Conveying device and conveying method

Abstract

A conveying device is provided for conveying a container containing articles. The conveying device may include a first track, a second track located below the first track, and a conveying unit located on one side of the first and second tracks. The conveying unit is configured to convey the container between a first vehicle traveling on the first track and a second vehicle traveling on the second track. The conveying unit may include a frame having a lifting space inside and a lifting member for lifting the container in the lifting space between a first position for conveying the first vehicle and the container and a second position for conveying the second vehicle and the container.

Description

Technical Field

[0001] The present invention relates to a conveying apparatus and a conveying method, and more particularly, to an apparatus and a method for conveying articles used in semiconductor device manufacturing processes. Background Technology

[0002] Typically, multiple processes such as deposition, photolithography, and etching are performed to manufacture semiconductors. Semiconductor processing equipment that performs these processes is arranged in a semiconductor production line. A semiconductor production line can have a multi-layered structure. Substrates (e.g., wafers, glass) that serve as articles used in the semiconductor manufacturing process can be conveyed to each semiconductor processing equipment while being housed in containers such as FOUPs. Additionally, during the semiconductor manufacturing process, articles that have completed their predetermined processes are retrieved from the semiconductor processing equipment into containers, and the retrieved containers are then transported externally.

[0003] Containers are transported by vehicles, such as overhead hoist transport. These vehicles travel along tracks set up within the semiconductor production line. The vehicles deliver containers containing items to a loading port of a semiconductor processing unit. Additionally, the vehicles can remove containers containing items that have undergone predetermined processing from the loading port and transport the containers externally or to another semiconductor processing unit.

[0004] To improve the processing efficiency of semiconductors manufactured on any layer of a semiconductor production line, it is necessary to reduce the time required for carriers to transfer containers between semiconductor processing equipment. One method for reducing container transfer time has been to use multiple tracks for the carriers. An upper track with different purposes and a lower track located below the upper track are installed on the ceiling of the semiconductor production line. For example, the upper track can be used as a high-speed travel path for the carriers, and the lower track can be used as a low-speed travel path. As described above, when the upper and lower tracks serve different purposes to reduce container transfer time, containers need to be exchanged between carriers traveling on the upper track and carriers traveling on the lower track.

[0005] To allow the carrier to move directly between the upper and lower rails, a sloping rail is required to connect them. This sloping rail introduces structural problems that consume valuable internal space in the semiconductor production line. Furthermore, when using the sloping rail to exchange containers between the upper and lower rails, congestion can occur within the sloping rail section, depending on the number of carriers traveling in that section. This congestion ultimately leads to a decrease in semiconductor manufacturing efficiency. Summary of the Invention

[0006] The purpose of this invention is to provide a conveying device and a conveying method that can efficiently convey items to be used in a semiconductor production line.

[0007] Another object of the present invention is to provide a conveying device and conveying method that enables the efficient exchange of items between vehicles traveling on tracks with different purposes.

[0008] Another object of the present invention is to provide a conveying device and a conveying method that enables the efficient exchange of items between vehicles traveling on different tracks on the same layer of a semiconductor production line in which semiconductor devices are continuously arranged.

[0009] The purpose of this invention is not limited thereto, and other purposes not mentioned above will become apparent to those skilled in the art from the following description.

[0010] This invention provides a conveying device for conveying a container containing articles. The conveying device may include a first track, a second track located below the first track, and a conveying unit located on one side of the first and second tracks. The conveying unit is configured to convey the container between a first vehicle traveling on the first track and a second vehicle traveling on the second track. The conveying unit may include a frame having a lifting space inside and a lifting member for lifting the container within the lifting space between a first position for conveying the first vehicle and the container and a second position for conveying the second vehicle and the container.

[0011] According to one embodiment, the conveying device can be arranged above multiple semiconductor devices, and the semiconductor production line with multiple semiconductor devices arranged continuously can be composed of at least one layer, and the first track, the second track and the conveying unit can be arranged on the same layer of the semiconductor production line.

[0012] According to one embodiment, the second vehicle can travel on the second track at a lower speed than the first vehicle to transport semiconductor devices and containers.

[0013] According to one embodiment, the first track and frame can be fixed to the ceiling of the semiconductor production line, and the second track can be fixed via the first track.

[0014] According to one embodiment, the transmission unit may include a first transmission unit located on one side of the first track, and a second transmission unit located on the opposite side of the first track, based on the first track.

[0015] According to one embodiment, the first conveying unit may include a first frame and a first lifting member, wherein the first lifting member may include a lifting plate for supporting the lower surface of the container and a first driving member disposed on the lower wall of the first frame and moving the lifting plate in a vertical direction. The second conveying unit may include a second frame and a second lifting member, wherein the second lifting member may include a clamping member for clamping a flange formed on the upper part of the container and a second driving member disposed on the upper wall of the second frame and moving the clamping member in a vertical direction.

[0016] According to one embodiment, a first vehicle may travel only on the first track of a first track and a second track, and a second vehicle may travel only on the second track of a first track and a second track.

[0017] According to one embodiment, the conveying unit may further include a support member for conveying the first carrier, the lifting component, and the container in the lifting space.

[0018] According to one embodiment, the support member may be disposed at a first position.

[0019] According to one embodiment, the support member can be disposed on the frame and can slide between a support position that can support the container in the lifting space and a standby position that does not hinder the container from moving up and down in the lifting space.

[0020] According to one embodiment, when the lifting component moves up and down in the lifting space, the supporting component may not obstruct the lifting component.

[0021] According to one embodiment, each of the first and second vehicles includes a slider that laterally changes the position of the container relative to the direction of travel. The sides of the frame facing the first and second tracks are open, and the slider moves the container to the lifting space through the open sides.

[0022] According to one embodiment, the conveying device may further include a controller, wherein the controller can control the support member, the slider, and the lifting member such that: when moving the container from the first carrier to the lifting space, after the support member is slid to the support position, the container is placed on the support member by moving the slider to the lifting space; after the container is placed on the support member, the lifting member is raised to a first position so that the lifting member supports the container; and after the lifting member supports the container, the support member is slid to a standby position.

[0023] According to one embodiment, the conveying device may further include a controller, wherein the controller can control the support member, the slider, and the lifting member such that: when moving the container from the lifting space to the first carrier, the lifting member slides the support member to a standby position before lifting the container to the first position; when the support member moves to the standby position, the lifting member lifts the container to the first position; and when the lifting member is at the first position, the lifting member slides the support member to the support position.

[0024] Another embodiment of the present invention provides a conveying method for conveying a container containing articles along a first track in the same layer of a semiconductor production line in which semiconductor devices are continuously arranged and a second track arranged at a different height from the first track. The conveying method may include: exchanging containers between a first vehicle traveling on the first track and a second vehicle traveling on the second track in a lifting space located on one side of a frame relative to the longitudinal direction of the first and second tracks; and lifting the containers between a first position for conveying the first vehicle and the container and a second position for conveying the second vehicle and the container by means of a lifting member disposed in the lifting space.

[0025] According to one embodiment, a support member disposed at a first position transports a first carrier, a lifting member, and a container, wherein the support member slides between a support position capable of supporting the container in a lifting space and a standby position that does not obstruct the container from moving up and down in the lifting space.

[0026] According to one embodiment, the conveying method may further include: when moving the container from the first carrier to the lifting space, after sliding the support member to the support position, moving the container supported by the first carrier onto the support member.

[0027] According to one embodiment, the lifting member can raise the support member to a first position to support a container sitting on the support member, and the lifting member can slide the support member to a standby position after supporting the container.

[0028] According to one embodiment, when moving a container from the lifting space to a first carrier, the lifting member can slide the support member to a standby position before lifting the container to a first position. The lifting member can lift the container to the first position when the support member is in the standby position. The lifting member can slide the support member to a support position when the lifting member is in the first position. The first carrier can then transport the container sitting on the support member outside the lifting space.

[0029] Another embodiment of the present invention provides a conveying device for conveying containers containing articles in the same layer of a semiconductor production line in which semiconductor devices are continuously arranged. The conveying device may include a first carrier traveling on a first track to convey containers, a second carrier traveling on a second track located below the first track to convey containers, and a plurality of conveying units located on one side of the first and second tracks to convey containers between the first and second carriers. The first carrier includes a first slider for laterally changing the position of the container being conveyed by the first carrier relative to the travel direction of the first carrier. The second carrier includes a second slider for laterally changing the position of the container being conveyed by the second carrier relative to the travel direction of the second carrier. The conveying units may include a frame having an internal lifting space and a lifting member for lifting the container between a first position for conveying the first carrier and the container and a second position for conveying the second carrier and the container.

[0030] According to embodiments of the present invention, articles used in semiconductor production lines can be efficiently transported.

[0031] Furthermore, according to embodiments of the present invention, it is possible to efficiently exchange items between vehicles traveling on tracks with different purposes.

[0032] Furthermore, according to embodiments of the present invention, it is possible to efficiently exchange items between vehicles traveling on different tracks on the same layer of a semiconductor production line in which semiconductor devices are continuously arranged.

[0033] The effects of the present invention are not limited to those described above; those skilled in the art will clearly understand any effects not mentioned based on this specification and the accompanying drawings. Attached Figure Description

[0034] Figure 1 This is a schematic front view illustrating the appearance of a semiconductor production line according to an embodiment.

[0035] Figure 2 It is a schematic diagram based on Figure 1 A top view of the appearance of a semiconductor production line according to an embodiment.

[0036] Figure 3 The diagram is based on Figure 2 A front view of the conveying device in an embodiment.

[0037] Figure 4 The diagram is based on Figure 3 A front view of the first vehicle in an embodiment traveling on the first track.

[0038] Figure 5 The diagram is based on Figure 3 A side view of the first vehicle of the embodiment traveling on the first track.

[0039] Figure 6 It is based on Figure 3 A perspective view of the transmission unit in an embodiment.

[0040] Figures 7 to 11 It is shown in the diagram in sequence according to Figure 3 A diagram showing the state of the exchange container in the conveying device of an embodiment.

[0041] Figure 12 The diagram is based on Figure 3 A front view of the transmission unit in another embodiment.

[0042] Figure 13 It is based on Figure 12 A perspective view of the transmission unit of another embodiment.

[0043] Figure 14 It is a schematic diagram in Figure 12 A top view of the conveyor unit when the support plate is in the support position.

[0044] Figure 15 It is a schematic diagram in Figure 12 A top view of the transmission unit with the support plate in the standby position.

[0045] Figures 16 to 18 It is shown in the diagram in sequence according to Figure 12 A perspective view of the state of the conveying container in the lifting space of the conveying unit in an embodiment.

[0046] Figure 19 and Figure 20 The diagram is based on Figure 12 A front view of the transmission unit in another embodiment. Detailed Implementation

[0047] In the following description, embodiments of the invention will be presented in more detail with reference to the accompanying drawings. Various modifications to the embodiments of the invention are possible, and the scope of the invention should not be construed as limited to the embodiments described below.

[0048] Examples are provided to explain the invention more fully to those skilled in the art. Therefore, the shapes, etc., of components in the drawings are exaggerated for clearer description.

[0049] The terms "first," "second," etc., are used to describe different constituent elements, but the constituent elements are not limited by these terms. These terms are only used to distinguish one component from another. For example, without departing from the scope of the invention, a first constituent element may be named a second constituent element, and similarly,

[0050] The second constituent element can be named the first constituent element.

[0051] The conveying apparatus and method according to embodiments of the present invention can be used to convey containers. In particular, the conveying apparatus and method according to embodiments of the present invention can convey containers containing articles. According to one embodiment,

[0052] The item may include a substrate such as a wafer or reticle. The container holding the item may include a front-opening wafer cassette (FOUP) or a cassette. Furthermore, the container holding the item may include...

[0053] A pod. Additionally, containers holding items can include magazines for holding multiple printed circuit boards, trays for holding multiple semiconductor packages, etc.

[0054] In the following text, the conveying of a container holding a substrate, such as a wafer, to a location arranged in semiconductor manufacturing processes will be described.

[0055] Semiconductor devices in the production line are used as examples to describe the conveying apparatus and conveying method according to embodiments of the present invention. Additionally, articles conveyed by the article conveying apparatus (hereinafter referred to as carriers) will be described using a substrate for semiconductor manufacturing as an example. However, the present invention is not limited thereto, and carriers according to embodiments of the present invention can be applied in the same or similar way to various semiconductor production lines that require the conveying of articles and / or containers containing articles.

[0056] In the following text, reference will be made to Figures 1 to 20 The embodiments of the present invention are described in detail below.

[0057] Figure 1 This is a schematic front view illustrating the appearance of a semiconductor production line according to an embodiment. Figure 2 It is a schematic diagram based on Figure 1 A top view of the appearance of a semiconductor production line according to an embodiment.

[0058] Reference Figure 1 and Figure 2 The semiconductor production line 1 of the present invention may include at least one or more layers. For example, the semiconductor production line 1 may have a multi-layer structure. Figure 1 As shown, semiconductor production line 1 can have a two-layer structure. However, this is for ease of description, and semiconductor production line 1 can have a multi-layer structure, with three or more (natural number) layers stacked together.

[0059] Semiconductor devices 10 can be sequentially arranged on each layer of semiconductor production line 1. Semiconductor devices 10 can be located at the bottom of semiconductor production line 1. Semiconductor devices 10 can perform deposition, photolithography, or etching processes on the substrate. However, they are not limited to the above examples, and semiconductor devices 10 can perform various processes on the substrate.

[0060] In the following text, when viewing the semiconductor production line 1 from the front, the arrangement direction of the semiconductor devices 10 is defined as the first direction X. Furthermore, the direction perpendicular to the first direction X on a horizontal plane is defined as the second direction Y. Additionally, the direction perpendicular to the plane including the first direction X and the second direction Y is defined as the third direction Z. According to one embodiment, the third direction Z may be a direction perpendicular to the ground.

[0061] A conveying device 20 may be arranged on the semiconductor production line 1. According to an embodiment of the present invention, the conveying device 20 is arranged on each layer of the semiconductor production line 1. The conveying device 20 can convey containers 12 containing items within the semiconductor production line 1. Specifically, the conveying device 20 can convey containers 12 containing items within the semiconductor production line 1 in which semiconductor devices 10 are continuously arranged. The conveying device 20 may be located at the top of the semiconductor production line 1. Furthermore, the conveying device 20 may be located above the semiconductor devices 10.

[0062] The conveying device 20 may include a first track 200, a second track 300, a first carrier 400, a second carrier 500, a conveying unit 600, and a controller 900.

[0063] The first track 200 serves as the path for the first vehicle 400, which will be described below, to travel. The first track 200 is located above the semiconductor production line 1. Additionally, the first track 200 may be located above the second track 300, which will be described below. According to one embodiment, the first track 200 may be a high-speed travel track. For example, the travel speed of the first vehicle 400 traveling on the first track 200 may be faster than the travel speed of the second vehicle 500 traveling on the second track 300. (See also...) Figure 2 The first track 200 may include a track with a straight structure and a track with a curved structure. Although not shown, the first track 200 may also include branch tracks.

[0064] exist Figure 2 In the illustration, the first track 200 is generally rectangular, but its shape can be modified to various forms, such as circular and hexagonal. The first track 200 can be arranged along the ceiling of the semiconductor production line 1 to view the semiconductor device 10 from above. Furthermore, the first track 200 may have an mounting range capable of covering the entire semiconductor device 10.

[0065] The second track 300 serves as a path for the second vehicle 500, which will be described below, to travel. The second track 300 is located above the semiconductor production line 1. Alternatively, the second track 300 may be located below the first track 200. According to one embodiment, the second track 300 may be a low-speed travel track. For example, the travel speed of the second vehicle 500 traveling on the second track 300 may be lower than the travel speed of the first vehicle 400 traveling on the first track 200. Although not shown, the second track 300 may, similarly to the first track 200, include tracks with straight structures, tracks with curved structures, and branch tracks. Furthermore, when viewed from above, the second track 300 may have an installation range with a structure similar to that of the first track 200.

[0066] Furthermore, according to embodiments of the present invention, the first track 200 and the second track 300 may not be connected to each other. For example, a track with a ramp structure connecting the first track 200 and the second track 300 may not be provided. Therefore, the first vehicle 400 traveling on the first track 200 can only travel on the first track 200, and the second vehicle 500 traveling on the second track 300 can only travel on the second track 300.

[0067] A first vehicle 400 travels along a first track 200. The first vehicle 400 can hold a container 12. The first vehicle 400 transports the container 12 along the first track 200. According to one embodiment, the first vehicle 400 can be an overhead hoist vehicle.

[0068] The second vehicle 500 travels along the second track 300. The second vehicle 500 can hold the container 12. The second vehicle 500 transports the container 12 along the second track 300. According to one embodiment, the second vehicle 500 can be an overhead lifting vehicle.

[0069] The system may include at least one or more transfer units 600. Transfer units 600 may be disposed on each layer of the semiconductor production line 1. Transfer units 600 may be located at the top of the semiconductor production line 1. Transfer units 600 transfer containers 12 between a first carrier 400 and a second carrier 500. According to one embodiment, transfer unit 600 may transfer containers 12 transferred from the first carrier 400 to the second carrier 500. Furthermore, transfer unit 600 may transfer containers 12 transferred from the second carrier 500 to the first carrier 400. Additionally, transfer unit 600 may temporarily store containers 12 transferred to or from the semiconductor device 10.

[0070] The controller 900 can control the conveying device 20. The controller 900 can control the conveying device 20 to convey the container 12 containing items to or from the semiconductor device 10. Additionally, the controller 900 can control the conveying device 20 to convey the container 12 to or from the conveying unit 600. Specifically, the controller 900 can control the slider, lifting member, and support member, which will be described below.

[0071] The controller 900 may include a process controller consisting of a microprocessor (computer) that performs control over the transport device 20, a keyboard for operator input to manage the transport device 20, a user interface consisting of a display for visualizing and showing the movement of the transport device 20, and a storage unit storing processing schemes. These processing schemes may include control programs for executing processes within the transport device 20 under the control of the process controller, or programs for executing processes in each component based on various data and processing conditions. Furthermore, the user interface and storage unit may be connected to the process controller. The processing schemes may be stored in a storage medium within the storage unit. The storage medium may include a hard disk, a portable disk such as a CD-ROM or DVD, or a semiconductor memory such as flash memory.

[0072] The conveying apparatus according to embodiments of the present invention will be described in detail below. The conveying apparatus according to the embodiments described below can be arranged as follows: Figure 1 The device shown is located on any layer of the semiconductor production line 1. For ease of understanding, only the conveying device arranged on any layer of the semiconductor production line 1 is described, and the structure and operation of the conveying device 20 arranged on different layers of the semiconductor production line 1 with a multi-layer structure are the same as or similar to the structure and operation of the conveying device described below.

[0073] Figure 3 The diagram is based on Figure 1 A front view of the transmission device in an embodiment.

[0074] Reference Figure 3 According to an embodiment of the present invention, the first track 200 can be formed by a pair of tracks. The pair of tracks can be arranged to be spaced apart from each other. In addition, the pair of tracks can be parallel to each other and arranged at the same height.

[0075] The first track 200 can be fixed to the ceiling CE of the semiconductor production line. Specifically, the first track 200 can be fixedly mounted on the ceiling CE of the semiconductor production line via a first support member 220 and a first fixing member 240. According to one embodiment, the first support member 220 can be rod-shaped. The first support member 220 can have a longitudinal direction parallel to the third direction Z. One end of the first support member 220 can be fixedly mounted on the ceiling CE of the semiconductor production line. Furthermore, the other end of the first support member 220 can be connected to the first fixing member 240, which is connected to the first track 200.

[0076] The second track 300 according to an embodiment of the present invention can be formed by a pair of tracks. The pair of tracks can be spaced apart from each other. In addition, the pair of tracks can be parallel to each other and arranged at the same height.

[0077] The second track 300 can be located below the first track 200. The second track 300 can be fixed to the ceiling CE of the semiconductor production line via the first track 200. Specifically, one end of the rod-shaped second support 320 can be connected to the first fixing member 240 connected to the first track 200. Furthermore, the other end of the second support 320 can be connected to the second fixing member 340 connected to the second track 300. Therefore, the second track 300 can be connected to the first track 200 and fixed to the ceiling CE of the semiconductor production line via the first track 200.

[0078] However, not limited to the above example, the first fastener 240 connected to the first track 200 and the second fastener 340 connected to the second track 300 are fixed to the roof CE of the semiconductor production line and can be connected to the support member with a single rod shape, respectively.

[0079] The conveying unit 600 may be located on one side of the first track 200 and the second track 300. According to one embodiment, the conveying unit 600 may be located on the left or right side relative to the longitudinal direction of the first track 200. That is, the conveying unit 600 may be located on the left or right side relative to the travel direction of the first vehicle 400. Additionally, the conveying unit 600 may be located on the left or right side relative to the travel direction of the second vehicle 500. The conveying unit 600 may be positioned at a location capable of conveying the container 12 from the first vehicle 400 traveling on the first track 200.

[0080] The conveying unit 600 can be fixed to the ceiling CE of the semiconductor production line. For example, the conveying unit 600 can be fixed to the ceiling CE of the semiconductor production line via a frame support 612. For example, the frame support 612 can be substantially rod-shaped. One end of the frame support 612 can be fixedly disposed on the ceiling CE of the semiconductor production line, and the other end of the frame support 612 can be connected to the upper end of the frame 620, which will be described below. For example, the other end of the frame support 612 can be connected to the upper wall 622 of the frame 620, which will be described below.

[0081] Furthermore, the conveying unit 600 can be connected to the frame connector 614. For example, the frame connector 614 can be connected to the sidewall frame 626, which will be described below. The frame connector 614 can be connected to the first fastener 240 connected to the first track 200. Thus, the conveying unit 600 can be connected to the first track 200 via the frame connector 614. As described above, each of the first track 200, the second track 300, and the conveying unit 600 is fixedly mounted on the ceiling CE of the semiconductor production line in the longitudinal direction of the vertical direction via the first support 220, the second support 320, and the frame support 612. Therefore, the first track 200, the second track 300, and the conveying unit 600 may easily sway along the first direction X and the second direction Y.

[0082] According to an embodiment of the present invention, the frame connector 614 connects the tracks 200 and 300 and the conveying unit 600 to each other to prevent the tracks 200 and 300 and the conveying unit 600 from swaying in the lateral direction. Therefore, the structural stability of the tracks 200 and 300 and the conveying unit 600 can be further improved.

[0083] The first vehicle 400 can exchange container 12 with the transfer unit 600, which will be described below. Specifically, the first vehicle 400 can unload container 12 from the lifting platform 642, which will be described below. In addition, the first vehicle 400 can load container 12 that is located on the lifting platform 642, which will be described below.

[0084] The second carrier 500 can be connected to the semiconductor device 10 (see...) Figure 1 The second carrier 500 can unload or load the container 12 from the loading port (not shown) of the semiconductor device 10. Furthermore, the second carrier 500 can exchange the container 12 with the transfer unit 600. For example, the second carrier 500 can exchange the container 12 with the lifting plate 642, which will be described below.

[0085] As described above, the first carrier 400 exchanges container 12 with the transfer unit 600, and the second carrier 500 can exchange container 12 with both the semiconductor device 10 and the transfer unit 600. That is, because the second carrier 500 needs to exchange container 12 with the semiconductor device 10, the second carrier 500 can travel at a lower speed compared to the first carrier 400. Conversely, unlike the second carrier 500, because the first carrier 400 exchanges container 12 with the transfer unit 600, the first carrier 400 can travel at a high speed to maximize the transfer efficiency of container 12.

[0086] Figure 4 The diagram is based on Figure 3 A front view of the first vehicle in an embodiment traveling on the first track. Figure 5 The diagram is based on Figure 3 A side view of the first vehicle of the embodiment traveling on the first track.

[0087] In the following text, reference will be made to Figures 3 to 5 A vehicle according to an embodiment of the present invention will be described in detail. Since the second vehicle has the same or similar structure as the first vehicle, the first vehicle traveling on the first track will be described in detail below for ease of description.

[0088] The first carrier 400 travels on the first track 200. The first carrier 400 can hold the container 12. The first carrier 400 can travel on the first track 200 while holding the container 12. The first carrier 400 may include a main body 410, traveling wheels 420, a steering unit 430, a storage frame 440, a neck 450, a slider 460, a lifting unit 470, and a holding unit 480.

[0089] A travel actuator (not shown) may be provided within the main body 410. The travel actuator (not shown) can rotate the travel wheel 420. The travel actuator (not shown) can transmit power to the travel wheel 420 to rotate the travel wheel 420. In addition, multiple main bodies 410 may be provided. The aforementioned travel actuator (not shown) may be arranged within each main body 410. Furthermore, the aforementioned travel wheel 420, steering portion 430, and neck 450 may be coupled to each main body 410.

[0090] The travel wheel 420 can be coupled to the main body 410. The travel wheel 420 is rotatably coupled to the main body 410. The travel wheel 420 can rotate in contact with the first track 200. Multiple travel wheels 420 can be provided. For example, the travel wheels 420 can be formed in pairs. One travel wheel 420 can be rotatably coupled to one surface of the main body 410, and another travel wheel 420 can be rotatably coupled to another surface opposite to one surface of the main body 410.

[0091] The steering unit 430 may be located above the main body 410. The steering unit 430 may include a plurality of steering wheels 432 and a steering rail 434. The plurality of steering wheels 432 may be arranged in a direction parallel to the direction of travel of the first vehicle 400 when viewed from above.

[0092] Viewed from above, the steering rail 434 may have a longitudinal direction parallel to the direction of travel of the first vehicle 400. Furthermore, the position of the steering wheel 432 can be changed along the longitudinal direction of the steering rail 434. The steering wheel 432 can contact the upper rail (not shown) to change the direction of travel of the first vehicle 400. That is, while the position of the steering wheel 432 changes longitudinally along the steering rail 434, the steering wheel 432 can change its direction of contact with the upper rail (not shown), thereby changing the direction of travel of the first vehicle 400.

[0093] The storage frame 440 may have an internal space. The slider 460, lifting part 470, and holding part 480 may be located within the internal space of the storage frame 440. The storage frame 440 may be substantially hexahedral in shape. According to one embodiment, the storage frame 440 may have a structure in which the front and rear are blocked by baffles in a direction parallel to the travel direction of the first carrier 400. Furthermore, the storage frame 440 may have two sides that respectively contact its front and rear surfaces, and an open lower surface. Therefore, when the first carrier 400 is traveling, it is possible to prevent the container 12 held by the first carrier 400 from swaying due to air resistance.

[0094] The neck 450 can be coupled to the body 410. The neck 450 can be rotatably coupled to the body 410. Furthermore, the neck 450 can be coupled to the upper end of the storage frame 440. Thus, the storage frame 440 can be coupled to the body 410 via the neck 450. Although not shown, the storage frame 440 can be coupled to at least one body 410 via at least one neck 450. For example, two necks 450 can be coupled to one storage frame 440. Furthermore, the two necks 450 can be connected to different bodies 410 respectively.

[0095] Slider 460 can be coupled to storage frame 440. Slider 460 is located within the internal space of storage frame 440 and can be coupled to the lower end of the upper surface of storage frame 440. Slider 460 can be coupled to storage frame 440 so that its position can be changed. Slider 460 can be coupled to storage frame 440 to change its position laterally (e.g., left-right) based on the travel direction of first vehicle 400. In addition, slider 460 can be coupled to lifting unit 470, which will be described below. Therefore, when the position of slider 460 is changed, the position of lifting unit 470 can also be changed.

[0096] The lifting section 470 can raise or lower the retaining section 480, which will be described below. The lifting section 470 can be attached to the main body 410 via the storage frame 440 and / or the neck 450. The lifting section 470 may have an actuator (not shown) inside. The actuator (not shown) can wind or unwind the belt 472 connected to the retaining section 480 to raise or lower the retaining section 480.

[0097] The retaining portion 480 can hold the container 12. For example, the retaining portion 480 can hold the flange 14 formed on the upper part of the container 12. The retaining portion 480 can detachably hold the container 12. The retaining portion 480 can load the semiconductor device 10 (see reference). Figure 1 ) ) on the loading port of container 12, or unload container 12 from the loading port.

[0098] Figure 6 It is based on Figure 3 A perspective view of the transmission unit of an embodiment. In the following, reference will be made to... Figures 3 to 6 A detailed description of the transmission unit according to an embodiment of the present invention is provided.

[0099] Similar to the foregoing, the transfer unit 600 transfers the container 12 between the first carrier 400 and the second carrier 500. According to one embodiment, the transfer unit 600 can transfer the container 12 being transferred from the first carrier 400 to the second carrier 500. Furthermore, the transfer unit 600 can transfer the container 12 being transferred from the second carrier 500 to the first carrier 400. Additionally, the transfer unit 600 can temporarily store the container 12 transferred to the semiconductor device 10 (see [link]). Figure 1 The container 12 is either the container 12 that is transferred from the semiconductor device 10 or the container 12 that is transferred from the semiconductor device 10.

[0100] According to an embodiment, the conveying unit 600 may include a frame 620 and a lifting member 640.

[0101] The frame 620 has an internal lifting space 601. The lifting space 601 can be used as a space for lifting the container 12. In addition, the lifting space 601 can also be used as a space for moving the lifting member 640, which will be described below. Additionally, the lifting space 601 can also be used as a space for temporarily storing the container 12.

[0102] According to one embodiment, the frame 620 may have a side-opening structure. However, the invention is not limited thereto, and the frame 620 may have a side-opening structure. For example, the frame 620 may be open only on the side facing the first track 200 and the second track 300. The container 12 can be transported between the first carrier 400, the second carrier 500, and the lifting plate 642, which will be described below, via the open side. Hereinafter, for ease of understanding, the case where the frame 620 has a side-opening structure will be described as an example.

[0103] Frame 620 may include an upper wall 622, a lower wall 624, and side wall frames 626. The upper wall 622 and lower wall 624 may be substantially rectangular plates. The upper wall 622 may be connected to a frame support 612 that is connected to the ceiling of the semiconductor production line. Furthermore, the side ends of the upper wall 622 may be connected to frame connectors 614. A lifting member 640, which will be described below, may be arranged on the upper surface of the lower wall 624. In frontal view, the lower wall 624 may be located below the container 12 held by the second carrier 500.

[0104] The sidewall frame 626 may have a longitudinal direction in the vertical direction. Multiple sidewall frames 626 may be provided. The sidewall frames 626 may be respectively attached to the corners of the upper wall 622 and the lower wall 624. For example, four sidewall frames 626 may be provided, with one end of each sidewall frame 626 attaching to the corner of the upper wall 622 and the other end of each sidewall frame 626 attaching to the corner of the lower wall 624.

[0105] The lifting member 640 is located in the lifting space 601. The lifting member 640 lifts and lowers the container 12 within the lifting space 601. That is, the lifting member 640 moves the container 12 in the vertical direction. The lifting member 640 lifts and lowers the container 12 between a first position and a second position within the lifting space 601. The first position is defined as the position where the first vehicle 400 traveling on the first track 200 and the lifting plate 642 (described below) transport the container. For example, when the slider 460 of the first vehicle 400 slides to move the container 12 into the lifting space 601, the lifting plate 642 may be located in the first position, which is below the container 12. The second position is defined as the position where the second vehicle 500 traveling on the second track 300 and the lifting plate 642 transport the container. For example, when the slider 560 of the second vehicle 500 slides to move the container 12 into the lifting space 601, the lifting plate 642 may be located in the second position, which is below the container 12.

[0106] The lifting member 640 may include a lifting plate 642 and a drive member 644. The lifting plate 642 may support the container 12. For example, the lifting plate 642 may support the lower surface of the container 12. Figure 6 In the illustration, the lifting plate 642 is shown as having a rectangular shape, but is not limited to this. The lifting plate 642 can have various shapes, such as circular and polygonal. Although not shown, a rubber ring-shaped anti-slip member can be provided on the upper surface of the lifting plate 642 to prevent the container 12 from sliding.

[0107] The drive member 644 is located in the lifting space 601. The drive member 644 may be disposed on the lower wall 624 of the frame 620. Furthermore, the drive member 644 is coupled to the lifting plate 642. For example, the drive member 644 may be coupled to the lower end of the lifting plate 642. The drive member 644 causes the lifting plate 642 to rise and fall. That is, the drive member 644 causes the lifting plate 642 to move along a third direction Z. According to one embodiment, the drive member 644 may be a cylinder motor with a multi-stage structure. However, the invention is not limited thereto, and the drive member 644 may be modified into various devices capable of transmitting driving force to the lifting plate 642.

[0108] Figures 7 to 11 The diagrams are shown in sequence. Figure 3 A diagram illustrating the state of the exchange container in the conveying device of an embodiment. In the following text, reference will be made to... Figures 7 to 11 A detailed description of the transmission method according to an embodiment of the present invention is provided.

[0109] Reference Figure 7 The first carrier 400 can move the transport container 12 to the lifting space 601. Specifically, a slider 460 disposed in the first carrier 400 slides toward the frame 620 (e.g., in the second direction Y) to move the container 12 to the lifting space 601. The slider 460 moves to a first position where the container 12 can be transported to the lifting plate 642.

[0110] like Figure 8 As shown, the drive member 644 lifts the lifting plate 642 to a first position. For example, when the lifting plate 642 is below the first position, the drive member 644 moves the lifting plate 642 upward (e.g., in the third direction Z) to the first position. When both the lifting plate 642 and the slider 460 are in the first position, the holding part 480 holds the container 12 and transfers it to the lifting plate 642. The lifting plate 642 receives the container 12. Therefore, the container 12 sits on and is supported on the upper surface of the lifting plate 642.

[0111] like Figure 9 As shown, the drive member 644 lowers the lifting plate 642 downwards, thereby moving the lifting plate 642 to a second position. When the lifting plate 642 is in the second position, the drive member 644 stops moving the lifting plate 642.

[0112] Reference Figure 10 When the lifting plate 642 supporting the container 12 is in the second position, the slider 560 provided in the second carrier 500 moves to a second position where it can receive the container 12 supported by the lifting plate 642. For example, the slider 560 slides toward the frame 620 (e.g., in the second direction Y). When the slider 560 is in the second position, the retaining part 580 holds the flange 14 formed above the container 12 supported by the lifting plate 642. Therefore, the container 12 is transferred from the lifting plate 642 to the second carrier 500.

[0113] Reference Figure 11 The slider 560 moves the received container 12 into the storage frame 540. While the container 12 is within the storage frame 540 of the second vehicle 500, the second vehicle 500 can travel along the second track 300.

[0114] According to the above-described embodiments of the present invention, containers 12 can be efficiently exchanged between vehicles 400 and 500 traveling on tracks 200 and 300 arranged at different heights. In other words, containers 12 can be exchanged more efficiently between vehicles 400 and 500 traveling at different speeds via the transfer unit 600.

[0115] Furthermore, in order to exchange containers 12 between vehicles 400 and 500 traveling at different speeds on different tracks 200 and 300, it is not necessary to provide separate tracks (e.g., ramp tracks) connecting the different tracks 200 and 300. Therefore, the structural complexity within the semiconductor production line space can be minimized.

[0116] In the above embodiments, the mechanism by which the lifting plate 642 moves the container 12 from the first position to the second position is described exemplary, but it is not limited thereto. For example, even when the second carrier 500 transfers the container 12 to the first carrier 400, the transfer can be performed by the same or similar mechanism as the example described above.

[0117] For example, the second carrier 500 can move the transfer container 12 to the lifting space 601. For example, the slider 560 provided on the second carrier 500 moves to a second position where the container 12 can be transferred to the lifting plate 642. The drive member 644 positions the lifting plate 642 at the second position, and the lifting plate 642 receives the container 12 from the slider 560. The lifting plate 642 is raised from the second position to a first position, and the sliding driver 662 slides the support plate 664 from a standby position to a supported position. While the support plate 664 supports the container 12, the slider 460 provided on the first carrier 400 moves to the first position and receives the container 12. The slider 460 moves the container 12 into the storage frame 440 of the first carrier 400.

[0118] In the following, a transmission unit according to another embodiment of the present invention will be described. The transmission unit according to an embodiment of the present invention described below has a substantially the same or similar construction as the transmission unit according to an embodiment of the present invention described above, except for the construction that will be further described.

[0119] Figure 12 The diagram is based on Figure 3 A front view of the transmission unit in another embodiment. Figure 13 It is based on Figure 12A perspective view of the transmission unit of another embodiment. Figure 14 It is a schematic diagram in Figure 12 A top view of the conveyor unit when the support plate is in the support position. Figure 15 It is a schematic diagram in Figure 12 A top view of the conveyor unit when the support plate is in the standby position.

[0120] Reference Figure 12 and Figure 13 The conveying unit 600 may include a frame 620, a lifting member 640, and a support member 660. The description of the aforementioned frame 620 and lifting member 640 will be omitted.

[0121] A support member 660 may be mounted on the frame 620. The support member 660 may support the container 12 within the lifting space 601. Additionally, the support member 660 may transport the container 12 within the lifting space 601. For example, the support member 660 may transport the first carrier 400 and the container 12. Furthermore, the support member 660 may transport the lifting member 640 and the container 12.

[0122] The support member 660 may include a support plate 664 and a sliding actuator 662.

[0123] A sliding actuator 662 is disposed on the frame 620. According to one embodiment, the sliding actuator 662 may be disposed on the sidewall frame 626. The sliding actuator 662 slides on a support plate 664, which will be described below. A slit may be formed in the sliding actuator 662 as a space for the support plate 664 to slide. For example, the sliding actuator 662 may be a motor. However, the invention is not limited thereto, and the sliding actuator 662 may be modified to be any of the various known devices capable of sliding the support plate 664.

[0124] In the following text, reference will be made to Figures 12 to 15 A support plate according to an embodiment of the present invention is described.

[0125] Support plate 664 can be positioned in a first position. Support plate 664 supports container 12 in the first position. For example, support plate 664 can be positioned when lifting plate 642 is in the first position to transfer slider 460 and container 12 (see...). Figure 8 The upper surface of the support plate 664 is located at a position corresponding to the position of the lifting plate 642. That is, when the lifting plate 642 is in the first position, the upper surface of the support plate 664 can be located at a height corresponding to the upper surface of the lifting plate 642.

[0126] Furthermore, the support plate 664 can slide between a supported position and a standby position. Specifically, the support plate 664 can slide between the supported position and the standby position through a slit formed in the sliding actuator 662.

[0127] The support position can be defined as the position where the support plate 664 can support the container 12 within the lifting space 601. For example... Figure 14 As shown, when the support plate 664 slides to be positioned in the support position, a portion of the support plate 664 may overlap with a portion of the container 12 that sits on and is supported on the lifting plate 642. Alternatively, when the support plate 664 is in the support position, it may not overlap with the lifting plate 642. That is, when the support plate 664 is in the support position, it may not obstruct the lifting plate 642 from moving up and down within the lifting space 601.

[0128] The standby position can be defined as the position where the support plate 664 does not support the container 12 within the lifting space 601. Furthermore, the standby position can be defined as the position where the support plate 664 does not obstruct the lifting of the container 12 within the lifting space 601. For example, as... Figure 15 As shown, when the support plate 664 slides to the standby position, the entire area of ​​the support plate 664 does not overlap with the container 12 located in the lifting space 601. That is, when the support plate 664 is in the standby position, the support plate 664 will not hinder the container 12 from moving up and down within the lifting space 601.

[0129] Alternatively, the support plate 664 can also be a plate that is basically quadrilateral when viewed from above. This is just an example; the support plate 664 can have various shapes. Furthermore, when the support plate 664 is in the supporting position, it can have a shape that does not overlap with the lifting plate 642.

[0130] Figures 16 to 18 It is shown in the diagram in sequence according to Figure 12 A diagram illustrating the state of the conveying container in the lifting space of the conveying unit in an embodiment. In the following text, reference will be made to... Figures 16 to 18 The mechanism for conveying containers in the lifting space of a conveying unit according to an embodiment of the present invention is described in detail.

[0131] like Figure 16 As shown, the lifting member 640 can receive the container 12 in a second position. For example, the lifting plate 642 can receive the container 12 from the second carrier 500 in the second position (see...). Figure 12 The lifting plate 642 can raise the container 12 to the first position. When the lifting plate 642 raises the container 12, the support plate 664 is in the standby position. Therefore, both the lifting plate 642 and the container 12 supported by the lifting plate 642 can be raised from the second position to the first position without being obstructed by the support plate 664.

[0132] like Figure 17As shown, when the lifting member 640 moves to the first position, the sliding driver 662 slides the support plate 664 from the standby position to the support position. The support plate 664, located in the support position, can sit on the lifting plate 642 to support the lower surface of the supported container 12.

[0133] like Figure 18 As shown, after the support plate 664 is in the support position to support the container 12, the lifting plate 642 can descend from the first position to the second position. In this case, since the container 12 is supported by the support plate 664, only the lifting plate 642 can descend to the second position. The container 12 supported by the support plate 664 is then transferred to the first carrier 400 (see...). Figure 12 Simultaneously, the lifting platform 642, which descends to the second position, can receive the load from the second vehicle 500 (see...). Figure 12 ) container 12.

[0134] According to the above embodiments of the present invention, the container 12 can be effectively transferred from the second carrier 500 (see...). Figure 12 Teleport to the first vehicle 400 (see Figure 12 In other words, by transferring the container 12 via the transfer unit 600, instead of transferring the container 12 directly between the lifting platform 642 and the first vehicle 400, the time spent transferring the container 12 between the lifting platform 642 and the first vehicle 400 is saved more efficiently. Therefore, the lifting platform 642 can transfer the container 12, which is subsequently transferred by the second vehicle 500, to the subsequent first vehicle 400 more quickly.

[0135] In the following description, a transmission device according to another embodiment of the present invention will be described. Since the transmission device described below is substantially the same as or similar to the transmission device according to the above embodiment, descriptions of repeated content will be omitted. Furthermore, the same reference numerals as those used for repeated constructions are designated for the transmission device according to the above embodiment, and different reference numerals are designated for non-repeating constructions.

[0136] Figure 19 The diagram is based on Figure 12 A front view of the transmission unit in another embodiment.

[0137] Reference Figure 19 According to an embodiment of the present invention, the conveying unit 700 may include a frame 620, a lifting member 740, and a support member 660.

[0138] The frame 620 and support member 660 according to embodiments of the present invention are configured to be substantially the same as or similar to the frame 620 described above.

[0139] However, in the main view, the lower wall 624 of the frame 620 according to an embodiment of the present invention is preferably located at a height corresponding to the container 12 conveyed by the second carrier 500. However, the invention is not limited thereto, and as... Figure 19 As shown, it is sufficient as long as the lower wall 624 of the frame 620 is positioned below the container 12 transported by the second vehicle 500.

[0140] The lifting component 740 lifts and lowers the container 12 within the lifting space 601. The lifting component 740 moves the container 12 vertically within the lifting space 601. The lifting component 740 lifts and lowers the container 12 between a first position and a second position within the lifting space 601.

[0141] The first position is defined as the position where the first carrier 400 traveling on the first track 200 and the lifting plate 740 transfer the container 12 via the support plate 664. For example, the support plate 664 may be located at a support position when the slider 460 of the first carrier 400 slides to move the container 12 into the lifting space 601. When the support plate 664 supports the container 12 at the support position, the clamping member 742, which will be described below, may be located at a first position for clamping the flange 14 formed on the upper part of the container 12.

[0142] The second position is defined as the position where the second carrier 500 traveling on the second track 300 and the lifting member 740 transport the container 12. For example, the second position can be defined as the position where the clamping member 742 positions the container 12 on the lower wall 624 of the frame 620. When the clamping member 742 positions the container 12 on the lower wall 624, the slider 560 of the second carrier 500 can move to the second position to receive the container 12.

[0143] The lifting member 740 may include a clamping member 742 and a driving member 744.

[0144] The clamping member 742 is located within the lifting space 601. The clamping member 742 is moved up and down within the lifting space 601 by the drive member 744 described below. The clamping member 742 can move up and down between a first position and a second position. The clamping member 742 can clamp the flange 14 formed on the upper part of the container 12 located in the lifting space 601.

[0145] The drive member 744 can lift and lower the clamping member 742. The drive member 744 can lift and lower the clamping member 742 between a first position and a second position. The drive member 744 can be disposed on the frame 620. For example, the drive member 744 can be disposed on the upper wall 622 of the frame 620. According to one embodiment, the drive member 744 can be a lifting device composed of a wire and a motor. For example, when the wire is wound on the motor and the motor rotates forward, the clamping member 742 moves downward, and when the motor rotates in reverse, the clamping member 742 can move upward. However, this is only an illustration intended for ease of understanding.

[0146] According to one embodiment of the present invention, a slider 460 disposed on a first carrier 400 can move a transport container 12 to a lifting space 601. For example, the slider 460 can move the container 12 to a first position. During or before the slider 460 moves the container 12 to the first position, a sliding actuator 662 slides a support plate 664 to a supporting position. When the slider 460 is in the first position and the support plate 664 is in the supporting position, the slider 460 transports the container 12 to the support plate 664. The support plate 664 supports the lower surface of the container 12. When the container 12 is seated on the support plate 664, the slider 460 moves out of the lifting space 601 again.

[0147] Subsequently, the drive member 744 raises the clamping member 742 to a first position, and the clamping member 742 clamps the flange 14 formed on the upper part of the container 12 on the support plate 664 located in the first position. While the clamping member 742 clamps the flange 14, the support plate 664 slides from the supported position to the standby position. While the support plate 664 is in the standby position, the drive member 744 lowers the clamping member 742 from the first position to a second position. While the clamping member 742 is in the second position, the clamping member 742 releases the container 12, and the container 12 rests on the lower wall 624 of the frame 620. The slider 560 provided in the second carrier 500 moves to the second position to receive the container 12. This mechanism is performed in the same or similar manner even when the container 12 is transferred from the second carrier 500 to the first carrier 400.

[0148] In the above embodiments of the invention, the support member 660 is described as being disposed at a first position, but this is not a limitation. For example, the support member 660 may be disposed at a first position and / or a second position. Furthermore, unlike the above example, the lifting plate 642 or the clamping member 742 may be raised and lowered within the lifting space 601 by means of a belt-driven drive member with pulleys.

[0149] Figure 20 The diagram is based on Figure 12 A front view of the transmission unit in another embodiment.

[0150] Reference Figure 20 The transmission unit may include a first transmission unit 600 and a second transmission unit 700.

[0151] The first conveying unit 600 according to an embodiment of the present invention may include a frame 620, a first lifting member 640, and a support member 660. The first conveying unit 600 according to an embodiment of the present invention is compared with a reference... Figures 12 to 18 The described conveying unit 600 is the same as or similar to the one described above. Specifically, the first lifting member 640 according to an embodiment of the present invention has the same characteristics as the referenced unit. Figures 12 to 18 The lifting component 640 described has the same or similar construction.

[0152] The second conveying unit 700 according to an embodiment of the present invention may include a frame 620, a second lifting member 740, and a support member 660. The second conveying unit 700 according to an embodiment of the present invention is related to a reference... Figure 19 The described conveying unit 700 is the same as or similar to that described above. In particular, the second lifting member 740 is the same as or similar to the lifting member 740 according to an embodiment of the present invention.

[0153] The first transmission unit 600 is located on one side of the first track 200. For example, as Figure 20 As shown, in the main view, the first transmission unit 600 can be located to the right of the first track 200. Additionally, the second transmission unit 700 can be positioned relative to the first track 200 and the first transmission unit 600. For example, as... Figure 20 As shown, in the main view, the second transmission unit 700 can be located to the left of the first track 200. The side of the frame 620 of the first transmission unit 700 facing the first track 200 is open. Similarly, the side of the frame 620 of the second transmission unit 700 facing the first track 200 is also open.

[0154] Both the first conveying unit 600 and the second conveying unit 700 can move the container 12 up and down within the lifting space 601. For example, both the first conveying unit 600 and the second conveying unit 700 can move the container 12 between a first position and a second position. Optionally, the first conveying unit 600 can lift the container 12 from the second position to the first position, and the second conveying unit 700 can lower the container 12 from the first position to the second position. That is, the first conveying unit 600 can only convey the container 12 from the second carrier 500 to the first carrier 400. Similarly, the second conveying unit 700 can only convey the container 12 from the first carrier 400 to the second carrier 500. Alternatively, the first conveying unit 600 can only convey the container 12 from the second carrier 500 to the first carrier 400, and the second conveying unit 700 can only convey the container 12 from the first carrier 400 to the second carrier 500. Both conveying units 600 and 700 convey the container 12 in only one direction, thus conveying the container 12 more efficiently.

[0155] Furthermore, multiple first conveying units 600 may be arranged longitudinally along the first track 200 and the second track 300. Additionally, multiple second conveying units 700 may be arranged longitudinally along the first track 200 and the second track 300.

[0156] The above example illustrates the application of the conveyor device 20 to semiconductor production line 1, but is not limited thereto. For example, the conveyor device 20 can be applied in the same or similar manner as various production lines that require the conveying of items.

[0157] The foregoing detailed descriptions illustrate the present invention. Furthermore, while embodiments of the invention have been shown and described above, the invention can be used in a variety of other combinations, variations, and environments. That is, variations or modifications can be made to the above content within the scope of the inventive concept disclosed in this specification, the scope of equivalents to this disclosure, and / or the scope of technology or knowledge in the art. The above embodiments describe the optimal state for realizing the technical spirit of the invention, and various changes can be made as needed in the specific application areas and uses of the invention. Therefore, the above detailed descriptions of the invention are not intended to limit the invention to the disclosed embodiments. Furthermore, the appended claims should also be interpreted to include other embodiments.

Claims

1. A conveying device for conveying a container containing articles, the conveying device comprising: First track; The second track is located below the first track; and A conveying unit, located on one side of the first and second tracks, is used to convey the container between a first vehicle traveling on the first track and a second vehicle traveling on the second track. The transmission unit includes: The frame has internal lifting space; A lifting component for lifting the container within the lifting space between a first position for transporting the first carrier and the container and a second position for transporting the second carrier and the container; and A support member including a support plate for receiving and supporting the container in the lifting space during the transfer of the container between the first carrier and the lifting member. The supporting member is disposed on the frame and slides between a supporting position that can support the container in the lifting space and a standby position that does not hinder the container from lifting in the lifting space.

2. The conveying device as claimed in claim 1, wherein The transmission device is arranged above multiple semiconductor devices. A semiconductor production line in which the plurality of semiconductor devices are continuously arranged consists of at least one layer, and The first track, the second track, and the conveying unit are arranged on the same layer of the semiconductor production line.

3. The conveying device as claimed in claim 2, wherein The second vehicle travels on the second track at a lower speed than the first vehicle to transport the semiconductor device and the container.

4. The conveying device as claimed in claim 2, wherein... The first track and the frame are fixed to the ceiling of the semiconductor production line, and The second track is fixed via the first track.

5. The conveying device according to any one of claims 1 to 3, wherein the conveying unit comprises: The first transmission unit is located on one side of the first track; and The second transmission unit is located on the opposite side of the first track, with reference to the first track.

6. The conveying device as claimed in claim 5, wherein The first transmission unit includes a first frame and a first lifting component. The first lifting component includes: A lifting plate, which is used to support the lower surface of the container; and A first driving component is disposed on the lower wall of the first frame and is used to move the lifting plate in a vertical direction. The second conveying unit includes a second frame and a second lifting component. The second lifting component includes: A retaining component for clamping a flange formed on the upper part of the container; and The second driving member is disposed on the upper wall of the second frame and is used to move the clamping member in the vertical direction.

7. The conveying device according to any one of claims 1 to 3, wherein The first vehicle travels only on the first track of the first track and the second track, and the second vehicle travels only on the second track of the first track and the second track.

8. The conveying device as claimed in claim 1, wherein The support member is positioned at the first location.

9. The conveying device as claimed in claim 1, wherein When the lifting component moves up and down in the lifting space, the supporting component does not obstruct the lifting component.

10. The conveying device as claimed in claim 9, wherein Each of the first and second vehicles includes a slider for laterally changing the position of the container relative to the direction of travel. The sides of the frame facing the first and second tracks are open, and The slider moves the container into the lifting space via its open side.

11. The conveying device as claimed in claim 10, further comprising: A controller configured to control the support member, the slider, and the lifting member such that: When moving the container from the first carrier to the lifting space, after sliding the support member to the support position, the container is placed on the support member by moving the slider to the lifting space, and after the container is placed on the support member, the lifting member is raised to the first position so that the lifting member supports the container, and after the lifting member supports the container, the support member is slid to the standby position.

12. The conveying device as claimed in claim 10, further comprising: A controller configured to control the support member, the slider, and the lifting member such that: When moving the container from the lifting space to the first carrier, the lifting member slides the support member to the standby position before lifting the container to the first position, and when the support member moves to the standby position, the lifting member lifts the container to the first position, and when the lifting member is at the first position, the lifting member slides the support member to the support position.

13. A conveying method using a conveying device according to any one of claims 1 to 12, said conveying device conveying a container containing articles along a first track in the same layer of a semiconductor production line in which semiconductor devices are continuously arranged and a second track arranged at a different height from the first track, said conveying method comprising: In a lifting space within a frame located on one side relative to the longitudinal direction of the first and second tracks, the containers are exchanged between a first vehicle traveling on the first track and a second vehicle traveling on the second track; as well as The container is raised and lowered between a first position for transporting the first carrier and the container and a second position for transporting the second carrier and the container by means of a lifting component disposed in the lifting space.

14. The transmission method as described in claim 13, wherein The support member positioned at the first location transports the first carrier, the lifting member, and the container. in, The support member slides between a support position that can support the container in the lifting space and a standby position that does not obstruct the container from moving up and down in the lifting space.

15. The transmission method as described in claim 14, further comprising: When moving the container from the first carrier to the lifting space, after sliding the support member to the support position, the container supported by the first carrier is moved onto the support member.

16. The transmission method as described in claim 15, wherein The lifting member raises the support member to the first position, thereby supporting the container located on the support member, and after supporting the container, the lifting member slides the support member to the standby position.

17. The transmission method as described in claim 14, wherein When the container is moved from the lifting space to the first vehicle, the lifting member slides the support member to the standby position before lifting the container to the first position. When the support member moves to the standby position, the lifting member lifts the container to the first position. When the lifting member is in the first position, the lifting member slides the support member to the support position, and the first vehicle transports the container sitting on the support member to outside the lifting space.

18. A conveying device for conveying a container holding articles in the same layer of a semiconductor production line in which semiconductor devices are continuously arranged, the conveying device comprising: A first vehicle, which travels on a first track to transport the container; A second vehicle is used to travel on a second track located below the first track to transport the container; and Multiple transfer units, located on one side of the first and second tracks, are used to transfer the containers between the first and second vehicles. The first vehicle includes a first slider for laterally changing the position of the container being transported by the first vehicle relative to the direction of travel of the first vehicle. The second vehicle includes a second slider for laterally changing the position of the container being transported by the second vehicle relative to the direction of travel of the second vehicle. The transmission unit includes: The frame has internal lifting space; A lifting component for lifting the container between a first position for transporting the first carrier and the container and a second position for transporting the second carrier and the container; and A support member including a support plate for receiving and supporting the container in the lifting space during the transfer of the container between the first carrier and the lifting member. The supporting member is disposed on the frame and slides between a supporting position that can support the container in the lifting space and a standby position that does not hinder the container from lifting in the lifting space.

Images