A compact soft X-ray spectrometer

Abstract

The present invention discloses a compact soft X-ray energy spectrometer, comprising a front-end aiming CCD camera, an X-ray neutral attenuator, a filter monitoring CCD, a gated metal filter, an aperture-limiting diaphragm, an X-ray plane mirror, a collimation monitoring CCD, an X-ray scintillator diaphragm, and an X-ray photodiode. The present invention provides a compact soft X-ray energy spectrometer that is more than 100 times smaller than conventional soft X-ray spectrometers. It can be used on a diagnostic platform to achieve efficient multi-angle energy spectrum testing, reducing maintenance and processing costs while improving operational convenience and test accuracy. This solves existing technical issues with spectrometer miniaturization, modular integration of spectrometer dispersion elements, rapid online and offline alignment, and online monitoring capabilities.

Description

Technical Field

[0001] The present invention relates to the technical field of soft X-ray spectrometers, and in particular to a compact soft X-ray spectrometer. Background Art

[0002] In inertial confinement fusion (ICF) experiments, most of the energy from the laser-target interaction is converted into soft X-rays with photon energies ranging from tens to thousands of eV. Measuring the energy spectrum and time course of the soft X-ray radiation flux is a key tool for understanding ICF physics. The energy spectrum response of the optical components used in soft X-ray spectrometers can be absolutely calibrated, enabling absolute measurement of the hohlraum's equivalent radiation temperature. Furthermore, as multi-channel spectrometers, spectrum analysis can also yield important physical information such as the energy spectrum distribution. However, traditional multi-channel soft X-ray spectrometers are bulky, require numerous components, and require extensive calibration and maintenance. Furthermore, online status verification of spectrometer components (filters, mirrors, apertures, and optical path alignment) is difficult. Online alignment cannot achieve rapid and accurate resetting, is difficult, and requires significant effort. Furthermore, spectrometers lack online component inspection and optical path alignment monitoring, making it impossible to verify the online status of filters and alignment, and consequently, the reliability of the device. These issues severely limit their utility.

[0003] In the prior art:

[0004] a. A multi-channel soft X-ray spectrometer uses multiple channels, each equipped with a different filter, plane mirror, and XRD. This divides the energy spectrum response from low to high into multiple energy segments, enabling measurement of the radiation energy spectrum emitted from the diagnostic aperture. Finally, the radiation flux data from multiple channels is deconstructed to obtain the hohlraum radiation spectrum data.

[0005] The multi-channel soft X-ray spectrometer is based on calibrated X-ray filters, grazing incidence X-ray reflectors and X-ray diodes (XRD). The filter removes the low-energy part, while the grazing incidence X-ray reflector removes the high-energy part. In this way, the X-ray energy spectrum is divided into an energy range for measurement through the low-energy cutoff of the filter and the high-energy cutoff of the reflector. The soft X-ray energy spectrum is divided into many energy channels by filters and reflectors, and the spectral intensity of each energy channel is measured. The entire energy spectrum is given by the intensity of multiple energy channels. The filtering method spectrometry is configured with a windowless soft X-ray diode (XRD) as a detector to form a soft X-ray detection channel system. The XRD is equipped with a high-voltage power supply system, and the signal is transmitted to the digital oscilloscope through a microwave cable to complete the data acquisition. The measurement principle is shown in Figure 1 , the typical detection channel response function is shown in Figure 2-Figure 5 . Figure 2-Figure 5 They are respectively the carbon filter transmittance curve; XRD (Al) sensitivity curve; 5° Ni plane mirror reflectivity curve; and detection system response function.

[0006] b. Disadvantages of existing technology:

[0007] It is bulky, requires a lot of installation and maintenance work, and can only be used at fixed angles; the channels are designed independently, and the component replacement process is complicated and labor-intensive; after offline aiming, fast and accurate online resetting cannot be achieved, and online aiming is difficult and labor-intensive; there is no online filter detection and collimation status monitoring function, and the reliability of the system cannot be determined online.

[0008] The above content is only used to assist in understanding the technical solution of the present invention and does not constitute an admission that the above content is prior art. Summary of the Invention

[0009] The main purpose of the present invention is to provide a compact soft X-ray spectrometer, aiming to solve the current technical problems of spectrometer miniaturization design, modular integrated design of spectrometer dispersion elements, online and offline rapid alignment, and online monitoring function.

[0010] To achieve the above-mentioned object, the present invention provides a compact soft X-ray spectrometer, which includes a front-end aiming CCD camera, an X-ray neutral attenuator, a filter monitoring CCD, a gated metal filter, an aperture-limiting diaphragm, an X-ray plane mirror, a collimating monitoring CCD, an X-ray scintillator diaphragm, and an X-ray photodiode; wherein:

[0011] The light source to be measured is placed in front of the X-ray neutral attenuation plate. The X-rays radiated by the light source to be measured pass through the X-ray neutral attenuation plate, the gate metal filter, the aperture diaphragm, and then enter the X-ray plane mirror at grazing incidence. After being reflected by the mirror, they pass through the X-ray scintillator aperture and finally irradiate the cathode of the X-ray photodiode, generating photoelectrons, which are then detected.

[0012] The X-ray plane mirror suppresses the high energy portion of the energy spectrum to be measured;

[0013] The gating metal filter gates the X-ray spectral response irradiated to the X-ray diode detector and divides the measured energy spectrum through multiple channels;

[0014] The X-ray scintillator aperture monitors the collimation state of the light path;

[0015] The front-end aiming CCD camera can realize accurate aiming and positioning of the diagnostic system offline and online;

[0016] The filter monitoring CCD realizes online detection of the filter status;

[0017] The collimation monitoring CCD realizes the monitoring of the system test light path status.

[0018] Optionally, the aperture-limiting diaphragm is used to limit the incident size of the light source, ensuring that all X-rays passing through the diaphragm are irradiated onto the cathode of the X-ray photodiode through the X-ray plane mirror.

[0019] Optionally, a front-end aiming CCD camera is used to achieve precise positioning. After offline aiming, the spatial position of the target point is recorded by two CCDs, and precise resetting is achieved online through the recorded spatial position.

[0020] Optionally, the X-ray scintillator diaphragm is located at the front end of the cathode, and the light spot passing through the X-ray plane mirror can pass through the X-ray scintillator diaphragm and irradiate the cathode completely. If the light path deviates, the light spot will irradiate the X-ray scintillator diaphragm, generate luminescence and be recorded by the collimated monitoring CCD.

[0021] Optionally, the X-ray neutral attenuation sheet is of an integrated design and can be disassembled and replaced as a whole or individually.

[0022] Optionally, the gating metal filter is of an integrated design and can be disassembled and replaced as a whole or individually.

[0023] Optionally, the X-ray plane mirror adopts an integrated array design, which can be collimated and angle-adjusted as a whole.

[0024] Optionally, the X-ray photodiode adopts a non-vacuum sealed design, all channel photodiodes can be centrally loaded with high voltage, and all detectors are integrally encapsulated in a shielding shell to ensure the detector's anti-electromagnetic interference performance.

[0025] The present invention proposes a compact soft X-ray spectrometer, comprising a front-end aiming CCD camera, an X-ray neutral attenuator, a filter monitoring CCD, a gated metal filter, an aperture-limiting diaphragm, an X-ray plane mirror, a collimation monitoring CCD, an X-ray scintillator diaphragm, and an X-ray photodiode. The present invention provides a compact soft X-ray spectrometer that is more than 100 times smaller than conventional soft X-ray spectrometers. It can be used on a diagnostic platform to achieve efficient multi-angle energy spectrum testing, reducing maintenance and processing costs while improving operational convenience and test accuracy. This solves existing technical issues related to spectrometer miniaturization, modular integration of spectrometer dispersion elements, rapid online and offline alignment, and online monitoring. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 Schematic diagram of the measurement principle of a multi-channel soft X-ray spectrometer.

[0027] Figure 2 is the carbon filter transmittance curve.

[0028] Figure 3is the XRD (Al) sensitivity curve.

[0029] Figure 4 This is the reflectivity curve of 5°Ni plane mirror.

[0030] Figure 5 is the detection system response function.

[0031] Figure 6 Schematic diagram of the measurement principle of the compact soft X-ray spectrometer.

[0032] Figure 7 Schematic diagram of the compact soft X-ray spectrometer structure.

[0033] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0034] It should be understood that the specific embodiments described herein are only used to illustrate the invention and are not intended to limit the invention.

[0035] The following will clearly and completely describe the technical solutions in the embodiments of the invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the invention, not all of the embodiments. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0036] It should be noted that all directional indications in the embodiments of the invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0037] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that ordinary technicians in this field can implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the invention.

[0038] In order to solve this problem, various embodiments of the compact soft X-ray spectrometer of the present invention are proposed. Figure 6-Figure 7 , Figure 6 This is a schematic diagram of the principle of a compact soft X-ray spectrometer according to an embodiment of the present invention. Figure 7 This is a schematic structural diagram of a compact soft X-ray spectrometer according to an embodiment of the present invention.

[0039] This embodiment provides a compact soft X-ray energy spectrometer, which provides a compact soft X-ray energy spectrometer for accurately measuring the spectrum generated by a pulsed X-ray radiation source, including a front-end aiming CCD camera 1, an X-ray neutral attenuation plate 2, a filter monitoring CCD 3, a gating metal filter 4, an aperture limiting diaphragm 5, an X-ray plane mirror 6, a collimation monitoring CCD 7, an X-ray scintillator diaphragm 8 and an X-ray photodiode 9. The light source to be measured is placed in front of the X-ray neutral attenuation plate 2. The X-rays radiated by the light source to be measured pass through the X-ray neutral attenuation plate 2, the gated metal filter 4, and the aperture diaphragm 5, then enter the X-ray plane mirror 6 at grazing incidence. After being reflected by the mirror, they pass through the X-ray scintillator aperture 8 and finally irradiate the cathode of the X-ray photodiode 9, generating photoelectrons for detection. The X-ray plane mirror 6 suppresses the high-energy portion of the energy spectrum to be measured. The gated metal filter 4 gates the X-ray spectral response irradiated to the X-ray diode detector 9, dividing the energy spectrum to be measured through multiple channels. The X-ray scintillator aperture 8 monitors the collimation status of the optical path. The front-end aiming CCD camera 1 realizes precise aiming and positioning of the diagnostic system both offline and online. The filter monitoring CCD 3 realizes online detection of the filter status. The collimation monitoring CCD 7 realizes monitoring of the system test optical path status.

[0040] In a preferred embodiment, the aperture-limiting diaphragm 5 is used to limit the incident size of the light source, ensuring that all X-rays passing through the diaphragm are irradiated onto the cathode of the X-ray photodiode 9 through the X-ray plane mirror 6 .

[0041] In a preferred embodiment, the front-end aiming CCD camera 1 is used to achieve precise positioning. After offline aiming, the spatial position of the target point is recorded by two CCDs, and precise resetting is achieved online through the recorded spatial position.

[0042] In a preferred embodiment, the X-ray scintillator aperture 8 is located at the front end of the cathode. The light spot passing through the X-ray plane mirror 6 can pass through the X-ray scintillator aperture 8 and irradiate the cathode. If the optical path deviates, the light spot will irradiate the X-ray scintillator aperture 8, generating luminescence that is recorded by the collimation monitoring CCD 7.

[0043] In a preferred embodiment, the X-ray neutral attenuation sheet 2 is of an integrated design and can be disassembled and replaced as a whole or disassembled and replaced in a single channel.

[0044] In a preferred embodiment, the gating metal filter 4 is of an integrated design and can be disassembled and replaced as a whole or individually.

[0045] In a preferred embodiment, the X-ray plane mirror 6 adopts an integrated array design, which can be collimated and angle-adjusted as a whole.

[0046] In a preferred embodiment, the X-ray photodiode 9 adopts a non-vacuum sealed design, all channel photodiodes can be centrally loaded with high voltage, and all detectors are integrally encapsulated in a shielding shell to ensure the detector's anti-electromagnetic interference performance.

[0047] The compact soft X-ray spectrometer of this embodiment is over 100 times smaller than traditional soft X-ray spectrometers. It can be used on a diagnostic platform to achieve efficient multi-angle energy spectrum testing, reducing maintenance and processing costs while improving operational convenience and testing accuracy.

[0048] The above are only preferred embodiments of the invention and are not intended to limit the patent scope of the invention. Any equivalent structure or equivalent process transformation made using the contents of the invention description and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the invention.

Claims

1. A compact soft X-ray spectrometer, characterized in that: The compact soft X-ray spectrometer comprises a front-end aiming CCD camera (1), an X-ray neutral attenuation plate (2), a filter monitoring CCD (3), a gated metal filter (4), an aperture-limiting diaphragm (5), an X-ray plane mirror (6), a collimating monitoring CCD (7), an X-ray scintillator diaphragm (8) and an X-ray photodiode (9); wherein: The light source to be measured is placed in front of the X-ray neutral attenuation plate (2). The X-rays radiated by the light source to be measured pass through the X-ray neutral attenuation plate (2), the gate metal filter (4), the aperture diaphragm (5), and then enter the X-ray plane mirror (6) in a grazing incidence manner. After being reflected by the mirror surface, the X-rays pass through the X-ray scintillator diaphragm (8) and finally irradiate the cathode of the X-ray photodiode (9), generating photoelectrons, which are then detected. The X-ray plane mirror (6) suppresses the high energy portion of the energy spectrum to be measured; The gating metal filter (4) gates the X-ray spectral response irradiated to the X-ray photodiode (9), and divides the measured energy spectrum through multiple channels; The X-ray scintillator aperture (8) monitors the collimation state of the light path; The front-end aiming CCD camera (1) realizes accurate aiming and positioning of the diagnostic system offline and online; The filter monitoring CCD (3) realizes online detection of the filter status; The collimation monitoring CCD (7) enables monitoring of the system test light path status.

2. The compact soft X-ray spectrometer according to claim 1, characterized in that: The aperture-limiting diaphragm (5) is used to limit the incident size of the light source, ensuring that all X-rays passing through the diaphragm are irradiated onto the cathode of the X-ray photodiode (9) via the X-ray plane mirror (6).

3. The compact soft X-ray spectrometer according to claim 1, characterized in that: The front-end aiming CCD camera (1) is used to achieve precise positioning. After offline aiming, the spatial position of the target point is recorded by two CCDs, and precise resetting is achieved online through the recorded spatial position.

4. The compact soft X-ray spectrometer according to claim 1, characterized in that: The X-ray scintillator diaphragm (8) is located at the front end of the cathode. The light spot passing through the X-ray plane mirror (6) can pass through the X-ray scintillator diaphragm (8) and irradiate the cathode. If the light path deviates, the light spot will irradiate the X-ray scintillator diaphragm (8), generate luminescence and be recorded by the collimation monitoring CCD (7).

5. The compact soft X-ray spectrometer according to claim 1, characterized in that: The X-ray neutral attenuation sheet (2) is of an integrated design and can be disassembled and replaced as a whole or disassembled and replaced in a single channel.

6. The compact soft X-ray spectrometer according to claim 1, characterized in that: The gating metal filter (4) is of an integrated design and can be disassembled and replaced as a whole or disassembled and replaced on a single channel basis.

7. The compact soft X-ray spectrometer according to claim 1, characterized in that: The X-ray plane mirror (6) adopts an array integrated design and can be collimated and angle adjusted as a whole.

8. The compact soft X-ray spectrometer according to claim 1, characterized in that: The X-ray photodiode (9) adopts a non-vacuum sealed design, and all channel photodiodes can be centrally loaded with high voltage. All detectors are encapsulated in a shielding shell as a whole to ensure the anti-electromagnetic interference performance of the detector.

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