A three-piezoelectric-driven fast steering mirror

Abstract

The present invention relates to the technical field of laser communication equipment, and in particular to a three-piezoelectric-driven fast steering mirror, which includes a fast steering mirror base, piezoelectric ceramic motors, a flexible flat plate, a mirror fixing platform, and a mirror; three piezoelectric ceramic motors are provided on the fast steering mirror base, and the three piezoelectric ceramic motors are distributed in a triangular state. A flexible flat plate is provided above the three piezoelectric ceramic motors, a mirror fixing platform is provided above the flexible flat plate, and the upper end of the mirror fixing platform is connected to the mirror. The flexible flat plate includes a connection fixing plate, a mirror adjustment plate, and flexible connection plates. A mirror adjustment plate is provided in the middle of the three connection fixing plates, and the mirror adjustment plate is respectively connected to the three connection fixing plates through three flexible connection plates. The mirror adjustment plate is connected to the mirror fixing platform. By replacing the traditional four piezoelectric ceramic motors with three piezoelectric ceramic motors, while meeting the performance requirements, the design of product miniaturization and light weight is achieved.

Description

Technical Field

[0001] The present invention relates to the technical field of laser communication devices, and particularly to a three-piezoelectric-driven fast steering mirror. Background Art

[0002] In aerospace or airborne laser communication technologies, precise scanning devices are required, which play a major role in the scanning, capture, and tracking of the optical path. Among them, the fast steering mirror, which is the core device of the laser terminal in laser communication equipment, is particularly important.

[0003] The fast steering mirrors in the aerospace and aviation fields require high precision, a large stroke range, and adaptability in harsh environments. To meet these performances, it is very difficult to reduce their volume and weight, resulting in great difficulty in miniaturizing the laser terminal, and the increase in volume directly leads to an increase in weight.

[0004] The prior art CN 112346238 A discloses a piezoelectric two-dimensional fast steering mirror without axial displacement, its driving and deflection angle measurement methods, including a reflecting lens, a lens holder for mounting the reflecting lens, a first displacement amplification mechanism, a piezoelectric stack with a strain gauge attached to its first surface, a second displacement amplification mechanism, a piezoelectric stack with a strain gauge attached to its second surface, a third displacement amplification mechanism, a piezoelectric stack with a strain gauge attached to its third surface, a fourth displacement amplification mechanism, a piezoelectric stack with a strain gauge attached to its fourth surface, a mounting base, and a strain signal processing circuit. Four piezoelectric driving methods are adopted for driving and deflecting the fast steering mirror.

[0005] However, with the rapid development of commercial aerospace, there are increasingly high requirements for the quality, volume, and cost of laser communication devices. There is an urgent need for miniaturization, lightweight, and low cost of the fast steering mirror, which is the core device in the laser terminal. Therefore, how to miniaturize and lightweight the laser communication device is a technical problem that those skilled in the art need to solve currently. Summary of the Invention

[0006] The purpose of the present invention is to propose a three-piezoelectric-driven fast steering mirror for the problems existing in the background art.

[0007] The technical solution of the present invention: A three-piezoelectric-driven fast steering mirror includes a fast steering mirror base, a piezoelectric ceramic motor, a flexible flat plate, a mirror fixing platform, and a mirror.

[0008] There are three piezoelectric ceramic motors provided on the fast steering mirror base. The three piezoelectric ceramic motors are distributed in a triangular state. There is a flexible flat plate above the three piezoelectric ceramic motors, and a mirror fixing platform is provided above the flexible flat plate. The upper end of the mirror fixing platform is connected to the mirror. The flexible flat plate includes a connecting fixing plate, a mirror adjusting plate, and a flexible connecting plate. The upper ends of the three piezoelectric ceramic motors are respectively connected to the three connecting fixing plates of the flexible flat plate. A mirror adjusting plate is provided in the middle of the three connecting fixing plates. The mirror adjusting plate is respectively connected to the three connecting fixing plates through three flexible connecting plates. The mirror adjusting plate is connected to the mirror fixing platform.

[0009] Preferably, a support column is provided in the middle of the fast steering mirror base.

[0010] Preferably, the upper end of the support column is connected to the flexible flat plate.

[0011] Preferably, a flexible groove is provided in the middle of the flexible flat plate.

[0012] Preferably, a number of mirror connecting seats are provided on the mirror fixing platform, and the material of the mirror connecting seats is invar.

[0013] Compared with the prior art, the present invention has the following beneficial technical effects:

[0014] 1. By replacing the traditional four piezoelectric ceramic motors with three piezoelectric ceramic motors and connecting them to the flexible flat plate, not only the stroke range of the fast steering mirror is increased, the coupling of a single piezoelectric ceramic motor is reduced, but also the influence of the support column on the stroke range is reduced, ensuring its use performance.

[0015] 2. By using fewer core components (piezoelectric ceramic motors), while meeting the performance requirements, the design of the product is miniaturized and lightweight, and at the same time, the components and the used opto-mechanical system are reduced to achieve the effect of cost reduction. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Structural schematic diagram of the three-piezoelectric-driven fast steering mirror of the present invention;

[0017] Figure 2 For Figure 1 exploded structural schematic diagram;

[0018] Figure 3 For Figure 2 top view structural schematic diagram of the flexible flat plate;

[0019] Figure 4 Graph of the relationship between the elongation of the moving end of the piezoelectric ceramic motor and the angle.

[0020] Reference numerals: 1, fast steering mirror base; 2, piezoelectric ceramic motor; 3, flexible flat plate; 4, mirror fixing platform; 5, mirror; 6, connecting fixing plate; 7, mirror adjusting plate; 8, flexible connecting plate; 9, support column; 10, flexible groove; 11, mirror connecting seat. Detailed implementation mode

[0021] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0022] Embodiment 1

[0023] As Figure 1 and Figure 2 shown, the structural schematic diagram and exploded view of a three-piezoelectric-driven fast steering mirror proposed by the present invention include a fast steering mirror base 1, a piezoelectric ceramic motor 2, a flexible flat plate 3, a mirror fixing platform 4, and a mirror 5; three piezoelectric ceramic motors 2 are provided on the fast steering mirror base 1, and the three piezoelectric ceramic motors 2 are distributed in a triangular state. A flexible flat plate 3 is provided above the three piezoelectric ceramic motors 2, a mirror fixing platform 4 is provided above the flexible flat plate 3, and the upper end of the mirror fixing platform 4 is connected to the mirror 5.

[0024] As Figure 3 shown, it is a top view structural schematic diagram of the flexible flat plate. The flexible flat plate 3 includes a connecting fixing plate 6, a mirror adjusting plate 7, and a flexible connecting plate 8. The upper ends of the three piezoelectric ceramic motors 2 are respectively connected to the three connecting fixing plates 6 of the flexible flat plate 3. A mirror adjusting plate 7 is provided in the middle of the three connecting fixing plates 6. The mirror adjusting plate 7 is respectively connected to the three connecting fixing plates 6 through three flexible connecting plates 8. The mirror adjusting plate 7 is connected to the mirror fixing platform 4.

[0025] Among them, a support column 9 is provided in the middle of the fast steering mirror base 1. The support column 9 can increase the resonance fundamental frequency of the components.

[0026] The upper end of the support column 9 is connected to the flexible flat plate 3. A flexible groove 10 is provided in the middle of the flexible flat plate 3. The flexible groove 10 can facilitate the deflection adjustment of the flexible flat plate 3 and reduce the influence of the support column 9 on the stroke range.

[0027] A number of mirror connecting seats 11 are provided on the mirror fixing platform 4, and the material of the mirror connecting seats 11 is invar. The mirror connecting seats 11 and the mirror 5 can be fixed with glue. In this solution, invar material is used to avoid the influence of thermal expansion and contraction on the surface shape of the mirror 5. In specific implementation, other materials with the same expansion coefficient as the mirror material can be used to avoid the influence of thermal expansion and contraction on the surface shape of the mirror.

[0028] The piezoelectric ceramic motor 2 mainly realizes the height deflection with the flexible flat plate 3 by controlling the voltage.

[0029] As shown Figure 4 in the figure, it is a relationship diagram of the elongation and angle of the moving end of the piezoelectric ceramic motor. D1 is the deflection height of the outer edge of the mirror; D2 is the deflection height of the connection point of the flexible connection plate 8 of the flexible flat plate 3; D3 is the lifting height of the fixed connection point under normal circumstances.

[0030] Under normal circumstances, to achieve the deflection height of D1, the piezoelectric ceramic motor 2 needs to control the lifting height D3.

[0031] In this solution, by designing the flexible flat plate 3, the effective stroke can be reduced. Only the piezoelectric ceramic motor 2 needs to control the lifting height D2 to achieve the deflection height of D1. When the lifting height of the piezoelectric ceramic motor 2 reaches D3, the deflection height of D1 can be increased.

[0032] After adding the flexible flat plate 3, the overall solution effectively increases the angular stroke of the fast steering mirror when the displacement of the piezoelectric ceramic motor 2 remains unchanged.

[0033] In the same range of D1, D2, and D3, according to the fact that the effective distance to the center will affect the designed deflection angle, the performance is improved by reducing the effective stroke. The arrangement of the piezoelectric ceramic motor 2 and the design of the flexible flat plate 3 are carried out to increase the angular stroke. The support column 9 designed in the middle of the fast steering mirror base 1 effectively increases the vibration fundamental frequency of the component.

[0034] Embodiment 2

[0035] The present invention also provides a solution, the difference being that it includes a fast steering mirror base 1, a piezoelectric ceramic motor 2, a flexible flat plate 3, and an integrated mirror;

[0036] Three piezoelectric ceramic motors 2 are provided on the fast steering mirror base 1, and the three piezoelectric ceramic motors 2 are distributed in a triangular state. A flexible flat plate 3 is provided above the three piezoelectric ceramic motors 2, and an integrated mirror is provided above the flexible flat plate 3;

[0037] The integrated mirror is made of a mirror surface metal material. The lower end of the integrated mirror is a connection structure connected to the flexible flat plate 3, and the upper end of the integrated mirror is a metal polished mirror surface. Other structures are the same as those in Embodiment 1;

[0038] Through the integrated design of the mirror, the influence on the mirror surface shape due to different material expansion coefficients is avoided.

[0039] Compared with the traditional fast steering mirror, the characteristics of this solution are mainly manifested in the following aspects:

[0040] 1) The solution of replacing the traditional four piezoelectric ceramic motors 2 with three piezoelectric ceramic motors 2. The three piezoelectric ceramic motors 2 are arranged in a triangular manner, saving space and reducing costs;

[0041] 2) The support column 9 designed in the middle of the fast steering mirror base 1 increases the resonance fundamental frequency of the component;

[0042] 3) The special flexible flat plate 3 structure design increases the stroke range of the fast steering mirror, reduces the coupling of a single piezoelectric ceramic motor 2, and at the same time reduces the influence of the support column 9 on the stroke range;

[0043] 4) The mirror fixing platform 4 and the mirror 5 are fixed with glue, using a material with the same coefficient of thermal expansion as the mirror material, or through the integrated design of the mirror fixing platform 4 and the mirror 5, avoiding the influence of thermal expansion and contraction on the mirror surface shape.

Claims

1. A three-piezoelectric-driven fast steering mirror, characterized in that: It includes a fast steering mirror base (1), a piezoelectric ceramic motor (2), a flexible flat plate (3), a mirror fixing platform (4), and a mirror (5); three piezoelectric ceramic motors (2) are provided on the fast steering mirror base (1), and the three piezoelectric ceramic motors (2) are distributed in a triangular state. A flexible flat plate (3) is provided above the three piezoelectric ceramic motors (2), a mirror fixing platform (4) is provided above the flexible flat plate (3), the upper end of the mirror fixing platform (4) is connected to the mirror (5). The flexible flat plate (5) includes a connecting fixing plate (6), a mirror adjusting plate (7), and a flexible connecting plate (8). The upper ends of the three piezoelectric ceramic motors (2) are respectively connected to the three connecting fixing plates (6) of the flexible flat plate (3). A mirror adjusting plate (7) is provided in the middle of the three connecting fixing plates (6), and the mirror adjusting plate (7) is respectively connected to the three connecting fixing plates (6) through three flexible connecting plates (8). The mirror adjusting plate (7) is connected to the mirror fixing platform (4); a support column (9) is provided in the middle of the fast steering mirror base (1); the upper end of the support column (9) is connected to the flexible flat plate (3); a flexible groove (10) is provided in the middle of the flexible flat plate (3); a number of mirror connecting seats (11) are provided on the mirror fixing platform (4), and the material of the mirror connecting seats (11) is invar.

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