Gripper device

Abstract

The present application discloses a clamping device, which comprises a carrier, a driving module mounted on the carrier, a transmission module arranged on the carrier, a pair of clamping jaws and a blocking rod. The transmission module comprises a transmission shaft connected to the driving module, a clamping jaw cam fixed on the transmission shaft, a displacement mechanism slidably arranged on the carrier, and a displacement cam fixed on the transmission shaft and linked to the displacement mechanism. The pair of clamping jaws are arranged facing each other and movably mounted on the carrier, and the blocking rod is mounted on the displacement mechanism. When the transmission shaft is driven by the driving module to rotate, the clamping jaw cam can drive the pair of clamping jaws to move, and the displacement cam can drive the displacement mechanism to move and synchronously move the blocking rod. Accordingly, the clamping device can complete the coordination of multiple action sequences and avoid collision between multiple components during operation.

Description

Technical Field

[0001] The present application relates to a clamping device, and in particular to a clamping device configured with a single driving module. Background Art

[0002] The existing clamping device is provided with multiple motion modules, so it needs to be driven by multiple driving modules respectively, which increases its production cost. Furthermore, when the multiple driving modules of the existing clamping device are not well matched in their action timing, the multiple motion modules are prone to collide with each other, which is a serious consequence. Summary of the invention

[0003] Therefore, the applicant has devoted himself to research and applied scientific principles to propose an invention that is reasonably designed and can effectively improve the above-mentioned defects.

[0004] The present application aims to provide a clamping device, which can effectively improve the defects that may occur in the existing clamping device.

[0005] The present application discloses a clamping device, which comprises: a carrier; a driving module, mounted on the carrier; a transmission module, arranged on the carrier and comprising: a transmission shaft, connected to the driving module and having a first direction defined in its length direction; a clamping cam, mounted and fixed on the transmission shaft; a displacement mechanism, slidably arranged on the carrier along the first direction; and a displacement cam, mounted and fixed on the transmission shaft and linked to the displacement mechanism; and a working module, linked to the transmission module and comprising: a pair of clamping jaws, arranged facing each other along a second direction perpendicular to the first direction and movably mounted on the carrier; and a blocking rod, mounted on the displacement mechanism; wherein, when the transmission shaft is driven by the driving module to rotate, the clamping cam can drive the pair of clamping jaws to move along the second direction, and the displacement cam can drive the displacement mechanism to move along the first direction and synchronously move the blocking rod.

[0006] Optionally, when the transmission shaft is driven by the driving module to rotate, the movement of the pair of clamping jaws and the movement of the blocking rod can be driven by the transmission module at different time points respectively.

[0007] Optionally, the transmission module further includes a rotating cam installed and fixed on the transmission shaft; wherein, when the transmission shaft is driven by the driving module to rotate, the rotating cam can drive the barrier rod to rotate with the first direction as the rotation axis, and the movement of a pair of jaws, the movement of the barrier rod, and the rotation of the barrier rod can be driven by the transmission module at different time points respectively.

[0008] Optionally, when the transmission shaft is driven by the driving module to rotate within a first angle range starting from its initial position, the jaw cam can drive a pair of jaws to move between an open position and a closed position; when the transmission shaft is driven by the driving module to rotate within a second angle range starting from the initial position, the displacement cam can drive the displacement mechanism to move in a first direction and synchronously move the barrier rod within a first distance range; wherein the second angle range falls after the first angle range, and the overlapping angle between the second angle range and the first angle range is no more than 30 degrees.

[0009] Optionally, the transmission module further includes a rotating cam mounted and fixed on the transmission shaft; wherein, when the transmission shaft is driven by the driving module to rotate, the rotating cam can drive the blocking rod to rotate with the first direction as the rotation axis.

[0010] Optionally, when the transmission shaft is driven by the driving module to rotate within a third angle range starting from the initial position, the rotating cam can drive the barrier rod to rotate with the first direction as the rotation axis; wherein the third angle range falls after the second angle range and the overlapping angle between the third angle range and the second angle range is no more than 30 degrees.

[0011] Optionally, when the transmission shaft is driven by the driving module to rotate within a fourth angle range starting from the initial position, the displacement cam can drive the displacement mechanism to move in the first direction and synchronously move the barrier rod within a second distance range; wherein the fourth angle range falls after the third angle range and does not overlap with the third angle range.

[0012] Optionally, the second distance range is smaller than the first distance range and does not exceed 50% of the first distance range.

[0013] Optionally, when the transmission shaft is driven by the driving module to rotate from an initial position to an end position, the rotation angle of the transmission shaft spans a first angle range, a second angle range, a third angle range, and a fourth angle range, and the movement direction of the barrier rod in the second angle range is opposite to its movement direction in the fourth angle range.

[0014] Optionally, when the transmission shaft is driven by the driving module to rotate from the initial position to the end position, the rotation angle of the transmission shaft exceeds 360 degrees.

[0015] Optionally, when the transmission shaft is driven by the driving module to rotate, the jaw cam can drive a pair of jaws to move between an open position and a closed position; wherein the working module includes: an opening sensor, which is installed on the carrier and whose position corresponds to the pair of jaws in the open position; and a closing sensor, which is installed on the carrier and whose position corresponds to the pair of jaws in the closed position.

[0016] Optionally, the working module includes a displacement sensor mounted on the carrier, the position of which corresponds to the displacement mechanism.

[0017] The embodiment of the present application also discloses a clamping device, which includes: a carrier; a driving module, mounted on the carrier; a transmission module, configured on the carrier and including: a transmission shaft, connected to the driving module and having a first direction defined in its length direction; a clamping cam, mounted and fixed on the transmission shaft; and a rotating cam, mounted and fixed on the transmission shaft; and a working module, linked to the transmission module and including: two clamping jaws, arranged toward each other along a second direction perpendicular to the first direction and movably mounted on the carrier; and a blocking rod, linked to the rotating cam; wherein, when the transmission shaft is driven by the driving module to rotate, the clamping jaw cam can drive a pair of clamping jaws to move along the second direction, and the rotating cam can drive the blocking rod to rotate with the first direction as the rotation axis.

[0018] Optionally, when the transmission shaft is driven by the driving module to rotate, the movement of the pair of clamping jaws and the rotation of the blocking rod can be driven by the transmission module at different time points respectively.

[0019] Optionally, when the transmission shaft is driven by the driving module to rotate within a first angle range starting from its initial position, the jaw cam can drive a pair of jaws to move between an open position and a closed position; when the transmission shaft is driven by the driving module to rotate within a third angle range starting from the initial position, the rotating cam can drive the barrier rod to rotate with the first direction as the rotation axis; wherein the third angle range falls after the first angle range and does not overlap with the first angle range.

[0020] In summary, the clamping device disclosed in the present application can complete the coordination of various action sequences (such as the movement of a pair of the clamping jaws coordinated with the movement of the baffle rod and / or the rotation of the baffle rod) by configuring a single driving source (such as the driving module) and a matching mechanism design (such as the transmission module), thereby effectively reducing the production cost of the clamping device and avoiding collision of multiple components during operation.

[0021] To further understand the features and technical contents of the present application, please refer to the following detailed description and drawings of the present application. However, such description and drawings are only used to illustrate the present application and are not intended to limit the scope of protection of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional schematic diagram of the clamping device according to an embodiment of the present application.

[0023] Figure 2 This is a schematic top view of the clamping device of an embodiment of the present application when the transmission shaft is in an initial position.

[0024] Figure 3 for Figure 2 A partial schematic diagram of .

[0025] Figure 4 for Figure 2 A partial side view schematic diagram of .

[0026] Figure 5 It is a schematic top view of the clamping device of the embodiment of the present application after the transmission shaft rotates within the first angle range.

[0027] Figure 6 for Figure 5 A partial side view schematic diagram of .

[0028] Figure 7 It is a schematic top view of the clamping device of the embodiment of the present application after the transmission shaft rotates within the second angle range.

[0029] Figure 8 It is a schematic top view of the clamping device of the embodiment of the present application after the transmission shaft rotates within a third angle range.

[0030] Fig. 9 for Figure 8 A partial side view schematic diagram of .

[0031] Fig.10 It is a schematic top view of the clamping device of the embodiment of the present application after the transmission shaft rotates within the fourth angle range.

[0032] Fig.11 It is an actuation curve diagram of the working module of the clamping device of the embodiment of the present application during operation. DETAILED DESCRIPTION

[0033] The following is an explanation of the implementation of the "gripper device" disclosed in this application through specific embodiments. Those skilled in the art can understand the advantages and effects of this application from the contents disclosed in this specification. This application can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this application. In addition, the drawings of this application are only simple schematic illustrations and are not depicted according to actual dimensions. It is stated in advance. The following implementation methods will further explain the relevant technical contents of this application in detail, but the disclosed contents are not intended to limit the scope of protection of this application.

[0034] It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[0035] See also Figures 1 to 11 As shown, it is an embodiment of the present application. This embodiment discloses a gripper device 100, which can be used in an overhead hoist transfer (OHT) system to transport various wafer boxes; for example: a front opening unified pod (FOUP) or a front opening shipping box (FOSB), but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the gripper device 100 can also be used to transport other objects besides wafer boxes.

[0036] like Figures 1 to 4 As shown, the clamping device 100 includes a carrier 1, a driving module 2 installed on the carrier 1, a transmission module 3 disposed on the carrier 1, and a working module 4 linked to the transmission module 3. Further, the clamping device 100 in this embodiment is a single driving module 2 with the transmission module 3 of pure mechanical design to drive multiple action sequences in the working module 4. The following will be described with one of the feasible structures of the clamping device 100, but the present application is not limited thereto.

[0037] In this embodiment, the carrier 1 is in a plate-like structure, and the driving module 2 includes a driving motor 21 mounted on the carrier 1, and a coupling 22 matched with the driving motor 21. In other words, the power source of the clamping device 100 in this embodiment is only the driving motor 21, so any clamping mechanism including multiple power sources is different from the clamping device 100 referred to in this embodiment.

[0038] The transmission module 3 in this embodiment includes a transmission shaft 31, a displacement mechanism 32 corresponding to the transmission shaft 31, and a plurality of cams fixed to the transmission shaft 31. The plurality of cams in this embodiment include a clamping cam 33, a displacement cam 34, and a rotating cam 35, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the transmission module 3 may omit the displacement cam 34 or the rotating cam 35 according to design requirements.

[0039] In more detail, the transmission shaft 31 is connected to the driving module 2 (e.g., the transmission shaft 31 is connected to the driving motor 21 through the coupling 22) and its length direction defines a first direction D1. For the convenience of describing this embodiment, the clamping device 100 further defines a second direction D2 perpendicular to the first direction D1, and a third direction D3 perpendicular to the first direction D1 and the second direction D2, and the third direction D3 is also perpendicular to the carrier 1 in this embodiment, but the present application is not limited thereto.

[0040] Specifically, the transmission shaft 31 includes a main body section 311 connected to the driving module 2, and a telescopic section 312 assembled to the main body section 311. The displacement mechanism 32 is slidably disposed on the carrier 1 along the first direction D1 (e.g., the displacement mechanism 32 is mounted on a longitudinal slide rail 11 on the carrier 1), and the telescopic section 312 is inserted into the displacement mechanism 32, so that the telescopic section 312 can not only rotate synchronously with the main body section 311, but also can move synchronously with the displacement mechanism 32 along the first direction D1.

[0041] The transmission shaft 31 passes through a plurality of the cams, and the clamping cam 33 is fixed to one end of the transmission shaft 31 and is adjacent to the driving module 2, the rotating cam 35 is fixed to the other end of the transmission shaft 31, and the displacement cam 34 is located between the clamping cam 33 and the rotating cam 35. In this embodiment, the clamping cam 33 and the displacement cam 34 are installed on the main body section 311, and the rotating cam 35 is installed on the telescopic section 312.

[0042] Furthermore, the displacement cam 34 is linked to the displacement mechanism 32, and the displacement cam 34 in this embodiment forms at least one maintaining track 341 and at least one displacement track 342 that are connected to each other, at least one of the maintaining tracks 341 is annular and located on a plane perpendicular to the first direction D1, and at least one of the displacement tracks 342 is roughly spiral and is wound around the outside of the transmission shaft 31, but the present application is not limited to this.

[0043] Furthermore, the displacement mechanism 32 is movably disposed between at least one of the maintaining rails 341 and at least one of the displacement rails 342 with a follower portion 321, so that the displacement mechanism 32 and the displacement cam 34 can be linked to each other. When at least one of the maintaining rails 341 forces the follower portion 321 to move therein, the relative position of the displacement mechanism 32 and the displacement cam 34 in the first direction D1 can remain unchanged. When at least one of the maintaining rails 341 forces the follower portion 321 to move therein, the displacement mechanism 32 can generate relative displacement relative to the displacement cam 34 in the first direction D1.

[0044] The working module 4 includes two clamping jaws 41 and a blocking rod 42. The two clamping jaws 41 can be regarded as a pair, and the pair of clamping jaws 41 are arranged facing each other along the second direction D2 and movably mounted on the carrier 1 (e.g., each clamping jaw 41 is mounted on a transverse slide rail 12 on the carrier 1).

[0045] Specifically, each of the clamping jaws 41 includes a claw portion 411 and a driven link 412 connected to the claw portion 411, and one end of each driven link 412 is movably disposed in a guide track 331 of the clamping jaw cam 33, so that the clamping jaw 41 and the clamping jaw cam 33 can be linked to each other. The guide track 331 is located on a plane perpendicular to the first direction D1 and is non-equidistantly arranged with respect to the transmission shaft 31, so that when any of the guide tracks 331 forces the corresponding driven link 412 to move therein, the corresponding claw portion 411 can be driven to generate displacement along the second direction D2.

[0046] Furthermore, the blocking rod 42 is installed (e.g., pivotally connected to be freely rotatable) on the displacement mechanism 32 and linked to the rotating cam 35. The blocking rod 42 includes a driven end 421 and a rod body 422 connected to the driven end 421 and perpendicular to the first direction D1, and the driven end 421 is pivotally connected to the displacement mechanism 32 along the first direction D1, so that the blocking rod 42 can move synchronously with the displacement mechanism 32.

[0047] Specifically, the driven end 421 is against a guide wheel rim 351 of the rotating cam 35 along the third direction D3, so that the blocking rod 42 and the rotating cam 35 can be linked to each other. When the guide wheel rim 351 forces the driven end 421 to rotate, the rod body 422 can rotate within a range of 90 degrees (e.g., the rod body 422 can rotate between two positions parallel to the second direction D2 and the third direction D3).

[0048] As described above, when the transmission shaft 31 is driven by the driving module 2 to rotate (or self-rotate), the clamping cam 33 can drive the pair of clamping jaws 41 to move along the second direction D2 (e.g., the clamping cam 33 can drive the pair of clamping jaws 41 to move along the second direction D2). Figures 2 to 4 The open position shown is similar to the Figure 5 and Figure 6 The displacement cam 34 can drive the displacement mechanism 32 to move along the first direction D1 and synchronously move the blocking rod 42, and the rotating cam 35 can drive the blocking rod 42 to rotate with the first direction D1 as the rotation axis.

[0049] Accordingly, the clamping device 100 in this embodiment can complete the coordination of various action sequences (such as: the movement of a pair of the clamping jaws 41 is coordinated with the movement of the baffle rod 42 and / or the rotation of the baffle rod 42) by configuring a single driving source (such as: the driving module 2) and a matching mechanism design (such as: the transmission module 3), thereby effectively reducing the production cost of the clamping device 100 and avoiding collision of multiple components during operation.

[0050] In addition, in order to ensure that the operation of the clamping jaws 41 and the blocking rod 42 can accurately reach the default position, the working module 4 in this embodiment further includes an opening sensor 43, a closing sensor 44, and a displacement sensor 45 installed on the carrier 1. The position of the opening sensor 43 corresponds to the pair of the clamping jaws 41 in the opening position, the position of the closing sensor 44 corresponds to the pair of the clamping jaws 41 in the closing position, and the position of the displacement sensor 45 corresponds to the displacement mechanism 32, so that the position of the pair of the clamping jaws 41 and the displacement mechanism 32 can be detected in real time, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the working module 4 can also omit at least one of the opening sensor 43, the closing sensor 44, and the displacement sensor 45 according to design requirements.

[0051] It should be additionally explained that in this embodiment, when the transmission shaft 31 is driven by the driving module 2 to rotate (or rotate), the movement of a pair of the clamping jaws 41, the movement of the baffle rod 42 and the rotation of the baffle rod 42 are preferably driven by the transmission module 3 at different time points respectively, but the present application is not limited to this.

[0052] For example, in other embodiments not shown in the present application, the baffle rod 42 may not have the function of rotating and its corresponding components, so that when the transmission shaft 31 is driven by the driving module 2 to rotate, the movement of the pair of jaws 41 and the movement of the baffle rod 42 can be driven by the transmission module 3 at different time points; or, the baffle rod 42 may not have the function of moving along the first direction D1 and its corresponding components, so that when the transmission shaft 31 is driven by the driving module 2 to rotate, the movement of the pair of jaws 41 and the rotation of the baffle rod 42 can be driven by the transmission module 3 at different time points.

[0053] In more detail, in order to more clearly illustrate how the movement of the pair of jaws 41, the movement of the baffle rod 42, and the rotation of the baffle rod 42 are driven by the transmission module 3 at different time points, this embodiment uses the rotation angle (or rotation angle) of the transmission shaft 31 as different time points to further illustrate the movement of the pair of jaws 41, the movement of the baffle rod 42, and the rotation of the baffle rod 42.

[0054] like Figures 2 to 6 ,and Fig.11 As shown, when the transmission shaft 31 is driven by the driving module 2 to rotate within a first angle range σ1 (e.g., 0 degrees to 120 degrees) starting from its initial position (e.g., 0 degrees), the clamping cam 33 can drive a pair of the clamping jaws 41 along the second direction D2 to the open position (e.g., Figures 2 to 4 ) and the closed position (such as: Figure 5 and Figure 6 )

[0055] Further speaking, Figure 5 and Fig.11 The curve A represents the moving distance of any one of the clamping jaws 41 along the second direction D2 (corresponding to Fig.11 ); it can be seen that after the transmission shaft 31 rotates within the first angular range σ1, any one of the clamping jaws 41 can be driven by the clamping jaw cam 33 to move approximately 20 millimeters (mm) along the second direction D2; however, when the transmission shaft 31 rotates within other angular ranges outside the first angular range σ1, any one of the clamping jaws 41 no longer moves along the second direction D2.

[0056] like Figure 5 , Figure 7 and Fig.11As shown, when the transmission shaft 31 is driven by the driving module 2 and rotates within a second angle range σ2 (e.g., 120 degrees to 280 degrees) starting from the initial position, the displacement cam 34 can drive the displacement mechanism 32 to move along the first direction D1 and synchronously move the blocking rod 42 within a first distance range.

[0057] In this embodiment, the second angle range σ2 falls after the first angle range σ1, and preferably does not overlap with the first angle range σ1, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the second angle range σ2 may fall after the first angle range σ1, and the overlap angle between the second angle range σ2 and the first angle range σ1 is not greater than 30 degrees.

[0058] Further speaking, Figure 7 and Fig.11 The curve B represents the moving distance of the blocking rod 42 along the first direction D1 (corresponding to Fig.11 ); it can be seen that after the transmission shaft 31 rotates within the second angular range σ2, the blocking rod 42 can be driven by the displacement cam 34 and the displacement mechanism 32 to move approximately 40 mm along the first direction D1; however, when the transmission shaft 31 rotates before the first angular range σ1 (such as: the first angular range σ1), the blocking rod 42 will not move along the first direction D1.

[0059] like Figures 7 to 9 and Fig.11 As shown, when the transmission shaft 31 is driven by the driving module 2 to rotate within a third angle range σ3 (e.g., 280 degrees to 370 degrees) from the initial position, the rotating cam 35 can drive the blocking rod 42 to rotate with the first direction D1 as the rotation axis. The rotation angle of the blocking rod 42 is described as an angle equal to the third angle range σ3, but the present application is not limited thereto.

[0060] In this embodiment, the third angle range σ3 falls after the second angle range σ2, and preferably does not overlap with the second angle range σ2, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the third angle range σ3 may fall after the second angle range σ2, and the overlapping angle between the third angle range σ3 and the second angle range σ2 is not greater than 30 degrees.

[0061] Further speaking, Figure 8 and Fig.11 Among them, curve C represents the rotation angle of the blocking rod 42 (corresponding to Fig.11); it can be seen that after the transmission shaft 31 rotates within the third angular range σ3, the baffle rod 42 can be rotated approximately 90 degrees by the push of the rotating cam 35; when the transmission shaft 31 rotates within other angular ranges outside the first angular range σ1, the baffle rod 42 will not rotate.

[0062] Accordingly, when the transmission shaft 31 rotates from the initial position beyond the third angle range σ3, the pair of jaws 41 can be used to clamp the wafer box, and the blocking rod 42 moves along the first direction D1, and then rotates from a position parallel to the second direction D2 to a position parallel to the third direction D3, thereby blocking the opening side of the wafer box (not shown in the figure) to prevent any chip in the wafer box from slipping out from the opening side.

[0063] like Figures 9 to 11 As shown, when the transmission shaft 31 is driven by the driving module 2 and rotates within a fourth angle range σ4 (e.g., 370 degrees to 440 degrees) starting from the initial position, the displacement cam 34 can drive the displacement mechanism 32 to move along the first direction D1 and synchronously move the blocking rod 42 within a second distance range.

[0064] In this embodiment, the fourth angle range σ4 falls after the third angle range σ3 and does not overlap with the third angle range σ3, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the fourth angle range σ4 may fall after the third angle range σ3 and partially overlap with the third angle range σ3.

[0065] Further speaking, Fig.10 and Fig.11 Among them, after the transmission shaft 31 rotates within the fourth angle range σ4, the baffle rod 42 can be driven by the displacement cam 34 and the displacement mechanism 32 to move approximately 3 mm along the first direction D1; however, when the transmission shaft 31 rotates between the second angle range σ2 and the fourth angle range σ4, the baffle rod 42 will not move along the first direction D1.

[0066] The moving direction of the blocking rod 42 in the second angle range σ2 (e.g., the blocking rod 42 moves toward the side away from the driving module 2) is opposite to the moving direction of the blocking rod 42 in the fourth angle range σ4 (e.g., the blocking rod 42 moves toward the side close to the driving module 2). Accordingly, the blocking rod 42 can be close to (or against) the opening side of the wafer box to reduce the gap between the blocking rod 42 and the opening side, thereby more effectively preventing any chip in the wafer box from sliding out from the opening side.

[0067] It should be noted that the second distance range is smaller than the first distance range and may be no more than 50% (preferably 10% to 20%) of the first distance range; for example, the first distance range may be between 20 mm and 40 mm, and the second distance range may be between 2 mm and 5 mm, but the present application is not limited to the above.

[0068] From another perspective, Figures 2 to 11 As shown, when the transmission shaft 31 is driven by the driving module 2 to rotate from the initial position to an end position (e.g., 440 degrees), the rotation angle of the transmission shaft 31 sequentially spans the first angle range σ1, the second angle range σ2, the third angle range σ3, and the fourth angle range σ4, and the rotation angle of the transmission shaft 31 in this embodiment exceeds 360 degrees, but the present application is not limited to the above.

[0069] To put it another way, the clamping device 100 in this embodiment is explained by the positive rotation of the transmission shaft 31 in the order of the first angle range σ1, the second angle range σ2, the third angle range σ3 and the fourth angle range σ4. It can be understood that the transmission shaft 31 can rotate in the opposite direction (that is, the transmission shaft 31 rotates from 440 degrees to 0 degrees) to restore the clamping device 100 and its internal components to the initial position.

[0070] As described above, the clamping device 100 in this embodiment is described by driving the transmission shaft 31 to execute four different action sequences in four angle ranges, but the present application is not limited thereto. For example, in other embodiments not shown in the present application, the transmission shaft 31 can be matched with at least one of the second angle range σ2, the third angle range σ3, and the fourth angle range σ4 through the first angle range σ1 according to design requirements, and then driven to execute corresponding action sequences respectively.

[0071] To sum up the technical effects of the embodiments of the present application, the clamping device disclosed in the embodiments of the present application can complete the coordination of various action sequences (such as the movement of a pair of the clamping jaws coordinated with the movement of the baffle rod and / or the rotation of the baffle rod) by configuring a single driving source (such as the driving module) and a matching mechanism design (such as the transmission module), thereby effectively reducing the production cost of the clamping device and avoiding collision of multiple components during operation.

[0072] Furthermore, the clamping device disclosed in the embodiment of the present application can also assist the operation of the pair of clamps by moving and / or rotating the blocking rod; for example: when the pair of clamps is used to clamp a wafer box, the blocking rod can move and rotate along the first direction to block the opening side of the wafer box, thereby effectively preventing any chip in the wafer box from slipping out of the opening side.

[0073] The contents disclosed above are only preferred feasible embodiments of the present application, and are not intended to limit the patent scope of the present application. Therefore, all equivalent technical changes made using the description and drawings of the present application are included in the patent scope of the present application.

Claims

1. A clamping device, characterized in that: The clamping jaw device comprises: a bearing member; a driving module, mounted on the carrier; A transmission module, disposed on the carrier and comprising: A transmission shaft connected to the driving module and having a first direction defined in its length direction; A clamping cam, mounted and fixed on the transmission shaft; a displacement mechanism slidably disposed on the supporting member along the first direction; and a displacement cam, fixedly mounted on the transmission shaft and linked to the displacement mechanism; and A working module is linked to the transmission module and includes: a pair of clamping jaws, disposed toward each other along a second direction perpendicular to the first direction and movably mounted on the supporting member; and A stopper rod mounted on the displacement mechanism; When the transmission shaft is driven by the driving module to rotate, the clamping cam can drive a pair of the clamping jaws to move along the second direction, and the displacement cam can drive the displacement mechanism to move along the first direction and synchronously move the blocking rod.

2. The clamping device according to claim 1, characterized in that: When the transmission shaft is driven by the driving module to rotate, the movement of the pair of clamping jaws and the movement of the blocking rod can be driven by the transmission module at different time points.

3. The clamping device according to claim 1, characterized in that: The transmission module further includes a rotating cam installed and fixed on the transmission shaft; wherein, when the transmission shaft is driven by the driving module to rotate, the rotating cam can drive the baffle rod to rotate with the first direction as the rotation axis, and the movement of a pair of the clamping jaws, the movement of the baffle rod and the rotation of the baffle rod can be driven by the transmission module at different time points respectively.

4. The clamping device according to claim 1, characterized in that: When the transmission shaft is driven by the driving module to rotate within a first angle range starting from its initial position, the clamping cam can drive a pair of the clamping jaws to move between an open position and a closed position; when the transmission shaft is driven by the driving module to rotate within a second angle range starting from the initial position, the displacement cam can drive the displacement mechanism to move along the first direction and synchronously move the blocking rod within a first distance range; wherein, the second angle range falls after the first angle range, and the overlapping angle between the second angle range and the first angle range is not greater than 30 degrees.

5. The clamping device according to claim 4, characterized in that The transmission module further includes a rotating cam fixedly mounted on the transmission shaft; wherein, when the transmission shaft is driven by the driving module to rotate, the rotating cam can drive the blocking rod to rotate with the first direction as the rotation axis.

6. The clamping device according to claim 5, characterized in that: When the transmission shaft is driven by the driving module to rotate within a third angle range starting from the initial position, the rotating cam can drive the barrier rod to rotate with the first direction as the rotation axis; wherein the third angle range falls after the second angle range, and the overlapping angle between the third angle range and the second angle range is no more than 30 degrees.

7. The clamping device according to claim 6, characterized in that When the transmission shaft is driven by the driving module to rotate within a fourth angle range starting from the initial position, the displacement cam can drive the displacement mechanism to move along the first direction and synchronously move the blocking rod within a second distance range; wherein, the fourth angle range falls after the third angle range and does not overlap with the third angle range.

8. The clamping device according to claim 7, characterized in that: The second distance range is smaller than the first distance range and does not exceed 50% of the first distance range.

9. The clamping device according to claim 7, characterized in that: When the transmission shaft is driven by the driving module to rotate from the initial position to an end position, the rotation angle of the transmission shaft spans the first angle range, the second angle range, the third angle range, and the fourth angle range, and the movement direction of the barrier rod in the second angle range is opposite to its movement direction in the fourth angle range.

10. The clamping jaw device according to claim 9, characterized in that When the transmission shaft is driven by the driving module to rotate from the initial position to the terminal position, the rotation angle of the transmission shaft exceeds 360 degrees.

11. The clamping jaw device according to claim 1, characterized in that: When the transmission shaft is driven by the driving module to rotate, the clamping cam can drive a pair of the clamping jaws to move between an open position and a closed position; wherein the working module includes: an opening sensor mounted on the carrier and having a position corresponding to the pair of clamping jaws in the opening position; and A closing sensor is mounted on the carrier and its position corresponds to the pair of clamping jaws being in the closed position.

12. The clamping jaw device according to claim 1, characterized in that: The working module includes a displacement sensor installed on the supporting member, and the position of the displacement sensor corresponds to the displacement mechanism.

13. A clamping device, characterized in that: The clamping jaw device comprises: a bearing member; a driving module, mounted on the carrier; A transmission module, disposed on the carrier and comprising: A transmission shaft connected to the driving module and having a first direction defined in its length direction; A clamping cam, mounted and fixed on the transmission shaft; and a rotating cam, mounted and fixed on the transmission shaft; and A working module is linked to the transmission module and includes: two clamping jaws, arranged toward each other along a second direction perpendicular to the first direction and movably mounted on the supporting member; and A stopper rod is connected to the rotating cam; When the transmission shaft is driven by the driving module to rotate, the clamping cam can drive a pair of the clamping jaws to move along the second direction, and the rotating cam can drive the blocking rod to rotate with the first direction as the rotation axis.

14. The clamping jaw device according to claim 13, characterized in that When the transmission shaft is driven by the driving module to rotate, the movement of the pair of clamping jaws and the rotation of the blocking rod can be driven by the transmission module at different time points.

15. The clamping jaw device according to claim 13, characterized in that: When the transmission shaft is driven by the driving module to rotate within a first angle range starting from its initial position, the clamping cam can drive a pair of the clamping jaws to move between an open position and a closed position; when the transmission shaft is driven by the driving module to rotate within a third angle range starting from the initial position, the rotating cam can drive the blocking rod to rotate with the first direction as the rotation axis; wherein the third angle range falls after the first angle range and does not overlap with the first angle range.

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