Sensor core and pressure sensor

By introducing a stress isolation section and a core connection section into the sensor core, and utilizing base materials with different coefficients of thermal expansion to absorb deformation stress, the measurement accuracy problem caused by the difference in the coefficients of thermal expansion between the sensor base and the core is solved, thus achieving high-precision pressure sensor measurement.

CN116358745BActive Publication Date: 2026-02-27BEIJING CONST INSTR TECH INC
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Patent Information

Application Number
CN202310229212.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-03-10
Publication Date
2026-02-27
Estimated Expiration
2043-03-10

AI Technical Summary

Technical Problem

Due to the difference in thermal expansion coefficients between the sensor base and the sensor core, deformation stress is generated when the ambient temperature changes, affecting the measurement accuracy of the pressure sensor. Existing technologies are unable to effectively solve this problem.

Method used

A sensor core structure was designed, including a core body and a sensor base. By setting a stress isolation part and a core connection part on the core body, and using substrate materials with different thermal expansion coefficients to absorb deformation stress, the fixed point is kept away from the pressure-sensitive unit, thereby reducing the transmission of deformation stress.

Benefits of technology

It effectively eliminates the influence of deformation stress on the pressure-sensitive unit, ensuring the measurement accuracy of the pressure sensor, especially maintaining high precision under high pressure and high temperature environments.

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Abstract

The application provides a sensor core and a pressure sensor. The pressure sensor comprises a core body, and the core body comprises a pressure-sensitive unit. The pressure-sensitive unit is distributed along a first dimension. The pressure-sensitive unit generates different deformations at at least two different positions along the first dimension according to pressure applied to the pressure-sensitive unit, and further generates a pressure electric signal. The core body extends along the first dimension on one side of the pressure-sensitive unit, and forms a stress isolation portion and a core connecting portion. The stress isolation portion is located between the core connecting portion and the pressure-sensitive unit. The core connecting portion is provided with at least one core connecting point. The core connecting point is electrically connected to the pressure-sensitive unit to transmit the pressure electric signal. In a working state, the core connecting portion is used for connecting a sensor base. The application can eliminate the component and transmission of the deformation stress along the first dimension as much as possible, thereby eliminating the influence of the deformation stress on the pressure-sensitive unit and ensuring the measurement accuracy of the pressure sensor.
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