end of the support assembly arranged on the concave side of the elastic scraping blade is fixedly connected to the elastic scraping blade.

[0009] In some alternative embodiments, there are at least two support components between the outer sidewall of the outer cylinder main body and the elastic scraping blade, and the two support components are arranged in parallel and symmetrically on the outer sidewall of the outer cylinder main body and the concave side of the elastic scraping blade.

[0010] In some alternative embodiments, the support cylinder assembly further includes an inner cylinder main body in a cylindrical shape and inserted into the outer cylinder main body, and the outer cylinder main body is provided with strip-shaped vertical limiting holes;

[0011] The support component includes a support cross bar, a support sliding rod and a flipping support rod whose vertical projection is perpendicular to the outer peripheral wall of the outer cylinder main body, wherein:

[0012] The support cross bar is horizontally fixed at the bottom of the vertical limiting hole of the outer cylinder main body, the support sliding rod is horizontally fixed at the bottom of the concave side of the elastic scraping blade and is slidably connected with the support cross bar, one end of the flipping support rod is hinged to the support sliding rod, and the other end is hinged to the outer peripheral wall of the inner cylinder main body through the vertical limiting hole.

[0013] In some alternative embodiments, the length of the support cross bar is greater than the length of the flipping support rod, and the length of the support cross bar is less than the sum of the lengths of the flipping support rod and the support sliding rod. A strip-shaped horizontal limiting hole is provided on the side of the support cross bar away from the support cylinder assembly;

[0014] A limiting block is arranged at the bottom of the support sliding rod and is located in and slidably connected with the horizontal limiting hole.

[0015] In some alternative embodiments, the shape of the inner cylinder main body is a rectangular cylinder shape, the inner cylinder main body is slidably connected with the outer cylinder main body in the vertical direction, and at least two opposite deformation grooves are provided in the middle of the bottoms of the opposite sides of the inner cylinder main body.

[0016] In some alternative embodiments, the shapes of the inner cylinder main body and the outer cylinder main body are both square cylinder shapes, and the inner cavity width of the inner cylinder main body is greater than the diameter of the heavy hammer of the single crystal furnace.

[0017] In some alternative embodiments, at least two elastic scraping blades are provided, and two arc-shaped elastic scraping blades are symmetrically arranged with their concave sides facing each other on both sides of the outer cylinder main body.

[0018] In some alternative embodiments, four elastic scraping blades are provided, and the four elastic scraping blades are evenly distributed along the circumference of the outer cylinder main body. The central angle corresponding to the arc where the elastic scraping blade is located is: 85° to 95°;

[0019] Among the four elastic scraping blades, two opposite elastic scraping blades are arranged at the same horizontal height, the two adjacent elastic scraping blades are arranged in upper and lower layers, and the vertical projections of the four elastic scraping blades are all within the same ring at the same time.

[0020] In some alternative embodiments, the outer cylinder body and the inner cylinder body have the same height, and the height of the elastic scraping blade is less than or equal to half of the height of the outer cylinder body.

[0021] Advantages of the present invention:

[0022] A variable-diameter cleaning device for a secondary chamber of a single crystal furnace according to the present invention includes a support cylinder assembly and an elastic scraping blade for cleaning the inner wall of the secondary chamber. The elastic scraping blade is arc-shaped, and a support assembly with a variable length is further provided between the support cylinder assembly and the elastic scraping blade. One end of the support assembly is disposed on the outer peripheral wall of the support cylinder assembly, and the other end is disposed on the concave side of the elastic scraping blade.

[0023] The effects are as follows: By providing an arc-shaped elastic scraping blade and a support assembly with a variable length, after the elastic scraping blade is pressed against the inner wall of the secondary chamber with different sizes through the support assembly with a variable length, the overall concept that the elastic scraping blade realizes fitting cleaning with the inner wall of the secondary chamber with different sizes through elastic deformation can effectively improve the versatility for secondary chambers with different sizes compared with the fixed-diameter inner wall cleaning tooling in the prior art. In addition, since the length of the support assembly is variable, therefore, after the elastic scraping blade moves to the top end of the inner wall of the secondary chamber of the single crystal furnace, the support assembly can press the elastic scraping blade against the inner wall of the secondary chamber for cleaning, saving the cleaning process when the inner wall cleaning tooling in the prior art needs to move from bottom to top first, and can avoid the problem that some impurities on the inner wall of the single crystal furnace are brought to the top end of the secondary chamber, resulting in the inability to clean the impurities at the top end of the secondary chamber and the reduction of the survival rate of the single crystal rod. Description of the Drawings

[0024] Figure 1 is a three-dimensional structural schematic diagram of an embodiment of the present invention;

[0025] Figure 2 is a three-dimensional structural schematic diagram of another perspective of an embodiment of the present invention;

[0026] Figure 3 is a three-dimensional exploded structural schematic diagram of an embodiment of the present invention;

[0027] Figure 4 is a three-dimensional exploded structural schematic diagram of another perspective of an embodiment of the present invention;

[0028] Figure 5 is a top view structural schematic diagram of an embodiment of the present invention;

[0029] Figure 6 is a bottom view structural schematic diagram of an embodiment of the present invention;

[0030] Figure 7 is a front view structural schematic diagram of an embodiment of the present invention;

[0031] Figure 8Schematic three-dimensional structure diagram of the outer cylinder in the embodiment of the present invention;

[0032] Figure 9 Schematic three-dimensional structure diagram of the inner cylinder in the embodiment of the present invention;

[0033] Figure 10 Schematic three-dimensional structure diagram of the elastic scraping blade in the embodiment of the present invention;

[0034] Figure 11 Schematic top view structure diagram of the elastic scraping blade when retracted in the embodiment of the present invention;

[0035] Figure 12 Schematic top view structure diagram of the elastic scraping blade after deformation in the embodiment of the present invention.

[0036] Explanation of reference numerals:

[0037] 1 - Support cylinder assembly, 11 - Outer cylinder main body, 111 - Vertical limit hole, 12 - Inner cylinder main body, 121 - Deformation groove, 2 - Support assembly, 21 - Support cross bar, 211 - Horizontal limit hole, 22 - Flip support rod, 23 - Support slide rod, 231 - Limit block, 3 - Elastic scraping blade. Detailed implementation manners

[0038] The present invention will be further described in detail below in conjunction with the embodiments and the drawings, but the implementation manners of the present invention are not limited thereto.

[0039] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present invention is usually placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0040] In the description of the present invention, it should also be noted that unless otherwise clearly defined and limited, the terms "set", "provided with", "installed", "connected", "connected to" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0041] The present invention will be described in detail below by referring to the drawings and in conjunction with the embodiments:

[0042] As Figures 1 to 4 shown, this embodiment provides a variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace, including a support cylinder assembly 1 and an elastic scraping blade 3 for cleaning the inner wall of the auxiliary chamber. The elastic scraping blade 3 is arc-shaped, and a support assembly 2 with a variable length is further arranged between the support cylinder assembly 1 and the elastic scraping blade 3. One end of the support assembly 2 is arranged on the outer peripheral wall of the support cylinder assembly 1, and the other end is arranged on the concave side of the elastic scraping blade 3.

[0043] In this embodiment, by setting the arc-shaped elastic scraping blade 3 and the support assembly 2 with a variable length, after the elastic scraping blade 3 is pressed against the inner wall of the auxiliary chamber with different sizes by the support assembly 2 with a variable length, the elastic scraping blade 3 realizes the overall concept of fitting and cleaning the inner wall of the auxiliary chamber with different sizes through elastic deformation. Compared with the fixed-diameter inner wall cleaning tooling of the auxiliary chamber in the prior art, the versatility for auxiliary chambers with different sizes can be effectively improved. In addition, since the length of the support assembly 2 is variable, after the elastic scraping blade 3 moves to the top of the inner wall of the single crystal furnace auxiliary chamber, the support assembly 2 can press the elastic scraping blade 3 against the inner wall of the auxiliary chamber for cleaning, eliminating the cleaning process when the inner wall cleaning tooling of the auxiliary chamber in the prior art needs to move from bottom to top first, and avoiding the problem that some impurities on the inner wall of the single crystal furnace are brought to the top of the auxiliary chamber, resulting in the inability to clean the impurities at the top of the auxiliary chamber and the reduction of the survival rate of the single crystal rod.

[0044] In some optional embodiments, the support cylinder assembly 1 includes an outer cylinder main body 11 in the shape of a rectangular cylinder. The vertical projection of the support assembly 2 is perpendicular to the outer peripheral wall of the outer cylinder main body 11, and the end of the support assembly 2 arranged on the concave side of the elastic scraping blade 3 is fixedly connected to the elastic scraping blade 3. As Figure 4 and Figure 5 shown, the outer cylinder main body 11 is in the shape of a rectangular cylinder, and the vertical projection of the support assembly 2 is perpendicular to the outer peripheral wall of the outer cylinder main body 11, which can enable this embodiment to be applied to auxiliary chambers with different sizes. During the process that the support assembly 2 pushes the elastic scraping blade 3 to contact the inner wall of the auxiliary chamber, the elastic deformation of the elastic scraping blade 3 will not cause the support assembly 2 to swing left and right along the circumferential direction of the outer cylinder main body 11, resulting in problems such as the scraping blade being misaligned, skewed, and the support assembly 2 being easily damaged.

[0045] In some optional embodiments, there are at least two support assemblies 2 between the outer side wall of the outer cylinder main body 11 and the elastic scraping blade 3, and the two support assemblies 2 are arranged in parallel and symmetrically on the outer side wall of the outer cylinder main body 11 and the concave side of the elastic scraping blade 3. In this embodiment, as Figure 4 and Figure 5 shown, the number of support assemblies 2 between the outer side wall of the outer cylinder main body 11 and each elastic scraping blade 3 is two, which can effectively improve the support strength for the elastic scraping blade 3 and avoid the problem that a single support assembly 2 cannot effectively support the elastic scraping blade 3. In this embodiment, as Figure 4and Figure 5 As shown in Figure 5 , the two support components 2 are arranged parallel to each other, which can avoid the problem that during the process of the support component 2 pushing the elastic scraper 3 close to the inner wall of the secondary chamber, the circumferential swing amplitude of the support component 2 outward from the outer cylinder main body 11 is too large, resulting in the disconnection of the connection point between the elastic scraper 3 and the support component 2.

[0046] In this embodiment, the support cylinder assembly 1, the support component 2 and the elastic scraper 3 are all made of stainless steel.

[0047] In some alternative embodiments, as Figures 1 to 10 shown in Figures 1 to 10 , the support cylinder assembly 1 further includes an inner cylinder main body 12 in a cylindrical shape and inserted into the outer cylinder main body 11, and a strip-shaped vertical limiting hole 111 is provided on the outer cylinder main body 11;

[0048] The support component 2 includes a support cross bar 21, a support sliding rod 23 and a flipping support rod 22 whose vertical projection is perpendicular to the outer peripheral wall of the outer cylinder main body 11, wherein:

[0049] The support cross bar 21 is horizontally fixed at the bottom of the vertical limiting hole 111 of the outer cylinder main body 11, the support sliding rod 23 is horizontally fixed at the bottom of the concave side of the elastic scraper 3 and is slidably connected with the support cross bar 21, one end of the flipping support rod 22 is hinged to the support sliding rod 23, and the other end is hinged to the outer peripheral wall of the inner cylinder main body 12 through the vertical limiting hole 111.

[0050] During use, when the top of the inner cylinder main body 12 and the outer cylinder main body 11 approach each other, the inner cylinder main body 12 will drive the end of the flipping support rod 22 hinged thereto to gradually lower, so that the flipping support rod 22 pushes the support sliding rod 23 hinged thereto to move outward, and further pushes the elastic scraper 3 to open.

[0051] In some alternative embodiments, the length of the support cross bar 21 is greater than the length of the flipping support rod 22, the length of the support cross bar 21 is less than the sum of the lengths of the flipping support rod 22 and the support sliding rod 23, and a strip-shaped horizontal limiting hole 211 is provided on the side of the support cross bar 21 away from the support cylinder assembly 1;

[0052] A limiting block 231 located in the horizontal limiting hole 211 and slidably connected therewith is provided at the bottom of the support sliding rod 23. The length of the support cross bar 21 being greater than the length of the flipping support rod 22 can avoid the disconnection between the support sliding rod 23 and the support sliding rod 23 when the flipping support rod 22 is in a horizontal state, resulting in the support cross bar 21 being unable to effectively support the support sliding rod 23 and the elastic scraper 3. In addition, in this embodiment, by providing the limiting block 231 in the horizontal limiting hole 211, the support sliding rod 23 can be further restricted on the support cross bar 21, so that the support cross bar 21 supports the support sliding rod 23 and the elastic scraper 3.

[0053] In some alternative embodiments, the inner cylinder body 12 is in the shape of a rectangular cylinder, and the inner cylinder body 12 is slidably connected to the outer cylinder body 11 in the vertical direction. At least two opposite deformation grooves 121 are provided in the middle of the bottoms of the opposite sides of the inner cylinder body 12. By providing the deformation grooves 121, when the support assembly 2 swings, the flipping support rod 22 can reduce the stress at its connection with the inner cylinder body 12 through the deformation grooves 121, avoiding shortening the service life due to long-term stress concentration.

[0054] In some alternative embodiments, as Figure 8 and Figure 9 shown, the inner cylinder body 12 and the outer cylinder body 11 are both in the shape of a square cylinder, and the inner cavity width of the inner cylinder body 12 is greater than the diameter of the heavy hammer of the single crystal furnace. The inner cavity width of the inner cylinder body 12 being greater than the diameter of the heavy hammer of the single crystal furnace facilitates the heavy hammer of the single crystal furnace to pass through the inner cavity of the inner cylinder body 12.

[0055] In some alternative embodiments, at least two elastic scraping blades 3 are provided, and the two arc-shaped elastic scraping blades 3 are symmetrically arranged on both sides of the outer cylinder body 11 with their concave sides facing each other.

[0056] In some alternative embodiments, as Figure 5 and Figure 6 shown, four elastic scraping blades 3 are provided, and the four elastic scraping blades 3 are evenly distributed along the circumferential direction of the outer cylinder body 11. The central angle corresponding to the arc where the elastic scraping blades 3 are located is: 85° to 95°;

[0057] Among the four elastic scraping blades 3, the two opposite elastic scraping blades 3 are arranged at the same horizontal height, the two adjacent elastic scraping blades 3 are arranged in upper and lower layers, and the vertical projections of the four elastic scraping blades 3 are all within the same circular ring in the natural state. In this embodiment, the central angle corresponding to the arc where the elastic scraping blades 3 are located is 90°. In some embodiments, the central angle corresponding to the arc where the elastic scraping blades 3 are located can also be 85°, 90°. When the four elastic scraping blades 3 are fully pushed open by the support assembly 2, as Figure 5 and Figure 6 shown, the vertical projections of the four elastic scraping blades 3 are all within the same circular ring.

[0058] In some alternative embodiments, the outer cylinder body 11 and the inner cylinder body 12 have the same height, and the height of the elastic scraping blade 3 is less than or equal to half of the height of the outer cylinder body 11.

[0059] The working process and working principle of this embodiment are as follows:

[0060] When in use, the elastic scraper 3 is pushed toward the support cylinder assembly 1, so that all the elastic scrapers 3 are close to the support cylinder assembly 1, and the inner cylinder body 12 of the support assembly 2 is higher than the outer cylinder body 11. At this time, the top view of the device is as follows: Figure 11 As shown, the device is then moved to the top of the secondary chamber so that the top of the inner cylinder body 12 contacts the top of the secondary chamber, and then pressed upward so that the tops of the outer cylinder body 11 and the inner cylinder body 12 gradually approach each other. At this time, the angle between the flip support rod 22 hinged on the inner cylinder body 12 and the horizontal plane gradually decreases, and the length of the flip support rod 22 in the horizontal direction gradually increases, thereby pushing the support slide rod 23 hinged thereto to move away from the outer cylinder body 11, thereby pushing the elastic scraper 3 to open until the elastic scraper 3 contacts the inner wall of the secondary chamber. As the top of the inner cylinder body 12 and the top of the outer cylinder body 11 gradually approach each other, at this time, as shown in FIG. Figure 12 As shown, the elastic scraper 3 will be elastically deformed so that the arc where it is located coincides with the inner wall of the auxiliary chamber. Then, the elastic scraper 3 moves downward while being in contact with the inner wall of the auxiliary chamber to clean the inner wall of the auxiliary chamber.

[0061] In this embodiment, the outer cylinder body 11 and the inner cylinder body 12 are both rectangular cylinders, and the two support components 2 are arranged parallel to and perpendicular to the outer side wall of the outer cylinder body 11. Figure 12 As shown, during the elastic deformation process of the elastic scraper 3, the swinging distance of the support component 2 along the circumference of the outer cylinder body 11 can be effectively reduced, thereby avoiding excessive stress concentration at the connection points between the support component 2, the support cylinder component 1, and the elastic scraper 3, resulting in the support component 2 being unable to push the elastic scraper 3 close to the inner wall of the auxiliary chamber, and problems such as detachment and damage at the connection.

[0062] When the elastic scraper 3 is adapted to the sub-chambers of different sizes, since the length of the elastic scraper 3 remains unchanged, during the deformation of the elastic scraper 3, the center angle of the arc corresponding to the elastic scraper 3 will change. The greater the change in the size of the sub-chamber, the greater the change in the center angle of the arc corresponding to the elastic scraper 3, and vice versa. In this embodiment, the connection point between the elastic scraper 3 and the two support components 2 is fixed. The greater the change in the size of the sub-chamber, the greater the change in the center angle of the portion between the connection points of the elastic scraper 3 and the two support components 2. The other end of the support component 2 is set on the outer peripheral wall of the support tube component 1. When the two support components 2 are not parallel to each other, the deformation of the elastic scraper 3 and the change in the length of the support component 2 will cause it to swing between the support tube component 1 and the elastic scraper 3, resulting in stress concentration at the connection between the support component 2 and the elastic scraper 3 and the support tube component 1, causing the connection to fall off.

[0063] In this embodiment, the two support components 2 are arranged in parallel and are perpendicular to the outer side wall of the outer cylinder body 11. When the length of the support component 2 becomes shorter, the angle of the part of the elastic blade 3 between the connection points of the two support components 2 and the elastic blade 3 will increase synchronously, reducing the swing amount required for the end of the support component 2 far from the elastic blade 3. This can effectively avoid the problem of stress concentration at the connection between the elastic blade 3 and the support component 2, enabling the two support components 2 to smoothly push the elastic blade 3 closer to the inner wall of the auxiliary chamber and clean its inner wall.

[0064] In addition, during the elastic deformation process of the elastic blade 3, the arc curvature where the elastic blade 3 is located will increase, and the fixed connection points of the two parallel support components 2 and the elastic blade 3 remain unchanged. Therefore, the ends of the two support components 2 far from the elastic blade 3 will swing with the elastic deformation of the elastic blade 3. The longer the length of the support component 2, the greater the swing distance of the end far from the elastic blade 3. In this embodiment, by providing the support cylinder assembly 1 and arranging the end of the support component 2 far from the elastic blade 3 on the outer peripheral wall of the support cylinder assembly 1, the length of the support component 2 can be further reduced, thereby reducing the swing amount of the support component 2 caused by the elastic deformation of the elastic blade 3 and avoiding damage caused by stress concentration at the connections between the support component 2, the support cylinder assembly 1, and the elastic blade 3. Therefore, in this embodiment, by providing parallel support components 2 and a rectangular support cylinder assembly 1, the problem of stress concentration caused by the deformation of the elastic blade 3 is overcome by combining two technical directions for reducing stress, enabling the elastic blade 3 to adapt to different sizes of the auxiliary chamber of the single crystal furnace through deformation.

[0065] As Figures 5 to 7 shown, the four elastic blades 3 in this embodiment are arranged in upper and lower layers, and the heights of the two opposite elastic blades 3 are equal. After the elastic blades 3 undergo elastic deformation, the overlapping parts of the elastic blades 3 become overlapped up and down, effectively avoiding the problem that there is no shrinking space for the four elastic blades 3 after elastic deformation, enabling the four elastic blades 3 to clean all areas of the inner wall of the auxiliary chamber at one time and improving the cleaning effect.

[0066] It can be understood that the above embodiments are merely exemplary embodiments adopted to illustrate the principle of the present invention. However, the present invention is not limited thereto. For those of ordinary skill in the art, various deformations and improvements can be made without departing from the spirit and essence of the present invention, and these deformations and improvements are also regarded as the protection scope of the present invention.

Claims

1. A variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace, characterized in that It includes a support cylinder assembly (1) and an elastic scraping blade (3) for cleaning the inner wall of the auxiliary chamber. The elastic scraping blade (3) is arc-shaped. A support assembly (2) with variable length is also provided between the support cylinder assembly (1) and the elastic scraping blade (3). One end of the support assembly (2) is arranged on the outer peripheral wall of the support cylinder assembly (1), and the other end is arranged on the concave side of the elastic scraping blade (3). The support cylinder assembly (1) includes an outer cylinder main body (11) in the shape of a rectangular cylinder. The vertical projection of the support assembly (2) is perpendicular to the outer peripheral wall of the outer cylinder main body (11). One end of the support assembly (2) arranged on the concave side of the elastic scraping blade (3) is fixedly connected to the elastic scraping blade (3). The support cylinder assembly (1) further includes an inner cylinder main body (12) in the shape of a cylinder and inserted into the outer cylinder main body (11). The outer cylinder main body (11) is provided with a strip-shaped vertical limiting hole (111). The support assembly (2) includes a support cross bar (21), a support sliding rod (23) and a flipping support rod (22) whose vertical projections are perpendicular to the outer peripheral wall of the outer cylinder main body (11). Among them: The support cross bar (21) is horizontally fixed at the bottom of the vertical limiting hole (111) of the outer cylinder main body (11). The support sliding rod (23) is horizontally fixed at the bottom of the concave side of the elastic scraping blade (3) and is slidably connected to the support cross bar (21). One end of the flipping support rod (22) is hinged to the support sliding rod (23), and the other end is hinged to the outer peripheral wall of the inner cylinder main body (12) through the vertical limiting hole (111).

2. The variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to claim 1, wherein, There are at least two support assemblies (2) between the outer side wall of the outer cylinder main body (11) and the elastic scraping blade (3), and the two support assemblies (2) are arranged in parallel and symmetrically on the outer side wall of the outer cylinder main body (11) and the concave side of the elastic scraping blade (3).

3. The variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to claim 1, wherein The length of the support cross bar (21) is greater than the length of the flipping support rod (22), and the length of the support cross bar (21) is less than the sum of the lengths of the flipping support rod (22) and the support sliding rod (23). A strip-shaped horizontal limiting hole (211) is provided on the side of the support cross bar (21) away from the support cylinder assembly (1). A limiting block (231) located in the horizontal limiting hole (211) and slidably connected to it is provided at the bottom of the support sliding rod (23).

4. The variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to claim 1, wherein, The inner cylinder main body (12) is in the shape of a rectangular cylinder. The inner cylinder main body (12) is slidably connected to the outer cylinder main body (11) in the vertical direction. At least two opposite deformation grooves (121) are provided in the middle of the bottoms of the opposite sides of the inner cylinder main body (12).

5. The variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to claim 4, wherein The inner cylinder main body (12) and the outer cylinder main body (11) are both in the shape of a square cylinder. The inner cavity width of the inner cylinder main body (12) is greater than the diameter of the heavy hammer of the single crystal furnace.

6. The variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that, At least two elastic scraping blades (3) are provided. Two arc-shaped elastic scraping blades (3) are symmetrically arranged with their concave sides facing each other on both sides of the outer cylinder main body (11).

7. The variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to claim 6, wherein, Four elastic scraping blades (3) are provided. The four elastic scraping blades (3) are evenly distributed along the circumference of the outer cylinder main body (11). The central angle corresponding to the arc where the elastic scraping blade (3) is located is: 85° to 95°. Among the four elastic scraping blades (3), two opposite elastic scraping blades (3) are arranged at the same horizontal height, two adjacent elastic scraping blades (3) are arranged in upper and lower layers, and the vertical projections of the four elastic scraping blades (3) are all within the same circular ring at the same time.

8. The variable-diameter cleaning device for the auxiliary chamber of a single crystal furnace according to claim 6, wherein, The outer cylinder body (11) and the inner cylinder body (12) have the same height, and the height of the elastic scraping blade (3) is less than or equal to half of the height of the outer cylinder body (11).

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