Self-limiting automatic grabbing mechanical clamping jaw and method of use thereof

Abstract

The present application relates to a kind of self-limiting automatic grabbing mechanical clamping jaw and its using method, the self-limiting automatic grabbing mechanical clamping jaw is used in the grabbing crystal bar cleaning basket in semiconductor material cleaning, the mechanical clamping jaw includes clamping jaw finger, linear drive mechanism and clamping jaw shell, the clamping jaw finger is symmetrically arranged at the left and right ends of clamping jaw shell, the linear drive mechanism is fixedly arranged at the bottom of clamping jaw shell, and the output shaft of the left and right ends of linear drive mechanism is drivenly connected with clamping jaw finger for grabbing crystal bar cleaning basket.It has the advantages of reasonable structure design, easy operation, stable and reliable operation, etc., even if the parts wear, mechanical limit failure, still can guarantee that clamping jaw opens and closes to position, and the operation of grabbing action is accurate.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor material cleaning processes, and in particular to a self-limiting automatic gripping mechanical claw and a method of using the same, which can automatically grip and self-limit semiconductor cleaning materials, thereby greatly improving work efficiency. Background Art

[0002] In traditional semiconductor material cleaning processes, the transfer of semiconductor material between tanks relies on mechanical grippers, which are used to grasp the semiconductor material. The grippers are powered to open and close, but each has a specific travel range, and wear often occurs at the hinge joints. This wear can cause the grippers to exceed their preset limit, resulting in damage to components and losses during the gripping process. This present invention, based on this research background, aims to provide a self-limiting, automatic gripping mechanical gripper to meet practical needs and overcome these drawbacks. Summary of the Invention

[0003] In view of the above-mentioned deficiencies in the mechanical claws in the prior art, the purpose of the present invention is to provide a self-limiting automatic grasping mechanical claw and a method of use thereof, which has the advantages of reasonable structural design, easy operation and use, stable and reliable operation, etc. Even if the parts are worn or the mechanical limit fails, it can still ensure that the claws open and close in place and the grasping action is accurate.

[0004] In order to achieve the above object, the present invention adopts the following technical solutions:

[0005] A self-limiting automatic gripping mechanical claw is used to grab a crystal rod cleaning basket during semiconductor material cleaning. The mechanical claw includes claw fingers, a linear drive mechanism and a claw shell. The claw fingers are symmetrically arranged at the left and right ends of the claw shell. The linear drive mechanism is fixedly arranged at the bottom of the claw shell, and the output shafts at the left and right ends of the linear drive mechanism are driven and connected to the claw fingers for grabbing the crystal rod cleaning basket.

[0006] As a further optimization of the above scheme, the linear drive mechanism includes a coupling seat, a connecting pin, a coupling plate, a clamping shaft and a double-acting cylinder; the number of the claw fingers is four, and they are symmetrically arranged in pairs at the left and right ends of the claw shell; the upper end of each of the claw fingers is spaced apart with a first hinge hole and a second hinge hole, the first hinge hole is located at the upper end of the claw finger and is hingedly arranged on the claw shell through a pin shaft, and the second hinge hole is located on the side away from the claw shell; the second hinge holes of the claw fingers on both sides of the same end of the claw shell are connected through a clamping shaft; the coupling plate is installed in the middle of the clamping shaft and is rotatably connected to the coupling seat through a connecting pin; the double-acting cylinder is installed at the bottom of the claw shell, and the coupling seat is fixedly installed on the two output shaft ends of the double-acting cylinder; the bottom of each claw finger is provided with a supporting groove that cooperates with the slot of the crystal rod cleaning basket.

[0007] As a further optimization of the above solution, the coupling seat is a shaft seat with an ear plate, one end of which is connected to the double-acting cylinder, and the other end is connected to the connecting coupling plate through a coupling pin.

[0008] As a further optimization of the above solution, the linear drive mechanism also includes a stroke limit switch; the stroke limit switch is connected to the double-acting cylinder to control the start and stop of the double-acting cylinder when the stroke is minimum and maximum.

[0009] As a further optimization of the above scheme, the mechanical gripper also includes an automatic control system, which includes a programmable controller, a sensor component connected to the programmable controller data signal, and a driver connected to the programmable controller; the sensor component includes a camera, an image processing module, and an image storage module, and the camera is used to capture the images of the crystal rod cleaning basket before and after grabbing in real time, and send the real-time captured images to the image processing module, and the image processing module compares the received images with the corresponding images preset in the image storage module, and sends the comparison results to the programmable controller; the driver is controlled and connected to the double-acting cylinder; the programmable controller sends the start and stop instructions of the double-acting cylinder to the driver according to the comparison results, and when there is a crystal rod in the real-time captured image of the crystal rod cleaning basket, a stop instruction of the double-acting cylinder is issued; otherwise, an start instruction of the double-acting cylinder is issued; after receiving the instructions, the driver controls the working state of the double-acting cylinder.

[0010] As a further optimization of the above scheme, the sensor assembly also includes a pressure sensor located on the claw finger and connected to the programmable controller data signal. The pressure sensor is arranged at the connection between the claw finger and the crystal rod cleaning basket slot for real-time detection of the pressure value at the connection, and the real-time detected pressure value is sent to the programmable controller; the automatic control system also includes an alarm connected to the programmable controller; the programmable controller compares the received pressure value with the preset pressure threshold, and controls the working state of the alarm according to the comparison result. When the real-time pressure value is lower than the preset pressure threshold, the programmable controller controls the alarm to issue an alarm prompt signal; otherwise, no alarm prompt signal is issued.

[0011] As a further optimization of the above solution, the claw fingers are in a "Z" shape, and the second hinge hole is located below the first hinge hole.

[0012] The method for using the self-limiting automatic gripping mechanical claw of the present invention comprises the following steps:

[0013] 1) After receiving the instruction to grab the crystal rod cleaning basket, the output shafts at both ends of the double-acting cylinder are controlled to extend, and the coupling seat, coupling plate, and clamping shaft are pulled forward, so that the claw fingers are rotated outward as the center of the upper end hinge point, so that the hook at the bottom of the claw fingers cooperates and clamps with the clamping groove of the crystal rod cleaning basket. At this time, the vertical limit edge above the supporting groove of the claw fingers is in a vertical state with the ground, and the supporting groove is in a parallel state with the ground, clamping the crystal rod cleaning basket, achieving consistency in the movement positions of multiple claw fingers, and the vertical limit edge of the claw fingers above the supporting groove is in a vertical state with the ground, and the supporting groove is in a parallel state with the ground, clamping the crystal rod cleaning basket, achieving consistency in the movement positions of multiple claw fingers, and grabbing the crystal rod cleaning basket. When the double-acting cylinder is extended to the limit position, the claw extension effect is achieved, and it also has an extension self-limiting function;

[0014] 2) After receiving the instruction to stop grabbing the crystal ingot cleaning basket, the output shafts at both ends of the double-acting cylinder are controlled to retract, pulling the coupling seat, coupling plate, and clamping shaft backward, so that the claw fingers rotate inward with the upper end hinge point as the center, so that the hook at the bottom of the claw fingers disengages from the slot of the crystal ingot cleaning basket, and the crystal ingot cleaning basket is no longer grasped. The claw retraction effect is achieved when the double-acting cylinder retracts to the limit position, and it also has a self-limiting function for retraction.

[0015] The self-limiting automatic gripping mechanical claw and the method of using the present invention have the following beneficial effects:

[0016] (1) It has the advantages of reasonable structural design, easy operation, stable and reliable operation, etc. Even if the parts are worn or the mechanical limit fails, it can still ensure that the claws open and close in place and the grasping action is accurate.

[0017] (2) The setting of the travel limit switch can further ensure the stability of the operating position of the double-acting cylinder. In conjunction with the automatic control system, it can not only improve the automation level, but also further improve the reliability of the double-acting cylinder operation and the accurate control of whether the crystal rod cleaning basket is grasped or not.

[0018] (3) The setting of the sensor components of the automatic control system can be further supplemented and improved according to the actual design and use needs. At the same time, it can adopt PLC programmable controllers or other controllers of the same type, which greatly improves the adaptability of the overall structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Attachment Figure 1 It is a structural schematic diagram of the self-limiting automatic grasping mechanical claw of the present invention.

[0020] Attachment Figure 2 This is a schematic diagram of the main structure of the self-limiting automatic grasping mechanical claw of the present invention.

[0021] Attachment Figure 3 This is a schematic diagram of the A-axis structure of the self-limiting automatic gripping mechanical claw of the present invention.

[0022] Attachment Figure 4 It is a structural schematic diagram of the self-limiting automatic gripping mechanical gripper of the present invention when the gripper fingers are in the contraction limit position.

[0023] Attachment Figure 5 It is a structural schematic diagram of the claw fingers of the self-limiting automatic grasping mechanical claw of the present invention. DETAILED DESCRIPTION

[0024] The following is combined with Figure 1-5 The self-limiting automatic grasping mechanical claw of the present invention and the method of using the same are described in detail.

[0025] A self-limiting automatic gripping mechanical claw is used to grab a crystal rod cleaning basket 8 during semiconductor material cleaning. The mechanical claw includes a claw finger 1, a linear drive mechanism and a claw shell 7. The claw fingers are symmetrically arranged at the left and right ends of the claw shell. The linear drive mechanism is fixedly arranged at the bottom of the claw shell, and the output shafts at the left and right ends of the linear drive mechanism are driven and connected to the claw fingers for grabbing the crystal rod cleaning basket. The linear drive mechanism includes a coupling seat 2, a connecting pin 3, a coupling plate 4, a clamping shaft 5 and a double-acting cylinder 6; the number of the claw fingers is four, and they are symmetrically arranged in pairs at the left and right ends of the claw shell; the upper end of each of the claw fingers is spaced apart with a first hinge hole 1-1 and a second hinge hole 1-2, the first hinge hole is located at the upper end of the claw finger and is hinged on the claw shell through a pin shaft, and the second hinge hole is located on the side away from the claw shell; the second hinge holes of the claw fingers on both sides of the same end of the claw shell are connected through a clamping shaft; the coupling plate is installed in the middle of the clamping shaft and is rotatably connected to the coupling seat through a connecting pin; the double-acting cylinder is installed at the bottom of the claw shell, and the coupling seat is fixedly installed on the two output shaft ends of the double-acting cylinder; the bottom of each claw finger is provided with a supporting groove 1-4 that cooperates with the slot of the crystal rod cleaning basket. The coupling seat 2 is a shaft seat with an ear plate, one end of which is connected to the double-acting cylinder 6, and the other end is connected to the coupling plate 4 via a coupling pin 3. The linear drive mechanism also includes a travel limit switch; this travel limit switch is connected to the double-acting cylinder to control the opening and closing of the double-acting cylinder at the minimum and maximum stroke states. The mechanical gripper also includes an automatic control system, which includes a programmable controller, a sensor component connected to the programmable controller data signal, and a driver connected to the programmable controller; the sensor component includes a camera, an image processing module, and an image storage module, the camera is used to capture real-time images of the crystal rod cleaning basket before and after grabbing, and send the real-time captured images to the image processing module, the image processing module compares the received images with the corresponding images preset in the image storage module, and sends the comparison results to the programmable controller; the driver is controlled and connected to the double-acting cylinder; the programmable controller sends the start and stop instructions of the double-acting cylinder to the driver according to the comparison results, and when there is a crystal rod in the real-time captured image of the crystal rod cleaning basket, a stop instruction of the double-acting cylinder is issued; otherwise, an start instruction of the double-acting cylinder is issued; after receiving the instructions, the driver controls the working state of the double-acting cylinder.The sensor assembly also includes a pressure sensor located on the claw finger and connected to the programmable controller data signal. The pressure sensor is located at the connection between the claw finger and the crystal ingot cleaning basket slot to detect the pressure value at the connection in real time and transmit the detected pressure value to the programmable controller. The automatic control system also includes an alarm connected to the programmable controller. The programmable controller compares the received pressure value with a preset pressure threshold and controls the alarm's operating state based on the comparison result. When the real-time pressure value is lower than the preset pressure threshold, the programmable controller controls the alarm to issue an alarm prompt signal; otherwise, no alarm prompt signal is issued. The claw finger is in a "Z" shape, and the second hinge hole is located below the first hinge hole.

[0026] The method for using the self-limiting automatic gripping mechanical claw of the present invention comprises the following steps:

[0027] 1) After receiving the instruction to grab the crystal rod cleaning basket, the output shafts at both ends of the double-acting cylinder are controlled to extend, and the coupling seat, coupling plate, and clamping shaft are pulled forward, so that the claw fingers are rotated outward as the center of the upper end hinge point, so that the hook at the bottom of the claw fingers cooperates and clamps with the clamping groove of the crystal rod cleaning basket. At this time, the vertical limit edge above the supporting groove of the claw fingers is in a vertical state with the ground, and the supporting groove is in a parallel state with the ground, clamping the crystal rod cleaning basket, achieving consistency in the movement positions of multiple claw fingers, and the vertical limit edge of the claw fingers above the supporting groove is in a vertical state with the ground, and the supporting groove is in a parallel state with the ground, clamping the crystal rod cleaning basket, achieving consistency in the movement positions of multiple claw fingers, and grabbing the crystal rod cleaning basket. When the double-acting cylinder is extended to the limit position, the claw extension effect is achieved, and it also has an extension self-limiting function;

[0028] 2) After receiving the instruction to stop grabbing the crystal ingot cleaning basket, the output shafts at both ends of the double-acting cylinder are controlled to retract, pulling the coupling seat, coupling plate, and clamping shaft backward, so that the claw fingers rotate inward with the upper end hinge point as the center, so that the hook at the bottom of the claw fingers disengages from the slot of the crystal ingot cleaning basket, and the crystal ingot cleaning basket is no longer grasped. The claw retraction effect is achieved when the double-acting cylinder retracts to the limit position, and it also has a self-limiting function for retraction.

[0029] The above description of the embodiments is intended to facilitate understanding and application of the present invention by those skilled in the art. It will be apparent that those skilled in the art can readily make various modifications to these embodiments and apply the general principles described herein to other embodiments without requiring inventive effort. Therefore, the present invention is not limited to the embodiments described herein. Improvements and modifications made by those skilled in the art based on the disclosure of the present invention without departing from the scope of the present invention should be within the scope of protection of the present invention.

Claims

1. A self-limiting automatic gripping mechanical claw, which is used for gripping a crystal rod cleaning basket (8) in semiconductor material cleaning, and is characterized by: The mechanical claw comprises claw fingers (1), a linear drive mechanism and a claw shell (7), wherein the claw fingers are symmetrically arranged at the left and right ends of the claw shell, the linear drive mechanism is fixedly arranged at the bottom of the claw shell, and the output shafts at the left and right ends of the linear drive mechanism are connected to the claw fingers for grabbing the crystal rod cleaning basket; the linear drive mechanism comprises a coupling seat (2), a coupling pin (3), a coupling plate (4), a clamping shaft (5) and a double-acting cylinder (6); the number of the claw fingers is four, and they are symmetrically arranged at the left and right ends of the claw shell in pairs; the upper end of each of the claw fingers is spaced apart by a first A hinge hole (1-1) and a second hinge hole (1-2), wherein the first hinge hole is located at the upper end of the claw finger and is hingedly arranged on the claw shell through a pin shaft, and the second hinge hole is located on a side away from the claw shell; the second hinge holes of the claw fingers on both sides of the same end of the claw shell are connected through a clamping shaft; the coupling plate is installed in the middle of the clamping shaft and is rotatably connected to the coupling seat through a connecting pin; the double-acting cylinder is installed at the bottom of the claw shell, and the coupling seat is fixedly installed at the two output shaft ends of the double-acting cylinder; the bottom of each claw finger is provided with a supporting groove (1-4) that is matched with the slot of the crystal rod cleaning basket.

2. The self-limiting automatic gripping mechanical claw according to claim 1, characterized in that: The coupling seat (2) is a shaft seat with an ear plate, one end of which is connected to the double-acting cylinder (6), and the other end is connected to the connecting coupling plate (4) through a coupling pin (3).

3. A self-limiting automatic gripping mechanical claw according to claim 1 or 2, characterized in that: The linear drive mechanism also includes a stroke limit switch; the stroke limit switch is connected in conjunction with the double-acting cylinder to control the start and stop of the double-acting cylinder when the stroke is minimum and maximum.

4. The self-limiting automatic gripping mechanical claw according to claim 3, characterized in that: The mechanical gripper also includes an automatic control system, which includes a programmable controller, a sensor component connected to the programmable controller data signal, and a driver connected to the programmable controller; the sensor component includes a camera, an image processing module, and an image storage module; the camera is used to capture real-time images of the crystal rod cleaning basket before and after grasping, and send the real-time captured images to the image processing module, the image processing module compares the received images with corresponding images preset in the image storage module, and sends the comparison results to the programmable controller; The driver is controlled and connected to the double-acting cylinder; the programmable controller sends start and stop instructions of the double-acting cylinder to the driver according to the comparison result. When a crystal rod exists in the real-time image of the crystal rod cleaning basket, a stop instruction of the double-acting cylinder is issued; otherwise, an start instruction of the double-acting cylinder is issued; after receiving the instruction, the driver controls the working state of the double-acting cylinder.

5. The self-limiting automatic gripping mechanical claw according to claim 4, characterized in that: The sensor assembly also includes a pressure sensor located on the claw finger and connected to the programmable controller data signal. The pressure sensor is arranged at the connection between the claw finger and the crystal rod cleaning basket slot for real-time detection of the pressure value at the connection, and sends the real-time detected pressure value to the programmable controller; the automatic control system also includes an alarm connected to the programmable controller; the programmable controller compares the received pressure value with the preset pressure threshold, and controls the working state of the alarm according to the comparison result. When the real-time pressure value is lower than the preset pressure threshold, the programmable controller controls the alarm to issue an alarm prompt signal; otherwise, no alarm prompt signal is issued.

6. A self-limiting automatic gripping mechanical claw according to any one of claims 1, 2, 4, and 5, characterized in that: The claw fingers are in a "Z" shape, and the second hinge hole is located below the first hinge hole.

7. A method for using a self-limiting automatic gripping mechanical claw according to any one of claims 1 to 6, characterized in that: The method includes the following steps: 1) After receiving the instruction to grab the crystal rod cleaning basket, the output shafts at both ends of the double-acting cylinder are controlled to extend, and the coupling seat (2), the coupling plate (4), and the clamping shaft (5) are pulled forward, so that the clamping claw finger (1) rotates outward with the upper end hinge point as the center, so that the hook at the bottom of the clamping claw finger cooperates with the clamping groove of the crystal rod cleaning basket and clamps. At this time, the vertical limit edge (1-3) above the supporting groove of the clamping claw finger is in a vertical state with the ground, and the supporting groove (1-4) is in a parallel state with the ground. The crystal rod cleaning basket (8) is clamped to achieve consistency in the movement positions of multiple clamping claw fingers (1), the vertical limit edge (1-3) of the clamping claw fingers above the supporting groove is in a vertical position relative to the ground, and the supporting groove (1-4) is in a parallel position relative to the ground, clamping the crystal rod cleaning basket (8) to achieve consistency in the movement positions of multiple clamping claw fingers (1), and grabbing the crystal rod cleaning basket. When the double-acting cylinder is extended to the limit position, the clamping claw extension effect is achieved, and the double-acting cylinder has an extension self-limiting function. 2) After receiving the instruction to stop grabbing the crystal rod cleaning basket, the output shafts at both ends of the double-acting cylinder (6) are controlled to retract, and the coupling seat (2), the coupling plate (4), and the clamping shaft (5) are pulled backward, so that the claw fingers (1) rotate inward with the upper end hinge point as the center, so that the hook at the bottom of the claw fingers is disengaged from the slot of the crystal rod cleaning basket, and the crystal rod cleaning basket is not grabbed. When the double-acting cylinder (6) is retracted to the limit position, the claw retraction effect is achieved, and it also has a retraction self-limiting function.

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