Booster system for furnace tubes

Abstract

The present invention discloses a pressurizing system for a furnace tube, which relates to the technical field of crystalline silicon battery manufacturing. The furnace tube includes a furnace tube body, an air intake pipe and a tail exhaust pipe are installed on the furnace tube body, and the air intake pipe, the furnace tube body and the tail exhaust pipe form a gas flow path. The pressurizing system includes a nitrogen storage box and a bypass pipe. Nitrogen is stored inside the nitrogen storage box, and a heat exchange component is installed inside the nitrogen storage box. The heat exchange component is used to heat the nitrogen to increase the air pressure inside the nitrogen storage box. The heat exchange component is installed on the tail exhaust pipe, and the bypass pipe is fixed in parallel on the air intake pipe. The bypass pipe can inject the nitrogen inside the nitrogen storage box into the air intake pipe. The heat exchange component includes a heat exchange pipe and a heat exchange fin. The present invention transforms the original water bottle nitrogen pipeline. Without affecting the cooling of the tail gas and the collection of metaphosphoric acid, it fully utilizes the nitrogen on the water bottle nitrogen pipeline to increase the back pressure gas volume, thereby reducing the back pressure time and improving production capacity.

Description

Technical Field

[0001] The present invention relates to the technical field of crystalline silicon cell manufacturing, and in particular to a pressurization system for furnace tubes. Background Art

[0002] Crystalline silicon cells generally refer to crystalline silicon solar cells. The production of solar cells is mainly based on semiconductor materials. Its working principle is to use photoelectric materials to absorb light energy and then undergo photoelectron conversion reaction.

[0003] The production process of crystalline silicon solar cells is divided into: silicon wafer inspection - surface texturing and pickling - diffusion junction - dephosphorized silicon glass - plasma etching and pickling - anti-reflection film coating - screen printing - rapid sintering, among which diffusion manufacturing of PN junction is the most basic and critical process in solar cell production.

[0004] With the continuous advancement of technology, crystalline silicon solar cells are gradually developing towards larger size, ultra-thinness, higher production capacity, lower surface impurity concentration, better square resistance uniformity and higher energy efficiency. Traditional closed-tube atmospheric pressure diffusion furnaces can no longer meet these requirements. These demands will bring further challenges to new diffusion technologies and equipment manufacturing levels. The photovoltaic industry market urgently needs a new generation of high-performance diffusion technologies.

[0005] Continuous research by major photovoltaic equipment suppliers worldwide has revealed significant advantages in low-pressure diffusion technology. Through the tireless efforts of industry R&D personnel, low-pressure diffusion has gradually become the core technology for the next generation of high-performance diffusion furnaces. For cells sized 156-162mm, it maintains sheet resistance uniformity of better than 4%, even at batch production rates of 1,000 cells / tube or higher. Compared to atmospheric-pressure diffusion furnaces, it reduces energy consumption per cell by over 50%, chemical consumption by over 50%, and eliminates the need for additional process time, making it the preferred and environmentally friendly production method for high-quality diffusion.

[0006] The low-pressure diffusion furnace is based on the atmospheric pressure closed-tube diffusion furnace, with a series of enhanced functions such as vacuum control system and source pressure control system. Doping diffusion is carried out in a vacuum environment. After the doping diffusion is carried out in a vacuum environment, the furnace tube body needs to be filled with nitrogen to break the air and return the pressure before the silicon wafer is pulled out of the furnace tube body.

[0007] In the existing technology, since the tail gas of the doping diffusion reaction is rich in phosphorus pentoxide, it quickly generates metaphosphoric acid when it encounters water vapor. Metaphosphoric acid can even corrode 316L stainless steel. Therefore, a water bottle nitrogen pipeline is generally installed on the tail gas pipeline to collect the metaphosphoric acid by cooling the tail gas with nitrogen. However, the effect is very unsatisfactory and nitrogen is wasted. In addition, a 10L / min large nitrogen flow meter is generally used on the nitrogen filling pipeline, which has a low nitrogen flow rate and a slow back pressure speed, which wastes time and greatly limits production capacity.

[0008] Therefore, in view of the above technical problems, it is necessary to provide a furnace tube pressurization system. Summary of the Invention

[0009] The object of the present invention is to provide a pressure boosting system for a furnace tube, which can solve the problems of slow back pressure speed, time waste and large capacity limitation.

[0010] To achieve the above objectives, an embodiment of the present invention provides a pressurizing system for a furnace tube, the furnace tube comprising:

[0011] A furnace tube body, wherein an air inlet pipe and a tail exhaust pipe are installed on the furnace tube body, and the air inlet pipe, the furnace tube body and the tail exhaust pipe form a gas flow path;

[0012] The boosting system comprises:

[0013] A nitrogen storage tank, wherein nitrogen is stored in the nitrogen storage tank, and a heat exchange component is installed in the nitrogen storage tank, wherein the heat exchange component is used to heat the nitrogen to increase the gas pressure inside the nitrogen storage tank, and the heat exchange component is installed on the tail exhaust pipe;

[0014] A bypass pipe is fixed in parallel on the intake pipe, and the bypass pipe can inject the nitrogen inside the nitrogen storage tank into the intake pipe.

[0015] In one or more embodiments of the present invention, the heat exchange assembly includes heat exchange tubes and heat exchange fins. The heat exchange tubes are connected in series to the tail pipes, and the heat exchange fins are fixedly connected to the heat exchange tubes in multiple groups.

[0016] In one or more embodiments of the present invention, the heat exchange tubes and heat exchange fins are integrally formed, and the material of the heat exchange tubes and heat exchange fins can be one of austenitic stainless steel, 316L stainless steel, carbon steel or low alloy steel.

[0017] In one or more embodiments of the present invention, a nitrogen filling pipe is fixedly connected to the nitrogen storage tank, and a second check valve is installed on the nitrogen filling pipe.

[0018] In one or more embodiments of the present invention, a vacuum release pipe is fixedly connected to the tail exhaust pipe, and a second solenoid valve is installed on the vacuum release pipe.

[0019] In one or more embodiments of the present invention, a first check valve and a fourth solenoid valve are sequentially installed on the intake pipe, a first solenoid valve is installed on the tail exhaust pipe, and the first solenoid valve is located between the furnace pipe body and the nitrogen storage tank.

[0020] In one or more embodiments of the present invention, one end of the bypass pipe is fixedly connected to the nitrogen storage tank, and the other end of the bypass pipe is fixedly connected to the intake pipe. An electronic pressure gauge, a third solenoid valve and a large nitrogen flow meter are sequentially provided on the bypass pipe.

[0021] In one or more embodiments of the present invention, the electronic pressure gauge is provided at one end close to the nitrogen storage tank, and the third solenoid valve is located between the electronic pressure gauge and the large nitrogen flow meter.

[0022] In one or more embodiments of the present invention, a buffer opening is provided on the nitrogen storage box, an explosion-proof component is fixedly connected to the buffer opening, and the explosion-proof component includes an explosion-proof airbag.

[0023] In one or more embodiments of the present invention, two groups of explosion-proof airbags are fixedly connected to the nitrogen storage box, and air nozzles are installed on the explosion-proof airbags.

[0024] Compared with the prior art, the embodiments of the present invention have the following technical effects:

[0025] The present invention transforms the original water bottle nitrogen pipeline, and fully utilizes the nitrogen on the water bottle nitrogen pipeline to increase the back pressure gas volume without affecting the cooling of the tail gas and the collection of metaphosphoric acid, thereby reducing the back pressure time and improving the production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a piping system diagram of a pressurizing system for a furnace tube according to one embodiment of the present invention;

[0027] Figure 2 is a front view of a pressurizing system for a furnace tube according to one embodiment of the present invention;

[0028] Figure 3 2. It is a structural schematic diagram of a nitrogen storage box for a pressurization system for a furnace tube according to one embodiment of the present invention;

[0029] Figure 4 2. It is a schematic cross-sectional structural diagram of a nitrogen storage box for a pressurization system for a furnace tube according to one embodiment of the present invention;

[0030] Figure 5 3. It is a front view of a nitrogen storage box for a pressurization system for a furnace tube according to one embodiment of the present invention;

[0031] Figure 6 is a front cross-sectional view of a nitrogen storage box of a pressurization system for a furnace tube according to one embodiment of the present invention;

[0032] Figure 7 is a side view of a nitrogen storage tank for a furnace tube pressurization system according to one embodiment of the present invention;

[0033] Figure 8 FIG. 4 is a block diagram of a control system for a furnace tube pressurization system according to an embodiment of the present invention.

[0034] Description of main reference numerals:

[0035] 1. Furnace tube body; 2. Air inlet pipe; 3. First check valve; 4. Tail exhaust pipe; 5. First solenoid valve; 6. Nitrogen storage tank; 7. Nitrogen charging pipe; 8. Second check valve; 9. Vacuum release pipe; 10. Second solenoid valve; 11. Bypass pipe; 12. Electronic pressure gauge; 13. Third solenoid valve; 14. Large nitrogen flowmeter; 15. Heat exchange tube; 16. Explosion-proof airbag; 17. Heat exchange fins; 18. Fourth solenoid valve. DETAILED DESCRIPTION

[0036] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings, but it should be understood that the protection scope of the present invention is not limited by the specific embodiments.

[0037] Unless expressly stated otherwise, throughout the specification and claims, the term "comprise" or variations such as "include" or "comprising", etc., will be understood to include the stated elements or components but not to exclude other elements or other components.

[0038] like Figures 1 to 8 As shown, a furnace tube pressurization system according to a preferred embodiment of the present invention includes a furnace tube body 1 connected to a vacuum system. Silicon wafers undergo a diffusion process within the vacuum environment of the furnace tube body 1. An air inlet pipe 2 and a tail exhaust pipe 4 are mounted on the furnace tube body 1. The air inlet pipe 2, the furnace tube body 1, and the tail exhaust pipe 4 form a gas flow path.

[0039] Ginseng Figure 1 and Figure 2 As shown, the intake pipe 2 and the tail exhaust pipe 4 are both made of corrosion-resistant pipes, such as stainless steel pipes, aluminum alloy pipes, etc. The intake pipe 2 is used to control the injection of nitrogen, oxygen and other gases for diffusion, and is the main intake pipe. The tail exhaust pipe 4 has two purposes, one is to vacuum before the diffusion reaction, and the other is to discharge the exhaust gas after the diffusion reaction.

[0040] Ginseng Figures 3 to 7 As shown, nitrogen is stored inside the nitrogen storage box 6. The stored nitrogen can exchange heat with the high-temperature exhaust gas, cool the high-temperature exhaust gas, and separate the metaphosphoric acid in the exhaust gas so as to collect the metaphosphoric acid produced by the diffusion reaction. In addition, the nitrogen can be used as bypass nitrogen to increase the back pressure gas volume and reduce the back pressure time when breaking the air back pressure.

[0041] Ginseng Figure 1 、 Figure 4 and Figure 6 As shown, a heat exchange assembly is installed inside the nitrogen storage tank 6. The heat exchange assembly is used to heat the nitrogen to increase the pressure inside the nitrogen storage tank 6. The heat exchange assembly is installed on the tail pipe 4. The heat exchange assembly can exchange heat between the exhaust gas after the diffusion reaction and the nitrogen inside the nitrogen storage tank 6, thereby cooling the exhaust gas and heating the nitrogen through the heat exchange between the nitrogen and the exhaust gas.

[0042] Among them, after the exhaust gas is cooled, the metaphosphoric acid is separated, which replaces the original nitrogen cooling and has basically the same effect as the original nitrogen cooling. What remains unchanged is that after the exhaust gas is cooled, the metaphosphoric acid can still be collected through the original water bottle, so that after the original water bottle nitrogen pipeline is cancelled, the remaining components do not need to be discarded and can still play their full role, reducing production costs for the enterprise.

[0043] In addition, a sufficient amount of nitrogen needs to be stored inside the nitrogen storage tank 6. In this way, after exchanging heat with the high-temperature exhaust gas through the heat exchange component, the volume of the nitrogen will continue to expand due to the principle of thermal expansion and contraction of the gas, thereby continuously increasing the gas pressure inside the nitrogen storage tank 6. When the pressure of the nitrogen inside the nitrogen storage tank 6 is higher than the pressure inside the intake pipe 2, after opening the control valve, the nitrogen inside the nitrogen storage tank 6 can enter the intake pipe 2 more quickly as bypass nitrogen, thereby quickly increasing the amount of back-pressure nitrogen on the main line, thereby achieving rapid back-pressure inside the furnace tube body 1 and shortening the back-pressure time.

[0044] Ginseng Figure 1 、 Figure 2 and Figure 5 As shown, a bypass pipe 11 is fixed in parallel to the intake pipe 2. Bypass pipe 11 can inject nitrogen from the nitrogen storage tank 6 into the intake pipe 2. One end of bypass pipe 11 is fixedly connected to the nitrogen storage tank 6, and the other end of bypass pipe 11 is fixedly connected to the intake pipe 2. The nitrogen storage tank 6 and bypass pipe 11 form a bypass nitrogen pipeline, which is used to add additional nitrogen during back pressure, thereby increasing the back pressure nitrogen flow rate within the intake pipe 2.

[0045] Ginseng Figure 1 、 Figure 2 and Figure 5 As shown, the bypass pipe 11 is sequentially provided with an electronic pressure gauge 12, a third solenoid valve 13, and a large nitrogen flowmeter 14. The electronic pressure gauge 12 is located at one end near the nitrogen storage tank 6, with the third solenoid valve 13 interposed between the electronic pressure gauge 12 and the large nitrogen flowmeter 14. The intake pipe 2 and the nitrogen storage tank 6 are connected via the bypass pipe 11. The large nitrogen flowmeter 14 can be a 10 L / min gas flowmeter, and the electronic pressure gauge 12 can be specifically model SUX-YB80.

[0046] Specifically, the pressure inside the nitrogen storage tank 6 can be monitored in real time through the electronic pressure gauge 12. The third solenoid valve 13 serves as a switch for the bypass nitrogen pipeline to control the on-off of the bypass nitrogen. The large nitrogen flowmeter 14 can detect the flow of the bypass nitrogen in real time, so as to accurately control the flow of the bypass nitrogen into the intake pipe 2.

[0047] Among them, the electronic pressure gauge 12 can also be connected to an audible and visual alarm. When it is detected that the pressure inside the nitrogen storage tank 6 exceeds a preset value, an audible and visual alarm signal can be issued to promptly remind relevant staff to take emergency response measures. At this time, the exhaust and pressure relief can be carried out by opening the third solenoid valve 13, or the exhaust and pressure relief can be carried out through the explosion-proof component to ensure the safe and stable operation of the system.

[0048] Ginseng Figure 4 and Figure 6 As shown, the heat exchange assembly includes a heat exchange tube 15 and heat exchange fins 17. The heat exchange tube 15 has the same diameter as the tail pipe 4 and horizontally extends through the interior of the nitrogen storage tank 6. Both ends of the heat exchange tube 15 are provided with connectors and interfaces that match the tail pipe 4. The heat exchange tube 15 is connected in series to the tail pipe 4, and multiple groups of heat exchange fins 17 are fixedly connected to the heat exchange tube 15. The multiple groups of heat exchange fins 17 are arranged at equal intervals on the heat exchange tube 15.

[0049] Specifically, when the exhaust gas is discharged through the tail pipe 4, it will pass through the interior of the heat exchange tube 15. At this time, the exhaust gas passing through the interior of the heat exchange tube 15 will exchange heat with the nitrogen inside the nitrogen storage tank 6, so that the exhaust gas is cooled inside the heat exchange tube 15, and the nitrogen inside the nitrogen storage tank 6 is heated, providing a basis for the subsequent separation and collection of metaphosphoric acid in the exhaust gas and the rapid introduction of bypass nitrogen.

[0050] Ginseng Figure 4 and Figure 6 As shown, the heat exchange tube 15 and the heat exchange fin 17 are integrally formed, and the material of the heat exchange tube 15 and the heat exchange fin 17 can be one of austenitic stainless steel, stainless steel 316L, carbon steel or low alloy steel.

[0051] Among them, in this embodiment, since the metaphosphoric acid generated by the heat exchange and cooling of the exhaust gas inside the heat exchange tube 15 is extremely corrosive and can even corrode stainless steel 316L, the specific material of the heat exchange tube 15 and the heat exchange fin 17 is preferably austenitic stainless steel with corrosion resistance to oxidizing acid media and corrosion resistance to phosphoric acid, sulfuric acid, formic acid, etc., so as to ensure the long-term and stable use of the heat exchange tube 15.

[0052] Specifically, Figure 4 and Figure 6 As shown, the heat exchange fins 17 are circular thin sheets. The heat exchange fins 17 can greatly increase the surface area of ​​the outside of the heat exchange tube 15, greatly improving the heat exchange efficiency of the heat exchange tube 15, so that the exhaust gas can quickly exchange heat with the nitrogen through the heat exchange tube 15, thereby ensuring the cooling efficiency of the exhaust gas. At the same time, the sufficient nitrogen stored in the nitrogen storage box 6 is quickly heated and expanded, so that the air pressure inside the nitrogen storage box 6 is quickly increased.

[0053] Ginseng Figures 3-5As shown, a nitrogen charging pipe 7 is fixedly connected to the nitrogen storage tank 6, and a second check valve 8 is installed on the nitrogen charging pipe 7. One end of the nitrogen charging pipe 7 is connected to the nitrogen gas source, and the other end is connected to the interior of the nitrogen storage tank 6. A sufficient amount of nitrogen is injected into the nitrogen storage tank 6 through the nitrogen charging pipe 7. The second check valve 8 on the nitrogen charging pipe 7 is used to prevent the nitrogen in the nitrogen storage tank 6 from expanding due to heat and generating backflow, thereby ensuring a stable air pressure inside the nitrogen storage tank 6, so that the nitrogen can automatically and quickly enter the air inlet pipe 2 to participate in the back pressure inside the furnace tube body 1.

[0054] Ginseng Figure 1 and Figure 2 As shown, a vacuum release tube 9 is fixedly connected to the tail pipe 4, and a second solenoid valve 10 is installed on the vacuum release tube 9. One end of the vacuum release tube 9 is connected to the interior of the tail pipe 4, and the other end is connected to the water bottle. The second solenoid valve 10 is used to control the on and off of the vacuum release tube 9.

[0055] Specifically, when back pressure occurs, the second solenoid valve 10 is opened, and the exhaust gas will be introduced into the water bottle through the vacuum release tube 9. The water bottle adopts a spiral structure. When the exhaust gas passes through the inside of the water bottle, the centrifugal force can separate the metaphosphoric acid and other impurities produced by cooling in the exhaust gas to prevent the exhaust gas from corroding other equipment components.

[0056] Ginseng Figure 1 and Figure 2 As shown, the intake pipe 2 is sequentially mounted with a first check valve 3 and a fourth solenoid valve 18, and the tail pipe 4 is mounted with a first solenoid valve 5, which is interposed between the furnace tube body 1 and the nitrogen storage tank 6. The first check valve 3 and the fourth solenoid valve 18 can safely and stably control the air intake of the intake pipe 2 and achieve a vacuum-sealed environment within the furnace tube body 1. The first solenoid valve 5 on the tail pipe 4 can effectively control the exhaust of exhaust gas and seal the exhaust gas after the vacuum environment is extracted.

[0057] Specifically, in the original state, after the interior of the furnace tube body 1 is vacuumed, the first solenoid valve 5 and the fourth solenoid valve 18 are both in the closed state. During air intake, the first solenoid valve 5 is kept in the closed state, and the fourth solenoid valve 18 is opened to connect the air intake pipe 2 with the interior of the furnace tube body 1, thereby continuously providing nitrogen, oxygen and other reaction gases to the interior of the furnace tube body 1. The first check valve 3 can prevent the phenomenon of gas backflow during the air intake process, ensuring safe and stable air intake. During back pressure, the first solenoid valve 5 and the fourth solenoid valve 18 are opened at the same time, and nitrogen is continuously injected through the air intake pipe 2 to break the air, and the exhaust gas is discharged through the tail exhaust pipe 4, so that a safe and stable pipeline system can be formed.

[0058] Ginseng Figure 3 、 Figure 5 、 Figure 6 and Figure 7As shown, the nitrogen storage box 6 is provided with two buffer openings, one at each end of the nitrogen storage box 6. An explosion-proof assembly is fixedly connected to the buffer openings, including an explosion-proof airbag 16. The explosion-proof airbag 16 is made of polyamide fabric and coated with a sealing material on the inside. This not only effectively seals the buffer openings but also can withstand high pressure.

[0059] The explosion-proof airbags 16 are bonded and fixed to the outside of the buffer opening with strong glue to seal the buffer opening. Two sets of explosion-proof airbags 16 are fixedly connected to the nitrogen storage box 6, and one set of explosion-proof airbags 16 is bonded and fixed to each set of buffer openings. The two sets of explosion-proof airbags 16 can better buffer and explosion-proof the interior of the nitrogen storage box 6. The explosion-proof airbags 16 are equipped with air nozzles. Through the air nozzles on the explosion-proof airbags 16, when the pressure inside the nitrogen storage box 6 is too high, it can be vented and depressurized, thereby better achieving the explosion-proof function.

[0060] Specifically, when the nitrogen inside the nitrogen storage tank 6 expands due to heat, if the gas pressure is too high, the explosion-proof airbag 16 will be inflated. As the pressure increases, the volume of the explosion-proof airbag 16 will increase. In this way, the pressure inside the nitrogen storage tank 6 will not be too high, thereby avoiding the risk of explosion of the nitrogen storage tank 6 due to excessive pressure. In addition, the air nozzle on the explosion-proof airbag 16 can be used to manually exhaust and relieve pressure inside the nitrogen storage tank 6 to ensure safe use of the nitrogen storage tank 6.

[0061] In this embodiment, the explosion-proof nitrogen container composed of the nitrogen storage box 6 and the explosion-proof airbag 16 can be replaced by an independent rubber or plastic container that can elastically contract and expand. This independent container itself has good buffering performance and can also well realize nitrogen storage. At the same time, after the nitrogen expands due to heat, it itself deforms under the action of pressure, so that the internal pressure will not be too high. It has good explosion-proof performance and meets all the functions required by the bypass nitrogen system.

[0062] In the above embodiment, Figure 8 As shown, the first solenoid valve 5, the second check valve 8, the second solenoid valve 10 and the third solenoid valve 13 are uniformly controlled by an independent PLC control center. The electronic pressure gauge 12 and the large nitrogen flow meter 14 serve as the upper computer of the PLC control center, and the first solenoid valve 5, the second check valve 8, the second solenoid valve 10 and the third solenoid valve 13 serve as the lower computer of the PLC control center, together forming an independent control system for controlling the operation of the intake pipe 2, the tail pipe 4 and the bypass nitrogen pipeline.

[0063] Working principle:

[0064] After the silicon wafers complete diffusion bonding under the vacuum environment inside the furnace tube body 1, a sufficient amount of nitrogen is pre-filled into the nitrogen storage box 6. The first solenoid valve 5 and the fourth solenoid valve 18 are opened by the PLC control center, and nitrogen is filled into the furnace tube body 1 through the air inlet pipe 2 to break the air back pressure. At this time, the exhaust gas is discharged through the tail exhaust pipe 4. When the exhaust gas passes through the heat exchange tube 15, it will efficiently exchange heat with the nitrogen inside the nitrogen storage box 6, so that the exhaust gas is cooled inside the heat exchange tube 15. Finally, after the metaphosphoric acid and impurities are separated through the water bottle, it enters the exhaust gas treatment system;

[0065] The nitrogen inside the nitrogen storage tank 6 is heated, and the sufficient nitrogen stored inside the nitrogen storage tank 6 is quickly heated and expanded, thereby rapidly increasing the air pressure inside the nitrogen storage tank 6. At this time, the third solenoid valve 13 is opened. Under the action of the pressure difference, the nitrogen inside the nitrogen storage tank 6 will quickly enter the interior of the intake pipe 2 through the bypass pipe 11, thereby increasing the back-pressure nitrogen flow inside the intake pipe 2. Increasing the back-pressure nitrogen flow through the chemical process can effectively shorten the back-pressure time, thereby shortening the time of the diffusion process.

[0066] The present invention transforms the original water bottle nitrogen pipeline, and fully utilizes the nitrogen on the water bottle nitrogen pipeline to increase the back pressure gas volume without affecting the cooling of the tail gas and the collection of metaphosphoric acid, thereby reducing the back pressure time and improving the production capacity.

[0067] The foregoing descriptions of specific exemplary embodiments of the present invention are for purposes of illustration and description. These descriptions are not intended to limit the invention to the precise forms disclosed, and it is apparent that many variations and modifications are possible in light of the foregoing teachings. The exemplary embodiments have been selected and described for the purpose of explaining the specific principles of the invention and their practical application, thereby enabling those skilled in the art to realize and utilize a variety of exemplary embodiments of the invention and various options and modifications. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. A booster system for furnace tubes, characterized in that: The furnace tube comprises: A furnace tube body, wherein an air inlet pipe and a tail exhaust pipe are installed on the furnace tube body, and the air inlet pipe, the furnace tube body and the tail exhaust pipe form a gas flow path; The boosting system comprises: A nitrogen storage tank, wherein nitrogen is stored in the nitrogen storage tank, and a heat exchange component is installed in the nitrogen storage tank, wherein the heat exchange component is used to heat the nitrogen to increase the gas pressure inside the nitrogen storage tank, and the heat exchange component is installed on the tail exhaust pipe; A bypass pipe, the bypass pipe being fixed in parallel to the intake pipe and capable of injecting nitrogen from the nitrogen storage tank into the intake pipe; The heat exchange assembly includes a heat exchange tube and a heat exchange fin. The heat exchange tube is connected in series to the tail pipe. The heat exchange fin is fixedly connected to the heat exchange tube in multiple groups. One end of the bypass pipe is fixedly connected to the nitrogen storage tank, and the other end of the bypass pipe is fixedly connected to the intake pipe. An electronic pressure gauge, a third solenoid valve and a large nitrogen flow meter are sequentially arranged on the bypass pipe; A buffer opening is provided on the nitrogen storage box, and an explosion-proof component is fixedly connected to the buffer opening. The explosion-proof component includes an explosion-proof airbag.

2. The furnace tube pressurizing system according to claim 1, wherein: The heat exchange tubes and heat exchange fins are integrally formed, and the material of the heat exchange tubes and heat exchange fins is one of austenitic stainless steel, carbon steel or low alloy steel.

3. The furnace tube pressurizing system according to claim 1, wherein: The nitrogen storage box is fixedly connected with a nitrogen charging pipe, and a second check valve is installed on the nitrogen charging pipe.

4. The furnace tube pressurizing system according to claim 1, wherein: The tail exhaust pipe is fixedly connected with a vacuum release pipe, and a second solenoid valve is installed on the vacuum release pipe.

5. The furnace tube pressurizing system according to claim 1, wherein: The air inlet pipe is sequentially mounted with a first check valve and a fourth solenoid valve, the tail exhaust pipe is mounted with a first solenoid valve, and the first solenoid valve is located between the furnace pipe body and the nitrogen storage tank.

6. The furnace tube pressurizing system according to claim 1, wherein: The electronic pressure gauge is arranged at one end close to the nitrogen storage tank, and the third electromagnetic valve is located between the electronic pressure gauge and the large nitrogen flow meter.

7. The furnace tube pressurizing system according to claim 1, wherein: Two groups of explosion-proof airbags are fixedly connected to the nitrogen storage box, and air nozzles are installed on the explosion-proof airbags.

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