Substrate baking equipment

Abstract

A substrate baking apparatus comprises a baking oven and an air intake device. The baking oven defines a baking chamber and includes at least two air intake sides and at least one air outlet side, the air intake sides and the air outlet side being located on three different sides of the baking chamber. The air intake device is disposed within the baking oven and is connected to at least the air intake side. The air intake device is configured to generate a hot air flow and allow the hot air flow to flow into the baking chamber through the air intake side. This improves the temperature uniformity of the baked substrates, thereby enhancing the baking quality.

Description

Technical Field

[0001] The invention relates to baking equipment, in particular to a substrate baking equipment for baking a substrate. Background Art

[0002] A baking box of an existing substrate baking device is usually designed so that hot air flows from an air inlet side into a baking chamber to bake multiple circuit substrates in the baking chamber, and then the hot air is discharged from the baking chamber from an air outlet side.

[0003] The single-sided air intake and single-sided air exhaust of the baking oven causes the temperature of each circuit substrate near the air outlet to be lower than the temperature of the portion near the air intake, resulting in poor baking temperature uniformity of each circuit substrate, thereby affecting the baking quality. Summary of the Invention

[0004] Therefore, one object of the present invention is to provide a substrate baking apparatus that can overcome at least one disadvantage of the background art.

[0005] The purpose of the present invention and the background technical problem to be solved are achieved by adopting the following technical solutions. The substrate baking equipment proposed in the present invention includes a baking oven and an air intake device. The baking oven defines a baking chamber. The baking oven includes at least two air intake sides and at least one air outlet side. The air intake side and the air outlet side are respectively located on three different sides of the baking chamber. The air intake device is arranged in the baking oven and is at least connected to the air intake side. The air intake device is used to generate a hot air flow and enable the hot air flow to flow into the baking chamber through the air intake side.

[0006] The substrate baking equipment of the present invention, the baking oven includes three air inlet sides, the air inlet sides are respectively a first air inlet side, a second air inlet side, and a third air inlet side, the first air inlet side and the air outlet side are respectively located on two opposite sides of the baking chamber, the second air inlet side and the third air inlet side are respectively located on the other two opposite sides of the baking chamber, the air inlet device is connected to the first air inlet side, the second air inlet side and the third air inlet side, the hot air flow generated by the air inlet device can flow into the baking chamber through the first air inlet side, the second air inlet side and the third air inlet side.

[0007] The substrate baking equipment of the present invention is characterized in that the air outlet side, the baking chamber and the first air inlet side are arranged along a first direction, the third air inlet side, the baking chamber and the second air inlet side are arranged along a second direction perpendicular to the first direction, the baking oven also includes two side panels respectively located on the other two opposite sides of the baking chamber, the side panels are spaced apart along a third direction, and the third direction is perpendicular to the first direction and the second direction, the air inlet device includes a guide shell, a first heater, a first blower, and a second blower, the guide shell covers the first air inlet side, the second air inlet side, the third air inlet side and the side panels, the first heater is arranged in the guide shell to generate hot air, the first blower includes a first blower fan arranged in the guide shell and located on the outside of one of the side panels, the first blower is used to generate an airflow flowing toward the first air inlet side, the second blower includes a second blower fan arranged in the guide shell and located on the outside of the other side panel, the second blower is used to generate an airflow flowing toward the second air inlet side and the third air inlet side.

[0008] The substrate baking equipment of the present invention, the guide shell defines a heating chamber for accommodating the first heater and connected to the second air inlet side, a first chamber for accommodating the first blower fan and connected to the heating chamber, a first guide channel connected between the first blower fan and the first air inlet side, a second chamber for accommodating the second blower fan, a second guide channel connected between the second blower fan and the heating chamber, a third guide channel connected between the second blower fan and the third air inlet side, a first return hole connected to the first chamber, and a second return hole connected to the second chamber, and the baking oven also defines a return channel connected between the outlet side, the first return hole and the second return hole.

[0009] In the substrate baking equipment of the present invention, the air intake device includes a second heater disposed in the third flow guide channel and adjacent to the outer side of the third air intake side.

[0010] In the substrate baking equipment of the present invention, the first air inlet side is formed with a plurality of first air inlet holes connected between the baking chamber and the first guide channel, the second air inlet side is formed with a plurality of second air inlet holes connected between the baking chamber and the heating chamber, the third air inlet side is formed with a plurality of third air inlet holes connected between the baking chamber and the third guide channel, and the outlet side is formed with a plurality of air outlet holes connected between the baking chamber and the return channel.

[0011] The substrate baking equipment of the present invention, the baking oven includes a box shell, an inner furnace arranged in the box shell, and a door arranged on the box shell, the box shell defines an opening corresponding to the position of the baking chamber, the inner furnace has the baking chamber, the first air inlet side, the second air inlet side, the third air inlet side and the side panel, the door has a door panel for controlling the opening and closing of the opening, and a guide shell arranged on the back of the door panel and corresponding to the baking chamber, the guide shell has the air outlet side, and the guide shell and the door panel jointly define the return flow channel.

[0012] In the substrate baking equipment of the present invention, the guide shell has an end wall separated from the door panel and defining the air outlet side, and a surrounding wall connected between the outer periphery of the end wall and the door panel. The door panel, the end wall and the surrounding wall jointly define a diversion space connected to the air outlet side. The surrounding wall is formed with a first exhaust hole connected between the diversion space and the first return hole, and a second exhaust hole connected between the diversion space and the second return hole. The diversion space, the first exhaust hole and the second exhaust hole jointly constitute the return channel.

[0013] The substrate baking equipment of the present invention, the baking box includes an inner furnace, the inner furnace has the baking chamber and the air inlet side, the air inlet sides are respectively located on two opposite sides of the baking chamber, the air inlet device includes a guide shell, a first heater, and a second heater, the guide shell covers the air inlet side, the first heater and the second heater are arranged in the guide shell and are respectively adjacent to the outer side of the air inlet side for generating hot air.

[0014] The substrate baking equipment of the present invention, the baking oven includes two air inlet sides and two air outlet sides, the air inlet sides are respectively a first air inlet side and a second air inlet side, the first air inlet side and the second air inlet side are respectively located on two opposite sides of the baking chamber, the air outlet sides are respectively a first air outlet side and a second air outlet side, the first air outlet side and the second air outlet side are respectively located on the other two opposite sides of the baking chamber, the air inlet device is connected to the first air inlet side, the second air inlet side and the second air outlet side, the hot air flow generated by the air inlet device can flow into the baking chamber through the first air inlet side and the second air inlet side.

[0015] The substrate baking equipment of the present invention is characterized in that the first air outlet side, the baking chamber and the second air outlet side are arranged along a first direction, the second air inlet side, the baking chamber and the first air inlet side are arranged along a second direction perpendicular to the first direction, the baking oven also includes two side panels respectively located on the other two opposite sides of the baking chamber, the side panels are spaced apart along a third direction, and the third direction is perpendicular to the first direction and the second direction, the air inlet device includes a guide shell, a first heater, a first blower, and a second blower, the guide shell covers the second air outlet side, the first air inlet side, the second air inlet side and the side panels, the first heater is arranged in the guide shell to generate hot air, the first blower includes a first blower fan arranged in the guide shell and located on the outside of one of the side panels, the first blower is used to generate an airflow flowing toward the outside of the guide shell, the second blower includes a second blower fan arranged in the guide shell and located on the outside of the other side panel, the second blower is used to generate an airflow flowing toward the first air inlet side and the second air inlet side.

[0016] The substrate baking equipment of the present invention, the guide shell defines a heating chamber for accommodating the first heater and connected to the first air inlet side, a first chamber for accommodating the first blower fan, a first guide channel connected between the first chamber and the second air outlet side, a second chamber for accommodating the second blower fan, a second guide channel connected between the second blower fan and the heating chamber, a third guide channel connected between the second blower fan and the second air inlet side, and a return hole connected to the second chamber, and the baking oven also defines a return channel connected between the first air outlet side and the return hole.

[0017] In the substrate baking equipment of the present invention, the air intake device includes a second heater disposed in the third flow guide channel and adjacent to the outer side of the second air intake side.

[0018] In the substrate baking equipment of the present invention, the first air inlet side is formed with a plurality of first air inlet holes connected between the baking chamber and the heating chamber, the second air inlet side is formed with a plurality of second air inlet holes connected between the baking chamber and the third guide channel, the first air outlet side is formed with a plurality of first air outlet holes connected between the baking chamber and the return channel, and the second air outlet side is formed with a plurality of second air outlet holes connected between the baking chamber and the first guide channel.

[0019] The substrate baking equipment of the present invention, the baking oven includes a box shell, an inner furnace arranged in the box shell, and a door arranged on the box shell, the box shell defines an opening corresponding to the position of the baking chamber, the inner furnace has the baking chamber, the second air outlet side, the first air inlet side, the second air inlet side and the side panel, the door has a door panel for controlling the opening and closing of the opening, and a guide shell arranged on the back of the door panel and corresponding to the baking chamber, the guide shell has the first air outlet side, and the guide shell and the door panel jointly define the return flow channel.

[0020] In the substrate baking equipment of the present invention, the guide shell has an end wall separated from the door panel and defining the first air outlet side, and a surrounding wall connected between the outer periphery of the end wall and the door panel. The door panel, the end wall and the surrounding wall jointly define a diversion space connected to the first air outlet side. The surrounding wall is formed with an exhaust hole connected between the diversion space and the return hole. The diversion space and the exhaust hole together constitute the return channel.

[0021] In the substrate baking device of the present invention, the second blower fan is formed with a first air outlet communicated with the second flow guide channel, and a second air outlet communicated with the third flow guide channel.

[0022] The beneficial effect of the present invention is that: by virtue of the inner furnace having at least two air inlet sides, and the hot air flow generated by the air inlet device being able to flow into the baking chamber through the air inlet sides respectively to bake the substrate, the baking temperature uniformity of each substrate can be improved, thereby improving the baking quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a perspective view of a first embodiment of a substrate baking device according to the present invention;

[0024] Figure 2 It is along Figure 1 A fragmentary cross-sectional view taken along line II-II in the figure illustrates the assembly relationship between a baking oven and an air intake device;

[0025] Figure 3 is a perspective view of a door of the oven of the first embodiment;

[0026] Figure 4 It is along Figure 1 An incomplete cross-sectional view taken along line IV-IV;

[0027] Figure 5 It is along Figure 1 An incomplete cross-sectional view taken along the V-V line in FIG.

[0028] Figure 6 It is along Figure 1 A cross-sectional view taken along line VI-VI;

[0029] Figure 7 It is along Figure 1 An incomplete cross-sectional view taken along line VII-VII in FIG.

[0030] Figure 8 This is an incomplete cross-sectional view of the second embodiment of the substrate baking device of the present invention, which is similar to Figure 5 ;

[0031] Figure 9 is a cross-sectional view of the second embodiment, which is similar to Figure 6 . DETAILED DESCRIPTION

[0032] The present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0033] Before the present invention is described in detail, it should be noted that similar elements are denoted by the same reference numerals in the following description.

[0034] See Figures 1 to 4 The first embodiment of the substrate baking apparatus 200 of the present invention is suitable for baking a plurality of substrates 1. The substrate baking apparatus 200 comprises a baking oven 2 and an air inlet device 3.

[0035] For the convenience of subsequent description, the substrate baking apparatus 200 is defined as follows: a first direction X, a second direction Z perpendicular to the first direction X, and a third direction Y perpendicular to the first direction X and the second direction Z. In the first embodiment, the first direction X is taken as an example of a front-to-back direction, the second direction Z is taken as an example of an up-down direction, and the third direction Y is taken as an example of a left-to-right direction.

[0036] The substrates 1 are placed on a carrier (not shown) and spaced apart along the third direction Y. Each substrate 1 is vertical. Each substrate 1 is a circuit substrate as an example.

[0037] See Figure 2 、 Figure 3 and Figure 4The baking oven 2 includes a shell 21, an inner oven 22, and a door 23. The shell 21 defines a receiving space 211 and an opening 212 connected to the front end of the receiving space 211. The inner oven 22 is disposed within the receiving space 211 and includes a bottom plate 221, two side plates 222 and 223 connected to the left and right sides of the bottom plate 221 and spaced apart along the third direction Y, a back plate 224 connected to the top of the bottom plate 221 and the rear ends of the side plates 222 and 223, and a top plate 225 connected to the top ends of the side plates 222 and 223 and the top end of the back plate 224. The top plate 225 is spaced apart from the bottom plate 221 along the second direction Z. The bottom plate 221 , the side plates 222 and 223 , the back plate 224 and the top plate 225 together define a baking chamber 226 corresponding to the opening 212 of the box shell 21 . The baking chamber 226 is used to accommodate the carrier carrying the substrate 1 .

[0038] In this first embodiment, the back plate 224 serves as a first air inlet located at the rear of the baking chamber 226. The back plate 224 is formed with a plurality of air vents 227 connected to the baking chamber 226, each of which is a first air inlet. The bottom plate 221 serves as a second air inlet located at the bottom of the baking chamber 226. The bottom plate 221 is formed with a plurality of air vents 228 connected to the baking chamber 226, each of which is a second air inlet. The top plate 225 serves as a third air inlet located at the top of the baking chamber 226. The top plate 225 is formed with a plurality of air vents 229 connected to the baking chamber 226, each of which is a third air inlet. The third air inlet, the baking chamber 226, and the second air inlet are arranged along the second direction Z.

[0039] See Figure 1 、 Figure 2 and Figure 3The door 23 has a door body 231 and a plurality of hinges 232 connected between the door body 231 and the housing 21. The door body 231 can rotate relative to the housing 21 via the hinges 232 to close or open the opening 212. The door body 231 has a door panel 233 for closing the opening 212, and a guide housing 234 disposed on the back of the door panel 233 to correspond to the baking chamber 226. The guide housing 234 has an end wall 235 located behind the door panel 233 and a surrounding wall 236 extending forward from the outer periphery of the end wall 235 and connected to the back of the door panel 233. The end wall 235 is an air outlet side located at the front side of the baking chamber 226 and is formed with a plurality of air outlet holes 237 that communicate with the baking chamber 226. The air outlet side, the baking chamber 226, and the first air inlet side are arranged along the first direction X. The door panel 233, the end wall 235, and the surrounding wall 236 collectively define a diversion space 238 that communicates with the air outlet hole 237. Two first exhaust holes 239 are formed on the left side of the surrounding wall 236, spaced apart along the second direction Z and connected to the diversion space 238. A second exhaust hole 240 is formed on the right side of the surrounding wall 236, connected to the diversion space 238.

[0040] See Figure 2 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7The air intake device 3 is disposed in the inner oven 22 of the baking oven 2 and includes a guide housing 4, a first heater 5, a second heater 6, a first blower 7, and a second blower 8. The guide housing 4 covers the bottom plate 221, the side plates 222 and 223, the back plate 224, and the top plate 225 of the inner oven 22 and exposes the baking chamber 226. The guide housing 4 is connected to the box shell 21 via a plurality of fixing brackets (not shown) so that the guide housing 4 can be firmly fixed in the accommodating space 211. The guide housing 4 includes a lower supporting frame 41, an upper supporting frame 42, a first side guide cover 43, a rear guide cover 44, a second side guide cover 45, a lower guide cover 46, and an upper guide cover 47. The lower support frame 41 includes a lower support frame body 411 fixedly connected to the bottom end of the bottom plate 221, a side upright plate 412 connected to the right side of the lower support frame body 411 and abutting the outside of the side plate 223, and a lower flat plate 413 connected to the top of the side upright plate 412. The lower support frame body 411 defines a heating chamber 414 for accommodating the first heater 5 and communicating with the vent holes 228, as well as a plurality of vent holes 415 connected to the bottom end of the heating chamber 414. The lower flat plate 413 defines a lower vent hole 416. The upper support frame 42 includes an upper support frame body 421 fixedly connected to the top end of the top plate 225, a side upright plate 422 connected to the right side of the upper support frame body 421 and abutting the outside of the side plate 223, and an upper flat plate 423 connected to the bottom end of the side upright plate 422. The upper support frame body 421 supports the second heater 6. The upper plate 423 is spaced apart from the lower plate 413 along the second direction Z. An upper vent hole 424 is formed on the upper plate 423 .

[0041] See Figure 4 、 Figure 5 and Figure 6 The first side air guide 43 is fixedly connected to the left side of the lower carrier body 411 and the outer side of the side plate 222. The first side air guide 43 defines a first chamber 431 connected to the heating chamber 414, a rear vent 432 connected to the rear end of the first chamber 431, and two first return holes 433 connected to the front end of the first chamber 431 and spaced apart along the second direction Z. The first return holes 433 are respectively connected to the first exhaust holes 239. The rear air guide 44 is fixedly connected to the rear side of the first side air guide 43 and shields the back plate 224 of the inner furnace 22.

[0042] See Figure 4 、 Figure 6 and Figure 7The second side air guide 45 covers the lower flat plate 413 of the lower carrier 41 and is fixedly connected to the lower flat plate 413 and the lower carrier body 411. The second side air guide 45 is also fixedly connected to the bottom end of the upper flat plate 423 of the upper carrier 42 and between the upper carrier body 421 and the side vertical plate 422. The second side air guide 45 is also fixedly connected to the right side of the rear air guide 44. The second side air guide 45, the lower flat plate 413, and the upper flat plate 423 together define a second chamber 451. The second side air guide 45 defines a second return hole 452 connected to the front end of the second chamber 451, and the second return hole 452 is used to connect to the second exhaust hole 240.

[0043] See Figure 2 、 Figure 4 and Figure 7 The lower air deflector 46 is fixedly connected to the bottom of the lower carrier body 411 of the lower carrier 41, the bottom of the first side air deflector 43, the bottom of the rear air deflector 44, and the bottom of the second side air deflector 45. The lower air deflector 46 seals the bottom of the first chamber 431. The lower air deflector 46, the lower carrier 41, and the second side air deflector 45 collectively define a lower air deflection space 481 that communicates between the vent hole 415 and the lower vent hole 416.

[0044] See Figure 2 、 Figure 4 、 Figure 5 and Figure 7 The upper air deflector 47 is disposed on the top of the upper carrier 42 and is fixedly connected to the upper carrier 42, the top of the first side air deflector 43, the top of the rear air deflector 44, and the top of the second side air deflector 45. The upper air deflector 47 seals the top of the first chamber 431. The upper air deflector 47 and the upper carrier 42 jointly define an upper air deflection space 482 that communicates between the vent 229 and the upper vent 424.

[0045] See Figure 4 、 Figure 5 and Figure 6 The upper carrier 42, the first side air guide 43, the rear air guide 44, the second side air guide 45, and the lower air guide 46 collectively define a rear air guide space 480 that communicates between the rear vent 432 and the vent 227. The rear air guide space 480 communicates with a portion of the heating chamber 414. The rear vent 432 and the rear air guide space 480 collectively form a first air guide channel R1.

[0046] See Figure 4 、 Figure 6 and Figure 7, the lower guide space 481 and the vent hole 415 (such as Figure 2 The upper guide space 482 and the upper vent 424 together form a third guide channel R3. The diversion space 238, the first exhaust hole 239 and the second exhaust hole 240 together form a return channel R4, which is connected to the outlet hole 237 on the outlet side (as shown). Figure 3 As shown), between the first return hole 433 and the second return hole 452.

[0047] See Figure 4 、 Figure 5 and Figure 6 The first blower 7 includes a first blower fan 71 and a first motor 72. The first blower fan 71 is fixedly connected to the inner side of the first side air duct 43 and is located in the first chamber 431. The first blower fan 71 is formed with an air inlet 711 facing the side plate 222 and spaced apart from the side plate 222, and an air outlet 712 communicating with the rear air vent 432. The first motor 72 is fixedly connected to the outer side of the first side air duct 43 and connected to the first blower fan 71. The first motor 72 is used to drive the first blower fan 71 to operate, thereby enabling the air outlet 712 of the first blower fan 71 to generate an airflow flowing into the first guide channel R1.

[0048] See Figure 4 、 Figure 6 and Figure 7 The second blower 8 includes a second blower fan 81 and a second motor 82. The second blower fan 81 is fixedly connected between the lower plate 413 and the upper plate 423 and is located in the second chamber 451. The second blower fan 81 is formed with an air inlet 811 facing the side plate 223 and spaced apart from the side plate 223, a first air outlet 812 communicating with the lower air vent 416, and a second air outlet 813 communicating with the upper air vent 424. The second motor 82 is fixedly connected to the outside of the casing 21 and connected to the second blower fan 81. The second motor 82 is used to drive the second blower fan 81 to operate, thereby enabling the first air outlet 812 of the second blower fan 81 to generate an airflow flowing into the second guide channel R2, and the second air outlet 813 to generate an airflow flowing into the third guide channel R3.

[0049] The following describes how the substrate baking device 200 bakes the substrate 1:

[0050] See Figure 2 and Figure 6First, the door 231 of the door 23 is opened. A transfer mechanism (not shown) is used to transport the carrier carrying the substrate 1 through the opening 212 into the baking chamber 226. The door 231 is then closed, allowing the first exhaust hole 239 to communicate with the first recirculation hole 433, and the second exhaust hole 240 to communicate with the second recirculation hole 452.

[0051] See Figure 4 、 Figure 5 and Figure 6 , control the operation of the first heater 5 and the second heater 6 to generate hot air in the heating chamber 414 and the third guide channel R3. Control the operation of the first motor 72 so that the first motor 72 drives the first blower fan 71 to operate. During operation, the first blower fan 71 absorbs the gas in the first chamber 431 through the air inlet 711, so that a negative pressure is generated in the first chamber 431 and thus suction is generated. In this way, the air inlet 711 can absorb the hot air in the heating chamber 414 through the first chamber 431, so that the airflow discharged from the air outlet 712 of the first blower fan 71 is a hot airflow with temperature. In addition, the first return hole 433 connected to the first chamber 431, the first exhaust hole 239 connected to the first return hole 433, and the diversion space 238 connected to the first exhaust hole 239 will also generate suction.

[0052] The airflow discharged from the air outlet 712 of the first blower fan 71 flows into the first guide channel R1 and is guided by the first guide channel R1 to flow backward to the rear of the back plate 224. Subsequently, the airflow flows forward along the first direction X and flows into the baking chamber 226 through the vent hole 227. After the airflow flows into the baking chamber 226 through the first air inlet side defined by the back plate 224, it flows forward along the first direction X to bake the substrate 1. Afterwards, the airflow flows through the air outlet hole 237 (as shown in FIG. 2 ) on the air outlet side defined by the end wall 235. Figure 3 The air (as shown) flows into the diversion space 238 and returns to the first chamber 431 through the first exhaust hole 239 and the first return hole 433, thereby completing the flow within a first flow path P1 formed by the first chamber 431, the first blower fan 71, the first guide channel R1, the vent 227, the baking chamber 226, the air outlet 237, the return channel R4, and the first return hole 433. The continuous operation of the first blower fan 71 causes the airflow to continuously circulate along the first flow path P1.

[0053] See Figure 2 、 Figure 4 、 Figure 6 and Figure 7 , controlling the operation of the second motor 82 so that the second motor 82 drives the second blower fan 81 to operate. During operation, the second blower fan 81 draws gas from the second chamber 451 through the air inlet 811, causing negative pressure to be generated in the second chamber 451 and thereby generating suction. The second return hole 452 connected to the second chamber 451 and the second exhaust hole 240 connected to the second return hole 452 also generate suction to absorb a portion of the airflow that is discharged through the air outlet side into the diversion space 238. In this way, the airflow discharged from the first air outlet 812 of the second blower fan 81 and the airflow discharged from the second air outlet 813 are both hot airflows with temperature.

[0054] The airflow discharged from the first air outlet 812 of the second blower fan 81 flows into the second guide channel R2 and is guided by the second guide channel R2 to flow downward to the bottom of the lower support frame 411. Subsequently, the airflow flows upward along the second direction Z and passes through the vent holes 415 (such as Figure 2 The airflow (shown) flows into the heating chamber 414. The airflow drives the hot air in the heating chamber 414 upward and into the baking chamber 226 through the vents 228. After entering the baking chamber 226 through the second air inlet side defined by the bottom plate 221, the airflow flows upward along the second direction Z to bake the substrate 1. At the same time, the airflow merges with the airflow flowing forward along the first direction X in the baking chamber 226 and is driven by the forward-flowing airflow to flow toward the air outlet side.

[0055] The airflow discharged from the second air outlet 813 of the second blower fan 81 flows into the third guide channel R3 and is guided by the third guide channel R3 to flow upward to the top of the upper carrier 421. Subsequently, the airflow flows downward along the second direction Z and flows through the second heater 6. The airflow drives the hot air generated by the second heater 6 to flow downward and pass through the vent holes 229 (as shown in FIG. Figure 2 The airflow flows into the baking chamber 226 via the third air inlet defined by the top plate 225. After flowing into the baking chamber 226 through the third air inlet side defined by the top plate 225, the airflow flows downward along the second direction Z to bake the substrate 1. Simultaneously, the airflow merges with the airflow flowing forward along the first direction X within the baking chamber 226 and is driven by the forward-flowing airflow to flow toward the air outlet side.

[0056] The airflows in the baking chamber 226 converge to form a converged airflow that passes through the air outlet 237 (e.g. Figure 3 The first airflow (shown in FIG. 2 ) flows into the diversion space 238. A portion of the converged airflow flows back into the first chamber 431 through the first exhaust hole 239 and the first return hole 433, and continuously circulates along the first flow path P1. The remaining portion of the converged airflow flows back into the second chamber 451 through the second exhaust hole 240 and the second return hole 452. After being diverted by the second blower fan 81, the remaining portion of the converging airflow flows along a second flow path P2 defined by the second blower fan 81, the second flow guide R2, the vent 415, the heating chamber 414, the vent 228, the baking chamber 226, the air outlet 237, the return flow channel R4, the second return flow hole 452, and the second receiving chamber 451. The remaining portion flows along a third flow path P3 defined by the second blower fan 81, the third flow guide R3, the vent 229, the baking chamber 226, the air outlet 237, the return flow channel R4, the second return flow hole 452, and the second receiving chamber 451. The continued operation of the second blower fan 81 allows the remaining portion of the converging airflow to continuously circulate along the second flow path P2 and the third flow path P3.

[0057] By allowing the airflow flowing into the baking chamber 226 from the second air inlet side to flow upward along the second direction Z and bake the substrates 1, it is ensured that all portions of the lower half of each substrate 1 extending along the first direction X are uniformly baked. By allowing the airflow flowing into the baking chamber 226 from the third air inlet side to flow downward along the second direction Z and bake the substrates 1, it is ensured that all portions of the upper half of each substrate 1 extending along the first direction X are uniformly baked. This improves the uniformity of the baking temperature across each substrate 1, ensuring that the temperature of all portions of each substrate 1 extending along the first direction X is nearly uniform, thereby improving baking quality.

[0058] By connecting the heating chamber 414 to the first chamber 431 and the second flow channel R2, the airflow generated by the first blower fan 71 and the second blower fan 81 can at least drive the hot air generated by the first heater 5, so that the airflow discharged by the first blower fan 71 and the second blower fan 81 is a hot airflow with temperature. In this first embodiment, the design of the first heater 5 and the second heater 6 adjacent to the outside of the second air inlet side defined by the bottom plate 221 and the outside of the third air inlet side defined by the top plate 225, respectively, ensures that the temperature of the airflow flowing into the baking chamber 226 through the second air inlet side and the third air inlet side can be close to the same. This can further improve the baking temperature uniformity and baking quality of the substrate 1.

[0059] By arranging the air outlet side, the baking chamber 226, and the first air inlet side along the first direction X, the third air inlet side, the baking chamber 226, and the second air inlet side along the second direction Z, and the first blower fan 71 and the second blower fan 81 being located outside the side panels 222 and 223, respectively, and spaced apart along the third direction Y, the first blower fan 71 and the second blower fan 81 do not block the first air inlet side, the second air inlet side, and the third air inlet side, thereby preventing the smooth flow of air. Furthermore, by enclosing the first air inlet side, the second air inlet side, the third air inlet side, and the side panels 222 and 223, and by disposing the first blower fan 71 and the second blower fan 81 within the flow guide housing 4, the overall structure of the inner oven 22 and the air inlet device 3 is very compact, reducing the overall volume of the structure.

[0060] By using the second blower fan 81 as a blower fan with two air outlets, the first air outlet 812 and the second air outlet 813 of the second blower fan 81 can generate the airflow in the second guide channel R2 and the third guide channel R3 respectively. In this way, the number of blowers used can be reduced to reduce the substrate baking equipment 200 (such as Figure 1 The manufacturing cost of the product is shown in Figure 2.

[0061] By defining the air outlet side and the return flow channel R4 by the door 23, in addition to improving the convenience of the substrate 1 entering and exiting the baking chamber 226, it also further increases the compactness of the overall structure after cooperating with the inner furnace 22 and the air intake device 3, so that each side of the inner furnace 22 can be effectively utilized.

[0062] It should be noted that the substrate baking apparatus 200 of the first embodiment may also have the following different implementations according to needs:

[0063] In one embodiment, the inner furnace 22 has only two air inlet sides, namely the first air inlet side and the second air inlet side, and the inner furnace 22 omits the third air inlet side.

[0064] In another embodiment, the inner furnace 22 only has two air inlet sides, namely the first air inlet side and the third air inlet side, and the inner furnace 22 omits the second air inlet side.

[0065] In another embodiment, the air intake device 3 is provided with only the first heater 5 and the second heater 6 is omitted.

[0066] See Figure 8 and Figure 9 The second embodiment of the substrate baking device 200 of the present invention has an overall structure that is substantially the same as that of the first embodiment, except that the baking oven 2 has two air inlet sides and two air outlet sides.

[0067] In the second embodiment, the back plate 224 is a second air outlet located at the rear side of the baking chamber 226. Each of the air vents 227 (such as Figure 4 As shown) is a second air outlet. The bottom plate 221 is a first air inlet side located at the bottom side of the baking chamber 226, and each of the air vents 228 is a first air inlet. The top plate 225 is a second air inlet side located at the top side of the baking chamber 226, and each of the air vents 229 is a second air inlet. The second air inlet side, the baking chamber 226 and the first air inlet side are arranged along the second direction Z. The end wall 235 of the guide shell 234 is a first air outlet side located at the front side of the baking chamber 226, and each of the air outlet holes 237 (as shown) is a second air outlet. Figure 3 The first air outlet side, the baking chamber 226 and the second air outlet side are arranged along the first direction X.

[0068] The guide shell 234 is omitted as Figure 3 The first exhaust hole 239 is shown. The first side air guide cover 43 is omitted as shown. Figure 5 The first return hole 433 is shown. The upper air guide 47 is formed with an exhaust hole 471 connected to the top of the first chamber 431. The diversion space 238 and the second exhaust hole 240 together constitute the return flow channel R4, which connects between the first outlet hole 237 and the second return hole 452. The air outlet 712 of the first blower fan 71 of the first blower 7 faces upward and is connected to the exhaust hole 471.

[0069] During operation, the first blower fan 71 draws air from the first chamber 431 through the air inlet 711, creating a negative pressure within the first chamber 431 and generating suction. At this time, the rear vent 432 and the rear flow guide space 480 connected to the first chamber 431 also generate suction. This allows the airflow within the baking chamber 226 to be discharged outside the flow guide housing 4 via the vent 227, the first flow channel R1, the first chamber 431, the first blower fan 71, and the exhaust vent 471. The baking oven 2 of this second embodiment can simultaneously exhaust air from the baking chamber 226 through both the first and second air outlet sides, thereby improving the speed and efficiency of air outlet. It should be noted that in other embodiments of the substrate baking apparatus 200 of this case, the baking oven 2 can be designed with four or more air inlet sides, as needed, and is not limited to the aforementioned embodiment.

[0070] To summarize the above, the substrate baking equipment 200 in each embodiment, by virtue of the inner furnace 22 having at least two air inlet sides, and the hot air flow generated by the air inlet device 3 can flow into the baking chamber 226 through the air inlet sides to bake the substrate 1, can improve the baking temperature uniformity of each substrate 1, so that the temperature of all parts of each substrate 1 extending along the first direction X tends to be consistent, thereby improving the baking quality and truly achieving the purpose claimed by the present invention.

Claims

1. A substrate baking device, characterized in that: The substrate baking equipment includes a baking oven and an air intake device. The baking oven defines a baking chamber. The baking oven includes at least two air intake sides and at least one air outlet side. The air intake side and the air outlet side are respectively located on three different sides of the baking chamber. The air intake device is arranged in the baking oven and is at least connected to the air intake side. The air intake device is used to generate a hot air flow and enable the hot air flow to flow into the baking chamber through the air intake side. The baking oven includes an inner furnace, which has the baking chamber and the air intake side. The air intake device includes a guide shell, a first heater, and a second heater. The guide shell covers the air intake side. The first heater and the second heater are arranged in the guide shell and are respectively adjacent to the outer side of the air intake side to generate hot air.

2. The substrate baking equipment according to claim 1, characterized in that: The baking oven includes three air inlet sides, which are a first air inlet side, a second air inlet side, and a third air inlet side. The first air inlet side and the air outlet side are respectively located on two opposite sides of the baking chamber, and the second air inlet side and the third air inlet side are respectively located on the other two opposite sides of the baking chamber. The air inlet device connects the first air inlet side, the second air inlet side and the third air inlet side, and the hot air flow generated by the air inlet device can flow into the baking chamber through the first air inlet side, the second air inlet side and the third air inlet side.

3. The substrate baking equipment according to claim 2, characterized in that: The air outlet side, the baking chamber and the first air inlet side are arranged along a first direction, the third air inlet side, the baking chamber and the second air inlet side are arranged along a second direction perpendicular to the first direction, the baking oven further comprises two side panels respectively located on the other two opposite sides of the baking chamber, the side panels are spaced apart along a third direction, the third direction being perpendicular to the first direction and the second direction, the air inlet device comprises an air guide housing, a first heater, a first blower, and a second blower, the air guide housing covers the first air inlet side, the second air inlet side, the third air inlet side and the side panels, the first heater is arranged in the air guide housing to generate hot air, the first blower includes a first blower fan arranged in the air guide housing and located on the outside of one of the side panels, the first blower is used to generate an airflow toward the first air inlet side, the second blower includes a second blower fan arranged in the air guide housing and located on the outside of the other side panel, the second blower is used to generate an airflow toward the second air inlet side and the third air inlet side.

4. The substrate baking equipment according to claim 3, characterized in that: The guide shell defines a heating chamber for accommodating the first heater and communicating with the second air intake side, a first chamber for accommodating the first blower fan and communicating with the heating chamber, a first guide channel connected between the first blower fan and the first air intake side, a second chamber for accommodating the second blower fan, a second guide channel connected between the second blower fan and the heating chamber, a third guide channel connected between the second blower fan and the third air intake side, a first return hole communicated with the first chamber, and a second return hole communicated with the second chamber. The baking oven also defines a return channel connected between the outlet side, the first return hole, and the second return hole.

5. The substrate baking equipment according to claim 4, characterized in that: The air intake device includes a second heater disposed in the third flow guide passage and adjacent to an outer side of the third air intake side.

6. The substrate baking equipment according to claim 4, characterized in that: The first air inlet side is formed with a plurality of first air inlet holes connected between the baking chamber and the first guide channel, the second air inlet side is formed with a plurality of second air inlet holes connected between the baking chamber and the heating chamber, the third air inlet side is formed with a plurality of third air inlet holes connected between the baking chamber and the third guide channel, and the outlet side is formed with a plurality of air outlet holes connected between the baking chamber and the return channel.

7. The substrate baking device according to any one of claims 4 to 6, characterized in that: The baking oven includes a box shell, an inner furnace arranged in the box shell, and a door arranged on the box shell, the box shell defines an opening corresponding to the position of the baking chamber, the inner furnace has the baking chamber, the first air inlet side, the second air inlet side, the third air inlet side and the side panel, the door has a door panel for controlling the opening and closing of the opening, and a guide shell arranged on the back of the door panel and corresponding to the baking chamber, the guide shell has the air outlet side, and the guide shell and the door panel jointly define the return flow channel.

8. The substrate baking equipment according to claim 7, characterized in that: The guide shell has an end wall that is separated from the door panel and defines the air outlet side, and a surrounding wall connected between the outer periphery of the end wall and the door panel. The door panel, the end wall and the surrounding wall jointly define a diversion space connected to the air outlet side. The surrounding wall is formed with a first exhaust hole connected between the diversion space and the first return hole, and a second exhaust hole connected between the diversion space and the second return hole. The diversion space, the first exhaust hole and the second exhaust hole together constitute the return channel.

9. The substrate baking equipment according to claim 1, characterized in that: The air inlet sides are respectively located at two opposite sides of the baking chamber.

10. The substrate baking equipment according to claim 1, characterized in that: The baking oven includes two air inlet sides and two air outlet sides, the air inlet sides are respectively a first air inlet side and a second air inlet side, the first air inlet side and the second air inlet side are respectively located on two opposite sides of the baking chamber, the air outlet sides are respectively a first air outlet side and a second air outlet side, the first air outlet side and the second air outlet side are respectively located on the other two opposite sides of the baking chamber, the air inlet device is connected to the first air inlet side, the second air inlet side and the second air outlet side, and the hot air flow generated by the air inlet device can flow into the baking chamber through the first air inlet side and the second air inlet side.

11. The substrate baking equipment according to claim 10, characterized in that: The first air outlet side, the baking chamber and the second air outlet side are arranged along a first direction, the second air inlet side, the baking chamber and the first air inlet side are arranged along a second direction perpendicular to the first direction, the baking oven also includes two side panels respectively located on the other two opposite sides of the baking chamber, the side panels are spaced apart along a third direction, and the third direction is perpendicular to the first direction and the second direction, the air inlet device includes a guide shell, a first heater, a first blower, and a second blower, the guide shell covers the second air outlet side, the first air inlet side, the second air inlet side and the side panels, the first heater is arranged in the guide shell to generate hot air, the first blower includes a first blower fan arranged in the guide shell and located on the outside of one of the side panels, the first blower is used to generate an airflow flowing toward the outside of the guide shell, the second blower includes a second blower fan arranged in the guide shell and located on the outside of the other side panel, the second blower is used to generate an airflow flowing toward the first air inlet side and the second air inlet side.

12. The substrate baking equipment according to claim 11, characterized in that: The guide shell defines a heating chamber for accommodating the first heater and connected to the first air inlet side, a first chamber for accommodating the first blower fan, a first guide channel connected between the first chamber and the second air outlet side, a second chamber for accommodating the second blower fan, a second guide channel connected between the second blower fan and the heating chamber, a third guide channel connected between the second blower fan and the second air inlet side, and a return hole connected to the second chamber. The baking oven also defines a return channel connected between the first air outlet side and the return hole.

13. The substrate baking equipment according to claim 12, characterized in that: The air intake device includes a second heater disposed in the third flow guide passage and adjacent to an outer side of the second air intake side.

14. The substrate baking equipment according to claim 12, characterized in that: The first air inlet side is formed with a plurality of first air inlet holes connected between the baking chamber and the heating chamber, the second air inlet side is formed with a plurality of second air inlet holes connected between the baking chamber and the third guide channel, the first air outlet side is formed with a plurality of first air outlet holes connected between the baking chamber and the return channel, and the second air outlet side is formed with a plurality of second air outlet holes connected between the baking chamber and the first guide channel.

15. The substrate baking device according to any one of claims 12 to 14, characterized in that: The baking oven includes a box shell, an inner furnace arranged in the box shell, and a door arranged on the box shell, the box shell defines an opening corresponding to the position of the baking chamber, the inner furnace has the baking chamber, the second air outlet side, the first air inlet side, the second air inlet side and the side panel, the door has a door panel for controlling the opening and closing of the opening, and a guide shell arranged on the back of the door panel and corresponding to the baking chamber, the guide shell has the first air outlet side, and the guide shell and the door panel jointly define the return flow channel.

16. The substrate baking equipment according to claim 15, characterized in that: The guide shell has an end wall that is separated from the door panel and defines the first air outlet side, and a surrounding wall connected between the outer periphery of the end wall and the door panel. The door panel, the end wall and the surrounding wall jointly define a diversion space connected to the first air outlet side. The surrounding wall is formed with an exhaust hole connected between the diversion space and the return hole. The diversion space and the exhaust hole together constitute the return channel.

17. The substrate baking equipment according to claim 4 or 12, characterized in that: The second blower fan is formed with a first air outlet communicating with the second flow guide channel and a second air outlet communicating with the third flow guide channel.

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