A material distributor, vacuum evaporation equipment and working method of the material distributor

Abstract

The present invention provides a material distributor, vacuum evaporation equipment, and a method for operating the material distributor. The material distributor includes: a material distributor body; a plurality of through holes provided in the middle of the material distributor body; a plurality of feeding channels provided on both sides of the material distributor body, each feeding channel being interconnected with each through hole; a slider provided at an angle at the bottom of each feeding channel; and a slide plate provided on both side walls of the material distributor body where the plurality of feeding channels are located, each slider being connected to the slide plate at a certain angle. The present invention ensures that the amount of the evaporation material in each crucible is consistent by placing the material to be evaporated into the plurality of feeding channels, evenly distributing the material to be evaporated, and then simultaneously directing the material to be evaporated in the feeding channels into each crucible through the through holes.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum evaporation, and in particular to a material distributor, vacuum evaporation equipment and a working method of the material distributor. Background Art

[0002] Vacuum evaporation involves placing the material to be deposited in a crucible under vacuum conditions. The crucible is then heated to melt the material, vaporizing it and depositing it on a film as it passes over it. Existing vacuum evaporation requires multiple crucibles, which are then deposited together, with the material deposited on the film above the crucibles. To accelerate the deposition of the material onto the film and improve coating efficiency, multiple crucibles can be grouped together and heated simultaneously.

[0003] However, in the prior art, when placing the materials to be evaporated into the crucible one by one, not only is the efficiency low, but it is also difficult to place the same amount of materials to be evaporated into each crucible, resulting in uneven deposition of the materials on the film, affecting product quality. Summary of the Invention

[0004] In view of this, the purpose of the embodiments of the present invention is to provide a material distributor, a vacuum evaporation device and a working method of the material distributor, so as to solve the technical problem in the prior art that when the material to be evaporated is placed in multiple crucibles, it is difficult to place the same amount of material to be evaporated in each crucible, resulting in uneven material evaporated onto the film.

[0005] To achieve the above-mentioned purpose, an embodiment of the present invention provides a material distributor, which includes:

[0006] Distributor body;

[0007] A plurality of through holes are provided in the middle of the distributor body;

[0008] A plurality of feeding channels are provided on both sides of the distributor body, and each of the feeding channels is communicated with each of the through holes;

[0009] A slider is obliquely arranged at the bottom of each of the feeding channels;

[0010] A narrow gap is provided at the intersection between the plurality of through holes and the plurality of feeding channels;

[0011] The material distributor further includes: a blocker, which includes a top plate and a blocker plate, wherein the blocker plate is vertically connected to the top plate, and the blocker plates are respectively inserted into the gaps.

[0012] In some possible implementations, the distributor further includes:

[0013] The slide plates are respectively arranged on the side walls of the distributor body where the plurality of feeding channels are located, and each of the sliders is connected to the slide plate at a certain angle.

[0014] In some possible embodiments, a slide groove is provided on the slide plate, and positioning components are respectively provided on the side walls of the distributor body corresponding to the slide groove. The slide plate slides up and down through the slide groove and is fixed to the side walls of the distributor body by the positioning components.

[0015] In some possible implementations, the distributor further includes:

[0016] A plurality of conduits are respectively arranged at the bottom of the distributor body and connected to each of the through holes. The materials to be evaporated are introduced into a plurality of crucibles through the conduits.

[0017] In some possible implementations, the distributor further includes:

[0018] A plurality of positioning tubes, each of the positioning tubes being sleeved on the inner side wall of each of the conduits;

[0019] The length of the positioning tube is greater than that of the conduit, one end of the positioning tube is connected to the through hole, and the other end is connected to the crucible.

[0020] In some possible implementations, a detachable handle is provided on the top panel;

[0021] The handle is made of magnet material and is adsorbed on the top plate.

[0022] In some possible implementations, the plurality of through holes are arranged in one row or two rows in the middle of the distributor body;

[0023] The slide trough is provided with a scale for quantitatively setting the material to be evaporated.

[0024] The plurality of through holes are arranged in one row or two rows in the middle of the distributor body.

[0025] In a second aspect, an embodiment of the present invention provides a vacuum evaporation device, which includes any one of the above-mentioned distributors and a plurality of crucibles, wherein the plurality of through holes of the distributor correspond one-to-one to the plurality of crucibles.

[0026] In a third aspect, an embodiment of the present invention provides a method for operating a distributor, comprising:

[0027] Inserting the barrier plate of the barrier into the gap on the distributor body through the handle on the barrier, so that the top plate of the barrier covers the tops of the plurality of through holes;

[0028] The materials to be evaporated are respectively loaded into the grooves formed by the baffle plate, the slider and the plurality of feeding channels. After the grooves are filled, the handles are removed and the materials to be evaporated scattered on the top plate are scraped into the grooves;

[0029] The handle is placed on the top plate, and the blocker is lifted by the handle. The material to be evaporated in each groove is introduced into a plurality of crucibles through the through hole corresponding to each feeding channel.

[0030] In some possible implementations, the method further includes:

[0031] The slides are moved by sliding up and down the slides provided on the side walls of the distributor body where the plurality of feeding channels are located, and the slides are positioned at corresponding positions according to the amount of the material to be evaporated loaded into each crucible.

[0032] In some possible implementations, the method further includes: introducing the material to be evaporated into the crucible through a positioning tube sleeved on the inner side wall of each conduit.

[0033] The beneficial technical effects of the above technical solution are:

[0034] The embodiment of the present invention provides a material distributor, vacuum evaporation equipment and a working method of the material distributor, wherein the material distributor comprises: a material distributor body; a plurality of through holes provided in the middle of the material distributor body; a plurality of feeding channels provided on both sides of the material distributor body, each feeding channel being interconnected with each through hole; a slider being obliquely provided at the bottom of each feeding channel; a slide plate being respectively provided on the side walls of the material distributor body where the plurality of feeding channels are located, each slider being connected to the slide plate at a certain angle. The embodiment of the present invention ensures that the amount of the evaporation material in each crucible is consistent by placing the material to be evaporated into the plurality of feeding channels, evenly distributing the material to be evaporated, and then simultaneously introducing the material to be evaporated in the feeding channels into each crucible through the through holes. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0036] Figure 1 This is a schematic diagram of the overall structure of a material distributor according to an embodiment of the present invention;

[0037] Figure 2 A top view of a material distributor according to an embodiment of the present invention;

[0038] Figure 3 This is a rear perspective view of a material distributor according to an embodiment of the present invention;

[0039] Figure 4 This is a left side view of a distributor according to an embodiment of the present invention;

[0040] Figure 5 A sectional perspective view of a material distributor according to an embodiment of the present invention;

[0041] Figure 6 A side perspective view of the overall structure of a material distributor according to an embodiment of the present invention;

[0042] Figure 7 The present invention is a flowchart of a method for operating a material distributor according to an embodiment of the present invention.

[0043] Description of Figure Numbers:

[0044] 1. Distributor body; 11. Through hole; 12. Feeding channel; 13. Slider; 131. Screw; 14. Slide plate; 15. Positioning component; 16. Conduit; 17. Positioning tube; 18. Gap;

[0045] 2. Blocker; 21. Top plate; 22. Blocking plate; 23. Handle. DETAILED DESCRIPTION

[0046] The features and exemplary embodiments of various aspects of the present invention are described in detail below. In the detailed description that follows, many specific details are set forth in order to provide a comprehensive understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be implemented without some of these specific details. The following description of the embodiments is intended only to provide a better understanding of the present invention by illustrating examples of the present invention. In the accompanying drawings and the following description, at least some of the well-known structures and techniques are not shown in order to avoid unnecessary ambiguity in the present invention; and, for clarity, the sizes of some structures may be exaggerated. In addition, the features, structures, or characteristics described below may be combined in any suitable manner in one or more embodiments.

[0047] Figure 1 This is a schematic diagram of the overall structure of a distributor according to an embodiment of the present invention. Figure 2 This is a top view of a distributor according to an embodiment of the present invention. Figure 3 This is a rear perspective view of a distributor according to an embodiment of the present invention. Figure 4 This is a left side view of a distributor according to an embodiment of the present invention. Figure 5 This is a sectional perspective view of a distributor according to an embodiment of the present invention. Figure 6 This is a side perspective view of the overall structure of a distributor according to an embodiment of the present invention. Figures 1 to 6 As shown, the distributor includes: a distributor body 1, the distributor body 1 includes a plurality of through holes 11, a plurality of feeding channels 12 and a slider 13, the plurality of through holes 11 are arranged in the middle position of the distributor body 1, the plurality of feeding channels 12 are arranged on both sides of the distributor body 1, and each feeding channel 12 is connected to each through hole 11; the slider 13 is obliquely arranged at the bottom of each feeding channel 12; Figure 1 、 Figure 2 、 Figure 3 and Figure 6 As shown, a narrow and long gap 18 is provided at the intersection between the plurality of through holes 11 and the plurality of feeding channels 12; the material distributor also includes: a blocker 2, the blocker 2 includes a top plate 21 and a blocker plate 22, the blocker plate 22 is vertically connected to the top plate 21, and the blocker plates 22 are respectively inserted into the gaps 18, so that a groove is formed between the blocker plate 22 and the slider 13, and the material to be evaporated is placed in the groove; in order to facilitate the placement of the blocker 2 into the gap 18 and the removal from the gap 18, chamfers can be provided on both sides of the bottom of the blocker plate 22, and the chamfer angle can be 30 degrees to 60 degrees. The embodiment of the present invention isolates the plurality of feeding channels 12 from the plurality of through holes 11 by first inserting the blocker plates 22 into the gaps 18 respectively, so as to prevent the material to be evaporated from falling into the crucible through the through holes 11 in advance during the material distribution process, resulting in uneven material distribution. Then, the material to be evaporated is placed into several feeding channels 12, and the material to be evaporated is evenly distributed. The material to be evaporated in the feeding channels 12 is simultaneously introduced into each crucible through the through holes 11, thereby ensuring that the amount of evaporated material in each crucible is consistent. In addition, since the slider 13 is tiltedly arranged at the bottom of each feeding channel 12, the material to be evaporated inside the feeding channel 12 will automatically fall into its corresponding through hole 11 under the action of gravity, which can facilitate loading and avoid the material to be evaporated from remaining in the feeding channel 12, thereby fully loading.

[0048] like Figure 1 As shown, in some embodiments, the distributor may further include a slide plate 14 , which is respectively arranged on both side walls of the distributor body 1 where the plurality of feeding channels 12 are located, and each slider 13 is connected to the slide plate 14 at a certain angle.

[0049] In this embodiment, a slide groove 141 is provided on the slide plate 14, and positioning components 15 are respectively provided on the side walls of the distributor body 1 corresponding to the slide groove 141. The slide plate 14 slides up and down through the slide groove 141 and is fixed to the side wall of the distributor body 1 through the positioning components 15 (such as positioning screws). Specifically, the positioning components 15 are provided in the slide groove 141, and the slide plate 14 can slide up and down on the positioning components 15 through the slide groove 141, while driving the slider 13 to slide up and down to change the volume of the feeding channel 12. For example, when the slide plate 14 is slid upward, the slider 13 also slides upward, and the volume of the feeding channel 12 can be reduced. When the slide plate 14 is slid downward, the slider 13 also slides downward, and the volume of the feeding channel 12 can be increased. In addition, after the material to be evaporated is placed in the feeding channel 12, the slider 13 can also be driven to slide up and down by sliding the slide plate 14 up and down, thereby speeding up the feeding speed. In the embodiment of the present invention, the slide plate 14 can be slid up and down to drive the slider 13 to slide up and down, which can not only change the volume of the feeding channel 12, but also drive the slider 13 to slide up and down by sliding the slide plate 14 up and down, thereby accelerating the feeding speed.

[0050] In some embodiments, the chute 141 is provided with a scale for setting the quantity of the material to be dispensed. In this embodiment of the present invention, each scale mark on the chute 141 corresponds to a different capacity, and the slide 14 is fixed at different scale marks, so that the corresponding capacity of the loading channel 12 is different. By providing a scale mark on the chute 141, the embodiment of the present invention can accurately quantify the material to be deposited.

[0051] In some embodiments, a plurality of through holes 11 are arranged in a row or two rows in a cross pattern in the middle of the distributor body 1. When the number of crucibles is small, a plurality of through holes 11 can be arranged in a row in the middle of the distributor body 1. At this time, a feeding channel 12 is provided on both sides of each through hole 11, that is, each through hole 11 corresponds to two feeding channels 12; when the number of crucibles is large, a plurality of through holes 11 can be arranged in two rows in the middle of the distributor body 1. At this time, each row of through holes 11 corresponds to the feeding channel 12 on its adjacent side, that is, each through hole 11 corresponds to one feeding channel 12. In this embodiment, Figures 1 to 6 As shown, a plurality of through holes 11 are arranged in two rows in the middle of the distributor body 1. The material to be evaporated is first placed on the loading channel 12, and then slides into the through holes 11 through the slider 13 at the bottom of the loading channel 12. The material to be evaporated is introduced into the crucible through the through holes 11 to quickly and evenly distribute the material to be evaporated. In addition, when the through holes 11 are arranged in two rows, the cross-arrangement of the two rows of through holes 11 can greatly reduce the volume of the distributor body 1.

[0052] The embodiment of the present invention can not only set the position of the through hole 11 according to the number of crucibles, but also flexibly set the position of the through hole 11 according to the size of the distributor body 1. For example, it depends on the length and width of the distributor body 1. When the length of the distributor body 1 is longer and the width is narrower, several through holes 11 can be set in a row. At this time, feeding channels 12 are respectively set between a row of through holes 11 and the edges on both sides of the distributor body 1, that is, each through hole 11 corresponds to two feeding channels 12; when the length of the distributor body 1 is shorter and the width is wider, several through holes 11 can be set in two rows.

[0053] like Figure 1 、 Figure 3 、 Figure 5 and Figure 6 As shown, the slider 13 is fixedly mounted on the slide plate 14 by screws 131 , which can prevent the slider 13 from shaking or falling off during the sliding process of the slide plate 14 .

[0054] like Figure 3 and Figure 4 As shown, in some embodiments, the distributor further includes: a plurality of conduits 16, which are respectively disposed at the bottom of the distributor body 1 and connected to each through hole 11. The length of the conduits 16 can be determined based on the distance between the bottom of the distributor body 1 and the crucible, and is generally about 90 mm in length. In the embodiments of the present invention, the conduits 16 guide the material to be evaporated into the crucible. The crucible is typically circular in shape. The circular conduits 16 precisely guide the entire material to be evaporated into each crucible, preventing the material to be evaporated from splashing outside, resulting in unequal amounts of material to be evaporated in each crucible.

[0055] like Figure 3 and Figure 4 As shown, in some embodiments, the distributor further includes: a plurality of positioning tubes 17, each positioning tube 17 is respectively sleeved on the inner wall of each conduit 16; the length of the positioning tube 17 is greater than the length of the conduit 16, one end of the positioning tube 17 is connected to the through hole 11, and the other end is connected to the crucible. The length of the positioning tube 17 is greater than the length of the conduit 16, one end of the positioning tube 17 is connected to the through hole 11, and the other end is connected to the crucible, that is, each conduit 16 is fixed under each through hole 11 through the positioning tube 17. Adding the positioning tube 17 can ensure that each conduit 16 corresponds to the crucible position one by one; the positioning tube 17 is sleeved on the inner wall of the conduit 16, and the length of the positioning tube 17 is greater than the length of the conduit 16, so that both ends of the whole composed of the conduit 16 and the positioning tube 17 have protruding steps, and the protruding step part is connected to the crucible at one end and the through hole 11 of the distributor body 1 at the other end. In the embodiment of the present invention, the conduits 16 are positioned by the positioning tubes 17 , so that each conduit 16 can be directly positioned at each crucible, and the material to be evaporated can be more conveniently introduced into the crucible.

[0056] like Figure 1 As shown, in some embodiments, a detachable handle 23 is provided on the top plate 21. The handle 23 is made of a magnetic material and can be adsorbed on the top plate 21. In this embodiment, by setting the handle 23 to be a magnetic material, the magnetic handle 23 can be separated from the top plate 21. After the barrier 2 is placed into the gap 18 of the distributor body 1 through the handle 23, the handle 23 can be removed. At this time, there is no handle 23 to block it. When pouring the material to be evaporated, a scraper can be used to push it flat on the top plate 21 once to scrape the material to be evaporated scattered on the top plate 21 into the feeding channel 12, so that the material is distributed more evenly.

[0057] In addition, an embodiment of the present invention also provides a vacuum evaporation device, which includes any one of the above-mentioned distributors and several crucibles. The several through holes 11 of the distributor correspond one-to-one to the several crucibles respectively. By using the distributor to distribute materials to several crucibles at the same time, not only can the thin film evaporation efficiency be improved, but also the material to be evaporated can be evenly arranged in each crucible, thereby improving the quality of thin film evaporation.

[0058] Figure 7 Flowchart of a working method of a distributor according to an embodiment of the present invention, as shown in FIG. Figure 7 As shown, the working method includes the following steps:

[0059] S1: Insert the barrier plate 22 of the barrier 2 into the gap 18 on the distributor body 1 through the handle 23 on the barrier 2, and the top plate 21 of the barrier 2 covers the tops of the plurality of through holes 11;

[0060] S2: The materials to be evaporated are respectively loaded into the grooves formed by the baffle plate 22, the slider 13 and the plurality of feeding channels 12. After the grooves are filled, the handle 23 is removed and the materials to be evaporated scattered on the top plate 21 are scraped into the grooves;

[0061] S3: placing the handle 23 on the top plate 21 , lifting the barrier 2 by the handle 23 , and introducing the material to be evaporated in each groove into a plurality of crucibles through the through hole 11 corresponding to each feeding channel 12 .

[0062] In some embodiments, the working method further comprises:

[0063] The slide plate 14 on the distributor body 1 is slid up and down to drive the slider 13 to move. According to the amount of the material to be evaporated loaded in each crucible, the slide plate 14 is positioned at the corresponding position to accurately position the material to be evaporated.

[0064] In this embodiment, the material to be evaporated can also be introduced into the crucible through a positioning tube 17 sleeved on the inner side wall of each conduit 16 .

[0065] Specifically, the barrier 2 is placed into the gap 18 on the distributor body 1 through the handle 23, and the slide groove 141 is slid to adjust the position of the slide plate 14 on the positioning component 15. According to the amount of vapor deposition material required to be placed in each crucible, the slide plate 14 is positioned on the corresponding scale. In this way, a groove is formed between the barrier plate 22, the slider 13 and the loading channel 12. The material to be vaporized is loaded into the groove, and the handle 23 is removed. The material to be vaporized scattered on the top plate 21 of the barrier 2 is scraped into the groove through the scraper, and then the handle 23 is placed on the top plate 21, and the barrier 2 is lifted. The material to be vaporized passes through the slide plate 14 and falls into the through hole 11 under the action of gravity. The material to be vaporized is introduced into the crucible through the conduit 16 and the positioning tube 17, and uniform material distribution is completed.

[0066] The beneficial effects of the embodiments of the present invention are as follows:

[0067] The embodiment of the present invention places the material to be evaporated into several feeding channels 12, evenly distributes the material to be evaporated, and then the through hole 11 simultaneously guides the material to be evaporated in the feeding channel 12 into each crucible, thereby ensuring that the amount of the evaporated material in each crucible is consistent; in addition, since the slider 13 is tiltedly arranged at the bottom of each feeding channel 12, the material to be evaporated inside the feeding channel 12 will automatically fall into its corresponding through hole 11 under the action of gravity, which can facilitate loading and avoid the material to be evaporated remaining in the feeding channel 12, thereby fully loading.

[0068] In the embodiment of the present invention, the slide plate 14 can be slid up and down to drive the slider 13 to slide up and down, which can not only change the volume of the feeding channel 12, but also drive the slider 13 to slide up and down by sliding the slide plate 14 up and down, thereby accelerating the feeding speed;

[0069] In the embodiment of the present invention, each scale on the chute 141 corresponds to a different capacity, and the slide 14 is fixed at different scales, so that the corresponding capacity of the loading channel 12 is different. By setting scales on the chute 141, the embodiment of the present invention can accurately quantify the material to be evaporated;

[0070] In the embodiment of the present invention, the conduit 16 is positioned by the positioning tube 17, so that each conduit 16 can be directly positioned at each crucible, and the material to be evaporated can be more conveniently introduced into the crucible;

[0071] In the embodiment of the present invention, the barrier 2 is provided to isolate the through hole 11 from the feeding channel 12, thereby preventing the material to be evaporated from falling into the crucible through the through hole 11 in advance during the material distribution process, resulting in uneven material distribution.

[0072] In an embodiment of the present invention, by setting the handle 23 to a magnetic material, the magnetic handle 23 can be separated from the top plate 21, that is, after the barrier 2 is placed into the gap 18 of the distributor body 1 through the handle 23, the handle 23 can be removed. At this time, there is no handle 23 to block it. When pouring the material to be evaporated, the scraper can be used to push it flat on the top plate 21 once to scrape the material to be evaporated scattered on the top plate 21 into the feeding channel 12, so that the material distribution is more uniform.

[0073] In describing the embodiments of the present invention, it should be noted that the terms "upper, lower, inner, and outer" and other references to orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first, second, or third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0074] In the embodiments of the present invention, unless otherwise specified or limited, the terms "mounted, connected, and connected" should be understood broadly. For example, they can refer to fixed connections, detachable connections, or integrated connections. They can also refer to mechanical connections, electrical connections, direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0075] While the present invention has been described with reference to preferred embodiments, various modifications may be made and equivalent components may be substituted without departing from the scope of the present invention. In particular, the various technical features described in the various embodiments may be combined in any manner, provided no structural conflicts exist. The present invention is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.

Claims

1. A vacuum evaporation device, characterized in that: The vacuum evaporation equipment comprises a material distributor and a plurality of crucibles, wherein the plurality of through holes (11) of the material distributor correspond one to one with the plurality of crucibles respectively; The distributor comprises: Distributor body (1); The plurality of through holes (11) are arranged in the middle of the distributor body (1); A plurality of feeding channels (12) are arranged on both sides of the distributor body (1), and each of the feeding channels (12) is communicated with each of the through holes (11); A slider (13) is obliquely arranged at the bottom of each of the feeding channels (12); A narrow gap (18) is provided at the intersection between the plurality of through holes (11) and the plurality of feeding channels (12); The distributor further comprises: a baffle (2), the baffle (2) comprising a top plate (21) and a baffle plate (22), the baffle plate (22) being vertically connected to the top plate (21), the baffle plates (22) being respectively inserted into the slits (18); and chamfers are provided on both sides of the bottom of the baffle plate (22).

2. The vacuum evaporation equipment according to claim 1, characterized in that: The distributor further comprises: slide plates (14), which are respectively arranged on the side walls of the distributor body (1) where the plurality of feeding channels (12) are located, and each of the sliders (13) is connected to the slide plates (14) at a certain angle.

3. The vacuum evaporation equipment according to claim 2, characterized in that: A slide groove (141) is provided on the slide plate (14), and positioning components (15) are respectively provided on the side walls of the distributor body (1) corresponding to the slide groove (141). The slide plate (14) slides up and down through the slide groove (141) and is fixed to the side wall of the distributor body (1) through the positioning components (15).

4. The vacuum evaporation equipment according to claim 1, characterized in that: The distributor also includes: A plurality of conduits (16) are respectively arranged at the bottom of the distributor body (1) and connected to each of the through holes (11), and the materials to be evaporated are introduced into the plurality of crucibles through the plurality of conduits (16); A plurality of positioning tubes (17), each positioning tube (17) being respectively sleeved on the inner side wall of each of the conduits (16); The length of the positioning tube (17) is greater than the length of the conduit (16); one end of the positioning tube (17) is connected to the through hole (11), and the other end is connected to the crucible.

5. The vacuum evaporation equipment according to claim 3, characterized in that: A detachable handle (23) is provided on the top plate (21); the handle (23) is made of a magnetic material and is adsorbed on the top plate (21).

6. The vacuum evaporation equipment according to claim 3, characterized in that: The plurality of through holes (11) are arranged in one or two rows in the middle of the distributor body (1); The slide trough (141) is provided with a scale for quantitatively setting the material to be evaporated; The plurality of through holes (11) are arranged in one row or two rows in the middle of the distributor body (1).

7. A method for operating a vacuum evaporation device, characterized in that: The method is based on the vacuum evaporation equipment according to any one of claims 1 to 6, and the method comprises: According to the amount of the material to be evaporated loaded into each crucible, the slide plate (14) on the distributor body (1) is slid up and down, driving the slider (13) to move, thereby adjusting the volume of the plurality of feeding channels (12); The material to be evaporated is loaded into the plurality of feeding channels (12), and the material to be evaporated is introduced into the plurality of crucibles through a through hole (11) corresponding to each of the feeding channels (12).

8. The operating method of the vacuum evaporation equipment according to claim 7, characterized in that: A narrow gap (18) is provided at the intersection between the plurality of through holes (11) and the plurality of feeding channels (12), and the method further comprises: The barrier plate (22) of the barrier (2) is inserted into the gap (18) on the distributor body (1) through the handle (23) on the barrier (2), and the top plate (21) of the barrier (2) covers the tops of the plurality of through holes (11); Sliding the slide plate (14) on the distributor body (1) up and down to drive the slider (13) to move, and positioning the slide plate (14) at a corresponding position according to the amount of the material to be evaporated loaded into each crucible; The materials to be evaporated are respectively loaded into the grooves formed by the baffle plate (22), the slider (13) and the plurality of feeding channels (12); after the grooves are filled, the handle (23) is removed and the materials to be evaporated scattered on the top plate (21) are scraped into the grooves; The handle (23) is placed on the top plate (21), and the barrier (2) is lifted by the handle (23), and the material to be evaporated in each groove is introduced into a plurality of crucibles through the through hole (11) corresponding to each of the feeding channels (12).

9. A method for operating a vacuum evaporation device according to claim 8, characterized in that: Also includes: The material to be evaporated is introduced into the crucible through a positioning tube (17) sleeved on the inner side wall of each guide tube (16).

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