Electrical performance test method, apparatus, tester, and storage medium

Abstract

The application provides an electrical performance test method and device, a test machine and a storage medium, and relates to the technical field of integrated circuit testing. The method comprises: performing initial parameter configuration matched with a test scene, so that a source measurement output unit outputs an excitation signal according to an expected excitation value contained in the initial parameters, and the output process of the excitation signal comprises an excitation signal establishment stage and an excitation signal execution stage; in the excitation signal establishment stage, the source measurement output unit is controlled to perform stability adjustment on the output excitation signal until the excitation signal is successfully established; if it is detected that the excitation signal is successfully established, the excitation signal execution stage is entered, and based on the excitation signal output by the source measurement output unit, electrical performance testing related to the test scene is performed on a measured object. The application solves the problem of insufficient reliability of an excitation signal in electrical performance testing in the related art.

Description

Technical Field

[0001] This application relates to the field of integrated circuit testing technology, and more specifically, to an electrical performance testing method, apparatus, testing machine, and storage medium. Background Technology

[0002] After wafer fabrication is completed, integrated circuits need to undergo wafer acceptability testing, which involves using a testing machine to perform electrical performance tests on specific test structures on the wafer, so as to provide data support for the evaluation of the wafer's manufacturing process and quality.

[0003] Currently, the following phenomena exist during the electrical performance testing process: the excitation signal is easily subjected to unpredictable impacts during the excitation signal establishment stage; signal deviation occurs when the excitation signal is output for a long time; and inaccurate internal compensation of the power supply can lead to excitation signal overload. These phenomena can easily cause fluctuations in the excitation signal during the test, affecting the stable output of the excitation signal during the test, and may generate transient high voltage that damages the wafer.

[0004] As can be seen from the above, improving the reliability of excitation signals in electrical performance testing has become an urgent problem to be solved in the testing process. Summary of the Invention

[0005] This application provides an electrical performance testing method, apparatus, testing machine, and storage medium, which can solve the problem of insufficient excitation signal reliability in related technologies. The technical solutions are as follows:

[0006] According to one aspect of this application, an electrical performance testing method is applied to a testing machine, the testing machine including a source measurement output unit. The method includes: configuring initial parameters to match a test scenario, such that the source measurement output unit outputs an excitation signal according to a desired excitation value included in the initial parameters, the excitation signal output process including an excitation signal establishment phase and an excitation signal execution phase; in the excitation signal establishment phase, controlling the source measurement output unit to perform stability adjustment on the output excitation signal until the excitation signal is successfully established; if the excitation signal is detected to be successfully established, then entering the excitation signal execution phase, and performing electrical performance testing on the test object related to the test scenario based on the excitation signal output by the source measurement output unit.

[0007] In an exemplary embodiment, the step of controlling the source measurement output unit to perform stability adjustment on the output excitation signal during the excitation signal establishment phase until the excitation signal is successfully established includes: sampling the measurement terminal of the source measurement output unit to obtain a measurement signal, wherein the measurement terminal is used to read back the excitation signal output by the source measurement output unit; detecting the operating state of the measurement signal to determine whether the operating state of the measurement signal is in a stable convergent state or a divergent state; if the operating state of the measurement signal is in a divergent state, then performing amplitude modulation on the excitation signal until the operating state of the measurement signal is in a stable convergent state.

[0008] In an exemplary embodiment, detecting the operating state of the measurement signal and determining whether the operating state of the measurement signal is in a stable convergent state or a divergent state includes: determining a measurement sequence based on the measurement signal, the measurement sequence including multiple measurement values, different measurement values ​​reflecting the signal strength of the measurement signal at different sampling times; calculating a first difference between each pair of adjacent measurement values ​​in the measurement sequence to obtain a first difference sequence containing multiple first differences; calculating a second difference between each pair of adjacent first differences in the first difference sequence to obtain multiple second differences; if the multiple second differences show a gradually increasing trend, then determining that the operating state of the measurement signal is in a divergent state.

[0009] In an exemplary embodiment, the initial parameters include a transient excitation value that is less than the desired excitation value; the step of amplitude modulation of the excitation signal until the operating state of the measurement signal is in a stable convergent state includes: amplitude modulation of the excitation signal output by the source measurement output unit according to the transient excitation value, and reading back the amplitude-modulated excitation signal output by the source measurement output unit using the measurement terminal to obtain the measurement signal; if the operating state of the measurement signal is in a divergent state, clamping control protection is activated to limit the amplitude of the excitation signal to an excitation limit value; if the operating state of the measurement signal is in a stable convergent state, the source measurement output unit resumes outputting the excitation signal according to the desired excitation value.

[0010] In an exemplary embodiment, the step of entering the excitation signal execution phase, based on the excitation signal output by the source measurement output unit, to perform electrical performance testing on the object under test related to the test scenario, includes: in the excitation signal execution phase, performing feature extraction on the excitation signal to obtain feature quantities of the excitation signal at different sampling times; estimating the changing trend of the excitation signal based on the feature quantities to obtain an estimated value of the excitation signal at the next sampling time; if the estimated value is greater than the expected excitation value, then reducing the amplitude of the excitation signal.

[0011] In an exemplary embodiment, estimating the changing trend of the excitation signal based on the feature quantity to obtain an estimated value of the excitation signal at a later sampling time includes: performing linear fitting on the excitation signal based on the feature quantity of the excitation signal at different sampling times to obtain a signal fitting curve of the excitation signal; and predicting the estimated value of the excitation signal at a later sampling time based on the signal fitting curve to obtain the estimated value.

[0012] In an exemplary embodiment, the initial parameters further include an excitation limit value; after performing electrical performance tests on the object under test related to the test scenario based on the excitation signal output by the source measurement output unit, the method further includes: monitoring the excitation signal; if the excitation signal is found to exceed the excitation limit value, then output protection is activated, and the amplitude of the excitation signal is reduced by the output protection, so that the excitation signal is lower than the excitation limit value.

[0013] According to one aspect of the embodiments of this application, an electrical performance testing apparatus includes:

[0014] The parameter configuration module is used to configure initial parameters to match the test scenario, so that the source measurement output unit outputs an excitation signal according to the expected excitation value included in the initial parameters; the signal establishment module is used to control the source measurement output unit to perform stability adjustment on the output excitation signal during the excitation signal establishment phase until the excitation signal is successfully established; the signal execution module is used to enter the excitation signal execution phase if the excitation signal is detected to be successfully established, and perform electrical performance tests on the object under test related to the test scenario based on the excitation signal output by the source measurement output unit.

[0015] According to one aspect of the embodiments of this application, a testing machine is characterized in that it includes: at least one processor, at least one memory, and at least one communication bus, wherein the memory stores a computer program, and the processor reads the computer program from the memory through the communication bus; when the computer program is executed by the processor, it implements the electrical performance testing method as described above.

[0016] According to one aspect of the embodiments of this application, a storage medium storing a computer program thereon is characterized in that, when the computer program is executed by a processor, it implements the electrical performance testing method as described above.

[0017] According to one aspect of this application, a computer program product includes a computer program stored in a storage medium, a processor of a computer device reads the computer program from the storage medium, and the processor executes the computer program, causing the computer device to implement the electrical performance testing method as described above when executed.

[0018] The beneficial effects of the technical solution provided in this application are:

[0019] In the above technical solution, initial parameter configuration matching the test scenario is performed, so that the source measurement output unit outputs an excitation signal according to the expected excitation value included in the initial parameters; in the excitation signal establishment stage, the source measurement output unit is controlled to perform stability adjustment on the output excitation signal until the excitation signal is successfully established; if the excitation signal is detected to be successfully established, the excitation signal execution stage is entered, and based on the excitation signal output by the source measurement output unit, the electrical performance test related to the test scenario is performed on the object under test. Thus, it can be seen that this application can perform stability adjustment on the excitation signal during the electrical performance test, thereby effectively solving the problem of insufficient excitation signal reliability in the prior art and avoiding damage to the object under test during the electrical performance test. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments of this application will be briefly introduced below.

[0021] Figure 1 This is a schematic diagram based on the implementation environment involved in this application;

[0022] Figure 2 This is a flowchart illustrating an electrical performance testing method according to an exemplary embodiment;

[0023] Figure 3 yes Figure 2 A flowchart of step 230 in one embodiment corresponds to the following example;

[0024] Figure 4 This is a flowchart illustrating the determination of a working state according to an exemplary embodiment;

[0025] Figure 4a This is a flowchart illustrating the difference calculation according to an exemplary embodiment.

[0026] Figure 5 This is a flowchart illustrating a signal amplitude modulation process according to an exemplary embodiment;

[0027] Figure 6 yes Figure 2 A flowchart of step 250 in one embodiment corresponds to the following example;

[0028] Figure 7 yes Figure 6 A flowchart of step 630 in one embodiment corresponds to the following example;

[0029] Figure 7a This is a flowchart illustrating the process of calculating an estimate according to an exemplary embodiment.

[0030] Figure 8 This is a flowchart illustrating an output protection process according to an exemplary embodiment;

[0031] Figure 9 This is a schematic diagram illustrating the specific implementation of an electrical performance testing method in an application scenario.

[0032] Figure 10 This is a structural block diagram of an electrical performance testing device according to an exemplary embodiment;

[0033] Figure 11 This is a structural block diagram of an electronic device according to an exemplary embodiment. Detailed Implementation

[0034] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0035] Those skilled in the art will understand that, unless specifically stated otherwise, the singular forms “a,” “an,” “the,” and “the” used herein may also include the plural forms. It should be further understood that the term “comprising” as used in this application means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should be understood that when we say an element is “connected” or “coupled” to another element, it can be directly connected or coupled to the other element, or there may be intermediate elements. Furthermore, “connected” or “coupled” as used herein can include wireless connections or wireless coupling. The term “and / or” as used herein includes all or any units and all combinations of one or more associated listed items.

[0036] As mentioned earlier, the current electrical performance testing process for integrated circuits suffers from several issues, including excitation signal interference during the excitation signal establishment phase, signal offset caused by prolonged excitation signal output, and overload caused by inaccurate internal power supply compensation. These issues affect the stability of the excitation signal during testing, easily leading to fluctuations in the excitation signal during operation and generating transient high voltage that can damage the tested object.

[0037] In traditional excitation signal establishment schemes, to reduce impact and avoid transient high voltage damage to the test object, a ramp control method is used during output excitation. This involves gradually increasing the output voltage according to a set ramp until the excitation signal reaches the desired value, thus providing the excitation signal for the test environment. However, the inventors realized that this excitation signal establishment scheme relies on manually set ramp parameters by the tester, leading to unstable performance during excitation signal establishment. Furthermore, the ramp control method lacks versatility and is limited to single-ramp control excitation signal establishment scenarios. For example, in actual electrical performance testing, complex multi-segment ramp control is sometimes required, necessitating the establishment of multiple ramp parameters, resulting in operational complexity and low efficiency. Simultaneously, overload phenomena may occur during the excitation signal execution phase, but the ramp control method only addresses potential impact damage during excitation signal establishment and cannot prevent damage to the test object caused by overload during the excitation signal operation phase.

[0038] As can be seen from the above, the relevant technologies still have shortcomings such as low stability of excitation signals, insufficient safety of electrical performance testing processes, and potential damage to the tested object.

[0039] Therefore, the electrical performance testing method provided in this application can effectively improve the reliability of the excitation signal in electrical performance testing. Accordingly, the electrical performance testing method is applicable to electrical performance testing devices, which can be deployed in electronic devices, such as testing machines.

[0040] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0041] like Figure 1 The diagram shown is a schematic representation of the implementation environment involved in this application. This implementation environment includes an electrical performance testing system, which comprises a testing machine 100, a probe station 130, and a probe card 150.

[0042] Specifically, the core module of the test unit 100 is the source measurement unit, which includes a force excitation terminal and a sense measurement terminal. In electrical performance testing, the test unit 100 is mainly responsible for establishing, switching, outputting, and ensuring the reliability of the excitation signal. Specifically, it applies the excitation signal through the excitation terminal and measures the signal obtained through the measurement terminal.

[0043] The probe station 130 is the main equipment in the electrical performance testing system. It is used for loading, unloading, fixing and moving the object under test, and fixing the probe card 150. It mainly consists of software control program and hardware components.

[0044] The probe card 150 integrates multiple probes. During electrical performance testing, the probe card 150 contacts the object under test (DUT), connects the DUT to the testing machine, and allows multiple probes to simultaneously contact the DUT, applying excitation signals to the DUT through the probes.

[0045] When the electrical performance test begins, the object under test carried by the probe station 130 contacts the probes on the probe card 150 in sequence. The test machine 100 applies an excitation signal through the probes and simultaneously obtains the measurement signal returned from the object under test by the excitation signal through the probes. Based on the measurement signal, the excitation signal is stabilized and adjusted throughout the electrical performance test.

[0046] Please see Figure 2 This application provides an electrical performance testing method, which is applicable to electronic devices, and the electronic devices may be... Figure 1 The test machine 100 in the implementation environment is shown.

[0047] In the following method embodiments, for ease of description, the execution subject of each step of the method is an electronic device, but this does not constitute a specific limitation.

[0048] like Figure 2 As shown, the method may include the following steps:

[0049] Step 210: Configure initial parameters to match the test scenario, so that the source measurement output unit outputs an excitation signal according to the expected excitation value contained in the initial parameters.

[0050] In this context, a test scenario refers to the electrical performance testing of the object under test (DUT) using a test machine. Correspondingly, the initial parameters matched to the test scenario include, but are not limited to, expected excitation values, transient excitation values, and excitation limit values, which are configured to instruct the electrical performance testing. It is understood that the electrical performance tests performed on the DUT by the test machine differ depending on the test scenario, and the corresponding initial parameters will also vary. Pre-configuring the initial parameters before conducting the electrical performance test ensures the stability of the excitation signal during subsequent testing, allowing the test process to proceed smoothly.

[0051] The desired excitation value is configured to ensure that the amplitude of the output excitation signal during the test can reach the desired excitation value. In other words, during the test, the tester continuously adjusts the excitation signal with the desired excitation value as the target, so that the excitation signal is as stable as possible near the desired excitation value.

[0052] In one possible implementation, the initial parameters can be stored in test cases configured for electrical performance testing. To perform electrical performance testing on the object under test, the tester configures corresponding test cases containing the initial parameters. Then, during the electrical performance test, the initial parameters can be obtained from the corresponding test cases, and can be adjusted at any time during the test as needed, thereby achieving the purpose of controlling the electrical performance testing process.

[0053] Step 230: During the excitation signal establishment phase, the control source measurement output unit adjusts the stability of the output excitation signal until the excitation signal is successfully established.

[0054] First, it should be noted that the excitation signal output process in electrical performance testing includes the excitation signal establishment stage and the excitation signal execution stage.

[0055] As mentioned earlier, the excitation signal establishment effect in traditional ramp control schemes is unstable. Therefore, in this embodiment, a slow excitation method is introduced during excitation signal establishment to optimize and adjust the unstable factors in the excitation signal establishment stage. The stability of the excitation signal is ensured by adjusting the excitation signal through slow excitation. Specifically, the operating state of the excitation signal is determined by an algorithm, and the electrical performance test of the object under test can only begin when the operating state of the excitation signal meets the requirements of the electrical performance test.

[0056] In one possible implementation, the operating states of the excitation signal include a stable convergent state and a divergent state. The stable convergent state and the divergent state are distinguished based on whether the excitation signal has a divergent trend. It should be understood that when the excitation signal transitions from having a divergent trend to being divergent, the excitation signal is considered unstable; otherwise, the excitation signal is considered stable.

[0057] In one possible implementation, the slow excitation specifically refers to extending the setup time of the excitation signal and adjusting its stability when a divergence trend is detected, i.e., the excitation signal is in a divergent state, until the excitation signal is found to have no divergence trend, i.e., the excitation signal is in a stable convergent state. When the excitation signal is in a stable convergent state, it is determined that the excitation signal has been successfully established, and then the electrical performance test begins. In this way, the excitation signal can be monitored and its stability adjusted throughout the electrical performance test, thereby improving the safety and stability of the electrical performance test system.

[0058] One possible implementation is to use the rate of change of the first derivative to determine whether the excitation signal is in a divergent or stable convergent state. Specifically, by monitoring the rate of change of the first derivative of the excitation signal, it is predicted whether the rate of change of the excitation signal is increasing. If the rate of change increases, it indicates that the excitation signal is in a divergent state, with errors and a risk of generating transient high voltage. In this case, pre-emptive stability control of the excitation signal can stabilize the test results, keeping the excitation signal in a stable convergent state during the test, avoiding damage to the object under test during signal establishment, which could lead to signal establishment failure or test failure.

[0059] Step 250: If the excitation signal is successfully established, the excitation signal execution stage is entered. Based on the excitation signal output by the source measurement output unit, the electrical performance of the object under test is tested in accordance with the test scenario.

[0060] During the excitation signal execution phase, on the one hand, it is necessary to ensure a continuous and stable excitation signal output and apply it to the object under test so that the object under test can perform electrical performance tests related to the test scenario. On the other hand, long-term output of the excitation signal may cause signal deviation, which may lead to excessive amplitude of the excitation signal, thereby causing the electrical performance test to deviate from the safe range and resulting in damage to the object under test.

[0061] Therefore, in this embodiment of the invention, the following two signal modulation schemes are proposed to avoid signal offset phenomenon that occurs during long-term output of the excitation signal:

[0062] One possible implementation involves adjusting the stability of the excitation signal through a gentler excitation. Specifically, an excitation limit is set to restrict the amplitude of the excitation signal within a safe range. Then, a feature extraction algorithm is used to extract features of the excitation signal during its operating phase. This estimates the risk of the excitation signal exceeding the excitation limit, and adjustments are made when the risk of exceeding the limit occurs, thereby protecting the safety of the object under test and ensuring a stable testing process.

[0063] In one possible implementation, such as Figure 8 As shown, the excitation signal is regulated through output protection, specifically including the following steps: When the excitation signal exceeds the excitation limit, output protection control is applied to the electrical performance test to reduce the amplitude of the excitation signal, making it lower than the excitation limit. If the excitation signal amplitude is still higher than the excitation limit after output protection control, the excitation signal output is stopped and the electrical performance test process ends.

[0064] By integrating and complementing the two control schemes, the reliability of the excitation signal is improved, thereby ensuring the stability of the electrical performance testing system.

[0065] Through the above process, the stability of the output excitation signal is adjusted throughout the entire process, reducing the risk of the excitation signal exceeding the limit and improving the safety and stability of the electrical performance testing process.

[0066] Please see Figure 3 In one exemplary embodiment, step 230 may include the following steps:

[0067] Step 231: Sample the measurement terminal of the source measurement output unit to obtain the measurement signal.

[0068] The measuring end is used to read back the excitation signal output by the source measurement output unit. In other words, the excitation signal read back by the measuring end is the measurement signal, which can reflect the signal strength of the excitation signal actually applied to the object being measured.

[0069] For example, under normal operating conditions, during the process of the excitation signal being generated and applied to the object under test, signal attenuation occurs in the electrical signal link. This results in a certain voltage difference between the excitation signal arriving at the object under test and the excitation signal output by the source measurement output unit. Consequently, the amplitude of the excitation signal applied to the object under test cannot reach the desired excitation value. However, the measurement signal reflects the actual signal strength of the excitation signal applied to the object under test. Therefore, to avoid the voltage difference, the excitation signal output by the source measurement output unit can be read back from the measurement end. After obtaining the measurement signal by reading back the excitation signal, the operating state of the measurement signal can be used to determine whether the excitation signal needs to be stabilized so that the amplitude of the excitation signal applied to the object under test can reach the desired excitation value. This improves the accuracy and stability of the electrical performance testing process.

[0070] Step 233: Detect the working state of the measurement signal and determine whether the working state of the measurement signal is in a stable convergent state or a divergent state.

[0071] In this context, a stable convergent state refers to a state where the trend of the measured signal remains essentially unchanged at different sampling times, and the amplitude of the measured signal does not increase indefinitely. A divergent state, on the other hand, refers to a state where the trend of the measured signal gradually increases at different sampling times, and the amplitude of the measured signal may increase indefinitely; it can also be understood as a divergent trend in the measured signal.

[0072] In one possible implementation, the operating state of the measurement signal is measured by the trend of amplitude variation of the measurement signal.

[0073] Now combined Figure 4 The detection process for the working state of the measurement signal is described in detail below, and the detection process may include the following steps;

[0074] Step 410: Determine the measurement sequence based on the measurement signal. The measurement sequence includes multiple measurement values, and different measurement values ​​reflect the signal strength of the measurement signal at different sampling times.

[0075] First, it should be noted that the measured values ​​in the measurement sequence can be determined by reading back the excitation signal output by the source measurement output unit at the measurement end. Specifically, the measurement end is sampled in the order of return time, and the sampled measured values ​​are recorded in the measurement sequence. This measured value reflects the signal strength of the measured signal obtained at the current sampling moment.

[0076] For example, taking the issuance of the excitation signal command as the initial time, setting the initial time as time t0, sampling the measurement end sequentially according to the time increment order, recording the measurement value of each sampling time as F(N+1), F(N+2), ..., and storing it in the measurement sequence.

[0077] Step 430: Calculate the first difference between each pair of adjacent measured values ​​in the measurement sequence to obtain a first difference sequence containing multiple first differences; calculate the second difference between each pair of adjacent first differences in the first difference sequence to obtain multiple second differences.

[0078] The first difference sequence, which contains multiple first differences, is used to describe the change in the amplitude of the measured signal within every two measurement intervals.

[0079] A second difference sequence containing multiple second differences is used to describe the magnitude of the trend in the amplitude of the measured signal.

[0080] Step 450: If multiple second differences show a gradually increasing trend, it is determined that the working state of the measurement signal is in a divergent state.

[0081] Specifically, such as Figure 4a As shown, the first difference between two consecutive measurements in the measurement sequence F is calculated iteratively, such as first difference K(N) = measured value F(N+1) - measured value F(N), first difference K(N+1) = measured value F(N+2) - measured value F(N+1), ..., thus obtaining the first difference sequence K.

[0082] Based on the first difference sequence K, the second difference between two consecutive first differences in the first difference sequence K is calculated iteratively, such as the second difference △K(N) = first difference K(N+1) - first difference K(N), the second difference △K(N+1) = first difference K(N+2) - first difference K(N+1), ..., and the magnitudes of the second difference △K(N) and the second difference △K(N+1) are compared in turn.

[0083] If multiple second differences in the second difference sequence show a gradually increasing trend, i.e., ΔK(N+1)>ΔK(N), it indicates that the second difference sequence K is diverging. This determines that the working state of the measurement signal is in a diverging state, and further determines that the excitation signal has the risk of divergence. Therefore, the stability of the excitation signal is adjusted by using the control function, so that the amplitude of the excitation signal can be adjusted to near the desired excitation value, ensuring that the excitation signal returns to a stable state.

[0084] Step 235: If the operating state of the measurement signal is in a divergent state, then the excitation signal is amplitude modulated until the operating state of the measurement signal is in a stable convergent state.

[0085] The term "tending towards divergence" refers to a signal that tends to approach a divergent state, with the possibility of transitioning from a stable convergent state to a divergent state.

[0086] like Figure 5 As shown, in one possible implementation, the signal amplitude modulation process can be achieved through a gentle excitation method:

[0087] Step 510: Amplify the excitation signal output by the source measurement output unit according to the transient excitation value, and use the measurement terminal to read back the excitation signal output by the source measurement output unit after amplitude modulation to obtain the measurement signal.

[0088] The transient excitation value is an initial parameter whose set value is smaller than the desired excitation value. During signal amplitude modulation, when the amplitude of the excitation signal is higher than the transient excitation value, the amplitude of the excitation signal is reduced; when the amplitude of the excitation signal is lower than or equal to the transient excitation value, the amplitude of the excitation signal is increased. By stabilizing the amplitude of the excitation signal near the transient excitation value, the excitation signal settling time is extended, and the risk of signal divergence is reduced.

[0089] Step 530: If the working state of the measurement signal is in a divergent state, then the clamping control protection is activated to limit the amplitude of the excitation signal to the clamping limit value.

[0090] Please refer back to Figure 4a After adjusting the stability of the excitation signal using the control function, if the excitation signal is in a stable convergence state, it is considered that the measurement signal sampling has converged, and then return to step 410 to continue sampling the measurement signal; otherwise, if the excitation signal is still in a divergent state, it is considered that the measurement signal cannot achieve sampling convergence, and then clamping control is used to ensure the safety of the electrical performance testing system, that is, to limit the amplitude of the excitation signal to the clamping limit value.

[0091] The clamping limit value can be flexibly adjusted according to the actual needs of the application scenario, and is not limited here.

[0092] Step 550: If the operating state of the measurement signal is in a stable convergence state, the recovery source measurement output unit outputs the excitation signal according to the desired excitation value.

[0093] It is understandable that amplitude modulation of the signal stabilizes the amplitude of the excitation signal below the desired excitation value, reducing the probability of excessive amplitude of the excitation signal causing damage to the object under test, and thus preventing the electrical performance test from being carried out normally.

[0094] The above embodiments enable the adjustment of excitation signal stability during the excitation signal establishment process, avoid potential impact interference during electrical performance testing, and improve the safety and stability of electrical performance testing.

[0095] Please see Figure 6 In one exemplary embodiment, step 250 may include the following steps:

[0096] Step 610: During the excitation signal execution phase, feature extraction is performed on the excitation signal to obtain the feature quantities of the excitation signal at different sampling times.

[0097] Among them, the characteristic quantity is used to describe the signal strength of the excitation signal at different sampling times.

[0098] Feature extraction can be achieved using a physical sign extraction algorithm; no specific limitation is specified here.

[0099] In this approach, by extracting the characteristic quantities of the excitation signal during the excitation signal execution phase, it is possible to predict the changing trend of the excitation signal in the future, thereby monitoring the entire process of electrical performance testing, thus avoiding damage to the object under test, improving testing efficiency, and providing the characteristics of safe and stable electrical performance testing process.

[0100] Step 630: Estimate the trend of the excitation signal based on the feature quantity to obtain the estimated value of the excitation signal at the next sampling time.

[0101] like Figure 7 As shown, in one possible implementation, step 630 may include the following steps:

[0102] Step 710: Based on the characteristic quantities of the excitation signal at different sampling times, perform linear fitting on the excitation signal to obtain the signal fitting curve of the excitation signal.

[0103] Step 730: Predict the estimated value of the excitation signal at the next sampling time based on the signal fitting curve to obtain the estimated value.

[0104] Specifically, such as Figure 7aAs shown, throughout the entire process of the excitation signal operation, the sensor at the measurement end is sampled sequentially according to the time sequence to obtain the characteristic quantities of the excitation signal at different sampling times, i.e., the return values ​​f(t1), f(t2), ...;

[0105] The excitation signal is linearly fitted using the return values ​​f(t1) and f(t2) in time sequence to obtain the signal fitting curve f(t) of the excitation signal;

[0106] The slope k and intercept b of the fitted curve f(t) are obtained by performing a linear fitting solution on the fitted curve f(t).

[0107] The signal fitting curve f(t) is extended based on the slope k and intercept b to predict the estimated value of the excitation signal at the next sampling time. Specifically, the corresponding value f(t3) of the extended signal fitting curve f(t) is the estimated value of the excitation signal at time t3.

[0108] Step 650: If the estimated value is greater than the expected excitation value, then the amplitude of the excitation signal is reduced.

[0109] Continue reading Figure 7a When the estimated value f(t3) is greater than or even much greater than the expected excitation value, it can be determined that the excitation signal is at risk of exceeding the limit. At this time, the amplitude of the output excitation signal is controlled to reduce the amplitude of the excitation signal actually applied to the test object. Meanwhile, sampling continues at the measurement end to achieve the effect of cyclically adjusting the excitation signal, thereby improving the test accuracy and efficiency.

[0110] With the cooperation of the above embodiments, on the one hand, by predicting the risk of excitation signal exceeding limits in advance through algorithms, protective measures can be taken in a timely manner when such risks occur. This solves the problem that current electrical performance testing cannot handle over-limit issues in a timely manner and can only take over-limit protection measures after the over-limit occurs, thus improving test safety and efficiency. On the other hand, it enables the estimation of the amplitude of the excitation signal during electrical performance testing, and the signal modulation of the excitation signal to complete the closed-loop control of electrical performance testing, which further helps to improve the safety and stability of electrical performance testing.

[0111] Figure 9 This is a schematic diagram illustrating the specific implementation of an electrical performance testing method in an application scenario. In this scenario, the stability and safety of the electrical performance testing process are fully guaranteed by predicting the trend of the excitation signal and controlling its amplitude.

[0112] During the test preparation phase, initial parameters are configured, including expected stimulus values, stimulus limits, and transient stimulus values.

[0113] Once the initial parameters for the test scenario matching are configured, the excitation signal establishment phase begins. During this phase, an excitation signal is output, and sense monitoring at the measurement end is activated. The amplitude of the excitation signal is monitored to determine its stability, i.e., whether it is in a stable convergent state or a divergent state. If the excitation signal is in a divergent state, stability adjustment is performed on the output excitation signal to ensure that it converges stably near the desired excitation value.

[0114] If the excitation signal is detected to have stably converged near the desired excitation value, the excitation signal is considered to have been successfully established, and the process moves from the excitation signal establishment stage to the excitation signal execution stage, where electrical performance tests related to the test scenario begin based on the excitation signal. Conversely, if the excitation signal is not stably converged near the desired excitation value, the stability of the excitation signal continues to be adjusted until the excitation signal is considered to have been successfully established.

[0115] During the electrical performance test in the excitation signal execution phase, the excitation signal is constantly monitored through the measurement terminal. If an alarm is received indicating that the amplitude of the excitation signal exceeds the excitation limit, it is determined that the excitation signal has a diverging trend. Then, output protection is implemented, that is, the amplitude of the excitation signal is adjusted until the excitation signal stabilizes near the expected excitation value, and then the electrical performance test continues.

[0116] In this application scenario, the excitation signal is controlled throughout the entire electrical signal testing process, which enhances the reliability of the excitation signal and improves the safety of the electrical signal testing process.

[0117] The following are embodiments of the apparatus described in this application, which can be used to execute the electrical performance testing method involved in this application. For details not disclosed in the apparatus embodiments of this application, please refer to the method embodiments of the electrical performance testing method involved in this application.

[0118] Please see Figure 10 This application provides an electrical performance testing device 900, which is applied to a testing machine, and the testing machine includes a source measurement output unit.

[0119] The electrical performance testing device 900 includes, but is not limited to, a parameter configuration module 910, a signal establishment module 930, and a signal execution module 950.

[0120] The parameter configuration module 910 is used to configure the initial parameters to match the test scenario, so that the source measurement output unit outputs the excitation signal according to the expected excitation value contained in the initial parameters.

[0121] The signal establishment module 930 is used to control the source measurement output unit to adjust the stability of the output excitation signal during the excitation signal establishment stage until the excitation signal is successfully established.

[0122] The signal execution module 950 is used to enter the excitation signal execution stage if the excitation signal is successfully established, and to perform electrical performance tests on the object under test related to the test scenario based on the excitation signal output by the source measurement output unit.

[0123] It should be noted that the electrical performance testing device provided in the above embodiments is only illustrated by the division of the above functional modules when performing electrical performance testing. In actual applications, the above functions can be assigned to different functional modules as needed. That is, the internal structure of the electrical performance testing device will be divided into different functional modules to complete all or part of the functions described above.

[0124] Furthermore, the embodiments of the electrical performance testing method provided in the above embodiments belong to the same concept, and the specific way in which each module performs its operation has been described in detail in the method embodiments, and will not be repeated here.

[0125] Please see Figure 11 This application provides an electronic device 4000, which includes a testing machine.

[0126] exist Figure 11 The electronic device 4000 includes at least one processor 4001, at least one communication bus 4002, and at least one memory 4003.

[0127] The processor 4001 and memory 4003 are connected, for example, via a communication bus 4002. Optionally, the electronic device 4000 may also include a transceiver 4004, which can be used for data interaction between the electronic device and other electronic devices, such as sending and / or receiving data. It should be noted that in practical applications, the transceiver 4004 is not limited to one, and the structure of the electronic device 4000 does not constitute a limitation on the embodiments of this application.

[0128] Processor 4001 may be a CPU (Central Processing Unit), a general-purpose processor, a DSP (Digital Signal Processor), an ASIC (Application Specific Integrated Circuit), a FPGA (Field Programmable Gate Array), or other programmable logic devices, transistor logic devices, hardware components, or any combination thereof. It may implement or execute the various exemplary logic blocks, modules, and circuits described in conjunction with the disclosure of this application. Processor 4001 may also be a combination that implements computational functions, such as including one or more microprocessor combinations, a combination of a DSP and a microprocessor, etc.

[0129] The communication bus 4002 may include a path for transmitting information between the aforementioned components. The communication bus 4002 may be a PCI (Peripheral Component Interconnect) bus or an EISA (Extended Industry Standard Architecture) bus, etc. The communication bus 4002 can be divided into an address bus, a data bus, a control bus, etc. For ease of representation, Figure 10 The bus is represented by a single thick line, but this does not mean that there is only one bus or one type of bus.

[0130] The memory 4003 may be ROM (Read-Only Memory) or other types of static storage devices capable of storing static information and instructions, RAM (Random Access Memory) or other types of dynamic storage devices capable of storing information and instructions, or EEPROM (Electrically Erasable Programmable Read-Only Memory), CD-ROM (Compact Disc Read-Only Memory) or other optical disc storage, optical disc storage (including compressed optical discs, laser discs, optical discs, digital universal optical discs, Blu-ray discs, etc.), magnetic disk storage media or other magnetic storage devices, or any other medium capable of carrying or storing desired program code in the form of instructions or data structures and accessible by a computer, but not limited thereto.

[0131] The memory 4003 stores a computer program, and the processor 4001 reads the computer program stored in the memory 4003 through the communication bus 4002.

[0132] When the computer program is executed by the processor 4001, it implements the electrical performance testing methods in the above embodiments.

[0133] Furthermore, this application provides a storage medium storing a computer program, which, when executed by a processor, implements the electrical performance testing methods described in the above embodiments.

[0134] This application provides a computer program product comprising a computer program stored in a storage medium. A processor of a computer device reads the computer program from the storage medium and executes the computer program, causing the computer device to perform the electrical performance testing methods described in the above embodiments.

[0135] Compared with related technologies, this method uses algorithms to extract the characteristic values ​​of the excitation signal and predict its changing trend, thereby achieving closed-loop control of the entire electrical performance testing process and avoiding damage to the test object. Different control methods are set up to address the unique risks present at different stages of the excitation signal, enriching the control methods. Furthermore, multiple control methods are integrated and complementary to avoid the failure of a single control method. This effectively improves the reliability of the excitation signal in electrical performance testing, increases testing efficiency, and enhances the safety and stability of the electrical performance testing process.

[0136] It should be understood that although the steps in the flowcharts of the accompanying figures are shown sequentially as indicated by the arrows, these steps are not necessarily executed in the order indicated by the arrows. Unless explicitly stated herein, there is no strict order restriction on the execution of these steps, and they can be executed in other orders. Moreover, at least some steps in the flowcharts of the accompanying figures may include multiple sub-steps or multiple stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times, and their execution order is not necessarily sequential, but can be performed alternately or in turn with other steps or at least some of the sub-steps or stages of other steps.

[0137] The above description is only a partial embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A method of electrical performance testing, characterized by, Applied to a test machine, the test machine comprising a source measurement output unit, the method comprising: performing an initial parameter configuration matching a test scenario, so that the source measurement output unit outputs an excitation signal according to an expected excitation value contained in the initial parameter, the output process of the excitation signal comprising an excitation signal establishment stage and an excitation signal execution stage; in the excitation signal establishment stage, controlling the source measurement output unit to perform stability adjustment on the output excitation signal until the excitation signal establishment is successful; if the excitation signal establishment is detected to be successful, entering the excitation signal execution stage, and performing an electrical performance test related to the test scenario on a measured object based on the excitation signal output by the source measurement output unit; the controlling the source measurement output unit to perform stability adjustment on the output excitation signal until the excitation signal establishment is successful in the excitation signal establishment stage, comprising: sampling a measurement end of the source measurement output unit to obtain a measurement signal, the measurement end being used to read back the excitation signal output by the source measurement output unit; detecting the working state of the measurement signal to determine whether the working state of the measurement signal is in a stable convergence state or a divergence state; if the working state of the measurement signal tends to be in a divergence state, performing signal amplitude modulation on the excitation signal until the working state of the measurement signal is in a stable convergence state.

2. The method of claim 1, wherein, the detecting the working state of the measurement signal to determine whether the working state of the measurement signal is in a stable convergence state or a divergence state, comprising: determining a measurement sequence based on the measurement signal, the measurement sequence comprising a plurality of measurement values, different measurement values reflecting signal strengths of the measurement signal at different sampling times; calculating first difference values between two adjacent measurement values in the measurement sequence to obtain a first difference value sequence comprising a plurality of first difference values; calculating second difference values between two adjacent first difference values in the first difference value sequence to obtain a plurality of second difference values; if a plurality of the second difference values show a gradually increasing trend, it is determined that the working state of the measurement signal tends to be in a divergence state.

3. The method of claim 1, wherein, the initial parameter comprises a transient excitation value smaller than the expected excitation value; the performing signal amplitude modulation on the excitation signal until the working state of the measurement signal is in a stable convergence state, comprising: performing signal amplitude modulation on the excitation signal output by the source measurement output unit according to the transient excitation value, and reading back the excitation signal output by the source measurement output unit after signal amplitude modulation using the measurement end to obtain the measurement signal; if the working state of the measurement signal tends to be in a divergence state, starting a clamping control protection to limit the amplitude of the excitation signal to a clamping limit value through the clamping control protection; if the working state of the measurement signal is in a stable convergence state, resuming the source measurement output unit to output the excitation signal according to the expected excitation value.

4. The method of claim 1, wherein, the entering the excitation signal execution stage, and performing an electrical performance test related to the test scenario on a measured object based on the excitation signal output by the source measurement output unit, comprising: In the excitation signal execution stage, feature extraction is performed on the excitation signal to obtain feature quantities of the excitation signal at different sampling moments; Based on the feature quantities, a change trend of the excitation signal is estimated to obtain an estimated value of the excitation signal at a next sampling moment; If the estimated value is greater than the expected excitation value, the amplitude of the excitation signal is reduced.

5. The method of claim 4, wherein, The estimation of the change trend of the excitation signal based on the feature quantities to obtain the estimated value of the excitation signal at the next sampling moment comprises: Based on the feature quantities of the excitation signal at different sampling moments, linear fitting is performed on the excitation signal to obtain a signal fitting curve of the excitation signal; According to the signal fitting curve, the estimated value of the excitation signal at the next sampling moment is predicted to obtain the estimated value.

6. The method according to any one of claims 1 to 5, characterized in that, The initial parameters further comprise an excitation limit value; After the electrical performance test related to the test scenario is performed on the measured object based on the excitation signal output by the source measurement output unit, the method further comprises: The amplitude of the excitation signal is monitored; If the amplitude of the excitation signal is monitored to exceed the excitation limit value, the output protection is started, and the amplitude of the excitation signal is reduced by the output protection, so that the amplitude of the excitation signal is lower than the excitation limit value.

7. An electrical property testing apparatus for implementing the electrical property testing method of any one of claims 1 to 6, characterized by, Applied to a test machine, the test machine comprises a source measurement output unit, and the device comprises: A parameter configuration module is configured to perform initial parameter configuration matching a test scenario, so that the source measurement output unit outputs an excitation signal according to an expected excitation value contained in the initial parameters, and the output process of the excitation signal comprises an excitation signal establishment stage and an excitation signal execution stage; A signal establishment module is configured to, in the excitation signal establishment stage, control the source measurement output unit to perform stability adjustment on the output excitation signal until the excitation signal is successfully established; A signal execution module is configured to, if it is detected that the excitation signal is successfully established, enter the excitation signal execution stage, and perform electrical performance test related to the test scenario on a measured object based on the excitation signal output by the source measurement output unit.

8. A testing machine characterized by, Comprise: At least one processor, at least one memory, and at least one communication bus, wherein The memory has stored thereon a computer program, and the processor reads the computer program in the memory through the communication bus; The computer program is executed by the processor to implement the electrical performance test method in any one of claims 1 to 6.

9. A storage medium having stored thereon a computer program, characterized in that The computer program is executed by the processor to implement the electrical performance test method in any one of claims 1 to 6.

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