Chip picking and placing mechanism and chip testing machine

Abstract

The present invention discloses a chip picking and placing mechanism, comprising: a main body and a nozzle rod mounted on the main body. A clamping strip is provided above the main body. An installation hole is formed on the front end surface of the main body. One end of a horizontally arranged pressing seat is embedded in the installation hole, and the other end of the pressing seat is located outside the main body and is vertically provided with a pressing bearing. A through hole for the vertically arranged nozzle rod to pass through is formed on the upper surface of the pressing seat between the pressing bearing and the main body. One end of the pressing seat located in the installation hole is connected to the main body through a pressing spring in a stretched state, so that the outer ring surface of the pressing bearing is in close fit with the nozzle rod. The pulling force of the pressing spring is greater than the pulling force of the first spring. The present invention has a controllable linear change in the acting force on multiple chips with tolerances, accurately picking up the chips at one time while avoiding damage to the surface coating of the chips.

Description

Technical Field

[0001] The present invention relates to a chip picking and placing mechanism, belonging to the technical field of semiconductor chip testing. Background Art

[0002] In the production and use processes of semiconductor industry chips, chip testing and chip mounting are essential key processes. In the chip mounting and testing links, there is the handling and high-precision mounting of chips, and a chip mounter and a tester are required. As the components directly contacting the chips in the tester and the chip mounter, the chip picking and placing mechanism plays an important role in the equipment. In the chip mounting and testing links of the optical communication industry, due to the requirements of the process manufacturing, there are relatively high requirements for the accuracy of picking and placing chips and the contact pressure between the suction nozzle and the chips. Summary of the Invention

[0003] The purpose of the present invention is to provide a chip picking and placing mechanism, in which the acting forces on multiple chips with tolerances change linearly in a controllable manner, and while accurately picking up the chips at one time, damage to the surface coating of the chips is avoided.

[0004] To achieve the above purpose, the technical solution adopted by the present invention is: a chip picking and placing mechanism, including: a main body and a suction nozzle rod installed on the main body. A clamping strip is arranged above the main body. The front end of the clamping strip extends out of the main body and is clamped and connected to the upper end of the suction nozzle rod. Guide components are arranged on the front end face of the main body and on both sides of the suction nozzle rod. The rear end of the clamping strip is connected to an arc-shaped rack, and the arc-shaped rack is meshed and connected with a gear installed on the output shaft of a motor. Moreover, the center of the arc-shaped rack coincides with the axis of the suction nozzle rod;

[0005] A vertically arranged first spring is connected between the clamping strip and the lower part of one side of the main body. A second spring inclined with respect to the horizontal direction is connected between the clamping strip and the upper part of the other side of the main body. One end of the second spring is close to the arc-shaped rack and is located below the arc-shaped rack, and the other end is connected to the end of the clamping strip far from the arc-shaped rack. The end of the second spring connected to the clamping strip is higher than its other end. The pulling force of the second spring is greater than the pulling force of the first spring;

[0006] An installation hole is opened on the front end face of the main body. One end of a horizontally arranged pressing seat is embedded in the installation hole. The other end of the pressing seat is located outside the main body and is vertically installed with a pressing bearing. A through hole for the vertically arranged suction nozzle rod to pass through is opened on the upper surface of the pressing seat between the pressing bearing and the main body. One end of the pressing seat located in the installation hole is connected to the main body through a stretched pressing spring, so that the outer ring surface of the pressing bearing is in close contact with the suction nozzle rod. The pulling force of the pressing spring is greater than the pulling force of the first spring.

[0007] The further improved solutions in the above technical solutions are as follows:

[0008] 1. In the above solution, a pin is installed inside the pressing seat and inside the body respectively, and the hook parts at both ends of the pressing spring are respectively buckled and connected with the corresponding pins.

[0009] 2. In the above solution, the rear end of the clamping strip is connected to the arc-shaped rack through a connecting rod.

[0010] 3. In the above solution, the guiding component includes at least two pairs of bearings.

[0011] 4. In the above solution, there are at least 2 bumps arranged at intervals in the vertical direction on the front end face of the body, and a pair of bearings is installed on each bump. The left bearing in each pair of bearings is horizontally installed on the left side of the bump, and the right bearing in each pair of bearings is horizontally installed on the right side of the bump.

[0012] 5. In the above solution, the left and right sides of the front end face of the body respectively have a left inclined plane area and a right inclined plane area. The left bearings in each pair of bearings are arranged at intervals in the vertical direction on the left inclined plane area of the body, and the right bearings in each pair of bearings are arranged at intervals in the vertical direction on the right inclined plane area of the body.

[0013] 6. In the above solution, a clamping channel is formed between the left bearing and the right bearing in each pair of bearings, and the nozzle rod is located in the clamping channel.

[0014] There is also provided a chip testing machine, including: a substrate, a testing mechanism and a feeding mechanism installed on the substrate. A material transporting mechanism perpendicular to the feeding direction of the feeding mechanism is arranged above the feeding mechanism, and the chip picking and placing mechanism is installed on the material transporting mechanism through an adapter seat.

[0015] The further improved solutions in the above technical solutions are as follows:

[0016] 1. In the above solution, the motor is installed on the adapter seat.

[0017] Due to the application of the above technical solutions, the present invention has the following advantages compared with the prior art:

[0018] For the chip picking and placing mechanism of the present invention, for the picked chips, on the basis of realizing large-range bidirectional precise adjustment of the chip angle, after the initial calibration, it can effectively adsorb and pick up the same thickness with a certain tolerance in batches, and the acting force on multiple chips with tolerances shows a controllable linear change, avoiding damage to the chip surface coating while accurately picking up the chips at one time. Description of the Drawings

[0019] Att Figure 1 is a schematic structural diagram of the chip testing machine of the present invention;

[0020] Attached Figure 2 is a schematic diagram of the partial structure of the chip picking and placing mechanism of the present invention Figure 1 ;

[0021] Attached Figure 3 is a schematic cross-sectional view of the partial structure of the chip picking and placing mechanism of the present invention;

[0022] Attached Figure 4 is a schematic diagram of the partial structure of the chip picking and placing mechanism of the present invention Figure 2 ;

[0023] Attached Figure 5 is a schematic diagram of the partial structure of the chip picking and placing mechanism of the present invention Figure 3 .

[0024] In the above drawings: 100, substrate; 200, testing mechanism; 300, loading mechanism; 400, material transporting mechanism; 401, adapter seat; 1, body; 2, nozzle rod; 3, clamping strip; 41, first spring; 42, second spring; 5, mounting hole; 6, pressing seat; 61, pressing bearing; 62, through hole; 7, pressing spring; 8, clamping screw; 9, pin; 10, clamping channel; 11, left bearing; 12, right bearing; 13, motor; 14, arc-shaped rack; 15, connecting rod; 16, gear. Detailed implementation manners

[0025] The present patent can be further clearly understood through the following specific embodiments given, but they do not limit the present patent.

[0026] Embodiment 1: A chip picking and placing mechanism, comprising: a body 1 and a nozzle rod 2 installed on the body 1. Above the body 1, there is a clamping strip 3. The front end of the clamping strip 3 extends out of the body 1 and is clamped and connected to the upper end of the nozzle rod 2. On the front end face of the body 1 and on both sides of the nozzle rod 2, there is a guiding assembly. The rear end of the clamping strip 3 is connected to an arc-shaped rack 14, which is meshed and connected to a gear 16 installed on the output shaft of a motor 13, and the center of the arc-shaped rack 14 coincides with the axis of the nozzle rod 2;

[0027] A vertically arranged first spring 41 is connected between the clamping strip 3 and the lower part of one side of the body 1, and an inclined second spring 42 is connected between the clamping strip 3 and the upper part of the other side of the body 1, with the second spring 42 being inclined with respect to the horizontal direction. One end of the second spring 42 is close to and below the arc-shaped rack 14, and the other end is connected to the end of the clamping strip 3 away from the arc-shaped rack 14. The end of the second spring 42 connected to the clamping strip 3 is higher than its other end. The pulling force of the second spring 42 is greater than that of the first spring 41. Part of the pulling force of the second spring is converted into torsion, ensuring that there is no clearance between the teeth of the arc-shaped rack and the teeth of the gear on the output shaft of the motor whether the gear rotates forward or backward, and eliminating the clearance between the teeth;

[0028] The nozzle rod picks up the chip by means of vacuum adsorption. Generally, there will be more or less angular position deviations in the chip to be picked up, and the angle of the chip needs to be adjusted and corrected by the rotation of the nozzle rod. When the gear on the output shaft of the motor rotates forward or backward, it drives the corresponding forward or reverse rotation of the arc-shaped rack. The arc-shaped rack also drives the connecting rod and the clamping strip to rotate accordingly. Since the center of the arc-shaped rack coincides with the axis of the nozzle rod, under the limitation of the guiding component, the nozzle rod rotates around its own axis, thereby adjusting the angle of the adsorbed chip;

[0029] An installation hole 5 is provided on the front end face of the body 1. One end of a horizontally arranged pressing seat 6 is embedded in the installation hole 5, and the other end of the pressing seat 6 is located outside the body 1 and vertically installs a pressing bearing 61. A through hole 62 for the vertically arranged nozzle rod 2 to pass through is provided on the upper surface of the pressing seat 6 between the pressing bearing 61 and the body 1. One end of the pressing seat 6 located in the installation hole 5 is connected to the body 1 by a stretched pressing spring 7, so that the outer ring surface of the pressing bearing 61 is in close contact with the nozzle rod 2. The pulling force of the pressing spring 7 is greater than that of the first spring 41, which not only realizes the stable limit of the nozzle rod to keep it in a stable vertical state, but also fully ensures the freedom of the nozzle rod in the vertical direction, and can effectively avoid the situation that the nozzle rod falls off due to external force;

[0030] When the machine is used for the first time, by adjusting the working stroke or model of the spring, the acting force between the nozzle rod and the chip is calibrated first to determine the downward movement stroke of the nozzle rod;

[0031] When actually continuously picking and placing chips, in order to overcome the tolerances between multiple chips, a certain overvoltage is applied to the chips through system settings (generally determined by the tolerance amount of the chips), so as to ensure that the nozzle rod can always be in good contact with the surfaces of each chip. At this time, the nozzle rod can move upward reversely under the reaction force of the chip and drive the clamping strip and the arc-shaped rack to move upward together. Relative rolling occurs between the nozzle rod and the pressing bearing. At this time, the first spring continues to stretch and generates a reverse acting force on the clamping strip. For different chips with tolerances, the reverse acting force of the first spring changes linearly and is controllable, avoiding damage to the surface coating of the chip while accurately picking up the chip at one time.

[0032] A pin 9 is installed inside each of the above-mentioned pressing seats 6 and the main body 1, and the hook parts at both ends of the above-mentioned pressing spring 7 are respectively buckled and connected to the corresponding pins 9;

[0033] The rear end of the above-mentioned clamping strip 3 is connected to the arc-shaped rack 14 through a connecting rod 15; the above-mentioned guiding assembly includes at least two pairs of bearings;

[0034] There are at least 2 convex blocks arranged at intervals in the vertical direction on the front end face of the above-mentioned main body 1. A pair of bearings is installed on each of the above-mentioned convex blocks. The left bearing 11 in each pair of bearings is horizontally installed on the left side of the convex block, and the right bearing 12 in each pair of bearings is horizontally installed on the right side of the convex block; a clamping channel 10 is formed between the left bearing 11 and the right bearing 12 in each pair of bearings, and the above-mentioned nozzle rod 2 is located in the clamping channel 10.

[0035] Embodiment 2: A chip picking and placing mechanism includes: a main body 1 and a nozzle rod 2 installed on the main body 1. A clamping strip 3 is arranged above the main body 1. The front end of the clamping strip 3 extends out of the main body 1 and is clamped and connected to the upper end of the nozzle rod 2. Guiding components are arranged on both sides of the nozzle rod 2 on the front end face of the main body 1. The rear end of the clamping strip 3 is connected to an arc-shaped rack 14, and the arc-shaped rack 14 is meshed and connected to a gear 16 installed on the output shaft of a motor 13, and the center of the arc-shaped rack 14 coincides with the axis of the nozzle rod 2;

[0036] A vertically arranged first spring 41 is connected between the clamping strip 3 and the lower part on one side of the main body 1. A second spring 42 inclined with respect to the horizontal direction is connected between the clamping strip 3 and the upper part on the other side of the main body 1. One end of the second spring 42 is close to the arc-shaped rack 14 and is located below the arc-shaped rack 14, and the other end is connected to the end of the clamping strip 3 far from the arc-shaped rack 14. The end of the second spring 42 connected to the clamping strip 3 is higher than its other end, and the pulling force of the second spring 42 is greater than the pulling force of the first spring 41;

[0037] A mounting hole 5 is formed on the front end face of the body 1. One end of a horizontally arranged pressing seat 6 is embedded in the mounting hole 5, and the other end of the pressing seat 6 is located outside the body 1 and vertically mounts a pressing bearing 61. A through hole 62 for the vertically arranged nozzle rod 2 to pass through is formed on the upper surface of the pressing seat 6 between the pressing bearing 61 and the body 1. One end of the pressing seat 6 located in the mounting hole 5 is connected to the body 1 through a pressing spring 7 in a stretched state, so that the outer ring surface of the pressing bearing 61 is in close fit with the nozzle rod 2, and the pulling force of the pressing spring 7 is greater than the pulling force of the first spring 41.

[0038] The above-mentioned guiding assembly includes at least two pairs of bearings; on the left and right sides of the front end face of the body 1, there are a left inclined plane area and a right inclined plane area respectively. The left bearings 11 in each pair of bearings are arranged on the left inclined plane area of the body 1 at intervals in the vertical direction, and the right bearings 12 in each pair of bearings are arranged on the right inclined plane area of the body 1 at intervals in the vertical direction; a clamping channel 10 is formed between the left bearing 11 and the right bearing 12 in each pair of bearings, and the above-mentioned nozzle rod 2 is located in the clamping channel 10.

[0039] Embodiment 3: A testing machine for chips, as Figure 1 shown, includes: a substrate 100 and a testing mechanism 200 and a feeding mechanism 300 mounted on the substrate 100. Above the feeding mechanism 300, a material transporting mechanism 400 perpendicular to the feeding direction of the feeding mechanism 300 is arranged. The above-mentioned chip picking and placing mechanism is mounted on the material transporting mechanism 400 through an adapter seat 401. The motor 13 is mounted on the adapter seat 401. The carrier plate with multiple chips is moved to the outside of the testing mechanism through the feeding mechanism. The material transporting mechanism is a double-axis driving mechanism, which drives the nozzle rod to move above the chip to be picked up in the horizontal and vertical directions.

[0040] When the above-mentioned chip picking and placing mechanism is adopted, for the picked chips, on the basis of realizing large-range two-way precise adjustment of the chip angle, after the initial calibration, it can effectively adsorb and pick up the same thickness with a certain tolerance in batches, and the acting force on multiple chips with tolerances shows a controllable linear change, avoiding damage to the chip surface coating while accurately picking up the chips at one time.

[0041] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention, and their purpose is to enable those who are familiar with this technology to understand the content of the present invention and implement it accordingly, and cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A chip picking and placing mechanism, comprising: The main body (1) and the nozzle rod (2) installed on the main body (1). A clamping strip (3) is provided above the main body (1). The front end of the clamping strip (3) extends out of the main body (1) and is clamped and connected to the upper end of the nozzle rod (2). On the front end face of the main body (1) and on both sides of the nozzle rod (2), a guiding component is provided. It is characterized in that: the rear end of the clamping strip (3) is connected to an arc-shaped rack (14), the arc-shaped rack (14) is meshed and connected with a gear (16) installed on the output shaft of the motor (13), and the center of the arc-shaped rack (14) overlaps with the axis of the nozzle rod (2); A vertically arranged first spring (41) is connected between the clamping strip (3) and the lower part on one side of the main body (1). A second spring (42) inclined with respect to the horizontal direction is connected between the clamping strip (3) and the upper part on the other side of the main body (1). One end of the second spring (42) is close to the arc-shaped rack (14) and is located below the arc-shaped rack (14), and the other end is connected to the end of the clamping strip (3) far from the arc-shaped rack (14). The end of the second spring (42) connected to the clamping strip (3) is higher than the other end. The pulling force of the second spring (42) is greater than the pulling force of the first spring (41); An installation hole (5) is formed on the front end face of the main body (1). One end of a horizontally arranged pressing seat (6) is embedded in the installation hole (5). The other end of the pressing seat (6) is located outside the main body (1) and a pressing bearing (61) is vertically installed. A through hole (62) for the vertically arranged nozzle rod (2) to pass through is formed on the upper surface of the pressing seat (6) between the pressing bearing (61) and the main body (1). One end of the pressing seat (6) located in the installation hole (5) is connected to the main body (1) through a stretched pressing spring (7), so that the outer ring surface of the pressing bearing (61) is in close contact with the nozzle rod (2). The pulling force of the pressing spring (7) is greater than the pulling force of the first spring (41).

2. The chip picking and placing mechanism according to claim 1, wherein: A pin (9) is installed in each of the pressing seat (6) and the main body (1). The hook parts at both ends of the pressing spring (7) are respectively buckled and connected to the corresponding pins (9).

3. The chip picking and placing mechanism according to claim 1, wherein: The rear end of the clamping strip (3) is connected to the arc-shaped rack (14) through a connecting rod (15).

4. The chip picking and placing mechanism according to claim 1, characterized in that: The guiding component includes at least two pairs of bearings.

5. The chip picking and placing mechanism according to claim 4, wherein: There are at least 2 convex blocks arranged at intervals in the vertical direction on the front end face of the main body (1). A pair of bearings is installed on each convex block. The left bearing (11) in each pair of bearings is horizontally installed on the left side of the convex block, and the right bearing (12) in each pair of bearings is horizontally installed on the right side of the convex block.

6. The chip picking and placing mechanism according to claim 4, wherein: The left and right sides of the front end face of the main body (1) respectively have a left inclined surface area and a right inclined surface area. The left bearings (11) in each pair of bearings are arranged at intervals in the vertical direction on the left inclined surface area of the main body (1), and the right bearings (12) in each pair of bearings are arranged at intervals in the vertical direction on the right inclined surface area of the main body (1).

7. The chip picking and placing mechanism according to claim 4, characterized in that: A clamping channel (10) is formed between the left bearing (11) and the right bearing (12) in each pair of bearings. The nozzle rod (2) is located in the clamping channel (10).

8. A tester for a chip, comprising: A substrate (100), a testing mechanism (200) and a feeding mechanism (300) mounted on the substrate (100), wherein a material transporting mechanism (400) perpendicular to the feeding direction of the feeding mechanism (300) is arranged above the feeding mechanism (300), and it is characterized in that: a chip picking and placing mechanism as described in any one of claims 1 to 7 is mounted on the material transporting mechanism (400) through an adapter seat (401).

9. The testing machine for the chip according to claim 8, wherein: The motor (13) is mounted on the adapter seat (401).

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