Temperature control system, vacuum coating equipment and cascade control method

Abstract

The application discloses a temperature control system, a vacuum coating equipment and a cascade control method. The temperature control system comprises a temperature rising assembly, a refrigeration assembly, a first PID controller and a second PID controller. The first PID controller comprises a first receiving end, a second receiving end, a first output end and a second output end, the first receiving end and the second receiving end are used for receiving a target temperature signal and an actual temperature signal respectively, and the first output end is electrically connected with the temperature rising assembly. The second PID controller comprises a third receiving end, a fourth receiving end and a third output end, the third receiving end is connected with the second output end, the fourth receiving end is used for receiving a temperature signal of a cooling liquid of the refrigeration assembly, and the third output end is electrically connected with the refrigeration assembly. Through the cascade connection of the first PID controller and the second PID controller and the control of the temperature rising assembly and the refrigeration assembly by the first PID controller and the second PID controller respectively, the work of the temperature rising assembly and the refrigeration assembly is linked, so that the temperature switching efficiency is improved.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and in particular to a temperature control system, vacuum coating equipment, and cascade control method. Background Technology

[0002] In coating processes, some processes require heating the substrate stage to achieve higher temperatures, while others require cooling it to achieve lower temperatures. To improve the applicability of the substrate stage and reduce the number of substrate stages required in the same vacuum chamber, related technologies incorporate heating plates and cooling channels on the substrate stage, enabling it to simultaneously regulate both heating and cooling.

[0003] However, due to the limited amount of heat transfer medium within the vacuum chamber, the substrate stage takes a long time to recover its temperature naturally, making it difficult to stabilize the temperature within the set range when switching between different temperature-required coating processes. Furthermore, because both the flow and heat transfer of the coolant are slow, the hysteresis of the cooling components is greater than that of the heating components, making temperature control during cooling more challenging. This results in a slow switching speed and lower temperature control accuracy when switching from high to low temperatures. Summary of the Invention

[0004] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a temperature control system that can improve the efficiency of temperature switching.

[0005] The present invention also proposes a vacuum coating equipment having the above-mentioned temperature control system;

[0006] The present invention also proposes a cascade control method based on the above-mentioned temperature control system.

[0007] A temperature control system according to a first aspect of the present invention includes:

[0008] Heating components;

[0009] Refrigeration components;

[0010] The first PID controller includes a first receiving end, a second receiving end, a first output end, and a second output end. The first receiving end and the second receiving end are respectively used to receive the target temperature signal and the actual temperature signal. The first output end is electrically connected to the heating component.

[0011] The second PID controller includes a third receiving end, a fourth receiving end, and a third output end. The third receiving end is connected to the second output end. The fourth receiving end is used to receive the temperature signal of the coolant in the refrigeration component. The third output end is electrically connected to the refrigeration component.

[0012] The temperature control system according to embodiments of the present invention has at least the following beneficial effects: By connecting a first PID controller and a second PID controller in series, the temperature control system allows the operator to input the target temperature value only once to achieve temperature control. Furthermore, by controlling the heating component and the cooling component respectively through the first and second PID controllers, the operation of the heating and cooling components is linked, thereby improving the efficiency of temperature switching, enabling the temperature to stabilize more quickly within the set range, and improving the temperature control accuracy after temperature switching, thus reducing the temperature fluctuation range.

[0013] According to some embodiments of the present invention, the refrigeration assembly includes a liquid outlet pipe having a liquid outlet; the temperature control system further includes a first temperature sensor having a first detection part and a first connection part connected to each other, the first detection part being disposed at the liquid outlet for detecting the temperature of the coolant, and the first connection part being electrically connected to the fourth receiving end for inputting the temperature value of the coolant to the second PID controller.

[0014] According to some embodiments of the present invention, the refrigeration assembly includes a liquid outlet pipe and an electromagnetic flow valve, the liquid outlet pipe having a liquid outlet, and the electromagnetic flow valve being used to control the opening and closing of the liquid outlet and the flow rate of the coolant.

[0015] According to a second aspect of the present invention, a vacuum coating apparatus includes a substrate stage and a temperature control system as described in the above embodiments. The substrate stage is provided with a receiving cavity and a flow channel. The heating component includes a heating element housed in the receiving cavity. The cooling component is used to inject coolant into the flow channel.

[0016] The vacuum coating equipment according to embodiments of the present invention has at least the following beneficial effects: by applying the temperature control system of the present application embodiments, the temperature of the substrate stage can be adjusted to a set temperature range, and the efficiency of temperature switching of the vacuum coating equipment can be improved, as well as the temperature control accuracy of the vacuum coating equipment can be improved, thereby improving the efficiency of vacuum coating and ensuring the coating effect of vacuum.

[0017] According to some embodiments of the present invention, the substrate stage is provided with a working plane, the vacuum coating equipment includes a second temperature sensor, the second temperature sensor has a second detection part and a second connection part connected to each other, the second detection part is disposed on the working plane, and the second connection part is electrically connected to the second receiving end.

[0018] According to some embodiments of the present invention, the substrate stage is provided with a working plane, and the flow channel is disposed between the working plane and the receiving cavity.

[0019] According to some embodiments of the present invention, the vacuum coating apparatus further includes a third temperature sensor disposed within the accommodating cavity.

[0020] According to some embodiments of the present invention, the vacuum coating equipment includes a vacuum chamber, the vacuum chamber being provided with a vacuum cavity, the substrate stage being located within the vacuum cavity, and the cooling assembly including a liquid outlet pipe, the liquid outlet pipe including a first pipe and a second pipe, the first pipe being provided with a liquid delivery pipe for circulating coolant, the second pipe being provided with a vacuum pipe, the first pipe passing through the vacuum pipe, wherein the first pipe is provided both inside and outside the vacuum chamber, and the second pipe is provided outside the vacuum chamber.

[0021] A cascade control method according to a third aspect of the present invention, used for temperature control, includes the following steps:

[0022] Prepare the heating component, the cooling component, the first PID controller, and the second PID controller;

[0023] The target temperature value and the actual temperature value are input into the first PID controller for processing, and a first control value is generated.

[0024] The first control value is input into the heating component, and the heating component adjusts its working state according to the first control value;

[0025] The first control value and the temperature value of the coolant in the refrigeration component are input into the second PID controller for processing, and a second control value is generated.

[0026] Input the second control value into the refrigeration component;

[0027] The refrigeration component adjusts its operating state according to the second control value.

[0028] The cascade control method according to embodiments of the present invention has at least the following beneficial effects: by inputting the first control value generated by the first PID controller into the second PID controller as the target value for processing, and inputting the temperature value of the coolant of the refrigeration component into the second PID controller as the actual value for processing, the temperature control accuracy of the refrigeration component can be improved. Furthermore, the first PID controller is equivalent to a first-stage PID controller, and the second PID controller is equivalent to a second-stage PID controller. By connecting the first PID controller and the second PID controller in series to form a first-stage PID controller and a second-stage PID controller, the first PID controller and the second PID controller can control the heating component and the refrigeration component separately while simultaneously performing coordinated control, thereby improving the efficiency of temperature switching, enabling the temperature to stabilize more quickly within the set range, and improving the temperature control accuracy after temperature switching, while reducing the temperature fluctuation range.

[0029] According to some embodiments of the present invention, the refrigeration component includes a liquid outlet pipe having a liquid outlet; before inputting the temperature value of the coolant of the refrigeration component into the second PID controller, the method further includes the following step: detecting the temperature of the coolant at the liquid outlet as the temperature value of the coolant of the refrigeration component.

[0030] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0031] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0032] Figure 1 This is a schematic diagram of the temperature control system according to an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of a vacuum coating apparatus according to an embodiment of the present invention;

[0034] Figure 3 This is a partial schematic diagram of the vacuum coating equipment according to an embodiment of the present invention;

[0035] Figure 4 for Figure 2 A partial schematic diagram of the outlet pipe;

[0036] Figure 5 This is a flowchart of the cascade control method according to an embodiment of the present invention;

[0037] Figure 6 This is a partial flowchart of a cascade control method according to another embodiment of the present invention.

[0038] Figure label:

[0039] Vacuum coating equipment 10, substrate 20;

[0040] Temperature control system 100, heating component 110, heating element 111, cooling component 120, liquid outlet pipe 121, liquid outlet 1211, corrugated pipe 1212, first pipe 1213, infusion pipeline 12131, second pipe 1214, vacuum pipeline 12141, electromagnetic flow valve 122, first PID controller 130, first receiving end 131, second receiving end 132, first output end 133, second output end 134, second PID controller 140, third receiving end 141, fourth receiving end 142, third output end 143, first temperature sensor 150, first detection unit 151, first connecting part 152, second temperature sensor 160, second detection unit 161, second connecting part 162, third temperature sensor 170;

[0041] Substrate stage 200, receiving cavity 201, flow channel 202, working plane 203;

[0042] Vacuum chamber 300, vacuum cavity 310. Detailed Implementation

[0043] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0044] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0045] In the description of this invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0046] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0047] In the description of this invention, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0048] To address the challenges of controlling the cooling temperature and maintaining a stable temperature during substrate stage temperature switching in related technologies, this application employs a series connection of two PID controllers. These two PID controllers control the cooling component and the heating component respectively, thereby reducing the difficulty of temperature control and improving the efficiency of substrate stage temperature switching.

[0049] The temperature control system, vacuum coating equipment, and cascade control method of this application are described below with reference to the accompanying drawings.

[0050] Reference Figure 1 According to a first aspect of the present invention, a temperature control system 100 includes a heating component 110, a cooling component 120, a first PID controller 130, and a second PID controller 140. The first PID controller 130 includes a first receiving terminal 131, a second receiving terminal 132, a first output terminal 133, and a second output terminal 134. The first receiving terminal 131 and the second receiving terminal 132 are respectively used to receive a target temperature signal and an actual temperature signal. The first output terminal 133 is electrically connected to the heating component 110. The second PID controller 140 includes a third receiving terminal 141, a fourth receiving terminal 142, and a third output terminal 143. The third receiving terminal 141 is connected to the second output terminal 134. The fourth receiving terminal 142 is used to receive the temperature signal of the coolant in the cooling component 120. The third output terminal 143 is electrically connected to the cooling component 120. By setting a first output terminal 133 and a second output terminal 134 in the first PID controller 130, the heating component 110 can be controlled by the first PID controller 130, and the output first control value is used as the target value of the second PID controller 140. After processing the first control value and the temperature signal of the coolant, the second PID controller 140 can output a second control value, thereby controlling the cooling component 120.

[0051] The temperature control system 100 of this application connects a first PID controller 130 and a second PID controller 140 in series, allowing the operator to input the target temperature value only once to achieve temperature control of the system 100. The first PID controller 130 and the second PID controller 140 control the heating component 110 and the cooling component 120 respectively, enabling the heating component 110 and the cooling component 120 to work in tandem. This improves the efficiency of temperature switching, allows the temperature to stabilize more quickly within the set range, and improves the temperature control accuracy after temperature switching, reducing the temperature fluctuation range.

[0052] Specifically, when the actual temperature exceeds the target value, cooling can be achieved through the cooling component 120. When the actual temperature is below the target value, heating can be achieved through the heating component 110. During the actual adjustment process, the temperature fluctuates within the range above and below the target value due to the continuous switching between heating and cooling. Since heating is the easiest to control and provides the fastest feedback compared to cooling and natural recovery within the vacuum chamber 310, adjusting the temperature through heating, compared to separately adjusting the opening and closing of the cooling component 120 or utilizing natural recovery within the vacuum chamber 310, effectively reduces the difficulty of temperature adjustment, thereby improving the efficiency of temperature switching and the accuracy of temperature control, making the actual temperature closer to the target value.

[0053] It is understood that in embodiments with a high target temperature, such as a target temperature of 300 degrees Celsius, when the heating component 110 overheats, the temperature can be regulated by cooling the cooling component 120 in combination with adjusting the power of the heating component 110, or by adjusting only the power of the heating component 110 in combination with a natural recovery operation. The specific control method can be selected by comparing the hysteresis of the actual cooling component 120 and the hysteresis of the natural recovery operation.

[0054] Specifically, the heating element 111 of the heating component 110 can be selected as a heating plate or heating wire conventional in the art, the coolant of the cooling component 120 can be selected as liquid nitrogen or other liquids used for cooling, and the first PID controller 130 and the second PID controller 140 can be selected as PID controllers conventional in the art.

[0055] Furthermore, refer to Figure 1 and Figure 3The cooling assembly 120 includes a liquid outlet pipe 121 with a liquid outlet 1211. The temperature control system 100 also includes a first temperature sensor 150, which has a first detection part 151 and a first connection part 152 connected to each other. The first detection part 151 is located at the liquid outlet 1211 and is used to detect the temperature of the coolant. The first connection part 152 is electrically connected to a fourth receiving terminal 142 and is used to input the temperature value of the coolant to the second PID controller 140. By setting the first detection part 151 at the liquid outlet 1211, the actual temperature of the coolant when it enters the substrate stage 200 can be accurately determined, thereby reducing the impact of temperature difference caused by heat loss during the transport of the coolant in the liquid outlet pipe 121 on temperature control, and thus improving the temperature control accuracy of the temperature control system 100. Specifically, the liquid outlet pipe 121 can be selected as a delivery pipe capable of withstanding low temperatures. The specific location of the first detection unit 151 can be set inside the liquid outlet pipe 121 at a position corresponding to the liquid outlet 1211, or it can be set on the substrate stage 200 at a position corresponding to the outside of the liquid outlet 1211.

[0056] As an improvement to the above scheme, refer to Figure 2 The refrigeration assembly 120 also includes an electromagnetic flow valve 122, which controls the opening and closing of the outlet 1211 and the flow rate of the coolant. By controlling the flow and volume of the coolant through the electromagnetic flow valve 122, compared to controlling the opening and closing of the outlet 1211 solely with a conventional solenoid valve, the cooling effect can be further fine-tuned by adjusting the coolant flow rate, thereby improving the overall temperature control accuracy of the temperature control system 100. Specifically, the electromagnetic flow valve 122 can be selected as a conventional electromagnetic flow valve capable of operating at low temperatures. The opening degree of the electromagnetic flow valve 122 is adjustable, and the coolant flow rate can be controlled by controlling the valve opening degree.

[0057] As an improvement to the above scheme, referring to Figure 3 At least a portion of the outlet pipe 121 is configured as a bellows 1212. Since the bellows 1212 is elastic, it can compensate for the dimensional error when the outlet pipe 121 is assembled with the substrate stage 200, thereby improving the stability of the coolant delivery.

[0058] Reference Figure 2 and Figure 3According to a second aspect embodiment of the present invention, a vacuum coating apparatus 10 includes a substrate stage 200 and a temperature control system 100 as described in the above embodiment. The substrate stage 200 is provided with a receiving cavity 201 and a flow channel 202. A heating assembly 110 includes a heating element 111 housed within the receiving cavity 201, and a cooling assembly 120 injects coolant into the flow channel 202. By applying the temperature control system 100 of this application embodiment, the temperature of the substrate stage 200 can be adjusted to a set temperature range, improving the efficiency of temperature switching in the vacuum coating apparatus 10, improving the temperature control accuracy of the vacuum coating apparatus 10, thereby improving the efficiency of vacuum coating and ensuring the coating effect of the vacuum.

[0059] Specifically, the vacuum coating equipment 10 includes a vacuum chamber 300, which is provided with a vacuum cavity 310, and the substrate stage 200 is located inside the vacuum cavity 310.

[0060] Furthermore, refer to Figure 3 The substrate stage 200 is provided with a working plane 203. The vacuum coating equipment 10 includes a second temperature sensor 160. The second temperature sensor 160 has a second detection part 161 and a second connecting part 162 connected to each other. The second detection part 161 is disposed on the working plane 203, and the second connecting part 162 is electrically connected to the second receiving end 132. By disposing of the second temperature sensor 160 on the working plane 203, the temperature of the position on the substrate stage 200 that is in direct contact with the substrate 20 can be detected, thereby obtaining an accurate input value of the actual temperature signal. This improves the accuracy of temperature control by the temperature control system 100 and reduces the impact of uneven heat distribution on temperature control that may exist on the substrate stage 200.

[0061] As an improvement to the above scheme, referring to Figure 3 The flow channel 202 is located between the working plane 203 and the accommodating cavity 201. The heating element 111 of the heating assembly 110 can achieve a temperature increase by increasing the input power, making temperature increase easy. However, the minimum temperature of the coolant in the cooling assembly 120 is constant, and the cooling effect can only be adjusted by changing the coolant flow rate. By placing the flow channel 202 between the working plane 203 and the accommodating cavity 201, the distance between the coolant and the working plane 203 can be reduced, thereby reducing the temperature loss of the coolant during temperature conduction within the substrate stage 200. It can also reduce the temperature loss of the coolant caused by the heat from the heating assembly 110, ensuring the cooling effect of the coolant on the working plane 203 and making temperature regulation more sensitive. On the other hand, compared to the related technology in which the accommodating cavity 201 and the flow channel 202 are set on the same plane parallel to the working plane 203, setting the flow channel 202 between the working plane 203 and the accommodating cavity 201 can reduce the temperature difference between the heating element 111 itself and the external temperature, thereby further extending the service life of the heating element 111.

[0062] Reference Figure 3 In some embodiments, the vacuum coating equipment 10 further includes a third temperature sensor 170, which is disposed within the accommodating cavity 201. The third temperature sensor 170 can measure the temperature of the heating element 111 in real time, ensuring that the heating element 111 has reached the set temperature and enabling timely detection of abnormal temperature rise in the heating element 111, thus allowing for timely shutdown of the equipment and protecting the safety of the vacuum coating equipment 10. Specifically, multiple third temperature sensors 170 can be provided, with additional third temperature sensors 170 respectively disposed at different positions on the substrate stage 200 to detect the highest and lowest temperature points of the substrate stage 200 as a whole, thereby assisting in the operation of the vacuum coating equipment 10.

[0063] Because the coolant temperature is low, frost is prone to form on the outer wall of the pipe when transporting coolant in the atmosphere. To solve this problem, referring to the figure, in some embodiments, the outlet pipe 121 includes a first pipe 1213 and a second pipe 1214. The first pipe 1213 is provided with a liquid delivery pipe 12131 for flowing coolant, and the second pipe 1214 is provided with a vacuum pipe 12141. The first pipe 1213 passes through the vacuum pipe 12141. The first pipe 1213 is provided both inside and outside the vacuum chamber 300, and the second pipe 1214 is located outside the vacuum chamber 300. By covering the first pipe 1213 with the vacuum pipe 12141 of the second pipe 1214, the probability of frost formation can be reduced by utilizing the vacuum environment.

[0064] Reference Figure 5 According to a third aspect of the present invention, the cascade control method includes the following steps:

[0065] S100, heating assembly 110, cooling assembly 120, first PID controller 130 and second PID controller 140;

[0066] S200: Input the target temperature value and the actual temperature value into the first PID controller 130 for processing, and generate the first control value;

[0067] S300: Input the first control value into the heating component 110, and the heating component 110 adjusts its working state according to the first control value;

[0068] S400: Input the first control value and the temperature value of the coolant in the refrigeration component 120 into the second PID controller 140 for processing, and generate the second control value;

[0069] S500, Input the second control value into the refrigeration unit 120;

[0070] S600 and refrigeration component 120 adjust their operating status according to the second control value.

[0071] By inputting the first control value generated by the first PID controller 130 into the second PID controller 140 as the target value for processing, and inputting the temperature value of the coolant in the refrigeration component 120 into the second PID controller 140 as the actual value for processing, the temperature control accuracy of the refrigeration component 120 can be improved. Furthermore, the first PID controller 130 is equivalent to a first-level PID controller, and the second PID controller 140 is equivalent to a second-level PID controller. By connecting the first PID controller 130 and the second PID controller 140 in series to form a first-level PID controller and a second-level PID controller, the first PID controller 130 and the second PID controller 140 can control the heating component 110 and the refrigeration component 120 separately, while also coordinating their control. This improves the efficiency of temperature switching, allows the temperature to stabilize more quickly within the set range, and enhances the temperature control accuracy after temperature switching, reducing the temperature fluctuation range.

[0072] It is understandable that adjusting the operating state of the heating component 110 can be understood as adjusting the on / off state of the heating function and adjusting the heating power of the heating element 111 in the heating component 110. Similarly, the operating state of the cooling component 120 can be understood as adjusting the on / off state of the cooling function and adjusting physical quantities such as the flow rate or flow volume of the coolant in the cooling component 120 to the substrate stage 200.

[0073] Furthermore, refer to Figure 6 Before inputting the temperature value of the coolant in the cooling assembly 120 into the second PID controller 140, the following step is also included: S350, detecting the temperature of the coolant at the outlet 1211 as the temperature value of the coolant in the cooling assembly 120. Through step S350, the actual temperature of the coolant when it enters the substrate stage 200 can be obtained, avoiding the influence of temperature difference caused by heat loss during the coolant's transport in the outlet pipe 121 on temperature control, thereby improving the accuracy of temperature control.

[0074] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments, and various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A temperature control system for vacuum coating equipment, characterized in that, include: Heating components; Refrigeration components; The first PID controller includes a first receiving end, a second receiving end, a first output end, and a second output end. The first receiving end and the second receiving end are respectively used to receive the target temperature signal and the actual temperature signal. The first output end is electrically connected to the heating component. The second PID controller includes a third receiving end, a fourth receiving end, and a third output end. The third receiving end is connected to the second output end. The fourth receiving end is used to receive the temperature signal of the coolant in the refrigeration component. The third output end is electrically connected to the refrigeration component. The first PID controller and the second PID controller communicate to jointly control the heating and cooling of the temperature control system. The first PID controller controls the operation of the heating component and outputs a first control value. The second PID controller receives the first control value and outputs a second control value based on the first control value and the temperature signal to control the operation of the cooling component.

2. The temperature control system according to claim 1, characterized in that, The refrigeration component includes a liquid outlet pipe with a liquid outlet; the temperature control system further includes a first temperature sensor with a first detection part and a first connection part connected to each other. The first detection part is disposed at the liquid outlet and is used to detect the temperature of the coolant. The first connection part is electrically connected to the fourth receiving end and is used to input the temperature value of the coolant to the second PID controller.

3. The temperature control system according to claim 1, characterized in that, The refrigeration assembly includes a liquid outlet pipe and an electromagnetic flow valve. The liquid outlet pipe has a liquid outlet, and the electromagnetic flow valve is used to control the opening and closing of the liquid outlet and the flow rate of the coolant.

4. A vacuum coating equipment, characterized in that, include: The substrate stage is equipped with a receiving cavity and a flow channel; The temperature control system according to any one of claims 1 to 3, wherein the heating component includes a heating element housed within the accommodating cavity, and the cooling component is used to inject coolant into the flow channel.

5. The vacuum coating equipment according to claim 4, characterized in that, The substrate stage is provided with a working plane, and the vacuum coating equipment includes a second temperature sensor. The second temperature sensor has a second detection part and a second connection part that are connected to each other. The second detection part is disposed on the working plane, and the second connection part is electrically connected to the second receiving end.

6. The vacuum coating equipment according to claim 4, characterized in that, The substrate stage is provided with a working plane, and the flow channel is disposed between the working plane and the receiving cavity.

7. The vacuum coating equipment according to claim 4, characterized in that, It also includes a third temperature sensor, which is disposed within the accommodating cavity.

8. The vacuum coating equipment according to claim 4, characterized in that, The system includes a vacuum chamber, which has a vacuum cavity. The substrate stage is located inside the vacuum cavity. The cooling assembly includes a liquid outlet pipe, which includes a first pipe and a second pipe. The first pipe is provided with a liquid delivery pipe for circulating coolant. The second pipe is provided with a vacuum pipe, and the first pipe passes through the vacuum pipe. The first pipe is provided both inside and outside the vacuum chamber, and the second pipe is provided outside the vacuum chamber.

9. A cascade control method, based on the temperature control system according to any one of claims 1 to 3, for temperature control, characterized in that, Includes the following steps: Prepare the heating component, the cooling component, the first PID controller, and the second PID controller; The target temperature value and the actual temperature value are input into the first PID controller for processing, and a first control value is generated. The first control value is input into the heating component, and the heating component adjusts its working state according to the first control value; The first control value and the temperature value of the coolant in the refrigeration component are input into the second PID controller for processing, and a second control value is generated. Input the second control value into the refrigeration component; The refrigeration component adjusts its operating state according to the second control value.

10. The cascade control method according to claim 9, characterized in that, The refrigeration component includes a liquid outlet pipe, which has a liquid outlet. Before inputting the temperature value of the coolant in the refrigeration component into the second PID controller, the method further includes the following step: detecting the temperature of the coolant at the outlet as the temperature value of the coolant in the refrigeration component.

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