Position and height adjustment device, coating equipment and position and height adjustment method

Abstract

This application relates to the field of coating equipment technology, and in particular to a position height adjustment device, coating equipment, and position height adjustment method. The position height adjustment device includes: a fixed body; a main component disposed on the fixed body and capable of moving the fixed body; a detection mechanism connected to the main component; the detection mechanism having a detection calibration part; and a detection device that detects the position of the main component by detecting the position of the detection calibration part. The position height adjustment device provided by this application can adjust the position of the main component relative to the fixed body in the vertical direction with high adjustment accuracy, effectively improving the height consistency among multiple main components, thereby ensuring the stability during pallet transport and improving the coating quality of the workpiece to be coated on the pallet.

Description

Technical Field

[0001] This application relates to the field of coating equipment technology, and in particular to a position height adjustment device, coating equipment and position height adjustment method. Background Technology

[0002] Vacuum coating equipment consists of multiple vacuum chambers. The trays containing the workpieces to be coated enter from the inlet end of the production line and exit from the outlet end. The long-distance transport of the trays is achieved by the friction between the bottom surface of the trays and the drive rollers of the conveying device. Therefore, the conveying device is an important component of the vacuum coating equipment. The consistency of the horizontal height of the conveying devices of each vacuum chamber from the inlet end to the outlet end directly affects the operational stability and production efficiency of the entire coating production line. When the existing conveying devices are installed, there are cantilever arms inside, which can easily lead to inconsistent heights of multiple drive rollers, affecting the stability of the coating tray transport and also affecting the uniformity of the coated layer. Summary of the Invention

[0003] The purpose of this application is to provide a position height adjustment device, a coating equipment, and a position height adjustment method, so as to solve to a certain extent the technical problem in the prior art where the height position of the transmission components used for conveying pallets in vacuum coating equipment is not uniform, resulting in uneven coating layers.

[0004] This application provides a position height adjustment device, including: a fixed body;

[0005] A main component is disposed on the fixed body and is movable relative to the fixed body;

[0006] The testing mechanism is connected to the main component; the testing mechanism has a testing calibration section.

[0007] The detection device detects the position of the main component by detecting the position of the detection calibration part.

[0008] In the above technical solution, the testing organization further includes:

[0009] The base is provided with a mounting part;

[0010] A first calibration component is disposed on one side of the base;

[0011] A second calibration element is disposed on the other side of the base; the second calibration element and the first calibration element are symmetrically arranged about the center line extending vertically from the base.

[0012] A counterweight calibration component is connected to the base.

[0013] In any of the above technical solutions, the first calibration component is provided with a first calibration part, the second calibration component is provided with a second calibration part, and the first calibration part and the second calibration part are at the same height in the horizontal direction.

[0014] In any of the above technical solutions, the fixing body further includes a box structure, comprising a first wall panel, a second wall panel, a third wall panel, and a fourth wall panel connected end to end.

[0015] The first wall panel and the third wall panel are arranged facing each other, and the main body component is provided on both the first wall panel and the third wall panel.

[0016] In any of the above technical solutions, the second wall panel and the fourth wall panel are further arranged facing each other; the second wall panel is provided with a tray inlet, and the fourth wall panel is provided with a tray outlet;

[0017] The detection device projects detection light into the fixed body through the tray inlet or the tray outlet, and the detection light can pass through the first calibration part and the second calibration part.

[0018] In any of the above technical solutions, the main component further includes:

[0019] A balance bushing, wherein both the first wall plate and the third wall plate are provided with through holes, and the balance bushing is disposed in the through holes;

[0020] A connecting rod passes through the balance shaft sleeve, and one end of the connecting rod is connected to the mounting part; the diameter of the through hole is larger than the diameter of the connecting rod.

[0021] A transmission assembly is provided, which is connected to the balance shaft sleeve; a fixing part is provided on the wall plate around the through hole, and the transmission assembly is detachably connected to the fixing part.

[0022] This application also provides a coating apparatus, including the position height adjustment device described in any of the above technical solutions, and thus has all the beneficial technical effects of the position height adjustment device, which will not be repeated here.

[0023] In the above technical solution, the coating equipment is further described as a PVD coating equipment or a PECVD coating equipment.

[0024] The PVD coating equipment includes a plurality of first cavities, at least one of which is the fixed body of the position height adjustment device; the plurality of first cavities include at least: a loading cavity, a heating cavity, a coating cavity, a cooling cavity, a buffer cavity, and a feeding cavity;

[0025] The PECVD coating equipment includes a plurality of second chambers, at least one of which is the fixed body; the plurality of second chambers include at least: a loading chamber, a heating chamber, a first buffer chamber, a process chamber, a second buffer chamber, and an unloading chamber.

[0026] This application also provides a position height adjustment method, including the position height adjustment device described in any of the above technical solutions, and thus has all the beneficial technical effects of the position height adjustment device, which will not be repeated here.

[0027] The position height adjustment method includes the following steps:

[0028] S1. Connect the testing mechanism to the main component and adjust the verticality of the testing mechanism;

[0029] S2. Determine the predetermined height of the main components;

[0030] S3. Activate the detection device and project light into the fixed body at a predetermined height;

[0031] S4. Adjust the height of the main component relative to the fixed body according to the predetermined height until the light passes through the detection calibration part of the detection mechanism.

[0032] In the above technical solution, step S2 further includes:

[0033] There are multiple main components. The height of at least some of the main components is measured, and the average height of the measured main components is calculated as a predetermined height to adjust the height of all main components.

[0034] Alternatively, the height of one of the main components can be used as a predetermined height to adjust the height of the other main components.

[0035] Compared with the prior art, the beneficial effects of this application are as follows:

[0036] The position height adjustment device provided in this application includes: a fixed body; a main component, which is disposed on the fixed body and is capable of moving the fixed body; a detection mechanism connected to the main component; the detection mechanism having a detection calibration part; and a detection device that detects the position of the main component by detecting the position of the detection calibration part.

[0037] The position height adjustment device provided in this application can adjust the position of the main component relative to the fixed main body in the vertical direction with high adjustment accuracy, effectively improving the consistency of height between multiple main components, thereby ensuring the stability during pallet transportation, and also improving the coating quality of the workpiece to be coated on the pallet.

[0038] The coating equipment provided in this application includes the aforementioned position and height adjustment device. Therefore, when the coating equipment is in operation, it can effectively ensure the stability of the pallet conveying process, thereby improving the coating quality and yield.

[0039] The position height adjustment method provided in this application can accurately detect the height of multiple main components relative to a fixed body, and ensure the accuracy of height adjustment of the transmission components relative to the fixed body. This allows the height error between the transmission components of each main component to be controlled within ±0.2mm, ensuring stability during pallet transport and thus improving the coating quality of the workpieces to be coated on the pallet. Attached Figure Description

[0040] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0041] Figure 1 This is a schematic diagram of the position height adjustment device provided in the embodiments of this application;

[0042] Figure 2 A schematic diagram of the main component of the position height adjustment device provided in the embodiments of this application;

[0043] Figure 3 A schematic diagram of the detection mechanism of the position height adjustment device provided in the embodiments of this application.

[0044] Figure label:

[0045] 1-Fixed body, 101-First wall panel, 102-Second wall panel, 1021-Tray inlet, 103-Third wall panel, 104-Fourth wall panel, 1041-Tray outlet, 105-Base plate, 2-Detection mechanism, 201-Base, 2011-Mounting part, 202-First calibration component, 2021-First calibration part, 203-Second calibration component, 2031-Second calibration part, 204-First connecting part, 205-Second connecting part, 206-Connecting hole, 207-Counterweight calibration component, 3-Main body component, 301-Connecting rod, 3011-Connecting mating part, 302-Balance bushing, 303-Transmission assembly, 3031-First drive wheel, 3032-Second drive wheel, a-First direction, b-Second direction. Detailed Implementation

[0046] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this application, but not all embodiments.

[0047] The components of the embodiments of this application described and shown in the accompanying drawings can be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of this application provided in the drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application.

[0048] Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0049] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0050] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0051] The following reference Figures 1 to 3 This application describes a position height adjustment device, coating equipment, and position height adjustment method according to embodiments thereof.

[0052] See Figures 1 to 3As shown, an embodiment of this application provides a position height adjustment device, which includes: a fixed body 1, a main component 3, a detection mechanism 2, and a detection device (not shown in the figure). Specifically, the fixed body 1 can be the vacuum chamber of a vacuum coating equipment, capable of conveying a tray carrying a workpiece to be coated. The main component 3 is disposed on the fixed body 1, and the fixed body 1 provides stable support for the main component 3. The main component 3 carries the tray and can drive the tray to move relative to the fixed body 1, allowing the tray to enter from the inlet and exit from the outlet of the fixed body 1. The main component 3 is disposed on the fixed body 1, and the detection mechanism 2 is connected to the main component 3. The detection device works in conjunction with the detection mechanism 2, and the detection device can detect the height of the detection mechanism 2 to reflect the position of the main component 3 relative to the fixed body 1. It should be noted that the workpiece to be coated in this application is specifically a silicon wafer.

[0053] Specifically, the fixed body 1 has a box structure. The fixed body 1 includes a base plate 105 and a first wall plate 101, a second wall plate 102, a third wall plate 103 and a fourth wall plate 104 disposed on the base plate 105. The first wall plate 101, the second wall plate 102, the third wall plate 103 and the fourth wall plate 104 are connected sequentially to form a space for conveying the pallet.

[0054] The fixed body 1 also includes a cover plate (not shown in the figure) which covers the frame structure formed by the first wall plate 101, the second wall plate 102, the third wall plate 103 and the fourth wall plate 104, so that the interior of the fixed body forms a receiving space so as to create a vacuum environment.

[0055] Further, the testing mechanism 2 includes: a base 201, a first calibration component 202, a second calibration component 203, and a counterweight calibration component 207. The base 201 has a flat plate structure; preferably, the base 201 is a circular flat plate. The axis of the base 201 extends along the width direction of the fixed body 1. A mounting portion 2011 is provided at the center of the base 201 for connection with the main body component 3. The sidewall of the base 201 is a closed annular surface. A first connecting portion 204 and a second connecting portion 205 are symmetrically positioned on the sidewall of the base 201. The first connecting portion 204 and the second connecting portion 205 are symmetrically arranged about the diameter of the base 201 extending vertically. Preferably, both the first connecting portion 204 and the second connecting portion 205 are planes formed on the sidewall of the base 201, facilitating the placement of the first calibration component 202 and the second calibration component 203. Preferably, the first connecting portion 204 and the second connecting portion 205 are parallel to each other and directly opposite each other.

[0056] Furthermore, both the first calibration component 202 and the second calibration component 203 have a flat plate structure or a sheet structure. The first calibration component 202 and the second calibration component 203 have the same structure. The first calibration component 202 is disposed on the first connecting part 204, and the second calibration component 203 is disposed on the second connecting part 205. Preferably, the first calibration component 202 is attached to the first connecting part 204 and fixed by screws or other forms of fasteners to ensure the stability between the first calibration component 202 and the first connecting part 204. The second calibration component 203 is similarly fixed to the second connecting part 205.

[0057] The first calibration component 202 has a first calibration part 2021, and the second calibration component 203 has a second calibration part 2031. The first calibration part 2021 and the second calibration part 2031 have the same structure. Preferably, both the first calibration part 2021 and the second calibration part 2031 have a sharp corner structure. More preferably, the first calibration part 2021 and the second calibration part 2031 have the same angle and the same orientation of the sharp corner.

[0058] Furthermore, a connecting hole 206 is provided at the bottom of the base 201, and the centerline of the base 201 extending vertically passes through the connecting hole 206. The counterweight calibration component 207 is connected to the connecting hole 206 by a rope. The rope is not rigid; one end of the rope is connected to the connecting hole 206, and the other end is connected to the counterweight calibration component 207. Under the gravity of the counterweight calibration component 207, the rope is taut and extends vertically, and the counterweight calibration component 207 hangs down naturally, thereby calibrating the base 201 and the first calibration component 202 and the second calibration component 203 provided on the base 201 in the vertical direction to ensure that the first calibration component 202 and the second calibration component 203 can be parallel to each other and face each other. In this state, the first calibration part 2021 and the second calibration part 2031 can determine a straight line extending horizontally. Preferably, the counterweight calibration member 207 has a pointed tip, which always points vertically downward when the counterweight calibration member 207 hangs down naturally.

[0059] Furthermore, the detection device may be, but is not limited to, a collimator, capable of projecting light onto the first calibration member 202 and the second calibration member 203 at a predetermined height. By allowing the light to pass sequentially through the first calibration part 2021 and the second calibration part 2031, not only is the levelness of the detection mechanism 2 and the main body component 3 connected to the detection mechanism 2 ensured, but the height of the main body component 3 relative to the position of the fixed body 1 can also be adjusted.

[0060] Furthermore, the main component 3 includes: a connecting rod 301, a balance bushing 302, and a transmission assembly 303. The side wall of the fixed body 1 is provided with a through hole, the balance bushing 302 passes through the through hole, and the balance bushing 302 can rotate relative to the through hole. The connecting rod 301 passes through the inside of the balance bushing 302. One end of the connecting rod 301 is located inside the fixed body 1 and is connected to the mounting part 2011 of the base 201. The other end of the connecting rod 301 extends outside the fixed body 1. The transmission assembly 303 is connected to the part of the balance bushing 302 located outside the fixed body 1. When the transmission assembly 303 is started, the transmission assembly 303 drives the balance bushing 302 to rotate synchronously.

[0061] In this embodiment, a connecting rod 301 is provided with a connecting fitting 3011 at one end for connection to the base 201, and a connecting ring is provided at the center of the base 201. The fitting and the connecting ring are adapted to each other, thereby connecting the connecting rod 301 to the base 201. Preferably, the fitting and the connecting ring can be detachably connected, so that when adjusting the height, the connecting rod 301 is connected to the base 201 for height detection and positioning, thereby adjusting the height of the main component 3. After the adjustment is completed, the base 201 is separated from the connecting rod 301 to prevent the detection mechanism 2 from affecting the subsequent conveying of the pallet by the main component 3. Alternatively, the connecting ring and the base 201 are connected in a manner similar to a ball bearing, so that after the transmission component 303 is started, the connecting rod 301 rotates synchronously with the balance shaft sleeve 302, the connecting ring rotates synchronously with the connecting rod 301, and the base 201 remains stable.

[0062] Preferably, the line connecting the first calibration part 2021 and the second calibration part 2031 is parallel to or coincides with the diameter of the connecting rod 301 extending in the horizontal direction. Therefore, by adjusting the height of the first calibration part 2021 and the second calibration part 2031 as detection targets, the height of the connecting rod 301 and the transmission assembly 303 can be adjusted accordingly.

[0063] Furthermore, the second wall panel 102 and the fourth wall panel 104 are arranged sequentially along the first direction a, and the first wall panel 101 and the third wall panel 103 are arranged sequentially along the second direction b. The first direction a is specifically the pallet conveying direction, and the second direction b is a direction perpendicular to the first direction a. A pallet inlet 1021 is provided on the second wall panel 102, and a pallet outlet 1041 is provided on the fourth wall panel 104 opposite to the pallet inlet 1021. The pallet enters the fixed body 1 through the pallet inlet 1021, and under the action of the transmission assembly 303, the pallet is output from the pallet outlet 1041.

[0064] There are multiple main components 3. Multiple main components 3 are equally spaced along the length of the third wall panel 103. Multiple main components 3 are equally spaced along the length of the first wall panel 101. The two sides of the pallet are respectively supported by balance bushings 302 on the first wall panel 101 and balance bushings 302 on the third wall panel 103. As the balance bushings 302 rotate continuously, the pallet is transported from the pallet inlet 1021 to the pallet outlet 1041.

[0065] Furthermore, the transmission assembly 303 includes a drive shaft, a first drive wheel 3031, and a second drive wheel 3032. Both the first drive wheel 3031 and the second drive wheel 3032 are mounted on the drive shaft. The drive shaft is connected to a motor or other type of drive device. Along the pallet conveying direction, each first drive wheel 3031 is connected to the first drive wheel 3031 of the next adjacent main component 3 via a first belt drive, and each second drive wheel 3032 is connected to the second drive wheel 3032 of the next adjacent main component 3 via a second belt drive. This enables multiple transmission assemblies 303 to be sequentially connected for synchronous transmission. The connection method between the multiple main components 3 on the first wall panel 101 and the multiple main components 3 on the third wall panel 103 is the same, which can effectively ensure the stability of the pallet during the conveying process.

[0066] It should be noted that the drive shaft and the connecting rod 301 are coaxially arranged, and the diameters of the first drive wheel 3031 and the second drive wheel 3032 extending in the horizontal direction are parallel to the diameters of the base 201 extending in the horizontal direction.

[0067] Furthermore, the diameter of the through holes on the first wall plate 101 and the third wall plate 103 is larger than the diameter of the balance bushing 302, allowing the balance bushing 302 to be adjusted relative to the through holes. A fixing part is provided on the wall plate surrounding the through holes. The transmission assembly 303 also includes a support plate. The drive shaft is rotatably connected to the support plate via bearings or other components. The first drive wheel 3031 and the second drive wheel 3032 can also rotate relative to the support plate. The support plate is movably connected to the fixing part outside the fixed body 1. Preferably, a first connecting hole 206 is provided on the fixing part, and a second connecting hole 206 is provided on the support plate. Fasteners such as bolts can be used to connect the support plate to the fixing part by passing through the first and second connecting holes 206. Preferably, the first connecting hole 206 is an oblong hole, and the long axis of the oblong hole extends vertically to allow for height adjustment of the transmission assembly 303.

[0068] When using this position height adjustment device for position adjustment, first ensure that the counterweight calibration component 207 is hanging naturally and that the tip of the counterweight calibration component 207 is pointing vertically downward. Then, start the detection device and set a predetermined height so that the detection device projects light through the tray inlet toward the first calibration component 202 and the second calibration component 203 at the predetermined height. Adjust the height of the transmission component 303 relative to the fixed body 1 according to the projection path of the light. During the adjustment process, the base 201 and the first calibration component 202 and the second calibration component 203 change height synchronously with the connecting rod 301 until the light can pass through the first calibration part 2021 and the second calibration part 2031 in sequence. At this time, the height adjustment of the position of the transmission component 303 meets the expectations. Lock the transmission component 303 in the current position. Adjust the position of each transmission component 303 according to the above content.

[0069] It should be noted that the light emitted by the detection device travels in a straight line. When adjusting the height of the multiple transmission components 303 on the first wall panel 101, after the detection device emits light at a predetermined height, the detection device is kept stable and stationary. The multiple transmission components 303 on the first wall panel 101 can be adjusted according to the same light. The same applies to the multiple transmission components 303 on the third wall panel 103, so as to improve the adjustment efficiency.

[0070] In summary, the position height adjustment device provided in this application can adjust the position of the main body component 3 relative to the fixed body in the vertical direction with high adjustment accuracy, effectively improving the consistency of height among multiple main body components 3, thereby ensuring the stability during pallet transportation, and also improving the coating quality of the workpiece to be coated on the pallet.

[0071] This application also provides a coating device, including the position height adjustment device described in the above embodiments, and thus has all the beneficial technical effects of the position height adjustment device. The same technical features and beneficial effects will not be repeated here.

[0072] Furthermore, this coating equipment is specifically a PVD (Physical Vapor Deposition) coating equipment. This PVD coating equipment includes multiple first chambers, preferably a loading chamber, a heating chamber, a coating chamber, a cooling chamber, a buffer chamber, and a unloading chamber. Preferably, the loading chamber, heating chamber, coating chamber, cooling chamber, buffer chamber, and unloading chamber are arranged sequentially and adjacent to each other. After the PVD coating equipment is started, the tray passes through the loading chamber, heating chamber, coating chamber, cooling chamber, buffer chamber, and unloading chamber sequentially to perform corresponding processes in different chambers. More preferably, each first chamber has a box structure, and the box structure of each first chamber is the same as the structure of the fixed body 1. Each first chamber is equipped with a main component 3, a detection mechanism 2, and a detection device, etc., with the specific structure and arrangement being the same as described above, and will not be repeated here. This allows the position and height of the tray to be adjusted as it flows through each first chamber, ensuring the stability of the tray during transport and improving the processing quality of the workpiece to be coated within each first chamber.

[0073] This coating equipment can also be a PECVD (Plasma Enhanced Chemical Vapor Deposition) coating equipment. This PECVD coating equipment includes multiple second chambers. Preferably, the multiple second chambers are: a loading chamber, a heating chamber, a first buffer chamber, a process chamber, a second buffer chamber, and an unloading chamber. Preferably, the loading chamber, heating chamber, first buffer chamber, process chamber, second buffer chamber, and unloading chamber are arranged sequentially and adjacent to each other, allowing the tray to pass through each second chamber in sequence. Similarly, each second chamber also has a box structure, and the box structure of each second chamber is the same as the structure of the fixed body 1. Each second chamber is equipped with a main component 3, a detection mechanism 2, and a detection device, etc. The specific structure, arrangement, and beneficial effects are the same as described above and will not be repeated here.

[0074] This application also provides a position height adjustment method, which is applicable to the position height adjustment device described in the above embodiments. Therefore, it has all the beneficial technical effects of the position height adjustment device, and the same technical features and beneficial effects will not be repeated.

[0075] Specifically, the height adjustment method for this position includes the following steps:

[0076] S1. Connect the detection mechanism 2 to the main component 3 and adjust the verticality of the detection mechanism 2.

[0077] Specifically, the base 201 of the testing mechanism 2 is adapted to the connecting rod 301 of the main component 3, and the counterweight calibration component 207 connected to the base 201 is released, so that the counterweight calibration component 207 hangs down naturally, thereby detecting and correcting the base 201 and the main component 3 connected to the base 201 in the vertical direction.

[0078] The main component 3 also includes a transmission component 303. The main component 3 is set on the side wall of the fixed body 1. During the above-mentioned testing process, by testing and adjusting the vertical components of the base 201, the position adjustment of the transmission component 303 relative to the fixed body 1 can be achieved.

[0079] S2. Determine the predetermined height of the main component 3. Specifically, the connecting rod 301 is connected to the transmission assembly 303, which means determining the height of the connecting rod 301 and the transmission assembly 303 relative to the fixed body 1. The fixed body 1 has a box structure, including four wall panels. Main components 3 are provided on two facing wall panels, and multiple main components 3 are provided on each of the two wall panels. The main components 3 on the two wall panels are used to support the pallet. The transmission assembly 303 of the multiple main components 3 drives synchronously, thereby realizing the pallet conveying. It should be noted that the fixed body 1 can specifically be the vacuum chamber of a PVD (Physical Vapor Deposition) coating equipment.

[0080] In this embodiment, the methods for determining the predetermined height are divided into the following two types:

[0081] (i) Select some main components 3 on the two wall panels of the fixed body 1 and measure the height of the current main component 3. Preferably, the current height of all main components 3 can be measured one by one, and the average value after multiple measurements is taken as the predetermined height.

[0082] (ii) Select one of the main components 3 from the multiple main components 3, measure the height of the main component 3, and use the measurement result as the predetermined height.

[0083] It should be noted that when performing position detection on one or more main components 3, the following detection device can be used for detection. The detection target can be the connecting rod 301 of the main component 3. Preferably, the detection mechanism 2 has a calibration part. The straight line extending along the pallet travel direction where the calibration part is located is parallel or collinear with the straight line extending along the travel direction or horizontal direction of the connecting rod 301. By detecting the height of the location of the calibration part, the height of the connecting rod 301 and the transmission component 303 can be reflected. Therefore, the calibration part of the detection mechanism 2 can be used as the detection target. Compared with the difficulty of directly detecting the connecting rod 301 or the detection component, the detection difficulty is effectively reduced and the detection accuracy is improved.

[0084] S3. Start the detection device and project light into the fixed body 1 at a predetermined height;

[0085] S4. Adjust the height of the main component 3 relative to the fixed body 1 according to the predetermined height.

[0086] Specifically, after determining the predetermined height according to the above content, the height of the connecting rod 301 and transmission component 303 of each main component 3 relative to the fixed body 1 is adjusted according to the predetermined height, so that the multiple main components 3 have consistent height and ensure stability during pallet transportation.

[0087] After the detection device is activated, it projects light into the fixed device at a predetermined height. Preferably, the detection mechanism 2 includes a first calibration part 2021 and a second calibration part 2031. The light projected by the detection device and the straight line connecting the first calibration part 2021 and the second calibration part 2031 fall in the same vertical plane. At this time, by adjusting the height position of the main component 3 relative to the fixed body 1, the detection mechanism 2 moves synchronously with the main component 3 until the light projected by the detection device can pass through the first calibration part 2021 and the second calibration part 2031. At this time, the height of the main component 3 is adjusted to the predetermined height. The height of each main component 3 is adjusted relative to the fixed body 1 according to the above content so that the heights of multiple main components 3 have high consistency.

[0088] The position height adjustment method provided in this application can accurately detect the height of multiple main components 3 (transmission components 303) relative to the fixed body 1, and can ensure the accuracy of height adjustment of the transmission components 303 relative to the fixed body 1, so that the height error between the transmission components 303 of each main component 3 can be controlled within ±0.2mm, ensuring the stability during pallet transportation, thereby improving the coating quality of the workpiece to be coated on the pallet.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A position height adjustment device, characterized in that, include: Fixed body; A main component is disposed on the fixed body and is movable relative to the fixed body; The testing mechanism is connected to the main component; the testing mechanism has a testing calibration section. A detection device that detects the position of the main component by detecting the position of the detection calibration unit; The testing institutions include: The base is in the shape of a circular flat plate, and the axis of the base extends along the width direction of the fixed body. A mounting part is provided at the center of the base for connecting with the main body component. A first connecting part and a second connecting part are provided symmetrically on the side wall of the base, and the first connecting part and the second connecting part are symmetrically arranged about the diameter of the base extending in the vertical direction. A first calibration component is disposed on the first connecting portion; The second calibration component is disposed on the second connecting part, and the first calibration component and the second calibration component are parallel to each other and are directly opposite each other; The first calibration component is provided with a first calibration part, and the second calibration component is provided with a second calibration part. The first calibration part and the second calibration part are at the same height in the horizontal direction.

2. The position height adjustment device according to claim 1, characterized in that, The testing mechanism also includes a counterweight calibration component, which is connected to the base.

3. The position height adjustment device according to claim 1, characterized in that, The fixing body has a box structure, and the fixing body includes a first wall panel, a second wall panel, a third wall panel and a fourth wall panel connected end to end; The first wall panel and the third wall panel are arranged facing each other, and the main body component is provided on both the first wall panel and the third wall panel.

4. The position height adjustment device according to claim 3, characterized in that, The second wall panel and the fourth wall panel are arranged facing each other; the second wall panel is provided with a tray inlet, and the fourth wall panel is provided with a tray outlet; The detection device projects detection light into the fixed body through the tray inlet or the tray outlet, and the detection light can pass through the first calibration part and the second calibration part.

5. The position height adjustment device according to claim 3, characterized in that, The main component includes: A balance bushing, wherein both the first wall plate and the third wall plate are provided with through holes, and the balance bushing is disposed in the through holes; A connecting rod passes through the balance shaft sleeve, and one end of the connecting rod is connected to the mounting part; the diameter of the through hole is larger than the diameter of the connecting rod. A transmission assembly is provided, which is connected to the balance shaft sleeve; a fixing part is provided on the wall plate around the through hole, and the transmission assembly is detachably connected to the fixing part.

6. A coating apparatus, characterized in that, Includes the position height adjustment device as described in any one of claims 1 to 5.

7. The coating equipment according to claim 6, characterized in that, The coating equipment is a PVD coating equipment or a PECVD coating equipment; The PVD coating equipment includes multiple first cavities, at least one of which is the fixed body of the position height adjustment device; The plurality of the first cavities include at least: a loading cavity, a heating cavity, a coating cavity, a cooling cavity, a buffer cavity, and a feeding cavity; The PECVD coating equipment includes a plurality of second chambers, at least one of which is the fixed body; the plurality of second chambers include at least: a loading chamber, a heating chamber, a first buffer chamber, a process chamber, a second buffer chamber, and an unloading chamber.

8. A method for adjusting position and height, characterized in that, The position height adjustment method for the position height adjustment device according to any one of claims 1 to 5 includes the following steps: S1. Connect the testing mechanism to the main component and adjust the verticality of the testing mechanism; S2. Determine the predetermined height of the main components; S3. Activate the detection device and project light into the fixed body at a predetermined height; S4. Adjust the height of the main component relative to the fixed body according to the predetermined height until the light passes through the detection calibration part of the detection mechanism.

9. The position height adjustment method according to claim 8, characterized in that, Step S2 includes: There are multiple main components. The height of at least some of the main components is measured, and the average height of the measured main components is calculated as a predetermined height to adjust the height of all main components. Alternatively, the height of one of the main components can be used as a predetermined height to adjust the height of the other main components.

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