A process sealing system of flanged sic square slurry composition

Abstract

The application discloses a process sealing system with flange and SIC square slurry, and belongs to the technical field of photovoltaic device manufacturing, which comprises a heating furnace body, a process pipe is arranged in the heating furnace body, an SIC square slurry is arranged in the process pipe and moves along the central axis direction of the process pipe, a crystal boat is arranged on one side of the SIC square slurry, a wafer is arranged on the crystal boat, a sealing furnace door is arranged at the opening of the process pipe, a sealing element is arranged between the sealing furnace door and the process pipe, the SIC square slurry is connected with the sealing furnace door in a loose mode, a flange is arranged on the SIC square slurry, the SIC square slurry is connected with a pressing flange and a sealing flange through the flange, an O-shaped ring is arranged between the sealing flange and the flange, a connecting element is arranged at the connecting position of the sealing furnace door and the SIC square slurry, and a bellows is arranged between the connecting element and the sealing flange. Thus, the sealing function can be conveniently ensured through one-time installation and adjustment, and stable sealing performance is ensured in use.

Description

TECHNICAL FIELD

[0001] The present application relates to a process sealing system, in particular to a process sealing system composed of a SIC square slurry with a flange, and belongs to the technical field of semi-photovoltaic device manufacturing. BACKGROUND

[0002] In the low-voltage and vacuum horizontal equipment in the photovoltaic field, such as low-voltage boron diffusion equipment and LPCVD equipment, a cantilever slurry in the form of SIC square slurry (SIC square slurry is used in pairs) is used in the process, one of the cantilever slurries has a furnace door, the cantilever slurry and the furnace door have a sealing structure, the right end of the cantilever slurry is used to lift a wafer boat and a wafer into (or out of) a process chamber, the furnace door on the cantilever slurry is connected, pressed and sealed with the flange of the furnace door of the process chamber, the cantilever slurry with the furnace door forms a seal with the process chamber, the process chamber is evacuated or filled with process gas to form a negative pressure and a process required working condition, and the wafer boat and the wafer satisfy the necessary process condition.

[0003] The traditional sealing form of the cantilever slurry and the furnace door is to expand the square section of the cantilever slurry, press the square sealing ring (a special square sealing ring with four corners with a circular arc) on the periphery (four sides and the circular arc) of the square expanded surface of the cantilever slurry by using the periphery (four sides) of the square expanded surface of the cantilever slurry, and seal, the sealing structure is complex, and the square expanded surface of the four sides of the cantilever slurry and the sealing ring are difficult to be pressed at the same time (four expanded surfaces and circular arcs, equivalent to the simultaneous sealing of four gaps and four circular arc corners), so that the sealing degree is poor, the sealing structure is complex, the installation process is complex, and in most cases, the installation cannot be successful at one time, and the pressing of the multi-edge of the square sealing structure needs to be adjusted for many times, so that the sealing effect can be realized, and the sealing performance is also unstable in the vacuum process, the vacuum degree is poor, and the multi-edge pressing of the square sealing ring and the square sealing structure needs to be adjusted frequently to ensure that the sealing meets the process requirements. SUMMARY

[0004] The technical problem to be solved by the present application is to provide a process sealing system composed of a SIC square slurry with a flange, which can realize one-time installation and adjustment to conveniently ensure the sealing function, ensure stable sealing in use, change the unstable sealing degree of the traditional SIC square slurry and the inconvenient installation of the sealing structure, greatly improve the working stability in the vacuum process and the characteristics of simple and reliable installation, greatly improve the work efficiency of the vacuum sealing installation, and completely solve the sealing problem between the circular flange sealing surface of the SIC square slurry and the furnace door through the bellows assembly.

[0005] To solve the above problems, the following technical solutions are provided:

[0006] The utility model designs a kind of flange's SIC square paste constitutes process sealing system, including heating furnace body, the heating furnace body inside is provided with process pipe, process pipe is provided with SIC square paste moving along process pipe central axis direction, SIC square paste is provided with crystal boat on one side, wafer is placed on crystal boat, the opening of process pipe is provided with sealing furnace door, sealing furnace door is provided with sealing element between process pipe, SIC square paste is connected with sealing furnace door, SIC square paste is provided with flange, SIC square paste is connected with compression flange and sealing flange by flange, O ring is provided between sealing flange and flange, the connecting portion of sealing furnace door and SIC square paste is provided with connecting piece, and connecting piece is provided with bellow between sealing flange.

[0007] The above technical solution optimizes the sealing structure and sealing method by setting flange on SIC square paste, uses the side plane of flange to seal, changes the structure of sealing the periphery (four sides) of the square cross-section outer surface of traditional square paste into single-plane sealing using one side of flange, simultaneously seals the gap and circular arc angle of the four sides of the square cross-section of SIC square paste into simple plane sealing of one side of flange, and cooperates with ordinary O ring to complete sealing work, which greatly improves the stability of vacuum process, and the characteristics of simple installation and reliability, and realizes the sealing between sealing furnace door and process pipe under the action of sealing element.

[0008] Further, the abutting side of the flange and the compression flange is provided with a protective pad, which is used to avoid damage to the flange and the compression flange during extrusion.

[0009] The above technical solution sets a protective pad on the compression flange, which avoids direct contact between the flange and the compression flange when the compression flange is connected to the sealing flange by bolts, and effectively avoids damage between the flange and the compression flange during tightening.

[0010] Further, one side of the heating furnace body is provided with a rack, and guide rails are arranged on the rack along the central axis direction of the process pipe. The rack is slidably connected to a support bent plate through the guide rails. The bottom of the support bent plate is provided with a clamping piece for clamping and fixing the SIC square paste. The top of the support bent plate is provided with a cantilever sliding seat. A cantilever is slidably connected to the cantilever sliding seat. The end of the cantilever is movably connected to the sealing furnace door. An adjusting nut is installed on the cantilever. A cantilever spring is arranged between the adjusting nut and the cantilever sliding seat.

[0011] The technical scheme above drives the supporting bent plate to move under the drive of the clamping piece, so that the SIC square slurry drives the sealing furnace door and the crystal boat to start moving, and the elastic action under the cooperation of the lifting lever spring can complete the sealing process of the sealing furnace door and the process pipe, and can also reduce the damage of the sealing furnace door and the process pipe caused by collision in the sealing process.

[0012] Further, the sealing member includes a water-cooled furnace door flange arranged on the side of the sealing furnace door close to the process pipe, the water-cooled furnace door flange is provided with a furnace door sealing ring on the side in abutment with the sealing furnace door, a port flange is arranged at the port of the process pipe, a port flange sealing ring is arranged between the port flange and the water-cooled furnace door flange, and a port rear water-cooled flange is arranged on the outer circumferential surface of the process pipe and connected with the water-cooled furnace door flange through bolts.

[0013] The technical scheme above can keep the connection between the sealing furnace door and the process pipe cooled down during the wafer heating process, so as to facilitate the normal process, and the port flange sealing ring and the furnace door sealing ring can effectively ensure the sealing effect.

[0014] Further, the connecting member includes a connecting ring, the connection between the sealing furnace door and the SIC square slurry is in a cylindrical structure, the connecting ring is arranged at the port of the cylindrical structure, a sealing compression nut is arranged on the outer circumferential surface of the cylindrical structure, a sealing ring and a sealing compression ring are arranged between the connecting ring and the sealing compression nut, and the sealing compression ring is extruded against the sealing ring by rotating the sealing compression nut to complete the sealing between the port of the connection between the sealing furnace door and the SIC square slurry in the cylindrical structure and the connecting ring.

[0015] The technical scheme above facilitates the installation of the corrugated pipe by the connecting ring and the sealing compression nut, and can effectively improve the sealing effect of the connection between the corrugated pipe and the sealing furnace door under the cooperation of the sealing ring and the sealing compression ring.

[0016] Further, the sealing compression nut and the sealing flange are provided with an elastic member therebetween.

[0017] The technical scheme above can extrude the bottom of the sealing furnace door by arranging the elastic member, so as to ensure the uniformity of the force applied by the sealing furnace door to the process pipe and ensure the sealing effect.

[0018] Further, a plurality of heat shields are arranged on the SIC square slurry.

[0019] The technical scheme above can be used to block the heat of the process pipe working area from directly radiating to the sealing furnace door, which is conducive to the low temperature of the sealing furnace door and the protection of the furnace door sealing ring, and forms a complete, simple, practical and effective process sealing system.

[0020] Further, the process tube is provided with a vacuum extraction pipe away from the opening end thereof, and the bottom of the process tube is provided with an air inlet pipe, and the ends of the vacuum extraction pipe and the air inlet pipe extend out of the heating furnace body and are provided with valves.

[0021] The above technical scheme sets the vacuum extraction pipe, the air inlet pipe and the valves, so as to facilitate the staff to change the environment inside the process tube according to needs, and improve the effect of wafer processing technology.

[0022] Compared with the prior art, the beneficial effects of the present application are that:

[0023] By setting the flange on the SIC square paste, the sealing structure and sealing mode are creatively optimized and designed, the traditional square cross section outer surface (four sides) of the square paste is sealed, the structure is changed to single-plane sealing by using one side of the flange, the complex four-week surface gap and arc angle of the SIC square paste square cross section are simultaneously sealed, and the sealing work is completed by cooperating with the ordinary O-ring, which greatly improves the work stability, simple installation and reliable characteristics in the vacuum process, and realizes the sealing between the sealing furnace door and the process pipe under the action of the sealing element. BRIEF DESCRIPTION OF DRAWINGS

[0024] The accompanying drawings are included to provide a further understanding of the present application, and constitute a part of the specification, and are used to explain the present application together with embodiments of the present application, and do not constitute a limitation on the present application. In the drawings:

[0025] Figure 1 is a front view according to a preferred embodiment of the present application;

[0026] Figure 2 is Figure 1 is a sectional view along the direction of A-A;

[0027] Figure 3 is Figure 2 is a sectional view along the direction of B-B;

[0028] Figure 4 is a sectional view of the heating furnace body according to a preferred embodiment of the present application;

[0029] Figure 5 is Figure 2 is an enlarged view of the local structure at A in the above;

[0030] Figure 6 is Figure 5 is an enlarged view of the local structure at B in the above;

[0031] Figure 7 is according toFigure 5 Enlarged view of the local structure at C.

[0032] In the figure: 1, heating furnace body; 2, process tube; 3, corrugated tube; 4, SIC paste; 5, sealing furnace door; 6, flange; 7, compression flange; 8, sealing flange; 9, O-ring; 10, rack; 11, guide rail; 12, support bent plate; 13, clamping piece; 14, pick rod sliding seat; 15, pick rod; 16, adjusting nut; 17, pick rod spring; 18, water-cooled furnace door flange; 19, furnace door sealing ring; 20, port flange; 21, port flange sealing ring; 22, rear water-cooled flange of port; 23, connecting ring; 24, sealing compression nut; 25, sealing ring; 26, sealing compression ring; 27, elastic piece; 28, multi-layer heat shield; 29, vacuum extraction tube; 30, air inlet tube. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0034] As Figure 1 - Figure 7As shown, the process sealing system provided by the SIC square slurry with flange in the embodiment comprises a heating furnace body 1, the inside of the heating furnace body 1 is provided with a process pipe 2, the process pipe 2 is provided with SIC square slurry 4 moving along the central axis direction of the process pipe 2, one side of the SIC square slurry 4 is provided with a crystal boat, the crystal boat is placed with a wafer, the number of the SIC square slurry 4 is two, and the SIC square slurry 4 is a square tube structure made of SIC material, one end of which is a closed structure, and the other end is an open structure, in order to facilitate the bearing of the crystal boat, the side of the SIC square slurry 4 close to the crystal boat has a chamfer structure, the opening of the process pipe 2 is provided with a sealing furnace door 5, the sealing furnace door 5 and the process pipe 2 are provided with a sealing element, the SIC square slurry 4 is connected with the sealing furnace door 5, the SIC square slurry 4 is provided with a flange 6, the SIC square slurry 4 is connected with a pressing flange 7 and a sealing flange 8 through the flange 6, the sealing flange 8 and the flange 6 are provided with an O-ring 9, the connection part of the sealing furnace door 5 and the SIC square slurry 4 is provided with a connecting element, the connecting element and the sealing flange 8 are provided with a corrugated pipe 3, in the embodiment, the flange 6 is arranged on the SIC square slurry 4, the sealing structure and the sealing mode are creatively optimized and designed, the traditional square cross section of the square slurry is sealed on the periphery (four sides) of the outer surface, the structure is changed to use a single plane of the flange 6 to seal, the four gaps and four arc angles of the four sides of the square cross section of the SIC square slurry 4 are simultaneously sealed, and the sealing work is completed by cooperating with the ordinary O-ring 9, which greatly improves the work stability in the vacuum process and the characteristics of simple installation and reliability, under the action of the sealing element, the sealing between the sealing furnace door 5 and the process pipe 2 is realized.

[0035] By arranging the chamfer on the SIC square slurry 4, the distance between the two SIC square slurry 4 can be expanded as much as possible under the condition that the inner chamber diameter of the process pipe 2 is as small as possible, so that a larger size wafer can be adapted, and the blocking is arranged between the two ends of the heating furnace body 1 and the process pipe 2, which can effectively prevent the adverse effects of heat loss and heat radiation on the system.

[0036] The abutting side of the flange 6 and the pressing flange 7 is provided with a protective pad, which is used to avoid damage of the flange 6 and the pressing flange 7 in the process of extrusion, in the embodiment, the protective pad is arranged on the pressing flange 7, when the pressing flange 7 is connected with the sealing flange 8 through bolts, the flange 6 and the pressing flange 7 are avoided from directly contacting, and the damage phenomenon between the flange 6 and the pressing flange 7 can be effectively avoided in the process of fastening, wherein the protective pad is made of a tetrafluoro material.

[0037] The one side of the heating furnace body 1 is provided with a rack 10, the rack 10 is provided with a guide rail 11 along the central axis direction of the process pipe 2, the rack 10 is slidably connected with a supporting bent plate 12 through the guide rail 11, the bottom of the supporting bent plate 12 is provided with a clamping piece 13, the clamping piece 13 is used for clamping and fixing the SIC square slurry 4, the top of the supporting bent plate 12 is provided with a cantilever sliding seat 14, the cantilever sliding seat 14 is slidably connected with a cantilever 15, and the end of the cantilever 15 is movably connected with the sealing furnace door 5, the cantilever 15 is provided with an adjusting nut 16, and the cantilever spring 17 is arranged between the adjusting nut 16 and the cantilever sliding seat 14, in the embodiment, the SIC square slurry 4 drives the sealing furnace door 5 and the crystal boat to start moving under the driving of the clamping piece 13 by pushing the supporting bent plate 12, the worker takes and places the wafer on the crystal boat, and the sealing process of the sealing furnace door 5 and the process pipe 2 can be completed under the elastic cooperation of the cantilever spring 17, and the damage of the sealing furnace door 5 and the process pipe 2 due to collision in the sealing process can be reduced.

[0038] The side of the SIC square slurry 4 close to the clamping piece 13 is a square structure with a chamfer, which improves the adaptability of the clamping piece 13 to the SIC square slurry 4, and the above-mentioned mode is according to the mechanical principle, meets the bearing condition, gradually reduces the width size, takes into account the strength of the SIC square slurry 4, the large size of the wafer and the diameter of the process pipe 2 as small as possible, and comprehensively considers the configuration mode among multiple points.

[0039] The sealing member includes a water-cooled furnace door flange 18 arranged on the side of the sealing furnace door 5 close to the process pipe 2, the water-cooled furnace door flange 18 is provided with a furnace door sealing ring 19 on the side close to the sealing furnace door 5, the end of the process pipe 2 is provided with a port flange 20, the port flange 20 and the water-cooled furnace door flange 18 are provided with a port flange sealing ring 21, the outer circumferential surface of the process pipe 2 is provided with a port rear water-cooled flange 22, and the port rear water-cooled flange 22 and the water-cooled furnace door flange 18 are connected through bolts, in the embodiment, the water-cooled furnace door flange 18 and the port rear water-cooled flange 22 can keep the connection between the sealing furnace door 5 and the process pipe 2 during the wafer heating process, so that the cooling can be carried out, the normal process is facilitated, and the sealing effect can be effectively guaranteed through the arrangement of the port flange sealing ring 21 and the furnace door sealing ring 19.

[0040] The connecting piece comprises a connecting ring 23, the connecting part between the sealing furnace door 5 and the SIC square paste 4 is in a cylindrical structure, the connecting ring 23 is arranged at the port of the cylindrical structure, the outer circumferential surface of the cylindrical structure is provided with a sealing compression nut 24, the sealing ring 25 and the sealing compression ring 26 are arranged between the connecting ring 23 and the sealing compression nut 24, the sealing compression ring 26 is extruded to the sealing ring 25 by rotating the sealing compression nut 24 to complete the sealing between the end part of the cylindrical structure on the sealing furnace door 5 and the connecting ring 23, in the embodiment, the connecting ring 23 and the sealing compression nut 24 facilitate the installation of the bellows 3, and the cooperation of the sealing ring 25 and the sealing compression ring 26 can effectively improve the sealing effect of the connecting part between the bellows 3 and the sealing furnace door 5.

[0041] The elastic member 27 is arranged between the sealing compression nut 24 and the sealing flange 8, in the embodiment, the bottom part of the sealing furnace door 5 is extruded by arranging the elastic member 27, so that the uniformity of the force applied by the sealing furnace door 5 to the process pipe 2 can be ensured, and the sealing effect can be ensured.

[0042] The SIC square paste 4 is provided with a plurality of heat shields 28, which can be used to block the heat of the working area of the process pipe 2 from directly radiating to the sealing furnace door 5, which is beneficial to the low temperature of the sealing furnace door 5 and the protection of the furnace door sealing ring, and forms a complete, simple, practical and effective process sealing system.

[0043] The process pipe 2 is provided with a vacuum pipe 29 at the end part away from the opening, and the bottom part of the process pipe 2 is provided with an air inlet pipe 30, the end parts of the vacuum pipe 29 and the air inlet pipe 30 extend out of the heating furnace body 1 and are provided with valves, in the embodiment, the vacuum pipe 29, the air inlet pipe 30 and the valves are arranged to facilitate the staff to change the environment inside the process pipe 2 according to the needs, and improve the effect of wafer processing technology.

[0044] By adopting the pick rod spring 17 and the elastic member 27, the pick rod spring 17 is located in the middle of the upper part of the sealing furnace door 5, and the two elastic members 27 are located in the lower part of the sealing furnace door 5, forming three-point elastic support and sealing functions of the sealing furnace door 5, facilitating the sealing and elastic compression of the sealing furnace door 5 and the port of the process pipe 2, the elastic support function of the middle of the upper part of the sealing furnace door 5 is realized by the sliding installation of the pick rod 15 in the sliding hole of the pick rod sliding seat 14, and the positioning support and sliding function of the pick rod 15 is realized, the pick rod sliding seat 14 is fixed on the support bent plate 12, the pick rod sliding seat 14 is sleeved with the pick rod spring 17 on the right side of the pick rod 15, and the adjusting nut 16 is screwed with the pick rod 15, which is used for moderately compressing the pick rod spring 17 to keep the elastic fitness, the nut is arranged at the left end of the pick rod 15, which is used for preventing the pick rod 15 from being pulled out of the pick rod sliding seat 14, the pick rod 15 is sleeved in a shaft sleeve hole at the right end, and the pick rod 15 has a boss at the end, which can freely move and ensure that the pick rod 15 cannot be pulled out of the shaft sleeve hole, the shaft sleeve is bolted with the upper center position of the sealing furnace door 5, matches the elastic fitness of the three-point spring on the symmetric plane of the sealing furnace door 5, keeps the sealing furnace door 5 in a vertical position, and the total weight of the sealing furnace door 5 is supported and elastically slid by the pick rod 15 mechanism, the flange 6 on the SIC square paste 4 and the sealing structure of the sealing furnace door 5 only have sealing, elastic movement and elastic thrust functions, and keep the sealing furnace door 5 in a basically vertical position (basically vertical, because the sealing furnace door 5 has three-point elastic support, and can realize self-centering when sealing and elastically compressing the port of the process pipe 2).

[0045] The above is only a preferred embodiment of the present application, and is not used to limit the present application, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. A process sealing system composed of a flanged SiC square slurry, comprising a heating furnace body (1), a process tube (2) is arranged inside the heating furnace body (1), a SiC square slurry (4) moving along the central axis direction of the process tube (2) is arranged in the process tube (2), a crystal boat is arranged on one side of the SiC square slurry (4), a wafer is placed on the crystal boat, a sealing furnace door (5) is arranged at the opening of the process tube (2), characterized in that, The sealing piece is arranged between the sealing furnace door (5) and the process pipe (2), the SIC square slurry (4) is connected with the sealing furnace door (5) in a flexible way, the SIC square slurry (4) is provided with a flange (6), the SIC square slurry (4) is connected with a pressing flange (7) and a sealing flange (8) through the flange (6), an O-shaped ring (9) is arranged between the sealing flange (8) and the flange (6), a connecting piece is arranged at the connecting position of the sealing furnace door (5) and the SIC square slurry (4), and a bellows (3) is arranged between the connecting piece and the sealing flange (8). The sealing piece comprises a water-cooled furnace door flange (18) arranged on the side of the sealing furnace door (5) close to the process pipe (2), the water-cooled furnace door flange (18) is provided with a furnace door sealing ring (19) on the abutting side of the sealing furnace door (5), a port flange (20) is arranged at the port of the process pipe (2), the port flange (20) is provided with a port flange sealing ring (21) between the water-cooled furnace door flange (18), and a port rear water-cooled flange (22) is arranged on the outer circumferential surface of the process pipe (2), and the port rear water-cooled flange (22) is connected with the water-cooled furnace door flange (18) through bolts.

2. A process sealing system of a flanged SIC square pot construction according to claim 1, characterized in that, The abutting sides of the flange (6) and the pressing flange (7) are provided with protective pads, which are used to avoid damage of the flange (6) and the pressing flange (7) in the process of direct contact.

3. A process sealing system of flanged SIC square pot construction according to claim 1, characterized in that, One side of the heating furnace body (1) is provided with a rack (10), guide rails (11) are arranged on the rack (10) along the central axis direction of the process pipe (2), the rack (10) is slidably connected with a supporting bent plate (12) through the guide rails (11), the bottom of the supporting bent plate (12) is provided with a clamping piece (13), the clamping piece (13) is used for clamping and fixing the SIC square slurry (4), the top of the supporting bent plate (12) is provided with a cantilever sliding seat (14), the cantilever sliding seat (14) is slidably connected with a cantilever (15), the end of the cantilever (15) is movably connected with the sealing furnace door (5), an adjusting nut (16) is arranged on the cantilever (15), and a cantilever spring (17) is arranged between the adjusting nut (16) and the cantilever sliding seat (14).

4. A process sealing system of a flanged SIC square pot according to claim 1, characterized in that, The connecting piece comprises a connecting ring (23), the connecting position of the sealing furnace door (5) and the SIC square slurry (4) is in a cylindrical structure, the connecting ring (23) is arranged at the port of the cylindrical structure, the outer circumferential surface of the cylindrical structure is provided with a sealing pressing nut (24), a sealing ring (25) and a sealing pressing ring (26) are arranged between the connecting ring (23) and the sealing pressing nut (24), the sealing pressing ring (26) is used for extruding the sealing ring (25) by rotating the sealing pressing nut (24), and the sealing of the connecting position between the end of the cylindrical structure of the sealing furnace door (5) and the SIC square slurry (4) and the connecting ring (23) is completed.

5. A process sealing system of a flanged SIC square pot construction according to claim 4, characterized in that, An elastic piece (27) is arranged between the sealing pressing nut (24) and the sealing flange (8).

6. A process sealing system of a flanged SIC square pot according to claim 1, characterized in that, A plurality of heat shields (28) are arranged on the SIC square slurry (4).

7. A process sealing system of a flanged SIC square pot according to claim 1, characterized in that, The process tube (2) is provided with a vacuum extraction tube (29) at the end away from the opening, and the bottom of the process tube (2) is provided with an air inlet tube (30), the ends of the vacuum extraction tube (29) and the air inlet tube (30) extend out of the heating furnace body (1) and are provided with valves.

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