A push-pull force testing machine for wafer bump production with protective storage function
By integrating the pressure and tension detection mechanisms into the same fixed frame and equipping it with a lifting rope and clamping device, the problems of inconvenient tool replacement and small detection range in wafer bump testing are solved, achieving convenient operation and high-precision testing.
Patent Information
- Application Number
- CN202310347865.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-04-03
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2043-04-03
AI Technical Summary
Existing wafer bump push-pull force tests require different tools, are inconvenient to operate, and have a small test range, resulting in inaccurate test data.
A push-pull force testing machine with protective storage function is designed. The pressure detection mechanism and the tension detection mechanism are integrated on the same fixed frame. The test angle is adjusted by a lifting rope, an electric winding frame, a buckle and a fixed clamping device. The protective cover, the electric telescopic rod and the vertical and horizontal moving components are combined to achieve equipment protection and convenient operation.
The push-pull force test can be completed on the same device, which improves the convenience of operation and the accuracy of the test data. At the same time, it has a protective storage function, which enhances the practicality of use.
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Figure CN116380656B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field related to wafer bump production detection, and in particular to a push-pull force testing machine for wafer bump production with a protective storage function. Background Art
[0002] Wafers are silicon wafers used to make silicon semiconductor circuits. Silicon is the starting material. After crystalline silicon is purified, it undergoes tensile and compressive testing to ensure its structural strength and stability. During the semiconductor wafer production process, product quality is typically assessed using push-pull testing machines. These machines are used to test the tensile strength, compressive strength, and elongation of various materials, semi-finished products, and finished products. They can perform tests such as peeling, tearing, bending, flexing, and compression, and are suitable for use in industries such as metals, plastics, rubber, textiles, synthetic chemicals, wire and cable, and leather.
[0003] When performing push-pull force tests on existing wafer bumps, different test tools are required for push and pull tests, and the test tools are not on the same device and need to be replaced, which increases inconvenience for users. At the same time, the pull force test can only be performed on the semiconductor wafer bumps in the vertical or horizontal direction. The test range is small, which easily leads to inaccurate test data. To address the above problems, the existing equipment needs to be improved. Summary of the Invention
[0004] The purpose of the present invention is to provide a push-pull force testing machine for wafer bump production with a protective storage function, so as to solve the problem proposed in the above background technology that when performing push-pull force tests on existing wafer bumps, different test tools are required for push and pull tests, and the test tools are not on the same device and need to be replaced, which increases the inconvenience to the user. At the same time, the semiconductor wafer bumps can only be tensile tested in the vertical or horizontal direction, the test range is small, and the test data is easily inaccurate.
[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a push-pull force testing machine for wafer bump production with a protective storage function, comprising a fixed frame, a pressure detection mechanism and a tension detection mechanism,
[0006] A protective cover is sleeved on the outer side of the upper end of the fixed frame, and the lower ends of both sides of the protective cover are engaged with the vertical and horizontal movable components arranged in the grooves corresponding to the inner sides of the fixed frame through the insertion rods, and at the same time, one end of the outer side of the insertion rod is connected to the protective cover through a fixing screw, and a first mounting cross plate is welded on the upper end of one side of the interior of the fixed frame, and the other side of the first mounting cross plate is movably connected to one end of the second mounting cross plate through a rotating rod, and at the same time, the lower end surface of the other end of the second mounting cross plate is fitted with the upper end surface of the bracket arranged on the upper end of the other side of the interior of the fixed frame, and an operation console is installed in the middle of the interior of the fixed frame;
[0007] The pressure detection mechanism is arranged on one side of the interior of the fixed frame, and the position of the pressure detection mechanism is arranged corresponding to the position of the first mounting horizontal plate;
[0008] The tension detection mechanism is arranged on the other side of the fixed frame, and the tension detection mechanism includes a tension detection device and a fixed clamping device. At the same time, the positions of the tension detection device and the fixed clamping device are arranged corresponding to the position of the second mounting horizontal plate.
[0009] Preferably, a handle is installed in the middle of the upper end of the protective cover, and a non-slip cover is sleeved in the middle of the handle. At the same time, multiple storage bags are provided in the middle of the front of the protective cover. A switch button is installed at the lower side of the storage bag, and the switch button is electrically connected to the vertical and horizontal moving components.
[0010] Preferably, both sides of the upper end of the protective cover are connected to the output ends of the electric telescopic rods provided on both sides of the fixed frame.
[0011] Preferably, connecting blocks are symmetrically provided on both sides of the upper end of the second mounting horizontal plate away from the rotating rod, and the two connecting blocks are respectively connected to one end of the corresponding lifting rope through a buckle, and the other ends of the two lifting ropes are respectively connected to the two ends of the electric winding rack arranged on the upper end of the first mounting horizontal plate close to the rotating rod.
[0012] Preferably, the pressure detection mechanism includes a placement seat, a placement groove is provided in the middle of the upper end of the placement seat, and the lower end of the inner side of the placement groove is in contact with the surface of the pressure detector installed inside the placement seat, and a vertical plate is installed on the rear side of the upper end of the placement seat, a guide plate is installed on the upper end of the front of the vertical plate, and a first mounting seat is provided above the guide plate, and the first mounting seat is installed on the lower end of the through hole provided on the first mounting horizontal plate, a first hydraulic cylinder is installed in the middle of the upper end of the first mounting horizontal plate, and the output end of the first hydraulic cylinder passes through the first mounting seat and the guide plate and is connected in the middle of the upper end of the pressure plate, and the two sides of the upper end of the pressure plate are connected to the two sides of the lower end of the guide plate by setting a first buffer spring, and an inspection door is installed on the front of the placement seat, and the position of the inspection door is set corresponding to the position of the pressure detector.
[0013] Preferably, electric push rods are symmetrically arranged on both sides of the pressure detector, and the output ends of the electric push rods pass through the placement seat and extend to the inner side of the placement groove and are connected to the middle of the lower end of the adsorption push plate.
[0014] Preferably, the tension detection device includes a second mounting seat, which is mounted on the lower end of the through hole opened on the second mounting horizontal plate, and a second hydraulic cylinder is mounted on the upper end of the second mounting seat, and the output end of the second hydraulic cylinder passes through the second mounting seat and is connected in the middle of the upper end of the skateboard. A tension detector is mounted in the middle of the lower end of the skateboard, and the detection head of the tension detector is connected to a connecting rod, and a hook is movably connected to the bottom of the connecting rod. Limit rods are arranged on both sides of the bottom of the skateboard, and the limit rods pass through the skateboard and are threadedly connected to the bottom of the second mounting seat.
[0015] Preferably, the fixed clamping device includes a limit frame, a bidirectional screw structure is arranged inside the limit frame, and fixed plates are symmetrically arranged on both sides of the bidirectional screw structure, and clamping plates are symmetrically arranged on opposite sides of the two fixed plates. A mounting block is arranged in the middle of the bottom of the lower end of the limit frame, and the mounting block is connected to the fixed frame through a supporting cross frame. At the same time, the mounting block and the supporting cross frame are movably connected, fixed blocks are welded on both sides of the bottom of the limit frame, and the bottoms of the two fixed blocks are connected to the fixed frame through a second buffer spring.
[0016] Preferably, anti-skid pads are bonded to opposite sides of the two splints, and the surfaces of opposite sides of the two anti-skid pads have protruding dots.
[0017] Compared with the prior art, the beneficial effects of the present invention are: the push-pull force testing machine for wafer bump production with protective storage function,
[0018] (1) In order to solve the problem that when performing push and pull force tests on existing wafer bumps, different test tools are required for push and pull tests, and the test tools are not on the same device and need to be replaced, which increases the inconvenience for the user, the present application is provided with a pressure detection mechanism and a tension detection mechanism. By installing the pressure detection mechanism and the tension detection mechanism in the same fixed frame, it is convenient to operate when performing push and pull tests without running back and forth to pick up the wafer bumps;
[0019] (2) In order to solve the problem that the existing push-pull force testing device can only perform tensile testing on semiconductor wafer bumps in the vertical direction or horizontal direction, the test range is small, and the test data is easily inaccurate, the present application sets a lifting rope, an electric winding frame, a buckle and a second mounting horizontal plate and a fixed clamping device for use, so that the angle of the second mounting horizontal plate can be adjusted, so that when performing a tensile test, it can be clamped by the fixed clamping device, so that the tensile testing device can be stretched at different angles, thereby obtaining complete measurement data when the wafer bump is subjected to a tensile test, thereby improving the accuracy of the measurement;
[0020] (3) In order to solve the problem that the existing push-pull force testing machine has no protective storage function when in use, the present application is provided with a protective cover, an electric telescopic rod, a vertical and horizontal moving component and an insertion rod. The insertion rod facilitates the connection between the protective cover and the vertical and horizontal moving component, so that the protective cover is sleeved on the outside of the fixed frame to protect the equipment inside the fixed frame. At the same time, the electric telescopic rod and the vertical and horizontal moving component are used in combination to facilitate the lifting and lowering of the dust cover for testing and storage, thereby improving the practicality of use. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is a schematic diagram of the front cross-sectional structure of the present invention;
[0022] Figure 2 For the present invention Figure 1 A in the middle is an enlarged structural diagram;
[0023] Figure 3 For the present invention Figure 1 The enlarged structural diagram at B in the middle;
[0024] Figure 4 This is a schematic diagram of the cross-sectional structure of the pressure detection mechanism of the present invention;
[0025] Figure 5 For the present invention Figure 4 The enlarged structural diagram at C in the middle;
[0026] Figure 6 This is a front view structural diagram of the tension detection device of the present invention;
[0027] Figure 7 This is a front view structural diagram of the fixed frame of the present invention;
[0028] Figure 8 It is a front view structural schematic diagram of the present invention.
[0029] In the figure: 1. Fixed frame; 101. Electric telescopic rod; 102. Bracket; 2. Vertical and horizontal moving components; 3. Protective cover; 301. Handle; 302. Anti-slip cover; 303. Storage bag; 304. Switch button; 4. Insert rod; 5. First mounting horizontal plate; 6. Second mounting horizontal plate; 601. Connecting block; 7. Rotating rod; 8. Lifting rope; 801. Electric rewinding rack; 802. Buckle; 9. Operation console; 10. Pressure detection mechanism; 1001. Placement seat; 1002. Placement slot; 1003. Pressure detector; 1004. Electric push rod; 1005. Adsorption push plate; 1006. Vertical plate; 1007. Guide plate; 100 8. First mounting seat; 1009. First hydraulic cylinder; 1010. Pressure plate; 1011. First buffer spring; 1012. Inspection door; 11. Tension detection device; 1101. Second mounting seat; 1102. Second hydraulic cylinder; 1103. Slide plate; 1104. Tension detector; 1105. Connecting rod; 1106. Draw hook; 1107. Limit rod; 12. Fixed clamping device; 1201. Limit frame; 1202. Bidirectional screw structure; 1203. Fixed plate; 1204. Clamp; 1205. Anti-slip pad; 1206. Mounting block; 1207. Support cross frame; 1208. Fixed block; 1029. Second buffer spring. DETAILED DESCRIPTION
[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0031] See also Figure 1-8 The present invention provides a technical solution: a push-pull force testing machine for wafer bump production with a protective storage function, according to Figure 1 、 Figure 2 and Figure 8 As shown, a protective cover 3 is sleeved on the outer side of the upper end of the fixed frame 1, and the lower ends of both sides of the protective cover 3 are engaged with the vertical and horizontal moving components 2 set in the corresponding grooves on the inner side of the fixed frame 1 through the insertion rod 4. At the same time, one end of the outer side of the insertion rod 4 is connected to the protective cover 3 through a fixing screw. The insertion rod 4 is used to facilitate the connection of the protective cover 3 to the outer side of the fixed frame 1. At the same time, the vertical and horizontal moving components 2 are used to facilitate the lifting of the protective cover 3. The two sides of the upper end of the interior of the protective cover 3 are connected to the output ends of the electric telescopic rods 101 set on both sides of the fixed frame 1. The electric telescopic rods 101 are used to improve the stability of the protective cover 3 during lifting.
[0032] Further explanation: a handle 301 is installed in the middle of the upper end of the protective cover 3, which is convenient for taking the entire device, and an anti-slip sleeve 302 is connected in the middle of the handle 301, so that the handle 301 has an anti-slip effect. At the same time, a plurality of storage bags 303 are provided in the middle of the front of the protective cover 3 to facilitate the storage of tools. A switch button 304 is installed at the lower side of the storage bag 303, and the switch button 304 is electrically connected to the vertical and horizontal moving component 2, which is convenient for controlling the vertical and horizontal moving component 2 and the electric telescopic rod 101, thereby facilitating the lifting and lowering of the protective cover 3.
[0033] according to Figure 1 and Figure 7 As shown, a first mounting cross plate 5 is welded to the upper end of one side of the interior of the fixed frame 1, and the other side of the first mounting cross plate 5 is movably connected to one end of the second mounting cross plate 6 through a rotating rod 7. At the same time, the lower end surface of the other end of the second mounting cross plate 6 is fitted with the upper end surface of the bracket 102 provided at the upper end of the other side of the interior of the fixed frame 1. An operation console 9 is installed in the middle of the interior of the fixed frame 1. The operation console 9 facilitates the operation of the pressure detection mechanism 10 and the tension detection mechanism in the device.
[0034] Further explanation: connecting blocks 601 are symmetrically provided on both sides of the upper end of the second mounting horizontal plate 6 away from the rotating rod 7, and the two connecting blocks 601 are respectively connected to one end of the corresponding lifting rope 8 through a buckle 802. At the same time, the other ends of the two lifting ropes 8 are respectively connected to the two ends of the electric winding rack 801 arranged at the upper end of the first mounting horizontal plate 5 close to the rotating rod 7. The lifting rope 8 is wound up by the electric winding rack 801, which facilitates pulling the second mounting horizontal plate 6 to rotate, thereby adjusting the pulling inclination angle of the tension detection device 11, so as to facilitate the tension detection of the wafer bumps from different angles and improve the accuracy of the detection results.
[0035] according to Figure 1 、 Figure 4 、 Figure 5 and Figure 7 As shown, the pressure detection mechanism 10 is arranged on one side inside the fixed frame 1 , and the position of the pressure detection mechanism 10 is arranged corresponding to the position of the first mounting horizontal plate 5 .
[0036] Specifically, the pressure detection mechanism 10 includes a placement seat 1001, a placement groove 1002 is opened in the middle of the upper end of the placement seat 1001, and the lower end of the inner side of the placement groove 1002 is in contact with the surface of the pressure detector 1003 installed inside the placement seat 1001, so that when the pressure detection is performed, the pressure detector 1003 can detect the pressure value borne by the wafer bump, thereby improving the accuracy of the detection data. At the same time, a vertical plate 1006 is installed on the rear side of the upper end of the placement seat 1001, a guide plate 1007 is installed on the upper end of the front of the vertical plate 1006, and a first mounting seat 1008 is provided above the guide plate 1007. At the same time, the first mounting seat 1008 is installed at the lower end of the through hole opened on the first mounting horizontal plate 5, and the first mounting horizontal plate 5 is installed in the middle of the upper end. A first hydraulic cylinder 1009 is installed, and the output end of the first hydraulic cylinder 1009 passes through the first mounting seat 1008 and the guide plate 1007 and is connected to the middle of the upper end of the pressure plate 1010. At the same time, the two sides of the upper end of the pressure plate 1010 are connected to the two sides of the lower end of the guide plate 1007 by setting a first buffer spring 1011. The guide plate 1007 and the first buffer spring 1011 make the pressure plate 1010 have a certain stability when moving downward. The first hydraulic cylinder 1009 pushes the pressure plate 1010 to move downward, which is convenient for pressure testing of the wafer bumps placed in the placement slot 1002. An inspection door 1012 is installed on the front of the placement seat 1001, and the position of the inspection door 1012 is set corresponding to the position of the pressure detector 1003.
[0037] Further explanation: electric push rods 1004 are symmetrically arranged on both sides of the pressure detector 1003, and the output end of the electric push rod 1004 passes through the placement seat 1001 and extends to the inner side of the placement groove 1002 and is connected to the middle of the lower end of the adsorption push plate 1005. The electric push rod 1004 pushes the adsorption push plate 1005 to move upward, which facilitates the wafer bumps after pressure detection to be pushed out from the placement groove 1002, thereby facilitating personnel to take it and improving the practicality of use.
[0038] according to Figure 1 、 Figure 3 、 Figure 6 and Figure 7 As shown, the tension detection mechanism is arranged on the other side of the fixed frame 1, and the tension detection mechanism includes a tension detection device 11 and a fixed clamping device 12. At the same time, the positions of the tension detection device 11 and the fixed clamping device 12 are arranged corresponding to the position of the second mounting horizontal plate 6.
[0039] Specifically, the tension detection device 11 includes a second mounting base 1101, which is mounted on the lower end of the through hole opened on the second mounting horizontal plate 6, and a second hydraulic cylinder 1102 is mounted on the upper end of the second mounting base 1101. At the same time, the output end of the second hydraulic cylinder 1102 passes through the second mounting base 1101 and is connected to the middle of the upper end of the slide 1103. A tension detector 1104 is mounted in the middle of the lower end of the slide 1103, and the detection head of the tension detector 1104 is connected to the connecting rod 1105. At the same time, a hook 1106 is movably connected to the bottom of the connecting rod 1105, and the slide 1103 is pushed downward by the second hydraulic cylinder 1102, so that the hook 1106 on the output end of the tension detector 1104 is connected to the upper end of the wafer bump. Limit rods 1107 are set on both sides below the slide 1103, and the limit rods 1107 pass through the slide 1103 and are threadedly connected to the bottom of the second mounting seat 1101. Through the limit rods 1107, the slide 1103 has a certain degree of stability when moving.
[0040] Specifically, the fixed clamping device 12 includes a limit frame 1201, a bidirectional screw structure 1202 is provided inside the limit frame 1201, and fixed plates 1203 are symmetrically provided on both sides of the bidirectional screw structure 1202, and clamping plates 1204 are symmetrically provided on opposite sides of the two fixed plates 1203. The bidirectional screw structure 1202 drives the fixed plates 1203 to move, so that the clamping plates 1204 clamp and fix the two sides of the bottom of the wafer bump. Anti-skid pads 1205 are adhered to the opposite sides of the two clamping plates 1204, and the opposite sides of the two anti-skid pads 1205 have protruding dots on the surface, which increases the friction between the clamping plates 1204 and the wafer bump surface, so that the wafer bump is not easy to fall off during the tensile test. To improve the practicality of use, a mounting block 1206 is provided in the middle of the bottom of the lower end of the limit frame 1201, and the mounting block 1206 is connected to the fixed frame 1 through a supporting cross frame 1207. At the same time, the mounting block 1206 and the supporting cross frame 1207 are movably connected, so that when pulling, the limit frame 1201 can be adjusted according to the pulling angle. Fixed blocks 1208 are welded on both sides of the bottom of the limit frame 1201, and the bottoms of the two fixed blocks 1208 are connected to the fixed frame 1 through a second buffer spring 1029. The fixed blocks 1208 and the second buffer spring 1029 are used to the bottom, which facilitates the support of both sides of the limit frame 1201, so that when the wafer bumps are installed, the limit frame 1201 is in a horizontal state.
[0041] The directions or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the accompanying drawings. They are merely simplified descriptions for the convenience of describing the present invention, and do not indicate or imply that the devices or elements referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the protection content of the present invention.
[0042] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A push-pull force testing machine for wafer bump production with a protective storage function, comprising a fixed frame (1), a pressure detection mechanism (10) and a tension detection mechanism, characterized in that: The outer side of the upper end of the fixed frame (1) is sleeved with a protective cover (3), and the lower ends of both sides of the protective cover (3) are connected to the vertical and horizontal moving components (2) arranged in the grooves corresponding to the inner side of the fixed frame (1) through the insertion rod (4), and at the same time, one end of the outer side of the insertion rod (4) is connected to the protective cover (3) through a fixing screw. A first mounting cross plate (5) is welded to the upper end of one side of the interior of the fixed frame (1), and the other side of the first mounting cross plate (5) is movably connected to one end of the second mounting cross plate (6) through a rotating rod (7), and at the same time, the lower end surface of the other end of the second mounting cross plate (6) is in contact with the upper end surface of the bracket (102) arranged at the upper end of the other side of the interior of the fixed frame (1), and an operation console (9) is installed in the middle of the interior of the fixed frame (1); The pressure detection mechanism (10) is arranged on one side of the interior of the fixed frame (1), and the position of the pressure detection mechanism (10) is arranged corresponding to the position of the first mounting horizontal plate (5). The pressure detection mechanism (10) includes a placement seat (1001), a placement groove (1002) is provided in the middle of the upper end of the placement seat (1001), and the lower end of the inner side of the placement groove (1002) is in contact with the surface of the pressure detector (1003) installed inside the placement seat (1001), and a vertical plate (1006) is installed on the rear side of the upper end of the placement seat (1001), a guide plate (1007) is installed on the upper end of the vertical plate (1006), and the first mounting seat (1001) is provided above the guide plate (1007). 008), and at the same time, the first mounting seat (1008) is mounted on the lower end of the through hole opened on the first mounting horizontal plate (5), and a first hydraulic cylinder (1009) is installed in the middle of the upper end of the first mounting horizontal plate (5), and the output end of the first hydraulic cylinder (1009) passes through the first mounting seat (1008) and the guide plate (1007) and is connected to the middle of the upper end of the pressure plate (1010), and at the same time, the upper ends of the pressure plate (1010) are connected to the lower ends of the guide plate (1007) by setting a first buffer spring (1011), and an inspection door (1012) is installed on the front of the placement seat (1001), and the position of the inspection door (1012) is set corresponding to the position of the pressure detector (1003); The tension detection mechanism is arranged on the other side of the fixed frame (1), and the tension detection mechanism includes a tension detection device (11) and a fixed clamping device (12), and the positions of the tension detection device (11) and the fixed clamping device (12) are arranged corresponding to the position of the second mounting horizontal plate (6), and the tension detection device (11) includes a second mounting seat (1101), and the second mounting seat (1101) is installed at the lower end of the inner through hole opened on the second mounting horizontal plate (6), and the second mounting seat (1101) is installed at the lower end of the inner through hole opened on the second mounting horizontal plate (6). A second hydraulic cylinder (1102) is installed at the upper end of the mounting seat (1101), and the output end of the second hydraulic cylinder (1102) passes through the second mounting seat (1101) and is connected to the middle of the upper end of the slide (1103). A tension detector (1104) is installed at the middle of the lower end of the slide (1103), and the detection head of the tension detector (1104) is connected to a connecting rod (1105). At the same time, a hook (1106) is movably connected to the bottom of the connecting rod (1105). The slide (1103) Limit rods (1107) are provided on both sides of the bottom, and the limit rods (1107) pass through the slide (1103) and are threadedly connected to the bottom of the second mounting seat (1101). The fixing clamping device (12) includes a limit frame (1201), a bidirectional screw rod structure (1202) is provided inside the limit frame (1201), and fixed plates (1203) are symmetrically provided on both sides of the bidirectional screw rod structure (1202), and the two fixed plates (1203) are symmetrically provided on the opposite side. 1204), a mounting block (1206) is provided in the middle of the bottom of the lower end of the limit frame (1201), and the mounting block (1206) is connected to the fixed frame (1) through a supporting cross frame (1207), and the mounting block (1206) and the supporting cross frame (1207) are movably connected, and fixed blocks (1208) are welded on both sides of the bottom of the limit frame (1201), and the bottoms of the two fixed blocks (1208) are connected to the fixed frame (1) through a second buffer spring (1209).
2. The push-pull force testing machine for wafer bump production with a protective storage function according to claim 1, characterized in that: A handle (301) is installed in the middle of the upper end of the protective cover (3), and an anti-slip cover (302) is sleeved in the middle of the handle (301). At the same time, a plurality of storage bags (303) are provided in the middle of the front of the protective cover (3). A switch button (304) is installed below one side of the storage bag (303), and the switch button (304) is electrically connected to the vertical and horizontal moving component (2).
3. The push-pull force testing machine for wafer bump production with a protective storage function according to claim 2, wherein: Both sides of the upper end of the interior of the protective cover (3) are connected to the output ends of the electric telescopic rods (101) provided on both sides of the fixed frame (1).
4. The push-pull force testing machine for wafer bump production with a protective storage function according to claim 1, wherein: Connecting blocks (601) are symmetrically arranged on both sides of the upper end of the second mounting horizontal plate (6) away from the rotating rod (7), and the two connecting blocks (601) are respectively connected to one end of the corresponding lifting rope (8) through a buckle (802), and the other ends of the two lifting ropes (8) are respectively connected to the two ends of the electric winding frame (801) arranged on the upper end of the first mounting horizontal plate (5) close to the rotating rod (7).
5. The push-pull force testing machine for wafer bump production with a protective storage function according to claim 1, wherein: Electric push rods (1004) are symmetrically arranged on both sides of the pressure detector (1003), and the output ends of the electric push rods (1004) pass through the placement seat (1001) and extend to the inner side of the placement groove (1002) and are connected to the middle of the lower end of the adsorption push plate (1005).
6. The push-pull force testing machine for wafer bump production with a protective storage function according to claim 1, wherein: An anti-skid pad (1205) is bonded to one side opposite to the two splints (1204), and the surfaces of the two anti-skid pads (1205) on one side opposite to the other have protruding dots.
Citation Information
Patent Citations
Push-pull force testing machine for semiconductor wafer bump production
CN109211672A