A deviation correction execution mechanism and a plasma device

Abstract

The present application relates to the technical field of plasma processing equipment, and particularly relates to a deviation rectifying execution mechanism and a plasma device, the deviation rectifying execution mechanism adopts a first guide wheel to realize linear motion of a moving seat relative to a base, replaces the structure of an existing linear guide rail and a sliding block, reduces or even eliminates the use of lubricating grease, thereby eliminating the problem of sticking or even jamming of the lubricating grease due to increased viscosity in a vacuum environment, and the first guide wheel and the second guide wheel of the present application are both made of ceramic material, thereby avoiding the problem of corrosion and damage of plastic parts used in the existing linear guide rail in plasma production, thereby improving the stability of the mechanism operation and the service life of the mechanism.

Description

Technical Field

[0001] This invention relates to the field of plasma processing equipment technology, and in particular to a correction actuator and a plasma device. Background Technology

[0002] Vacuum plasma treatment equipment is widely used in plasma cleaning, etching, plasma plating, plasma coating, plasma ashing, surface activation, and modification. Through plasma treatment, the wettability of materials can be improved, enabling coating and plating operations on various materials, enhancing adhesion and bonding strength, and removing oil, grease, and organic contaminants. Roll-to-roll vacuum plasma treatment equipment is generally equipped with tension adjustment and web-alignment systems to ensure uniformity. These systems mainly include electric drive components, web-alignment actuators, and control systems. Because of the corrosive gases present inside vacuum plasma equipment, electrical components cannot be directly installed inside the cavity.

[0003] The existing correction actuator uses a slider and a linear guide to connect the receiving rack and the vacuum chamber base for guidance. The slider contains balls coated with grease. However, in a vacuum environment, the viscosity of the grease increases, which can easily lead to increased sliding resistance between the slider and the linear guide, or even jamming and damage. Summary of the Invention

[0004] To achieve the above objectives, the present invention provides a correction actuator, which is mounted on a base of a vacuum chamber and includes:

[0005] A movable base is connected to a linear drive source, and a take-up roller is mounted on the movable base;

[0006] A plurality of first guide wheels are disposed at the lower end of the movable seat and abut against the base, and the axis of the first guide wheels is horizontally arranged;

[0007] Several second guide wheels are disposed at the lower end of the movable base, and the axes of the second guide wheels are vertically arranged;

[0008] The second limiting member is fixedly installed on the base and located on one side of the second guide wheel;

[0009] Both the first guide wheel and the second guide wheel are made of ceramic material.

[0010] In some possible implementations, the lower end of the movable seat is provided with a support member, the support member having a mounting hole, one end of the rotating shaft passing through the mounting hole, and the other end being rotatably connected to the first guide wheel.

[0011] In some possible implementations, the base is further provided with a first limiting member, which is located above the first guide wheel.

[0012] In some possible implementations, the base is provided with a mounting block, the first limiting member is flat and disposed at the upper end of the mounting block, and a lifting screw and a locking screw are provided between the first limiting member and the mounting block.

[0013] In some possible implementations, the second limiting member is disposed below the movable seat and outside the second guide wheel.

[0014] In some possible implementations, a vertically oriented mounting shaft is also included, the movable seat having a threaded hole, the lower end of the mounting shaft being rotatably connected to the second guide wheel, and the upper end of the mounting shaft being connected to the movable seat via a screw passing through the threaded hole.

[0015] In some possible implementations, the screw is eccentrically positioned relative to the mounting shaft.

[0016] In some possible implementations, the first guide wheels are four in number and symmetrically distributed at the four corners of the movable seat.

[0017] In some possible implementations, the second guide wheel has four parts and is supported at the four corners of the movable seat.

[0018] A plasma device includes a base and a correction actuator as described in the above embodiment. The vacuum chamber is disposed on the base, and a correction sensor is disposed on the vacuum chamber in front of the take-up roller. The correction sensor is signal-connected to the control system.

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows: The correction actuator of the present invention uses a first guide wheel to realize the linear motion of the moving seat relative to the base, replacing the existing linear guide rail and slider structure, reducing or even eliminating the need for lubricating grease, thereby eliminating the problem of grease sticking or even jamming due to increased viscosity in a vacuum environment. Furthermore, the first guide wheel and the second guide wheel of the present invention are both made of ceramic material, avoiding the problem of corrosion damage to the plastic parts used in the existing linear guide rails during plasma production, thereby improving the stability of the mechanism operation and the service life of the mechanism. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A three-dimensional structural schematic diagram of the correction actuator provided in an embodiment of the present invention;

[0022] Figure 2 This is a structural side view of the correction actuator provided in an embodiment of the present invention;

[0023] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0024] Figure 4 An exploded view of the correction actuator provided in an embodiment of the present invention;

[0025] Figure 5 yes Figure 4 Enlarged diagram of point B in the middle.

[0026] Figure label:

[0027] Base 1;

[0028] Movable seat 10; threaded hole 101; linear drive source 11; first guide wheel 12; support member 121; mounting hole 122; rotating shaft 123; second guide wheel 13; mounting shaft 131; screw 132; second limiting member 14; first limiting member 15; mounting block 151;

[0029] 20 receiving rollers. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Hereinafter, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this disclosure, unless otherwise stated, "a plurality of" means two or more.

[0031] Reference Figures 1 to 5The illustrated guideline actuator is mounted on a base 1 of a vacuum chamber. The actuator includes a movable seat 10 positioned above the base 1, a take-up roller 20 mounted on the movable seat 10 and capable of linear reciprocating relative to the base 1. One end of the movable seat 10 is connected to a linear drive source 11, which is installed outside the vacuum chamber to prevent damage from corrosive substances within the vacuum chamber. The output end of the linear drive source 11 is connected to one end of the movable seat 10. The linear drive source 11 can drive the movable seat 10 to reciprocate linearly relative to the base 1 along the horizontal longitudinal direction. The lower end of the movable seat 10 is provided with several first guide wheels 12. This embodiment uses four first guide wheels 12 as an example, and these four first guide wheels 12 are respectively located at the four corners of the movable seat 10. The axis of the first guide wheel 12 is horizontally set, and its lower end abuts against the base 1. The first guide wheels 12 are used to support the movable seat 10 above the base 1 and realize the linear linear movement of the movable seat 10 relative to the base 1 along the horizontal longitudinal direction. The lower end of the 10 is also provided with several second guide wheels 13. This embodiment takes four second guide wheels 13 as an example for explanation. The four second guide wheels 13 are respectively arranged at the four corners of the moving seat 10. The second guide wheels 13 are arranged vertically. A second limiting member 14 is also provided on one side of the second guide wheel 13 on the base 1. The second limiting member 14 is used to limit the horizontal movement of the moving seat 10 relative to the base 1 to stabilize the tension of the winding material. In this embodiment, the first guide wheel 12 and the second guide wheel 13 are both made of ceramic material. Compared with the existing linear guide rail and slider structure, the present invention can reduce or even eliminate the use of grease, thereby eliminating the problem of grease viscosity increasing in a vacuum environment, which leads to jamming or even seizing. It can also avoid corrosive substances in the vacuum chamber from corroding and damaging the plastic parts of the linear guide rail, thereby improving the operating stability and service life of the correction actuator. Compared with the conventional method of improving the linear guide rail design and using vacuum grease, the correction actuator of the present invention has the advantages of low cost and easy maintenance.

[0032] Among some possible implementation methods, refer to Figure 3 and Figure 5 As shown, a support member 121 is fixedly installed at the lower end of the movable base 10 by means of bolt connection, snap-fit ​​or welding. The support member 121 extends vertically downward. A horizontal mounting hole 122 is opened at the end of the support member 121 away from the movable base 10. The first guide wheel 12 is rotatably connected to one end of the rotating shaft 123. The other end of the rotating shaft 123 is fixedly inserted into the mounting hole 122, thereby realizing the rotatable connection between the first guide wheel 12 and the movable base 10.

[0033] Among some possible implementation methods, refer to Figure 3 and Figure 5As shown, a first limiting member 15 is also provided on the base 1, and a second limiting member is provided above the first guide wheel 12. The purpose is to prevent the movable seat 10 from tilting to the side due to the tension force, so that the first guide wheel 12 moves vertically upward. In this embodiment, there is a small gap between the lower end face of the first limiting member 15 and the upper surface of the first guide wheel 12. This small gap can be adjusted according to actual operation. Furthermore, a mounting block 151 is provided on the base 1. The first limiting member 15 is flat and is provided at the upper end of the mounting block 151. Part of the first limiting member 15 extends horizontally from the upper end of the mounting block 151 to the upper part of the first guide wheel 12. A lifting screw and a locking screw are provided between the first limiting member 15 and the mounting block 151. In specific operation, the lifting screw is turned to support and lift the first limiting member 15, thereby adjusting the height of the first limiting member 15 relative to the base 1 and adjusting the gap between the lower end face of the first limiting member 15 and the upper surface of the first guide wheel 12. After adjustment, it can be fixed by the locking screw.

[0034] Among some possible implementation methods, refer to Figure 3 and Figure 5 As shown, the second limiting member 14 is located below the movable seat 10 and outside the second guide wheel 13. The four second limiting members 14 are divided into two groups and mirror images of each other on the base 1. The four second guide wheels 13 are all located within the frame formed by the four second limiting members 14. When the second guide wheel 13 moves horizontally with the movable seat 10, at least two second limiting members 14 will contact the second guide wheel 13 to limit its movement and prevent the movable seat 10 from moving too far horizontally, which could cause unstable tension. The distance between the two mirror images of the second limiting members 14 can be adjusted according to actual operation.

[0035] Among some possible implementation methods, refer to Figure 3 and Figure 5 As shown, the second guide wheel 13 is rotatably connected to the lower end of the mounting shaft 131. The upper end of the mounting shaft 131 is provided with a screw 132. The movable seat 10 is provided with a threaded hole 101 that mates with the screw 132. The second guide wheel 13 / mounting shaft 131 is screwed into the threaded hole 101 through the screw 132 to achieve its connection with the movable seat 10. Furthermore, the screw 132 is eccentrically set with the mounting shaft 131. At this time, turning the screw 132 can adjust the horizontal position of the second guide wheel 13. In this embodiment, it is only necessary to adjust the horizontal position of the second guide wheel 13, that is, to adjust the gap between the second guide wheel 13 and the second limiting member 14. At this time, turning the eccentrically set screw 132 can achieve this. In order to avoid the problem of the screw 132 becoming loose due to the biasing force of the second limiting member 14 on the second guide wheel 13, the end of the screw 132 away from the mounting shaft 131 extends out from the upper end of the movable seat 10 and is fixed by screwing a nut.

[0036] It should be noted that the linear drive source 11 in all the above embodiments is preferably a servo motor that can rotate in both directions, which drives the lead screw to rotate and drives the moving block to move linearly in the horizontal longitudinal direction. One end of the moving seat 10 is fixedly connected to the moving block so that it moves linearly in the horizontal longitudinal direction with the moving block. Of course, a more intuitive linear electric cylinder can also be used for driving.

[0037] The present invention also provides a plasma device, which includes a base and a web-correcting actuator as described in the above embodiment, as well as a web-correcting sensor and a control system. A vacuum chamber is disposed on the base, and the web-correcting sensor is disposed in the vacuum chamber and located in front of the take-up roller 20. The web-correcting sensor and the linear drive source 11 are both connected to the control system. The control system can adopt conventional designs and models in the industry, which typically include a programmable logic controller. The basic principle of web correction is: the web-correcting sensor senses the offset of the take-up material and sends the sensing signal to the control system. The control system controls the linear drive source 11 to start or reverse according to the received sensing signal, thereby driving the moving seat 10 / take-up roller 20 to move linearly in the horizontal longitudinal direction to achieve the web-correcting function.

[0038] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions within the technical scope disclosed in the present invention should be covered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A correction actuator, mounted on a base (1) of a vacuum chamber, characterized in that, include: A movable seat (10) is connected to a linear drive source (11), and a receiving roller (20) is mounted on the movable seat (10); A plurality of first guide wheels (12) are disposed at the lower end of the movable seat (10) and abut against the base (1), and the axis of the first guide wheels (12) is horizontally arranged; Several second guide wheels (13) are disposed at the lower end of the movable seat (10), and the axes of the second guide wheels (13) are vertically arranged; The second limiting member (14) is fixedly installed on the base (1) and located on one side of the second guide wheel (13); The first guide wheel (12) and the second guide wheel (13) are both made of ceramic material.

2. The correction actuator according to claim 1, characterized in that, The lower end of the movable seat (10) is provided with a support member (121), and the support member (121) is provided with a mounting hole (122). One end of the rotating shaft (123) passes through the mounting hole (122), and the other end is rotatably connected to the first guide wheel (12).

3. The correction actuator according to claim 2, characterized in that, The base (1) is also provided with a first limiting member (15), which is located above the first guide wheel (12).

4. The correction actuator according to claim 3, characterized in that, The base (1) is provided with an installation block (151), and the first limiting member (15) is flat and provided at the upper end of the installation block (151). A lifting screw and a locking screw are provided between the first limiting member (15) and the installation block (151).

5. The correction actuator according to claim 1, characterized in that, The second limiting member (14) is disposed below the movable seat (10) and outside the second guide wheel (13).

6. The correction actuator according to claim 1, characterized in that, It also includes a vertically arranged mounting shaft (131), the movable seat (10) is provided with a threaded hole (101), the lower end of the mounting shaft (131) is rotatably connected to the second guide wheel (13), and the upper end of the mounting shaft (131) is connected to the movable seat (10) through the threaded hole (101) via a screw (132).

7. The correction actuator according to claim 6, characterized in that, The screw (132) is eccentrically positioned relative to the mounting shaft (131).

8. The correction actuator according to claim 1, characterized in that, The first guide wheel (12) has four parts and is symmetrically distributed at the four corners of the movable seat (10).

9. The correction actuator according to claim 1, characterized in that, The second guide wheel (13) has four parts and is symmetrically distributed at the four corners of the movable seat (10).

10. A plasma device, characterized in that, The system includes a base and a correction actuator as described in any one of claims 1 to 9. The vacuum chamber is disposed on the base, and a correction sensor is disposed on the vacuum chamber in front of the receiving roller (20). The correction sensor is connected to the control system signal.

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